CN116106649A - Oven easy to radiate heat - Google Patents

Oven easy to radiate heat Download PDF

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Publication number
CN116106649A
CN116106649A CN202111316959.2A CN202111316959A CN116106649A CN 116106649 A CN116106649 A CN 116106649A CN 202111316959 A CN202111316959 A CN 202111316959A CN 116106649 A CN116106649 A CN 116106649A
Authority
CN
China
Prior art keywords
fan
oven
impeller
frame
air outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202111316959.2A
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Chinese (zh)
Inventor
曹佶
赵锴
钱青林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Hangke Instrument Co ltd
Original Assignee
Zhejiang Hangke Instrument Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Hangke Instrument Co ltd filed Critical Zhejiang Hangke Instrument Co ltd
Priority to CN202111316959.2A priority Critical patent/CN116106649A/en
Publication of CN116106649A publication Critical patent/CN116106649A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/003—Environmental or reliability tests
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G01R31/2875—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to heating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • H05K7/20009—Modifications to facilitate cooling, ventilating, or heating using a gaseous coolant in electronic enclosures
    • H05K7/20136—Forced ventilation, e.g. by fans

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Thermal Sciences (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The invention discloses an oven easy to dissipate heat, which comprises a box body, an ageing rack and a cross flow fan, wherein the ageing rack and the cross flow fan are arranged in the box body, the cross flow fan comprises an impeller and an air outlet which is opposite to the impeller, the impeller is parallel to the ageing rack, the ageing rack comprises a plurality of transverse plates, side plates and a carrying frame for carrying the ageing plates, the transverse plates are mutually and parallelly fixed on the side plates, the carrying frame is arranged between two transverse plates in the same horizontal direction, an air duct is arranged between two adjacent transverse plates in the same vertical direction, and the air outlet is opposite to all the air ducts. The air inlet of each layer of aging plate can be uniform, and the chip to be tested is not easy to burn.

Description

Oven easy to radiate heat
Technical Field
The invention relates to the field of semiconductor testing, in particular to an oven easy to dissipate heat.
Background
In the field of semiconductor testing, an oven is usually used, a plurality of layers of burn-in boards are arranged in the oven, a plurality of semiconductors (chips) to be tested are arranged on each layer of burn-in board, and when the oven is used for heating the chips to be tested and then installing or detaching the chips to be tested or adjusting the temperature, the oven is often required to be cooled, and heat dissipation is very important.
In the existing oven, heat dissipation is achieved through more than two axial fans to blow air to the aging rack simultaneously, and because the air emitted by the axial fans is easy to diverge, the air emitted by the fans is likely to interfere with each other, so that the air inlet of each layer of aging board on the aging rack is different, the temperature of each layer of aging board is uneven, the temperature of a semiconductor to be tested is ultrahigh locally, and a chip to be tested is burned out locally.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide an oven easy to dissipate heat, which can lead air inlet to be uniformly received by each layer of aging plates and is not easy to burn out local chips to be tested.
The invention adopts the following technical scheme:
the utility model provides an easy heat dissipation oven, is in including box and setting ageing rack and a cross flow fan in the box, the cross flow fan include the impeller with the air outlet that the impeller set up relatively, the impeller with ageing rack is parallel, ageing rack includes a plurality of diaphragms, curb plate and is used for loading ageing plate carry the thing frame, and a plurality of diaphragms are parallel to each other and fix on the curb plate, carry the thing frame setting between two diaphragms of same horizontal direction, be provided with the wind channel between two adjacent diaphragms of same vertical direction, the air outlet sets up relatively with all wind channels.
Preferably, the oven easy to dissipate heat further comprises a fan frame, the fan frame is fixedly connected with one side, away from the impeller, of the ageing rack, a first fan and a second fan are arranged on the fan frame, and the first fan and the second fan are arranged opposite to the air duct.
Preferably, a plurality of ventilation openings are formed in the box body, and the central line of each ventilation opening coincides with the central line of the first fan or the central line of the second fan.
Preferably, the first fan is an air inlet machine, the second fan is an air outlet machine, and the wind speed of the first fan is equal to the wind speed of the second fan.
Preferably, a third fan is further arranged on the fan frame, and the first fan, the second fan and the third fan are fixed on the fan frame at uniform intervals.
Preferably, the first fan and the third fan are air inlet machines, the second fan is an air outlet machine, and the sum of the wind speed of the first fan and the wind speed of the third fan is equal to the wind speed of the second fan.
Preferably, the first fan, the second fan and the third fan are all air outlet fans, and the sum of the wind speeds of the first fan, the second fan and the third fan is equal to the sum of the wind speeds of the cross-flow fans.
Preferably, the box comprises an upper pavilion layer and a lower pavilion layer, the cross-flow fan further comprises a motor and a belt, the motor drives the impeller to rotate through the belt to discharge air, the motor and the belt are arranged in the upper pavilion layer, and the aging rack and the impeller are arranged in the lower pavilion layer.
Preferably, the transverse plates are vertically connected with the side plates, and the carrying frame is in sliding connection with the two transverse plates in the horizontal direction.
Preferably, the height of the impeller, the height of the air outlet and the height of the aging rack are equal.
Compared with the prior art, the invention has the beneficial effects that:
the oven easy to dissipate heat is provided with the cross-flow fan, and the cross-flow fan can blow uniform wind to each layer of aging board, and can not interfere with each other due to different wind, so that chips to be tested on the local aging board can not be burnt out due to uneven heat dissipation.
Drawings
FIG. 1 is a schematic plan view of an embodiment of an oven with heat dissipation easiness according to the present invention;
FIG. 2 is a schematic plan view of another embodiment of the oven with heat dissipation easiness according to the present invention;
FIG. 3 is a schematic plan view of another embodiment of the oven with heat dissipation easiness in accordance with the present invention;
FIG. 4 is a schematic perspective view of an aging rack according to the present invention;
fig. 5 is a schematic plan view of the aging rack of the present invention.
In the figure: 100. an oven easy to dissipate heat; 10. a case; 11. a pavilion layer; 12. a lower pavilion layer; 13. a vent; 14. a partition plate; 20. a cross flow fan; 21. an impeller; 22. an air outlet; 23. a motor; 24. a belt; 30. an aging rack; 31. a carrying frame; 32. a side plate; 33. a cross plate; 34. an air duct; 40. a fan frame; 41. a first fan; 42. a second fan; 43. and a third fan.
Detailed Description
So that the manner in which the above recited features, features and advantages of the present invention can be understood in detail, a more particular description of the invention, briefly summarized below, may be had by reference to the appended drawings.
In the description of the present invention, it should be noted that, directions or positional relationships indicated by terms such as "upper", "lower", "left", "right", "transverse", "longitudinal", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be configured and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
As shown in fig. 1-4, the oven 100 with easy heat dissipation disclosed by the invention comprises a box body 10, an aging frame 30 and a cross flow fan 20, wherein the aging frame 30 and the cross flow fan 20 are arranged in the box body 10, the cross flow fan 20 comprises an impeller 21 and an air outlet 22 which is opposite to the impeller 21, the impeller 21 is parallel to the aging frame 30, the aging frame 30 comprises a plurality of transverse plates 33, side plates 32 and a carrying frame 31 for carrying the aging plates, the transverse plates 33 are mutually parallel and fixed on the side plates 32, the carrying frame 31 is arranged between two transverse plates 33 in the same horizontal direction, an air duct 34 is arranged between two adjacent transverse plates 33 in the same vertical direction, and the air outlet 22 is opposite to all the air ducts 34.
In the above embodiment, the impeller 21 is parallel to the aging rack 30, so that the wind can be blown to the aging rack 30 to the maximum extent, and the heat of the aging plate on the aging rack can be better dissipated. The plurality of transverse plates 33 are fixed on the side plates 32 in parallel, so that the carrying frames 31 are horizontally arranged on the aging frame 30, and an air duct 34 is arranged between two adjacent transverse plates 33 in the same vertical direction, so that wind energy emitted by the cross-flow fan 20 can be contacted with the aging plates to dissipate heat from the largest area of the air duct 34. The oven 100 is provided with a cross-flow fan 20, the cross-flow fan 20 can blow uniform wind from the air outlet 22, the wind passes through the air duct 34 to radiate the heat of each layer of aging plates, the wind received by each layer of aging plates is not disturbed, the heat of each aging plate is uniform, and the aging plates cannot be burnt out due to less wind heat radiation.
In a preferred embodiment, as shown in fig. 2, the oven 100 further includes a fan frame 40, the fan frame 40 is fixedly connected to a side of the aging frame 30 away from the impeller 21, a first fan 41 and a second fan 42 are disposed on the fan frame 40, and the first fan 41 and the second fan 42 are disposed opposite to the air duct 34. The box 10 is provided with a plurality of ventilation openings 13, and the central line of each ventilation opening 13 coincides with the central line of the first fan 41 or the central line of the second fan 42. Preferably, the first fan 41 is an air inlet machine, and when the second fan 42 is an air outlet machine, the wind speed of the first fan 41 is equal to the wind speed of the second fan 42.
In the above embodiment, the fan frame 40 is a ventilated rectangular parallelepiped frame, the first fan 41 and the second fan 42 may cool the aging plate again through the air duct 34, the first fan 41 and the second fan 42 may also discharge the high-temperature gas in the box 10 through the ventilation opening 13, and the ventilation opening 13 may be closed when the aging plate is warmed. When the first fan 41 is an air inlet machine and the second fan 42 is an air outlet machine, the air emitted from the first fan 41 to the aging plate can be extracted by the second fan 42 to form a circulating air flow, so that the aging plate can be well cooled. The first fan 41, the second fan 42, and the cross-flow fan 20 may be used simultaneously, or may be used singly or in two, and when three fans are started simultaneously, in order to avoid wind speed interference of the cross-flow fan 20, the wind speed of the cross-flow fan 20 should be reduced to less than half of the wind speed of the first fan 41.
In a preferred embodiment, as shown in fig. 3, a third fan 43 is further disposed on the fan frame 40, and the first fan 41, the second fan 42, and the third fan 43 are fixed on the fan frame 40 at uniform intervals. Preferably, the first fan 41 and the third fan 43 are air intake fans, the second fan 42 is an air outlet fan, and the sum of the wind speed of the first fan 41 and the wind speed of the third fan 43 is equal to the wind speed of the second fan 42.
In the above embodiment, the first fan 41, the second fan 42, and the third fan 43 may well cool the burn-in board. When the first fan 41 and the third fan 43 are air intake fans and the second fan 42 is air exhaust fans, the first fan 41 and the third fan 43 blow air to the aging plate, and the second fan 42 is arranged between the first fan 41 and the third fan 43, so that the air blown from the first fan 41 and the third fan 43 can be pumped away by the second fan 42 to form circulating air, interference among various types of air is avoided, and the aging plate can be well cooled. In this embodiment, in order to avoid wind speed disturbance of the cross flow fan 20, the wind speed of the cross flow fan 20 should be reduced to below one of four wind speeds of the first fan 41, even if the cross flow fan 20 is not started.
In another embodiment, as shown in fig. 3, the first fan 41, the second fan 42, and the third fan 43 are all air outlet fans, and the sum of the wind speeds of the first fan 41, the second fan 42, and the third fan 43 is equal to the sum of the wind speeds of the cross-flow fans 20.
In the above embodiment, the first fan 41, the second fan 42, the third fan 43, and the cross flow fan 20 are all started at the same time, and the wind blown out by the cross flow fan 20 may be directly discharged by the first fan 41, the second fan 42, and the third fan 43, thereby forming the direct current wind for cooling the aging plate.
As shown in fig. 3 to 5, in a preferred embodiment, the box 10 includes a pavilion layer 11 and a pavilion layer 12, the through-flow fan 20 further includes a motor 23 and a belt 24, the motor 23 drives the impeller 21 to rotate by the belt 24 to discharge air, the motor 23 and the belt 24 are both disposed in the pavilion layer 11, and the aging rack 30 and the impeller 21 are both disposed in the pavilion layer 12. The transverse plates 33 are vertically connected with the side plates 32, and the carrying frame 31 is slidably connected with the two transverse plates 33 in the horizontal direction. The height of the impeller 21, the height of the air outlet 22 and the height of the aging rack 30 are equal.
In the above embodiment, the upper pavilion 11 and the lower pavilion 12 are separated by the partition 14, and the motor 23 and the belt 24 are disposed on the upper pavilion 11 to prevent the burn-in board from generating heat to burn the motor. The impeller 21 is further provided with a rotating shaft, and the motor 23 drives the rotating shaft to rotate through the belt 24 so as to drive the impeller 21 to rotate. In order to facilitate the installation and the removal of the carrying frame 31, the carrying frame 31 is slidably connected to the transverse plate 33. In order to make each aging plate better receive the wind of the cross-flow fan 20, the height of the impeller 21, the height of the air outlet 22 and the height of the aging rack 30 are equal. In order to make the cross-flow fan 20 and the aging rack 30 more stable, the lower ends of the cross-flow fan 20 and the aging rack 30 are both fixed on the bottom wall of the box 10.
In summary, the heat-dissipating oven 100 can uniformly cool the burn-in board by providing the cross flow fan 20, the first fan 41, the second fan 42 and the third fan 43, so as to prevent the temperature on the local burn-in board from being too high, and the cross flow fan 20 can blow out the wind which is not easy to be disturbed, thereby preventing the chip to be tested from being burnt.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the foregoing embodiments, and that the foregoing embodiments and description are merely illustrative of the principles of this invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, and these changes and modifications fall within the scope of the invention as hereinafter claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (10)

1. An oven easy to dissipate heat, which is characterized in that: including the box with set up ageing rack and a cross-flow fan in the box, the cross-flow fan include the impeller with the air outlet that the impeller set up relatively, the impeller with ageing rack is parallel, ageing rack includes a plurality of diaphragms, curb plate and is used for loading ageing plate carry the thing frame, and a plurality of diaphragms are mutual parallel to be fixed on the curb plate, carry the thing frame setting between two diaphragms of same horizontal direction, be provided with the wind channel between two adjacent diaphragms of same vertical direction, the air outlet sets up relatively with all wind channels.
2. The oven of claim 1, wherein: the oven easy to dissipate heat further comprises a fan frame, the fan frame is fixedly connected with one side, away from the impeller, of the ageing rack, a first fan and a second fan are arranged on the fan frame, and the first fan and the second fan are arranged opposite to the air duct.
3. The oven of claim 2, wherein: the box body is provided with a plurality of ventilation openings, and the central line of each ventilation opening coincides with the central line of the first fan or the central line of the second fan.
4. A thermally conductive oven as claimed in claim 3 wherein: the first fan is an air inlet machine, the second fan is an air outlet machine, and the wind speed of the first fan is equal to the wind speed of the second fan.
5. A thermally conductive oven as claimed in claim 3 wherein: and a third fan is further arranged on the fan frame, and the first fan, the second fan and the third fan are fixed on the fan frame at uniform intervals.
6. The oven according to claim 5, wherein: the first fan and the third fan are air inlets, the second fan is an air outlet, and the sum of the wind speed of the first fan and the wind speed of the third fan is equal to the wind speed of the second fan.
7. The oven according to claim 5, wherein: the first fan, the second fan and the third fan are all air outlet fans, and the sum of the wind speeds of the first fan, the second fan and the third fan is equal to the sum of the wind speeds of the cross-flow fans.
8. The oven according to claim 6, wherein: the box includes pavilion layer and lower pavilion layer, the cross flow fan still includes motor and belt, the motor passes through the belt drives the impeller rotates and air-out, the motor with the belt all sets up in the pavilion layer, ageing rack with the impeller all sets up in the lower pavilion layer.
9. The oven of claim 1, wherein: the transverse plates are vertically connected with the side plates, and the carrying frame is in sliding connection with the two transverse plates in the horizontal direction.
10. The oven of claim 1, wherein: the height of the impeller, the height of the air outlet and the height of the aging rack are equal.
CN202111316959.2A 2021-11-09 2021-11-09 Oven easy to radiate heat Pending CN116106649A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111316959.2A CN116106649A (en) 2021-11-09 2021-11-09 Oven easy to radiate heat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111316959.2A CN116106649A (en) 2021-11-09 2021-11-09 Oven easy to radiate heat

Publications (1)

Publication Number Publication Date
CN116106649A true CN116106649A (en) 2023-05-12

Family

ID=86260229

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111316959.2A Pending CN116106649A (en) 2021-11-09 2021-11-09 Oven easy to radiate heat

Country Status (1)

Country Link
CN (1) CN116106649A (en)

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