CN116102339A - Alumina ceramic forming and processing method for deposition equipment - Google Patents
Alumina ceramic forming and processing method for deposition equipment Download PDFInfo
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- CN116102339A CN116102339A CN202211729376.7A CN202211729376A CN116102339A CN 116102339 A CN116102339 A CN 116102339A CN 202211729376 A CN202211729376 A CN 202211729376A CN 116102339 A CN116102339 A CN 116102339A
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 44
- 230000008021 deposition Effects 0.000 title claims abstract description 13
- 238000003672 processing method Methods 0.000 title description 7
- 238000012545 processing Methods 0.000 claims abstract description 42
- 238000005245 sintering Methods 0.000 claims abstract description 36
- 239000000843 powder Substances 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 23
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 20
- 238000003754 machining Methods 0.000 claims abstract description 11
- 238000003825 pressing Methods 0.000 claims abstract description 11
- 238000000227 grinding Methods 0.000 claims abstract description 9
- 238000000462 isostatic pressing Methods 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 239000000919 ceramic Substances 0.000 abstract description 9
- 238000005516 engineering process Methods 0.000 abstract description 5
- 238000004814 ceramic processing Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 10
- 230000008569 process Effects 0.000 description 8
- 238000013461 design Methods 0.000 description 6
- 230000007547 defect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000001694 spray drying Methods 0.000 description 2
- 206010066054 Dysmorphism Diseases 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009694 cold isostatic pressing Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
- B28B11/08—Apparatus or processes for treating or working the shaped or preshaped articles for reshaping the surface, e.g. smoothing, roughening, corrugating, making screw-threads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
- B28B11/24—Apparatus or processes for treating or working the shaped or preshaped articles for curing, setting or hardening
- B28B11/243—Setting, e.g. drying, dehydrating or firing ceramic articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B3/00—Producing shaped articles from the material by using presses; Presses specially adapted therefor
- B28B3/003—Pressing by means acting upon the material via flexible mould wall parts, e.g. by means of inflatable cores, isostatic presses
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
The invention discloses a method for forming and processing alumina ceramics on deposition equipment, and relates to the technical field of ceramic processing. The invention comprises the following steps: s1: pouring alumina ceramic powder into the spherical grinding tool A; s2: pressing the alumina ceramic powder to be treated in the step S1 by using a cold isostatic press, and performing isostatic pressing to form a hollow hemispherical blank body B; s3: rough machining is carried out on the blank body B pressed and formed in the step S2, and the spherical surface of the blank body B is placed on a sintering jig C; s4: placing the sintering jig C in which the blank body B is placed in the S3 into a sintering furnace for sintering, and changing the blank body B into a compact polycrystalline ceramic material D; s5: clamping and fixing the spherical surface of the polycrystalline ceramic material D obtained in the step S4 by using a jig E; s6: carrying out surface processing on the polycrystalline ceramic material D clamped and fixed in the S5 by adopting a cutter F to obtain a product G; the scheme optimizes the aspects of forming, sintering, finish machining and the like in the processing technology on the basis of the prior art.
Description
Technical Field
The invention relates to the technical field of ceramic processing, in particular to an alumina ceramic forming and processing method used on deposition equipment.
Background
In recent years, with further development of the semiconductor industry, alumina ceramic pieces of various shapes applied to various devices have been developed. The existing alumina ceramic piece has a special-shaped product with a large-size bell housing integrally formed into a hollow hemispherical structure, and the product has the defects of high difficulty in forming, sintering and finish machining in the machining process, long machining time, low productivity and high machining cost.
Chinese patent publication No. CN102490253a discloses a method for manufacturing alumina ceramic crucible by isostatic pressing and its forming die. The method is characterized by comprising the following steps of: (1) Alpha alumina powder, an additive and water are mixed and ground to prepare uniform slurry; (2) Sieving the slurry, removing iron, and granulating by spraying through a spray drying tower; (3) Spray granulating in a spray drying tower, loading into a mould, and pressing to obtain a crucible preform blank; (4) And (3) after trimming the blank, performing high-temperature sintering to obtain the alumina ceramic crucible. The method has the defect that the aluminum oxide ceramic part with the large-size special-shaped structure cannot be processed and effectively processed.
Disclosure of Invention
The invention overcomes the defects of large processing difficulty, long processing time, lower productivity and higher processing cost of the processing method for processing the alumina ceramic piece with the large-size special-shaped structure in the prior art, and provides the alumina ceramic forming and processing method for the deposition equipment, which can well solve the problems of large processing difficulty and long processing time of the large-size special-shaped product, and can also greatly improve the productivity and reduce the processing cost.
In order to solve the technical problems, the invention adopts the following technical scheme: a method for forming and processing alumina ceramics used on deposition equipment comprises the following steps:
s1: pouring alumina ceramic powder into the spherical grinding tool A;
s2: pressing the alumina ceramic powder to be treated in the step S1 by using a cold isostatic press, and performing isostatic pressing to form a hollow hemispherical blank body B;
s3: rough machining is carried out on the blank body B pressed and formed in the step S2, and the spherical surface of the blank body B is placed on a sintering jig C;
s4: placing the sintering jig C in which the blank body B is placed in the S3 into a sintering furnace for sintering, and changing the blank body B into a compact polycrystalline ceramic material D;
s5: clamping and fixing the spherical surface of the polycrystalline ceramic material D obtained in the step S4 by using a jig E;
s6: and (5) carrying out surface processing on the polycrystalline ceramic material D clamped and fixed in the S5 by adopting a cutter F to obtain a product G.
In the scheme provided by the application, the steps from powder filling to pressing and then sintering are all optimized from the aspects of forming, sintering, finishing and the like by changing the processing technology on the basis of the prior art. An effective balance is achieved in the aspects of combining the processing method and the processing cost, and the stable volume production is realized by improving the processing technology and the processing jig for a plurality of times. Compared with the traditional process, the scheme of the application is designed and developed to use a series of improved processes, such as: the special-shaped forming die, the sintering stabilizing jig, the clamping jig, the special cutter and the like greatly improve the processing efficiency. The product processed by the method can not only meet the use requirements of customers, but also greatly improve the productivity and reduce the processing cost.
As the preference, spherical grinding apparatus A in S1 includes the transport base, set up lower die body, rubber lower cover and the setting of on the transport base with last die body under the rubber, the rubber lower cover sets up on the transport base, and arranges along lower die body outer wall and install, forms an arc cavity between lower die body and the last die body, is equipped with the feed inlet on the last die body, is provided with the rubber upper cover on the feed inlet, and the aluminium oxide ceramic powder in S1 is poured into in the arc cavity through the feed inlet. The structure is compact in design, and is convenient to isostatic press and form into a hollow hemispherical blank body B through a cold isostatic press machine.
Preferably, the lower die body adopts a spherical metal core rod, and the upper die body adopts a spherical rubber barrel, so that the alumina ceramic powder poured between the upper die body and the lower die body is molded into a hollow hemispherical structure under the pressing of an inter-cooling isostatic press in S2. The upper die body and the lower die body are simple in structure and are convenient for forming the hollow hemispherical structure of the alumina ceramic powder.
Preferably, the carrying base comprises a plurality of fixed frames and mounting seats arranged on the fixed frames, the mounting seats are of annular structures, the lower die body is fixedly arranged on the mounting seats, the outer end faces of the mounting seats are provided with outward flanges, the outward flanges are turned over to one side far away from the fixed frames, an annular mounting cavity can be formed by the lower die body, the mounting seats and the outward flanges on the mounting seats, and the rubber lower cover is arranged in the annular mounting cavity. This structural design, each part equipment of being convenient for forms sealed shaping chamber, and dismantles conveniently.
Preferably, the jig C in the S3 comprises an annular bottom plate, a first support body, a second support body and a third support body which are arranged on the annular bottom plate, wherein the first support body, the second support body and the third support body are of annular structures, the first support body, the second support body and the third support body are sequentially arranged on the annular bottom plate from inside to outside at equal intervals, and the heights of the first support body, the second support body and the third support body are sequentially increased. The upper ends of the first support body, the second support body and the third support body are obliquely provided with guide surfaces. The jig C is a special sintering jig for placing spherical surface products, is designed by calculating the shrinkage rate of materials, can enable the materials to sequentially fall on three struts during shrinkage in the sintering process, reduces deformation influence caused by suspension of the materials during sintering shrinkage, and realizes uniform shrinkage.
Preferably, the jig E in S5 includes a first ring body, a second ring body, and a plurality of connectors disposed between the first ring body and the second ring body, and the connectors are disposed circumferentially at equal intervals. The polycrystalline ceramic material D is a ceramic bell-shaped cover structure of alumina ceramic; the jig E is a special jig for the bell jar, clamps and fixes the spherical surface of the polycrystalline ceramic material D, and solves the problem that the spherical surface is difficult to clamp.
Preferably, the tool F in S6 is designed in a bell jar structure. The cutter F is a special cutter, the characteristics on the processing surface of the cutter F are consistent with the outline size on the alumina ceramic bell jar, the whole surface of the cutter F can be contacted with a product only by moving the cutter F to feed towards the X direction after the product rotates on the chuck, and the residual allowance removing time can be effectively reduced due to the increase of the processing area of the cutter F, so that the product G is finally obtained.
Compared with the prior art, the invention has the beneficial effects that: the problem that the dysmorphism product processing degree of difficulty of solution jumbo size that this scheme can be fine is big, process time is long, and can also very big improvement productivity, reduction processing cost.
Drawings
FIG. 1 is a schematic view of the structure of the alumina ceramic powder molding in the spherical grinding tool A of the invention;
FIG. 2 is a schematic diagram of a fixture C according to the present invention;
FIG. 3 is a schematic diagram of the sintering of a blank B on a jig C into a polycrystalline ceramic material D according to the present invention;
FIG. 4 is a schematic diagram of the structure of the fixture E of the present invention;
fig. 5 is a schematic view of the structure of the tool F of the present invention;
FIG. 6 is a schematic structural view of the product G of the present invention;
in the figure: spherical grinding tool A (1); a jig C (2); a jig E (3); a cutter F (4); product G (5); a transport base (101); a lower die body (102); a rubber lower cover (103); an upper die body (104); an arc-shaped cavity (105); a feed inlet (106); a rubber upper cover (107); a fixed frame (108); a mounting base (109); a cuff (110); an annular mounting cavity (111); an annular base plate (201); a first support (202); a second support (203); a third support 204; a guide surface (205); a first annular body (301); annular body two (302); a connection body (303); alumina ceramic powder (901); blank body B (902); polycrystalline ceramic material D (903).
Detailed Description
It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Example 1: a method for forming and processing alumina ceramics for use in deposition equipment (see fig. 1-6), comprising the steps of: s1: pouring alumina ceramic powder into a spherical grinding tool A (1); s2: pressing the alumina ceramic powder (901) to be treated in the step S1 by using a cold isostatic press, and carrying out isostatic pressing on the alumina ceramic powder to form a hollow hemispherical green body B (902); s3: rough machining is carried out on the blank body B (902) formed by pressing in the step S2, and the spherical surface of the blank body B is placed on a sintering jig C (2); s4: placing the sintering jig C (2) in which the blank body B (902) is placed in the S3 into a sintering furnace for sintering, and changing the blank body B into a compact polycrystalline ceramic material D (903); s5: clamping and fixing the spherical surface of the polycrystalline ceramic material D (903) obtained in the step S4 by using a jig E (3); s6: and (3) carrying out surface processing on the polycrystalline ceramic material D (903) clamped and fixed in the S5 by adopting a cutter F (4) to obtain a product G (5).
The spherical grinding tool A (1) in the S1 comprises a carrying base (101), a lower die body (102) arranged on the carrying base (101), a rubber lower cover (103) and an upper die body (104) arranged on the rubber lower cover (103), wherein the rubber lower cover (103) is arranged on the carrying base (101) and is arranged and installed along the outer wall of the lower die body (102), an arc-shaped cavity (105) is formed between the lower die body (102) and the upper die body (104), a feed inlet (106) is formed in the upper die body (104), a rubber upper cover (107) is arranged on the feed inlet (106), and alumina ceramic powder in the S1 is filled into the arc-shaped cavity (105) through the feed inlet. The structure is compact in design, and is convenient to isostatic press and form into a hollow hemispherical blank body B through a cold isostatic press machine.
The lower die body (102) adopts a spherical metal core rod, the upper die body (104) adopts a spherical rubber barrel, and alumina ceramic powder filled between the upper die body (104) and the lower die body (102) is molded into a hollow hemispherical structure under the pressing of an S2 cold isostatic press. The upper die body (104) and the lower die body (102) have simple structures and are convenient for forming the hollow hemispherical structure of the alumina ceramic powder.
The carrying base (101) comprises a plurality of fixed frames (108) and mounting seats (109) arranged on the fixed frames (108), the mounting seats (109) are of annular structures, the lower die body (102) is fixedly arranged on the mounting seats (109), outward flanges (110) are arranged on the outer side end faces of the mounting seats (109), the outward flanges (110) are folded towards one side far away from the fixed frames (108), an annular mounting cavity (111) can be formed by the lower die body (102), the mounting seats (109) and the outward flanges (110) on the mounting seats (109), and the rubber lower cover (103) is arranged in the annular mounting cavity (111). This structural design, each part equipment of being convenient for forms sealed shaping chamber, and dismantles conveniently.
The jig C (2) in the S3 comprises an annular bottom plate (201), a first supporting body (202), a second supporting body (203) and a third supporting body (204) which are arranged on the annular bottom plate (201), wherein the first supporting body (202), the second supporting body (203) and the third supporting body (204) are all of annular structures, the first supporting body (202), the second supporting body (203) and the third supporting body (204) are sequentially arranged on the annular bottom plate from inside to outside at equal intervals, and the heights of the first supporting body (202), the second supporting body (203) and the third supporting body (204) are sequentially increased. The upper ends of the first support body (202), the second support body (203) and the third support body (204) are obliquely provided with guide surfaces (205). The jig C (2) is a special sintering jig for placing spherical surface products, the jig C (2) is designed by calculating the shrinkage rate of materials, the materials can sequentially fall on three struts in the sintering process, deformation influence caused by suspension of the materials in the sintering shrinkage process is reduced, and uniform shrinkage is realized.
The jig E (3) in the S5 comprises a first annular body (301), a second annular body (302) and a plurality of connecting bodies (303) arranged between the first annular body (301) and the second annular body (302), wherein the connecting bodies (303) are circumferentially arranged at equal intervals. The polycrystalline ceramic material D is a ceramic bell-shaped cover structure of alumina ceramic; the jig E (3) is a special jig for the bell jar, clamps and fixes the spherical surface of the polycrystalline ceramic material D, and solves the problem that the spherical surface is difficult to clamp.
The cutter F (4) in the S6 adopts a bell-shaped cover structural design. The cutter F (4) is a special cutter, the characteristics on the processing surface of the cutter F (4) are consistent with the outline size on the alumina ceramic bell jar, after the product rotates on the chuck, the whole surface of the cutter F (4) can be contacted with the product only by moving the cutter F (4) to feed towards the X direction, the processing area of the cutter F (4) is increased, the residual allowance removing time can be effectively reduced, the product G (5) is obtained, the product G (5) is in a hemispherical structure, and a through design hole is formed in the middle position on the product G (5).
In the scheme provided by the application, the steps from powder filling to pressing and then sintering are all optimized from the aspects of forming, sintering, finishing and the like by changing the processing technology on the basis of the prior art. An effective balance is achieved in the aspects of combining the processing method and the processing cost, and the stable volume production is realized by improving the processing technology and the processing jig for a plurality of times. The product processed by the method can not only meet the use requirements of customers, but also greatly improve the productivity and reduce the processing cost.
The working flow is as follows:
firstly, ceramic powder is poured into a spherical die A (1), a cold isostatic pressing machine is used for pressing a rubber barrel outside the spherical die, the powder is extruded on the surface of a metal core rod to form a hollow hemispherical blank body B (see figure 1) through isostatic pressing, and compared with the conventional solid barrel forming, the ceramic powder has the advantages of reducing the material allowance of the subsequent processing, and reducing the waste of the powder and the time of the subsequent processing. And rough machining is carried out on the blank body B to enable the blank body B to be closer to the actual size of a product, the spherical surface of the blank body B is placed on a special sintering jig C (2) (see figure 2), the jig C (2) is designed by calculating the shrinkage rate of materials, the materials can be sequentially dropped on three support columns in the sintering process, deformation influence caused by suspension of the materials in the sintering shrinkage process is reduced, and uniform shrinkage is realized. After sintering in a sintering furnace, the green body B is changed into a dense polycrystalline ceramic material D (see fig. 3). And then, a special jig E (3) (see figure 4) for clamping the bell housing is designed in the ceramic finish machining process to clamp and fix the spherical surface of the polycrystalline ceramic material D, so that the problem that the spherical surface is difficult to clamp is solved. The special tool F (4) is designed again (see fig. 5), the characteristics on the processing surface of the tool F (4) are consistent with the outline size on the bell jar, after the product rotates on the chuck, the whole surface of the tool can be contacted with the product only by moving the tool F (4) to feed towards the X direction, and the residual allowance removing time is effectively reduced due to the increase of the processing area of the tool, so that the product G (5) is finally obtained (see fig. 6).
The above-described embodiments are merely preferred embodiments of the present invention, and the present invention is not limited in any way, and other variations and modifications may be made without departing from the technical aspects set forth in the claims.
Claims (7)
1. The method for forming and processing the alumina ceramic used on the deposition equipment is characterized by comprising the following steps:
s1: pouring alumina ceramic powder into the spherical grinding tool A;
s2: pressing the alumina ceramic powder to be treated in the step S1 by using a cold isostatic press, and performing isostatic pressing to form a hollow hemispherical blank body B;
s3: rough machining is carried out on the blank body B pressed and formed in the step S2, and the spherical surface of the blank body B is placed on a sintering jig C;
s4: placing the sintering jig C in which the blank body B is placed in the S3 into a sintering furnace for sintering, and changing the blank body B into a compact polycrystalline ceramic material D;
s5: clamping and fixing the spherical surface of the polycrystalline ceramic material D obtained in the step S4 by using a jig E;
s6: and (5) carrying out surface processing on the polycrystalline ceramic material D clamped and fixed in the S5 by adopting a cutter F to obtain a product G.
2. The method for forming and processing alumina ceramic for deposition equipment according to claim 1, wherein the spherical grinding tool A in S1 comprises a carrying base, a lower die body arranged on the carrying base, a rubber lower cover and an upper die body arranged on the rubber lower cover, wherein the rubber lower cover is arranged on the carrying base and is arranged along the outer wall of the lower die body, an arc-shaped cavity is formed between the lower die body and the upper die body, a feed inlet is formed in the upper die body, a rubber upper cover is arranged on the feed inlet, and alumina ceramic powder in S1 is filled into the arc-shaped cavity through the feed inlet.
3. The method for forming and processing alumina ceramic for use in a deposition apparatus according to claim 2, wherein the lower mold body is a spherical metal core rod, and the upper mold body is a spherical rubber barrel, so that alumina ceramic powder poured between the upper mold body and the lower mold body is formed into a hollow hemispherical structure under compression by an cold isostatic press in S2.
4. The method for forming and processing alumina ceramic for deposition equipment according to claim 3, wherein the carrying base comprises a plurality of fixed frames and mounting seats arranged on the fixed frames, the mounting seats are of annular structures, the lower die body is fixedly arranged on the mounting seats, the outer end faces of the mounting seats are provided with outward flanges, the outward flanges are turned towards the side far away from the fixed frames, an annular mounting cavity is formed by the outward flanges on the lower die body, the mounting seats and the mounting seats, and the rubber lower cover is arranged in the annular mounting cavity.
5. The method for forming and processing alumina ceramic for use in a deposition apparatus according to any one of claims 1 to 4, wherein the jig C in S3 comprises an annular bottom plate, a first support, a second support and a third support which are disposed on the annular bottom plate, wherein the first support, the second support and the third support are all in an annular structure, are disposed on the annular bottom plate at equal intervals in sequence from inside to outside, and the heights of the first support, the second support and the third support are sequentially increased.
6. The method according to claim 5, wherein the jig E in S5 comprises a first ring, a second ring, and a plurality of connectors arranged between the first ring and the second ring, and the connectors are arranged circumferentially at equal intervals.
7. The method of forming and processing alumina ceramic for use in a deposition apparatus according to claim 6, wherein the tool F in S6 is configured as a bell jar.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211729376.7A CN116102339A (en) | 2022-12-30 | 2022-12-30 | Alumina ceramic forming and processing method for deposition equipment |
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| CN202211729376.7A CN116102339A (en) | 2022-12-30 | 2022-12-30 | Alumina ceramic forming and processing method for deposition equipment |
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| CN2608215Y (en) * | 2003-03-27 | 2004-03-31 | 郭为民 | Universal globe body working table |
| CN103934732A (en) * | 2014-05-13 | 2014-07-23 | 航天科工哈尔滨风华有限公司 | Method for rotation ultrasonic grinding of aluminum oxide ceramic thin-wall convex spherical surface structure with spindle |
| WO2016051121A1 (en) * | 2014-10-03 | 2016-04-07 | Zeeko Limited | Method for shaping and finishing a workpiece |
| CN106493834A (en) * | 2016-11-16 | 2017-03-15 | 上海卡贝尼精密陶瓷有限公司 | The ceramic another part isostatic cool pressing base particular manufacturing craft of deep chamber top dome alms bowl class and using method |
| CN206653285U (en) * | 2016-12-29 | 2017-11-21 | 丽水学院 | Ceramic tea can process tool |
| CN206732581U (en) * | 2017-04-06 | 2017-12-12 | 成都正山机械制造有限公司 | A kind of Pneumatic type hemispherical protective cover processes spherical outside surface fixture |
| CN207983003U (en) * | 2017-12-29 | 2018-10-19 | 成都晶华光电科技股份有限公司 | A kind of lens grinding built-up jig |
| CN113800921A (en) * | 2021-09-14 | 2021-12-17 | 杭州大和江东新材料科技有限公司 | Ceramic dielectric window processing method for plasma etcher |
| CN216274289U (en) * | 2021-11-25 | 2022-04-12 | 大连顶金通用设备制造股份有限公司 | Quenching treatment tool for large-diameter thin-wall hemispherical head |
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2022
- 2022-12-30 CN CN202211729376.7A patent/CN116102339A/en active Pending
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| JPH05277922A (en) * | 1992-03-30 | 1993-10-26 | Ngk Insulators Ltd | Spherical machining of ring part |
| CN2608215Y (en) * | 2003-03-27 | 2004-03-31 | 郭为民 | Universal globe body working table |
| CN103934732A (en) * | 2014-05-13 | 2014-07-23 | 航天科工哈尔滨风华有限公司 | Method for rotation ultrasonic grinding of aluminum oxide ceramic thin-wall convex spherical surface structure with spindle |
| WO2016051121A1 (en) * | 2014-10-03 | 2016-04-07 | Zeeko Limited | Method for shaping and finishing a workpiece |
| CN106493834A (en) * | 2016-11-16 | 2017-03-15 | 上海卡贝尼精密陶瓷有限公司 | The ceramic another part isostatic cool pressing base particular manufacturing craft of deep chamber top dome alms bowl class and using method |
| CN206653285U (en) * | 2016-12-29 | 2017-11-21 | 丽水学院 | Ceramic tea can process tool |
| CN206732581U (en) * | 2017-04-06 | 2017-12-12 | 成都正山机械制造有限公司 | A kind of Pneumatic type hemispherical protective cover processes spherical outside surface fixture |
| CN207983003U (en) * | 2017-12-29 | 2018-10-19 | 成都晶华光电科技股份有限公司 | A kind of lens grinding built-up jig |
| CN113800921A (en) * | 2021-09-14 | 2021-12-17 | 杭州大和江东新材料科技有限公司 | Ceramic dielectric window processing method for plasma etcher |
| CN216274289U (en) * | 2021-11-25 | 2022-04-12 | 大连顶金通用设备制造股份有限公司 | Quenching treatment tool for large-diameter thin-wall hemispherical head |
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