CN103934732A - Method for rotation ultrasonic grinding of aluminum oxide ceramic thin-wall convex spherical surface structure with spindle - Google Patents

Method for rotation ultrasonic grinding of aluminum oxide ceramic thin-wall convex spherical surface structure with spindle Download PDF

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Publication number
CN103934732A
CN103934732A CN201410200696.2A CN201410200696A CN103934732A CN 103934732 A CN103934732 A CN 103934732A CN 201410200696 A CN201410200696 A CN 201410200696A CN 103934732 A CN103934732 A CN 103934732A
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walled
thin
tape spool
spherical structure
protruding
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CN103934732B (en
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魏士亮
荆君涛
刘运凤
高丹
刘璐
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Harbin Fenghua Co ltd China Aerospace Science & Industry Corp
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Harbin Fenghua Co ltd China Aerospace Science & Industry Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The invention discloses a method for rotation ultrasonic grinding of an aluminum oxide ceramic thin-wall convex spherical surface structure with a spindle and relates to ultrasonic grinding methods. The method solves the problems of existing machining methods that the vibration performance and sensitivity of a hemisphere top harmonic oscillator are affected, the coaxiality between a central spindle and the circle center of the thin-wall convex spherical surface is hard to guarantee, the manufacturing technology is complicated, and manufacturing cost is high. The method comprises the steps of conducting modal analysis on the thin-wall convex spherical surface structure with the spindle and determining rotation ultrasonic grinding vibration frequency; designing a tool, wherein the tool is designed to be a hemispherical convex die, a through hole is formed in the center of the tool, and the size of the through hole is determined; clamping the convex spherical surface of the thin-wall convex spherical surface structure with the spindle with the tool; calculating the arc radius and layer thickness of an ultrasonic vibration tool; optimizing the ultrasonic vibration tool and machining technology parameters, and conducting machining on an ultrasonic vibration machine tool with the tool; separating the thin-wall convex spherical surface structure with the spindle from the tool and removing sealing wax. The method is used for machining the aluminum oxide ceramic thin-wall convex spherical surface structure with the spindle.

Description

The rotary ultrasonic grinding processing method of the protruding spherical structure of alumina ceramic material tape spool thin-walled
Technical field
The present invention relates to a kind of rotary ultrasonic grinding processing method of alumina ceramic material, particularly for thering is the protruding spherical structure integral processing method of mandrel thin-walled.
Background technology
The protruding sphere of axle thin-walled is the typical structure of half spherical top harmonic oscillator, and its processing method and crudy have directly determined the vibration characteristics of harmonic oscillator.And alumina ceramic material is typical hard brittle material, there is higher hardness and lower fracture toughness, adopt plain grinding processing, because cutting force is large, easily cause thin-wall curved-surface fracture; And due to grinding tool serious wear, machining accuracy is difficult to meet half spherical top harmonic oscillator job requirement.At present, for the protruding spherical structure processing method of alumina ceramic material tape spool thin-walled, mainly adopt precise forming → thin-walled convex surface processing → mandrel processing → mandrel and thin-walled convex surface bonding, adopt this processing method to have following problem:
(1) thin-walled convex surface adopts and separates processing with core shaft structure, and then bonding together, has directly affected vibration characteristics and the sensitiveness of half spherical top harmonic oscillator, and has been difficult to ensure mandrel and thin-walled convex surface center of circle axiality;
(2) processing of thin-walled convex surface adopts shaping grinding apparatus processing, and the grinding tool accuracy of manufacture is difficult to meet machining accuracy; And due to grinding tool wearing and tearing, its structure is difficult for finishing;
Manufacturing process complexity, must manufacture dissimilar mould and processing grinding tool for the protruding spherical structure of mandrel thin-walled that has of different size, has increased manufacturing cost.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, and then the rotary ultrasonic grinding processing method of the protruding spherical structure of a kind of alumina ceramic material tape spool thin-walled is provided.
Technical scheme of the present invention is: the concrete steps of the rotary ultrasonic grinding processing method of the protruding spherical structure of alumina ceramic material tape spool thin-walled are:
Step 1: processed oxygen is carried out to model analysis to changing aluminium ceramic material tape spool thin-walled protruding spherical structure, determine rotary ultrasonic grinding vibration frequency, rotary ultrasonic grinding vibration frequency is out of shape the resonance frequency value when large away from structural vibration;
Step 2: in the protruding spherical structure design specialized of tape spool thin-walled frock, special tooling is designed to the hemispherical punch identical with the concave spherical surface shape of the protruding spherical structure of tape spool thin-walled, and the diameter of hemispherical punch is less than the diameter of concave spherical surface, the bottom surface of hemispherical punch is horizontal plane, the center of the hemispherical punch through hole that need go into operation, described through hole is ladder hole, the aperture, bottom of ladder hole is greater than aperture, top, the aperture, top of ladder hole is greater than the diameter of the mandrel of the protruding spherical structure of tape spool thin-walled, owing to there being surplus between the two, cause harmonic oscillator mandrel center line to produce certain angle deviation, utilize clamping error mathematic model, calculate maximum angle deviation under the even value of wall unevenness that protruding sphere thin-walled machining permits, thereby calculate the top aperture size of ladder hole,
Step 4: when the protruding sphere of the protruding spherical structure of tape spool thin-walled and special tooling clamping, first sealing wax is heated to be to liquid, special tooling is heated simultaneously, and sealing wax is evenly spread upon on hemispherical punch, then the mandrel of the protruding spherical structure of tape spool thin-walled is inserted in the through hole on hemispherical punch, and adopt sealing wax to fill the bottom of ladder hole, mandrel is fixed in through hole;
Step 5: according to ultrasonic vibration cutter and sphere-contact Mathematical Modeling, calculate at the arc radius and the lift height that meet the ultrasonic vibration cutter under desired scallop-height;
Step 6: to ultrasonic vibration cutter and working process parameter optimization, ultrasonic vibration cutter is processed on three axle ultrasonic vibration lathes; After processing, by special tooling heating, protruding tape spool thin-walled spherical structure is taken off, and put into alcohol and soak, thereby remove sealing wax.
Preferred: in step 1, to adopt finite element analysis software to carry out model analysis to the processed protruding spherical structure of alumina ceramic material tape spool thin-walled.
Preferred: the ultrasonic vibration cutter adopting in step 5 and step 6 is ceramic base tack ultrasonic vibration cutter.Because bulb cutter is easy to wear and self-sharpening is poor, adopt ceramic base tack ultrasonic vibration cutter can further improve crudy.
Preferred: in step 6, the rotating speed of ultrasonic vibration cutter is 5000r/min, and feed speed is 400mm/min, cutter amplitude is 6 μ m.
The present invention compared with prior art has following effect:
The invention has the advantages that and realized the integrated manufacture of the protruding spherical structure of tape spool thin-walled, realize the processing of aluminium oxide ceramics thin-walled sphere wall thickness 0.8mm, improve structure vibration performance, simplify technological process, reduce the dependence to equipment, on three-axis numerical control equipment, can realize, ensure reliability and the uniformity of batch machining, reduce cost.
The machining accuracy and the crudy that have improved the protruding spherical structure of alumina ceramic material tape spool thin-walled simultaneously, machining accuracy reaches 0.005mm; Roughness Ra 0.4 μ m, can meet 0.1 °/h of drift value precision.
Brief description of the drawings
Fig. 1 is the present invention for the protruding spherical structure schematic diagram of alumina ceramic material tape spool thin-walled;
Fig. 2 is clamping error mathematic model schematic diagram;
Fig. 3 is designed special tooling structure chart:
Fig. 4 is sphere residual processing height Mathematical Modeling schematic diagram;
In figure: 1 is mandrel, 2 is protruding sphere, and 3 is concave spherical surface, and 4 is hemispherical punch, and 5 is through hole, and 6 is sealing wax.In Fig. 4: C 1, B 1the position of cutter while being respectively processing adjacent layer; C, B are respectively the rear tool position of compensation, and the distance that during with maximum Working position, depart from the cutter center of circle is vibration cutting amplitude A; R is the protruding spherical radius of thin-walled; R is knife tool arc radius; θ is adjacent layer tool position and O point angle.
Detailed description of the invention
Describe the present invention below in conjunction with instantiation and accompanying drawing.
The rotary ultrasonic grinding processing method of the protruding spherical structure of alumina ceramic material tape spool thin-walled of the present invention for structure type can be with reference to Fig. 1, this structure comprises mandrel 1, protruding sphere 2 and concave spherical surface 3.
The rotary ultrasonic grinding processing method of the protruding spherical structure of alumina ceramic material tape spool thin-walled, reply institute processing structure carries out model analysis, due to the longitudinal dither of cutter, institute's processing structure will be subject to the vibration identical with vibration cutting frequency, and therefore vibration cutting frequency should be out of shape the resonance frequency value when large away from structural vibration.
With reference to figure 2, Fig. 3 and Fig. 4, the rotary ultrasonic grinding processing method of the protruding spherical structure of alumina ceramic material tape spool thin-walled can be realized as follows:
Step 1: the processed protruding spherical structure of alumina ceramic material tape spool thin-walled is carried out to model analysis, determine rotary ultrasonic grinding vibration frequency, rotary ultrasonic grinding vibration frequency is out of shape the resonance frequency value when large away from structural vibration;
Step 2: in the protruding spherical structure design specialized of tape spool thin-walled frock, special tooling is designed to the hemispherical punch 4 identical with concave spherical surface 3 shapes of the protruding spherical structure of tape spool thin-walled, and the diameter of hemispherical punch 4 is less than the diameter of concave spherical surface 3, the bottom surface of hemispherical punch 4 is horizontal plane, the center of hemispherical punch 4 through hole 5 that need go into operation, described through hole 5 is ladder hole, the aperture, bottom of ladder hole is greater than aperture, top, the aperture, top of ladder hole is greater than the diameter of the mandrel 1 of the protruding spherical structure of tape spool thin-walled, owing to there being surplus between the two, cause harmonic oscillator mandrel center line to produce certain angle deviation, utilize clamping error mathematic model, calculate maximum angle deviation under the even value of wall unevenness that protruding sphere thin-walled machining permits, thereby calculate the top aperture size of ladder hole,
Step 4: when the protruding sphere 2 of the protruding spherical structure of tape spool thin-walled and special tooling clamping, first sealing wax is heated to be to liquid, special tooling is heated simultaneously, and sealing wax 6 is evenly spread upon on hemispherical punch 4, then the mandrel 1 of the protruding spherical structure of tape spool thin-walled is inserted in the through hole 5 on hemispherical punch 4, and adopt sealing wax to fill the bottom of ladder hole, mandrel 1 is fixed in through hole 5;
Step 5: according to ultrasonic vibration cutter and sphere-contact Mathematical Modeling, calculate at the arc radius and the lift height that meet the ultrasonic vibration cutter under desired scallop-height;
Step 6: to ultrasonic vibration cutter and working process parameter optimization, ultrasonic vibration cutter is processed on three axle ultrasonic vibration lathes; After processing, by special tooling heating, protruding tape spool thin-walled spherical structure is taken off, and put into alcohol and soak, thereby remove sealing wax.
In the time of design hemispherical punch 4, for ease of installing and preventing hard contact, through hole 5 sizes are greater than the diameter of mandrel 1.Just because of there is surplus between the two, cause harmonic oscillator mandrel center line to produce certain angle deviation, utilize clamping error mathematic model, calculate maximum angle deviation under the even value of wall unevenness that protruding sphere thin-walled machining permits, thereby calculate clear size of opening.
Special tooling is designed to and the hemispherical punch 4 identical with concave spherical surface 3 shapes of the protruding spherical structure of tape spool thin-walled, and owing to adopting sealing wax bonding, the diameter of hemispherical punch 4 should be less than the diameter of concave spherical surface 3; Designed hemispherical punch 4 lower end horizontal planes, while having ensured clamping and the protruding sphere-contact of thin-walled; Through hole on hemispherical punch 4 act as location, and for realizing accurate location, mandrel 1 does not adopt sealing wax bonding with through hole top.If mandrel 1 is excessive with frock contact area, in process, cutting force effect easily causes mandrel fracture of root, therefore be ladder hole in via design, mandrel only has fraction to contact with special tooling, in through hole bottom hole, can adopt sealing wax to fill fixing, as shown in Figure 3, material is aluminium to designed special tooling.
In step 2, because the aperture, top of ladder hole is greater than the diameter of the mandrel 1 of the protruding spherical structure of tape spool thin-walled, when installation, through hole center line and mandrel center line are inconsistent, and the processing back casing wall thickness causing is expressed as:
Wherein , ---housing Working position is relative with abscissa angle, R 2---concave spherical surface radius; ---deflection angle; D---the protruding spherical diameter of thin-walled;
In step 5, ultrasonic vibration cutter and sphere-contact revolution mark and maximum residual height Mathematical Modeling are as follows:
Wherein ;
R is the protruding spherical radius of thin-walled; R is knife tool arc radius; θ is adjacent layer tool position and O point angle;
For aluminium oxide ceramics, its material parameter is: elastic modulus E=4.4e11Pa, density p=3.99e3Kg/m 3, Poisson's ratio υ=0.3.Under single order mode and second-order modal, the protruding spherical structure distortion of the tape spool thin-walled of alumina ceramic material is less, and its intrinsic frequency is 13256Hz.Under the 3rd rank mode, the protruding spherical structure of tape spool thin-walled of alumina ceramic material has produced serious distortion, and intrinsic frequency reaches 65751Hz, vibrate for reducing the protruding spherical structure of tape spool thin-walled the displacement deformation causing, and the mismachining tolerance producing, cutter ultrasonic vibration frequency values should be in 13256Hz left and right.Axle diameter is 5.8mm, and protruding spherical radius is 19mm, and wall thickness is 0.8mm, and therefore special tooling through hole and mandrel maximal clearance amount are 0.01mm, and the spherical radius of hemispherical punch 4 is 16.5mm.In process, θ (representing adjacent layer tool position and O point angle)=0.1 °, knife tool arc radius r=4mm; Cutter bonding agent, by its key component of umber and content (%mol) is: 7.5% Na 2o, 16% B 2o 3, 60% SiO 2al with %8.5 2o 3, diamond abrasive grain granularity be D126(126 μ m), wear particle concentration is 125%, working process parameter is rotating speed 5000r/min, feed speed 400mm/min, cutter amplitude 6 μ m, finally successfully process sample, and machining accuracy reach 0.005mm; Fineness Ra0.4 μ m, can meet 0.1 °/h of drift value precision.
Present embodiment is the exemplary illustration to this patent just, does not limit its protection domain, and those skilled in the art can also change its part, as long as no the Spirit Essence that exceeds this patent, all in the protection domain of this patent.

Claims (4)

1. a rotary ultrasonic grinding processing method for the protruding spherical structure of alumina ceramic material tape spool thin-walled, is characterized in that: the concrete steps of the rotary ultrasonic grinding processing method of the protruding spherical structure of alumina ceramic material tape spool thin-walled are:
Step 1: processed oxygen is carried out to model analysis to changing aluminium ceramic material tape spool thin-walled protruding spherical structure, determine rotary ultrasonic grinding vibration frequency, rotary ultrasonic grinding vibration frequency is out of shape the resonance frequency value when large away from structural vibration;
Step 2: in the protruding spherical structure design specialized of tape spool thin-walled frock, special tooling is designed to the hemispherical punch (4) identical with concave spherical surface (3) shape of the protruding spherical structure of tape spool thin-walled, and the diameter of hemispherical punch (4) is less than the diameter of concave spherical surface (3), the bottom surface of hemispherical punch (4) is horizontal plane, the center of hemispherical punch (4) through hole (5) that need go into operation, described through hole (5) is ladder hole, the aperture, bottom of ladder hole is greater than aperture, top, the aperture, top of ladder hole is greater than the diameter of the mandrel (1) of the protruding spherical structure of tape spool thin-walled, owing to there being surplus between the two, cause harmonic oscillator mandrel center line to produce certain angle deviation, utilize clamping error mathematic model, calculate maximum angle deviation under the even value of wall unevenness that protruding sphere thin-walled machining permits, thereby calculate the top aperture size of ladder hole,
Step 4: when the protruding sphere (2) of the protruding spherical structure of tape spool thin-walled and special tooling clamping, first sealing wax is heated to be to liquid, special tooling is heated simultaneously, and sealing wax (6) is evenly spread upon on hemispherical punch (4), then the mandrel of the protruding spherical structure of tape spool thin-walled (1) is inserted in the through hole (5) on hemispherical punch (4), and adopt sealing wax to fill the bottom of ladder hole, mandrel (1) is fixed in through hole (5);
Step 5: according to ultrasonic vibration cutter and sphere-contact Mathematical Modeling, calculate at the arc radius and the lift height that meet the ultrasonic vibration cutter under desired scallop-height;
Step 6: to ultrasonic vibration cutter and working process parameter optimization, ultrasonic vibration cutter is processed on three axle ultrasonic vibration lathes; After processing, by special tooling heating, protruding tape spool thin-walled spherical structure is taken off, and put into alcohol and soak, thereby remove sealing wax.
2. the rotary ultrasonic grinding processing method of the protruding spherical structure of alumina ceramic material tape spool thin-walled according to claim 1, is characterized in that: in step 1, adopt finite element analysis software to carry out model analysis to the processed protruding spherical structure of alumina ceramic material tape spool thin-walled.
3. the rotary ultrasonic grinding processing method of the protruding spherical structure of alumina ceramic material tape spool thin-walled according to claim 2, is characterized in that: the ultrasonic vibration cutter adopting in step 5 and step 6 is ceramic base tack ultrasonic vibration cutter.
4. according to the rotary ultrasonic grinding processing method of the protruding spherical structure of alumina ceramic material tape spool thin-walled described in claim 1,2 or 3, it is characterized in that: in step 6, the rotating speed of ultrasonic vibration cutter is 5000r/min, and feed speed is 400mm/min, and cutter amplitude is 6 μ m.
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CN104197914A (en) * 2014-08-08 2014-12-10 上海交通大学 Miniature blow-molding semispherical resonator gyroscope and preparation method thereof
CN104400474A (en) * 2014-10-16 2015-03-11 中国船舶重工集团公司第七0七研究所 Rotation ultrasonic-based machining process and special tool for high-precision gyroscope movable coil skeleton
CN109483394A (en) * 2018-09-13 2019-03-19 西安航晨机电科技股份有限公司 Hemispherical resonator ultraprecise device for machining spherical surface and processing method
CN111238461A (en) * 2020-03-09 2020-06-05 中国建筑材料科学研究总院有限公司 Harmonic oscillator and preparation method thereof
CN111843634A (en) * 2020-07-28 2020-10-30 大连理工大学 Quartz hemispherical harmonic oscillator processing tool and method
CN112621538A (en) * 2020-12-15 2021-04-09 中国建筑材料科学研究总院有限公司 Polishing method for harmonic oscillator shell end face
WO2021169178A1 (en) * 2020-02-24 2021-09-02 大连理工大学 Quartz harmonic oscillator ultra-precision machining method and device
CN113878698A (en) * 2021-11-08 2022-01-04 余成林 Manufacturing and processing method of ceramic bathroom product
CN114227451A (en) * 2021-11-18 2022-03-25 华中光电技术研究所(中国船舶重工集团公司第七一七研究所) Quality trimming method for hemispherical harmonic oscillator
CN114952599A (en) * 2022-03-31 2022-08-30 西安航天精密机电研究所 Chemical mechanical polishing device and polishing method for hemispherical harmonic oscillator
CN116102339A (en) * 2022-12-30 2023-05-12 杭州大和江东新材料科技有限公司 Alumina ceramic forming and processing method for deposition equipment
CN117226440A (en) * 2023-11-15 2023-12-15 四川图林科技有限责任公司 Harmonic oscillator configuration of two-piece hemispherical resonator gyroscope and processing method thereof

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CN104197914A (en) * 2014-08-08 2014-12-10 上海交通大学 Miniature blow-molding semispherical resonator gyroscope and preparation method thereof
CN104400474A (en) * 2014-10-16 2015-03-11 中国船舶重工集团公司第七0七研究所 Rotation ultrasonic-based machining process and special tool for high-precision gyroscope movable coil skeleton
CN104400474B (en) * 2014-10-16 2016-08-24 中国船舶重工集团公司第七0七研究所 High accuracy gyroscope moving coil framework processing technique based on rotary ultrasonic and special tooling
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WO2021169178A1 (en) * 2020-02-24 2021-09-02 大连理工大学 Quartz harmonic oscillator ultra-precision machining method and device
CN111238461A (en) * 2020-03-09 2020-06-05 中国建筑材料科学研究总院有限公司 Harmonic oscillator and preparation method thereof
CN111843634A (en) * 2020-07-28 2020-10-30 大连理工大学 Quartz hemispherical harmonic oscillator processing tool and method
CN112621538A (en) * 2020-12-15 2021-04-09 中国建筑材料科学研究总院有限公司 Polishing method for harmonic oscillator shell end face
CN113878698A (en) * 2021-11-08 2022-01-04 余成林 Manufacturing and processing method of ceramic bathroom product
CN114227451B (en) * 2021-11-18 2022-11-01 华中光电技术研究所(中国船舶重工集团公司第七一七研究所) Quality trimming method for hemispherical harmonic oscillator
CN114227451A (en) * 2021-11-18 2022-03-25 华中光电技术研究所(中国船舶重工集团公司第七一七研究所) Quality trimming method for hemispherical harmonic oscillator
CN114952599A (en) * 2022-03-31 2022-08-30 西安航天精密机电研究所 Chemical mechanical polishing device and polishing method for hemispherical harmonic oscillator
CN116102339A (en) * 2022-12-30 2023-05-12 杭州大和江东新材料科技有限公司 Alumina ceramic forming and processing method for deposition equipment
CN117226440A (en) * 2023-11-15 2023-12-15 四川图林科技有限责任公司 Harmonic oscillator configuration of two-piece hemispherical resonator gyroscope and processing method thereof
CN117226440B (en) * 2023-11-15 2024-02-02 四川图林科技有限责任公司 Harmonic oscillator configuration of two-piece hemispherical resonator gyroscope and processing method thereof

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