CN116100154B - Femtosecond laser preparation method for multi-core fiber serial-parallel integrated microstructure array - Google Patents
Femtosecond laser preparation method for multi-core fiber serial-parallel integrated microstructure array Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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Abstract
The invention discloses a femtosecond laser preparation method of a multi-core fiber serial-parallel integrated microstructure array, which comprises the following steps: step S1: manually or automatically dragging the multi-core optical fiber along the axial direction x to drag an mth processing section on the multi-core optical fiber to a focusing point of the femtosecond laser, wherein m is more than or equal to 1; step S2: manually or automatically driving the mth processing section to perform micro-motion so as to sequentially position the focusing point of the femtosecond laser on each fiber core of the mth processing section to manufacture and form a microstructure array; step S3: repeating the steps S1-S2 until the microstructure array is manufactured and formed in each processing section of the multi-core optical fiber. The femtosecond laser preparation method can continuously manufacture the series-parallel integrated microstructure array on each fiber core of the multi-core fiber.
Description
Technical Field
The invention relates to a multi-core optical fiber processing technology, in particular to a femtosecond laser preparation method of a multi-core optical fiber serial-parallel integrated microstructure array.
Background
A multicore fiber is an optical fiber comprising a plurality of cores in a common cladding. The multi-core optical fiber has the advantages of small optical fiber size, light weight, good flexibility, low manufacturing cost and the like, and the characteristics of the multi-core optical fiber also lead the multi-core optical fiber to have larger transmission capacity and more special device structure, so the multi-core optical fiber is widely applied to the fields of optical fiber data transmission and optical fiber sensing. The preparation of microstructures in multi-core optical fibers is more and more important, and two main methods for preparing microstructures of the existing multi-core optical fibers are as follows: ultraviolet laser phase mask method and femtosecond laser direct writing method.
(1) Ultraviolet laser masking method: 1. the period of the microstructure is determined by the phase mask, and the period of the microstructure is not adjustable. Because the optical fiber coating absorbs ultraviolet light, the coating layer needs to be stripped during preparation, and the mechanical strength of the optical fiber can be influenced. 2. The microstructure is mainly written at the same position of each fiber core in the multi-core optical fiber, the microstructure periods of each fiber core are the same, when the intervals of each fiber core are larger, the microstructure is required to be written on each fiber core, and the written microstructure is easy to erase in the process that the microstructure is written on each fiber core at the same position by ultraviolet laser because the microstructure written by ultraviolet laser is erased by the ultraviolet laser subjected to secondary exposure. 3. The microstructure written by ultraviolet laser belongs to an I-type microstructure, can be erased in a high-temperature environment, and has a limited application scene. The UV laser mask process is used to produce tandem microstructures of the same period in multicore fibers in the literature (Paul S.Westbrook, et al Continuous Multicore Optical Fiber Grating Arrays for Distributed Sensing Applications [ J ]. Journal of Lightwave Technology,3107,35 (6): 1248-1252).
(2) The femtosecond laser direct writing method is to carry out refractive index modulation in the fiber core in a point-by-point, line-by-line or surface-by-surface mode by the combination of extremely short pulse and high peak power of the femtosecond laser and the movement of a high-precision triaxial displacement platform. Because the refractive index of the fiber core is directly modulated by the femtosecond laser, a mask is not needed, and the period and the center wavelength of the prepared microstructure can be flexibly changed by changing the writing parameters of the femtosecond laser. And the coating layer is not required to be stripped during writing, so that the mechanical strength of the optical fiber after writing can be ensured. Meanwhile, the prepared microstructure can bear higher temperature, and can be theoretically prepared on any optical fiber. Literature (Alexey wolf. Arrays of fiber Bragg gratings selectively inscribed in different cores of-core spun optical fiber by IR femtosecond laser pulses [ J ] Optics Express,2019,27 (10): 13978) writes an array of serially integrated microstructures per core in a spiral multicore fiber, but the microstructure period of each core at each location is uniform and the pitch of the serially connected microstructures is fixed to be equal to the pitch of the spiral fiber.
At present, a scheme of continuously manufacturing a series-parallel integrated microstructure array on a multi-core optical fiber by using femtosecond laser is not adopted in the prior art; meanwhile, each fiber core in the multi-core optical fiber also has the problems of difficult positioning and low positioning precision.
Disclosure of Invention
In order to solve the defects in the prior art, the invention provides a femtosecond laser preparation method of a multi-core optical fiber serial-parallel integrated microstructure array, which can continuously manufacture the serial-parallel integrated microstructure array on each fiber core of the multi-core optical fiber. The microstructure is a fiber grating, a fiber microcavity or a fiber weak reflection point and the like, and the microstructure array is a fiber grating array, a fiber microcavity array, a fiber weak reflection point array or a mixed microstructure array formed by mixing at least two microstructures in the fiber grating, the fiber microcavity or the fiber weak reflection point; the fiber cores in the processing sections are formed with a plurality of microstructures along the axial direction of the fiber cores to form a series-connection integrated microstructure array, or are formed with a plurality of microstructures along the radial direction of the fiber cores to form a parallel-connection integrated microstructure array, or are formed with a plurality of microstructures along the axial direction and the radial direction of the fiber cores to form a series-parallel connection mixed integrated microstructure array.
The technical problems to be solved by the invention are realized by the following technical scheme:
a multi-core optical fiber series-parallel connection integrated micro-structure array femtosecond laser preparation method, the multi-core optical fiber includes a plurality of processing sections along the axial direction x; the method comprises the following steps:
Step S1: manually or automatically dragging the multi-core optical fiber along the axial direction x to drag an mth processing section on the multi-core optical fiber to a focusing point of the femtosecond laser, wherein m is more than or equal to 1;
step S2: manually or automatically driving the mth processing section to perform micro-motion so as to sequentially position the focusing point of the femtosecond laser on each fiber core of the mth processing section to manufacture and form a microstructure array;
step S3: repeating the steps S1-S2 until the microstructure array is manufactured and formed in each processing section of the multi-core optical fiber.
The invention has the following beneficial effects: the femtosecond laser preparation method adopts a mode of dragging the multi-core optical fiber, so that the continuous manufacture of the serial and parallel integrated microstructure array of the femtosecond laser on each fiber core of the multi-core optical fiber is realized; meanwhile, when each fiber core is positioned, only the central coordinates of the multi-core optical fiber and the central coordinates of the first peripheral fiber core are positioned by adopting an image algorithm, and the central coordinates of other peripheral fiber cores are directly calculated according to the offset angles among the fiber cores, so that the number of fiber cores positioned by adopting the image algorithm is reduced, and the positioning efficiency of the multi-core optical fiber is improved.
Drawings
Fig. 1 is a schematic processing diagram of a femtosecond laser preparation method of a multi-core fiber serial-parallel integrated microstructure array provided by the invention.
Fig. 2 is a block diagram of steps of a method for preparing a femtosecond laser with a multi-core fiber serial-parallel integrated microstructure array.
Fig. 3 is a block diagram showing the sub-steps of step S2 in the method for preparing a femtosecond laser with a multi-core fiber serial-parallel integrated microstructure array provided by the invention.
Fig. 4 is another block diagram of substep S2 in the method for preparing a femtosecond laser with a multi-core fiber serial-parallel integrated microstructure array provided by the invention.
Fig. 5 is a block diagram showing the substep of step Sb23 in the femtosecond laser preparation method of the multi-core fiber serial-parallel integrated microstructure array shown in fig. 4.
Fig. 6 is a block diagram showing the substep of step Sb231 in the femtosecond laser preparation method of the multi-core fiber serial-parallel integrated microstructure array shown in fig. 5.
Fig. 7 is a block diagram showing the substep of step Sb26 in the femtosecond laser preparation method of the multi-core fiber serial-parallel integrated microstructure array shown in fig. 4.
Fig. 8 is a schematic structural diagram of a multicore fiber provided by the present invention.
Fig. 9 is a schematic cross-sectional view of a multicore fiber provided by the present invention.
Fig. 10 is a block diagram of the sub-step S1 in the preparation method of the femtosecond laser with the multi-core fiber serial-parallel integrated microstructure array provided by the invention.
Fig. 11 is a schematic structural diagram of a femtosecond laser processing system provided by the invention.
Fig. 12 is a schematic diagram of a femtosecond laser device in the femtosecond laser processing system provided by the invention.
Detailed Description
The present invention is described in detail below with reference to the drawings and the embodiments, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present invention and should not be construed as limiting the invention.
In the description of the present invention, it should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", or a third "may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," "disposed," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, or can be communicated between two elements or the interaction relationship between the two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
Example 1
As shown in fig. 8, the multi-core optical fiber 6 includes a coating layer 61, a cladding layer 62, and a plurality of cores 63, each core 63 being covered by the cladding layer 62, the cladding layer 62 being covered by the coating layer 61; each of the fiber cores 63 may independently transmit an optical signal, and each of the fiber cores 63 may not affect each other when transmitting an optical signal.
As shown in fig. 1 and 2, a femtosecond laser preparation method of a multi-core fiber serial-parallel integrated microstructure array, wherein the multi-core fiber 6 comprises a plurality of processing sections along an axial direction x; the method comprises the following steps:
step S1: and manually or automatically dragging the multi-core optical fiber 6 along the axial direction x to drag an mth processing section on the multi-core optical fiber 6 to the focusing point of the femtosecond laser, wherein m is more than or equal to 1.
In this step S1, the length of each dragging of the multi-core optical fiber 6 depends on the length and the pitch of each processing section, and the length and the pitch of each processing section are different according to the period, the length, and other parameters of the microstructure array, and after determining the period, the length, and other parameters of the microstructure array, the length and the pitch of each processing section can be designed and determined, so as to determine the length of each dragging of the multi-core optical fiber 6.
Step S2: and manually or automatically driving the mth processing section to perform micro-motion so as to sequentially position the focusing point of the femtosecond laser on each fiber core 63 of the mth processing section to manufacture and form a microstructure array.
In this step S2, the processing points on each of the cores 63 may be identical in position or may be offset in position, that is, all of the cores 63 may have processing points or only part of the cores 63 may have processing points, depending on the desired microstructure array.
The microstructure array is composed of a plurality of microstructures, the types of the microstructures include, but are not limited to, fiber gratings, fiber microcavities or fiber weak reflection points, and the like, and the types of the microstructure arrays include, but are not limited to, fiber grating arrays, fiber microcavity arrays or fiber weak reflection point arrays, and the like, and hybrid microstructure arrays formed by mixing various types of microstructures such as fiber gratings, fiber microcavities or fiber weak reflection points. Each fiber core in each processing section can be formed with a plurality of microstructures along the axial direction thereof to form a series-connection integrated microstructure array, can be formed with a plurality of microstructures along the radial direction thereof to form a parallel-connection integrated microstructure array, and can be simultaneously formed with a plurality of microstructures along the axial direction and the radial direction thereof to form a series-parallel connection mixed integrated microstructure array.
Step S3: repeating the steps S1-S2 until the microstructure array is manufactured and formed in each processing section of the multi-core optical fiber 6.
Example two
As an optimization scheme of the first embodiment, in this embodiment, the processing section includes a plurality of processing points along the axial direction x, as shown in fig. 3, in step S2, the mth processing section is manually driven to perform micro motion, so as to sequentially locate the focusing point of the femto-second laser on each core 63 of the mth processing section to manufacture a microstructure array, which includes the following steps:
Step Sa21: the interior of the mth processing segment is imaged along the z-axis.
In this step Sa21, the z-axis direction is perpendicular to the axial direction x. Yellow light of about 500nm, ultraviolet light of about 200-300nm and most of femtosecond laser can penetrate the coating layer 61, so that the imaging light source of the frequency band can be adopted when the interior of the mth processing section is imaged.
Step Sa22: and manually driving the mth processing section to slightly move along the axial direction x so as to position the h processing point to the focusing point of the femtosecond laser, wherein h is more than or equal to 1.
In step Sa22, since the focal point of the femtosecond laser has a fixed projection position on the imaging screen, typically the center of the imaging screen, the h-th processing point may be directly moved to the projection position of the focal point of the femtosecond laser on the imaging screen.
The distance between each processing point in the mth processing section is determined by the period of the microstructure array, and the distance between the first processing point and the starting position of the mth processing section is set by a technician according to actual processing requirements.
Step Sa23: and manually driving the mth processing section to slightly move along the z-axis direction until the definition of the boundaries on the two sides of the ith fiber core 63 in the imaging picture is visually judged to be the largest, wherein i is more than or equal to 1.
In this step Sa23, when the interior of the mth processing section is imaged, since the refractive indices between the cladding 62 and the cores 63 of the multi-core optical fiber 6 are different, the boundaries of the respective cores 63 are visible in the imaging screen.
In the process of micro-moving the mth processing section along the z-axis direction, the distance between the central axis of each fiber core 63 and the imaging focal plane is changed from large to small and then from small to large, so that the boundaries on both sides of each fiber core 63 are changed from invisible to blurred visible, then the definition is changed from small to large, the definition is changed from large to small, and finally the blurred visible is changed into invisible. When the definition of the boundary on both sides of the ith core 63 is maximized, the center axis of the ith core 63 is located on the imaging focal plane.
Step Sa24: and manually driving the mth processing section to jog along the y-axis direction until the central axis of the ith fiber core 63 in the imaging picture is visually judged to be positioned to the focusing point of the femtosecond laser.
In step Sa24, the position of the central axis of the ith fiber core 63 can be approximately determined based on the positions of the boundaries on both sides of the ith fiber core 63, and the focal point of the femtosecond laser has a fixed projection position on the imaging screen, typically the center of the imaging screen, so that the central axis of the ith fiber core 63 may be directly moved to the projection position of the focal point of the femtosecond laser on the imaging screen.
Or, a mark point can be manufactured in the mth processing section in advance by adopting the femtosecond laser, so that the projection position of the focusing point of the femtosecond laser on the imaging picture can be intuitively displayed.
Step Sa25: the femtosecond laser is used to make microstructures in the ith core 63.
In step Sa25, only a single microstructure may be formed at each processing point of each core 63, or a plurality of microstructures may be formed simultaneously.
Step Sa26: steps Sa21 to Sa25 are repeated until the microstructure is formed in the corresponding core 63 at the h processing point.
In this step Sa26, the microstructure may be formed in all the cores 63 at the h processing point, or may be formed in only a part of the cores 63 at the h processing point.
Step Sa26: and repeating the steps Sa21-Sa25 until the microstructure is manufactured and formed in each processing point of the mth processing section so as to form the microstructure array on each fiber core of the mth processing section.
Example III
As another optimization scheme of the first embodiment, in this embodiment, the processing section includes a plurality of processing points along the axial direction x, as shown in fig. 4, in step S2, the mth processing section is automatically driven to perform micro motion, so as to sequentially locate the focusing point of the femto-second laser on each fiber core 63 of the mth processing section to manufacture a microstructure array, which includes the following steps:
Step Sb21: and (3) adopting the femtosecond laser to manufacture marking points in the mth processing section.
In this step Sb21, the femtosecond laser light directly acts on the cladding 62 or the core 63 by passing through the coating layer 61, and can act with the cladding 62 or the core 63 only at the focusing point thereof, so the marking point can be regarded as the focusing point of the femtosecond laser light.
Step Sb22: the interior of the mth processing segment is imaged along the z-axis.
In this step Sb22, the z-axis direction is perpendicular to the axial direction x. Yellow light of about 500nm, ultraviolet light of about 200-300nm and most of femtosecond laser can penetrate the coating layer 61, so that the imaging light source of the frequency band can be adopted when the interior of the mth processing section is imaged.
Step Sb23: automatically driving the mth processing section to slightly move along the axial direction x so as to image one end of the mth processing section, and calculating the center coordinates of each fiber core 63 according to the marking points.
In this step Sb23, the y-axis direction and the z-axis direction are perpendicular to the axial direction x. The position of the mth processing section in the imaging picture can be observed through real-time imaging of the mth processing section, and the leftmost end of the mth processing section is moved into the imaging picture by automatically driving the mth processing section to slightly move along the axial direction x.
As shown in fig. 5, the center coordinates of each core 63 are calculated according to the mark points, and the method includes the following steps:
step Sb231: and determining the central axis of the mth processing section according to the imaging picture of the mth processing section.
In this step Sb231, as shown in fig. 9, if the multi-core fiber 6 has no central core 63 (0), the central axis of the mth processing section can be determined by the boundaries of both sides of the clad 62, and if the multi-core fiber 6 has a central core 63 (0), the central axis of the mth processing section can be determined by the boundaries of both sides of the central core 63 (0).
Wherein the method of determining the central axis of the mth processing section by the both side boundaries of the clad 62 or the central core 63 (0) is substantially the same, comprising the steps of:
automatically driving the mth processing section to slightly move along the z-axis direction, calculating the central position of the mth processing section in the z-axis direction and the positions of the two side boundaries of the cladding layer 62 or the central fiber core 63 (0) according to the definition change of the two side boundaries of the cladding layer 62 or the central fiber core 63 (0) in the imaging picture, and calculating the central position of the mth processing section in the y-axis direction.
In imaging the inside of the mth processing section, since refractive indices are different among the coating layer 61, the cladding layer 62, and the cores 63 of the multi-core optical fiber 6, the boundary of the cladding layer 62, and the boundary of each core 63 can be seen in the imaging screen.
In the process of micro-moving the m-th processing section along the z-axis direction, the distance between the center plane of the m-th processing section and the imaging focal plane is changed from large to small and then is changed from small to large, so that the boundaries on two sides of the cladding 62 or the center fiber core 63 (0) are changed from invisible to blurred and visible, then the definition is changed from small to large, the definition is changed from large to small and finally is changed from blurred and visible to invisible, when the definition of the boundaries on two sides of the cladding 62 or the center fiber core 63 (0) is maximum, the center axis of the m-th processing section is positioned on the imaging focal plane, and then the center position of the m-th processing section in the z-axis direction is determined.
Then, the two side boundaries of the cladding 62 or the center core 63 (0) are extracted in the imaging frame when the definition of the two side boundaries of the cladding 62 or the center core 63 (0) is maximum, and then the center position of the m-th processing section in the y-axis direction is determined according to the positions of the two side boundaries of the cladding 62 or the center core 63 (0).
As shown in fig. 6, the steps of extracting the boundaries of both sides of the cladding layer 62 or the central core 63 (0) in the imaging frame include the following steps:
step Sb2311: the imaging picture is converted into a gray scale picture.
Step Sb2312: and calculating the gray average value of the gray picture.
Step Sb2313: and subtracting the gray average value from the gray value of each pixel in the gray picture to obtain a preprocessed picture.
Step Sb2314: filtering the preprocessed picture by using a first Gaussian filter operator to obtain a first filtered picture, filtering the preprocessed picture by using a second Gaussian filter operator to obtain a second filtered picture, wherein standard deviations between the first Gaussian filter operator and the second Gaussian filter operator are different.
Step Sb2315: and subtracting the first filtering picture from the second filtering picture to obtain a third filtering picture.
Step Sb2316: and calculating the gray average value of each row of pixels of the mth processing section along the axial direction x in the third filtering picture to obtain a gray intensity distribution diagram.
Step Sb2317: and extracting the maximum two gray values in the gray intensity distribution diagram to obtain the two side boundaries of the cladding 62 or the central fiber 63 (0).
Step Sb232: automatically driving the mth processing section to slightly move along the y-axis direction and the z-axis direction, moving the central axis of the mth processing section to the position of the marking point, and acquiring the central coordinate (y 0, z 0) of the mth processing section according to the micro-motion quantity of the mth processing section.
In the step Sb232, the central axis of the mth processing section is moved to the original position of the marking point by driving the mth processing section to jog in the y-axis direction and the z-axis direction, so that the focusing point of the femtosecond laser is positioned on the central axis of the mth processing section, y0 and z0 are jog amounts of the mth processing section in the y-axis direction and the z-axis direction, respectively, and positive and negative of y0 and z0 represent jog directions.
Step Sb233: the central axis of the first peripheral core 63 (1) is determined based on the imaging screen of the mth processing section.
In this step Sb233, the first peripheral core 63 (1) may be any peripheral core 63 of the mth processing stage.
When determining the central axis of the first peripheral fiber core 63 (1), the same method as that for determining the central axis of the mth processing section in the step Sb231 may be adopted, that is, the mth processing section is automatically driven to jog along the z-axis direction, the central position of the first peripheral fiber core 63 (1) in the z-axis direction is determined according to the change of the definition of the boundaries on both sides of the first peripheral fiber core 63 (1) in the imaging frame, and then the central position of the first peripheral fiber core 63 (1) in the y-axis direction is determined according to the positions of the boundaries on both sides of the first peripheral fiber core 63 (1).
Step Sb234: automatically driving the mth processing section to slightly move along the y-axis direction and the z-axis direction, moving the central axis of the first peripheral fiber core 63 (1) to the original position of the marking point, and acquiring the central coordinates (y 1, z 1) of the first peripheral fiber core 63 (1) according to the micro-motion of the mth processing section.
In this step Sb234, the central axis of the first peripheral optical fiber is moved to the original position of the marking point by driving the mth processing section to jog in the y-axis direction and the z-axis direction, respectively, so that the focusing point of the femtosecond laser is positioned at the central coordinate of the first peripheral core 63 (1) (the focusing point of the femtosecond laser is moved from the central axis of the mth processing section to the central axis of the first peripheral core 63 (1)), y1 and z1 are jog amounts of the mth processing section in the y-axis direction and the z-axis direction, respectively, and positive and negative of y1 and z1 represent jog directions.
Step Sb235: calculating the center coordinates (yn, zn) of the nth peripheral core 63 (n), where yn, zn satisfies the following formula:
where n.gtoreq.2, α is the offset angle between the nth peripheral core 63 (n) and the first peripheral core 63 (1).
The peripheral cores 63 of the multicore fiber 6 are offset around their central axes by a predetermined angle, and α may be considered as a known amount between the line between the first peripheral core 63 (1) and the central axis of the multicore fiber 6 and the line between the nth peripheral core 63 (n) and the central axis of the multicore fiber 6, depending on the type of the multicore fiber 6.
As shown in fig. 7, in the multicore fiber 6, six peripheral cores 63 are provided, and the offset angles between the six peripheral cores 63 are all 60 °, so that the offset angle α=60° between the second peripheral core 63 (2) and the first peripheral core 63 (1), the offset angle α=120° between the third peripheral core 63 (3) and the first peripheral core 63 (1), the offset angle α=180° between the fourth peripheral core 63 (4) and the first peripheral core 63 (1), the offset angle α=240° between the fifth peripheral core 63 (5) and the first peripheral core 63 (1), and the offset angle α=300° between the sixth peripheral core 63 (6) and the first peripheral core 63 (1).
Wherein, the coordinate value of x along the axial direction in the center coordinate of the left end of each fiber core 63 is xL, and the micro-motion quantity along the axial direction x of the mth processing section in the step Sb23 is obtained.
Step Sb24: automatically driving the mth processing section to slightly move along the axial direction x so as to image the other end of the mth processing section, and calculating the center coordinates of each fiber core 63 according to the marking points.
In the step Sb24, the rightmost end of the mth processing segment is moved into the imaging frame by automatically driving the mth processing segment to jog in the axial direction x. When calculating the center coordinates of each of the cores 63 from the mark points, another set of positions (y 0, z 0), (y 1, z 1), and (yn, zn) can be obtained in the same manner as in step Sb 23.
Wherein, the coordinate value of the right end of each fiber core 63 along the axial direction x in the center coordinate is xR, and the micro-motion quantity along the axial direction x of the mth processing section in the step Sb23 is obtained.
Step Sb25: the position coordinates of each processing point on each of the cores 63 are calculated based on the center coordinates of each of the cores 63 at both ends of the mth processing section.
In this step Sb25, if the center coordinates obtained in steps Sb23 and Sb24 of the both ends of the ith core 63 in the mth processing stage are (xR, yR, zR) and (xL, yL, zL), respectively, the position coordinates of the respective processing points on the ith core 63 are (xi, yi, zi), xi, yi, zi satisfying the following formulas (1) to (5):
A＝atan2(yL-yR，xL-xR) (1)
xi＝R*cos(A)+xR (2)
yi＝R*sin(A)+yR (3)
zi＝R*sin(B)+zR (5)
Wherein i is more than or equal to 1, and R is the distance between each processing point and the starting position of the mth processing section.
The distance between the starting position and the first processing point is set in the system by the skilled person according to the parameters of the desired microstructure, while the distance between adjacent processing points is the period of the microstructure.
Step Sb26: and automatically driving the mth processing section to perform micro-motion according to the position coordinates of each processing point of each fiber core along the axial direction x so as to sequentially position the focusing point of the femtosecond laser on each processing point of each fiber core of the mth processing section to manufacture the microstructure, thereby forming the microstructure array on each fiber core of the mth processing section.
In this step Sb26, the processing points on each of the cores 63 may be identical in position or may be offset in position, that is, all of the cores 63 may have processing points or only part of the cores 63 may have processing points, depending on the desired microstructure array.
Assuming that the position coordinates of each processing point on the ith fiber core 63 are (xi, yi, zi), as shown in fig. 7, according to the position coordinates of each processing point on each fiber core, automatically driving the mth processing section to perform micro motion so as to sequentially locate the focusing point of the femto-second laser on each processing point of each fiber core of the mth processing section to manufacture the microstructure, so as to form the microstructure array on each fiber core of the mth processing section, including the following steps:
Step Sb261: and automatically driving the mth processing section to slightly move along the axial direction x according to the position coordinate xi of the mth processing point so as to position the h processing point to the focusing point of the femtosecond laser, wherein h is more than or equal to 1.
Step Sb262: and automatically driving the m-th processing section to slightly move along the y-axis direction and the z-axis direction according to the position coordinates yi and zi of the i-th fiber core on the h-th processing point so as to position the i-th fiber core of the h-th processing point to the focusing point of the femtosecond laser.
Step Sb263: and manufacturing the microstructure on the ith fiber core of the h processing point by using a femtosecond laser.
In this step Sb223, the microstructure may be formed in each of the cores 63 at the h-th processing point, or may be formed in only a part of the cores 63 at the h-th processing point, that is, the microstructure type, period, length, etc. in each of the cores 63 may be the same or different.
Step Sb264: repeating the steps Sb262-Sb263 until the microstructure is manufactured in the corresponding fiber core of the h processing point.
Step Sb265: repeating the steps Sb261-Sb264 until the microstructure is manufactured and formed in each processing point of the mth processing section, so as to form the microstructure array on each fiber core of the mth processing section.
Example IV
As an optimization scheme of the first, second or third embodiments, as shown in fig. 10, in step S1 of the present embodiment, when the multi-core optical fiber 6 is manually or automatically pulled in the axial direction x, the pulling speed of the multi-core optical fiber 6 is adjusted according to the tension of the multi-core optical fiber 6.
When the tension of the multi-core optical fiber 6 is too large, the dragging speed of the multi-core optical fiber 6 is slowed down, and when the tension of the multi-core optical fiber 6 is too small, the dragging speed of the multi-core optical fiber 6 is increased, so that the tension of the multi-core optical fiber 6 is maintained in a reasonable range.
If the multi-core optical fiber is automatically dragged, continuously paying out the multi-core optical fiber 6 at one end and continuously collecting the multi-core optical fiber 6 at the other end; the multi-core optical fiber 6 is provided with a weight piece, and the dragging speed of the multi-core optical fiber 6 is adjusted according to the tension of the multi-core optical fiber 6, and the method comprises the following steps:
step S11: the actual height of the weight is detected.
In the step S11, a laser sensor may be used to emit a ranging laser to the weight, and then receive the ranging laser reflected by the weight, and calculate, according to the flight time of the ranging laser, the actual height of the weight as the distance between the two.
Step S12: and calculating the height deviation value of the weight according to the actual height and the expected height of the weight.
In this step S12, a predetermined height is set in advance for the weight, at which the weight and the tension of the multicore fiber 6 are balanced, and the unwinding speed and the winding speed of the multicore fiber 6 are equal.
Step S13: and judging the lifting state of the weight according to the height deviation value of the weight, if the weight is in the lifting state, increasing the fiber releasing speed of the multi-core optical fiber 6, if the weight is in the descending state, reducing the fiber releasing speed of the multi-core optical fiber 6, and if the weight is not lifted or lowered, adjusting the fiber releasing speed of the multi-core optical fiber 6 to be the same as the fiber collecting speed.
In this step S13, the lifting state of the weight is determined by the positive and negative of the height deviation value, and when the height deviation value is positive, the weight is in the lifting state, and when the height deviation value is negative, the weight is in the lowering state.
The drop speed of the multi-core optical fiber 6 is maintained constant while the drag speed of the multi-core optical fiber 6 is adjusted.
Specifically, if in the kth detection of the sensor, the height deviation value of the weight is err (k), where err (k) +.0, the fiber-releasing speed v1=kp×err (k) +kd (err (k) -err (k-1)) of the multi-core optical fiber 6, where Kp is a scaling factor set in the PID algorithm, and Kd is a differential factor set in the PID algorithm.
The proportionality coefficient Kp is used to reduce calculation errors and the derivative coefficient Kd is used to place overshoot.
Example five
As shown in fig. 11, a femtosecond laser processing system is used to implement the femtosecond laser processing method described in the first, second, third, or fourth embodiments; the system comprises a fiber releasing device 1, a fiber collecting device 2, a micro-motion platform 3 and a femtosecond laser device 4, wherein the micro-motion platform 3 and the femtosecond laser device 4 are positioned between the fiber releasing device 1 and the fiber collecting device 2; two optical fiber clamps 31 are arranged on the micro-motion platform 3.
The fiber releasing device 1 is connected with one end of the multi-core optical fiber 6 and is used for continuously releasing the multi-core optical fiber 6, and comprises a fiber releasing disc 11 and a fiber releasing motor 12, wherein the fiber releasing motor 12 is connected with and drives the fiber releasing disc 11 to rotate; one end of the multicore fiber 6 is wound around the fiber-releasing disc 11.
The fiber collecting device 2 is connected with the other end of the multi-core optical fiber 6 and is used for continuously collecting the multi-core optical fiber 6, and comprises a fiber collecting disc 21 and a fiber collecting motor 22, wherein the fiber collecting motor 22 is connected with and drives the fiber collecting disc 21 to rotate; the other end of the multicore fiber 6 is wound around the fiber-releasing disc 11.
The fiber releasing device 1 and the fiber collecting device 2 are matched with each other to drag the multi-core optical fiber 6 along the axial direction x.
The micro-motion platform 3 is used for driving the processing section of the multi-core optical fiber 6 to perform micro-motion along the x-axis direction, the y-axis direction and the z-axis direction, and the two optical fiber clamps 31 are respectively used for clamping two ends of the processing section of the multi-core optical fiber 6.
As shown in fig. 12, the femto-second laser device 4 includes a femto-second laser 41, a light valve shutter 42, an attenuator 43, a dichroic mirror 44, a micro objective 45, an imaging light source 46, and a CCD camera 47; the femtosecond laser 41, the light valve shutter 42, the attenuator 43, the dichroic mirror 44 and the micro objective 45 are sequentially arranged along the optical path of the femtosecond laser, and the CCD camera 47 is positioned on the back surface of the dichroic mirror 44; the imaging light source 46 is located between the two optical fiber clamps 31, and is located at two sides of the multi-core optical fiber 6 along the z-axis direction with the micro objective 45; the femtosecond laser emitted by the femtosecond laser 41 forms a focusing point on the multi-core optical fiber 6 through the reflection of the bicolor mirror 44 and the focusing of the micro objective lens 45 after passing through the shutter 42 and the attenuator 43; after passing through the processing section of the multi-core optical fiber 6, the imaging light emitted by the imaging light source 46 is focused by the microscope objective 45 and transmitted by the dichroic mirror 44 to be imaged on the CCD camera 47.
Since the micro objective lens 45 is shared by the femtosecond laser 41 and the CCD camera 47, the focal point of the femtosecond laser is on the imaging focal plane of the CCD camera 47, and the projection position of the focal point of the femtosecond laser on the imaging screen of the CCD camera 47 is the center of the imaging screen.
Example six
As an optimization scheme of the fifth embodiment, as shown in fig. 11, the femtosecond laser processing system in this embodiment is used for implementing the femtosecond laser processing method described in the fourth embodiment, and includes a detection device 5 for detecting the tension of the multicore fiber 6, and is located between the fiber collecting device 2 and the micro-motion platform 3.
The detection device 5 comprises a weight 51 and a laser sensor 52.
In this embodiment, the weight member 51 is a movable pulley, and the detecting device 5 further includes two fixed pulleys 53 for assistance, the two fixed pulleys 53 being located on both sides of the movable pulley, the multi-core optical fiber 6 being wound over the fixed pulleys 53, then being wound from above the fixed pulleys 53 to below the movable pulleys, and then being wound from below the movable pulleys to above the other fixed pulleys 53, in order to fix the height of the multi-core optical fiber 6 at both ends of the movable pulleys.
Finally, it should be noted that the foregoing embodiments are merely for illustrating the technical solution of the embodiments of the present invention and are not intended to limit the embodiments of the present invention, and although the embodiments of the present invention have been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solution of the embodiments of the present invention may be modified or replaced with the same, and the modified or replaced technical solution may not deviate from the scope of the technical solution of the embodiments of the present invention.
Claims (11)
1. A multi-core optical fiber series-parallel connection integrated micro-structure array femtosecond laser preparation method, the multi-core optical fiber includes a plurality of processing sections along the axial direction x; the method comprises the following steps:
step S1: manually or automatically dragging the multi-core optical fiber along the axial direction x to drag an mth processing section on the multi-core optical fiber to a focusing point of the femtosecond laser, wherein m is more than or equal to 1;
step S2: automatically driving the mth processing section to perform micro-motion so as to sequentially position the focusing point of the femtosecond laser on each fiber core of the mth processing section to manufacture and form a microstructure array;
step S3: repeating the steps S1-S2 until the microstructure array is formed in each processing section of the multi-core optical fiber;
Wherein the processing section comprises a plurality of processing points along an axial direction x; in step S2, automatically driving the mth processing section to perform micro-motion, so as to sequentially locate the focusing point of the femto-second laser on each fiber core of the mth processing section to manufacture and form a microstructure array, including the following steps:
step Sb25: calculating the position coordinates of each processing point on each fiber core according to the center coordinates of each fiber core at the two ends of the mth processing section, if the center coordinates of the two ends of the ith fiber core in the mth processing section are (xR, yR, zR) and (xL, yL, zL) respectively, the position coordinates of each processing point on the ith fiber core are (xi, yi, zi), xi, yi, zi) and satisfy the following formulas (1) - (5):
wherein i is more than or equal to 1, R is the distance between each processing point and the starting position of the mth processing section, and the y-axis direction and the z-axis direction are perpendicular to the axial direction x.
2. The method for preparing a femtosecond laser of a multi-core fiber serial-parallel integrated micro structure array according to claim 1, wherein, in the step S2,
before the step Sb25, the method further comprises the following steps:
step Sb21: marking points in an mth processing section by adopting the femtosecond laser;
Step Sb22: internal imaging is carried out on the mth processing section along the z-axis direction;
step Sb23: automatically driving the mth processing section to slightly move along the axial direction x so as to image one end of the mth processing section, and calculating the center coordinates of each fiber core according to the marking points;
step Sb24: automatically driving the mth processing section to slightly move along the axial direction x so as to image the other end of the mth processing section, and calculating the center coordinates of each fiber core according to the marking points;
after the step Sb25, the method further comprises the steps of:
step Sb26: and automatically driving the mth processing section to perform micro-motion according to the position coordinates of each processing point on each fiber core so as to sequentially position the focusing point of the femtosecond laser on each processing point of each fiber core of the mth processing section to manufacture a microstructure, thereby forming the microstructure array on each fiber core of the mth processing section.
3. The method for preparing the femtosecond laser of the multi-core fiber serial-parallel integrated micro structure array according to claim 2, wherein the multi-core fiber comprises a plurality of peripheral fiber cores, and in step Sb23 or step Sb24, center coordinates of the respective fiber cores are calculated according to the mark points, comprising the steps of:
According to the imaging picture of the mth processing section, determining the central axis of the mth processing section;
automatically driving the mth processing section to jog along the y-axis direction and the z-axis direction, moving the central axis of the mth processing section to the position of the mark point, and acquiring the central coordinate (y) of the mth processing section according to the jog quantity of the mth processing section 0 ，z 0 ）；
Determining a central axis of the first peripheral fiber core according to the imaging picture of the mth processing section;
automatically driving the mth processing section to slightly move along the y-axis direction and the z-axis direction, moving the central axis of the first peripheral fiber core to the position of the marking point, and acquiring the central coordinate (y 1 ，z 1 ）；
Calculating the center coordinates (y n ，z n ），y n 、z n The following formula is satisfied:
wherein n is greater than or equal to 2, and alpha is the offset angle between the nth peripheral fiber core and the first peripheral fiber core.
4. The method for preparing a femtosecond laser of an integrated micro-structure array of serial-parallel multi-core fiber according to claim 3, wherein the multi-core fiber comprises a cladding, if there is no central core in the multi-core fiber, a central axis of an mth processing section can be determined by two side boundaries of the cladding, and if there is a central core in the multi-core fiber, a central axis of the mth processing section can be determined by two side boundaries of the central core.
5. The method for preparing the femtosecond laser of the multi-core fiber serial-parallel integrated micro-structure array according to claim 3 or 4, wherein the central axis of the mth processing section or the first peripheral fiber core is determined, comprising the steps of:
automatically driving the mth processing section to slightly move along the z-axis direction, determining the central position of the mth processing section or the first peripheral fiber core in the z-axis direction according to the definition change of the boundary of the two sides of the cladding layer, the central fiber core or the first peripheral fiber core in the imaging picture, and calculating the central position of the mth processing section or the first peripheral fiber core in the y-axis direction according to the positions of the boundary of the two sides of the cladding layer, the central fiber core or the first peripheral fiber core.
6. The method for preparing the femtosecond laser of the multi-core fiber serial-parallel integrated micro-structure array according to claim 4, wherein the extraction of two side boundaries of the cladding, the center fiber core or the first peripheral fiber core in the imaging picture comprises the following steps:
converting the imaging picture into a gray scale picture;
calculating a gray average value of the gray picture;
subtracting the gray average value from the gray value of each pixel in the gray picture to obtain a preprocessed picture;
Filtering the preprocessed picture by using a first Gaussian filter operator to obtain a first filtered picture, and filtering the preprocessed picture by using a second Gaussian filter operator to obtain a second filtered picture, wherein standard deviations between the first Gaussian filter operator and the second Gaussian filter operator are different;
subtracting the first filtering picture from the second filtering picture to obtain a third filtering picture;
calculating the gray average value of each row of pixels of the mth processing section along the axial direction x in the third filtering picture to obtain a gray intensity distribution map;
and extracting the two maximum gray values in the gray intensity distribution diagram to obtain the two side boundaries of the cladding, the central fiber core or the first peripheral fiber core.
7. The method for preparing the femtosecond laser of the multi-core fiber serial-parallel integrated microstructure array according to claim 2, wherein in the step Sb26, according to the position coordinates of each processing point on each fiber core, the mth processing section is automatically driven to perform micro motion so as to sequentially position the focusing point of the femtosecond laser on each processing point of each fiber core of the mth processing section to make a microstructure, so as to form the microstructure array on each fiber core of the mth processing section, comprising the following steps:
Step Sb261: according to the position coordinates xi of the h processing point, automatically driving the m processing section to slightly move along the axial direction x so as to position the h processing point to the focusing point of the femtosecond laser, wherein h is more than or equal to 1;
step Sb262: automatically driving the mth processing section to slightly move along the y-axis direction and the z-axis direction according to the position coordinates yi and zi of the ith fiber core on the h processing point so as to position the ith fiber core of the h processing point to the focusing point of the femtosecond laser;
step Sb263: manufacturing the microstructure on an ith fiber core of an h processing point by using femtosecond laser;
step Sb264: repeating the steps Sb262-Sb263 until the microstructure is manufactured in the corresponding fiber core of the h processing point;
step Sb265: repeating the steps Sb261-Sb264 until the microstructure is manufactured and formed in each processing point of the mth processing section, so as to form the microstructure array on each fiber core of the mth processing section.
8. The method for preparing a femtosecond laser of a multi-core optical fiber serial-parallel integrated micro structure array according to claim 1, wherein in step S1, when the multi-core optical fiber is manually or automatically dragged along an axial direction x, a dragging speed of the multi-core optical fiber is adjusted according to a tension of the multi-core optical fiber.
9. The method for preparing a femtosecond laser of a multi-core optical fiber serial-parallel integrated micro structure array according to claim 8, wherein if the multi-core optical fiber is automatically dragged, the multi-core optical fiber is continuously discharged at one end and continuously collected at the other end; the multi-core optical fiber is provided with a weight piece, the dragging speed of the multi-core optical fiber is adjusted according to the tension of the multi-core optical fiber, and the method comprises the following steps:
step S11: detecting an actual height of the weight;
step S12: calculating the height deviation value of the weight according to the actual height and the expected height of the weight;
step S13: judging the lifting state of the weight according to the height deviation value of the weight, if the weight is in the lifting state, increasing the fiber releasing speed of the multi-core optical fiber, if the weight is in the descending state, reducing the fiber releasing speed of the multi-core optical fiber, and if the weight is not lifted or lowered, adjusting the fiber releasing speed of the multi-core optical fiber to be the same as the fiber collecting speed.
10. The method for preparing the femtosecond laser of the multi-core fiber serial-parallel integrated micro-structure array according to claim 9, wherein in the kth detection, the height deviation value of the weight is err (k), and err (k) +.0, the fiber release speed v1=kp×err (k) +kd (err (k) -err (k-1)), where Kp is a scaling factor set in the PID algorithm, and Kd is a differentiation factor set in the PID algorithm.
11. The method for preparing the femtosecond laser of the multi-core fiber serial-parallel integrated microstructure array according to claim 1, wherein the microstructure array is composed of a plurality of microstructures, the microstructures are fiber gratings, fiber microcavities or fiber weak reflection points and the like, and the microstructure array is a fiber grating array, a fiber microcavity array, a fiber weak reflection point array or a mixed microstructure array formed by mixing at least two microstructures in the fiber gratings, the fiber microcavities or the fiber weak reflection points; the fiber cores in the processing sections are formed with a plurality of microstructures along the axial direction of the fiber cores to form a series-connection integrated microstructure array, or are formed with a plurality of microstructures along the radial direction of the fiber cores to form a parallel-connection integrated microstructure array, or are formed with a plurality of microstructures along the axial direction and the radial direction of the fiber cores to form a series-parallel connection mixed integrated microstructure array.
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