CN116088027A - Detector detection device and method for detecting detector by using same - Google Patents
Detector detection device and method for detecting detector by using same Download PDFInfo
- Publication number
- CN116088027A CN116088027A CN202110583614.7A CN202110583614A CN116088027A CN 116088027 A CN116088027 A CN 116088027A CN 202110583614 A CN202110583614 A CN 202110583614A CN 116088027 A CN116088027 A CN 116088027A
- Authority
- CN
- China
- Prior art keywords
- detection
- detector
- light source
- module
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/24—Measuring radiation intensity with semiconductor detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T7/00—Details of radiation-measuring instruments
Landscapes
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Molecular Biology (AREA)
- High Energy & Nuclear Physics (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Geophysics And Detection Of Objects (AREA)
Abstract
The application relates to a detector detection device and a method for detecting a detector by using the detector detection device, wherein the detector detection device comprises a sealed cavity, a moving assembly, a positioning detection module and a detection light source module; the moving assembly is arranged on the inner wall of the bottom of the sealing chamber, and the top of the moving assembly is suitable for placing the detector so that the moving assembly drives the detector to move in the sealing chamber; the positioning detection module and the detection light source module are detachably arranged at the top of the sealed cavity, and extend into the sealed cavity; the positioning detection module and the detection light source module are detachably arranged at the same position of the sealed cavity, so that after the positioning detection module performs positioning detection on the detection area of the detector, the detection light source module performs performance detection on the detection area based on the positioning result of the detection area. It can detect whether different detectors are functioning properly.
Description
Technical Field
The present application relates to the field of semiconductor electron beam imaging detection devices, and in particular, to a detector detection device and a method for detecting a detector using the same.
Background
The electron beam is accelerated to the surface of the sample during the working principle of the electron beam imaging detection device, various signals such as X-rays, secondary electrons, back scattered electrons and the like are generated, the electronic signals are received by the solid-state detector, the electrons and the surface structure of the detector act to generate electric signals, and the required image can be obtained after the electric signals are processed.
The detection areas of the solid-state detector are of a multi-group structure, generally four, eight and twelve, each of which is output as an independent circuit, and after receiving electrons, the voltage signal can be obtained through the voltage amplification detection device, and the detection difficulty of whether the function of the fixed detector is normal is caused by the different sizes of the detection areas of different solid-state detectors.
Disclosure of Invention
In view of the foregoing, the present application proposes a detector detecting apparatus and a method for detecting a detector using the same, which can detect whether different detectors function normally.
According to an aspect of the present application, there is provided a detector detection apparatus including a sealed chamber, a moving assembly, a positioning detection module, and a detection light source module;
the moving assembly is arranged on the inner wall of the bottom of the sealing chamber, and the top of the moving assembly is suitable for placing the detector so that the moving assembly drives the detector to move in the sealing chamber;
the positioning detection module and the detection light source module are detachably arranged at the top of the sealed cavity, and extend into the sealed cavity;
the positioning detection module and the detection light source module are detachably arranged at the same position of the sealing cavity, so that after the positioning detection module performs positioning detection on the detection area of the detector, the detection light source module performs performance detection on the detection area based on the positioning result of the detection area.
In one possible implementation, the moving assembly includes an XY axis moving platform, wherein a moving plane of the XY axis moving platform is a plane parallel to a bottom inner wall of the sealed chamber;
the top of the XY axis moving platform is suitable for placing the detector, so that the XY axis moving platform drives the detector to move.
In one possible implementation manner, a base is arranged on the inner wall of the bottom of the sealed cavity, and the XY axis moving platform is movably arranged on the top of the base.
In one possible implementation manner, the positioning detection module comprises a photoelectric sensor, a lens and a coaxial light source, and a mounting hole is formed in the top of the sealed cavity;
the lens is detachably arranged on the mounting hole and extends into the sealing cavity;
the coaxial light source is fixedly arranged on the outer wall of one side of the lens, and the coaxial light source provides a light source for the lens.
In one possible implementation, the photosensor is arranged coaxially with the lens.
In one possible implementation manner, the detection light source module comprises a light source assembly and a focusing lens, and a mounting hole is formed in the top of the sealing chamber;
the focusing lens is detachably mounted in the mounting hole, the focusing lens stretches into the sealing cavity to be arranged, and the light source assembly is detachably mounted at the top of the focusing lens.
In one possible implementation, the focusing lens is disposed coaxially with the light source assembly;
the focusing lens is provided with one or more than two focusing lenses, and when the focusing lens is provided with more than two focusing lenses, the two or more than two focusing lenses are sequentially and detachably connected along the axis direction of the mounting hole;
more than two focusing lenses are coaxially arranged, and the light source assembly is detachably arranged at the top of the focusing lenses far away from the bottom side wall of the sealing chamber.
In one possible implementation, the sealed chamber is a light box.
According to another aspect of the present application, there is provided a method of detecting a detector, the detector being detected using a detector detection apparatus as described in any one of the preceding claims, comprising the steps of:
placing the detector to be detected on the moving assembly;
electrically connecting an output port of the detector with a detection device;
the positioning detection module is arranged at the top of the sealing chamber, the moving assembly is adjusted, and the detector is moved to the area below the positioning detection module;
the positioning detection module detects the position of each detection area of the detector;
recording position coordinate information of each detection area;
the positioning detection module is disassembled, and the detection light source module is installed at the top of the sealed cavity;
adjusting the moving assembly according to the recorded position coordinate information so that detection light spots emitted by the detection light source module irradiate each detection area in sequence;
and sequentially reading the data of the detection device after the detection light spots irradiate the detection areas, and judging whether the function of each detection area is normal or not according to the data.
In one possible implementation manner, after the detection light source module is installed on the top of the sealed chamber, the method further includes the following steps:
and adjusting the light source power and the light spot size of the detection light source module according to the type of the detector.
The embodiment of the application provides a detection environment for the detector by arranging the sealing chamber, so that the detector can be inspected under the sealing environment. By providing a moving assembly within the sealed chamber, the detector is provided on the moving assembly, thereby enabling positional movement of the detector within the sealed chamber. When detecting whether the function of the detector is normal, the positioning detection module is installed at the top of the sealed cavity, and the positioning detection module positions each detection area on the detector by moving the moving assembly. And then the positioning detection module is taken down, the detection light source module is installed on the sealed cavity, the moving assembly is moved according to the positioning result of the positioning detection module, the light spots emitted by the detection light source module are sequentially irradiated on each detection area of the detector, and each time the light spots are irradiated on one detection area, the data on the detection device are correspondingly read, so that whether the function of each detection area is normal is judged. In summary, the detector detection device of the embodiment of the present application may detect whether different detectors function normally.
Other features and aspects of the present application will become apparent from the following detailed description of exemplary embodiments, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate exemplary embodiments, features and aspects of the present application and together with the description, serve to explain the principles of the present application.
Fig. 1 is a schematic diagram of a main structure of a module to be tested in a mounting and positioning manner of a detector detection device according to an embodiment of the present application;
fig. 2 is a schematic diagram showing a main structure of a mounting detection light source module of the detector detection apparatus according to the embodiment of the present application;
fig. 3 is a schematic structural diagram of a detection light source module of the detector detection apparatus according to the embodiment of the present application;
fig. 4 is a schematic diagram showing another structure of a detection light source module of the detector detection apparatus according to the embodiment of the present application.
Detailed Description
Various exemplary embodiments, features and aspects of the present application will be described in detail below with reference to the accompanying drawings. In the drawings, like reference numbers indicate identical or functionally similar elements. Although various aspects of the embodiments are illustrated in the accompanying drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
It should be understood, however, that the terms "center," "longitudinal," "transverse," "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counter-clockwise," "axial," "radial," "circumferential," and the like indicate or are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of describing the invention or simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
The word "exemplary" is used herein to mean "serving as an example, embodiment, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments.
In addition, numerous specific details are set forth in the following detailed description in order to provide a better understanding of the present application. It will be understood by those skilled in the art that the present application may be practiced without some of these specific details. In some instances, methods, means, elements, and circuits have not been described in detail as not to unnecessarily obscure the present application.
Fig. 1 is a schematic diagram of a main structure of a detection module for detecting installation and positioning of a detection device of a detector 500 according to an embodiment of the present application. Fig. 2 is a schematic diagram showing a main structure of the installation detection light source module 400 of the detector 500 detection apparatus according to the embodiment of the present application. As shown in fig. 1 or 2, the detector 500 detecting apparatus includes: the device comprises a sealing chamber 100, a moving assembly, a positioning detection module 300 and a detection light source module 400, wherein the moving assembly is arranged on the inner wall of the bottom of the sealing chamber 100, the top of the moving assembly is used for placing a detector 500, and the moving assembly can drive the detector 500 to move in the sealing chamber 100. The positioning detection film and the detection light source module 400 are detachably mounted on the top of the sealed chamber 100, the positioning detection module 300 and the detection light source module 400 extend into the sealed chamber 100, and the positioning detection module 300 and the detection light source module 400 are detachably mounted on the same position of the sealed chamber 100. After the positioning detection module 300 performs positioning detection on the detection area of the detector 500, the detection light source module 400 performs performance detection on the detection area based on the positioning structure of the detection area. Namely, the positioning detection module 300 and the detection light source module 400 are installed on the resealing chamber 100 at present, and the positioning detection module 300 performs positioning detection on the detection area of the detector 500 when installed on the sealing chamber 100. Then, after the positioning detection module 300 is detached from the sealed chamber 100, the detection light source module 400 is mounted on the sealed chamber 100, so as to perform performance detection on the detection area. Here, it should be noted that the output of the detector 500 may be electrically connected to the detecting means when detecting the function of the detector 500.
The detector 500 detection apparatus of the embodiment of the present application provides a detected environment for the detector 500 by providing the sealed chamber 100, so that the detector 500 can be inspected in the sealed environment. By providing a moving assembly within the sealed chamber 100, the probe 500 is provided on the moving assembly, thereby enabling positional movement of the probe 500 within the sealed chamber 100. In detecting whether the function of the probe 500 is normal, the positioning detection module 300 is installed at the top of the sealed chamber 100, and the positioning detection module 300 positions the position of each detection area on the probe 500 by moving the moving assembly. And then the positioning detection module 300 is taken down, the detection light source module 400 is mounted on the sealed chamber 100, the moving assembly is moved according to the positioning result of the positioning detection module 300, the light spots emitted by the detection light source module 400 are sequentially irradiated on each detection area of the detector 500, and each time the light spots are irradiated on one detection area, the data on the detection device are correspondingly read, so that whether the function of each detection area is normal is judged. In summary, the detector 500 detection device according to the embodiment of the present application may detect whether different detectors 500 function normally.
It should be noted here that in one possible implementation, the detection area of the detector 500 may have four lobes, eight lobes, twelve lobes, or other numbers of lobes, and each lobe is detected separately when performing performance detection on the detection area of the detector 500.
Still further, in one possible implementation, the moving assembly includes an XY axis moving stage 200, wherein a moving plane of the XY axis moving stage 200 is a plane parallel to a bottom inner wall of the sealed chamber 100. The detector 500 is placed on top of the XY-axis moving stage 200 so that the XY-axis moving stage 200 drives the detector 500 to move. Therefore, the moving assembly is arranged to be an assembly moving along the double shafts, and movement of the moving assembly is facilitated.
Here, it should be noted that in one possible implementation, taking the sealed chamber 100 as a rectangular cavity as an example: "X" in the XY-axis moving stage 200 refers to a length direction along the bottom plane of the sealed chamber 100, and "Y" refers to a width direction along the bottom plane of the sealed chamber 100.
Here, it should also be noted that the XY-axis moving platform 200 includes a first moving slide rail, a second moving slide rail, and a mounting platform, the second moving slide rail being movably mounted on the first moving slide rail so that the second moving slide rail can reciprocate in the track direction of the first moving slide rail. The mounting platform is movably mounted on the top of the second movable slide rail, so that the mounting platform can reciprocate along the track direction of the second movable slide rail. And the first movable slide rail and the second movable slide rail are vertically arranged. Thus, the detector 500 can be biaxially moved by the above-described structure.
Here, it should also be noted that in one possible implementation, the first moving slide includes a first rail and a second rail, which are arranged in parallel. The second movable sliding rail comprises a first movable seat and a second movable seat, wherein the first movable seat is slidably arranged between the first track and the second track, and the first movable seat can reciprocate along the first track and the second track. The second removes the top that the seat was fixed at first removal seat, and the second removes the seat and includes third track and fourth track, and wherein, third track and fourth track parallel arrangement, and third track all set up along the length direction of second removal seat. The mounting platform is movably mounted on the third rail and the fourth rail such that the mounting platform can move along the third rail and the fourth rail. The detector 500 may be disposed on a mounting platform.
Here, it should also be noted that, in one possible implementation manner, the first track and the third track may be implemented by using lead screws, and one ends of the first track and the third track are fixedly connected to a driving motor, so as to drive the first track and the second track to rotate.
Here, it should also be noted that in one possible implementation, both the first moving rail and the second moving rail may be pneumatic rails.
Still further, in one possible implementation, a base 110 is further provided on the bottom inner wall of the sealed chamber 100, and the xy axis moving platform 200 is movably installed on top of the base 110.
Here, it should also be noted that, in one possible implementation, the top of the XY-axis moving platform 200 may be provided with a probe 500 jig, since the probe 500 is stably mounted on the XY-axis moving platform 200. Here, it should be noted that the fixture of the probe 500 may be implemented by conventional technical means of those skilled in the art, and will not be described herein.
In one possible implementation, the location detection module 300 includes a photosensor 310, a lens 320, and a coaxial light source 330, and a mounting hole is formed at the top of the sealed chamber 100. The lens 320 is detachably mounted on the mounting hole, and the lens 320 is disposed to extend into the sealing chamber 100. The coaxial light source 330 is fixedly installed on one side outer wall of the lens 320, and the coaxial light source 330 provides a light source for the lens 320. Thus, light can be provided to the inside of the sealed chamber 100 through the spindle nose light source, the position of each detection area of the detector 500 on the moving assembly is captured through the lens 320, the position image of each detection area is fed back through the photoelectric sensor 310, and the corresponding position coordinates are recorded, so that the position detection of each detection area of the detector 500 is completed.
Further, in one possible implementation, the photosensor 310 is disposed coaxially with the lens 320, thereby enabling more accurate position image feedback from the photoelastic sensor.
Here, it should be noted that the coaxiality in the coaxiality light source 330 means: the optical axis of the light beam of the light source impinging on the detector 500 is arranged coaxially with the optical axis of the light beam refracted back by the detector 500.
Here, it should also be noted that in one possible implementation, the lens 320 and the sealed chamber 100 may be fixed to the sealed chamber 100 by a hoop.
As shown in fig. 1, 2, 3 or 4, in one possible implementation, the detection light source module 400 includes a light source assembly 410 and a focusing lens 420, a mounting hole is formed at the top of the sealed chamber 100, and the mounting hole is the same as the mounting hole when the positioning detection module 300 is disposed. The focusing lens 420 is detachably mounted in the mounting hole, the focusing lens 420 is disposed to extend into the sealed chamber 100, and the light source assembly 410 is detachably mounted on top of the focusing lens 420.
Further, in one possible implementation, the focusing lens 420 is disposed coaxially with the light source assembly 410, and the focusing lens 420 is provided with one or more than two focusing lenses 420, and when the focusing lens 420 is provided with more than two focusing lenses 420, the more than two focusing lenses 420 are detachably connected in sequence along the axis direction of the mounting hole. More than two focusing lenses 420 are coaxially disposed, and the light source assembly 410 is detachably mounted on top of the focusing lenses 420 away from the bottom sidewall of the sealed chamber 100. Thus, spot size adjustment (which may be between 10um-10 mm) may be performed by adjusting the position of the focusing lens 420, and light source power adjustment may be performed by replacing the light source assembly 410.
In one possible implementation, the sealed chamber 100 is a light box. Thus, a dark environment is provided for the detection of the detector 500, so that the detector 500 detection apparatus of the embodiment of the present application can also be used outdoors.
Here, it should be noted that, in one possible implementation, the sealed chamber 100 may use a light shielding material, such as: a nano shading material.
Here, it should also be noted that in one possible implementation, the sealed chamber 100 may include a top cover and a case, wherein the top of the case is provided with an opening, the top cover is provided at the top opening of the case, and the top cover covers the top opening of the case. Therefore, the movable assembly can be conveniently installed and detached.
Here, it should also be noted that in one possible implementation, a threading hole is provided on one side wall of the sealed chamber 100 to enable the probe 500 to be electrically connected with the detection device through a cable.
Here, it should also be noted that in one possible implementation, the top of the box is provided with a sealing groove, which is opened along the top circumference of the box. The sealing groove is internally provided with a sealing ring, and when the top cover is buckled with the box body, the top of the sealing ring is abutted with the top cover. Thereby, the sealing performance of the sealed chamber 100 is further increased, and the light entering the inside of the sealed chamber 100 from the outside is further reduced.
Based on the above detector 500 detection apparatus, the present application further provides a method for detecting a detector 500 using the detector 500 detection apparatus according to any one of the above claims, which includes the following steps:
firstly, placing a detector 500 to be detected on a moving component;
secondly, the output port of the detector 500 is electrically connected with a detection device;
then, the positioning detection module 300 is mounted on the top of the sealed chamber 100, and the position of the moving assembly is adjusted, and the crystal detector 500 is moved to the lower region of the positioning detection module 300;
then, the position of each detection area of the detector 500 is detected and positioned by using the positioning detection module 300;
and recording the position coordinate information of each detection area in the process of detecting and positioning;
then, the positioning detection module 300 is detached, and the detection light source module 400 is mounted on the top of the sealed chamber 100;
subsequently, the moving assembly is adjusted according to the recorded position coordinate information, so that the detection light spots emitted by the detection light source module 400 are sequentially irradiated on each detection area;
and respectively reading the data on the detection device of each detection area irradiated by the light spot, and judging whether the function of each detection area is normal or not according to the data on the detection device corresponding to each detection area.
Therefore, the function time of each detection area of the detection areas can be normally detected through the above process, and different detectors 500 can be detected, so that the detection device is convenient to use and high in universality.
Further, in one possible implementation, after the detection light source module 400 is installed on top of the sealed chamber 100, the method further includes the following steps: the light source power and the spot size of the detection light source module 400 are adjusted according to the kind of the detector 500.
The embodiments of the present application have been described above, the foregoing description is exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described. The terminology used herein was chosen in order to best explain the principles of the embodiments, the practical application, or the improvement of technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (10)
1. The detector detection equipment is characterized by comprising a sealed cavity, a moving assembly, a positioning detection module and a detection light source module;
the moving assembly is arranged on the inner wall of the bottom of the sealing chamber, and the top of the moving assembly is suitable for placing the detector so that the moving assembly drives the detector to move in the sealing chamber;
the positioning detection module and the detection light source module are detachably arranged at the top of the sealed cavity, and extend into the sealed cavity;
the positioning detection module and the detection light source module are detachably arranged at the same position of the sealing cavity, so that after the positioning detection module performs positioning detection on the detection area of the detector, the detection light source module performs performance detection on the detection area based on the positioning result of the detection area.
2. The detector inspection apparatus of claim 1 wherein the movement assembly comprises an XY axis movement stage, wherein the plane of movement of the XY axis movement stage is a plane parallel to the bottom inner wall of the sealed chamber;
the top of the XY axis moving platform is suitable for placing the detector, so that the XY axis moving platform drives the detector to move.
3. The detector inspection apparatus according to claim 2, wherein a base is provided on a bottom inner wall of the sealed chamber, and the XY axis moving stage is movably mounted on a top of the base.
4. The detector detection apparatus according to claim 1, wherein the positioning detection module includes a photoelectric sensor, a lens, and a coaxial light source, and a mounting hole is formed in the top of the sealed chamber;
the lens is detachably arranged on the mounting hole and extends into the sealing cavity;
the coaxial light source is fixedly arranged on the outer wall of one side of the lens, and the coaxial light source provides a light source for the lens.
5. The detector inspection apparatus according to claim 4, wherein the photosensor is disposed coaxially with the lens.
6. The detector inspection apparatus of claim 1, wherein the inspection light source module comprises a light source assembly and a focusing lens, and wherein a mounting hole is formed at the top of the sealed chamber;
the focusing lens is detachably mounted in the mounting hole, the focusing lens stretches into the sealing cavity to be arranged, and the light source assembly is detachably mounted at the top of the focusing lens.
7. The detector inspection apparatus of claim 6 wherein said focusing lens is coaxially disposed with said light source assembly;
the focusing lens is provided with one or more than two focusing lenses, and when the focusing lens is provided with more than two focusing lenses, the two or more than two focusing lenses are sequentially and detachably connected along the axis direction of the mounting hole;
more than two focusing lenses are coaxially arranged, and the light source assembly is detachably arranged at the top of the focusing lenses far away from the bottom side wall of the sealing chamber.
8. The detector inspection apparatus of any one of claims 1 to 7 wherein the sealed chamber is a light box.
9. A method of detecting a detector, characterized in that the detector is detected using a detector detection apparatus according to any one of claims 1 to 8, comprising the steps of:
placing the detector to be detected on the moving assembly;
electrically connecting an output port of the detector with a detection device;
the positioning detection module is arranged at the top of the sealing chamber, the moving assembly is adjusted, and the detector is moved to the area below the positioning detection module;
the positioning detection module detects the position of each detection area of the detector;
recording position coordinate information of each detection area;
the positioning detection module is disassembled, and the detection light source module is installed at the top of the sealed cavity;
adjusting the moving assembly according to the recorded position coordinate information so that detection light spots emitted by the detection light source module irradiate each detection area in sequence;
and sequentially reading the data of the detection device after the detection light spots irradiate the detection areas, and judging whether the function of each detection area is normal or not according to the data.
10. The method of detecting a detector of claim 9, further comprising the steps of, after mounting the detection light source module on top of the sealed chamber:
and adjusting the light source power and the light spot size of the detection light source module according to the type of the detector.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110583614.7A CN116088027A (en) | 2021-05-27 | 2021-05-27 | Detector detection device and method for detecting detector by using same |
| PCT/CN2021/097876 WO2022246881A1 (en) | 2021-05-27 | 2021-06-02 | Detector test device and method for testing detector by using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110583614.7A CN116088027A (en) | 2021-05-27 | 2021-05-27 | Detector detection device and method for detecting detector by using same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116088027A true CN116088027A (en) | 2023-05-09 |
Family
ID=84228403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110583614.7A Pending CN116088027A (en) | 2021-05-27 | 2021-05-27 | Detector detection device and method for detecting detector by using same |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN116088027A (en) |
| WO (1) | WO2022246881A1 (en) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002037527A1 (en) * | 2000-11-02 | 2002-05-10 | Ebara Corporation | Electron beam apparatus and device production method using the apparatus |
| DE102011101108B4 (en) * | 2011-05-10 | 2014-07-31 | Sartorius Stedim Biotech Gmbh | Transflexion probe and Transflexionssensor |
| GB2517671A (en) * | 2013-03-15 | 2015-03-04 | Nikon Metrology Nv | X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target and rotary vacuum seal |
| US8873032B1 (en) * | 2013-05-07 | 2014-10-28 | CheckPoint Technologies, LLC. | Optical probing system having reliable temperature control |
| US9030658B1 (en) * | 2013-05-07 | 2015-05-12 | Checkpoint Technologies, Llc | Multi-resolution optical probing system having reliable temperature control and mechanical isolation |
| CN108646167B (en) * | 2018-04-27 | 2020-12-04 | 中科晶源微电子技术（北京）有限公司 | Laser-assisted electron beam inspection apparatus and method for semiconductor devices |
| CN110988003B (en) * | 2019-11-27 | 2021-08-13 | 中科晶源微电子技术（北京）有限公司 | Electron beam inspection apparatus for semiconductor device, and electron beam inspection module |
| CN112736014B (en) * | 2020-12-30 | 2024-01-16 | 中科晶源微电子技术（北京）有限公司 | Wafer locking mechanism for locking wafer, wafer positioning device and wafer conveying equipment |
| CN113394066A (en) * | 2021-05-25 | 2021-09-14 | 中科晶源微电子技术（北京）有限公司 | Longitudinal motion platform and electron beam detection equipment with same |
| CN113379622A (en) * | 2021-05-27 | 2021-09-10 | 中科晶源微电子技术（北京）有限公司 | Pixel size calibration method, device and equipment for electron beam defect detection |
-
2021
- 2021-05-27 CN CN202110583614.7A patent/CN116088027A/en active Pending
- 2021-06-02 WO PCT/CN2021/097876 patent/WO2022246881A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022246881A1 (en) | 2022-12-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102088734B1 (en) | Inspection apparatus | |
| US7276693B2 (en) | Inspection method and apparatus using charged particle beam | |
| JP4528014B2 (en) | Sample inspection method | |
| US7449690B2 (en) | Inspection method and inspection apparatus using charged particle beam | |
| US20230280293A1 (en) | System and method for aligning electron beams in multi-beam inspection apparatus | |
| CN107505341B (en) | X-ray-based LED chip defect automatic detection equipment and method | |
| KR102026936B1 (en) | Inspection system using scanning electron microscope | |
| KR102345477B1 (en) | Load Lock System for Charged Particle Beam Imaging | |
| JP6584946B2 (en) | Inspection device | |
| KR20140123342A (en) | Method for detecting defect of substrate | |
| JP5362355B2 (en) | Micro pattern and shape inspection equipment using micro column | |
| TW201637063A (en) | Inspection apparatus | |
| CN116393383A (en) | Chip test sorting machine | |
| US6762422B2 (en) | Analyzer/observer | |
| US6552341B1 (en) | Installation and method for microscopic observation of a semiconductor electronic circuit | |
| JP2017126498A (en) | Inspection device and inspection method | |
| CN116088027A (en) | Detector detection device and method for detecting detector by using same | |
| JPH0682801A (en) | Defect inspecting and correcting device | |
| JP7150659B2 (en) | inspection equipment | |
| TWI721500B (en) | Substrate positioning device and electron beam inspection tool | |
| CN216208676U (en) | Detection device | |
| CN115436376A (en) | Detection system and detection method | |
| CN220289440U (en) | Wafer detecting machine | |
| CN221224591U (en) | Battery detection equipment and battery production system | |
| CN218212701U (en) | Surface particle detection system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |