CN116083844A - Attenuator preparation method and system - Google Patents
Attenuator preparation method and system Download PDFInfo
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- CN116083844A CN116083844A CN202310113681.1A CN202310113681A CN116083844A CN 116083844 A CN116083844 A CN 116083844A CN 202310113681 A CN202310113681 A CN 202310113681A CN 116083844 A CN116083844 A CN 116083844A
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- carbon film
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5873—Removal of material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
- H01J25/34—Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps
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- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention belongs to the technical field of space traveling wave tubes, and particularly provides a method and a system for preparing an attenuator, wherein the method for preparing the attenuator comprises the steps of plating a carbon film on a region to be plated in a clamping rod by using a vacuum coating machine so as to form a coating region, wherein the actual thickness value of any point in the coating region is not lower than a preset value; dividing a coating area into a plurality of subareas along the axial direction of a clamping rod, measuring the resistance of each subarea, and calculating to obtain the actual thickness value of the carbon film in each subarea according to the resistance of the subarea, the size of the clamping rod, the length of the subarea and the resistivity of the carbon film; and comparing the actual thickness value of each sub-area with a preset value, and removing the carbon film with excessive thickness by using a laser ablation mode.
Description
Technical Field
The invention belongs to the technical field of space traveling wave tubes, and particularly provides a method and a system for manufacturing an attenuator.
Background
A traveling wave tube is a broadband high gain device, and in order to prevent oscillation caused by internal reflection, an attenuator needs to be provided in the tube to cut off the feedback path. One such attenuator structure is a carbon film attenuator, which thermally cracks compounds such as n-heptane in vacuum to deposit carbon on the clamping rods, forming a carbon film concentration attenuator.
The inventor knows that in the related technical scheme, in order to realize the control of the thickness of the carbon film of the attenuator transition section, a shielding piece such as a baffle plate is arranged in the vacuum coating machine, the baffle plate is positioned between an evaporation source and a clamping rod, when the baffle plate shields the corresponding position of the clamping rod, the film cannot be coated, and the thickness of the coated film at the position is controlled by controlling the time of exposing the corresponding region of the clamping rod in the vacuum coating machine chamber.
The inventor considers that in the technical scheme, a movable shielding piece needs to be arranged in the vacuum coating machine, and the movement of the shielding piece needs to be driven by a driving mechanism. If a power source (such as an electric push rod and a rotating motor) of the driving mechanism is arranged in a working cavity of the vacuum coating machine, the requirement on the high-temperature resistance is high, and the situation of damage is easy to occur; if the power source is arranged outside the working cavity of the vacuum coating machine, the transmission mechanism between the power source and the shielding piece can penetrate through the side wall of the vacuum coating machine, and the sealing difficulty of the side wall of the vacuum coating machine is increased due to the fact that the transmission mechanism is movable relative to the side wall of the vacuum coating machine, so that the vacuum degree of the working cavity of the vacuum coating machine is difficult to ensure.
Meanwhile, in the technical scheme, the vacuum coating machine can only finish coating of one clamping rod at a time due to the use of the shielding mechanism, so that the coating efficiency of the clamping rods is inconvenient to improve.
Disclosure of Invention
The present invention is directed to a method and a system for manufacturing an attenuator, which solve at least one of the above-mentioned problems.
In order to solve the above-mentioned problems in the prior art, one or more embodiments of the present invention provide a method for manufacturing an attenuator, comprising the steps of:
step 1, coating a carbon film on a region to be coated in a clamping rod by using a vacuum coating machine to form a coating region, wherein the actual thickness value of any point in the coating region is not lower than a preset value;
step 2, dividing a coating area into a plurality of subareas along the axial direction of a clamping rod, measuring the resistance of each subarea, and calculating to obtain the actual thickness value of the carbon film in each subarea according to the resistance of the subarea, the outer diameter of the clamping rod, the length of the subarea and the resistivity of the carbon film;
and step 3, comparing the actual thickness value of each sub-area with a preset value, and removing the carbon film with the excessive thickness by using a laser ablation mode.
As a further improvement, the actual thickness of the carbon film in the sub-region calculated in step 2 is an average thickness, and the actual thickness of the carbon film in the sub-region is characterized by using the average thickness.
As a further improvement, in step 3, the thickness of the carbon film removed by ablation is controlled by controlling laser ablation parameters including laser power and ablation time.
As a further improvement, a mathematical model of the ablation thickness and laser ablation parameters of the attenuator surface carbon film when laser ablation is used is established prior to step 3.
As a further improvement, the method for establishing the data model comprises the following steps:
taking laser power as a fixed value and an ablation time parameter as a variable, and obtaining a plurality of groups of carbon film thickness values before and after ablation through a test; obtaining a mathematical model for representing the corresponding relation between the ablation time and the ablation thickness under the unit laser power;
taking the ablation time parameter as a fixed value and the laser power as a variable, and obtaining a plurality of groups of carbon film thickness values before and after ablation through a test; and obtaining a mathematical model for representing the corresponding relation between the laser power and the ablation thickness in unit time.
As a further improvement, the resistance value of the carbon film in the test area in the attenuator is measured, and the thickness of the carbon film before and after ablation is obtained by the resistance value, the length of the test area, the outer diameter of the clamping rod and the resistivity of the carbon film.
As a further improvement, the image of the attenuator cross section was measured using a scanning electron microscope to obtain the thickness of the carbon film before and after ablation.
As a further improvement, in step 1, coating of a plurality of clamping rods is simultaneously completed in a working cavity of the vacuum coating machine each time.
One or more embodiments of the present invention further provide an attenuator preparation system, configured to implement the above-mentioned attenuator preparation method, including:
the vacuum coating machine is used for accommodating the clamping rods and coating a carbon film on the region to be coated;
the resistance measuring mechanism is used for obtaining resistance values of a plurality of subareas along the axial direction of the clamping rod;
the laser ablation mechanism is used for ablating the carbon film with the redundant thickness on the surface of the clamping rod;
and the controller is used for obtaining the actual thickness of the carbon film according to the resistance value, the preset carbon film resistivity and the clamping rod parameters, obtaining the thickness to be ablated according to the difference value between the actual thickness of the carbon film and the preset thickness, and controlling the ablation parameters of the laser ablation mechanism according to the thickness to be ablated.
The beneficial effects of one or more of the technical schemes are as follows:
according to the scheme, the shielding piece is not used in the vacuum coating machine to finish coating of the transition section, so that the problem that the power source of the shielding piece is damaged due to poor heat resistance or the problem that the sealing difficulty is high and the corresponding vacuum degree cannot be achieved due to the fact that the power source is arranged outside the vacuum coating machine is avoided.
Meanwhile, in the scheme, after the primary film plating of the carbon film is finished in the vacuum film plating machine, the thickness of the carbon film can be changed by utilizing laser ablation, and the accuracy of removing the carbon film by laser ablation is high; the precision requirement for the coating of the clamping rod is reduced in the stage of the vacuum coating machine, and the manufacturing cost of the attenuator is further saved.
In the scheme, the clamping rods are axially divided into a plurality of subareas, and the average thickness of the carbon film in the subareas can be obtained through the resistance of the subareas, the resistivity of the carbon film and the parameters of the clamping rods, so that the thickness measurement of the carbon film can be conveniently realized under the condition that the clamping rods with the coating completed are not damaged.
In the scheme, the redundant carbon film on the surface of the clamping rod is removed by utilizing laser ablation, and the laser ablation can remove the thickness of the carbon film and simultaneously modify the outer surface of the carbon film, so that the roughness of the surface of the carbon film is reduced and the surface precision of the carbon film is improved.
According to the scheme, the resistance of the subarea is measured, and then the thickness of the carbon film is obtained to be the average thickness according to the resistance of the subarea, the outer diameter of the clamping rod, the length of the subarea and the like, and when the length of the subarea is shorter, the thickness can be used for representing the actual thickness at any point of the subarea; this arrangement reduces the difficulty in measuring the actual thickness of the carbon film at the clamping bars.
In the scheme, before the attenuator is prepared, a mathematical model of the corresponding relation between the ablation thickness of the carbon film on the surface of the attenuator and the laser ablation parameters is established through experiments, so that the laser ablation parameters can be accurately adjusted according to the required removal thickness of the carbon film.
In the scheme, the carbon film thickness on the surface of the clamping rod is adjusted by utilizing a laser ablation mode, the moving path of laser in the laser ablation process is convenient to adjust, and the purpose that the carbon film thickness is gradually changed is convenient to form at the gradual change section of the attenuator is achieved.
The attenuator preparation system in this scheme comprises vacuum coating machine, resistance measurement mechanism, laser ablation mechanism and controller, because only need in the vacuum coating machine to the clamping lever coating film can, need not the thickness of accurate control carbon film, also need not consider the carbon film thickness variation of attenuator at the changeover portion, consequently can once only accomplish the coating film of a plurality of clamping levers in the vacuum coating machine, be convenient for improve vacuum coating machine's availability factor and attenuator's manufacturing efficiency, reduce its manufacturing cost.
Drawings
Some embodiments of the present application are described below with reference to the accompanying drawings, in which:
fig. 1 is a schematic flow chart of a method for manufacturing an attenuator according to an embodiment of the present invention.
Detailed Description
It should be understood by those skilled in the art that the embodiments described below are only preferred embodiments of the present application, which are merely for explaining the technical principles of the present application and are not intended to limit the scope of the present application.
It should be noted that, in the description of the present application, terms such as "center," "upper," "lower," "top," "bottom," "vertical," "horizontal," "inner," "outer," and the like indicate directional or positional relationships, and are based on the directional or positional relationships shown in the drawings, for convenience of description only, and do not indicate or imply that the devices or elements must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Furthermore, it should be noted that, in the description of the present application, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; the connection may be direct, indirect via an intermediate medium, or communication between two elements. The specific meaning of the terms in this application will be understood by those skilled in the art as the case may be.
As shown in fig. 1, an exemplary embodiment of the present application provides a method for manufacturing an attenuator, including the steps of:
and step 1, coating a carbon film on a region to be coated in a clamping rod by using a vacuum coating machine to form a coating region, wherein the actual thickness value of any point in the coating region is not lower than a preset value. Specifically, when the vacuum coating machine is used for coating the clamping rod, the actual thickness of any point in the coating area is only required to be not lower than a preset value, the thickness of the coating is not required to be accurately controlled, and the problem that the thickness of the carbon film at the gradual change section of the attenuator is sequentially changed is not required to be considered; the coating of a plurality of clamping rods is conveniently finished in a vacuum coating machine at one time, and then the coating is transferred to the subsequent process for treatment.
And 2, dividing the coating area into a plurality of subareas along the axial direction of the clamping rod, measuring the resistance of each subarea, and calculating the actual thickness value of the carbon film in each subarea according to the resistance of the subarea, the size of the clamping rod, the length of the subarea and the resistivity of the carbon film. In this embodiment, after the vacuum coating machine is used to complete the coating of the multiple clamping rods, because there is no specific requirement on the placement position of the clamping rods, etc., the situation that the thickness values of the carbon films in the sub-regions of the clamping rods along the axial direction are different easily occurs, and before the carbon films on the surfaces of the clamping rods are ablated by using laser, the average thickness of the carbon films in the sub-regions is obtained in sections as the actual thickness, which is used as the basis for removing the corresponding thickness for each sub-region of the clamping rods. When the axial length of the sub-region along the clamping rod is smaller than a set value (for example, smaller than 3 mm), the actual thickness of the carbon film at each point in the sub-region is smaller than the average thickness value of the whole sub-region, and the average thickness value is used for representing the actual thickness of the carbon film in the sub-region.
In the present embodiment, the carbon film is a good conductor, and the resistance is measured by a plurality of methods, such as a contact method and a non-contact method (eddy current method)
And step 3, comparing the actual thickness value of each sub-area with a preset value, and removing the carbon film with the excessive thickness by using a laser ablation mode.
In one specific structural form, the laser adopts green laser, the green laser is in a laser line form, the laser transmitter irradiates the surface of the clamping rod as a laser line, the laser line is parallel to the clamping rod, and the clamping rod rotates along the axis of the clamping rod to ablate the carbon film along the circumferential direction.
Specifically, in step 3, the thickness of the carbon film removed by ablation is controlled by controlling laser ablation parameters including laser power and ablation time.
Specifically, prior to step 3, a mathematical model of the ablation thickness and laser ablation parameters of the attenuator skin carbon film when laser ablation is employed is established.
Specifically, the method for establishing the data model comprises the following steps:
taking laser power as a fixed value and an ablation time parameter as a variable, and obtaining a plurality of groups of carbon film thickness values before and after ablation through a test; obtaining a mathematical model for representing the corresponding relation between the ablation time and the ablation thickness under the unit laser power;
taking the ablation time parameter as a fixed value and the laser power as a variable, and obtaining a plurality of groups of carbon film thickness values before and after ablation through a test; and obtaining a mathematical model for representing the corresponding relation between the laser power and the ablation thickness in unit time.
Specifically, the resistance value of the carbon film in the test region in the attenuator was measured, and the thickness of the carbon film before and after ablation was obtained from the resistance value and the length of the test region, the outer diameter of the clamping rod, and the resistivity of the carbon film.
Specifically, an image of the attenuator cross section was measured using a scanning electron microscope to obtain the thickness of the carbon film before and after ablation.
Specifically, in step 1, coating of a plurality of clamping rods is simultaneously completed in a working cavity of the vacuum coating machine each time.
The embodiment also provides an attenuator preparation system, which is used for implementing the attenuator preparation method, and includes: the vacuum coating machine is used for accommodating the clamping rods and coating a carbon film on the area to be coated; the resistance measuring mechanism is used for obtaining resistance values of a plurality of subareas along the axial direction of the clamping rod; the laser ablation mechanism is used for ablating the carbon film with the redundant thickness on the surface of the clamping rod; the controller is used for obtaining the actual thickness of the carbon film according to the resistance value, the preset carbon film resistivity and the clamping rod parameters, obtaining the thickness to be ablated according to the difference value between the actual thickness of the carbon film and the preset thickness, and controlling the ablation parameters of the laser ablation mechanism according to the thickness to be ablated.
In this embodiment, the resistance measuring mechanism has various structural forms and can be set by a person skilled in the art.
Thus far, the technical solution of the present application has been described in connection with the foregoing preferred embodiments, but it is easily understood by those skilled in the art that the protective scope of the present application is not limited to the above-described preferred embodiments. The technical solutions in the above preferred embodiments may be split and combined by those skilled in the art without departing from the technical principles of the present application, and equivalent changes or substitutions may be made to related technical features, so any changes, equivalent substitutions, improvements, etc. made within the technical concepts and/or technical principles of the present application will fall within the protection scope of the present application.
Claims (9)
1. A method of making an attenuator comprising the steps of:
step 1, coating a carbon film on a region to be coated in a clamping rod by using a vacuum coating machine to form a coating region, wherein the actual thickness value of any point in the coating region is not lower than a preset value;
step 2, dividing a coating area into a plurality of subareas along the axial direction of a clamping rod, measuring the resistance of each subarea, and calculating to obtain the actual thickness value of the carbon film in each subarea according to the resistance of the subarea, the size of the clamping rod, the length of the subarea and the resistivity of the carbon film;
and step 3, comparing the actual thickness value of each sub-area with a preset value, and removing the carbon film with the excessive thickness by using a laser ablation mode.
2. The method of manufacturing an attenuator according to claim 1, wherein the actual thickness of the carbon film in the sub-region calculated in step 2 is an average thickness, and the actual thickness of the carbon film in the sub-region is characterized by the average thickness.
3. The method of manufacturing an attenuator according to claim 1, wherein in step 3, the thickness of the carbon film removed by ablation is controlled by controlling laser ablation parameters including laser power and ablation time.
4. A method of producing an attenuator according to claim 3, wherein prior to step 3, a mathematical model of the thickness of the attenuator surface carbon film ablated by laser ablation and the parameters of the laser ablation is established.
5. The method for preparing an attenuator according to claim 4, wherein the mathematical model is constructed by:
taking laser power as a fixed value and an ablation time parameter as a variable, and obtaining a plurality of groups of carbon film thickness values before and after ablation through a test; obtaining a mathematical model for representing the corresponding relation between the ablation time and the ablation thickness under the unit laser power;
taking the ablation time parameter as a fixed value and the laser power as a variable, and obtaining a plurality of groups of carbon film thickness values before and after ablation through a test; and obtaining a mathematical model for representing the corresponding relation between the laser power and the ablation thickness in unit time.
6. The method of manufacturing an attenuator according to claim 5, wherein the resistance value of the carbon film in the test area of the attenuator is measured, and the thickness of the carbon film before and after ablation is obtained from the resistance value and the length of the test area, the size of the holding rod, and the resistivity of the carbon film.
7. The method of manufacturing an attenuator according to claim 5, wherein the image of the cross section of the attenuator is measured by using a scanning electron microscope to obtain the thickness of the carbon film before and after ablation.
8. The method of manufacturing an attenuator according to claim 1, wherein in step 1, coating of a plurality of clamping bars is performed simultaneously in a working chamber of a vacuum coating machine at a time.
9. An attenuator preparation system for implementing the attenuator preparation method of any one of claims 1-8, comprising:
the vacuum coating machine is used for accommodating the clamping rods and coating a carbon film on the region to be coated;
the resistance measuring mechanism is used for obtaining resistance values of a plurality of subareas along the axial direction of the clamping rod;
the laser ablation mechanism is used for ablating the carbon film with the redundant thickness on the surface of the clamping rod;
and the controller is used for obtaining the actual thickness of the carbon film according to the resistance value, the preset carbon film resistivity and the clamping rod parameters, obtaining the thickness to be ablated according to the difference value between the actual thickness of the carbon film and the preset thickness, and controlling the ablation parameters of the laser ablation mechanism according to the thickness to be ablated.
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| CN202310113681.1A CN116083844A (en) | 2023-02-10 | 2023-02-10 | Attenuator preparation method and system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117026197A (en) * | 2023-08-09 | 2023-11-10 | 苏州慧连航科技有限公司 | Nanometer vacuum coating partition pressure control method and system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117026197A (en) * | 2023-08-09 | 2023-11-10 | 苏州慧连航科技有限公司 | Nanometer vacuum coating partition pressure control method and system |
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