CN116079175A - Large-gap metal-glass laser composite welding device - Google Patents

Large-gap metal-glass laser composite welding device Download PDF

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Publication number
CN116079175A
CN116079175A CN202310068869.9A CN202310068869A CN116079175A CN 116079175 A CN116079175 A CN 116079175A CN 202310068869 A CN202310068869 A CN 202310068869A CN 116079175 A CN116079175 A CN 116079175A
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CN
China
Prior art keywords
glass
laser
welding
welded
metal
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Pending
Application number
CN202310068869.9A
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Chinese (zh)
Inventor
沈洪
田晨云
任浩东
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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Publication date
Application filed by Shanghai Jiaotong University filed Critical Shanghai Jiaotong University
Priority to CN202310068869.9A priority Critical patent/CN116079175A/en
Publication of CN116079175A publication Critical patent/CN116079175A/en
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/005—Soldering by means of radiant energy
    • B23K1/0056—Soldering by means of radiant energy soldering by means of beams, e.g. lasers, E.B.
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/08—Auxiliary devices therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/08—Auxiliary devices therefor
    • B23K3/087—Soldering or brazing jigs, fixtures or clamping means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/047—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work moving work to adjust its position between soldering, welding or cutting steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/18—Dissimilar materials

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a large-gap metal-glass laser composite welding device, which is characterized in that an electric lifting platform is arranged on an electric linear sliding table; the electric lifting platform is provided with a clamping mechanism and a supporting mechanism, the clamping mechanism is used for clamping the regular quadrangular glass to be welded, and the supporting mechanism is used for supporting the metal base to be welded; forming a welding area in the vertical direction between the regular quadrangular glass to be welded and the metal base to be welded; a welding position of the continuous laser vibrating mirror and a welding position of the ultra-fast laser vibrating mirror are arranged above the welding area; the asynchronous welding mode of laser brazing and ultrafast laser welding solves the problem of large-gap welding of glass and metal, the continuous laser and ultrafast laser double-station welding mode has the advantages of small welding deformation, convenience and high efficiency in welding, simplicity and compactness in device, good repeatability and the like, and the functions of adjustable welding gap, adjustable glass pose and the like are realized through the six-axis micro-adjustment table and the precise clamp.

Description

Large-gap metal-glass laser composite welding device
Technical Field
The invention relates to the technical field of laser welding, in particular to a large-gap metal-glass laser composite welding device.
Background
Glass is an optically functional material commonly used as an optical window, or as a lens, prism, mirror, etc. that functions as an image. Glass is a typical hard and brittle material with low ductility, no impact resistance, difficult processing and other mechanical property limitations, so that glass and a metal base are required to be connected together to improve the overall mechanical property in many occasions, and the glass is widely applied to high-tech fields such as optics, communication, electronics, aerospace, automobile manufacturing, biomedical and the like.
Currently, common methods for achieving glass and metal joints are mechanical and adhesive joints. Wherein the mechanical connection requires additional connection interface design and precision manufacturing to ensure assembly accuracy; the adhesive is convenient to use, but is easy to age, creep and leak air, and is difficult to be qualified in complex working environments. Ultra-fast lasers are a very effective means for achieving a permanent high quality connection of glass and metal. The ultra-fast laser has extremely narrow pulse width and extremely high peak power, can induce the processes of multiphoton ionization, avalanche ionization and the like of the glass material, realizes the effective absorption of the glass to the laser energy, and realizes the welding of the glass and the metal by the heat accumulation effect of the high-repetition-frequency ultra-fast laser and the melting of the glass. However, ultra-fast laser welding glass and metal is also of great limitation because the ultra-fast laser heating area is small, which requires that the glass and metal to be welded are in close contact with each other to form an optical contact, i.e. the gap is smaller than a quarter wavelength, which reduces the application range of ultra-fast welding. To solve this problem, a method of asynchronous composite brazing using a continuous laser and an ultrafast laser has emerged, realizing a large gap connection suitable for various glasses and metals.
In order to cope with various complicated large-gap metal-glass welding scenes, such as adjustable welding gap, adjustable glass pose, small welding deformation and the like, a special device for large-gap metal-glass welding is needed, and meanwhile, the special device has the characteristics of high automation degree, convenience and high efficiency in welding, simplicity and compactness in device and good repeatability.
Disclosure of Invention
The invention aims to provide a large-gap metal-glass laser composite welding device, which solves the problem of glass-metal large-gap welding in an asynchronous welding mode of laser brazing and ultrafast laser welding, and has the characteristics of high automation degree, convenience and high efficiency in welding, simplicity and compactness in device and good repeatability.
The aim of the invention can be achieved by the following technical scheme:
a large gap oriented metal-glass laser hybrid welding device comprising:
the electric linear sliding table is provided with an electric lifting platform;
the electric lifting platform is provided with a clamping mechanism and a supporting mechanism, the clamping mechanism is used for clamping the regular quadrangular glass to be welded, and the supporting mechanism is used for supporting the metal base to be welded;
forming a welding area in the vertical direction between the regular quadrangular glass to be welded and the metal base to be welded;
and a welding position of the continuous laser vibrating mirror and a welding position of the ultra-fast laser vibrating mirror are arranged above the welding area.
As a further scheme of the invention: the clamping mechanism comprises a six-axis micro-motion adjusting table, the six-axis micro-motion adjusting table is arranged on a positioning mounting plate of the electric lifting platform surface, and a pneumatic clamping jaw is arranged on the six-axis micro-motion adjusting table.
As a further scheme of the invention: the six-axis micro-motion bench is a Stewart-configuration six-degree-of-freedom parallel robot.
As a further scheme of the invention: the clamping fingers of the pneumatic clamping jaw are flat clamping fingers, and the pneumatic clamping jaw takes compressed air as power.
As a further scheme of the invention: the supporting mechanism comprises a material bracket, and the metal base to be welded is arranged at the top of the material bracket.
As a further scheme of the invention: and a paste solder is filled in a welding area gap formed by the regular quadrangular glass to be welded and the metal base to be welded.
As a further scheme of the invention: a laser displacement sensor bracket is fixedly arranged on one side of the electric linear sliding table, and a laser displacement sensor is fixedly arranged on the laser displacement sensor bracket;
the laser displacement sensor is used for measuring the distance between the sensor and the upper surface of the electric lifting platform and assisting laser focusing and zooming operations.
The invention has the beneficial effects that: the invention develops a device for large-gap glass-metal laser composite welding, solves the problem of glass-metal large-gap welding in an asynchronous welding mode of firstly performing laser brazing and then performing ultra-fast laser welding, has the advantages of small welding deformation, convenience and high efficiency in welding, simplicity and compactness in device, good repeatability and the like in a continuous laser and ultra-fast laser double-station welding mode, and realizes the functions of adjustable welding gap, adjustable glass pose and the like through a six-axis micro-adjustment platform and a precise clamp.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a front view of the present invention;
FIG. 2 is a perspective view of the present invention;
fig. 3 is a second perspective view of the present invention.
In the figure: 1. an electric linear sliding table; 2. an electric lifting platform; 31. positioning the mounting plate; 32. a material bracket; 41. a metal base to be welded; 42. regular quadrangular glass to be welded; 51. a continuous laser galvanometer; 52. an ultrafast laser galvanometer; 61. pneumatic clamping jaws; 62. six-axis micro-motion adjusting platform; 71. a laser displacement sensor; 72. a laser displacement sensor bracket.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-3, the invention discloses a large-gap metal-glass laser composite welding device, which comprises an electric linear sliding table 1, wherein an electric lifting platform 2 is fixed on the electric linear sliding table 1, a positioning mounting plate 31 is arranged on the electric lifting platform 2, a metal base 41 to be welded is arranged on the positioning mounting plate 31, and a six-axis micro-motion adjusting table 62 is also arranged on the positioning mounting plate 31;
the six-axis micro-motion adjusting table 62 is provided with a pneumatic clamping jaw 61, and the regular quadrangular glass 42 to be welded is clamped through the pneumatic clamping jaw 61;
a continuous laser vibrating mirror 51 and an ultrafast laser vibrating mirror 52 are further arranged right above the electric linear sliding table 1, the continuous laser vibrating mirror 51 and the ultrafast laser vibrating mirror 52 are arranged side by side, the continuous laser vibrating mirror 51 and the ultrafast laser vibrating mirror 52 are not connected with the electric linear sliding table 1, and when the electric linear sliding table 1 is used, the electric linear sliding table 1 drives a workpiece to be welded to move, so that the movement switching of the workpiece to be welded under the continuous laser vibrating mirror 51 and the ultrafast laser vibrating mirror 52 is realized;
specifically, the electric linear sliding table 1 comprises a mounting substrate, side plates are vertically arranged at two ends of the mounting substrate, a first screw rod is horizontally arranged between the side plates at two ends, one end of the first screw rod penetrates through the side plate at one side of the mounting substrate and is connected with a first motor, a first nut seat is connected to the first screw rod in a threaded mode, the top surface of the first nut seat is fixedly connected with the bottom surface of the supporting substrate, sliding blocks are arranged on two sides of the bottom surface of the supporting substrate, sliding rails matched with the sliding blocks on the bottom surface of the supporting substrate are arranged on the mounting substrate, the supporting substrate is connected to the sliding rails of the mounting substrate in a sliding mode through the sliding blocks on the bottom surface of the supporting substrate, the first screw rod is driven to rotate through the first motor, and the first screw rod drives the first nut seat to move in the horizontal direction, and accordingly the supporting substrate moves in the horizontal direction;
the mounting substrate of the electric linear sliding table 1 is fixedly arranged on the optical platform and kept fixed, so that the overall stability of the device is ensured, and displacement and deflection of a welding sample caused by factors such as ground vibration in the welding process are reduced.
The electric lifting platform 2 comprises an upper top plate and a lower bottom plate, the lower bottom plate of the electric lifting platform 2 is fixedly arranged on a supporting substrate of the electric linear sliding table 1, a positioning mounting plate 31 is fixedly arranged on the upper top plate of the electric lifting platform 2, a six-axis micro-motion adjusting table 62 is fixedly arranged on one side of the plate surface of the positioning mounting plate 31, a pneumatic clamping jaw 61 is fixedly arranged on the six-axis micro-motion adjusting table 62, and the pneumatic clamping jaw 61 is used for clamping the regular quadrangular glass 42 to be welded;
a material bracket 32 is fixedly arranged on the other side of the plate surface of the positioning mounting plate 31, and a metal base 41 to be welded is arranged on the top of the material bracket 32;
wherein, the right quadrangular glass 42 to be welded is positioned right above the metal base 41 to be welded in the vertical direction;
further, the pneumatic clamping jaw 61 is fixed on the six-axis micro-motion adjusting table 62 through a bolt, the clamping finger type of the pneumatic clamping jaw 61 is a flat clamping finger, the two clamping fingers respectively contact two parallel surfaces of the regular quadrangular glass 42 to be welded, wherein the pneumatic clamping jaw 61 uses compressed air as power, and the air pressure is 0.4MPa;
further, the six-axis micro-motion adjusting platform 62 is used for realizing adjustment of a glass-metal welding gap and adjustment of a glass pose, the six-axis micro-motion adjusting platform 62 is a Stewart configuration six-degree-of-freedom parallel robot, and the six-axis micro-motion adjusting platform is structurally characterized in that a 6-UPU-shaped mechanism is formed by an upper platform, a lower platform, 6 telescopic cylinders in the middle and 6 Hooke hinges at the upper and lower sides;
when the laser focusing device is used, the electric lifting platform 2 is used for realizing the linear displacement of the fixed positioning mounting plate 31, the material bracket 32, the metal base 41 to be welded, the regular quadrangular glass 42 to be welded, the six-axis micro-adjustment table 62 and the pneumatic clamping jaw 61 in the vertical direction, and the laser focusing is realized by adjusting the position of the interface between the metal base 41 to be welded and the regular quadrangular glass 42 to be welded;
wherein, carry out mechanical fixed connection through the bolt between electric lift platform 2 and the electric linear sliding table 1.
Further, the positioning mounting plate 31 is fixed on the upper top plate of the electric lifting platform 2 through bolts, and the material bracket 32 and the six-axis micro-motion adjusting table 62 are respectively fixed on the positioning mounting plate 31 through bolts.
Further, the metal base 41 to be welded is a metal sample to be welded and is fixed on the material bracket 32 through bolts;
the regular quadrangular glass 42 to be welded is a glass sample to be welded, is clamped and fixed by the pneumatic clamping jaw 61 and is suspended, a certain distance and an included angle are kept between the lower bottom surface of the regular quadrangular glass 42 to be welded and the upper surface of the metal base 41 to be welded, and paste brazing filler metal is filled in the gap for brazing connection of the lower bottom surface and the upper surface of the metal base 41 to be welded.
In a specific embodiment, the continuous laser galvanometer 51 is used to control the deflection of the continuous laser beam in the X-Y plane, and in conjunction with computer controlled marking software, automatic scanning welding of the specified path can be achieved. When welding, the continuous laser irradiates the paste solder through the glass, so that the solder is melted and flows to fill the gap between the glass and the metal, and when the continuous laser is removed, the melted solder is resolidified to form a compact solder metal layer filled in the glass metal gap;
the continuous laser can also be pulse laser, so as to provide a local heat source to melt paste solder at the focusing position of the laser, and proper heating power and time are required to be selected according to different solder.
In a specific embodiment, the ultrafast laser galvanometer 52 is used to control the deflection of the ultrashort pulse laser beam in the X-Y plane, and in combination with the marking software controlled by a computer, the automatic scanning welding of the specified path can be realized. Through the brazing pre-connection of continuous laser, the brazing filler metal and the metal to be welded are reliably combined, the brazing filler metal and the glass are likely to be not reliably combined due to physical property differences, but the brazing filler metal and the glass are closely contacted due to the filling of the brazing filler metal into gaps, and at the moment, ultra-fast laser is used for focusing on the contact surface of the brazing filler metal and the glass through the glass to perform ultra-fast welding, so that the brazing filler metal and the glass can be reliably combined.
In a specific embodiment, a laser displacement sensor bracket 72 is fixedly arranged on one side of the electric linear sliding table 1, and a laser displacement sensor 71 is fixedly arranged on the laser displacement sensor bracket 72;
the laser displacement sensor 71 is used for measuring the distance between the sensor and the upper surface of the electric lifting platform 2, so as to assist laser focusing and zooming operation;
the upper surface of the electric lifting platform 2 is always in the effective range of the laser displacement sensor 71 in the whole welding process.
During the working process: the welding station of the ultrafast laser galvanometer 52 is a first station, and the welding station of the continuous laser galvanometer 51 is a second station;
performing ultrafast laser focusing operation, moving the electric linear sliding table 1 to enable the metal base 41 to be welded to be located at a first station, at the moment, enabling the regular quadrangular glass 42 to be welded to be not clamped, enabling an ultrashort pulse laser beam to irradiate the surface of the metal base 41 to be welded through the ultrafast laser galvanometer 52, moving the electric lifting platform 2 to enable a laser focus to be exactly located on the upper surface of the metal base 41 to be welded, then enabling the laser displacement sensor 71 to return to zero, further, determining a zooming distance according to the thickness of glass, the refractive index of glass, the thickness of a welding gap and the like, and moving the electric lifting platform 2 to enable the laser focus to be located on a designated welding plane to obtain the laser focus position after clamping the regular quadrangular glass 42 to be welded;
a proper amount of paste solder is coated on the surface of the metal base 41 to be welded, the regular quadrangular glass 42 to be welded is clamped on the pneumatic clamping jaw 61, the six-axis micro-motion adjusting table 62 is adjusted to enable the regular quadrangular glass 42 to be welded to a specified position, the gap between the regular quadrangular glass 42 to be welded and the metal base 41 to be welded is enabled to be a specified gap, and at the moment, the paste solder is guaranteed to be filled in the gap between the regular quadrangular glass 42 to be welded and the metal base 41 to be welded;
moving the electric linear sliding table 1 to enable the metal base 41 to be welded and the regular quadrangular glass 42 to be welded to be positioned at a station II, enabling continuous laser beams emitted by the continuous laser vibrating mirror 51 to penetrate through the regular quadrangular glass 42 to be welded and irradiate the pasty solder, enabling the solder to melt and flow, filling gaps between the glass and metal, and enabling the melted solder to resolidify when the continuous laser is removed, so as to form a compact solder metal layer filled in the glass metal gaps;
the electric linear sliding table 1 is moved to enable the metal base 41 to be welded and the regular quadrangular glass 42 to be welded to be located at a first station, brazing pre-connection is carried out through continuous laser, the brazing filler metal and the metal to be welded are reliably combined, the brazing filler metal and the glass are likely to be not reliably combined due to physical property differences, but the brazing filler metal and the glass are closely contacted due to the filling of gaps by the brazing filler metal, and at the moment, ultra-fast laser is used for focusing on the contact surface of the brazing filler metal and the glass through the glass to carry out ultra-fast welding, so that the brazing filler metal and the glass can be reliably combined;
after the welding is completed, the pneumatic clamping jaw 61 is loosened, the connecting bolt of the metal base 41 to be welded and the material bracket 32 is unscrewed, and the metal base and the glass which are welded are detached.
The foregoing describes one embodiment of the present invention in detail, but the description is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the invention. All equivalent changes and modifications within the scope of the present invention are intended to be covered by the present invention.

Claims (7)

1. A large gap oriented metal-glass laser hybrid welding device, comprising:
the electric linear sliding table (1), wherein an electric lifting platform (2) is arranged on the electric linear sliding table (1);
the electric lifting platform (2) is provided with a clamping mechanism and a supporting mechanism, the clamping mechanism is used for clamping regular quadrangular glass (42) to be welded, and the supporting mechanism is used for supporting a metal base (41) to be welded;
the regular quadrangular glass (42) to be welded and the metal base (41) to be welded form a welding area in the vertical direction;
and a welding position of the continuous laser galvanometer (51) and a welding position of the ultra-fast laser galvanometer (52) are arranged above the welding area.
2. The large-gap metal-glass laser composite welding device according to claim 1, wherein the clamping mechanism comprises a six-axis micro-motion adjusting table (62), the six-axis micro-motion adjusting table (62) is arranged on a positioning mounting plate (31) of a table top of the electric lifting platform (2), and a pneumatic clamping jaw (61) is arranged on the six-axis micro-motion adjusting table (62).
3. The large-gap-oriented metal-glass laser hybrid welding device according to claim 2, wherein the six-axis micro-motion stage (62) is a six-degree-of-freedom parallel robot in a Stewart configuration.
4. The large gap facing metal-glass laser hybrid welding apparatus of claim 2, wherein the type of gripping fingers of the pneumatic gripping jaw (61) is flat gripping fingers, the pneumatic gripping jaw (61) being powered by compressed air.
5. The large-gap-oriented metal-glass laser hybrid welding device according to claim 1, wherein the supporting mechanism comprises a material bracket (32), and the metal base (41) to be welded is arranged on top of the material bracket (32).
6. The large-gap-oriented metal-glass laser hybrid welding device according to claim 1, wherein a welding area formed by the regular quadrangular glass (42) to be welded and the metal base (41) to be welded is gap-filled with paste solder.
7. The large-gap metal-glass laser composite welding device according to claim 1, wherein a laser displacement sensor bracket (72) is fixedly arranged on one side of the electric linear sliding table (1), and a laser displacement sensor (71) is fixedly arranged on the laser displacement sensor bracket (72);
the laser displacement sensor (71) is used for measuring the distance between the sensor and the upper surface of the electric lifting platform (2) and assisting laser focusing and zooming operations.
CN202310068869.9A 2023-02-06 2023-02-06 Large-gap metal-glass laser composite welding device Pending CN116079175A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310068869.9A CN116079175A (en) 2023-02-06 2023-02-06 Large-gap metal-glass laser composite welding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310068869.9A CN116079175A (en) 2023-02-06 2023-02-06 Large-gap metal-glass laser composite welding device

Publications (1)

Publication Number Publication Date
CN116079175A true CN116079175A (en) 2023-05-09

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Application Number Title Priority Date Filing Date
CN202310068869.9A Pending CN116079175A (en) 2023-02-06 2023-02-06 Large-gap metal-glass laser composite welding device

Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117532157A (en) * 2023-12-28 2024-02-09 中建三局集团华南有限公司 Glass-metal laser multiplexing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117532157A (en) * 2023-12-28 2024-02-09 中建三局集团华南有限公司 Glass-metal laser multiplexing method
CN117532157B (en) * 2023-12-28 2024-05-17 中建三局集团华南有限公司 Glass-metal laser multiplexing method

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