CN116074994A - Heat insulation structure and optical alignment equipment - Google Patents
Heat insulation structure and optical alignment equipment Download PDFInfo
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- CN116074994A CN116074994A CN202111275975.1A CN202111275975A CN116074994A CN 116074994 A CN116074994 A CN 116074994A CN 202111275975 A CN202111275975 A CN 202111275975A CN 116074994 A CN116074994 A CN 116074994A
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- heat insulation
- deformation
- strip
- heat
- insulation body
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
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Abstract
The invention discloses a heat insulation structure and optical alignment equipment, and belongs to the technical field of semiconductors. The heat insulation structure comprises a heat insulation body and an anti-deformation air cooling groove, wherein the heat insulation body comprises a heating surface which is used for facing a heating element; the deformation-preventing air cooling groove is arranged in the heat insulation body and is communicated with the side wall surface of the heat insulation body, and the notch of the deformation-preventing air cooling groove is communicated with the heating surface. The anti-deformation air cooling groove is formed, so that the temperature reduction function can be achieved, the notch is used for receiving the deformation amount of the heated surface which is heated and expanded, even if the heated surface is heated and expanded, the overall thermal deformation of the heat insulation body is small, and the stability of the overall structure of the optical alignment device is improved.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a heat insulation structure and optical alignment equipment.
Background
In the optical alignment apparatus, it is necessary to heat the substrate stage to a target temperature in a short time by using a heater, and to achieve a uniform temperature, and at the same time, the high-temperature heater also dissipates heat to the surrounding space, which results in an excessively high temperature of the surrounding space and affects the use of the electric components, so that it is necessary to perform a heat insulation design.
The current commonly used heat insulation design is to adopt a nonmetal heat insulation plate with low heat conductivity, and the nonmetal heat insulation plate can play a good heat insulation effect, but the heat insulation plate has a larger temperature gradient along the thickness direction of the heat insulation plate, and generates larger thermal deformation under the action of thermal stress. Thermal deformation of the heat insulating plate can cause gaps with the heater to influence the heat insulating effect, so that the difference of heating performance is caused, and finally, the heating uniformity of the optical alignment equipment is influenced. In addition, the number of parts in the optical alignment device is large, the distance between the parts is small, surrounding parts can be extruded in the thermal deformation process of the thermal insulation plate, and the stability of the integral structure of the optical alignment device is reduced.
For this reason, it is needed to provide a heat insulation structure and a photoalignment device to solve the above problems.
Disclosure of Invention
The invention aims to provide a heat insulation structure and a light alignment device, which can reduce the temperature change gradient of the heat insulation structure, reduce thermal deformation under the action of thermal stress and improve the stability of the whole structure of the light alignment device.
In order to achieve the above object, the following technical scheme is provided:
an insulating structure, comprising:
the heat insulation body comprises a heating surface which is used for facing the heating element;
the deformation-preventing air cooling groove is arranged in the heat insulation body and is communicated with the side wall surface of the heat insulation body, and the notch of the deformation-preventing air cooling groove is communicated with the heating surface.
As an alternative of the heat insulation structure, the side wall surface of the heat insulation body comprises two opposite first side surfaces, the deformation-preventing air cooling groove comprises at least two first strip-shaped grooves, the first strip-shaped grooves extend along a first direction and are communicated with the two first side surfaces, and the two adjacent first strip-shaped grooves are parallel and are arranged at intervals.
As an alternative scheme of the heat insulation structure, the side wall surface of the heat insulation body further comprises two opposite second side surfaces, the deformation-preventing air cooling groove further comprises at least two second strip-shaped grooves, the second strip-shaped grooves extend along a second direction and penetrate through the two second side surfaces, the two adjacent second strip-shaped grooves are parallel and are arranged at intervals, and the first direction is intersected with the second direction.
As an alternative to the heat insulation structure, the cross-sectional shapes of the first and second bar-shaped grooves are isosceles trapezoids.
As an alternative to the heat insulation structure, the width of the top edge notch of each of the first strip-shaped groove and the second strip-shaped groove is 0.5mm-3.5mm.
As an alternative to the insulating structure, the first and second strip-shaped grooves each have an inner bottom angle of 25 ° to 65 °.
As an alternative to the heat insulation structure, the ratio of the height of the deformation-preventing air-cooling tank to the height of the heat insulation body is 1/4-3/4.
As an alternative scheme of the heat insulation structure, the deformation-preventing air cooling groove is a combined structure of a circular groove and a rectangular groove, and the rectangular groove is communicated with the heating surface.
As an alternative of the heat insulation structure, the heat insulation body further comprises a heat radiation surface opposite to the heating surface, the heat radiation surface is provided with a cooling structure, and the cooling structure comprises a cooling liquid inlet, a cooling liquid flow passage and a cooling liquid outlet which are sequentially communicated.
A photoalignment device comprising a technical solution of a heat insulating structure as described above.
Compared with the prior art, the invention has the beneficial effects that:
according to the heat insulation structure provided by the invention, the heating surface of the heat insulation body is used for facing the heated piece, the deformation-preventing air cooling groove is arranged in the heat insulation body, the notch formed in the deformation-preventing air cooling groove is communicated with the heating surface, the deformation-preventing air cooling groove is formed, the temperature reduction function can be achieved, meanwhile, the notch is used for receiving the deformation quantity of the heated expansion of the heating surface, even if the heated expansion of the heating surface occurs, the integral thermal deformation of the heat insulation body is small, and the stability of the integral structure of the optical alignment equipment is improved.
According to the optical alignment equipment provided by the invention, the heat insulation body is provided with the anti-deformation air cooling groove, so that the overall heat deformation of the heat insulation body is small, and the stability of the overall structure of the optical alignment equipment is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following description will briefly explain the drawings needed in the description of the embodiments of the present invention, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the contents of the embodiments of the present invention and these drawings without inventive effort for those skilled in the art.
FIG. 1 is a schematic view of a heat insulation structure according to a first embodiment of the present invention;
FIG. 2 is an exploded view of a heat insulation structure according to a second aspect of the present invention;
FIG. 3 is a side view of an insulation structure according to a first embodiment of the present invention;
FIG. 4 is a temperature and deformation cloud image of a solid insulation panel;
FIG. 5 is a temperature and deformation cloud image of an intermediate de-materialized insulating panel;
FIG. 6 is a temperature versus deformation cloud image of a rectangular slotted heat shield;
FIG. 7 is a temperature and deformation cloud image of an isosceles trapezoid shape of an anti-deformation air-cooled tank;
FIG. 8 is a schematic structural diagram of a heat insulation structure in a second embodiment of the present invention;
FIG. 9 is a side view of a heat insulation structure according to a second embodiment of the present invention;
fig. 10 is a side view of a heat insulation structure with auxiliary heat dissipation circular grooves in a second embodiment of the invention.
Reference numerals:
1. a heat insulating body; 2. an anti-deformation air cooling groove; 3. a cooling structure; 4. auxiliary heat dissipation circular grooves;
11. a heating surface; 12. a first side; 13. a second side; 14. a heat radiating surface;
21. a first bar-shaped groove; 22. a second bar-shaped groove;
31. a cooling liquid inlet; 32. a cooling liquid flow passage; 33. and a cooling liquid outlet.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present invention, it should be noted that, directions or positional relationships indicated by terms such as "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be configured and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed", "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected or integrally connected; either mechanically or electrically. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the invention.
In order to reduce the temperature gradient of the heat insulation structure, the heat deformation is small under the action of thermal stress, and the stability of the whole structure is improved, and the heat insulation structure is provided in this embodiment, and the details of this embodiment are described in detail below with reference to fig. 1 to 10.
Example 1
As shown in fig. 1, the heat insulation structure comprises a heat insulation body 1 and an anti-deformation air cooling tank 2, wherein the heat insulation body 1 comprises a heating surface 11, and the heating surface 11 is used for facing a heating element. The deformation-preventing air cooling groove 2 is arranged in the heat insulation body 1 and is communicated with the side wall surface of the heat insulation body 1, and the notch of the deformation-preventing air cooling groove 2 is communicated with the heating surface 11. The heat insulation body 1 is a plane plate, and is made of nonmetal materials with low heat conductivity and high hardness, so as to protect electric elements around a heat source.
In short, according to the heat insulation structure provided by the invention, the heating surface 11 of the heat insulation body 1 is used for facing the heated piece, the anti-deformation air cooling groove 2 is arranged in the heat insulation body 1, the notch formed in the anti-deformation air cooling groove 2 is communicated with the heating surface 11, the anti-deformation air cooling groove 2 is formed, the cooling function can be achieved, meanwhile, the notch is used for receiving the deformation quantity of the heated expansion of the heating surface 11, even if the heated surface 11 is heated to expand, the overall thermal deformation of the heat insulation body 1 is smaller, and the stability of the overall structure of the optical alignment equipment is improved. The thermal deformation value of the heat insulation structure of the embodiment is only 14% of that of the solid heat insulation plate, so that the temperature uniformity and the structural stability of the carrier plate platform are improved.
Further, the side wall surface of the heat insulation body 1 comprises two opposite first side surfaces 12, the deformation-preventing air cooling groove 2 comprises at least two first strip-shaped grooves 21, the first strip-shaped grooves 21 extend along the first direction and are communicated with the two first side surfaces 12, and the two adjacent first strip-shaped grooves 21 are parallel and are arranged at intervals. Further, the side wall surface of the heat insulation body 1 further comprises two opposite second side surfaces 13, the deformation-preventing air-cooled groove 2 further comprises at least two second strip-shaped grooves 22, the second strip-shaped grooves 22 extend along the second direction and are communicated with the two second side surfaces 13, the two adjacent second strip-shaped grooves 22 are parallel and are arranged at intervals, and the first direction intersects with the second direction. The number of the first and second bar grooves 21 and 22 is increased according to actual use.
Specifically, in the present embodiment, eleven first strip grooves 21 and nine second strip grooves 22 are provided, and the first strip grooves 21 and the second strip grooves 22 are vertically staggered from each other, so that the heating surface 11 of the heat insulation structure is cut into a plurality of square or rectangular areas.
Further, the first and second grooves 21 and 22 may be rectangular, triangular, or the like. Preferably, the first and second grooves 21 and 22 each have an isosceles trapezoid shape in cross section.
Further, the width of the top edge notch of each of the first strip-shaped groove 21 and the second strip-shaped groove 22 with isosceles trapezoid cross sections is 0.5mm-3.5mm. The sizes of the notches of the first strip-shaped groove 21 and the second strip-shaped groove 22 directly influence the heat radiation of the high-temperature heater to the heat insulation structure, and the excessive notch can cause the radiation heat exchange of the high-temperature heater to the inner space of the heat insulation structure, so that the heat insulation effect is not facilitated; too small a slot opening may cause structural interference due to material expansion, and preferably the top slot width d of both the first 21 and second 22 strap slots is 1mm-3mm, as shown in fig. 3.
Further, the first and second grooves 21 and 22 each have an isosceles trapezoid cross section, and the inner bottom angle is 25 ° -65 °. The size of the inner bottom angle of the anti-deformation air cooling groove 2 can influence the heat exchange area inside the heat insulation structure, and the inner bottom angle is too small, so that a narrow slit result can be generated, and heat dissipation is not facilitated; an excessively large inner bottom angle, which results in a reduced heat exchange area and is also disadvantageous for heat dissipation, is preferable that the inner bottom angle e of the anti-deformation air-cooling tank 2 has a value of 30-60 deg., as shown in fig. 3.
Further, the ratio of the height of the deformation-preventing air-cooling tank 2 to the height of the heat-insulating body 1 is 1/4-3/4. In this embodiment, the ratio c/H of the height of the anti-deformation air-cooled tank 2 to the height of the heat-insulating body 1 is 3/4, as shown in fig. 3.
Further, as shown in fig. 2, the heat insulating body 1 further includes a heat radiating surface 14 opposite to the heating surface 11, the heat radiating surface 14 is provided with a cooling structure 3, and the cooling structure 3 includes a cooling liquid inlet 31, a cooling liquid flow passage 32, and a cooling liquid outlet 33, which are sequentially communicated. Specifically, the coolant flow passage 32 extends in a serpentine shape, and is filled with cooling water.
When the heating piece is used as a heat source and the temperature is 200 ℃, as shown in fig. 4, the lowest temperature of the bottom of the solid heat insulation plate is 61.78 ℃, and the maximum deformation of the heat insulation plate is 24.74mm; as shown in FIG. 5, the lowest temperature of the bottom of the middle material-removing heat insulation plate is 39.7 ℃, and the maximum deformation of the heat insulation plate is 19.98mm; as shown in FIG. 6, the lowest temperature of the bottom of the rectangular notch heat insulation plate is 54.02 ℃, and the maximum deformation of the heat insulation plate is 22.2mm; as shown in FIG. 7, when the deformation-preventing air-cooled tank 2 is isosceles trapezoid, the lowest temperature of the bottom of the heat insulation body 1 is 23.93 ℃, and the maximum deformation of the heat insulation plate is 3.47mm. The deformation of the heat insulation structure is minimum, and the effect is optimal.
The heating surface 11 at the top of the heat insulation structure is in direct contact with the high-temperature heater; the heat of the heater increases the temperature of the heating surface 11 mainly by heat conduction, and when the steady state of heat is reached, the temperature of the heating surface 11 approaches the heater temperature. Meanwhile, the heat conduction structure material has low heat conductivity, so that heat generated by the heater is transferred to the bearing plate platform more, and the time for the bearing plate platform to rise to the target temperature can be effectively shortened.
The present embodiment also provides a photoalignment device characterized by comprising the heat insulation structure as mentioned above.
Example two
The present embodiment provides a heat insulation structure, and compared with the first embodiment, the basic structure of the heat insulation structure provided in the present embodiment is the same as that of the first embodiment, and only the cross-sectional shape of the anti-deformation air-cooled tank 2 is different, so that the present embodiment will not be repeated for the structure identical to that of the first embodiment.
Further, as shown in fig. 8 and 9, the first and second grooves 21 and 22 are each a combination of a circular groove and a rectangular groove, and the rectangular groove communicates with the heating surface 11.
Further, an auxiliary heat dissipation round groove 4 can be additionally arranged on the side wall surface of the heat insulation body 1. As shown in fig. 10, a row of auxiliary heat dissipation circular grooves 4 are formed in the side wall surface of the heat insulation body. According to actual use condition, can also add supplementary heat dissipation circular slot 4 of multirow, improve the radiating efficiency to thermal-insulated body 1.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.
Claims (10)
1. A thermal insulation structure, comprising:
the heat insulation body (1) comprises a heating surface (11), wherein the heating surface (11) is used for facing the heating element;
the deformation-preventing air cooling groove (2) is arranged in the heat insulation body (1) and is communicated with the side wall surface of the heat insulation body (1), and a notch of the deformation-preventing air cooling groove (2) is communicated with the heating surface (11).
2. The heat insulation structure according to claim 1, wherein the side wall surface of the heat insulation body (1) comprises two opposite first side surfaces (12), the deformation-preventing air-cooled groove (2) comprises at least two first strip-shaped grooves (21), the first strip-shaped grooves (21) extend along a first direction and penetrate through the two first side surfaces (12), and the two adjacent first strip-shaped grooves (21) are parallel and are arranged at intervals.
3. The heat insulation structure according to claim 2, wherein the side wall surface of the heat insulation body (1) further comprises two opposite second side surfaces (13), the deformation-preventing air-cooled groove (2) further comprises at least two second strip-shaped grooves (22), the second strip-shaped grooves (22) extend along a second direction and penetrate through the two second side surfaces (13), the two adjacent second strip-shaped grooves (22) are parallel and are arranged at intervals, and the first direction intersects the second direction.
4. A heat insulating structure according to claim 3, characterized in that the first and second grooves (21, 22) each have an isosceles trapezoid shape in cross section.
5. The insulation structure according to claim 4, characterized in that the width of the top edge notch of the first strip-shaped groove (21) and the second strip-shaped groove (22) is 0.5mm-3.5mm.
6. The insulation structure according to claim 4, characterized in that the first and second grooves (21, 22) each have an inner bottom angle of 25 ° -65 °.
7. The insulation structure according to claim 4, characterized in that the ratio of the height of the deformation-preventing air-cooled tank (2) to the height of the insulation body (1) is 1/4-3/4.
8. A heat insulating structure according to claim 3, characterized in that the deformation-preventing air-cooled tank (2) is a combined structure of a circular tank and a rectangular tank, and the rectangular tank communicates with the heating surface (11).
9. The heat insulation structure according to any one of claims 1-8, characterized in that the heat insulation body (1) further comprises a heat radiating surface (14) opposite to the heating surface (11), the heat radiating surface (14) being provided with a cooling structure (3), the cooling structure (3) comprising a cooling liquid inlet (31), a cooling liquid flow passage (32) and a cooling liquid outlet (33) which are in communication in sequence.
10. A photoalignment device comprising an insulating structure according to claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111275975.1A CN116074994A (en) | 2021-10-29 | 2021-10-29 | Heat insulation structure and optical alignment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111275975.1A CN116074994A (en) | 2021-10-29 | 2021-10-29 | Heat insulation structure and optical alignment equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116074994A true CN116074994A (en) | 2023-05-05 |
Family
ID=86180707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111275975.1A Pending CN116074994A (en) | 2021-10-29 | 2021-10-29 | Heat insulation structure and optical alignment equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116074994A (en) |
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2021
- 2021-10-29 CN CN202111275975.1A patent/CN116074994A/en active Pending
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