CN116060999B - Control system of machine tool - Google Patents

Control system of machine tool Download PDF

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Publication number
CN116060999B
CN116060999B CN202310210666.9A CN202310210666A CN116060999B CN 116060999 B CN116060999 B CN 116060999B CN 202310210666 A CN202310210666 A CN 202310210666A CN 116060999 B CN116060999 B CN 116060999B
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Prior art keywords
spindle
main shaft
signal
machine tool
gas
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CN116060999A (en
Inventor
孙德举
梁崑
金钊
刘天阳
卞志鹏
杨楚邦
徐雨枫
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Changchun Guanghua Micro Electronic Equipment Engineering Center Co ltd
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Changchun Guanghua Micro Electronic Equipment Engineering Center Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/013Control or regulation of feed movement
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/12Arrangements for cooling or lubricating parts of the machine
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Abstract

The disclosure relates to the technical field of machine tool machining, and provides a control system of a machine tool. The system comprises: the device comprises a main shaft mechanism, a lifting mechanism, a working mechanism, a shifting mechanism, a feeding mechanism and a control mechanism; a control mechanism configured to: and controlling the gas and the cooling liquid to protect the spindle mechanism in the process of processing the fed workpiece by the machine tool so as to prolong the service life of the spindle mechanism. The present disclosure provides suspension driving gas and cooling liquid in the spindle mechanism, and the control mechanism can control the spindle mechanism to start only under the double permission of the air pressure ready signal and the hydraulic ready signal. Therefore, the main shaft mechanism can be safely started under the protection of gas and cooling liquid, and the main shaft mechanism is prevented from working under the protection of no gas and cooling liquid, so that the service life of the main shaft mechanism is prolonged.

Description

Control system of machine tool
Technical Field
The disclosure relates to the technical field of machine tools, and in particular relates to a control system of a machine tool.
Background
A machine tool is a key device for machining a workpiece, and cuts the workpiece (such as a wafer) by a tool mounted on a spindle.
However, the spindle cuts at a rotational speed of 3 to 6 tens of thousands per minute, so that not only is the cutter easy to wear in the cutting process, but also the spindle is easy to wear in the high-speed rotation, the service life of the spindle is shortened, and the hidden trouble of safe production is increased.
Accordingly, the present disclosure provides a control system of a machine tool to solve one of the above-mentioned technical problems.
Disclosure of Invention
The present disclosure aims to provide a control system for a machine tool, which can solve at least one technical problem mentioned above. The specific scheme is as follows:
according to a first aspect of the present disclosure, there is provided a control system for a machine tool, comprising:
a spindle mechanism for cutting a workpiece under the protection of a suspension driving gas and a cooling liquid;
the lifting mechanism is used for lifting the main shaft mechanism along the Z-axis direction of a preset coordinate system;
the work mechanism enables the workpiece adsorbed on the upper surface to rotate around a Z axis of a preset coordinate system;
the displacement mechanism enables the working mechanism and/or the main shaft mechanism to displace along the Y-axis direction of a preset coordinate system;
a feeding mechanism for feeding the working mechanism and/or the main shaft mechanism along the X-axis direction of a preset coordinate system;
a control mechanism configured to: and controlling the gas and the cooling liquid to protect the spindle mechanism in the process of processing the fed workpiece by the machine tool so as to prolong the service life of the spindle mechanism.
Optionally, the spindle mechanism includes: the device comprises an outer cavity, and a main shaft, an air pressure sensor and a hydraulic pressure sensor which are arranged in the outer cavity; during processing, the main shaft is driven by the gas to rotate in a high-speed suspension manner;
the control mechanism comprises a main shaft logic module; the spindle logic module generates a spindle permission signal at least after receiving an air pressure ready signal sent by the air pressure sensor after reaching a preset air pressure parameter value and a hydraulic ready signal sent by the hydraulic pressure sensor after reaching the preset hydraulic pressure parameter value.
Optionally, the control mechanism further comprises a frequency converter and a setting module;
the setting module sets the processing frequency parameter value of the frequency converter based on the determined processing frequency parameter value of the main shaft;
the frequency converter generates a rotational speed value for controlling the spindle based on the machining frequency parameter value.
Optionally, after setting a processing frequency parameter value of the frequency converter, the frequency converter generates a frequency converter ready signal;
the spindle logic module generates a spindle permission signal after receiving the air pressure ready signal, the hydraulic ready signal and the frequency converter ready signal.
Optionally, the control mechanism further comprises a spindle switch and a spindle control module; when the spindle mechanism is in a power-off state, the spindle control module starts the spindle mechanism to enter a machining state after receiving the spindle permission signal and the first closing signal of the spindle switch.
Optionally, the spindle logic module receives the air pressure shortage signal sent by the air pressure sensor and/or receives the hydraulic shortage signal sent by the hydraulic pressure sensor in the machining state of the spindle mechanism to generate an error reporting signal.
Optionally, the control mechanism further comprises a gas circuit test switch and a gas circuit test module; the gas circuit test switch sends out a gas circuit test signal when being closed;
and the gas circuit testing module responds to the gas circuit testing signal when the main shaft mechanism is in a power-off state, so that the main shaft mechanism enters a gas testing state under the protection of the suspension driving gas, and whether the gas supply work in the main shaft mechanism is normal is tested by receiving the feedback signal of the gas pressure sensor.
Optionally, the control mechanism further comprises a liquid path test switch and a liquid path test module; the liquid path test switch sends out a liquid path test signal when being closed;
and the liquid path testing module responds to the liquid path testing signal when the main shaft mechanism is in a power-off state, enables the main shaft mechanism to enter a liquid testing state under the protection of cooling liquid, and tests whether the cooling liquid in the main shaft mechanism works normally or not by receiving a feedback signal of the hydraulic sensor.
Optionally, the spindle mechanism further comprises a rotation speed measurer arranged in the outer cavity; the rotating speed measurer is used for testing the rotating speed value of the main shaft;
the control mechanism also comprises a variable frequency test switch and a variable frequency test module; the variable frequency test switch sends out a variable frequency test signal when being closed;
and when the main shaft mechanism is in a power-off state, the variable frequency test module responds to the variable frequency test signal and the air pressure ready signal, so that the main shaft mechanism enters the variable frequency test state under the protection of the suspension driving gas, and whether the working of the frequency converter is normal is detected by receiving the feedback rotation speed value of the rotation speed measurer.
According to a second aspect of a particular embodiment of the present disclosure, the present disclosure provides a machine tool comprising a control system of a machine tool as described in any one of the above.
Optionally, the spindle mechanism further includes: the device comprises an inner cavity, an air passage, a cooling flow passage and a cutter;
the inner cavity is arranged in the outer cavity, the space between the inner cavity and the outer cavity is configured as a cooling flow channel, cooling liquid is circularly injected into the cooling flow channel in the processing process, the main shaft is arranged in the inner cavity, the first end of the main shaft penetrates out of the outer cavity, the space between the main shaft and the inner cavity is configured as an air passage, the air passage drives the main shaft to rotate in a high-speed suspension manner through circularly injected gas in the processing process, the cutter is arranged at the first end of the main shaft and rotates at a high speed along with the main shaft, the air pressure sensor is arranged in the air passage and is connected with a control mechanism signal, and the hydraulic sensor is arranged in the cooling flow channel and is connected with the control mechanism signal.
Compared with the prior art, the scheme of the embodiment of the disclosure has at least the following beneficial effects:
the present disclosure provides a control system for a machine tool. The system comprises: the device comprises a main shaft mechanism, a lifting mechanism, a working mechanism, a shifting mechanism, a feeding mechanism and a control mechanism; a control mechanism configured to: and controlling the gas and the cooling liquid to protect the spindle mechanism in the process of processing the fed workpiece by the machine tool so as to prolong the service life of the spindle mechanism. The present disclosure provides suspension driving gas and cooling liquid in the spindle mechanism, and the control mechanism can control the spindle mechanism to start only under the double permission of the air pressure ready signal and the hydraulic ready signal. Therefore, the main shaft mechanism can be safely started under the protection of gas and cooling liquid, and the main shaft mechanism is prevented from working under the protection of no gas and cooling liquid, so that the service life of the main shaft mechanism is prolonged.
Drawings
FIG. 1 shows a schematic structural diagram of a control system of a machine tool according to an embodiment of the present disclosure;
FIG. 2 shows a schematic view of a spindle mechanism according to an embodiment of the present disclosure;
FIG. 3 illustrates a schematic view of an evolution of a lifting mechanism in processing according to an embodiment of the present disclosure;
FIG. 4 illustrates a schematic diagram of a portion of a control mechanism according to an embodiment of the present disclosure;
FIG. 5 illustrates a schematic diagram of the relationship of a spindle logic module to other modules in a control mechanism according to an embodiment of the present disclosure;
FIG. 6 illustrates a schematic diagram of the relationship of a frequency converter to other modules in a control mechanism according to an embodiment of the present disclosure;
FIG. 7 is a schematic diagram showing the relationship of a gas circuit test module to other modules in a control mechanism according to an embodiment of the disclosure;
fig. 8 shows a schematic diagram of the relationship of the liquid path test module and other modules in the control mechanism according to an embodiment of the present disclosure.
Reference numerals illustrate:
11-main shaft mechanism, 12-lifting mechanism, 13-working mechanism, 14-shifting mechanism, 15-feeding mechanism and 16-wafer;
111-an outer cavity, 112-an inner cavity, 113-a main shaft, 114-an air pressure sensor, 115-a hydraulic pressure sensor, 116-a rotating speed measurer, 117-an air passage, 118-a cooling flow passage and 119-a cutter;
151-spindle logic module, 152-frequency converter, 153-setting module, 154-spindle switch, 155-spindle control module, 156-gas circuit test switch, 157-gas circuit test module, 158-liquid circuit test switch, 159-liquid circuit test module, 15A-frequency conversion test switch, 15B-frequency conversion test module.
Detailed Description
For the purpose of promoting an understanding of the principles and advantages of the disclosure, reference will now be made in detail to the drawings, in which it is apparent that the embodiments described are only some, but not all embodiments of the disclosure. Based on the embodiments in this disclosure, all other embodiments that a person of ordinary skill in the art would obtain without making any inventive effort are within the scope of protection of this disclosure.
The terminology used in the embodiments of the disclosure is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. As used in this disclosure of embodiments and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise, the "plurality" generally includes at least two.
It should be understood that the term "and/or" as used herein is merely one relationship describing the association of the associated objects, meaning that there may be three relationships, e.g., a and/or B, may represent: a exists alone, A and B exist together, and B exists alone. In addition, the character "/" herein generally indicates that the front and rear associated objects are an "or" relationship.
It should be understood that although the terms first, second, third, etc. may be used in embodiments of the present disclosure, these descriptions should not be limited to these terms. These terms are only used to distinguish one from another. For example, a first may also be referred to as a second, and similarly, a second may also be referred to as a first, without departing from the scope of embodiments of the present disclosure.
The words "if", as used herein, may be interpreted as "at … …" or "at … …" or "in response to a determination" or "in response to a detection", depending on the context. Similarly, the phrase "if determined" or "if detected (stated condition or event)" may be interpreted as "when determined" or "in response to determination" or "when detected (stated condition or event)" or "in response to detection (stated condition or event), depending on the context.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a product or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such product or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a commodity or device comprising such element.
In particular, the symbols and/or numerals present in the description, if not marked in the description of the figures, are not numbered.
The machine tool is a key device for machining a workpiece, and the workpiece is machined by a cutter arranged on a main shaft. For example, in the semiconductor field, after a wafer is tested, a cutter installed on a rotating shaft of a dicing machine is required to cut off chips on the wafer; due to the high development of technology, the chips are smaller and smaller, the density of the chips on the wafer is higher and higher, and a machine tool is required to have high accuracy, stability and safety during cutting. Therefore, the safety and precision of the spindle in the machine tool are very important.
However, the spindle cuts at a rotational speed of 3 to 6 tens of thousands per minute, so that not only is the cutter easy to wear in the cutting process, but also the spindle is easy to wear in the high-speed rotation, the service life of the spindle is shortened, and the hidden trouble of safe production is increased. For this reason, the embodiment of the disclosure provides a control system of a machine tool, so as to improve accuracy, stability and safety of the machine tool during cutting.
Alternative embodiments of the present disclosure are described in detail below with reference to the drawings.
Embodiments provided for by the present disclosure, namely embodiments of a control system for a machine tool.
As shown in fig. 1, an embodiment of the present disclosure provides a control system of a machine tool, including: a spindle mechanism 11, a lifting mechanism 12 (i.e., Z-axis mechanism), a working mechanism 13 (i.e., θ -axis mechanism), a shifting mechanism 14 (i.e., Y-axis mechanism), a feeding mechanism 15 (i.e., X-axis mechanism), and a control mechanism. The application provides a preset coordinate system, which comprises an X axis, a Y axis and a Z axis which are perpendicular to each other.
As shown in fig. 2, the spindle mechanism performs cutting processing on a workpiece under the protection of the levitation driving gas and the coolant. The spindle mechanism includes: an outer cavity 111, an inner cavity 112, a main shaft 113, an air pressure sensor, a hydraulic pressure sensor, an air passage 117, a cooling flow passage 118, and a cutter 119. The inner cavity 112 is disposed in the outer cavity 111, a space between the inner cavity 112 and the outer cavity 111 is configured as a cooling flow channel 118, and the cooling flow channel 118 is filled with cooling liquid in a circulating manner in the processing process, so that deformation of the main shaft 113 caused by high temperature is avoided, stable operation of the main shaft 113 in a low temperature state is ensured, and high-precision cutting of the cutter 119 is ensured. The main shaft 113 is disposed in the inner cavity 112, and a first end of the main shaft 113 penetrates through the outer cavity 111, and a space between the main shaft 113 and the inner cavity 112 is configured as an air passage 117. The air passage 117 drives the main shaft 113 to rotate in a high-speed suspension manner through circularly injected gas during the processing. The contact of the main shaft 113 and other parts of the main shaft mechanism in rotation is reduced, the abrasion during processing is reduced, the service life of the main shaft 113 is prolonged, and the processing safety is improved. The cutter 119 is disposed on a first end of the spindle 113, following the high-speed rotation of the spindle 113. The air pressure sensor is arranged in the air passage 117 and is in signal connection with the control mechanism. The hydraulic sensor is disposed in the cooling flow passage 118, and the hydraulic sensor is in signal connection with the control mechanism.
As shown in fig. 1, the lifting mechanism 12 (i.e., a Z-axis mechanism) lifts and lowers the spindle mechanism 11 in the Z-axis direction of a preset coordinate system.
For example, as shown in fig. 3, before the wafer 16 is cut once, the cutter 119 of the spindle mechanism is suspended above one side of the wafer 16 on the working mechanism 13 by the lifting mechanism, when processing is started, the cutter 119 is lowered to the cutting height by the lifting mechanism, then the cutter 119 is driven by the rotating spindle to cut the wafer 16 by the relative movement of the cutter 119 mounted on one end of the spindle and the wafer 16, and after the completion of the cutting once, the spindle mechanism is lifted by the lifting mechanism and suspended above one side of the wafer 16 again, and the next cutting is waited.
As shown in fig. 1, the work mechanism 13 (i.e., θ -axis mechanism) rotates the workpiece attached to the upper surface thereof around the Z-axis of the preset coordinate system. For example, in the semiconductor industry, the work mechanism 13 includes a CHUCK (CHUCK plate), which is a very important component in the semiconductor equipment industry, and a rotating device, and includes a plurality of vacuum suction holes on the surface of the CHUCK, onto which a wafer is placed, and the wafer is sucked by the vacuum suction holes; during moving and processing, the reliability and the safety of the adsorbed wafer are ensured, and the wafer is prevented from being misplaced, so that the cutting precision is prevented from being influenced; because the chips on the wafer are arranged according to the matrix, the rotating device rotates around the Z axis of the preset coordinate system and is used for adjusting the tangential angle of the wafer on the chuck, namely the rotating device enables the cutter to be aligned with the array interval of the chips so as to cut, and the chips are prevented from being cut during processing.
As shown in fig. 1, the displacement mechanism 14 (i.e., a Y-axis mechanism) displaces the working mechanism 13 and/or the spindle mechanism 11 in the Y-axis direction of a preset coordinate system. It is understood that the displacement is in a direction perpendicular to the preset cutting direction.
The preset cutting direction refers to the cutting direction of the cutter in the spindle mechanism. The shifting mechanism is used for adjusting the tangential position on the workpiece. For example, when cutting a wafer, after each column of chips is cut, the displacement mechanism moves the wafer in a direction perpendicular to a preset cutting direction, so that the cutter is aligned with the arrangement interval of the next column of chips, and the cutter cuts the column arrangement interval.
As shown in fig. 1, the displacement mechanism 14 is fixedly connected with the working mechanism 13, and the position of the working mechanism 13 is adjusted along the Y-axis direction of a preset coordinate system; or the shifting mechanism 14 is fixedly connected with the main shaft mechanism 11, and the position of the main shaft mechanism 11 is adjusted along the Y-axis direction of a preset coordinate system; or the shifting mechanism 14 is fixedly connected with the main shaft mechanism 11 and the working mechanism 13, so that the positions of the main shaft mechanism 11 and the working mechanism 13 are adjusted along the Y-axis direction of a preset coordinate system at the same time; the arrangement of the shift mechanism 14 of the present disclosure is not limited thereto.
As shown in fig. 1, a feeding mechanism 15 (i.e., an X-axis mechanism) feeds the working mechanism 13 and/or the spindle mechanism 11 in the X-axis direction of a preset coordinate system. When the workpiece is processed, the feeding mechanism 15 drives the working mechanism and/or the spindle mechanism to feed along the X-axis direction of a preset coordinate system, so that the tool on the spindle moves relative to the workpiece. Optionally, the feeding mechanism 15 is fixedly connected with the working mechanism 13, and the position of the working mechanism 13 is adjusted along the X-axis direction of a preset coordinate system; or the feeding mechanism 15 is fixedly connected with the main shaft mechanism 11, and the position of the main shaft mechanism 11 is adjusted along the X-axis direction of a preset coordinate system; or the feeding mechanism 15 is fixedly connected with the main shaft mechanism 11 and the working mechanism 13, so that the positions of the main shaft mechanism 11 and the working mechanism 13 are adjusted along the X-axis direction of a preset coordinate system at the same time; the arrangement of the feeding mechanism 15 of the present disclosure is not limited thereto.
A control mechanism configured to: and controlling the gas and the cooling liquid to protect the spindle mechanism in the process of processing the fed workpiece by the machine tool so as to prolong the service life of the spindle mechanism.
In some embodiments, the spindle mechanism comprises: the device comprises an outer cavity, and a main shaft, an air pressure sensor and a hydraulic pressure sensor which are arranged in the outer cavity; during processing, the main shaft is driven by the gas to rotate in a high-speed suspension mode.
As shown in fig. 4, the control mechanism includes a spindle logic module 151; the spindle logic module 151 generates a spindle enable signal at least after receiving the air pressure ready signal sent after the air pressure sensor 114 reaches a preset air pressure parameter value and the hydraulic ready signal sent after the hydraulic pressure sensor 115 reaches a preset hydraulic pressure parameter value.
The air pressure sensor and the hydraulic pressure sensor are both intelligent sensors. Before processing, a preset air pressure parameter value is set for an air pressure sensor, when the pressure of detected air reaches the preset air pressure parameter value, the air pressure sensor automatically reports an air pressure ready signal, and when the pressure of the detected air is lower than the preset air pressure parameter value, the air pressure sensor automatically reports an air pressure shortage signal; also, before machining, a preset hydraulic parameter value is set for the hydraulic sensor, when the detected pressure of the cooling liquid reaches the preset hydraulic parameter value, the hydraulic pressure sensor automatically reports a hydraulic ready signal, and when the detected pressure of the cooling liquid is lower than the preset hydraulic parameter value, the hydraulic pressure sensor automatically reports a hydraulic shortage signal.
As shown in fig. 4, the spindle permission signal is a signal for protecting the safe use of the spindle. When the liquid pressure of the cooling liquid in the spindle mechanism 11 reaches a preset hydraulic parameter value, the cooling liquid is indicated to work normally; when the gas pressure of the suspension driving gas in the spindle mechanism 11 reaches a preset gas pressure parameter value, it is indicated that the gas is working normally. The spindle logic module 151 can generate a spindle enable signal only after receiving the hydraulic ready signal and the pneumatic ready signal, allowing the spindle mechanism 11 to perform cutting processing on the workpiece. The spindle permission signal ensures that the spindle mechanism 11 can be safely started under the protection of gas and cooling liquid, and avoids the spindle mechanism 11 from working under the protection of no gas and cooling liquid, thereby prolonging the service life of the spindle mechanism 11.
Further, in some embodiments, as shown in FIG. 4, the control mechanism further includes a spindle switch 154 and a spindle control module 155. When the spindle mechanism 11 is in the power-off state, the spindle control module 155 starts the spindle mechanism 11 to enter the machining state after receiving the spindle permission signal and the first closing signal of the spindle switch 154. The spindle control module 155 enables the spindle mechanism 11 to start machining only after receiving the spindle enable signal and the first close signal.
In other embodiments, as shown in FIG. 5, the control mechanism further includes a frequency converter 152 and a setting module 153. The setting module 153 sets the machining frequency parameter value of the frequency converter 152 based on the determined machining frequency parameter value of the spindle. The frequency converter 152 generates a rotational speed value for controlling the spindle based on the machining frequency parameter value. In this particular embodiment, the rotational speed of the spindle is variable. The rotational speed of the spindle is determined by the machining frequency parameter value of the frequency converter 152. In actual operation, the machining frequency parameter value of the frequency converter 152 can be set by the setting module 153 according to the material property of the workpiece, and the rotational speed value of the spindle can be determined by the machining frequency parameter value. The damage to the workpiece caused by unreasonable spindle rotation speed is avoided, the machining accuracy is guaranteed, and the machining precision is improved.
In some embodiments, as shown in fig. 5, the inverter 152 generates an inverter ready signal after setting the processing frequency parameter value of the inverter. The spindle logic module 151 generates a spindle enable signal upon receiving the air pressure ready signal, the hydraulic ready signal, and the inverter ready signal. In this embodiment, the spindle logic module 151 generates the spindle enable signal only after receiving the pneumatic ready signal, the hydraulic ready signal, and the inverter ready signal. The spindle permission signal ensures that the spindle mechanism 11 can be safely started under the protection of gas and cooling liquid, and avoids the spindle mechanism 11 from working under the protection of no gas and cooling liquid, thereby prolonging the service life of the spindle mechanism 11. The tool of the spindle mechanism 11 is guaranteed to process the workpiece at a reasonable rotating speed, damage to the workpiece caused by unreasonable spindle rotating speed is avoided, processing accuracy is guaranteed, and processing precision is improved.
Further, in some embodiments, as shown in FIG. 5, the control mechanism further includes a spindle switch 154 and a spindle control module 155; when the spindle mechanism 11 is in the power-off state, the spindle control module 155 starts the spindle mechanism 11 to enter the machining state after receiving the spindle permission signal and the first closing signal of the spindle switch 154. The spindle control module 155 enables the spindle mechanism 11 to start machining only after receiving the spindle enable signal and the first close signal.
In some embodiments, as shown in fig. 5, the spindle logic module 151 generates an error signal after receiving the air pressure shortage signal sent by the air pressure sensor 114 and/or receiving the hydraulic pressure shortage signal sent by the hydraulic pressure sensor 115 in the machining state of the spindle mechanism 11.
In this embodiment, if the spindle logic module receives the air pressure deficiency signal and/or the hydraulic pressure deficiency signal during the machining process, an error reporting signal is generated. The error-reporting signal gives an alarm through a buzzer and/or an alarm lamp arranged on the machine tool to prompt operators to process in time.
In some embodiments, as shown in fig. 6, the control mechanism further includes an air circuit test switch 156 and an air circuit test module 157. The air circuit test switch 156 issues an air circuit test signal when closed. The air path testing module 157 responds to the air path testing signal when the spindle mechanism 11 is in the power-off state, so that the spindle mechanism 11 enters the air testing state, and tests whether the air supply work in the spindle mechanism 11 is normal by receiving the feedback signal of the air pressure sensor 114. When the spindle mechanism 11 enters a processing state, the spindle control module 155 transmits a processing state signal of the spindle mechanism 11 to the air path test module 157; when the spindle control module 155 receives the power-off request signal from the spindle switch, it cuts off the power supply to the spindle mechanism 11, so that the spindle mechanism 11 is in a power-off state, that is, the machining of the spindle mechanism 11 is stopped, and the spindle control module 155 transmits the power-off state signal of the spindle mechanism 11 to the air path test module 157.
The gas test state refers to a working state of gas during simulation processing, so as to judge whether the pressure of the test gas is normal or not under the condition that a main shaft in the main shaft mechanism rotates at a high speed. In the gas test state, the cooling liquid does not protect the spindle mechanism. And the air pressure sensor transmits a feedback signal of the air pressure in the spindle mechanism during operation to the air path test module in real time, and whether the air supply in the spindle mechanism works normally is judged through the feedback signal of the air pressure sensor.
In this embodiment, when testing whether the air supply operation in the spindle mechanism is normal, the spindle mechanism can be tested without sending a spindle permission signal by the spindle logic module, and the spindle mechanism is brought into an air test state by the air circuit test module. Thereby improving the flexibility of the maintenance of the control system.
In other embodiments, as shown in FIG. 7, the control mechanism further includes a fluid path test switch 158 and a fluid path test module 159; the fluid circuit test switch 158, when closed, sends out a fluid circuit test signal. The fluid path testing module 159, when the spindle mechanism is in the power-off state, responds to the fluid path testing signal to make the spindle mechanism enter the fluid testing state, and tests whether the cooling fluid in the spindle mechanism works normally by receiving the feedback signal of the hydraulic sensor 115. When the spindle mechanism enters a machining state, the spindle control module 155 transmits a machining state signal of the spindle mechanism to the liquid path test module 159; when the spindle control module 155 receives the power-off request signal of the spindle switch, the power supply to the spindle mechanism is cut off, so that the spindle mechanism is in a power-off state, that is, the machining of the spindle mechanism is stopped, and the spindle control module 155 transmits the power-off state signal of the spindle mechanism to the liquid path testing module 159.
The liquid test state refers to the working state of the cooling liquid during the simulation processing so as to judge whether the pressure of the cooling liquid during the working is normal or not. In the liquid test state, the gas does not protect the spindle mechanism and the spindle does not work. And the hydraulic sensor transmits a feedback signal of the main shaft mechanism during the working of the cooling liquid to the liquid path testing module in real time, and whether the cooling liquid in the main shaft mechanism works normally is judged through the feedback signal of the hydraulic sensor.
In this embodiment, when testing whether the cooling liquid in the spindle mechanism works normally, the spindle mechanism can not rely on the spindle logic module to send the spindle permission signal to perform the test, but the spindle mechanism is made to enter the liquid test state through the liquid path test module. Thereby improving the flexibility of the maintenance of the control system.
In other embodiments, as shown in fig. 8, the spindle mechanism further includes a rotation speed measurer 116 disposed in the outer cavity; the rotation speed measurer 116 is used for testing the rotation speed value of the main shaft 113.
Specifically, the rotational speed caliber is arranged in the air passage, and the rotational speed caliber is in signal connection with the control mechanism.
As shown in fig. 8, the control mechanism further includes a variable frequency test switch 15A and a variable frequency test module 15B; the variable frequency test switch 15A sends out a variable frequency test signal when closed. The variable frequency test module 15B responds to the variable frequency test signal and the air pressure ready signal when the spindle mechanism is in the power-off state, so that the spindle mechanism enters the variable frequency test state under the protection of the suspension driving gas, and detects whether the working of the frequency converter is normal by receiving the feedback rotation speed value of the rotation speed measurer 116. When the spindle mechanism enters a machining state, the spindle control module 155 transmits a machining state signal of the spindle mechanism to the variable frequency test module 15B; when the spindle control module 155 receives the power-off request signal of the spindle switch, the power supply to the spindle mechanism is cut off, so that the spindle mechanism is in a power-off state, that is, the machining of the spindle mechanism is stopped, and the spindle control module 155 transmits the power-off state signal of the spindle mechanism to the frequency conversion test module 15B.
The frequency conversion test state is used for simulating the influence of frequency conversion on processing during processing so as to judge whether the spindle mechanism is normal after frequency conversion. In the variable frequency test state, the cooling liquid does not protect the spindle mechanism. And the rotating speed measurer feeds the rotating speed value of the main shaft back to the frequency conversion test module in real time, and judges whether the working of the frequency converter is normal or not through the rotating speed value of the main shaft.
In this embodiment, when testing whether the operation of the frequency converter is normal, the spindle mechanism can be tested without sending a spindle permission signal by the spindle logic module, and the spindle mechanism is brought into a frequency conversion test state by the frequency conversion test module. Thereby improving the flexibility of the maintenance of the control system.
In the embodiment of the disclosure, the suspension driving gas and the cooling liquid are arranged in the main shaft mechanism, and the control mechanism can only control the start of the main shaft mechanism under the double permission of the air pressure ready signal and the hydraulic ready signal. Therefore, the main shaft mechanism can be safely started under the protection of gas and cooling liquid, and the main shaft mechanism is prevented from working under the protection of no gas and cooling liquid, so that the service life of the main shaft mechanism is prolonged.
The disclosure also provides a method embodiment accepted by the above embodiment, and the explanation based on the same meaning of the name is the same as that of the above embodiment, and has the same technical effect as that of the above embodiment, and is not repeated here.
The disclosure provides a machine tool, comprising a control system of the machine tool.
In the embodiment of the disclosure, the suspension driving gas and the cooling liquid are arranged in the main shaft mechanism, and the control mechanism can only control the start of the main shaft mechanism under the double permission of the air pressure ready signal and the hydraulic ready signal. Therefore, the main shaft mechanism can be safely started under the protection of gas and cooling liquid, and the main shaft mechanism is prevented from working under the protection of no gas and cooling liquid, so that the service life of the main shaft mechanism is prolonged.
Finally, it should be noted that: in the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other.
The above embodiments are merely for illustrating the technical solution of the present disclosure, and are not limiting thereof; although the present disclosure has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present disclosure.

Claims (9)

1. A control system for a machine tool, comprising:
a spindle mechanism for cutting a workpiece under the protection of a suspension driving gas and a cooling liquid;
the lifting mechanism is used for lifting the main shaft mechanism along the Z-axis direction of a preset coordinate system;
the work mechanism enables the workpiece adsorbed on the upper surface to rotate around a Z axis of a preset coordinate system;
the displacement mechanism enables the working mechanism and/or the main shaft mechanism to displace along the Y-axis direction of a preset coordinate system;
a feeding mechanism for feeding the working mechanism and/or the main shaft mechanism along the X-axis direction of a preset coordinate system;
a control mechanism configured to: controlling the gas and the cooling liquid to protect the spindle mechanism in the process of processing the fed workpiece by the machine tool so as to prolong the service life of the spindle mechanism;
the spindle mechanism includes: the device comprises an outer cavity, and a main shaft, an air pressure sensor and a hydraulic pressure sensor which are arranged in the outer cavity; during processing, the main shaft is driven by the gas to rotate in a high-speed suspension manner;
the control mechanism comprises a main shaft logic module; the spindle logic module generates a spindle permission signal at least after receiving an air pressure ready signal sent by the air pressure sensor after reaching a preset air pressure parameter value and a hydraulic ready signal sent by the hydraulic pressure sensor after reaching the preset hydraulic pressure parameter value.
2. A control system for a machine tool according to claim 1, wherein the control mechanism further comprises a frequency converter and a setting module;
the setting module sets the processing frequency parameter value of the frequency converter based on the determined processing frequency parameter value of the main shaft;
the frequency converter generates a rotational speed value for controlling the spindle based on the machining frequency parameter value.
3. A control system of a machine tool according to claim 2, wherein the frequency converter generates a frequency converter ready signal after setting a machining frequency parameter value of the frequency converter;
the spindle logic module generates a spindle permission signal after receiving the air pressure ready signal, the hydraulic ready signal and the frequency converter ready signal.
4. A control system for a machine tool according to claim 1 or claim 3, wherein the control mechanism further comprises a spindle switch and a spindle control module; when the spindle mechanism is in a power-off state, the spindle control module starts the spindle mechanism to enter a machining state after receiving the spindle permission signal and the first closing signal of the spindle switch.
5. The control system of a machine tool according to claim 4, wherein the spindle logic module generates an error signal after receiving an air pressure shortage signal from the air pressure sensor and/or receiving a hydraulic pressure shortage signal from the hydraulic pressure sensor in a machining state of the spindle mechanism.
6. A control system for a machine tool according to claim 1, wherein,
the control mechanism also comprises an air passage test switch and an air passage test module; the gas circuit test switch sends out a gas circuit test signal when being closed;
and the gas circuit testing module responds to the gas circuit testing signal when the main shaft mechanism is in a power-off state, so that the main shaft mechanism enters a gas testing state, and whether the gas supply work in the main shaft mechanism is normal or not is tested by receiving the feedback signal of the gas pressure sensor.
7. A control system for a machine tool according to claim 1, wherein,
the control mechanism also comprises a liquid path test switch and a liquid path test module; the liquid path test switch sends out a liquid path test signal when being closed;
and the liquid path testing module responds to the liquid path testing signal when the main shaft mechanism is in a power-off state, and tests whether the cooling liquid in the main shaft mechanism works normally or not by receiving the feedback signal of the hydraulic sensor when the main shaft mechanism enters the liquid testing state.
8. A control system for a machine tool according to claim 2, wherein,
the main shaft mechanism further comprises a rotation speed measurer arranged in the outer cavity; the rotating speed measurer is used for testing the rotating speed value of the main shaft;
the control mechanism also comprises a variable frequency test switch and a variable frequency test module; the variable frequency test switch sends out a variable frequency test signal when being closed;
and when the main shaft mechanism is in a power-off state, the variable frequency test module responds to the variable frequency test signal and the air pressure ready signal, so that the main shaft mechanism enters the variable frequency test state under the protection of the suspension driving gas, and whether the working of the frequency converter is normal is detected by receiving the feedback rotation speed value of the rotation speed measurer.
9. A control system for a machine tool according to claim 1, wherein the spindle mechanism further comprises: the device comprises an inner cavity, an air passage, a cooling flow passage and a cutter;
the inner cavity is arranged in the outer cavity, the space between the inner cavity and the outer cavity is configured as a cooling flow channel, cooling liquid is circularly injected into the cooling flow channel in the processing process, the main shaft is arranged in the inner cavity, the first end of the main shaft penetrates out of the outer cavity, the space between the main shaft and the inner cavity is configured as an air passage, the air passage drives the main shaft to rotate in a high-speed suspension manner through circularly injected gas in the processing process, the cutter is arranged at the first end of the main shaft and rotates at a high speed along with the main shaft, the air pressure sensor is arranged in the air passage and is connected with a control mechanism signal, and the hydraulic sensor is arranged in the cooling flow channel and is connected with the control mechanism signal.
CN202310210666.9A 2023-03-07 2023-03-07 Control system of machine tool Active CN116060999B (en)

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Publication number Priority date Publication date Assignee Title
JPH0637002B2 (en) * 1987-02-14 1994-05-18 三菱電機株式会社 Spindle head balance device
CN108380910B (en) * 2018-04-19 2019-08-30 唐德祥 Air suspension formula ultrasound high-speed motorized spindles
CN111552236A (en) * 2019-12-04 2020-08-18 天津职业技术师范大学(中国职业培训指导教师进修中心) Multi-precision intelligent numerical control system with macro and micro combination
CN111043819A (en) * 2019-12-31 2020-04-21 佛山格尼斯磁悬浮技术有限公司 Cooling control system for magnetic suspension internal thread copper pipe machining
CN112746984A (en) * 2021-02-23 2021-05-04 亿昇(天津)科技有限公司 Magnetic suspension air blower control method and control system
JP2022162634A (en) * 2021-04-13 2022-10-25 株式会社ディスコ Processing device
CN114290119A (en) * 2021-11-16 2022-04-08 天津祝融精密机械有限公司 Device and method for high-precision five-axis linkage machining center and storage medium
CN114054786B (en) * 2021-11-29 2022-12-30 广州市昊志机电股份有限公司 Electric spindle and machine tool

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