CN116026516A - Three-component measuring sensor with temperature and air pressure measuring function - Google Patents
Three-component measuring sensor with temperature and air pressure measuring function Download PDFInfo
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- CN116026516A CN116026516A CN202211730373.5A CN202211730373A CN116026516A CN 116026516 A CN116026516 A CN 116026516A CN 202211730373 A CN202211730373 A CN 202211730373A CN 116026516 A CN116026516 A CN 116026516A
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- 230000008054 signal transmission Effects 0.000 claims abstract description 16
- 238000009530 blood pressure measurement Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 abstract description 7
- 238000006243 chemical reaction Methods 0.000 abstract description 4
- 238000013461 design Methods 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 230000008569 process Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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Abstract
The invention provides a three-component measuring sensor with a temperature and air pressure measuring function, which relates to the technical field of sensors, and comprises: a housing; the outer side walls of the two sensitive elements are attached to the two ends of the inner side wall of the shell, one end of each of the two sensitive elements, which is opposite, is provided with an end plane, and the end planes are provided with a plurality of strain resistors and a plurality of temperature measuring resistors; the force measuring shaft is partially arranged in the two sensitive elements; and the two signal transmission modules are arranged on the shell. When external force acts on the force measuring shaft at any angle, signals are output in the directions X, Y and Z of the sensor, the force values of the three components can be obtained through calibration and conversion, and the force values and directions applied to the force measuring shaft can be obtained through vector summation operation, so that the integrated design is realized. When the sensor is used for measurement control systems of aerospace, robots and the like, the sensor is beneficial to reducing the volume and the weight.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a three-component measuring sensor with a temperature and air pressure measuring function.
Background
The air pressure, temperature and force measuring sensor is a key component for realizing automatic testing and control functions in military and industrial fields such as aerospace, robots and the like, but the air pressure, temperature and force measuring sensors at present cannot be integrated together for use, three independent sensors of air pressure, temperature and force measuring are required to be arranged for use, the occupied space is increased through the three independent sensors, the weight is heavier, and higher power consumption can be caused.
Disclosure of Invention
The invention aims to provide a three-component measuring sensor with a temperature and air pressure measuring function aiming at the defects of the prior art, so as to solve the problems that the prior air pressure, temperature and air pressure measuring sensors in the prior art cannot be integrated together, three independent sensors for air pressure, temperature and air pressure measuring are required to be arranged for use, the occupied space is increased through the three independent sensors, the weight is heavier, and higher power consumption is caused.
In order to achieve the above object, the present invention provides a three-component measuring sensor with a temperature and air pressure measuring function, the sensor comprising:
a housing;
the outer side walls of the two sensitive elements are attached to the two ends of the inner side wall of the shell, one end of each of the two opposite sensitive elements is provided with an end plane, and a plurality of strain resistors and a plurality of temperature measuring resistors are arranged on the end planes;
the force measuring shaft is partially arranged in the two sensitive elements;
the signal transmission modules are arranged on the shell, one signal transmission module is electrically connected with the strain resistors and the temperature measuring resistors on one end plane, the other signal transmission module is electrically connected with the strain resistors and the temperature measuring resistors on the other end plane, and the two signal transmission modules are electrically connected.
Preferably, the sensing element is in a cylindrical shape, one ends of the two sensing elements, which are far away from each other, are provided with openings, the end plane is in a circular shape, a cylinder is formed by extending the middle position of the end plane towards the inside of the sensing element, a through hole is formed in the inside of the cylinder, and the two through holes are inserted with a measuring shaft.
Preferably, the force measuring shaft is cylindrical, at least one end of the force measuring shaft is provided with a force measuring head, and the force measuring head is spherical.
Preferably, the signal transmission module includes an adapter plate and a connector, the adapter plate is disposed in the housing, the adapter plate is electrically connected with the strain resistors and the temperature measuring resistors in a manner of adapting to the strain resistors, the connector is disposed on a side wall of the housing, the connector is electrically connected with the adapter plate, and the two adapter plates are electrically connected.
Preferably, the sensor further comprises two supporting seats, the supporting seats are in a cylindrical shape, grooves are formed in the positions of two ends of the inner side wall of each supporting seat, the inner side wall of one groove of each supporting seat is fixed to the outer side wall of each sensitive element, and the grooves of the other supporting seat are used for connecting the two adapter plates.
Preferably, the number of the strain resistors is sixteen, the sixteen strain resistors are divided into four groups, each group of four strain resistors is arranged on the end plane along the radial direction of the end plane, and the four groups of strain resistors form a cross shape.
Preferably, the number of the temperature measuring resistors is two, the two temperature measuring resistors are arranged on the end plane along the diameter direction of the end plane, and the two temperature measuring resistors are close to the edge position of the end plane.
Preferably, the strain resistor and the temperature measuring resistor are both film resistors.
Preferably, two strain resistors are arranged on the end plane and located between two adjacent groups of strain resistors along the radial direction.
Preferably, the connector is cylindrical, and a plurality of independent conductive columns are arranged in the connector and extend to two ends of the connector along the axial direction of the connector.
The invention provides a three-component measuring sensor with a temperature and air pressure measuring function, which has the beneficial effects that: the end part plane of the sensing element of the sensor is provided with a plurality of strain resistors and a plurality of temperature measuring resistors, the part of the force measuring shaft is arranged in the two sensing elements, the sensing element can sense atmospheric pressure, the end part plane can be driven to deform under the action of the atmospheric pressure, and further, besides the temperature and the atmospheric pressure of the environment where the sensor is positioned can be given out through the pressure and temperature measuring function, when external force acts on the force measuring shaft at any angle, the sensor is provided with signal output in the three directions X, Y and Z respectively, the force value of the three components can be obtained through calibration and conversion, and the force value and the direction applied to the force measuring shaft can be obtained through vector summation operation, so that the integrated design is realized.
Additional features and advantages of the invention will be set forth in the detailed description which follows.
Drawings
The foregoing and other objects, features and advantages of the invention will be apparent from the following more particular descriptions of exemplary embodiments of the invention as illustrated in the accompanying drawings wherein like reference numbers generally represent like parts throughout the exemplary embodiments of the invention.
FIG. 1 illustrates a schematic front view and cross-sectional structural diagram of a three-component measuring sensor with temperature and air pressure measurement according to one embodiment of the present invention;
FIG. 2 illustrates a schematic end plan view of a three-component measuring sensor with temperature and air pressure measurement according to one embodiment of the present invention;
fig. 3 shows a schematic end plan view of a three-component measuring sensor with temperature and air pressure measuring function according to an embodiment of the present invention.
Reference numerals illustrate:
1. a housing; 2. a sensor; 3. an end plane; 4. a strain resistance; 5. a temperature measuring resistor; 6. a force measuring shaft; 7. a column; 8. a through hole; 9. a force measuring head; 10. an adapter plate; 11. a connector; 12. and a supporting seat.
Detailed Description
Preferred embodiments of the present invention will be described in more detail below. While the preferred embodiments of the present invention are described below, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
As shown in fig. 1-2, the present invention provides a three-component measuring sensor with a temperature and air pressure measuring function, the sensor comprising:
a housing 1;
the outer side walls of the two sensitive elements 2 are attached to the two ends of the inner side wall of the shell 1, one end of the two sensitive elements 2 opposite to each other is provided with an end plane 3, and the end planes 3 are provided with a plurality of strain resistors 4 and a plurality of temperature measuring resistors 5;
the force measuring shaft 6, and part of the force measuring shaft 6 is arranged in the two sensitive elements 2;
the two signal transmission modules are arranged on the shell 1, one signal transmission module is electrically connected with the plurality of strain resistors 4 and the plurality of temperature measuring resistors 5 on one end plane 3, the other signal transmission module is electrically connected with the plurality of strain resistors 4 and the plurality of temperature measuring resistors 5 on the other end plane 3, and the two signal transmission modules are electrically connected.
Specifically, in order to solve the problem that the existing air pressure, temperature and force measuring sensors cannot be integrated together for use, three independent sensors of air pressure, temperature and force measurement are required to be arranged for use, the occupied space is increased by the three independent sensors, the weight is heavier, and the higher power consumption problem is caused, the invention provides the three-component force measuring sensor with the temperature and air pressure measuring function, the end plane of the sensing element 2 of the sensor is provided with a plurality of strain resistors 4 and a plurality of temperature measuring resistors 5, part of the force measuring shaft 6 is arranged in the two sensing elements 2, the sensing elements 2 can sense atmospheric pressure, the end plane 3 can be driven to deform under the action of the atmospheric pressure, and further, besides the temperature and the atmospheric pressure of the environment where the sensor is located can be given through the pressure and temperature measurement function, when external force acts on the measuring shaft 6 at any angle, signals are output in the three directions of X, Y and Z of the sensor, the force value of the three components can be obtained through calibration conversion, and the force value and the direction applied to the measuring shaft 6 can be obtained through vector summation operation, so that the integrated design is realized.
Preferably, one end of the housing 1 extends inwardly with an annular flange.
Specifically, when the outer side wall of the sensing element 2 is attached to the inner side wall of the housing 1, the sensing element 2 is used for mounting and positioning the sensing element 2, and the outer side wall of the sensing element 2 is hermetically connected to the inner side wall of the housing 1 in a welding manner.
Preferably, the sensing elements 2 are in a cylindrical shape, one ends of the two sensing elements 2, which are far away from each other, are provided with openings, the end plane 3 is in a circular shape, the middle position of the end plane 3 extends towards the inside of the sensing elements to form a column body 7, a through hole 8 is arranged in the column body 7, and the two through holes 8 are inserted with a force measuring shaft 6;
the force measuring shaft 6 is cylindrical, at least one end of the force measuring shaft 6 is provided with a force measuring head 9, and the force measuring head 9 is spherical.
Specifically, the connection position between the outer side wall of the column 7 and the end plane 3 is in a truncated cone shape, the force measuring shaft 6 is in sealing connection with the two through holes 8 in a welding mode, when an external force acts on the force measuring head 9 at any angle, signals are output in the X, Y direction and the Z direction of the sensor, the force value of the three components can be obtained through calibration conversion, and the force value and the direction applied to the force measuring shaft 6 can be obtained through vector summation operation.
Preferably, the signal transmission module includes an adapter plate 10 and a connector 11, the adapter plate 10 is disposed in the housing 1, the adapter plate 10 is electrically connected with the plurality of strain resistors 4 and the plurality of temperature measuring resistors 5, the connector 11 is disposed on a side wall of the housing 1, the connector 11 is electrically connected with the adapter plate 10, and the two adapter plates 10 are electrically connected.
Specifically, the adapter plate 10 and the connector 11 are used for transmitting signals generated by the strain resistor 4 and the temperature measuring resistor 5.
Preferably, the sensor further comprises two supporting seats 12, the supporting seats 12 are in a cylindrical shape, grooves are formed in two ends of the inner side wall of each supporting seat 12, the inner side wall of one groove of the two supporting seats 12 is respectively fixed on the outer side wall of the two sensitive elements 2, and the other groove of the two supporting seats 12 is respectively used for connecting the two adapter plates 10.
Specifically, the outer side wall of the sensing element 2 is provided with an annular slot near the end plane 3, and the inner side wall of one of the grooves of the supporting seat 12 can be mutually butted with the annular slot for installing and positioning the supporting seat 12.
Preferably, the number of the strain resistors 4 is sixteen, the sixteen strain resistors 4 are divided into four groups, each group of four strain resistors 4 is arranged on the end plane 3 along the radius direction of the end plane 3, and the four groups of strain resistors 4 form a cross shape;
the number of the temperature measuring resistors 5 is two, the two temperature measuring resistors 5 are arranged on the end plane 3 along the diameter direction of the end plane 3, and the two temperature measuring resistors 5 are close to the edge position of the end plane 3.
Specifically, one strain resistor 4 of each group of four strain resistors 4 is arranged near the inner side wall of the sensitive element 2 and is called an outer resistor, one strain resistor 4 is arranged near the outer side wall of the column 7 and is called an inner resistor, the last two strain resistors 4 are arranged at the middle position of the connecting line of the two strain resistors 4 along the radial direction and are called middle resistors, the two temperature measuring resistors 5 are arranged at any central position of a projection circular ring of the wall thickness of the sensitive element 2 on a plane, and the two temperature measuring resistors 5 are distributed at two ends of the diameter direction.
Preferably, the strain resistor 4 and the temperature measuring resistor 5 are both film resistors.
As shown in fig. 3, preferably, two strain resistors 4 are provided on the end plane 3 and located between two adjacent groups of strain resistors 4 in the radial direction.
Specifically, the number of the strain resistors 4 is increased on the sensing element 2, and the pressure measurement redundancy can be increased when the number of the strain resistors 4 is not in the same diameter direction as sixteen strain resistors 4, meanwhile, when the measurement range of the sensor is increased, the thickness of the end plane 3 corresponding to the diameter positions of the sixteen strain resistors 4 is increased, the thickness can be adjusted according to the force measurement range requirement, the thickness of the end plane 3 corresponding to the two strain resistors 4 arranged between two adjacent groups of strain resistors 4 along the radial direction is not increased, so that the pressure measurement is performed, and when the force measurement range adjustment is realized, the pressure measurement function is kept unchanged.
Preferably, the connector 11 is in a cylindrical shape, and a plurality of independent conductive columns are arranged inside the connector 11 and extend to two ends of the connector 11 along the axial direction of the connector 11;
specifically, the connector 11 is a vacuum sealing connector, an annular flange is arranged in the middle of the connector 11, two symmetrical mounting holes are formed in the side wall of the housing 1 and between the two sensitive elements 2, annular stepped grooves are formed in the inner sides of the mounting holes, and when the two connectors 11 are respectively inserted into the two mounting holes, the annular flange can be connected in the annular stepped grooves in a sealing mode through welding.
In summary, when the three-component measuring force sensor with the temperature and air pressure measuring function is implemented, sixteen strain resistors 4 are arranged on the end plane of the sensitive element 2 of the sensor, the sixteen strain resistors 4 are divided into four groups, each group of four strain resistors 4 is arranged on the end plane 3 along the radial direction of the end plane 3, the four groups of strain resistors 4 form a cross shape, two temperature measuring resistors 5 are arranged on the end plane 3 along the radial direction of the end plane 3, a part of the force measuring shaft 6 is arranged in the two sensitive elements 2, the sensitive elements 2 can sense atmospheric pressure, the temperature and the atmospheric pressure of the environment where the sensor is located can be given by the pressure and the temperature measuring function, and furthermore, when external force acts on the force measuring shaft 6 at any angle, signals are output in the three directions of X, Y and Z of the sensor, the magnitude of force value and the direction of the force measuring shaft 6 can be obtained through vector summation operation, the magnitude and the direction of the force value applied to the end plane 6 can be obtained, thereby the integrated sensor can be used for realizing the high-level and high-reliability and high-performance aircraft-quality sensing system, and the high-reliability aircraft, and the invention has the advantages of being suitable for various aircraft and space aircraft, and aviation and space aircraft, and the system can be applied to the high-quality and the high-quality measuring and control system;
the sensor 2 can be manufactured by adopting a sputtering film process, when the inner diameter of the sensor 2 is 18mm, the thickness of an end plane 3 is 0.2mm, the maximum diameter of a cylinder 7 is 6mm, the inner diameter of a through hole 8 and the diameter of a force measuring shaft are 3mm, the measurement of force values of 10N and below can be realized at the minimum, the measurement of force values of 200N and below can be realized at the maximum, the air pressure and one-way force repeatability of the sensor can be within +/-0.2% FS, the coupling force repeatability can be within +/-1% FS, the working temperature range is-75 ℃ to +200 ℃, the temperature influence is within +/-3% FS under the condition of no compensation, and the thickness structure of the end plane 3 of the sensor 2 can be optimized.
The foregoing description of embodiments of the invention has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described.
Claims (10)
1. A three-component measuring sensor with temperature and air pressure measuring function, characterized in that the sensor comprises:
a housing;
the outer side walls of the two sensitive elements are attached to the two ends of the inner side wall of the shell, one end of each of the two opposite sensitive elements is provided with an end plane, and a plurality of strain resistors and a plurality of temperature measuring resistors are arranged on the end planes;
the force measuring shaft is partially arranged in the two sensitive elements;
the signal transmission modules are arranged on the shell, one signal transmission module is electrically connected with the strain resistors and the temperature measuring resistors on one end plane, the other signal transmission module is electrically connected with the strain resistors and the temperature measuring resistors on the other end plane, and the two signal transmission modules are electrically connected.
2. The sensor with temperature and air pressure measurement function according to claim 1, wherein the sensing elements are cylindrical, openings are formed at one ends of the two sensing elements, which are far away from each other, the end planes are circular, a cylinder is formed by extending the middle position of the end planes to the inside of the sensing elements, through holes are formed in the cylinder, and the two through holes are inserted with a measuring shaft.
3. The three-component force sensor with the temperature and air pressure measurement function according to claim 1, wherein the force measuring shaft is cylindrical, at least one end of the force measuring shaft is provided with a force measuring head, and the force measuring head is spherical.
4. The sensor with temperature and air pressure measurement function according to claim 1, wherein the signal transmission module comprises an adapter plate and a connector, the adapter plate is arranged in the housing, the adapter plate is electrically connected with the strain resistors and the temperature measuring resistors in a matched mode, the connector is arranged on the side wall of the housing, the connector is electrically connected with the adapter plate, and the two adapter plates are electrically connected.
5. The sensor with temperature and air pressure measurement function according to claim 4, further comprising two supporting seats, wherein the supporting seats are in a cylindrical shape, grooves are formed in two ends of inner side walls of the supporting seats, inner side walls of one groove of the two supporting seats are respectively fixed on outer side walls of the two sensitive elements, and grooves of the other supporting seat are respectively used for connecting the two adapter plates.
6. The sensor according to claim 2, wherein the number of the strain resistors is sixteen, sixteen strain resistors are divided into four groups, each group of four strain resistors is disposed on the end plane along the radial direction of the end plane, and the four groups of strain resistors form a cross shape.
7. The sensor according to claim 6, wherein the number of the temperature measuring resistors is two, the two temperature measuring resistors are arranged on the end plane along the diameter direction of the end plane, and the two temperature measuring resistors are close to the edge position of the end plane.
8. The three-component measuring sensor with the temperature and air pressure measuring function according to claim 1, wherein the strain resistor and the temperature measuring resistor are both film resistors.
9. The sensor according to claim 7, wherein two strain resistors are provided in a radial direction on the end plane and between two adjacent strain resistors.
10. The sensor of claim 4, wherein the connector is cylindrical, and a plurality of independent conductive posts are disposed in the connector, and extend axially along the connector to the ends of the connector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211730373.5A CN116026516A (en) | 2022-12-30 | 2022-12-30 | Three-component measuring sensor with temperature and air pressure measuring function |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211730373.5A CN116026516A (en) | 2022-12-30 | 2022-12-30 | Three-component measuring sensor with temperature and air pressure measuring function |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09280911A (en) * | 1996-04-16 | 1997-10-31 | Toyota Motor Corp | Simultaneously measuring method for pressure, distortion and temperature |
| CN106525264A (en) * | 2016-12-20 | 2017-03-22 | 中国航天空气动力技术研究院 | Sputtering thin film temperature-pressure composite sensor and manufacturing method thereof |
| EP3236222A1 (en) * | 2016-04-22 | 2017-10-25 | Kistler Holding AG | Pressure and temperature sensor |
| JP2019052948A (en) * | 2017-09-15 | 2019-04-04 | 株式会社Ｓｏｋｅｎ | Pressure temperature sensor |
| CN114076640A (en) * | 2020-08-17 | 2022-02-22 | 罗斯蒙特公司 | Thermowell with pressure sensing capability |
| CN216791459U (en) * | 2021-12-29 | 2022-06-21 | 广州极飞科技股份有限公司 | Pressure sensor |
-
2022
- 2022-12-30 CN CN202211730373.5A patent/CN116026516A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09280911A (en) * | 1996-04-16 | 1997-10-31 | Toyota Motor Corp | Simultaneously measuring method for pressure, distortion and temperature |
| EP3236222A1 (en) * | 2016-04-22 | 2017-10-25 | Kistler Holding AG | Pressure and temperature sensor |
| CN106525264A (en) * | 2016-12-20 | 2017-03-22 | 中国航天空气动力技术研究院 | Sputtering thin film temperature-pressure composite sensor and manufacturing method thereof |
| JP2019052948A (en) * | 2017-09-15 | 2019-04-04 | 株式会社Ｓｏｋｅｎ | Pressure temperature sensor |
| CN114076640A (en) * | 2020-08-17 | 2022-02-22 | 罗斯蒙特公司 | Thermowell with pressure sensing capability |
| CN216791459U (en) * | 2021-12-29 | 2022-06-21 | 广州极飞科技股份有限公司 | Pressure sensor |
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