CN116008189A - Ultra-wide band spectrum ellipsometry structure based on Fourier spectrum and grating spectrum - Google Patents
Ultra-wide band spectrum ellipsometry structure based on Fourier spectrum and grating spectrum Download PDFInfo
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Abstract
The invention belongs to the technical field of spectrum ellipsometry structures, and particularly relates to an ultra-wide band spectrum ellipsometry structure based on Fourier spectrum and grating spectrum, which comprises a near-infrared to medium-wave infrared band polarization module, a deep ultraviolet to near-infrared band polarization module, a sample table, a polarization detection module and a track, wherein the near-infrared to medium-wave infrared band polarization module, the deep ultraviolet to near-infrared band polarization module, the sample table and the polarization detection module are all arranged on the track, the track is an annular track, the sample table is arranged in the light path direction of the near-infrared to medium-wave infrared band polarization module and the deep ultraviolet to near-infrared band polarization module, and the polarization detection module is arranged in the light path direction of the sample table. According to the invention, different polarization analysis modules are arranged for different wave bands, so that one spectral band can be measured once, and the modulation efficiency is increased. The invention adds a track design for the polarization-maintaining module, so that the structure can automatically measure transmission or reflection modes aiming at different wave band incident angles.
Description
Technical Field
The invention belongs to the technical field of spectrum ellipsometry, and particularly relates to an ultra-wide band spectrum ellipsometry based on Fourier spectrum and grating spectrum.
Background
Ellipsometry architecture aims at realizing accurate and rapid measurement of film thickness and optical parameters of multi-layer films on semiconductors, dielectrics, polymers, metals and transparent substrates. The thickness and optical constants of the single-layer film can be measured, the thicknesses and optical constants of all layers of the multi-layer film, the surface and interface roughness and the microstructure of the material can be measured, and the method has the advantages of high measurement precision, nondestructive measurement, non-harsh measurement, real-time monitoring and the like, thereby playing an important role in improving the photoelectric detection precision of weapon equipment, the concealment of equipment, corrosion resistance and the like.
With the expansion of applications and demands, ellipsometry and corresponding instrumentation are rapidly becoming a research hotspot for global technological workers.
FE-5000S proposed by Otsuka electronics in Japan has the advantages of short measurement time, high film thickness precision and the like, but has a short measurable spectrum range of 300-800nm, PHE-102 proposed by America Angstrom Advanced is improved in the measurement spectrum range, and can measure 250-1700 nm, but the spectrum range is widened, and the measurement rate is slowed down. The ES01 proposed by Beijing Metro Tuo technology company is improved in terms of original measurement time, but the test speed and the spectrum range are still not ideal.
Disclosure of Invention
Aiming at the problems that the existing ellipsometer cannot cover such wide spectrum range from ultraviolet to mid-infrared, an achromatic compensator cannot realize effective achromatism in such wide spectrum range, a moving part is arranged in mechanical rotation of a double-rotation compensator, the modulation frequency is low and the like, the invention provides an ultra-wide band spectrum ellipsometry structure based on Fourier spectrum and grating spectrum, an ultra-wide spectrum range is realized by adopting a double-light-path measurement mode, a multi-channel parallel polarization spectrum measurement technology based on a rotation compensator and an array spectrum detector is adopted in a 193nm-2100nm wave band, and a time-frequency interchange polarization spectrum measurement technology based on a multi-azimuth compensator and a Fourier infrared spectrum mode is adopted in a 2100nm-3200 nm.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides an ultra wide band spectrum ellipsometry structure based on Fourier spectrum and grating spectrum, includes near-infrared to mid-wave infrared band polarization module, deep ultraviolet to near-infrared band polarization module, sample platform, analysis polarization module, track, near-infrared to mid-wave infrared band polarization module, deep ultraviolet to near-infrared band polarization module, sample platform and analysis polarization module all set up on the track, the track is the annular orbit, all be provided with the sample platform in the light path direction of near-infrared to mid-wave infrared band polarization module, deep ultraviolet to near-infrared band polarization module, analysis polarization module sets up in the light path direction of sample platform.
The near-infrared to mid-wave infrared band polarization module comprises a near-infrared to mid-infrared band measurement light source, a Fourier infrared interference device, a first polarizer, a first motor and a first diaphragm, wherein the Fourier infrared interference device is arranged in the light path direction of the light source in the near-infrared to mid-infrared band measurement, the first polarizer is arranged in the light path direction of the Fourier infrared interference device, the first diaphragm is arranged in the light path direction of the first polarizer, the first polarizer is fixedly connected to an output shaft of the first motor, and the sample stage is arranged in the light path direction of the first diaphragm.
The deep ultraviolet to near infrared band polarization module comprises a light source system in deep ultraviolet to near infrared band measurement, a collimation system, a second polarizer, a second motor and a second diaphragm, wherein the collimation system is arranged in the light path direction of the light source system in the deep ultraviolet to near infrared band measurement, the second polarizer is arranged in the light path direction of the collimation system, the second diaphragm is arranged in the light path direction of the second polarizer, the second polarizer is fixedly connected to an output shaft of the second motor, and the sample table is arranged in the light path direction of the second diaphragm.
The deflection detection module comprises a near-infrared to middle-wave infrared band deflection detection system and a deep ultraviolet to near-infrared band deflection detection system, wherein the near-infrared to middle-wave infrared band deflection detection system and the deep ultraviolet to near-infrared band deflection detection system are arranged in parallel, and the near-infrared to middle-wave infrared band deflection detection system and the deep ultraviolet to near-infrared band deflection detection system are respectively arranged in the light path direction of the sample stage.
The infrared-to-middle wave band polarization analysis system comprises a near infrared-to-middle wave band detector, a near infrared-to-middle wave band polarization analyzer, a near infrared-to-middle wave band compensator, a third motor and a third diaphragm, wherein the near infrared-to-middle wave band detector is arranged in the light path direction of the near infrared-to-middle wave band polarization analyzer, the near infrared-to-middle wave band polarization analyzer is arranged in the light path direction of the near infrared-to-middle wave band compensator, the near infrared-to-middle wave band compensator is arranged in the light path direction of the third diaphragm, the near infrared-to-middle wave band compensator is fixedly connected to an output shaft of the third motor, and the third diaphragm is arranged in the light path direction of the sample stage.
The deep ultraviolet-near infrared band polarization analysis system comprises a grating spectrum measurement module, a deep ultraviolet-near infrared band polarization analyzer, a deep ultraviolet-near infrared band compensator, a fourth motor and a fourth diaphragm, wherein the grating spectrum measurement module is arranged in the light path direction of the deep ultraviolet-near infrared band polarization analyzer, the deep ultraviolet-near infrared band polarization analyzer is arranged in the light path direction of the deep ultraviolet-near infrared band compensator, the deep ultraviolet-near infrared band compensator is arranged in the light path direction of the fourth diaphragm, the deep ultraviolet-near infrared band compensator is fixedly connected to an output shaft of the fourth motor, and the fourth diaphragm is arranged in the light path direction of the sample table.
The grating spectrum measuring module comprises a reflecting mirror, a light path collimation system, a first spectrometer and a second spectrometer. The optical path direction of the reflector is provided with an optical path collimation system and a second spectrometer respectively, and the optical path direction of the optical path collimation system is provided with a first spectrometer.
The near-infrared to mid-infrared band analyzer adopts a mid-infrared wave plate, and the near-infrared to mid-infrared band compensator adopts a mid-infrared quarter-wave plate.
The deep ultraviolet to near infrared band analyzer adopts a Rochon prism, the deep ultraviolet to near infrared band compensator adopts a Fresnel prism as a phase retarder, the measurable range of the first spectrometer is 1000nm-2100nm, and the measurable range of the second spectrometer is 193nm-1000nm.
And the near-infrared to medium-wave infrared band polarization module, the deep ultraviolet to near-wave band polarization module, the sample stage and the polarization detection module are all electrically connected with the upper computer.
Compared with the prior art, the invention has the beneficial effects that:
different polarization analysis modules are arranged for different wave bands, and a time-frequency interchange polarization spectrum measurement technology based on a multi-azimuth compensator and a Fourier infrared spectrum splitting mode and a multi-channel parallel polarization spectrum measurement technology based on a rotary compensator and an array spectrum detector are adopted. The invention adds a track design for the polarization-maintaining module, so that the structure can automatically measure transmission or reflection modes aiming at different wave band incident angles.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It will be apparent to those skilled in the art from this disclosure that the drawings described below are merely exemplary and that other embodiments may be derived from the drawings provided without undue effort.
The structures, proportions, sizes, etc. shown in the present specification are shown only for the purposes of illustration and description, and are not intended to limit the scope of the invention, which is defined by the claims, so that any structural modifications, changes in proportions, or adjustments of sizes, which do not affect the efficacy or the achievement of the present invention, should fall within the scope of the invention.
FIG. 1 is a schematic diagram of the structure of the near-to mid-infrared band transmission measurement of the present invention;
FIG. 2 is a schematic diagram of the structure of the near-to mid-infrared band reflection measurement of the present invention;
FIG. 3 is a schematic diagram of the structure of the transmission measurement of 193nm-1000nm in the deep ultraviolet to near infrared band of the present invention;
FIG. 4 is a schematic diagram of the structure of the transmission measurement of the deep ultraviolet to near infrared band 1000nm-2100nm in the present invention;
FIG. 5 is a schematic diagram of the structure of the reflection measurement of 193nm-1000nm in the deep ultraviolet to near infrared band according to the present invention;
FIG. 6 is a schematic diagram of the structure of the reflection measurement of the deep ultraviolet to near infrared band 1000nm-2100 nm.
Wherein: 1 is a near-infrared to mid-wave infrared band polarization module, 1-1 is a near-infrared to mid-wave infrared band measurement mid-light source, 1-2 is a Fourier infrared interference tool, 1-3 is a first polarizer, 1-4 is a first motor, 1-5 is a first diaphragm, 2 is a deep ultraviolet to near-infrared band polarization module, 2-1 is a deep ultraviolet to near-infrared band measurement mid-light source system, 2-2 is a collimation system, 2-3 is a second polarizer, 2-4 is a second motor, 2-5 is a second diaphragm, 3 is a sample stage, 4 is a polarization module, 4-1 is a near-infrared to mid-wave infrared band polarization system, 4-1-1 is a near-infrared to mid-infrared band detector, 4-1-2 is a near-infrared to mid-infrared band analyzer, 4-1-3 is a near-infrared to mid-infrared band compensator, 4-1-4 is a third motor, 4-1-5 is a third diaphragm, 4-2 is a deep ultraviolet to near-infrared band analyzer, 4-2-1 is a grating spectrum measuring module, 4-2-1-1 is a reflecting mirror, 4-2-1-2 is the light path collimation system, 4-2-1-3 is the first spectrum appearance, 4-2-1-4 is the second spectrum appearance, 4-2-2 is the dark ultraviolet to near infrared band analyzer, 4-2-3 is the dark ultraviolet to near infrared band compensator, 4-2-4 is the fourth motor, 4-2-5 is the fourth diaphragm, 5 is the track, 6 is the host computer.
Detailed Description
For the purposes of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is apparent that the described embodiments are only some embodiments of the present application, but not all embodiments, and these descriptions are only for further illustrating the features and advantages of the present invention, not limiting the claims of the present invention; all other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.
The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. The following examples are illustrative of the invention and are not intended to limit the scope of the invention.
The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.
In this embodiment, as shown in fig. 1 to 6, the device is composed of a near-infrared to mid-wave infrared band polarization module 1, a deep ultraviolet to near-infrared band polarization module 2, a sample stage 3, a polarization detection module 4 and a track 5. In order to meet the requirements of ultra-wide band measurement and transmission and reflection measurement, the embodiment adopts a double-light-path parallel measurement mode.
In this embodiment, as shown in fig. 1-2, the near-infrared to mid-infrared band test light path diagram is shown, the sample of the sample stage 3 in fig. 1 is a transmission measurement, and the sample of the sample stage 3 in fig. 2 is a reflection test. The light source 1-1 in the near-infrared to mid-infrared band measurement sequentially passes through the Fourier infrared interferometer 1-2, the first polarizer 1-3, the first motor 1-4, the first diaphragm 1-5, the sample stage 3, the third diaphragm 4-1-5, the near-infrared to mid-infrared band compensator 4-1-3, the near-infrared to mid-infrared band analyzer 4-1-2 and the near-infrared to mid-infrared band detector 4-1-1, and finally is uploaded to the upper computer 6 for data analysis. The traditional ellipsometry film thickness measuring instrument has smaller spectral range, film thickness measuring range and precision, the single light source can not realize the requirement of such wide spectral range, and simultaneously, the system detection sensitivity and the larger spectral resolution are ensured in order to meet the requirements of both transmission and reflection modes. In the deep ultraviolet to near infrared band, as a single continuous multi-color light source cannot meet the full coverage requirement of the spectrum in the project, the light source 1-1 in the near infrared to middle infrared band measurement adopts two multi-color light sources to perform measurement by combining colors. The back-transmitting deuterium lamp and the tungsten lamp are rotated, and the quartz lens is used for realizing the superposition of the light paths of the tungsten lamp illumination and the deuterium lamp illumination so as to meet the requirements of the spectrum range. The Fourier infrared interferometer 1-2 is used for measuring in the near infrared to mid infrared band light source 1-1.
In this embodiment, fig. 3-6 are deep ultraviolet to near infrared band test light path diagrams. FIG. 3 is a measurement of transmission of a sample in the deep ultraviolet to near infrared band 193nm-1000nm, and FIG. 5 is a measurement of reflection of a sample in the deep ultraviolet to near infrared band 193nm-1000nm. The light source system 2-1 in the measurement of the deep ultraviolet to near infrared wave band sequentially passes through the collimation system 2-2, the second polarizer 2-3, the second diaphragm 2-5, the sample stage 3, the third diaphragm 4-1-5, the near infrared to middle infrared wave band compensator 4-1-3, the near infrared to middle infrared wave band analyzer 4-1-2, the reflector 4-2-1-1 and the second spectrometer 4-2-1-4, wherein the measurable range of the second spectrometer 4-2-1-4 needs to contain 193nm to 1000nm, and finally the measured range is uploaded to the upper computer 6 for data analysis.
In this example, FIG. 4 is a transmission measurement of a sample in the deep ultraviolet to near infrared band from 1000nm to 2100nm, and FIG. 6 is a reflection measurement of a sample in the deep ultraviolet to near infrared band from 1000nm to 2100 nm. The light source system 2-1 in the measurement of the deep ultraviolet to near infrared wave band sequentially passes through the collimation system 2-2, the second polarizer 2-3, the second diaphragm 2-5, the sample stage 3, the third diaphragm 4-1-5, the near infrared to middle infrared wave band compensator 4-1-3, the near infrared to middle infrared wave band analyzer 4-1-2, the reflector 4-2-1-1, the light path collimation system 4-2-1-2 and the first spectrometer 4-2-1-3, wherein the measurable range of the spectrometer 4-2-1-3 needs to be 1000nm to 2100nm, and finally the measured range is uploaded to the upper computer 6 for data analysis.
Further, it is preferable that the near-infrared to mid-infrared band analyzer 4-1-2 employs a mid-infrared wave plate, the near-infrared to mid-infrared band compensator 4-1-3 employs a mid-infrared quarter wave plate, the deep ultraviolet to near-infrared band analyzer 4-2-2 employs a Rochon prism, and the deep ultraviolet to near-infrared band compensator 4-2-3 employs a Fresnel prism as a phase retarder.
Further, the functions related to the upper computer 6 in this embodiment mainly include controlling the output of the ultraviolet near infrared visible spectrometer and the infrared detector, the automatic rotation of the compensator and the automatic switching of the reflecting mirror, controlling the motors of the two polarizers, supplying power to the light intensity of the light source, controlling the scanning time and the optical path difference of the fourier interferometer, controlling the angle of the polarization-detecting arm, controlling the angle of the objective table, etc. The control motors can independently realize initialization, relative pulse displacement and engineering quantity unit displacement, and parameters such as speed, acceleration, deceleration, offset, limiting polarity and the like can be set through the control system. The data processing mainly comprises measurement of each element of a sample Mueller matrix in film thickness measurement, and the measurement is obtained by obtaining signal amplitude calculation and analysis of different frequencies, so that information such as film thickness and the like is measured.
In the data processing part, the broader ellipsometer of the embodiment increases the near infrared to mid infrared band. If the processing of the wide spectrum data is completed by one measurement, the measurement time is greatly increased. Thus, using a segmented measurement of the spectral data, the DUI portion will be measured first, followed by the MIR portion. The obtained measurement data is temporarily stored in a memory before a round of measurement is completed. After the data of the deep ultraviolet to near infrared band and the near infrared band to middle infrared band are completely measured, integrating the two groups of result data, and carrying out related data processing, fitting and other operations.
The preferred embodiments of the present invention have been described in detail, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the spirit of the present invention, and the various changes are included in the scope of the present invention.
Claims (10)
1. An ultra-wide band spectrum ellipsometry structure based on Fourier spectrum and grating spectrum, which is characterized in that: including near-infrared to mid-wave infrared band polarization module (1), deep ultraviolet to near-infrared band polarization module (2), sample platform (3), polarization-detecting module (4), track (5), near-infrared to mid-wave infrared band polarization module (1), deep ultraviolet to near-infrared band polarization module (2), sample platform (3) and polarization-detecting module (4) all set up on track (5), track (5) are the annular track, all be provided with sample platform (3) in the light path direction of near-infrared to mid-wave infrared band polarization module (1), deep ultraviolet to near-infrared band polarization module (2), polarization-detecting module (4) set up in the light path direction of sample platform (3).
2. The ultra-wideband spectroscopic ellipsometry structure based on fourier spectrum and grating spectrum of claim 1, wherein: the near-infrared to medium-wave infrared band polarization module (1) comprises a near-infrared to medium-wave band measurement medium-light source (1-1), a Fourier infrared interference device (1-2), a first polarizer (1-3), a first motor (1-4) and a first diaphragm (1-5), wherein the Fourier infrared interference device (1-2) is arranged in the light path direction of the near-infrared to medium-wave band measurement medium-light source (1-1), the first polarizer (1-3) is arranged in the light path direction of the Fourier infrared interference device (1-2), the first diaphragm (1-5) is arranged in the light path direction of the first polarizer (1-3), the first polarizer (1-3) is fixedly connected to the output shaft of the first motor (1-4), and the sample stage (3) is arranged in the light path direction of the first diaphragm (1-5).
3. The ultra-wideband spectroscopic ellipsometry structure based on fourier spectrum and grating spectrum of claim 1, wherein: the deep ultraviolet to near infrared band polarization module (2) comprises a light source system (2-1), a collimation system (2-2), a second polarizer (2-3), a second motor (2-4) and a second diaphragm (2-5) in the measurement of the deep ultraviolet to near infrared band, the collimation system (2-2) is arranged in the light path direction of the light source system (2-1) in the measurement of the deep ultraviolet to near infrared band, the second polarizer (2-3) is arranged in the light path direction of the collimation system (2-2), the second diaphragm (2-5) is arranged in the light path direction of the second polarizer (2-3), the second polarizer (2-3) is fixedly connected to an output shaft of the second motor (2-4), and the sample table (3) is arranged in the light path direction of the second diaphragm (2-5).
4. The ultra-wideband spectroscopic ellipsometry structure based on fourier spectrum and grating spectrum of claim 1, wherein: the polarization-maintaining module (4) comprises a near-infrared to medium-wave infrared band polarization-maintaining system (4-1) and a deep ultraviolet to near-infrared band polarization-maintaining system (4-2), wherein the near-infrared to medium-wave infrared band polarization-maintaining system (4-1) and the deep ultraviolet to near-infrared band polarization-maintaining system (4-2) are arranged in parallel, and the near-infrared to medium-wave infrared band polarization-maintaining system (4-1) and the deep ultraviolet to near-infrared band polarization-maintaining system (4-2) are respectively arranged in the light path direction of the sample stage (3).
5. The ultra-wideband spectroscopic ellipsometry structure based on fourier spectrum and grating spectrum of claim 4, wherein: the infrared to middle wave infrared band polarization analysis system (4-1) comprises a near infrared to middle wave band detector (4-1-1), a near infrared to middle wave band polarization analyzer (4-1-2), a near infrared to middle wave band compensator (4-1-3), a third motor (4-1-4) and a third diaphragm (4-1-5), wherein the near infrared to middle wave band detector (4-1-1) is arranged in the light path direction of the near infrared to middle wave band polarization analyzer (4-1-2), the near infrared to middle wave band polarization analyzer (4-1-2) is arranged in the light path direction of the near infrared to middle wave band compensator (4-1-3), the near infrared to middle wave band compensator (4-1-3) is arranged in the light path direction of the third diaphragm (4-1-5), the near infrared to middle wave band compensator (4-1-3) is fixedly connected to the output shaft of the third motor (4-1-2), and the third diaphragm (4-1-5) is arranged in the light path direction of the sample.
6. The ultra-wideband spectroscopic ellipsometry structure based on fourier spectrum and grating spectrum of claim 4, wherein: the deep ultraviolet to near infrared band polarization analyzer system (4-2) comprises a grating spectrum measuring module (4-2-1), a deep ultraviolet to near infrared band polarization analyzer (4-2-2), a deep ultraviolet to near infrared band compensator (4-2-3), a fourth motor (4-2-4) and a fourth diaphragm (4-2-5), wherein the grating spectrum measuring module (4-2-1) is arranged in the light path direction of the deep ultraviolet to near infrared band polarization analyzer (4-2-2), the deep ultraviolet to near infrared band polarization analyzer (4-2-2) is arranged in the light path direction of the deep ultraviolet to near infrared band compensator (4-2-3), the deep ultraviolet to near infrared band compensator (4-2-3) is arranged in the light path direction of the fourth diaphragm (4-2-5), the ultraviolet to near infrared band compensator (4-2-3) is fixedly connected to the output shaft of the fourth motor (4-2-4), and the fourth diaphragm (4-2-5) is arranged in the light path direction of the sample table (4-3).
7. The ultra-wideband spectroscopic ellipsometry structure based on fourier spectrum and grating spectrum of claim 6, wherein: the grating spectrum measuring module (4-2-1) comprises a reflecting mirror (4-2-1-1), a light path collimation system (4-2-1-2), a first spectrometer (4-2-1-3) and a second spectrometer (4-2-1-4). An optical path collimating system (4-2-1-2) and a second spectrometer (4-2-1-4) are respectively arranged in the optical path direction of the reflecting mirror (4-2-1-1), and a first spectrometer (4-2-1-3) is arranged in the optical path direction of the optical path collimating system (4-2-1-2).
8. The ultra-wideband spectroscopic ellipsometry structure based on fourier spectrum and grating spectrum of claim 5, wherein: the near-infrared to middle-infrared band analyzer (4-1-2) adopts a middle-infrared wave plate, and the near-infrared to middle-infrared band compensator (4-1-3) adopts a middle-infrared quarter wave plate.
9. The ultra-wideband spectroscopic ellipsometry structure based on fourier spectrum and grating spectrum of claim 7, wherein: the deep ultraviolet to near infrared band analyzer (4-2-2) adopts a Rochon prism, the deep ultraviolet to near infrared band compensator (4-2-3) adopts a Fresnel prism as a phase retarder, the measurable range of the first spectrometer (4-2-1-3) is 1000nm-2100nm, and the measurable range of the second spectrometer (4-2-1-4) is 193nm-1000nm.
10. The ultra-wideband spectroscopic ellipsometry structure based on fourier spectrum and grating spectrum of claim 1, wherein: the near-infrared to medium-wave infrared band polarization module (1), the deep ultraviolet to near-wave band polarization module (2), the sample stage (3) and the polarization detection module (4) are electrically connected with the upper computer (6).
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