CN116007237A - Semiconductor crystal refrigeration water-cooling heat exchange device and application method thereof - Google Patents
Semiconductor crystal refrigeration water-cooling heat exchange device and application method thereof Download PDFInfo
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- CN116007237A CN116007237A CN202210395431.7A CN202210395431A CN116007237A CN 116007237 A CN116007237 A CN 116007237A CN 202210395431 A CN202210395431 A CN 202210395431A CN 116007237 A CN116007237 A CN 116007237A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 41
- 239000013078 crystal Substances 0.000 title claims abstract description 36
- 238000005057 refrigeration Methods 0.000 title claims abstract description 34
- 238000001816 cooling Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims abstract description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 166
- 239000007788 liquid Substances 0.000 claims abstract description 120
- 238000005192 partition Methods 0.000 claims description 13
- 235000012431 wafers Nutrition 0.000 claims description 10
- 230000008569 process Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
The invention discloses a semiconductor crystal refrigeration water-cooling heat exchange device and a use method thereof, which are applied to the field of crystal refrigeration, and the technical scheme is as follows: the heat exchanger is provided with a cold end heat exchanger and a hot end heat exchanger; the semiconductor crystal is arranged between the cold end heat exchanger and the hot end heat exchanger, the outer end of the cold end heat exchanger is connected with a water pump, the outer end of the water pump is provided with a connecting filter, the outer end of the filter is provided with a connecting temperature sensor, and the temperature of liquid passing through the cold end heat exchanger is monitored in real time through the temperature sensor; the heat exchanger is provided with a water diversion end assembly, a water collection end assembly and a heat exchanger runner assembly welded between the water diversion end assembly and the water collection end assembly; the heat exchanger flow passage assembly is provided with a water diversion end return passage and a water collection end return passage, and liquid circulation in the heat exchanger flow passage assembly is realized through the water diversion end return passage and the water collection end return passage; the circulating circulation of liquid is realized through the water collecting end component and the water distributing end component.
Description
Technical Field
The invention relates to the field of semiconductor water-cooling heat exchangers, in particular to a semiconductor crystal refrigeration water-cooling heat exchange device and a use method thereof.
Background
At present, in places where precise temperature control is needed in the fields of semiconductor wafer manufacturing, laser processing, medical treatment and the like, the temperature fluctuation range is usually controlled within +/-0.1 ℃, and compared with the traditional phase change refrigeration, the semiconductor crystal refrigeration has the characteristic of quick response speed in outputting cold quantity, and can output corresponding cold quantity immediately after being powered on; the traditional phase-change refrigeration mode has hysteresis of output cold quantity caused by heat transfer delay phenomenon, so that the temperature control precision is seriously affected, and the cold quantity output capacity of the semiconductor crystal refrigeration piece can be subjected to stepless regulation by changing voltage, so that the refrigeration quantity output is matched with the heat load of an application place, and the temperature control precision requirement is met.
The heat exchanger flow channels adopted by the semiconductor crystal refrigeration water cooling machine applied in the wafer manufacturing process are usually arranged into single-channel serpentine circulation flow channels, the aperture of the flow channels is larger, the flow channel arrangement scheme adopted at present adopts single-channel circulation serpentine arrangement layout, and the flow channel resistance is large, so that a larger-range water pump is required to be selected to overcome resistance loss; the diameter of the heat exchanger is more than phi 8, so that the thickness of the inner layer flow of the liquid in the flow channel is larger, the heat resistance of the liquid is increased, and the heat exchange of the liquid in the pipe is influenced; the inner wall of the heat exchanger runner adopts a smooth straight hole design, and the heat exchange area of the inner side of the tube is smaller.
Disclosure of Invention
The first object of the invention is to provide a semiconductor crystal refrigeration water-cooling heat exchange device, which has the advantages that the flow path resistance loss along the flow path is reduced, and the flow velocity of liquid in a pipe is improved so as to enhance the heat exchange capability by adopting a multi-loop circulation layout for the flow path of a used heat exchanger.
The technical aim of the invention is realized by the following technical scheme: the semiconductor crystal refrigeration water-cooling heat exchange device comprises a heat exchanger, wherein the heat exchanger is provided with a cold end heat exchanger and a hot end heat exchanger; a semiconductor crystal is arranged between the cold end heat exchanger and the hot end heat exchanger, the outer end of the cold end heat exchanger is connected with a water pump, the outer end of the water pump is provided with a connecting filter, the outer end of the filter is provided with a connecting temperature sensor, and the temperature sensor is used for monitoring the temperature of liquid passing through the cold end heat exchanger in real time;
the heat exchanger is provided with a water diversion end assembly, a water collection end assembly and a heat exchanger runner assembly welded between the water diversion end assembly and the water collection end assembly;
the heat exchanger flow passage assembly is provided with a water diversion end loop flow passage and a water collection end loop flow passage, and liquid circulation in the heat exchanger flow passage assembly is realized through the water diversion end loop flow passage and the water collection end loop flow passage.
Through adopting above-mentioned technical scheme, through having set up water diversion end return circuit runner and water collection end return circuit runner and realized that liquid gets into and flow the passageway setting of heat exchanger is clear to the water diversion end subassembly of setting can improve the efficiency that liquid flows, and the water collection end subassembly of setting can carry out effectual collection and realization circulation with liquid, improves work efficiency.
The invention is further provided with: the water diversion end assembly comprises a water diversion end plate and a water diversion end partition plate transversely arranged in the middle of the water diversion end plate, a liquid inlet is formed in the top of the water diversion end plate, and a liquid outlet is formed in the bottom of the water diversion end plate.
Through adopting above-mentioned technical scheme, the water diversion end baffle that sets up can circulate through the water diversion end return circuit runner only after the liquid import with liquid, the effectual velocity of flow that has improved liquid.
The invention is further provided with: the water collecting end assembly comprises a water collecting end plate, and an opening is formed in the top of the water collecting end plate.
Through adopting above-mentioned technical scheme, the end plate that catchments that sets up can help liquid to collect.
The invention is further provided with: the water diversion end loop flow passage is positioned above the horizontal plane where the water diversion end partition plate is positioned.
Through adopting above-mentioned technical scheme, divide water end return circuit runner to be located the top of dividing the water end baffle and can be convenient for liquid circulate.
The invention is further provided with: the water collecting end loop flow passage is positioned below the horizontal plane where the water dividing end partition plate is positioned.
Through adopting above-mentioned technical scheme, the return circuit runner setting of catchment is in the below of dividing the water end baffle in order to be convenient for collect the liquid that flows through the return circuit runner of diversion end and circulate again.
The invention is further provided with: the diameter of the water diversion end loop flow passage is phi 3, and the diameter of the water collection end loop flow passage is phi 3.
Through adopting above-mentioned technical scheme, the return circuit runner that adopts the diameter to be phi 3 can improve the velocity of flow of liquid for the laminar flow layer of liquid reduces, improves heat exchange efficiency.
The invention is further provided with: the hot-end heat exchangers are two, semiconductor wafers are arranged at the hot-end heat exchangers, and the other ends of the semiconductor wafers are arranged adjacent to the cold-end heat exchangers.
Through the technical scheme, the cold-end heat exchanger and the hot-end heat exchanger are respectively arranged on the two sides of the semiconductor wafer, so that water-cooling conversion of the crystal can be effectively performed.
The second invention aims to provide a using method of the semiconductor crystal refrigeration water-cooling heat exchanger, which has the advantages that the used heat exchanger runner adopts a multi-loop circulation layout, so that the resistance loss along the runner is reduced, and the flow velocity of liquid in a pipe is improved so as to enhance the heat exchange capacity.
The technical aim of the invention is realized by the following technical scheme: the application method of the semiconductor crystal refrigeration water-cooling heat exchanger adopts the following method to realize the circulation of liquid;
s1: the liquid flows in through the liquid inlet of the water diversion end plate of the heat exchanger;
s2: liquid entering the heat exchanger is blocked by a baffle plate at the water diversion end, and flows into the water collection end plate;
s3: the liquid sent into the water collecting end plate flows through the water collecting end loop flow passage to the liquid outlet of the water distributing end plate;
s4: the liquid flowing out through the liquid outlet flows through the liquid inlet to the water diversion end plate after being recycled outside, and the liquid flows in a reciprocating cycle again.
Through above-mentioned technical scheme, through leading-in port with rivers through the heat exchanger, the liquid flow that flows through the liquid inlet is to dividing inside the water end return circuit runner, owing to the effect of dividing the water end baffle that sets up, flows through the liquid to the liquid export, realizes the circulation of liquid to and make things convenient for the electric crystal refrigeration.
The invention is further provided with: and after the liquid in the step S2 flows out through the heat exchanger, the liquid is pressurized by a water pump and is output to the client equipment to absorb heat.
Through the technical scheme, the liquid flowing out through the heat exchanger can complete one-time circulation of the liquid, and refrigeration is convenient.
The invention is further provided with: the circulating reciprocating liquid flow in the step S4 is realized by supplying power to a circulating water pump.
Through the technical scheme, the water pump is used for providing power for the circulation and use process of the liquid to realize the circulation and use of the liquid.
In summary, the invention has the following beneficial effects:
1. according to the invention, the water diversion end plate and the water collection end plate are welded and fixed on the two side edges of the water diversion end loop flow channel and the water collection end loop flow channel respectively, so that the pressure of the end part of the flow channel in the liquid flowing process of each flow channel is equal in the liquid flowing process, unbalance of the liquid flow of each loop is avoided, and the heat exchange efficiency is improved;
2. by arranging a plurality of water diversion end loop flow passages and a plurality of water collection end loop flow passages, the ruler-shaped flow passages improve the flow rate of liquid and reduce the resistance loss;
3. the design of phi 3 thread aperture is adopted for the water diversion end loop flow passage and the water collection end loop flow passage adopted in the heat exchanger, so that the inner side heat exchange area is greatly improved, the turbulence state of liquid flowing in the loop flow passage can be increased, the liquid laminar flow layer is reduced, and the heat exchange capacity is improved.
Drawings
FIG. 1 is a schematic flow chart of the present embodiment;
fig. 2 is a schematic perspective view of the heat exchanger of the present embodiment;
fig. 3 is a top view of the heat exchanger of the present embodiment;
FIG. 4 is a schematic view of section D-D of FIG. 3;
fig. 5 is a front view of the heat exchanger of the present embodiment;
FIG. 6 is a schematic view in section B-B of FIG. 4;
fig. 7 isbase:Sub>A schematic view of sectionbase:Sub>A-base:Sub>A of fig. 4.
Reference numerals: 1. a cold end heat exchanger; 2. a hot side heat exchanger; 3. a semiconductor crystal; 4. a water pump; 5. a filter; 6. a temperature sensor; 7. an exhaust valve; 8. a heat exchanger runner assembly; 9. a water collecting end plate; 10. a water dividing end plate; 11. a liquid inlet; 12. an opening; 13. a liquid outlet; 14. a water diversion end loop flow passage; 15. a water collecting end loop flow passage; 16. a separator at the water diversion end.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
Examples:
a semiconductor crystal refrigeration water-cooling heat exchange device and a use method thereof, referring to figures 1 to 7,
the first object of the invention is to provide a semiconductor crystal refrigeration water-cooling heat exchange device, which has the advantages that the flow path resistance loss along the flow path is reduced, and the flow velocity of liquid in a pipe is improved so as to enhance the heat exchange capability by adopting a multi-loop circulation layout for the flow path of a used heat exchanger.
The technical aim of the invention is realized by the following technical scheme: the semiconductor crystal refrigeration water-cooling heat exchange device comprises a heat exchanger, wherein the heat exchanger is provided with a cold end heat exchanger 1 and a hot end heat exchanger 2, and referring to fig. 1, 2, 3, 4 and 5; a semiconductor crystal 3 is arranged between the cold-end heat exchanger 1 and the hot-end heat exchanger 2, the outer end of the cold-end heat exchanger 1 is connected with a water pump 4, the outer end of the water pump 4 is provided with a connecting filter 5, the outer end of the filter 5 is provided with a connecting temperature sensor 6, and the temperature of liquid passing through the cold-end heat exchanger 1 is monitored in real time through the temperature sensor 6; the heat exchanger is provided with a water diversion end assembly, a water collection end assembly and a heat exchanger runner assembly 8 welded between the water diversion end assembly and the water collection end assembly; the heat exchanger flow passage assembly 8 is provided with a water diversion end loop flow passage 14 and a water collection end loop flow passage 15, and liquid circulation in the heat exchanger flow passage assembly 8 is realized through the water diversion end loop flow passage 14 and the water collection end loop flow passage 15; the channel setting that has realized liquid entering and flowing out the heat exchanger through having set up water diversion end return circuit runner 14 and water collection end return circuit runner 15 is clear to the water diversion end subassembly that sets up can improve the efficiency that liquid flows, and the water collection end subassembly that sets up can carry out effectual collection and realization circulation with liquid, improves work efficiency.
Referring to fig. 2, 3, 4, 5 and 6, the water diversion end assembly comprises a water diversion end plate 10 and a water diversion end partition plate 16 transversely arranged in the middle of the water diversion end plate 10, wherein a liquid inlet 11 is arranged at the top of the water diversion end plate 10, and a liquid outlet 13 is arranged at the bottom of the water diversion end plate 10; the water diversion end partition plate 16 can circulate the liquid through the liquid inlet 11 and then through the water diversion end loop flow passage 14, so that the flow rate of the liquid is effectively improved.
Referring to fig. 1, 2, 3 and 7, the water-collecting end assembly includes a water-collecting end plate 9 provided, and an opening 12 is provided at the top of the water-collecting end plate 9; the water collection end plate 9 is provided to assist in the collection of liquid.
Referring to fig. 4, the tap side loop flow passage 14 is located above the horizontal plane of the tap side partition 16; the water diversion side loop flow passage 14 is positioned above the water diversion side partition plate 16 so as to be convenient for circulating liquid.
Referring to fig. 1 and 3, the water-collecting-end loop flow passage 15 is positioned below the horizontal plane of the water-dividing-end partition 16; the water collecting end loop flow passage 15 is arranged below the water distributing end partition plate 16 so as to be convenient for collecting and circulating the liquid flowing through the water distributing end loop flow passage 14; the diameter of the water diversion end loop flow passage 14 is phi 3, and the diameter of the water collection end loop flow passage 15 is phi 3; the loop flow passage with the diameter phi 3 can improve the flow velocity of liquid, so that the laminar layer of the liquid is reduced, and the heat exchange efficiency is improved.
Referring to fig. 1, two hot-end heat exchangers 2 are arranged, semiconductor wafers are arranged at the positions of the single hot-end heat exchanger 2, and the other ends of the semiconductor wafers are arranged adjacent to the cold-end heat exchanger 1; the cold end heat exchanger 1 and the hot end heat exchanger 2 are respectively arranged on two sides of the semiconductor wafer, so that water cooling conversion of the crystal can be effectively performed.
The second invention aims to provide a using method of the semiconductor crystal refrigeration water-cooling heat exchanger, which has the advantages that the used heat exchanger runner adopts a multi-loop circulation layout, so that the resistance loss along the runner is reduced, and the flow velocity of liquid in a pipe is improved so as to enhance the heat exchange capacity.
Referring to fig. 1, 2 and 3, the technical purpose of the present invention is achieved by the following technical schemes: the application method of the semiconductor crystal refrigeration water-cooling heat exchanger adopts the following method to realize the circulation of liquid;
s1: the liquid flows in through the liquid inlet 11 of the water diversion end plate 10 of the heat exchanger;
s2: liquid entering the heat exchanger is blocked by the water diversion end baffle 16, and the liquid flows into the water collection end plate 9;
s3: the liquid fed into the water collecting end plate 9 flows through the liquid outlet 13 to the water distributing end plate 10 through the water collecting end loop flow passage 15;
s4: the liquid flowing out through the liquid outlet 13 flows through the liquid inlet 11 to the water diversion end plate 10 after being circulated and used outside, and the liquid flows back and forth again; through the heat exchanger introducing port, the liquid flowing through the liquid inlet 11 flows into the water diversion end loop runner 14, and the liquid flows to the liquid outlet 13 due to the action of the water diversion end partition plate 16, so that the circulation of the liquid is realized, and the electric crystal refrigeration is facilitated.
After the liquid in the step S2 flows out through the heat exchanger, the liquid is pressurized by the water pump 4 and output to the client equipment to absorb heat; the liquid flowing out through the heat exchanger can complete one-time circulation of the liquid, and refrigeration is convenient.
The circulating reciprocating liquid flow in the step S4 is realized by providing power through the circulating water pump 4; the water pump 4 is used for providing power for the circulation and use process of the liquid to realize the circulation and the use of the liquid. .
The use process is briefly described: liquid flows in through the liquid inlet 11 of the water diversion end plate 10 of the heat exchanger, and because of the blocking effect of the water diversion end baffle 16, the liquid only flows into the water collection end plate 9 through the water diversion end loop flow passage 14 arranged above the water diversion end baffle 16, under the effect of pressure difference, the liquid in the water collection end plate 9 flows through the water collection end loop flow passage 15 to the liquid outlet 13 of the water diversion end plate 10 to flow out, the liquid enters the liquid inlet 11 of the water diversion end plate 10 again after circulating outside, and the flow of reciprocating circulation is realized inside the heat exchanger again.
According to the invention, the circulation loop of the heat exchanger is improved, the water diversion end loop flow channel 14 and the water collection end loop flow channel 15 welded with the water diversion end plate 10 are respectively arranged at two side edges of the partition plate, so that the resistance loss in the liquid circulation process can be effectively reduced, the apertures of the water diversion end loop flow channel 14 and the water collection end loop flow channel 15 are changed to be small, the liquid flow speed in the water diversion end loop flow channel 14 and the water collection end loop flow channel 15 is improved, the laminar layer in the liquid flow process is reduced, the heat exchange effect in the liquid is improved, and the heat exchange area in the flow channel is effectively improved by arranging the screw thread treatment at the openings 12 of the water diversion end loop flow channel 14 and the water collection end loop flow channel 15.
The present embodiment is only for explanation of the present invention and is not to be construed as limiting the present invention, and modifications to the present embodiment, which may not creatively contribute to the present invention as required by those skilled in the art after reading the present specification, are all protected by patent laws within the scope of claims of the present invention.
Claims (10)
1. The semiconductor crystal refrigeration water-cooling heat exchange device is characterized by comprising a heat exchanger, wherein the heat exchanger is provided with a cold end heat exchanger (1) and a hot end heat exchanger (2); a semiconductor crystal (3) is arranged between the cold end heat exchanger (1) and the hot end heat exchanger (2), the outer end of the cold end heat exchanger (1) is connected with a water pump (4), the outer end of the water pump (4) is provided with a connecting filter (5), the outer end of the filter (5) is provided with a connecting temperature sensor (6), and the temperature of liquid passing through the cold end heat exchanger (1) is monitored in real time through the temperature sensor (6);
the heat exchanger is provided with a water diversion end assembly, a water collection end assembly and a heat exchanger runner assembly (8) welded between the water diversion end assembly and the water collection end assembly;
the heat exchanger flow channel assembly (8) is provided with a water diversion end loop flow channel (14) and a water collection end loop flow channel (15), and liquid circulation in the heat exchanger flow channel assembly (8) is realized through the water diversion end loop flow channel (14) and the water collection end loop flow channel (15).
2. A semiconductor crystal refrigeration water-cooling heat exchange device according to claim 1, wherein the water diversion end assembly comprises a water diversion end plate (10) and a water diversion end baffle plate (16) transversely arranged in the middle of the water diversion end plate (10), a liquid inlet (11) is arranged at the top of the water diversion end plate (10), and a liquid outlet (13) is arranged at the bottom of the water diversion end plate (10).
3. A semiconductor crystal refrigeration water-cooled heat exchange device according to claim 1, wherein the water-collecting end assembly comprises a water-collecting end plate (9) arranged, and an opening (12) is arranged at the top of the water-collecting end plate (9).
4. A semiconductor crystal refrigeration and water-cooling heat exchange device according to claim 1, wherein the water diversion end loop runner (14) is located above the horizontal plane of the water diversion end partition plate (16).
5. A semiconductor crystal refrigeration and water-cooling heat exchange device according to claim 1, wherein the water collecting end loop runner (15) is located below the horizontal plane of the water dividing end partition plate (16).
6. A semiconductor crystal refrigeration and water-cooling heat exchange device according to claim 1, wherein the diameter of the water diversion end loop flow passage (14) is phi 3, and the diameter of the water collection end loop flow passage (15) is phi 3.
7. The semiconductor crystal refrigeration water-cooling heat exchange device according to claim 1, wherein two hot-end heat exchangers (2) are arranged, semiconductor wafers are arranged at the positions of the hot-end heat exchangers (2), and the other ends of the semiconductor wafers are arranged adjacent to the cold-end heat exchangers (1).
8. The application method of the semiconductor crystal refrigeration water-cooling heat exchange device is characterized in that the following method is adopted to realize the circulation of liquid;
s1: the liquid flows in through a liquid inlet (11) of a water diversion end plate (10) of the heat exchanger;
s2: liquid entering the heat exchanger is blocked by a water diversion end baffle plate (16), and flows into a water collection end plate (9);
s3: the liquid sent into the water collecting end plate (9) flows through the liquid outlet (13) of the water distributing end plate (10) through the water collecting end loop flow passage (15);
s4: the liquid flowing out through the liquid outlet (13) flows through the liquid inlet (11) to the water diversion end plate (10) after being recycled outside, and the liquid flows in a reciprocating cycle again.
9. The method for using a semiconductor crystal refrigeration water-cooling heat exchange device according to claim 8, wherein the liquid in S2 flows out through the heat exchanger and is pressurized by the water pump (4) to be output to the client device to absorb heat.
10. The method for using the semiconductor crystal refrigeration water-cooling heat exchange device according to claim 8, wherein the circulating reciprocating liquid flow in the step S4 is realized by supplying power through a circulating water pump (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210395431.7A CN116007237A (en) | 2022-04-15 | 2022-04-15 | Semiconductor crystal refrigeration water-cooling heat exchange device and application method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210395431.7A CN116007237A (en) | 2022-04-15 | 2022-04-15 | Semiconductor crystal refrigeration water-cooling heat exchange device and application method thereof |
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| CN116007237A true CN116007237A (en) | 2023-04-25 |
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| CN202210395431.7A Pending CN116007237A (en) | 2022-04-15 | 2022-04-15 | Semiconductor crystal refrigeration water-cooling heat exchange device and application method thereof |
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|---|---|---|---|---|
| WO2001025711A1 (en) * | 1999-10-07 | 2001-04-12 | Hydrocool Pty Limited | Heat exchanger for an electronic heat pump |
| CN101221006A (en) * | 2008-01-30 | 2008-07-16 | 上海微电子装备有限公司 | Temperature control device for improving probability and efficiency of refrigerating system |
| KR20100031015A (en) * | 2008-09-11 | 2010-03-19 | 한라공조주식회사 | A heat exchanger using thermoelectric modules |
| CN201828091U (en) * | 2010-04-08 | 2011-05-11 | 张茂勇 | Micro-channel parallel flow downfilm condenser |
| CN102213502A (en) * | 2010-04-09 | 2011-10-12 | 上海微电子装备有限公司 | Device for improving stability of semiconductor refrigerating system |
| WO2020074995A1 (en) * | 2018-10-08 | 2020-04-16 | 林世轩 | Thermoelectric cooling assembly |
| CN214307677U (en) * | 2021-02-22 | 2021-09-28 | 广东美的环境电器制造有限公司 | Semiconductor heat exchanger and refrigeration equipment |
-
2022
- 2022-04-15 CN CN202210395431.7A patent/CN116007237A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001025711A1 (en) * | 1999-10-07 | 2001-04-12 | Hydrocool Pty Limited | Heat exchanger for an electronic heat pump |
| CN101221006A (en) * | 2008-01-30 | 2008-07-16 | 上海微电子装备有限公司 | Temperature control device for improving probability and efficiency of refrigerating system |
| KR20100031015A (en) * | 2008-09-11 | 2010-03-19 | 한라공조주식회사 | A heat exchanger using thermoelectric modules |
| CN201828091U (en) * | 2010-04-08 | 2011-05-11 | 张茂勇 | Micro-channel parallel flow downfilm condenser |
| CN102213502A (en) * | 2010-04-09 | 2011-10-12 | 上海微电子装备有限公司 | Device for improving stability of semiconductor refrigerating system |
| WO2020074995A1 (en) * | 2018-10-08 | 2020-04-16 | 林世轩 | Thermoelectric cooling assembly |
| CN214307677U (en) * | 2021-02-22 | 2021-09-28 | 广东美的环境电器制造有限公司 | Semiconductor heat exchanger and refrigeration equipment |
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Application publication date: 20230425 |