CN115979498A - Manufacturing process of absolute pressure film ceramic pressure sensor and quality inspection method thereof - Google Patents
Manufacturing process of absolute pressure film ceramic pressure sensor and quality inspection method thereof Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 134
- 238000000034 method Methods 0.000 title claims abstract description 89
- 238000007689 inspection Methods 0.000 title claims abstract description 63
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 27
- 238000005245 sintering Methods 0.000 claims abstract description 63
- 239000011521 glass Substances 0.000 claims abstract description 62
- 239000000758 substrate Substances 0.000 claims abstract description 48
- 239000000463 material Substances 0.000 claims abstract description 43
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 36
- 238000003466 welding Methods 0.000 claims abstract description 30
- 238000007639 printing Methods 0.000 claims abstract description 28
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 18
- 239000002002 slurry Substances 0.000 claims abstract description 18
- 230000002950 deficient Effects 0.000 claims abstract description 17
- 238000004140 cleaning Methods 0.000 claims abstract description 15
- 238000012360 testing method Methods 0.000 claims abstract description 12
- 239000012528 membrane Substances 0.000 claims abstract description 11
- 238000004806 packaging method and process Methods 0.000 claims abstract description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 20
- 239000007788 liquid Substances 0.000 claims description 14
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 10
- 239000001569 carbon dioxide Substances 0.000 claims description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 8
- 238000005507 spraying Methods 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
- 230000003749 cleanliness Effects 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical group O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000002243 precursor Substances 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000008367 deionised water Substances 0.000 claims description 3
- 229910021641 deionized water Inorganic materials 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 238000003860 storage Methods 0.000 claims description 3
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- 238000011990 functional testing Methods 0.000 claims description 2
- 238000002791 soaking Methods 0.000 claims 3
- 238000001035 drying Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000243 solution Substances 0.000 description 7
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000004886 process control Methods 0.000 description 3
- 238000011179 visual inspection Methods 0.000 description 3
- 238000010923 batch production Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000003502 gasoline Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
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Abstract
The invention provides a manufacturing process of an absolute pressure membrane ceramic pressure sensor and a quality inspection method thereof, relating to the technical field of pressure sensors and comprising the following steps: s1: cleaning and baking the ceramic substrate; s2: printing glass slurry; s3: sintering for the first time; s4: the ceramic strain gauge is attached to the ceramic substrate; s5: the second sintering, the glass layer formed in the step S3 is heated to the temperature above the softening point again, and then is cooled, and in the process, the ceramic strain gauge and the ceramic substrate are clamped by the clamp in the step S4, so that the mechanical bonding of the ceramic strain gauge and the ceramic substrate can be realized by the glass layer, and a sealed cavity is formed to be used as a reference pressure cavity of the absolute pressure sensor; s6: filling an electric connection material; s7: automatically installing a welding pin; s8: curing in a nitrogen furnace; s9: zero position testing and marking; s10: and after final inspection and packaging, the method is more suitable for application in mass production, can effectively ensure the product quality, reduce the outflow rate of defective products and improve the competitiveness of the products.
Description
Technical Field
The invention relates to a pressure sensor, in particular to a manufacturing process of an absolute pressure film ceramic pressure sensor and a quality inspection method thereof.
Background
The pressure sensor is a device which can convert the external pressure load into electric signals and other signals which are easy to modulate, when the pressure sensor works, the detected pressure signal is actually the pressure difference between the input pressure load and the reference pressure, and the pressure sensor can be further divided into an absolute pressure sensor and a gauge pressure sensor according to the difference of the reference pressure;
the absolute pressure sensor is a reference pressure that is a fixed value, usually a vacuum (about 0 kPa), an atmospheric pressure (about 101 kPa), or a fixed pressure point between the vacuum and the atmospheric pressure (0-101 kPa), that is, the reference pressure does not change with the change of the external environment pressure, and the gauge pressure sensor is a gauge pressure sensor, where the reference pressure is equal to the pressure of the external environment where the pressure sensor is located, and if the external environment is the atmospheric pressure, the reference pressure is the atmospheric pressure. In most application scenes, the reference pressure of the external environment where the pressure sensor is located is fixed, and at the moment, the gauge pressure and the absolute pressure sensor can be mutually replaced;
the pressure sensing element of the flat-film ceramic pressure sensor is made of ceramic materials, and the ceramic materials have excellent linear elasticity and good medium compatibility, and can be applied to liquid media such as water, refrigerants and gasoline, so that the flat-film ceramic pressure sensor is widely applied to the fields of industrial control, pipelines, petrochemical industry, automobile manufacturing, internet of things and the like;
in the actual production process, the main bottleneck limiting the production energy of the gauge pressure flat film ceramic pressure sensor is a large-batch calibration process, and a large-volume tool clamp is required to independently pressurize each sensor product during batch calibration; when the absolute pressure film ceramic pressure sensor is calibrated in batches, a plurality of sensor products can share the same pressure source, and the space utilization rate is high, so that the absolute pressure film ceramic pressure sensor is more suitable for mass production;
however, the absolute pressure membrane ceramic pressure sensor requires that the reference pressure is not changed along with the change of the external environment pressure, i.e. a reference cavity with extremely high sealing performance needs to be formed, which has very high requirements on product process design and process control, in addition, a strict quality inspection method is indispensable, and the traditional quality inspection methods, including visual inspection, manual pressurization test, high altitude regulation and the like, are not only inefficient, but also have risks of defective product outflow, and especially in the field related to safety, the requirements on defective product control are very high, such as the automobile industry, which requires the defective product outflow rate of a part supplier to be in PPM level;
therefore, the manufacturing process and the quality inspection method of the absolute pressure membrane ceramic pressure sensor are provided, the absolute pressure membrane ceramic pressure sensor is produced, the product quality of mass production of products can be guaranteed, and the outflow rate of defective products is reduced.
Disclosure of Invention
The invention aims to provide a manufacturing process of an absolute pressure flat film ceramic pressure sensor and a quality inspection method thereof, which are more suitable for application of mass product production, can effectively ensure the product quality, reduce the outflow rate of defective products and improve the competitiveness of the products.
The invention provides the following technical scheme:
a manufacturing process of an absolute pressure film ceramic pressure sensor is used for batch production of the absolute pressure film ceramic pressure sensor, and the absolute pressure film ceramic pressure sensor comprises a ceramic strain gauge, a ceramic substrate, a glass layer, an electric connection material and a welding pin;
the ceramic strain gauge comprises a thick film circuit, wherein the thick film circuit comprises a resistor, a metal wire, a glass dielectric layer and a bonding pad;
the ceramic substrate comprises four through holes corresponding to the positions of the bonding pads and a pit positioned in the center;
the glass layer is arranged between the ceramic strain gauge and the ceramic substrate, the precursor of the glass layer is glass slurry, the glass slurry is prepared into a compact glass layer through a high-temperature sintering process and used for realizing the mechanical connection of the ceramic strain gauge and the ceramic substrate, and meanwhile, due to the existence of the glass layer, a closed cavity is formed between the ceramic strain gauge and the ceramic substrate and is used as the reference pressure of the absolute pressure sensor;
the electric connection material is filled in the through hole, and the material can be selected from tin paste and conductive silver paste;
and the welding pin is inserted into the through hole, and after high-temperature curing, the welding pin, the electric connection material and the bonding pad form a high-strength connector, and at the moment, the thick film circuit can be electrically connected with the outside through the welding pin to input/output electric signals.
The manufacturing process of the absolute pressure flat film ceramic pressure sensor comprises the following steps:
s1: cleaning and baking the ceramic substrate, wherein the purpose is to ensure the initial cleanliness of the ceramic substrate, the cleaning method is ultrasonic cleaning, and the cleaning solvent is deionized water;
s2: glass slurry printing, which aims to print the glass slurry on a ceramic substrate, wherein the printing method is steel mesh printing, and the equipment is an automatic printing machine;
s3: sintering for the first time, wherein the purpose is to solidify and remove the printed glass slurry and form a glass structure;
s4: the ceramic strain gauge is attached to the ceramic substrate, and aims to attach the ceramic strain gauge to the ceramic substrate subjected to primary glass sintering, wherein the attaching surfaces are the surface of the ceramic substrate with glass and the surface of the ceramic strain gauge with a thick-film circuit, and the attached ceramic strain gauge and the ceramic substrate are clamped by a clamp;
s5: the second sintering, the glass layer formed in the step S3 is heated to the temperature above the softening point again, and then is cooled, and in the process, the ceramic strain gauge and the ceramic substrate are clamped by the clamp in the step S4, so that the mechanical bonding of the ceramic strain gauge and the ceramic substrate can be realized by the glass layer, and a sealed cavity is formed to be used as a reference pressure cavity of the absolute pressure sensor;
s6: filling an electric connection material, wherein the electric connection material is filled in the through hole, the filling method is injection valve dispensing, and the types of the electric connection material comprise conductive silver paste and tin paste which have high conductivity and high mechanical strength after curing;
s7: automatically installing a welding pin, aiming at assembling the welding pin into a through hole filled with an electric connection material, positioning the welding pin through a vibration disc or a braid, wherein the assembling method is an automatic pin inserting machine and ensures that the welding pin is inserted into a proper position;
s8: curing in a nitrogen furnace, aiming at curing the electric connecting material filled in the S6 to form a reliable combination of the electric connecting material, the welding pin and the bonding pad and realize electric and mechanical connection;
s9: zero position test and marking, wherein the zero position test is used as the last function test before the pressure sensor leaves a factory, aims to detect the zero position value of a product, picks out a defective product of the zero position test, marks the product, and marks batch numbers, material numbers and the like;
s10: and final inspection and packaging, wherein the final inspection is the last inspection, and the product can be packaged and put in storage after the final inspection is finished.
The quality inspection method of the absolute pressure flat film ceramic pressure sensor is based on the manufacturing process of the absolute pressure flat film ceramic pressure sensor, and comprises the following steps:
s2, the automatic quality inspection method in the printing process is S201: an AOI (Automated Optical Inspection) machine identifies the printing height and the printing form, the AOI machine is adopted to carry out full Inspection or spot Inspection on the printed product, and if the printing height is out of tolerance or the contrast conformity of the printing form and the standard form is lower than a certain threshold value, an alarm is sent;
the automatic quality inspection method after the first sintering in the S3 comprises the following steps of S301: the sintering surface is cleaned by liquid carbon dioxide, and by adopting the scheme of spraying the sintering surface by the online liquid carbon dioxide, the product sintered for the first time can be transferred to the process through the conveying guide rail, and the processed product is automatically transferred to the next process, so that the spraying efficiency is high; impurities such as dust, particles and the like generated in the first sintering process can be removed in the spraying process; the liquid carbon dioxide can be gasified quickly after being sprayed, no residue is caused, and pollution in the cleaning process is avoided; the liquid carbon dioxide can be recycled and cannot be dissipated into the environment, so that the environmental pollution is avoided;
the automated quality inspection method after the first sintering in S3 further includes S302: the AOI machine identifies the sintering height and shape, the AOI machine is adopted to carry out full inspection or spot inspection on the product after the first sintering, and if the sintering height is out of tolerance or the conformity of the glass shape after sintering and the standard shape is lower than a certain threshold value, an alarm is sent out;
the automated quality inspection method after the second sintering in S5 comprises S501: the sintering quality is detected on line by X-rays, after the second sintering, the glass layer is clamped between the ceramic strain gauge and the ceramic substrate, the shape of the glass layer is difficult to detect through a conventional visual inspection and an AOI machine, the X-rays can penetrate through the surface of the ceramic due to large energy to identify the sintering quality of the glass layer, the product after the second sintering is detected on line by adopting the X-rays, and an alarm is given if the bad second sintering shapes such as bubbles, holes, glass overflow and the like are identified;
the automatic quality inspection method after curing in the nitrogen furnace in S8 comprises the following steps of S801: the method comprises the following steps of (1) detecting a curing effect on line by X-rays, wherein because the precursor of the electric connecting material is in a slurry form, internal bubbles possibly exist after curing, so that poor connection is caused, although process control can be carried out by means of deaeration and the like, the possibility of outflow of defective products still exists, carrying out on-line detection on a product cured in a nitrogen furnace by adopting the X-rays, and giving an alarm if the poor curing forms such as bubbles, holes and the like exist at the part of the electric connecting material;
the automated quality inspection method after curing in the nitrogen furnace in S8 further comprises S802: in the process, 100% of a product is immersed in a water-soluble dye solution, and after the product is heated, immersed, cleaned and dried, if the reference cavity is not sealed, the water-soluble dye solution invades into the reference cavity to form dirt which can be detected in the step S803, and meanwhile, the soldering assistant solution (if the electric connection material is tin) possibly remaining in the step S8 can be cleaned by adopting the water-soluble dye solution.
The automatic quality inspection method after the curing in the nitrogen furnace in the S8 further comprises the following step of S803: the AOI machine detects cracks on the surface of the ceramic and the cleanliness of the sintering cavity, and in the former process, particularly in the high-temperature processes of two-time sintering S3 and S5 and nitrogen furnace curing S8, tiny cracks may be formed on the surface of the ceramic strain gauge of the ceramic pressure sensor, and defective products cannot flow into the subsequent process, so the detection needs to be carried out by the AOI machine, in addition, the S803 process can also be combined with the S802 process, defective products with unsealed reference cavities are detected, and if cracks on the surface of the ceramic or dirt inside the sintering cavity is detected, an alarm is given.
Preferably, in S6, the filling method of filling the through hole with the electrical connection material is injection valve dispensing, and the type of the electrical connection material includes conductive silver paste and tin paste having high conductivity and high mechanical strength after curing.
Preferably, in S7, the welding pins are positioned by a vibration disc or a braid, and the assembly method is an automatic pin inserting machine to ensure that the welding pins are inserted into proper positions.
The invention has the beneficial effects that:
the manufacturing process of the absolute pressure flat-film ceramic pressure sensor solves the problem that the main bottleneck limiting the productivity of the ceramic pressure sensor in the prior art is a large-batch calibration process, has the beneficial effects of convenient calibration and high space utilization rate of a calibration system, and is more than 3 times of the theoretical calibration productivity of the absolute pressure flat-film ceramic pressure sensor, thereby being more suitable for large-batch production;
aiming at the problems of low efficiency and high outflow risk of defective products in the existing quality inspection method, the manufacturing process and the quality inspection method of the absolute pressure flat film ceramic pressure sensor can effectively ensure the product quality, reduce the outflow rate of the defective products and improve the competitiveness of the products.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic diagram of an exploded structure of an absolute pressure diaphragm ceramic pressure sensor in accordance with the present invention;
FIG. 2 is a flow chart of a manufacturing process and quality inspection method for an absolute pressure diaphragm ceramic pressure sensor;
notation in the figure: 1 is a ceramic strain gauge, 2 is a ceramic substrate, 3 is a glass layer, 4 is an electric connection material, 5 is a welding pin,
11 is a thick film circuit, 12 is a bonding pad, 13 is a metal wire,
21 are through holes and 22 are pits.
Detailed Description
As shown in fig. 1-2, a manufacturing process of an absolute pressure film ceramic pressure sensor and a quality inspection method thereof are used for mass production of the absolute pressure film ceramic pressure sensor in the present embodiment, and the absolute pressure film ceramic pressure sensor includes a ceramic strain gauge 1, a ceramic substrate 2, a glass layer 3, an electrical connection material 4, and a welding pin 5;
the ceramic strain gauge 1 comprises a thick film circuit 11, wherein the thick film circuit 11 comprises a resistor, a metal wire 13, a glass dielectric layer and a pad 12, which is the prior art and is not described herein again;
the ceramic substrate 2 includes four through holes 21 corresponding to the positions of the pads 12 and a recess 22 located at the center;
the glass layer 3 is arranged between the ceramic strain gauge 1 and the ceramic substrate 2, a precursor of the glass layer is glass slurry, the glass slurry is prepared into a compact glass layer 3 through a high-temperature sintering process and is used for realizing mechanical connection of the ceramic strain gauge 1 and the ceramic substrate 2, and meanwhile, due to the existence of the glass layer 3, a closed cavity is formed between the ceramic strain gauge 1 and the ceramic substrate 2 and is used as reference pressure of an absolute pressure sensor;
the electric connection material 4 is filled in the through hole 21, and the material can be tin paste or conductive silver paste;
and the welding pin 5 is inserted into the through hole 21, and after high-temperature curing, the welding pin, the electric connection material 4 and the bonding pad 12 form a high-strength connector, and at the moment, the thick film circuit 11 can be electrically connected with the outside through the welding pin 5 to input/output electric signals.
The manufacturing process and the quality inspection method of the absolute pressure membrane ceramic pressure sensor comprise the following steps:
s1: cleaning and baking the ceramic substrate 2 to ensure the initial cleanliness of the ceramic substrate 2, wherein the cleaning method is ultrasonic cleaning, and the cleaning solvent is deionized water;
s2: glass slurry printing, which aims to print the glass slurry on the ceramic substrate 2, wherein the printing method is steel mesh printing, and the equipment is an automatic printing machine;
the automatic quality inspection method in the printing process is S201: an AOI (Automated Optical Inspection) machine identifies the printing height and the printing form, the AOI machine is adopted to carry out full Inspection or spot Inspection on the printed product, and if the printing height is out of tolerance or the contrast conformity of the printing form and the standard form is lower than a certain threshold value, an alarm is sent;
s3: sintering for the first time, wherein the purpose is to solidify and remove the printed glass slurry and form a glass structure;
the automatic quality inspection method after the first sintering comprises the following steps of S301: the sintering surface is cleaned by liquid carbon dioxide, and by adopting the scheme of spraying the sintering surface by the online liquid carbon dioxide, the product sintered for the first time can be transferred to the process through the conveying guide rail, and the processed product is automatically transferred to the next process, so that the spraying efficiency is high; impurities such as dust, particles and the like generated in the first sintering process can be removed in the spraying process; the liquid carbon dioxide can be gasified quickly after being sprayed, no residue is caused, and pollution in the cleaning process is avoided; the liquid carbon dioxide can be recycled, can not be dissipated into the environment, and avoids environmental pollution;
the automatic quality inspection method after the first sintering further comprises S302: the AOI machine identifies the sintering height and shape, the AOI machine is adopted to carry out full inspection or spot inspection on the product after the first sintering, and if the sintering height is out of tolerance or the conformity of the glass shape after sintering and the standard shape is lower than a certain threshold value, an alarm is sent out;
s4: the ceramic strain gauge 1 is attached to the ceramic substrate 2, in order to attach the ceramic strain gauge 1 to the ceramic substrate 2 subjected to primary glass sintering, wherein the attaching surfaces are the surface of the ceramic substrate 2 with glass and the surface of the ceramic strain gauge 1 with the thick film circuit 11, and the attached ceramic strain gauge 1 and the ceramic substrate 2 are clamped by a clamp;
s5: the second sintering, the glass layer 3 formed in the step S3 is heated to the temperature above the softening point again, and then is cooled, and in the process, the ceramic strain gauge 1 and the ceramic substrate 2 are clamped by the clamp in the step S4, so that the glass layer 3 can realize the mechanical bonding of the ceramic strain gauge 1 and the ceramic substrate 2, and a sealed cavity is formed to be used as a reference pressure cavity of the absolute pressure sensor;
the automated quality inspection method after the second sintering comprises the following steps of S501: the sintering quality is detected on line by X-rays, after the second sintering, the glass layer 3 is clamped between the ceramic strain gauge 1 and the ceramic substrate 2, the shape of the glass layer is difficult to detect through a conventional visual inspection and an AOI machine, the X-rays can penetrate through the surface of the ceramic due to large energy to identify the sintering quality of the glass layer 3, and the product after the second sintering is detected on line by adopting the X-rays, so that an alarm is given if the bad second sintering shapes such as bubbles, holes, glass overflow and the like are identified;
s6: filling the electric connecting material 4, wherein the electric connecting material 4 is filled in the through hole 21, the filling method is injection valve dispensing, and the types of the electric connecting material 4 comprise conductive silver paste and tin paste which have high conductivity and high mechanical strength after curing;
s7: automatically installing the welding pins 5, aiming at assembling the welding pins 5 into the through holes 21 filled with the electric connecting materials 4, positioning the welding pins 5 through a vibration disc or a braid, wherein the assembling method is an automatic pin inserting machine and ensures that the welding pins 5 are inserted into proper positions;
s8: curing in a nitrogen furnace, in order to cure the electrical connection material 4 filled in the step S6 to form a reliable combination of the electrical connection material 4, the welding pin 5 and the bonding pad 12, and simultaneously realize electrical and mechanical connection;
the automatic quality inspection method after curing in the nitrogen furnace comprises the following steps of S801: the curing effect is detected on line by X-rays, because the precursor of the electric connecting material 4 is in a slurry form, internal bubbles may exist after curing, so that poor connection is caused, although process control can be performed by means of deaeration and the like, the possibility of flowing out of defective products still exists, products cured by a nitrogen furnace are detected on line by adopting X-rays, and if the bad curing forms such as bubbles, holes and the like exist at the position of the electric connecting material 4, an alarm is given;
the automatic quality inspection method after the nitrogen furnace is cured further comprises S802: in the process, 100% of a product is immersed in a water-soluble dye solution, and after the product is heated, immersed, cleaned and dried, if the reference cavity is not sealed, the water-soluble dye solution invades into the reference cavity to form dirt which can be detected in the step S803, and meanwhile, the water-soluble dye solution can be used for cleaning soldering assistant liquid (if the electric connecting material 4 is tin) possibly remaining in the step S8.
The automatic quality inspection method after curing in the nitrogen furnace further comprises S803: AOI machine is used for detecting ceramic surface cracks and sintering cavity cleanliness, tiny cracks can be formed on the surface of the ceramic strain gauge 1 of the ceramic pressure sensor in the previous process, particularly in the high-temperature processes of twice sintering S3 and S5 and nitrogen furnace curing S8, and defective products cannot flow into the subsequent process, so that the AOI machine is used for detecting the defective products, the reference cavity is not sealed, and if the ceramic surface cracks or dirt in the sintering cavity is detected, an alarm is given out in the S803 process;
s9: zero-position testing and marking, wherein the zero-position testing is used as the last functional test before the pressure sensor leaves a factory, and aims to detect the zero-position numerical value of a product, pick out a defective zero-position test product, mark the product, and mark batch numbers, material numbers and the like;
s10: and final inspection and packaging, wherein the final inspection is the last inspection, and the product can be packaged and put in storage after the final inspection is finished.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. The manufacturing process of the absolute pressure membrane ceramic pressure sensor is characterized by being used for mass production of the absolute pressure membrane ceramic pressure sensor, wherein the absolute pressure membrane ceramic pressure sensor comprises a ceramic strain gauge, a ceramic substrate, a glass layer, an electric connection material and a welding pin; the ceramic strain piece comprises a thick film circuit, and the ceramic substrate comprises four through holes corresponding to the positions of the bonding pads and a pit in the center;
the glass layer is arranged between the ceramic strain gauge and the ceramic substrate, the precursor of the glass layer is glass slurry, and the glass slurry is prepared into a compact glass layer through a high-temperature sintering process and is used for realizing the mechanical connection between the ceramic strain gauge and the ceramic substrate; the electric connecting material is filled in the through hole, the welding pin is inserted into the through hole, and after high-temperature curing, a high-strength connector is formed by the electric connecting material and the welding pad;
the manufacturing process of the absolute pressure membrane ceramic pressure sensor comprises the following steps:
s1: cleaning and baking the ceramic substrate, wherein the purpose is to ensure the initial cleanliness of the ceramic substrate, the cleaning method is ultrasonic cleaning, and the cleaning solvent is deionized water;
s2: glass slurry printing, which aims to print the glass slurry on a ceramic substrate, wherein the printing method is steel mesh printing, and the equipment is an automatic printing machine;
s3: sintering for the first time, wherein the purpose is to solidify and remove the printed glass slurry and form a glass structure;
s4: the ceramic strain gauge is attached to the ceramic substrate, and aims to attach the ceramic strain gauge to the ceramic substrate subjected to primary glass sintering, wherein the attaching surfaces are the surface of the ceramic substrate with glass and the surface of the ceramic strain gauge with a thick-film circuit, and the attached ceramic strain gauge and the ceramic substrate are clamped by a clamp;
s5: the second sintering, the glass layer formed in the step S3 is heated to the temperature above the softening point again, and then is cooled, and in the process, the ceramic strain gauge and the ceramic substrate are clamped by the clamp in the step S4, so that the mechanical bonding of the ceramic strain gauge and the ceramic substrate can be realized by the glass layer, and a sealed cavity is formed to be used as a reference pressure cavity of the absolute pressure sensor;
s6: filling an electric connection material, wherein the purpose is to fill the electric connection material in the through hole;
s7: automatically installing a welding pin, aiming at assembling the welding pin into the through hole filled with the electric connection material;
s8: curing in a nitrogen furnace, aiming at curing the electric connecting material filled in the S6 to form a reliable combination of the electric connecting material, the welding pin and the bonding pad and realize electric and mechanical connection;
s9: zero-position testing and marking, wherein the zero-position testing is used as the last functional test before the pressure sensor leaves a factory, and aims to detect the zero-position numerical value of a product, pick out a defective product of the zero-position testing, and then mark the product;
s10: and final inspection and packaging, wherein the final inspection is the last inspection, and the product can be packaged and put in storage after the final inspection is finished.
2. The quality inspection method of the absolute pressure membrane ceramic pressure sensor is characterized in that the manufacturing process of the absolute pressure membrane ceramic pressure sensor based on the claim 1 comprises the following steps:
s2, the automatic quality inspection method in the printing process is S201: identifying the printing height and the printing form by an AOI machine, performing full inspection or random inspection on the printed product by the AOI machine, and if the printing height is out of tolerance or the contrast conformity of the printing form and the standard form is lower than a certain threshold value, giving an alarm;
the automatic quality inspection method after the first sintering in S3 comprises the following steps of S301: the sintering surface is cleaned by liquid carbon dioxide, and by adopting the scheme of spraying the sintering surface by the online liquid carbon dioxide, the product sintered for the first time can be transferred to the process through the conveying guide rail, and the processed product is automatically transferred to the next process, so that the spraying efficiency is high;
the automated quality inspection method after the first sintering in S3 further includes S302: the AOI machine identifies the sintering height and shape, the AOI machine is adopted to carry out full inspection or spot inspection on the product after the first sintering, and if the sintering height is out of tolerance or the conformity of the glass shape after sintering and the standard shape is lower than a certain threshold value, an alarm is sent out;
the automated quality inspection method after the second sintering in S5 comprises S501: the sintering quality is detected online by X-rays, the products sintered for the second time are detected online by X-rays, and an alarm is given if bad secondary sintering forms such as air bubbles, holes, glass overflow and the like are identified;
the automatic quality inspection method after curing in the nitrogen furnace in S8 comprises the following steps of S801: the curing effect is detected on line by X-rays, the product cured in the nitrogen furnace is detected on line by the X-rays, and if the bad curing forms such as bubbles, holes and the like existing at the part of the electric connecting material are identified, an alarm is given;
the automated quality inspection method after curing in the nitrogen furnace in S8 further comprises S802: the online dye soaking, cleaning and drying process includes soaking 100% of the product in water soluble dye liquid, heating, soaking, cleaning and drying, and if the reference cavity is not sealed, the water soluble dye liquid will invade into the reference cavity to form dirt which can be detected in the step S803.
The automatic quality inspection method after the curing in the nitrogen furnace in the S8 further comprises the following step of S803: the AOI machine station detects cracks on the surface of the ceramic and the cleanliness of the sintering cavity, and gives an alarm if the cracks on the surface of the ceramic or the dirt in the sintering cavity are detected.
3. The process of claim 1, wherein in step S6, the filling method of filling the through hole with the electrical connection material is dispensing by using a jet valve, and the types of the electrical connection material include conductive silver paste and tin paste which have high electrical conductivity and high mechanical strength after curing.
4. The manufacturing process of the absolute pressure flat film ceramic pressure sensor according to claim 1, wherein in the step S7, the welding pins are positioned through a vibration disc or a braid, and the assembling method is an automatic pin inserting machine, so that the welding pins are ensured to be inserted into proper positions.
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Citations (5)
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|---|---|---|---|---|
| US20100005894A1 (en) * | 2006-04-10 | 2010-01-14 | Uwe Partsch | Ceramic pressure sensors and method for producing the same |
| KR20120119556A (en) * | 2011-04-22 | 2012-10-31 | 대양전기공업 주식회사 | A thick film type pressure measuring sensor and manufacturing method of pressure measuring sensor |
| US20150075289A1 (en) * | 2012-03-23 | 2015-03-19 | Microtel Tecnologie Elettroniche S.P.A. | Ceramic pressure sensor and method for production thereof |
| CN110285899A (en) * | 2019-03-25 | 2019-09-27 | 绍兴文理学院元培学院 | A kind of preparation method of ceramic pressure sensor |
| WO2022089975A1 (en) * | 2020-10-30 | 2022-05-05 | Kolektor Microtel S.P.A. | Flat ceramic pressure sensor and relative production method |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100005894A1 (en) * | 2006-04-10 | 2010-01-14 | Uwe Partsch | Ceramic pressure sensors and method for producing the same |
| KR20120119556A (en) * | 2011-04-22 | 2012-10-31 | 대양전기공업 주식회사 | A thick film type pressure measuring sensor and manufacturing method of pressure measuring sensor |
| US20150075289A1 (en) * | 2012-03-23 | 2015-03-19 | Microtel Tecnologie Elettroniche S.P.A. | Ceramic pressure sensor and method for production thereof |
| CN110285899A (en) * | 2019-03-25 | 2019-09-27 | 绍兴文理学院元培学院 | A kind of preparation method of ceramic pressure sensor |
| WO2022089975A1 (en) * | 2020-10-30 | 2022-05-05 | Kolektor Microtel S.P.A. | Flat ceramic pressure sensor and relative production method |
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