CN115978324A - Pipeline sealing joint and high-precision XY air floatation movement system and method - Google Patents
Pipeline sealing joint and high-precision XY air floatation movement system and method Download PDFInfo
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- CN115978324A CN115978324A CN202310278652.0A CN202310278652A CN115978324A CN 115978324 A CN115978324 A CN 115978324A CN 202310278652 A CN202310278652 A CN 202310278652A CN 115978324 A CN115978324 A CN 115978324A
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- 238000007789 sealing Methods 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 11
- 238000001125 extrusion Methods 0.000 claims abstract description 8
- 230000007246 mechanism Effects 0.000 claims description 27
- 238000001514 detection method Methods 0.000 claims description 21
- 238000007667 floating Methods 0.000 claims description 10
- 238000009423 ventilation Methods 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 210000003625 skull Anatomy 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 1
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000003292 glue Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 210000003437 trachea Anatomy 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005188 flotation Methods 0.000 description 1
- 239000010438 granite Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Abstract
The invention particularly relates to a pipeline sealing joint, a high-precision XY air floatation motion system and a high-precision XY air floatation motion method, which comprise the following steps: the connector comprises a connector body, wherein an accommodating cavity is arranged in the connector body, and the shape of the accommodating cavity is matched with that of an air connector to be connected; the two ends of the joint body in the length direction are provided with openings; the accommodating cavity is arranged at the two ends of the connector body in the length direction in an opening mode; one end face of the accommodating cavity is connected with one end face of the joint body in the length direction; a gap is reserved between the accommodating cavity and the inner wall of the joint body; a guide assembly is arranged in the joint body and is arranged between the accommodating cavity and the other end face of the joint body in the length direction; the guide assembly is suitable for guiding gas between the accommodating cavity and the inner wall of the joint body; realized that gaseous extrusion holds the chamber and makes the outer wall in close contact with who holds chamber and gas connection for it is sealed between chamber and the gas connection to hold, avoids gaseous leakage when ventilating.
Description
Technical Field
The invention belongs to the technical field of sealing, and particularly relates to a pipeline sealing joint, a high-precision XY air floatation motion system and a high-precision XY air floatation motion method.
Background
Along with precision machining, the continuous development of precision measurement technique, to detecting and machining precision and speed requirement more and more high, but traditional testing platform can receive influences such as frictional force at the in-process that removes for remove unable accurate control, use the air supporting bearing to make the frictional force that the platform received at the removal in-process reduce, show the reduction motion inertia. But the mode that generally adopts the staple bolt to air connector department of air bearing fastens, but the long-time use of staple bolt can lead to the fact wearing and tearing to air connector, also can lead to the fact wearing and tearing to the trachea, leads to air connector or the damaged gas leakage of trachea, influences air bearing's use. The air bearing adopts the gasbag to form the air supporting membrane, under the long-time condition of not using of air bearing, can lead to the gas in the gasbag to lead to the adhesion of the back gasbag inner wall of discharging, causes the damage to the gasbag, influences air bearing's use.
Therefore, a new pipeline sealing joint and a high-precision XY air floatation motion system and method need to be designed based on the technical problems.
Disclosure of Invention
The invention aims to provide a pipeline sealing joint, a high-precision XY air floatation motion system and a high-precision XY air floatation motion method.
In order to solve the above technical problem, the present invention provides a pipe sealing joint, comprising:
the connector comprises a connector body, wherein an accommodating cavity is formed in the connector body, and the shape of the accommodating cavity is matched with that of a gas connector to be connected;
the two ends of the joint body in the length direction are provided with openings;
the accommodating cavity is arranged at the two ends of the connector body in the length direction in an opening mode;
one end face of the accommodating cavity is connected with one end face of the joint body in the length direction;
a gap is reserved between the accommodating cavity and the inner wall of the joint body;
a guide assembly is arranged in the joint body and is arranged between the accommodating cavity and the other end face of the joint body in the length direction;
the guide assembly is adapted to guide gas between the receiving cavity and the inner wall of the fitting body.
Further, the joint body includes: an upper joint and a lower joint;
the upper joint is connected with the lower joint through an elastic ring;
one end face of the upper joint is connected with one end face of the lower joint;
the other end face of the upper joint is connected with one end face of the accommodating cavity;
the other end surface of the accommodating cavity is positioned on one side of the elastic ring;
the guide assembly is disposed below the receiving cavity.
Further, the guide assembly includes: a conical head and a ring body;
the conical head is arranged at the center of the ring body;
the smaller end of the cross section of the conical head faces the other end face of the joint body in the length direction;
the side wall of the ring body is in contact with the elastic ring;
a plurality of air holes are circumferentially formed in the ring body;
the end face with the larger cross-sectional area of the conical head faces the accommodating cavity, and the area of the end face with the larger cross-sectional area of the conical head is larger than that of the other end face of the accommodating cavity.
Further, a lead angle is arranged at the position, facing the lower joint, of the edge of the ring body, and the lead angle is suitable for being in contact with the edge of the lower joint.
Further, a protection ring is arranged on the elastic ring outer cover;
a plurality of through holes are formed in the circumferential direction of the protection ring, and the length direction of the through holes is arranged along the length direction of the joint body;
a pressing rod is hinged in the through hole, and the length direction of the pressing rod is arranged along the length direction of the joint body.
Furthermore, one side of the through hole is provided with a pair of sliding chutes which are arranged on the protection ring;
one chute of the pair of chutes is arranged close to the inner top surface of the through hole, and the other chute is arranged close to the inner bottom surface of the through hole;
the length direction of the sliding groove is arranged along the width direction of the through hole, and the sliding groove is communicated with the through hole;
a sliding block matched with the sliding chute is arranged in the sliding chute, and a pressing block is arranged on one surface of the sliding block facing the interior of the joint body;
the sliding block is suitable for sliding along the sliding groove and drives the pressing block to extend out of the sliding groove, so that the pressing block is in contact with the pressing rod.
Further, during ventilation, the connector body is sleeved on the air connector, the air connector is ventilated through the connector body, the ring body is in contact with the edge of the lower connector at the moment, air flows between the accommodating cavity and the inner wall of the upper connector through the air hole, the accommodating cavity is in close contact with the outer wall of the air connector through the pressure of the air, the pressure rod is in contact with the ring body through the extrusion elastic ring at the moment, and the sliding block slides along the sliding groove to drive the pressing block to extend out of the sliding groove, so that the pressing block is in contact with the pressure rod, and the gas is prevented from driving the ring body to move;
after the containing cavity is tightly contacted with the outer wall of the gas joint through the pressure of the gas, the gas enters the gas joint;
after the ventilation, follow through the slider during the spout slides and drives briquetting income spout for briquetting and depression bar no longer contact, rotate the depression bar this moment, make depression bar extrusion elastic ring and lead angle contact, and along with the depression bar continues to rotate, drive the ring body and remove to holding the chamber direction, make the toper skull establish on holding the chamber, follow through the slider this moment the spout slides and drives the briquetting and stretch out from the spout, makes briquetting and depression bar contact.
In a second aspect, the present invention further provides a high-precision XY air flotation motion system using the above pipeline sealing joint, including:
a base seat is arranged on the base seat,
the two-axis moving device is arranged in the base and is provided with a bearing table;
the detection device is arranged on the base, is arranged above the two-axis moving device, is suitable for driving the bearing table to move below the detection device, and is suitable for detecting devices on the bearing table;
the two-axis moving device is provided with a plurality of air bearings, the air bearings are suitable for forming an air floating film between the two-axis moving device and the base, and pipeline sealing joints are arranged on the air bearings to ventilate the air bearings.
Further, the two-axis moving apparatus includes: a pair of Y-axis moving mechanism and X-axis moving mechanism;
the Y-axis moving mechanism is arranged on the base;
the X-axis moving mechanism is arranged between the two Y-axis moving mechanisms;
the bearing table is arranged on the X-axis moving mechanism.
Further, the Y-axis moving mechanism includes: a first linear motor;
the first linear motor is arranged in a groove formed in the side wall of the base;
a moving block matched with the first linear motor is arranged on the first linear motor;
a first grating ruler is arranged on the side wall of the base, the first grating ruler is arranged along the length direction of the groove, and the first grating ruler is arranged below the groove;
and a plurality of air bearings are arranged between the moving block and the side wall of the base.
Further, the X-axis moving mechanism includes: the cross beam and the pair of second linear motors;
the cross beam is arranged between the two moving blocks, namely one end face of the cross beam is arranged on one moving block, and the other end face of the cross beam is arranged on the other moving block;
the second linear motors are arranged on two sides of the cross beam;
the bearing table is arranged on the cross beam;
the second linear motor is connected with the bearing table;
a second grating ruler is arranged on the second linear motor;
and a plurality of air bearings are arranged between the second linear motor and the base and between the cross beam and the base.
Further, the air bearing includes: a housing and a connector;
the connecting piece is arranged on the top surface of the shell;
an annular groove is formed in the bottom surface of the shell, and an air bag is arranged in the annular groove;
a plurality of air connectors are arranged on the side wall of the shell and are communicated with the air bag;
the air connector is provided with a plurality of conical pieces, the conical pieces are connected one by one, the cross section of each conical piece is connected with the end face with the smaller cross section and is connected with the end face with the larger cross section of the other conical piece, and the end face with the smaller cross section of the conical piece is arranged on the outermost side.
In a third aspect, the present invention further provides a detection method using the high-precision XY air floatation motion system, including:
after an air floating film is formed between the two-axis moving device and the base through the air floating bearing, the bearing platform is driven to move below the detection device through the two-axis moving device, and therefore the device on the bearing platform is detected through the detection device.
The connector has the beneficial effects that through the connector body, the connector body is internally provided with the accommodating cavity, and the shape of the accommodating cavity is matched with that of the gas connector to be connected; the two ends of the joint body in the length direction are provided with openings; the accommodating cavity is arranged at the two ends of the connector body in the length direction in an opening mode; one end face of the accommodating cavity is connected with one end face of the joint body in the length direction; a gap is reserved between the accommodating cavity and the inner wall of the joint body; a guide assembly is arranged in the joint body and is arranged between the accommodating cavity and the other end face of the joint body in the length direction; the guide assembly is suitable for guiding gas between the accommodating cavity and the inner wall of the joint body; realized that gaseous extrusion holds the chamber and makes the outer wall in close contact with who holds chamber and gas connection for it is sealed between chamber and the gas connection to hold, avoids gaseous leakage when ventilating.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and drawings.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic view of a pipe sealing joint according to the present invention;
FIG. 2 is a cross-sectional view of a pipe sealing joint of the present invention;
FIG. 3 is an enlarged schematic view of portion A of FIG. 2;
FIG. 4 is a schematic view of the conical head of the present invention in an inflated state;
FIG. 5 is a schematic view of the rotation of the compression link of the present invention;
FIG. 6 is a schematic view of the conical head of the present invention blocking the receiving cavity;
FIG. 7 is a schematic structural diagram of the high-precision XY air-floating motion system of the present invention;
FIG. 8 is a schematic view of a two-axis mobile device according to the present invention;
FIG. 9 is a schematic view of the configuration of an air bearing of the present invention;
FIG. 10 is a schematic view of the backside structure of an air bearing of the present invention.
In the figure:
1, a connector body, 11 accommodating cavities, 12 upper connectors, 13 lower connectors, 14 elastic rings, 15 conical heads, 16 ring bodies, 161 air holes, 162 guide angles, 17 protection rings, 171 through holes, 172 compression bars, 173 sliding grooves, 174 sliding blocks and 175 pressing blocks;
2, a base and 21 grooves;
the device comprises a 3-axis moving device, a 31 first linear motor, a 32 first grating ruler, a 33 moving block, a 34 crossbeam, a 35 second linear motor, a 36 second grating ruler and a 37 bearing table;
4, a detection device;
5, an air bearing, a shell 51, an annular groove 52, a connecting piece 53, an air joint 54 and an air bag 55.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Embodiment 1, as shown in fig. 1 to 10, this embodiment 1 provides a pipe sealing joint, including: the connector comprises a connector body 1, wherein an accommodating cavity 11 is formed in the connector body 1, and the shape of the accommodating cavity 11 is matched with that of an air connector 54 to be connected; the two ends of the connector body 1 in the length direction are provided with openings; the accommodating cavity 11 is arranged at two ends of the connector body 1 in the length direction in an opening mode; one end face of the accommodating cavity 11 is connected with one end face of the connector body 1 in the length direction; a gap is reserved between the accommodating cavity 11 and the inner wall of the joint body 1; a guide assembly is arranged in the joint body 1 and is arranged between the accommodating cavity 11 and the other end face of the joint body 1 in the length direction; the guide assembly is suitable for guiding gas between the accommodating cavity 11 and the inner wall of the joint body 1; the gas extrusion has been realized and has been held chamber 11 and make and hold chamber 11 and gas connection 54's outer wall in close contact with for it is sealed between chamber 11 and the gas connection 54, avoid gaseous leakage when ventilating.
In the present embodiment, the joint body 1 includes: an upper joint 12 and a lower joint 13; the upper joint 12 is connected with the lower joint 13 through an elastic ring 14; one end face of the upper joint 12 is connected with one end face of the lower joint 13; the other end face of the upper joint 12 is connected with one end face of the accommodating cavity 11; the other end surface of the accommodating cavity 11 is positioned on one side of the elastic ring 14; the guide assembly is arranged below the accommodating cavity 11; the upper joint 12 and the lower joint 13 are made of hard materials, so that the upper joint 12 is prevented from deforming when gas enters between the accommodating cavity 11 and the inner wall of the upper joint 12; the housing 11 is adapted to enclose the gas connector 54; when the shape of the air connector 54 is formed by connecting a plurality of conical pieces, the shape of the accommodating cavity 11 is matched with the shape of the air connector 54, and the air connector 54 cannot fall off after being wrapped by the accommodating cavity 11.
In this embodiment, the guide assembly includes: a conical head 15 and a ring 16; the conical head 15 is arranged at the center of the ring body 16; the smaller end of the cross section of the conical head 15 faces the other end face of the joint body 1 in the length direction; the side wall of the ring body 16 is in contact with the elastic ring 14; a plurality of air holes 161 are formed in the ring body 16 in the circumferential direction; the end face with the larger cross-sectional area of the conical head 15 faces the accommodating cavity 11, and the area of the end face with the larger cross-sectional area of the conical head 15 is larger than that of the other end face of the accommodating cavity 11; the end surface of the conical head 15 facing the accommodating cavity 11 is open, and the conical head 15 is hollow, so that when the accommodating cavity 11 needs to be blocked, the inner wall of the conical head 15 can be in contact with the accommodating cavity 11, and the gas in the air bag 55 is prevented from flowing out of the air connector 54; through the contact of the side wall of the ring body 16 and the flexible ring, the ring body 16 can move up and down along the flexible ring conveniently, and the conical head 15 can be driven to move conveniently; the air hole 161 is used for facilitating the air to enter between the accommodating cavity 11 and the inner wall of the upper joint 12 during ventilation; after the upper joint 12 is sleeved outside the gas joint 54, the accommodating cavity 11 wraps the gas joint 54, at the moment, the edge of the ring body 16 is in contact with the upper edge of the lower joint 13, at the moment, the gas is ventilated to the gas joint 54 through the joint body 1, the gas is firstly guided through the outer wall of the conical head 15, so that the gas flows to the position between the accommodating cavity 11 and the inner wall of the upper joint 12 through the gas hole 161, when the gas is filled between the accommodating cavity 11 and the inner wall of the upper joint 12, the accommodating cavity 11 is in close contact with the gas joint 54 through the pressure of the gas, the upper joint 12 is sealed with the gas joint 54, the stress of the accommodating cavity 11 is uniform through the uniform pressure of the gas, the accommodating cavity 11 is prevented from being damaged due to different pressures at different positions, and the gas joint 54 is prevented from being worn due to different pressures of the accommodating cavity 11 to different positions of the gas joint 54.
In the present embodiment, the edge of the ring 16 is provided with a chamfer 162 at a position facing the lower joint 13, and the chamfer 162 is adapted to contact with the edge of the lower joint 13; when the ring body 16 needs to be moved so that the accommodating cavity 11 is blocked by the conical head 15, the compression bar 172 can extend between the edge of the ring body 16 and the edge of the lower connector 13 through the guide angle 162, the compression bar 172 can drive the ring body 16 to move towards the accommodating cavity 11, and the accommodating cavity 11 can be blocked by the conical head 15.
In this embodiment, the elastic ring 14 is covered with a protection ring 17; a plurality of through holes 171 are circumferentially formed in the protection ring 17, and the length direction of the through holes 171 is arranged along the length direction of the joint body 1; a pressing rod 172 is hinged in the through hole 171, and the length direction of the pressing rod 172 is arranged along the length direction of the joint body 1; the protection ring 17 can protect the flexible ring, so that the air leakage of the joint body 1 caused by the damage of the flexible ring is avoided; the ring body 16 can be limited by the pressure lever 172, so that the conical head 15 is prevented from moving when the air is ventilated or the accommodating cavity 11 is blocked; the pressing rod 172 is made of flexible materials, so that the pressing block 175 can conveniently limit the pressing rod 172 when the ring body 16 is pressed or the ring body 16 is made, the pressing block 175 can enable the pressing rod 172 to be bent, and the pressing block 175 can conveniently limit the pressing rod 172.
In this embodiment, one side of the through hole 171 is provided with a pair of sliding grooves 173, and the sliding grooves 173 are disposed on the protection ring 17; one sliding groove 173 of the pair of sliding grooves 173 is disposed near the inner top surface of the through hole 171, and the other sliding groove 173 is disposed near the inner bottom surface of the through hole 171; the length direction of the sliding groove 173 is arranged along the width direction of the through hole 171, and the sliding groove 173 is communicated with the through hole 171; a sliding block 174 which is matched with the sliding groove 173 is arranged in the sliding groove 173, and a pressing block 175 is arranged on one surface of the sliding block 174 facing the interior of the joint body 1; the sliding block 174 is adapted to slide along the sliding slot 173, so as to drive the pressing block 175 to extend out of the sliding slot 173, so that the pressing block 175 is in contact with the pressing rod 172; the pressing block 175 can slide out of the sliding groove 173 or slide into the sliding groove 173 with the movement of the sliding block 174, and when the pressing block 175 slides out of the sliding groove 173 to limit the pressing rod 172, the sliding block 174 is partially stored in the sliding groove 173.
In this embodiment, during ventilation, the connector body 1 is sleeved on the air connector 54, the air connector 54 is ventilated through the connector body 1, at this time, the ring body 16 is in contact with the edge of the lower connector 13, air flows between the accommodating cavity 11 and the inner wall of the upper connector 12 through the air hole 161, the accommodating cavity 11 is in close contact with the outer wall of the air connector 54 through the pressure of the air, at this time, the pressing rod 172 is in contact with the ring body 16 by extruding the elastic ring 14 (i.e., the pressing rod 172 presses the ring body 16), and the sliding block 174 slides along the sliding groove 173 to drive the pressing block 175 to extend out of the sliding groove 173, so that the pressing block 175 is in contact with the pressing rod 172, and the gas is prevented from driving the ring body 16 to move; after the accommodating cavity 11 is tightly contacted with the outer wall of the gas joint 54 through the pressure of the gas, the gas enters the gas joint 54; after ventilation is finished, the sliding block 174 slides along the sliding groove 173 to drive the pressing block 175 to be accommodated in the sliding groove 173, so that the pressing block 175 is not in contact with the pressing rod 172, at the moment, the pressing rod 172 is rotated 180 degrees, the pressing rod 172 extends into the edge of the guide corner 162 and the lower joint 13, the pressing rod 172 extrudes the elastic ring 14 to be in contact with the guide corner 162, the ring body 16 is driven to move towards the accommodating cavity 11 along with the continuous rotation of the pressing rod 172, the conical head 15 is covered on the accommodating cavity 11, the pressing rod 172 plays a supporting role on the ring body 16, at the moment, the sliding block 174 slides along the sliding groove 173 to drive the pressing block 175 to extend out of the sliding groove 173, the pressing block 175 is in contact with the pressing rod 172, when the conical head 15 is covered on the accommodating cavity 11, the fused cavity can be blocked by the conical head 15, and gas in the gas bag 55 is prevented from flowing out of the gas joint 54; when the gasbag 55 at aerostatic bearing 5 is in the uninflated state, the venthole of gasbag 55 is stopped up by ring channel 52 inner wall, along with the gradual inflation of gasbag 55, the venthole of gasbag 55 no longer is stopped up by ring channel 52 inner wall, make gaseous from gasbag 55 venthole outflow, make form the air supporting membrane between aerostatic bearing 5 and base 2 surface or the base 2 lateral wall, reduce the frictional force between diaxon mobile device 3 and the base 2, will hold chamber 11 and block up through conical head 15 after ventilating the end, avoid gaseous from flowing out from air connector 54, gaseous venthole outflow that can only follow gasbag 55 this moment, along with the reducing of gasbag 55, the venthole is stopped up again, still remain partial gas in the gasbag 55 this moment, avoid gasbag 55 inner wall to glue together, avoid not using for a long time and make gasbag 55 glue together and damage.
In this embodiment, when cone 15 lid is established on holding chamber 11, can block up the melt-down chamber through cone 15, if equipment (for example high accuracy XY air supporting motion system) does not use for a long time this moment, can demolish pipeline that pipeline sealing joint connects, still can make cone 15 lid establish in holding chamber 11 through briquetting 175 to the spacing of depression bar 172 this moment, avoid the gasbag 55 interior gas to discharge completely to avoid gasbag 55 adhesion. Compared with the traditional method of directly switching off the air path through the pump for sealing, the air bag 55 is sealed by the pipeline sealing connector, so that the equipment can be conveniently separated from the pump, and the equipment can be conveniently moved.
Embodiment 2, on the basis of embodiment 1, this embodiment 2 further provides a high-precision XY air floatation motion system using the pipe sealing joint in embodiment 1, including: the device comprises a base 2 and a two-axis moving device 3, wherein the two-axis moving device 3 is arranged in the base 2, and a bearing table 37 is arranged on the two-axis moving device 3; the detection device 4 is arranged on the base 2, the detection device 4 is arranged above the two-axis moving device 3, the two-axis moving device 3 is suitable for driving the bearing table 37 to move below the detection device 4, and the detection device 4 is suitable for detecting devices on the bearing table 37; the two-axis moving device 3 is provided with a plurality of air bearings 5, the air bearings 5 are suitable for forming an air floating film between the two-axis moving device 3 and the base 2, and the air bearings 5 are provided with pipeline sealing joints for ventilating the air bearings 5; an air floating film is formed between the two-axis moving device 3 and the base 2 through an air floating bearing 5, so that the friction between the two-axis moving device 3 and the base 2 is reduced, and the motion inertia of the system is obviously reduced.
In this embodiment, the base 2 uses a high-precision granite substrate as an air-bearing surface, and has high flatness, low expansion coefficient and more stable structure.
In the present embodiment, the two-axis moving apparatus 3 includes: a pair of Y-axis moving mechanism and X-axis moving mechanism; the Y-axis moving mechanism is arranged on the base 2; the X-axis moving mechanism is arranged between the two Y-axis moving mechanisms; the bearing table 37 is arranged on the X-axis moving mechanism; the bearing table 37 can be driven to move by the Y-axis moving mechanism and the X-axis moving mechanism, so that the detection device 4 can conveniently detect all devices on the bearing table 37.
In this embodiment, the Y-axis moving mechanism includes: a first linear motor 31; the first linear motor 31 is arranged in a groove 21 formed in the side wall of the base 2; a moving block 33 matched with the first linear motor 31 is arranged on the first linear motor 31; a first grating ruler 32 is arranged on the side wall of the base 2, the first grating ruler 32 is arranged along the length direction of the groove 21, and the first grating ruler 32 is arranged below the groove 21; a plurality of air bearings 5 are arranged between the moving block 33 and the side wall of the base 2; the actual movement parameters of the first linear motor 31 can be detected by matching the first grating with the reading head, so that the comparison of the movement parameters set by the first linear motor 31 is facilitated, the movement state of the first linear motor 31 is adjusted, a closed loop is formed, and the detection or processing precision is higher; through the Y-axis moving mechanisms which are symmetrically arranged, the structure is symmetrical, and the stress is more uniform; the first linear motor 31 can move along the inner wall of the groove 21, that is, in the height direction of the groove 21, and there is a gap between the first linear motor 31 and the inner wall of the groove 21 in the width direction, so that the linear movement of the first linear motor 31 can be ensured when each air bearing 5 is used.
In this embodiment, the X-axis moving mechanism includes: a cross beam 34 and a pair of second linear motors 35; the cross beam 34 is arranged between the two moving blocks 33, that is, one end surface of the cross beam 34 is arranged on one moving block 33, and the other end surface of the cross beam 34 is arranged on the other moving block 33; the second linear motors 35 are arranged on two sides of the cross beam 34; the bearing table 37 is arranged on the cross beam 34; the second linear motor 35 is connected with the bearing table 37; a second grating ruler 36 is arranged on the second linear motor 35; a plurality of air bearings 5 are arranged between the second linear motor 35 and the base 2 and between the cross beam 34 and the base 2; the actual movement parameters of the second linear motor 35 can be detected by matching the second grating with the reading head, so that the comparison of the movement parameters set by the second linear motor 35 is facilitated, the movement state of the second linear motor 35 is adjusted, a closed loop is formed, and the detection or processing precision is higher; through the second linear motor 35 that the symmetry set up, the structure symmetry, the atress is more even. High-precision grating rulers (a first grating ruler 32 and a second grating ruler 36) and reading heads are adopted as feedback of the first linear motor 31 and the second linear motor 35, the grating distance and the signal period are small, the positioning precision and the repeated positioning precision are high, and the high-precision detection and processing are guaranteed. The silicon carbide is used as the material of the cross beam 34, the cross beam 34 is used as the guide rail of the bearing table 37, the weight is light, the rigidity is strong, the expansion coefficient is low, the surface flatness is high, the integral weight of the platform is greatly reduced, and the integral rigidity of the platform is improved.
In the present embodiment, the air bearing 5 includes: a housing 51 and a connector 53; the connector 53 is disposed on the top surface of the housing 51; an annular groove 52 is formed in the bottom surface of the shell 51, and an air bag 55 is arranged in the annular groove 52; a plurality of air connectors 54 are arranged on the side wall of the shell 51, and the air connectors 54 are communicated with the air bag 55; the air connector 54 is provided with a plurality of conical pieces, the conical pieces are connected one by one, the end face with the smaller cross section of each conical piece is connected with the end face with the larger cross section of the other conical piece, and the end face with the smaller cross section of the conical piece is arranged on the outermost side. The air bearing 5 is adopted for connection, the whole system has no friction, the air film is even in thickness, the integral motion inertia of the XY platform is low, and high-speed motion and stable motion tracks can be realized.
In summary, according to the connector body 1, the accommodating cavity 11 is arranged in the connector body 1, and the shape of the accommodating cavity 11 is matched with the shape of the gas connector 54 to be connected; the two ends of the connector body 1 in the length direction are provided with openings; the accommodating cavity 11 is arranged at two ends of the connector body 1 in the length direction in an opening mode; one end face of the accommodating cavity 11 is connected with one end face of the connector body 1 in the length direction; a gap is reserved between the accommodating cavity 11 and the inner wall of the joint body 1; a guide assembly is arranged in the joint body 1 and is arranged between the accommodating cavity 11 and the other end face of the joint body 1 in the length direction; the guide assembly is suitable for guiding gas between the accommodating cavity 11 and the inner wall of the joint body 1; the gas extrusion has been realized and has been held chamber 11 and make and hold chamber 11 and gas connection 54's outer wall in close contact with for it is sealed between chamber 11 and the gas connection 54, avoid gaseous leakage when ventilating.
The components selected for use in the present application (components not illustrated for specific structures) are all common standard components or components known to those skilled in the art, and the structure and principle thereof can be known to those skilled in the art through technical manuals or through routine experimentation.
In the description of the embodiments of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other ways. The above-described embodiments of the apparatus are merely illustrative, and for example, the division of the units is only one logical division, and there may be other divisions when actually implemented, and for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection of devices or units through some communication interfaces, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one position, or may be distributed on multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (13)
1. A pipe sealing joint, comprising:
the connector comprises a connector body, wherein an accommodating cavity is formed in the connector body, and the shape of the accommodating cavity is matched with that of a gas connector to be connected;
the two ends of the joint body in the length direction are provided with openings;
the accommodating cavity is arranged at the two ends of the connector body in the length direction in an opening mode;
one end face of the accommodating cavity is connected with one end face of the joint body in the length direction;
a gap is reserved between the accommodating cavity and the inner wall of the joint body;
a guide assembly is arranged in the joint body and is arranged between the accommodating cavity and the other end face of the joint body in the length direction;
the guide assembly is adapted to guide gas between the receiving cavity and the inner wall of the fitting body.
2. The line sealing joint of claim 1,
the joint body includes: an upper joint and a lower joint;
the upper joint is connected with the lower joint through an elastic ring;
one end face of the upper joint is connected with one end face of the lower joint;
the other end face of the upper joint is connected with one end face of the accommodating cavity;
the other end surface of the accommodating cavity is positioned on one side of the elastic ring;
the guide assembly is disposed below the receiving cavity.
3. The line sealing coupling of claim 2,
the guide assembly includes: a conical head and a ring body;
the conical head is arranged at the center of the ring body;
the smaller end of the cross section of the conical head faces the other end face of the joint body in the length direction;
the side wall of the ring body is in contact with the elastic ring;
a plurality of air holes are circumferentially formed in the ring body;
the end face with the larger cross-sectional area of the conical head faces the accommodating cavity, and the area of the end face with the larger cross-sectional area of the conical head is larger than that of the other end face of the accommodating cavity.
4. The line sealing joint of claim 3,
the position that the border of ring body is towards the lower clutch is provided with the lead angle, and the lead angle is suitable for the border contact with the lower clutch.
5. The line sealing joint of claim 4,
the elastic ring outer cover is provided with a protection ring;
a plurality of through holes are formed in the circumferential direction of the protection ring, and the length direction of the through holes is arranged along the length direction of the joint body;
a pressing rod is hinged in the through hole, and the length direction of the pressing rod is arranged along the length direction of the joint body.
6. The line sealing joint of claim 5,
one side of the through hole is provided with a pair of sliding chutes which are arranged on the protection ring;
one of the chutes is arranged close to the inner top surface of the through hole, and the other chute is arranged close to the inner bottom surface of the through hole;
the length direction of the sliding groove is arranged along the width direction of the through hole, and the sliding groove is communicated with the through hole;
a sliding block matched with the sliding chute is arranged in the sliding chute, and a pressing block is arranged on one surface of the sliding block facing the interior of the joint body;
the sliding block is suitable for sliding along the sliding groove and drives the pressing block to extend out of the sliding groove, so that the pressing block is in contact with the pressing rod.
7. The line sealing coupling of claim 6,
during ventilation, the joint body is sleeved on the air joint, the air joint is ventilated through the joint body, the ring body is in contact with the edge of the lower joint at the moment, air flows between the accommodating cavity and the inner wall of the upper joint through the air hole, the accommodating cavity is in close contact with the outer wall of the air joint through the pressure of the air, the pressure rod is in contact with the ring body through the extrusion elastic ring at the moment, and the slide block slides along the slide groove to drive the press block to extend out of the slide groove, so that the press block is in contact with the pressure rod, and the gas is prevented from driving the ring body to move;
after the containing cavity is tightly contacted with the outer wall of the gas joint through the pressure of the gas, the gas enters the gas joint;
after the ventilation, follow through the slider during the spout slides and drives briquetting income spout for briquetting and depression bar no longer contact, rotate the depression bar this moment, make depression bar extrusion elastic ring and lead angle contact, and along with the depression bar continues to rotate, drive the ring body and remove to holding the chamber direction, make the toper skull establish on holding the chamber, follow through the slider this moment the spout slides and drives the briquetting and stretch out from the spout, makes briquetting and depression bar contact.
8. A high-precision XY air bearing motion system using the line sealing joint of claim 1, comprising:
a base seat is arranged on the base seat,
the two-axis moving device is arranged in the base and is provided with a bearing table;
the detection device is arranged on the base, is arranged above the two-axis moving device, is suitable for driving the bearing table to move below the detection device, and is suitable for detecting devices on the bearing table;
the two-axis moving device is provided with a plurality of air bearings, the air bearings are suitable for forming an air floating film between the two-axis moving device and the base, and the air bearings are provided with pipeline sealing joints for ventilating the air bearings.
9. The high accuracy XY air motion system of claim 8,
the two-axis moving apparatus includes: a pair of Y-axis moving mechanism and X-axis moving mechanism;
the Y-axis moving mechanism is arranged on the base;
the X-axis moving mechanism is arranged between the two Y-axis moving mechanisms;
the plummer sets up on X axle moving mechanism.
10. The high accuracy XY air thrust motion system of claim 9,
the Y-axis moving mechanism includes: a first linear motor;
the first linear motor is arranged in a groove formed in the side wall of the base;
a moving block matched with the first linear motor is arranged on the first linear motor;
a first grating ruler is arranged on the side wall of the base, the first grating ruler is arranged along the length direction of the groove, and the first grating ruler is arranged below the groove;
and a plurality of air bearings are arranged between the moving block and the side wall of the base.
11. The high accuracy XY air bearing motion system of claim 10,
the X-axis moving mechanism includes: the beam and the pair of second linear motors;
the cross beam is arranged between the two moving blocks, namely one end face of the cross beam is arranged on one moving block, and the other end face of the cross beam is arranged on the other moving block;
the second linear motors are arranged on two sides of the cross beam;
the bearing table is arranged on the cross beam;
the second linear motor is connected with the bearing table;
a second grating ruler is arranged on the second linear motor;
and a plurality of air bearings are arranged between the second linear motor and the base and between the cross beam and the base.
12. The high accuracy XY air bearing motion system of claim 10,
the air bearing includes: a housing and a connector;
the connecting piece is arranged on the top surface of the shell;
an annular groove is formed in the bottom surface of the shell, and an air bag is arranged in the annular groove;
a plurality of air connectors are arranged on the side wall of the shell and are communicated with the air bag;
the air connector is provided with a plurality of conical pieces, the conical pieces are connected one by one, the cross section of each conical piece is connected with the end face with the smaller cross section and is connected with the end face with the larger cross section of the other conical piece, and the end face with the smaller cross section of the conical piece is arranged on the outermost side.
13. A method of inspection using the high-precision XY air bearing motion system of claim 8, comprising:
after an air floating film is formed between the two-axis moving device and the base through the air floating bearing, the bearing platform is driven to move below the detection device through the two-axis moving device, and therefore the device on the bearing platform is detected through the detection device.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310278652.0A CN115978324A (en) | 2023-03-21 | 2023-03-21 | Pipeline sealing joint and high-precision XY air floatation movement system and method |
| CN202420046169.XU CN221436440U (en) | 2023-03-21 | 2024-01-09 | High-precision XY air floatation movement platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310278652.0A CN115978324A (en) | 2023-03-21 | 2023-03-21 | Pipeline sealing joint and high-precision XY air floatation movement system and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115978324A true CN115978324A (en) | 2023-04-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310278652.0A Pending CN115978324A (en) | 2023-03-21 | 2023-03-21 | Pipeline sealing joint and high-precision XY air floatation movement system and method |
| CN202420046169.XU Active CN221436440U (en) | 2023-03-21 | 2024-01-09 | High-precision XY air floatation movement platform |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202420046169.XU Active CN221436440U (en) | 2023-03-21 | 2024-01-09 | High-precision XY air floatation movement platform |
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| CN (2) | CN115978324A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0666446A1 (en) * | 1994-02-08 | 1995-08-09 | Osamu Gouda | Conduit coupling |
| DE102006015918A1 (en) * | 2005-05-12 | 2006-11-16 | E. Hawle Armaturenwerke Gmbh | valves |
| CN208474706U (en) * | 2018-06-21 | 2019-02-05 | 湖南格仑新材股份有限公司 | A kind of stainless steel tube air seal test quick coupling |
| CN216009241U (en) * | 2021-09-05 | 2022-03-11 | 中国长江三峡集团有限公司 | Rubber wheel structure for reducing friction of steel wire rope |
| CN217739587U (en) * | 2022-08-19 | 2022-11-04 | 江苏三米科思半导体设备有限公司 | Full-flexible optical five-dimensional adjusting device |
| CN115319486A (en) * | 2022-10-12 | 2022-11-11 | 江苏三米科思半导体设备有限公司 | High-precision XY air floatation motion system and processing method thereof |
| CN115773411A (en) * | 2023-02-14 | 2023-03-10 | 山东嘉富能源科技有限公司 | High-sealing gas pressurization circulating pipeline |
| CN115839807A (en) * | 2022-09-19 | 2023-03-24 | 青岛橡六胶管有限公司 | Rubber tube air tightness detection device |
-
2023
- 2023-03-21 CN CN202310278652.0A patent/CN115978324A/en active Pending
-
2024
- 2024-01-09 CN CN202420046169.XU patent/CN221436440U/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0666446A1 (en) * | 1994-02-08 | 1995-08-09 | Osamu Gouda | Conduit coupling |
| DE102006015918A1 (en) * | 2005-05-12 | 2006-11-16 | E. Hawle Armaturenwerke Gmbh | valves |
| CN208474706U (en) * | 2018-06-21 | 2019-02-05 | 湖南格仑新材股份有限公司 | A kind of stainless steel tube air seal test quick coupling |
| CN216009241U (en) * | 2021-09-05 | 2022-03-11 | 中国长江三峡集团有限公司 | Rubber wheel structure for reducing friction of steel wire rope |
| CN217739587U (en) * | 2022-08-19 | 2022-11-04 | 江苏三米科思半导体设备有限公司 | Full-flexible optical five-dimensional adjusting device |
| CN115839807A (en) * | 2022-09-19 | 2023-03-24 | 青岛橡六胶管有限公司 | Rubber tube air tightness detection device |
| CN115319486A (en) * | 2022-10-12 | 2022-11-11 | 江苏三米科思半导体设备有限公司 | High-precision XY air floatation motion system and processing method thereof |
| CN115773411A (en) * | 2023-02-14 | 2023-03-10 | 山东嘉富能源科技有限公司 | High-sealing gas pressurization circulating pipeline |
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| Publication number | Publication date |
|---|---|
| CN221436440U (en) | 2024-07-30 |
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Application publication date: 20230418 |