CN115963300A

CN115963300A - Probe card device and double-arm probe

Info

Publication number: CN115963300A
Application number: CN202011373644.7A
Authority: CN
Inventors: 谢开杰; 苏伟志; 陈弘明; 李帅
Original assignee: Taiwan Zhonghua Precision Measurement Technology Co ltd
Current assignee: Taiwan Zhonghua Precision Measurement Technology Co ltd
Priority date: 2020-11-30
Filing date: 2020-11-30
Publication date: 2023-04-14

Abstract

The invention discloses a probe card device and a double-arm probe, wherein the double-arm probe has a needle length and comprises a bifurcation end part and a testing end part which are respectively positioned at two ends. The outer surface of the dual-arm probe includes two broad sides on opposite sides, respectively. The double-arm probe extends from the bifurcation of the bifurcated end part to the testing end part to form a separation groove penetrating from one of the two wide side surfaces to the other one, so that two arms separated from each other by a distance are defined by the separation groove. A groove length of the separation groove of the dual-arm probe is between 50% and 90% of the needle length. In the cross sections of the two support arms of the double-arm probe, the cross section area of any one support arm is 90-110% of the cross section area of the other support arm. Accordingly, the dual-arm probe can be designed by the structure of the two support arms, so that the multiple dual-arm probes can have similar electrical conduction characteristics and similar mechanical characteristics.

Description

Probe card device and double-arm probe

Technical Field

The present disclosure relates to probe cards, and particularly to a probe card apparatus and a dual-arm probe.

Background

In order to conform to the circuit layout of the signal adapter board, the conventional probe card device comprises a plurality of conductive probes of different types; however, the cross-sectional areas of the plurality of conductive probes are different from each other, resulting in different electrical conduction characteristics (e.g., resistance) and different mechanical characteristics (e.g., contact force).

The present inventors have considered that the above-mentioned drawbacks can be improved, and as a result, they have conducted intensive studies and applied scientific principles, and finally have come up with the present invention which is designed reasonably and effectively to improve the above-mentioned drawbacks.

Disclosure of Invention

An object of the embodiments of the present invention is to provide a probe card device and a dual-arm probe, which can effectively overcome the possible defects of the conventional conductive probe.

The embodiment of the invention discloses a probe card device, which comprises: a first guide plate unit and a second guide plate unit which are arranged at intervals; the double-arm probes penetrate through the first guide plate unit and the second guide plate unit; each double-arm type probe is defined with a length direction and has a needle length in the length direction, and the outer surface of each double-arm type probe comprises two wide side surfaces which are parallel to the length direction and are respectively positioned at two opposite sides; wherein each dual-arm probe comprises: a bifurcated end portion located on an outer side of the first guide plate unit remote from the second guide plate unit, and having a bifurcated opening; the testing end part is positioned at the outer side of the second guide plate unit far away from the first guide plate unit and is used for detachably abutting against an object to be tested; each double-arm probe extends from the fork opening along the length direction towards the test end part to form a separation groove which penetrates from one of the two wide side surfaces to the other one of the two wide side surfaces, so that each double-arm probe defines two support arms which are separated from each other by a distance through the separation groove; wherein, a groove length of the separation groove of each double-arm probe in the length direction is 50% -90% of the length of the needle, and the distance of one double-arm probe in the multiple double-arm probes is different from the distance of the other double-arm probe; in the cross section of the two support arms of each double-arm probe in the vertical length direction, the cross section area of any one support arm is 90-110% of the cross section area of the other support arm.

Preferably, at least one of the two arm-type probes is formed with at least one spacing rib in a protruding shape on one of two inner surfaces of the two arms facing each other; when the first guide plate unit and the second guide plate unit are obliquely staggered with each other, at least one double-arm probe with at least one spacing rib is provided, and two support arms of the probe are kept spaced from each other through the at least one spacing rib.

Preferably, in the at least one double-arm probe having at least one partition rib, the other of the two inner surfaces is concavely formed with at least one limit notch having a position corresponding to the at least one partition rib, and a depth of the at least one limit notch is smaller than a height of the at least one partition rib.

Preferably, the location of each dual-arm probe in the first guide unit defines a first connection portion, and the location of each dual-arm probe in the second guide unit defines a second connection portion; in at least one dual-arm probe, the dividing groove extends from the dividing opening to the second connecting portion.

Preferably, a portion of each of the two-armed probes located between the first and second guide units is defined as a stroke portion; in each of the two-arm probes, the width of each of the two end portions of the stroke portion on either one of the wide side surfaces is larger than the width of the main body portion of the stroke portion located between the two end portions on either one of the wide side surfaces.

Preferably, the probe card apparatus further comprises a signal adapter plate adjacent to the first guide plate unit; in at least one double-arm probe, two support arms have different lengths in the length direction, and only one of the two support arms abuts against the signal adapter plate.

Preferably, the probe card apparatus further comprises a signal adapter plate adjacent to the first guide plate unit; in at least one double-arm probe, two support arms have the same length in the length direction, and the two support arms are abutted against the signal adapter plate together.

Preferably, the outer surface of each double-arm probe comprises two narrow sides parallel to the length direction and located on opposite sides respectively; in each double-arm probe, the thickness of any one arm on the wide side is 20% -100% of the width of any one narrow side.

The embodiment of the invention also discloses a double-arm probe, which is defined with a length direction and has a needle length in the length direction, and the outer surface of the double-arm probe comprises two wide side surfaces which are parallel to the length direction and are respectively positioned at two opposite sides; wherein, two arm-type probes include: a bifurcated end having a bifurcated mouth; the test end part is detachably abutted against an object to be tested, and the bifurcate end part and the test end part are respectively positioned at two ends of the double-arm probe; the double-arm probe extends from the fork opening along the length direction towards the test end part to form a separation groove which penetrates from one of the two wide side surfaces to the other one of the two wide side surfaces, so that the double-arm probe defines two support arms which are separated from each other by a distance through the separation groove; wherein, the length of one groove of the separation groove of the double-arm probe in the length direction is 50-90% of the length of the needle; wherein, in the cross section of the two support arms of the double-arm probe in the vertical length direction, the cross section area of any support arm is 90-110% of the cross section area of the other support arm.

Preferably, the double-arm probe is provided with at least one protruding spacing rib on one of two inner surfaces of the two support arms facing each other, wherein the other inner surface is concavely provided with at least one limiting notch corresponding to the at least one spacing rib in position, and the depth of the at least one limiting notch is smaller than the height of the at least one spacing rib.

In summary, the probe card apparatus according to the embodiment of the invention may include a plurality of dual-arm probes having different structures (e.g., the distance of one of the dual-arm probes is different from the distance of another dual-arm probe) based on the same structural design principle, so as to conform to the circuit layout on the signal adapter board.

Furthermore, the dual-arm probe according to the embodiment of the present invention can be designed by the structure of the two arms (e.g., the cross-sectional area of one arm is 90% -110% of the cross-sectional area of the other arm), so that a plurality of dual-arm probes can have similar electrical conductivity (e.g., resistance) and mechanical properties (e.g., contact force).

For a better understanding of the features and technical content of the present invention, reference is made to the following detailed description of the invention and the accompanying drawings, which are provided for illustration purposes only and are not intended to limit the scope of the invention in any way.

Drawings

Fig. 1 is a schematic plan view of a probe card device according to a first embodiment of the present invention.

FIG. 2 is a schematic plan view of the probe card apparatus of FIG. 1 with the first guide plate and the second guide plate displaced from each other.

FIG. 3 is a schematic perspective view of the dual-arm probe of FIG. 1.

Fig. 4 is a schematic cross-sectional view of fig. 1 along the sectional line IV-IV.

Fig. 5 is a perspective view of another embodiment of a dual-arm probe according to the first embodiment of the present invention.

Fig. 6 is an enlarged schematic view of a portion VI of fig. 1.

Fig. 7 is an enlarged view of section VII of fig. 2.

Fig. 8 is an enlarged schematic view of a portion VIII of fig. 1.

Fig. 9 is a schematic perspective view of a dual-arm probe according to a second embodiment of the present invention.

Fig. 10 is an enlarged schematic view of a portion X of fig. 9.

Fig. 11 is a schematic perspective view of a dual-arm probe according to a third embodiment of the present invention.

Fig. 12 is a perspective view of another embodiment of a dual-arm probe according to a third embodiment of the present invention.

Detailed Description

The following description will be made by way of specific embodiments of the present disclosure on embodiments of a "probe card apparatus and a dual-arm probe", and those skilled in the art will understand the advantages and effects of the present disclosure from the disclosure of the present disclosure. The invention is capable of other and different embodiments and its several details are capable of modification and various other changes, which can be made in various details within the specification and without departing from the spirit and scope of the invention. The drawings of the present invention are for illustrative purposes only and are not intended to be drawn to scale. The following embodiments will further explain the related art of the present invention in detail, but the disclosure is not intended to limit the scope of the present invention.

It will be understood that, although the terms first, second, third, etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are used primarily to distinguish one element from another element or from one signal to another signal. Additionally, the term "or" as used herein is intended to include any one or combination of the associated listed items, as the case may be.

[ example one ]

Fig. 1 to 8 show a first embodiment of the present invention. As shown in fig. 1 and fig. 2, the present embodiment discloses a probe card apparatus 1000, which includes a probe head 100 and a signal adapting board 200 abutting against one side of the probe head 100 (e.g., the top side of the probe head 100 in fig. 1), and the other side of the probe head 100 (e.g., the bottom side of the probe head 100 in fig. 1) is used for abutting against a Device Under Test (DUT) (not shown), such as a semiconductor wafer.

It should be noted that, for the convenience of understanding the present embodiment, the drawings only show a partial structure of the probe card apparatus 1000, so as to clearly show the structure and connection relationship of the components of the probe card apparatus 1000, but the invention is not limited by the drawings. The respective component configurations of the probe head 100 and the connection relationship thereof will be described below.

As shown in fig. 1, the probe head 100 includes a first guide plate unit 1, a second guide plate unit 2 spaced apart from the first guide plate unit 1, a spacer 3 clamped between the first guide plate unit 1 and the second guide plate unit 2, and a plurality of dual-arm probes 4 penetrating through the first guide plate unit 1 and the second guide plate unit 2.

It should be noted that the dual-arm probe 4 is described in the embodiment by matching the first guide plate unit 1, the second guide plate unit 2 and the partition plate 3, but the invention is not limited thereto. For example, in other embodiments not shown, the dual-arm probe 4 can be used independently (e.g., sold) or with other components.

In the present embodiment, the first guide plate unit 1 includes a first guide plate, and the second guide plate unit 2 includes a second guide plate. However, in other embodiments not shown in the present invention, the first guide plate unit 1 may include a plurality of first guide plates (and a spacer sandwiched between two adjacent first guide plates), and the second guide plate unit 2 may include a plurality of second guide plates (and a spacer sandwiched between two adjacent second guide plates), the plurality of first guide plates may be disposed to be offset from each other, the plurality of second guide plates may be disposed to be offset from each other, and the first guide plate unit 1 may be disposed to be offset from each other with respect to the second guide plate unit 2.

Further, the partition plate 3 may be of an annular configuration, and the partition plate 3 is clamped to the corresponding peripheral portions of the first guide plate unit 1 and the second guide plate unit 2, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the partition plate 3 of the probe card apparatus 1000 may be omitted or replaced by other components.

It should be noted that although the plurality of dual-arm probes 4 include at least two different structures in the present embodiment, the structural design principle of at least two types of dual-arm probes 4 is substantially the same, so for convenience of description, the same part of the structural design principle of a single dual-arm probe 4 is described below, but the present invention is not limited thereto. For example, in other embodiments not shown in the present disclosure, the probe head 100 may also include at least two types of the dual-arm probes 4 and at least one existing conductive probe in a linear shape.

In order to understand the structure of the double-arm probe 4, the structure of the double-arm probe 4 will be described below in a case where the first guide unit 1 is not disposed at a position offset from the second guide unit 2.

As shown in fig. 1 and 3, the double-arm probe 4 is of an integrally formed one-piece structure, and the double-arm probe 4 is substantially linear and defines a longitudinal direction L. The double-arm probe 4 has a needle length L4 in the length direction L, and the outer surface of the double-arm probe 4 includes two wide side surfaces 4a and two narrow side surfaces 4b. The two wide side surfaces 4a and the two narrow side surfaces 4b are parallel to the length direction L, the two wide side surfaces 4a are respectively located at two opposite sides of the double-arm probe 4, and the two narrow side surfaces 4b are respectively located at two opposite sides of the double-arm probe 4.

In another aspect, the dual-arm probe 4 includes a bifurcated end 41 and a testing end 42 respectively located at two ends thereof, a first connecting portion 43 connected to the bifurcated end 41, a second connecting portion 44 connected to the testing end 42, and a stroke portion 45 connecting the first connecting portion 43 and the second connecting portion 44. That is, the dual-arm probe 4 sequentially includes the branch end 41, the first connection portion 43, the stroke portion 45, the second connection portion 44 and the testing end 42 along the length direction L, but the invention is not limited thereto.

Wherein the branch end 41 is located at an outer side of the first board unit 1 (e.g. the upper side of the first board unit 1) far away from the second board unit 2 and is used for abutting against the signal adapter board 200 adjacent to the first board unit 1; the testing end portion 42 is located at an outer side of the second guide plate unit 2 (e.g., a lower side of the second guide plate unit 2) far away from the first guide plate unit 1, and is used for detachably abutting against the object to be tested adjacent to the second guide plate unit 2. Furthermore, the first connecting portion 43 is located in the first guide plate unit 1, the second connecting portion 44 is located in the second guide plate unit 2, and the stroke portion 45 is located between the first guide plate unit 1 and the second guide plate unit 2.

In more detail, the bifurcated end portion 41 has a bifurcated opening 411, and the two-arm probe 4 extends from the bifurcated opening 411 toward the testing end portion 42 along the length direction L to form a separation groove 4c penetrating from one of the two wide side surfaces 4a to the other so that the two-arm probe 4 defines two arms 4D spaced apart from each other by a distance D4D through the separation groove 4c.

Wherein the distance D4D of one of the dual-arm probes 4 of the plurality of dual-arm probes 4 is different from the distance D4D of another one of the dual-arm probes 4; that is, the two-arm probes 4 may have different structures based on the same structural design principle, so as to conform to the circuit layout on the signal adapter board 200.

Furthermore, a groove length L4c of the separation groove 4c in the longitudinal direction L is between 50% and 90% of the needle length L4. As shown in fig. 1 and 4, in the cross-section of the two arm portions 4d of each of the two arm-type probes 4 perpendicular to the longitudinal direction L, the cross-sectional area of one arm portion 4d is 90% to 110% (e.g., 100%) of the cross-sectional area of the other arm portion 4d, and the thickness T4d of the arm portion 4d on the wide side surface 4a is 20% to 100% of the width W4b of the narrow side surface 4b. It should be noted that the cross-sectional area does not include the following spacing rib 4d2 and limiting notch 4d3 in the present embodiment.

Accordingly, the two-arm probes 4 having different structures can have similar electrical conductivity (e.g., resistance) and mechanical properties (e.g., contact force) by the two arms 4d of each of the two-arm probes 4 having similar cross-sectional areas. The cross-sectional area of any arm 4d of each of the two-arm probes 4 is preferably equal to the cross-sectional area of the other arm 4d, so that the two-arm probes 4 have substantially the same electrical conductivity and mechanical properties.

It should be noted that any one of the two-arm probes 4 can be adjusted in detail on the two arms 4d to meet different design requirements. For example, at least one of the two-arm probes 4 may include at least one of the following features, but the invention is not limited thereto. For example, in other embodiments not shown in the present disclosure, the dual-arm probe 4 may not include any of the following features.

As shown in fig. 1 and fig. 3, the two support arms 4d have the same length in the length direction L, and the two support arms 4d are pressed against the signal adapting board 200 together. That is, the branch opening 411 is recessed in the distal end surface of the branch end portion 41, and the branch opening 411 is communicated with the separation groove 4c substantially in the longitudinal direction L.

In the present embodiment, the separation groove 4c extends from the branch opening 411 to the second connection portion 44; that is, the end of the separation groove 4c is located in the second guide plate unit 2, but the present invention is not limited thereto. For example, as shown in fig. 5, the separation groove 4c of at least one of the two-arm probes 4 may also extend from the bifurcation 411 to the approximate center of the stroke portion 45.

In more detail, as shown in fig. 1, 6 and 7, the double-arm probe 4 is formed with at least one protruding spacing rib 4D2 on one inner surface 4D1 of two inner surfaces 4D1 of the two support arms 4D facing each other, and at least one limiting notch 4D3 corresponding to the at least one spacing rib 4D2 is formed in the other inner surface 4D1 in a recessed manner, and a depth D4D3 of the at least one limiting notch 4D3 is smaller than a height H4D2 of the at least one spacing rib 4D2.

In this embodiment, as shown in fig. 1 and fig. 6, the double-arm probe 4 is formed with a plurality of spacing ribs 4d2 arranged at intervals along the length direction L on the inner surface 4d1 of one of the support arms 4d, and the other support arm 4d is formed with a plurality of limiting notches 4d3 respectively facing the spacing ribs 4d2 on the inner surface 4d1 thereof, but the invention is not limited thereto. For example, in other embodiments not shown in the present invention, the dual-arm probe 4 may be formed with at least one spacing rib 4d2 and at least one limiting notch 4d3 on each arm 4d, and the position of any spacing rib 4d2 corresponds to one limiting notch 4d3; alternatively, the double-arm probe 4 may be configured such that at least one of the spacer ribs 4d2 is formed only on at least one of the arms 4d, but any of the stopper notches 4d3 is not formed.

Accordingly, as shown in fig. 1 and 2, when the first guide plate unit 1 and the second guide plate unit 2 are diagonally displaced from each other, at least one of the two-arm probes 4 having at least one of the spacing ribs 4d2 has two of the arms 4d thereof kept spaced from each other by at least one of the spacing ribs 4d2 (or by engaging with at least one of the corresponding limiting notches 4d 3).

Further, as shown in fig. 1 and 8, in any one of the two-arm probes 4, the width W451 of each of the two end portions 451 of the stroke portion 45 on any one of the wide side surfaces 4a is larger than the width W452 of the main body portion 452 of the stroke portion 45 located between the two end portions 451 on any one of the wide side surfaces 4 a.

[ example two ]

Please refer to fig. 9 and 10, which illustrate a second embodiment of the present invention. Since this embodiment is similar to the first embodiment, the same features of the two embodiments are not described again, and the differences between this embodiment and the first embodiment are roughly described as follows:

in the at least one dual-arm probe 4 of the present embodiment, the two support arms 4d have different lengths in the length direction L, and only one of the support arms 4d of the two support arms 4d abuts against the signal adapter board 200. That is, the branch opening 411 of the branch end portion 41 is recessed in one of the narrow side surfaces 4b so that the branch opening 411 is communicated with the partition groove 4c in the other direction perpendicular to the longitudinal direction L.

[ third example ]

Please refer to fig. 11 and 12, which illustrate a third embodiment of the present invention. Since this embodiment is similar to the first embodiment, the same features of the two embodiments are not described again, and the differences between this embodiment and the first embodiment are roughly described as follows:

in fig. 11 of the present embodiment, the double-arm probe 4 is formed with at least one protruding spacing rib 4d2 on one of the inner surfaces 4d1 of the two arms 4d facing each other, but the double-arm probe 4 is not formed with any limiting notch 4d3.

In fig. 12 of the present embodiment, the double-arm probe 4 has at least one projecting spacer rib 4d2 formed on each of two inner surfaces 4d1 of the two arms 4d facing each other, but the double-arm probe 4 is also not formed with any stopper notch 4d3.

[ technical effects of embodiments of the present invention ]

In summary, the probe card apparatus disclosed in the embodiments of the present invention may include a plurality of dual-arm probes having different structures (e.g., the distance of one of the dual-arm probes is different from the distance of another dual-arm probe) under the same structural design principle, so as to conform to the circuit layout on the signal adapter board.

Furthermore, the dual-arm probe disclosed in the embodiments of the present invention can be designed by the structure of the two arms (e.g. the cross-sectional area of one arm is 90% -110% of the cross-sectional area of the other arm), so that the dual-arm probes can have similar electrical conductivity (e.g. resistance) and mechanical properties (e.g. contact force).

In addition, in the probe card device disclosed in the embodiment of the present invention, the dual-arm probe may be formed with at least one spacing rib (or at least one corresponding limiting notch), so that when the first guide plate unit and the second guide plate unit are obliquely dislocated from each other, the dual-arm probe can maintain a spacing therebetween, thereby avoiding changing mechanical characteristics provided by the two support arms.

The disclosure above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the invention, so that all equivalent technical changes made by using the contents of the specification and drawings are included in the scope of the invention.

Claims

1. A probe card apparatus, characterized in that the probe card apparatus comprises:

a first guide plate unit and a second guide plate unit which are arranged at intervals; and

the double-arm probes penetrate through the first guide plate unit and the second guide plate unit; each double-arm probe is defined with a length direction and has a needle length in the length direction, and the outer surface of each double-arm probe comprises two wide side surfaces which are parallel to the length direction and are respectively positioned at two opposite sides; wherein each of the dual-arm probes comprises:

a bifurcated end located on an outer side of said first guide plate unit remote from said second guide plate unit, said bifurcated end having a bifurcated mouth; and

the test end part is positioned on the outer side of the second guide plate unit far away from the first guide plate unit and is used for detachably abutting against an object to be tested;

wherein each of the double-arm probes extends from the bifurcation along the length direction toward the testing end to form a separation groove penetrating from one of the two wide side surfaces to the other thereof, so that each of the double-arm probes defines two arms separated from each other by a distance through the separation groove; wherein a groove length of the separation groove of each of the two-arm probes in the length direction is between 50% and 90% of the needle length, and the distance of one of the two-arm probes is different from the distance of another one of the two-arm probes;

in the cross section of the two support arms of each double-arm probe perpendicular to the length direction, the cross section area of any one support arm is 90-110% of the cross section area of the other support arm.

2. The probe card apparatus of claim 1, wherein at least one of said two-arm probes is formed with at least one spacing rib in a protruding shape on one of two inner surfaces of said two arms facing each other; wherein, when the first guide plate unit and the second guide plate unit are diagonally misaligned with each other, the two arms of at least one of the two-arm probes having at least one of the spacer ribs are kept spaced apart from each other by at least one of the spacer ribs.

3. The probe card apparatus of claim 2, wherein in at least one of said dual-arm probes having at least one of said spacer ribs, the other of said inner surfaces is recessed to form at least one spacing notch corresponding in position to at least one of said spacer ribs, and the depth of at least one of said spacing notches is less than the height of at least one of said spacer ribs.

4. The probe card apparatus of claim 1, wherein the location of each of the dual-arm probes in the first guide plate unit defines a first connection portion, and the location of each of the dual-arm probes in the second guide plate unit defines a second connection portion; in at least one of the dual-arm probes, the separation groove extends from the bifurcation to the second junction.

5. The probe card apparatus of claim 1, wherein a portion of each of the dual-arm probes located between the first guide plate unit and the second guide plate unit defines a stroke portion; in each of the two-arm probes, a width of each of the two end portions of the stroke part on either one of the wide side surfaces is larger than a width of the main body portion of the stroke part located between the two end portions on either one of the wide side surfaces.

6. The probe card apparatus of claim 1, wherein the probe card apparatus further comprises a signal adapter plate adjacent to the first guide plate unit; in at least one of the two-arm probe, the two support arms have different lengths in the length direction, and only one of the two support arms abuts against the signal adapter plate.

7. The probe card apparatus of claim 1, wherein said probe card apparatus further comprises a signal adapter plate adjacent to said first guide plate unit; in at least one of the double-arm probes, the two support arms have the same length in the length direction, and the two support arms abut against the signal adapter plate together.

8. The probe card apparatus of claim 1, wherein the outer surface of each of the dual-arm probes comprises two narrow sides parallel to the length direction and on opposite sides, respectively; in each of the two-arm probes, a thickness of any one of the arms on the wide side is 20% to 100% of a width of any one of the narrow sides.

9. A double-arm probe is characterized in that the double-arm probe is defined with a length direction and has a needle length in the length direction, and the outer surface of the double-arm probe comprises two wide side surfaces which are parallel to the length direction and are respectively positioned at two opposite sides; wherein the dual-arm probe comprises:

a bifurcated end having a bifurcated mouth; and

the test end part is detachably abutted against an object to be tested, and the bifurcate end part and the test end part are respectively positioned at two ends of the double-arm probe;

wherein the double-arm probe extends from the bifurcation toward the testing end along the length direction to form a separation groove penetrating from one of the two wide side surfaces to the other wide side surface, so that the double-arm probe defines two arms separated from each other by a distance through the separation groove; wherein a groove length of the separation groove of the double-arm probe in the length direction is 50-90% of the needle length;

wherein, in the cross-sections of the two support arms of the double-arm probe perpendicular to the length direction, the cross-sectional area of any one support arm is 90-110% of the cross-sectional area of the other support arm.

10. The dual-arm probe as claimed in claim 9, wherein the dual-arm probe has at least one spacing rib formed on one of two inner surfaces of the two arms facing each other in a protruding manner, wherein the other inner surface is recessed to form at least one spacing notch corresponding to the at least one spacing rib, and wherein the depth of the at least one spacing notch is smaller than the height of the at least one spacing rib.