CN115961244A - Preparation method of novel PVD (physical vapor deposition) hard wear-resistant lubricating coating for hydraulic valve rod - Google Patents
Preparation method of novel PVD (physical vapor deposition) hard wear-resistant lubricating coating for hydraulic valve rod Download PDFInfo
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- CN115961244A CN115961244A CN202211713625.3A CN202211713625A CN115961244A CN 115961244 A CN115961244 A CN 115961244A CN 202211713625 A CN202211713625 A CN 202211713625A CN 115961244 A CN115961244 A CN 115961244A
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- hydraulic valve
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- valve rod
- wear
- coating
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- 239000011248 coating agent Substances 0.000 title claims abstract description 40
- 238000000576 coating method Methods 0.000 title claims abstract description 40
- 230000001050 lubricating effect Effects 0.000 title claims abstract description 33
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 238000005240 physical vapour deposition Methods 0.000 title claims description 17
- 239000002131 composite material Substances 0.000 claims abstract description 10
- 150000004767 nitrides Chemical class 0.000 claims abstract description 6
- 238000005524 ceramic coating Methods 0.000 claims abstract description 4
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 4
- 150000003624 transition metals Chemical group 0.000 claims abstract description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 24
- 229910052757 nitrogen Inorganic materials 0.000 claims description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- 238000005137 deposition process Methods 0.000 claims description 9
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000599 Cr alloy Inorganic materials 0.000 claims description 3
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 3
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 238000005121 nitriding Methods 0.000 claims description 3
- 239000003973 paint Substances 0.000 claims description 3
- 238000002791 soaking Methods 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 3
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 claims description 3
- 238000001771 vacuum deposition Methods 0.000 claims description 3
- 238000013461 design Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 3
- 230000009467 reduction Effects 0.000 abstract description 2
- 239000000314 lubricant Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/20—Hydro energy
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- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a preparation method of a novel PVD hard wear-resistant lubricating coating for a hydraulic valve rod, wherein the wear-resistant lubricating coating comprises a bonding layer, a main wear-resistant layer and a lubricating layer, the bonding layer is a transition metal Ti, cr or Al layer, the main wear-resistant layer is a composite ceramic coating formed by nitride of Ti, cr or Al and carbon nitride, and the lubricating layer is a DLC coating. Compared with the prior art, the invention has the advantages that: the composite film in the application integrates high hardness, high toughness, wear resistance and friction reduction, and realizes the optimized design of novel structures and components of DLC coating and nitride coating materials.
Description
Technical Field
The invention relates to the technical field of surface treatment of hydraulic valve rods, in particular to a preparation method of a novel PVD (physical vapor deposition) hard wear-resistant lubricating coating for a hydraulic valve rod.
Background
With the rapid development of the hydraulic industry, the requirements on hydraulic products and related parts are higher and higher. The hydraulic valve stems currently produced have very high dimensional requirements, form and position tolerance requirements, and surface treatment requirements. The above requirements are integrated, so that the hydraulic valve rod can be ensured to be precisely matched with the valve body in the working process to form sealing, and meanwhile, the high surface hardness is also the guarantee for the service life of the product. At present, the surface processing technology of the hydraulic valve rod is difficult to meet the processing precision requirement and the use requirement of the hydraulic valve rod.
Disclosure of Invention
The invention aims to overcome the technical defects and provides a preparation method of a novel PVD hard wear-resistant lubricating coating for a hydraulic valve rod.
In order to solve the technical problems, the technical scheme provided by the invention is as follows: the utility model provides a hydraulic pressure valve rod is with novel wear-resisting lubricant coating of PVD stereoplasm, wear-resisting lubricant coating includes the anchor coat, main wearing layer and lubricating layer, the anchor coat composition is transition metal Ti, cr or Al layer, main wearing layer is the composite ceramic coating that Ti, cr or Al's nitride and carbon nitride constitute, the lubricating layer is the DLC coating.
Further, the thickness of the wear-resistant lubricating coating is 3.0-5.0 mu m.
A preparation method of a novel PVD hard wear-resistant lubricating coating for a hydraulic valve rod specifically comprises the following steps:
firstly, placing a hydraulic valve rod in vacuum coating equipment, adjusting the vacuum degree of the equipment to 5.0 x 10-31.0 x 10Pa, heating to 300-400 ℃ and heating for 1-2h;
opening one of Ti, cr or Al targets or alloy targets thereof, controlling arc current to be 70-100A, bombarding voltage to be 300-1000V, continuously bombarding for 700-1000 seconds, introducing high-purity argon, and firstly performing glow discharge cleaning on the nitriding treated hydraulic valve rod in an argon environment;
step three, opening one of Ti, cr or Al targets, introducing high-purity nitrogen with the purity of 99.999, wherein the nitrogen flow is 300-500sccm, the arc current is 70-100A, the negative bias is 100V-300V, the duration is 700-1000 seconds, the deposition process temperature is 350-400 ℃, and a bonding layer is formed on the surface of the hydraulic valve rod;
step four, opening the Ti, cr and Al alloy target singly, introducing high-purity nitrogen with the purity of 99.999, wherein the nitrogen flow is 300-50sccm, the arc current is 60-100A, the negative bias is 100-300V, and the deposition process temperature is 350-400 ℃ to form a main wear-resistant layer;
and step five, depositing a lubricating layer of the DLC coating on the main wear-resistant layer of the hydraulic valve rod by using a filtering arc device, wherein the DLC deposition temperature of the lubricating layer is 80-170 ℃, the Ar flow is 50-120 sccm, the bias voltage is 100-300V, the graphite target arc current is 30-55A, and the DLC deposition process duration is 1000-2400 s.
Further, the method also comprises the following steps: step six: and soaking the coated hydraulic valve rod in a trichloroethylene solvent with ultrasonic waves to remove the high-temperature-resistant paint on the surface of the cutting part.
Compared with the prior art, the application has the advantages that: the preparation method of the high-toughness wear-resistant gradient composite film for the precision hydraulic valve rod develops more than three multi-element multi-layer gradient composite high-wear-resistant coating materials such as Ti (Al) N, cr (Al) N, DLC films and the like which are suitable for industrial production and application and have high performance through coating component design and structure regulation and optimization, the total thickness is controlled to be 3.0-5.0 mu m, the coating is uniform in color, the surface hardness is more than or equal to 12GPa, the friction coefficient is less than 0.15, the binding force reaches HF1-2 level, the wear rate is more than 5 multiplied by 10-7mm < 3 >/N.m, the high hardness, the high toughness, the wear resistance and the friction reduction are integrated, and the novel structure and the component optimization design of the DLC coating and the nitride coating materials are realized.
Drawings
FIG. 1 is a schematic structural diagram of a novel PVD hard wear-resistant lubricating coating for a hydraulic valve rod.
In the figure: 1. a bonding layer, 2, a main wear-resistant layer, 3 and a lubricating layer.
Detailed Description
The present invention will be described in further detail with reference to the following embodiments.
The utility model provides a hydraulic pressure valve rod is with novel wear-resisting lubricant coating of PVD stereoplasm, wear-resisting lubricant coating includes anchor coat 1, main wearing layer 2 and lubricant coating 3, anchor coat 1 composition is transition metal Ti, cr or Al layer, main wearing layer 2 is the composite ceramic coating that Ti, cr or Al's nitride and carbon nitride constitute, lubricant coating 3 is the DLC coating.
In one embodiment, the wear resistant lubricating coating has a thickness of 3.0-5.0 μm.
A preparation method of a novel PVD hard wear-resistant lubricating coating for a hydraulic valve rod specifically comprises the following steps:
firstly, placing a hydraulic valve rod in vacuum coating equipment, adjusting the vacuum degree of the equipment to 5.0 multiplied by 10-31.0 multiplied by 10Pa, heating the equipment to 300-400 ℃, and heating for 1-2h;
opening one of Ti, cr or Al targets or alloy targets thereof, controlling arc current to be 70-100A, bombardment voltage to be 300-1000V, continuously bombarding for 700-1000 seconds, introducing high-purity argon, and firstly performing glow discharge cleaning on the nitriding treated hydraulic valve rod in an argon environment;
thirdly, opening one of Ti, cr or Al targets, introducing high-purity nitrogen with the purity of 99.999, wherein the nitrogen flow is 300-500sccm, the arc current is 70-100A, the negative bias is 100-300V, the duration is 700-1000 seconds, the deposition process temperature is 350-400 ℃, and a bonding layer is formed on the surface of the hydraulic valve rod;
step four, opening the Ti, cr and Al alloy target singly, introducing high-purity nitrogen with the purity of 99.999, wherein the nitrogen flow is 300-50sccm, the arc current is 60-100A, the negative bias is 100-300V, and the deposition process temperature is 350-400 ℃ to form a main wear-resistant layer 2;
and step five, depositing a lubricating layer 3 of the DLC coating on the main wear-resistant layer 2 of the hydraulic valve rod by using filtering arc equipment, wherein the deposition temperature of the DLC of the lubricating layer 3 is 80-170 ℃, the Ar flow is 50-120 sccm, the bias voltage is 100-300V, the graphite target arc current is 30A-55A, and the DLC deposition process duration is 1000-2400 s.
A preparation method of the novel PVD hard wear-resistant lubricating coating for the hydraulic valve rod further comprises the following steps: step six: and soaking the coated hydraulic valve rod in a trichloroethylene solvent with ultrasonic waves to remove the high-temperature-resistant paint on the surface of the cutting part.
The test of the wear-resistant lubricating coating on the surface of the precision hydraulic valve rod provided by the embodiment shows that: the wear-resistant lubricating coating is gray black, the surface is bright, and the structure is compact; the nano hardness of the composite film is more than or equal to 12GPa, the friction and wear performance of the carbon composite film on the surface of the precision hydraulic valve rod is evaluated by adopting a friction and wear testing machine, and the specific experimental conditions are as follows: adopting a ball-disk reciprocating mode, the frequency is 5Hz, the friction dual ball is a GCr15 ball with phi 6mm, and the load is 40N; the binding force of the wear-resistant lubricating coating on the surface of the precision hydraulic valve rod reaches HF1-2 level at the stable stage, and the wear rate is not more than 5 multiplied by 10-7mm 3/N.m. The experiment proves that the composite film on the surface of the precision hydraulic valve rod has the integrated characteristics of low friction, high wear resistance, high hardness and toughness.
The invention and its embodiments have been described above, without this being limitative. In summary, those skilled in the art should be able to conceive of the present invention without creative design of the similar structural modes and embodiments without departing from the spirit of the present invention, and all such modifications should fall within the protection scope of the present invention.
Claims (4)
1. The novel PVD hard wear-resistant lubricating coating for the hydraulic valve rod is characterized by comprising a bonding layer (1), a main wear-resistant layer (2) and a lubricating layer (3), wherein the bonding layer (1) is a transition metal Ti, cr or Al layer, the main wear-resistant layer (2) is a composite ceramic coating formed by nitride of Ti, cr or Al and carbon nitride, and the lubricating layer (3) is a DLC coating.
2. The novel PVD hard wear resistant lubricating coating for hydraulic valve stems as claimed in claim 1, wherein the thickness of the wear resistant lubricating coating is 3.0-5.0 μm.
3. A preparation method of a novel PVD hard wear-resistant lubricating coating for a hydraulic valve rod is characterized by comprising the following steps:
firstly, placing a hydraulic valve rod in vacuum coating equipment, adjusting the vacuum degree of the equipment to 5.0 multiplied by 10-31.0 multiplied by 10Pa, heating the equipment to 300-400 ℃, and heating for 1-2h;
opening one of Ti, cr or Al targets or alloy targets thereof, controlling arc current to be 70-100A, bombardment voltage to be 300-1000V, continuously bombarding for 700-1000 seconds, introducing high-purity argon, and firstly performing glow discharge cleaning on the nitriding treated hydraulic valve rod in an argon environment;
step three, opening one of Ti, cr or Al targets, introducing high-purity nitrogen with the purity of 99.999, wherein the nitrogen flow is 300-500sccm, the arc current is 70-100A, the negative bias is 100V-300V, the duration is 700-1000 seconds, the deposition process temperature is 350-400 ℃, and a bonding layer is formed on the surface of the hydraulic valve rod;
step four, opening the Ti, cr and Al alloy target singly, introducing high-purity nitrogen with the purity of 99.999, wherein the nitrogen flow is 300-50sccm, the arc current is 60-100A, the negative bias is 100-300V, and the deposition process temperature is 350-400 ℃ to form a main wear-resistant layer (2);
and fifthly, depositing a lubricating layer (3) of the DLC coating on the main wear-resistant layer (2) of the hydraulic valve rod by using filtering arc equipment, wherein the DLC deposition temperature of the lubricating layer (3) is 80-170 ℃, the Ar flow is 50-120 sccm, the bias voltage is 100-300V, the graphite target arc current is 30-55A, and the DLC deposition process duration is 1000-2400 s.
4. The preparation method of the novel PVD hard wear-resistant lubricating coating for the hydraulic valve rod as claimed in claim 1, further comprising the following steps: step six: and soaking the coated hydraulic valve rod in a trichloroethylene solvent with ultrasonic waves to remove the high-temperature-resistant paint on the surface of the cutting part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211713625.3A CN115961244A (en) | 2022-12-29 | 2022-12-29 | Preparation method of novel PVD (physical vapor deposition) hard wear-resistant lubricating coating for hydraulic valve rod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211713625.3A CN115961244A (en) | 2022-12-29 | 2022-12-29 | Preparation method of novel PVD (physical vapor deposition) hard wear-resistant lubricating coating for hydraulic valve rod |
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| Publication Number | Publication Date |
|---|---|
| CN115961244A true CN115961244A (en) | 2023-04-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211713625.3A Withdrawn CN115961244A (en) | 2022-12-29 | 2022-12-29 | Preparation method of novel PVD (physical vapor deposition) hard wear-resistant lubricating coating for hydraulic valve rod |
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| Country | Link |
|---|---|
| CN (1) | CN115961244A (en) |
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- 2022-12-29 CN CN202211713625.3A patent/CN115961244A/en not_active Withdrawn
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Application publication date: 20230414 |
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