CN115950133A - Dynamic regulation control method, device and system of cooling system and epitaxial equipment - Google Patents
Dynamic regulation control method, device and system of cooling system and epitaxial equipment Download PDFInfo
- Publication number
- CN115950133A CN115950133A CN202211652053.2A CN202211652053A CN115950133A CN 115950133 A CN115950133 A CN 115950133A CN 202211652053 A CN202211652053 A CN 202211652053A CN 115950133 A CN115950133 A CN 115950133A
- Authority
- CN
- China
- Prior art keywords
- cooling system
- temperature
- frequency
- cooling
- frequency converter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 218
- 238000000034 method Methods 0.000 title claims abstract description 45
- 230000033228 biological regulation Effects 0.000 title abstract description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 145
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 30
- 239000000523 sample Substances 0.000 claims description 7
- 238000000407 epitaxy Methods 0.000 claims description 4
- 239000000498 cooling water Substances 0.000 abstract description 20
- 230000000694 effects Effects 0.000 abstract description 14
- 230000008569 process Effects 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 10
- 238000004590 computer program Methods 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000012010 growth Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000033001 locomotion Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
Abstract
The application relates to the technical field of semiconductor manufacturing, in particular to a dynamic regulation control method, a dynamic regulation control device, a dynamic regulation control system and epitaxial equipment of a cooling system. The dynamic regulation control method of the cooling system comprises the following steps: acquiring the water temperature of a cooling system; adjusting the operating frequency of the frequency converter according to the water temperature of the cooling system; and adjusting the driving frequency of a circulating water pump of the cooling system according to the running frequency of the frequency converter. The dynamic regulation control method of the cooling system collects the temperature of cooling water in the cooling system in real time and correspondingly regulates the operating frequency of the frequency converter according to the real-time temperature of the cooling water, so that the frequency converter correspondingly regulates the output driving frequency of the circulating water pump, the current cooling requirement of silicon carbide epitaxial equipment can be met, the pipeline of the cooling system is guaranteed to operate in a reasonable temperature range, the cooling effect of the cooling system is effectively guaranteed, and the reliability of the epitaxial equipment in the using process is further improved.
Description
Technical Field
The application relates to the technical field of semiconductor manufacturing, in particular to a dynamic adjustment control method, a device and a system of a cooling system and epitaxial equipment.
Background
Silicon carbide (SiC) is a high-performance semiconductor material, can be used for preparing high-power electronic devices, and has important application value in national economy and national defense safety. At present, silicon carbide high-temperature epitaxial equipment is needed to be used for preparing silicon carbide epitaxial materials, and generally comprises a transmission system, an epitaxial reaction chamber system, a vacuum pumping system, a cooling system and the like.
In the related art, the silicon carbide epitaxial equipment usually adopts a cooling water circulation system which runs uninterruptedly to achieve the cooling purpose, and the cooling effect of the cooling system is constant. However, the cooling requirement of the silicon carbide epitaxial equipment is dynamically changed, and the cooling capacity of the cooling system cannot be changed along with the cooling requirement, so that the temperature requirement of silicon carbide epitaxial growth cannot be met, and the use effect of the silicon carbide epitaxial equipment is greatly influenced.
Disclosure of Invention
In view of this, the present application provides a method, an apparatus, a system and an epitaxial device for dynamically adjusting and controlling a cooling system, which solve or improve the technical problem that the cooling system of a silicon carbide epitaxial device in the prior art has a constant cooling mode and cannot meet the use requirement.
According to a first aspect of the present application, there is provided a dynamic adjustment control method of a cooling system, the dynamic adjustment control method of the cooling system including: acquiring the water temperature of a cooling system; adjusting the operating frequency of the frequency converter according to the water temperature of the cooling system; and adjusting the driving frequency of a circulating water pump of the cooling system according to the running frequency of the frequency converter.
In one possible implementation manner, the adjusting the operating frequency of the frequency converter according to the water temperature of the cooling system includes: determining a preset temperature interval to which the water temperature of the cooling system belongs according to the water temperature of the cooling system and a plurality of preset temperature intervals; adjusting the current operating frequency of the frequency converter to a preset operating frequency interval according to the preset temperature interval of the water temperature of the cooling system; and each preset temperature interval is correspondingly provided with the preset operating frequency interval.
In one possible implementation, the obtaining the water temperature of the cooling system includes: and acquiring a sensing signal transmitted by a temperature sensing device, wherein the sensing signal is used for representing the water temperature of the cooling system.
According to a second aspect of the present application, there is also provided a dynamic adjustment control device of a cooling system, the dynamic adjustment control device of the cooling system including: the water temperature acquisition module is used for acquiring the water temperature of the cooling system; the operation frequency adjusting module is used for adjusting the operation frequency of the frequency converter according to the water temperature of the cooling system; and the circulating water pump operation frequency adjusting module is used for adjusting the driving frequency of the circulating water pump of the cooling system according to the operation frequency of the frequency converter.
According to a third aspect of the present application, there is also provided a dynamic adjustment control system of a cooling system, the dynamic adjustment control system of the cooling system including: the temperature sensing device is used for detecting the water temperature of the cooling system; the frequency converter is electrically connected with the temperature sensing device and a circulating water pump of the cooling system; the dynamic adjustment control device of the cooling system is electrically connected with the temperature sensing device, the frequency converter and the circulating water pump.
In one possible implementation, the temperature sensing device is a temperature transmitter that converts an input temperature signal into a voltage signal for output.
In one possible implementation, the temperature transmitter includes: and the temperature probe is arranged at a water return port of the cooling system.
In one possible implementation, the dynamic adjustment control device is integrated in the frequency converter.
In a possible implementation manner, the frequency converter is electrically connected with a start circuit and a stop circuit of the circulating water pump respectively, and the frequency converter is used for controlling the start and stop of the circulating water pump.
According to a third aspect of the present application, there is also provided an epitaxy apparatus comprising: a cooling system; the dynamic adjustment control system of a cooling system of any one of the above claims, said dynamic adjustment system being electrically connected to said cooling system.
The application provides a dynamic adjustment control method, a device and a system of a cooling system and extension equipment, wherein the dynamic adjustment control method of the cooling system specifically comprises the following steps: acquiring the water temperature of a cooling system; adjusting the operating frequency of the frequency converter according to the water temperature of the cooling system; and adjusting the driving frequency of a circulating water pump of the cooling system according to the operating frequency of the frequency converter. The dynamic adjustment control method of the cooling system acquires the temperature of the cooling water in the cooling system in real time, and correspondingly adjusts the operating frequency of the frequency converter according to the real-time temperature of the cooling water, so that the frequency converter correspondingly adjusts the output driving frequency of the circulating water pump, the current cooling requirement of the silicon carbide epitaxial equipment can be met, the pipeline of the cooling system can be guaranteed to operate in a reasonable temperature range, the cooling effect of the cooling system can be effectively guaranteed, and the reliability of the epitaxial equipment in the using process can be improved.
Drawings
The above and other objects, features and advantages of the present application will become more apparent by describing in more detail embodiments of the present application with reference to the attached drawings. The accompanying drawings are included to provide a further understanding of the embodiments of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the principles of the application. In the drawings, like reference numbers generally indicate like parts or steps.
Fig. 1 is a schematic flowchart illustrating a dynamic adjustment control method for a cooling system according to an embodiment of the present application.
Fig. 2 is a schematic flowchart illustrating a dynamic adjustment control method for a cooling system according to another embodiment of the present application.
Fig. 3 is a block diagram illustrating a configuration of a dynamic adjustment control apparatus of a cooling system according to an embodiment of the present application.
Fig. 4 is a block diagram illustrating a dynamic adjustment control system of a cooling system according to an embodiment of the present application.
Fig. 5 is a block diagram illustrating a dynamic regulation control system of a cooling system according to another embodiment of the present application.
Fig. 6 is a block diagram of an electronic device according to an embodiment of the present application.
Description of reference numerals: 100. a dynamic adjustment control device; 101. a water temperature acquisition module; 102. an operating frequency adjustment module; 103. the circulating water pump operation frequency adjusting module; 200. a temperature transmitter; 201. a temperature probe; 300. a frequency converter; 400. a water circulating pump; 401. a start-up circuit; 402. a stopping circuit; 10. an electronic device; 11. a processor; 12. a memory; 13. an input device; 14. and an output device.
Detailed Description
In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless explicitly specified otherwise. In the embodiment of the present application, all directional indicators (such as up, down, left, right, front, rear, top, bottom \8230;) are used only to explain the relative positional relationship between the components, the motion, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly. Furthermore, the terms "include" and "have," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements but may alternatively include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Furthermore, reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.
Summary of the application
The cooling mode of the cooling system of the silicon carbide epitaxial equipment in the prior art is constant, and the cooling system cannot meet the use requirement after further analysis, the cooling system has the following technical problems:
at present, a common cooling system of silicon carbide epitaxial equipment runs uninterruptedly after the epitaxial equipment is started, specifically, a cooling water circulating water pump runs to push internal circulating water of the cooling system to circularly flow in an internal pipeline, and heat energy is taken away by cooling water. The common control method is that a conventional relay control circuit, such as an air switch, a contactor, a thermal relay, a circulating water pump motor and a button, controls a circulating water pump of a cooling system to operate under a constant working condition.
It is easy to understand that the cooling demand of the silicon carbide epitaxial equipment is dynamically changed, and the cooling capacity of the cooling system cannot be dynamically adjusted along with the cooling demand, so that the cooling capacity of the cooling system cannot be effectively improved in the peak period of the cooling demand of the silicon carbide epitaxial equipment, and the water temperature of cooling water is increased to 45-60 ℃, so that the cooling effect is poor; in the valley period of the cooling requirement of the silicon carbide epitaxial equipment, the cooling capacity of the cooling system causes energy waste due to surplus.
In view of the above technical problems, the present application provides a method, an apparatus, a system and an epitaxy apparatus for controlling dynamic adjustment of a cooling system, wherein the method for controlling dynamic adjustment of a cooling system specifically includes the following steps: acquiring the water temperature of a cooling system; adjusting the operating frequency of the frequency converter according to the water temperature of the cooling system; and adjusting the driving frequency of a circulating water pump of the cooling system according to the operating frequency of the frequency converter. The dynamic regulation control method of the cooling system collects the temperature of cooling water in the cooling system in real time, and correspondingly regulates the operating frequency of the frequency converter according to the real-time temperature of the cooling water, so that the frequency converter correspondingly regulates the output driving frequency of the circulating water pump, the cooling capacity of the cooling system can be more in accordance with the current cooling requirement of silicon carbide epitaxial equipment, the pipeline of the cooling system is ensured to operate in a reasonable temperature range, the cooling effect of the cooling system is effectively ensured, and the reliability of the epitaxial equipment in the using process is further improved.
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Illustrative description of the invention
Fig. 1 is a schematic flow chart of a dynamic adjustment control method for a cooling system according to an embodiment of the present application. As shown in fig. 1, the dynamic regulation control method of the cooling system provided by the present application may specifically include the following steps:
step 100: and acquiring the water temperature of the cooling system.
A silicon carbide epitaxial wafer is a silicon carbide wafer in which a single crystal thin film (epitaxial layer) having a certain requirement and the same crystal as a substrate is grown on a silicon carbide substrate, and a silicon carbide epitaxial apparatus is an apparatus for producing the silicon carbide epitaxial wafer. The cooling system is a system which is used for carrying out water circulation cooling on high-temperature conditions in the silicon carbide epitaxial equipment and taking away the excess heat energy, and particularly relates to a circulating water pump of cooling water running to push internal circulating water of the cooling system to circulate in an internal pipeline, so that the excess heat energy is taken away. The water temperature of the cooling system in the steps refers to the water temperature at the water outlet of the internal pipeline, and the water temperature of the cooling system is collected in real time, so that the driving frequency of the circulating water pump is correspondingly adjusted according to the instant water temperature of the cooling system, and a better temperature condition is provided for the silicon carbide epitaxial equipment.
Step 200: and adjusting the running frequency of the frequency converter according to the water temperature of the cooling system.
A Variable-frequency Drive (VFD) is a power control device that applies frequency conversion technology and microelectronics technology to control an ac motor by changing the frequency of a motor operating power supply. In this application, the converter is connected with circulating water pump's driving motor electricity, and it is used for adjusting circulating water pump's driving motor's output frequency according to cooling system's instant temperature to adjust cooling system's cooling efficiency.
Step 300: and adjusting the driving frequency of a circulating water pump of the cooling system according to the running frequency of the frequency converter.
The circulating water pump is arranged at a heat source or a cold source and the like, and in a closed loop of a heating system or an air-conditioning water system, the circulating water pump enables water to circulate in the system repeatedly, overcomes resistance loss of the loop, has no direct relation with the height and the like of equipment, and is called as a circulating water pump. This circulating water pump's driving motor is connected with the converter electricity, carries out dynamic control by the converter to driving motor's output drive frequency, because the operating frequency of converter is relevant with cooling system's temperature, so make cooling system correspond the instant temperature in the cooling system and correspond and adjust cooling power, and then ensure cooling system's pipeline operation at more reasonable temperature category, guarantee cooling system's cooling effect, improve the reliability of extension equipment use simultaneously.
In a possible implementation manner, fig. 2 is a schematic flow chart of a dynamic regulation control method of a cooling system according to another embodiment of the present application. As shown in fig. 2, the step 200 (adjusting the operating frequency of the inverter according to the water temperature of the cooling system) may further include the following steps:
step 210: and judging the preset temperature interval of the water temperature of the cooling system according to the water temperature of the cooling system and a plurality of preset temperature intervals.
The preset temperature interval is a plurality of temperature intervals preset in a manual setting or control system, each temperature interval corresponds to a reasonable operation frequency interval provided with the frequency converter, namely when the water temperature is higher, the operation frequency of the frequency converter is correspondingly increased so as to improve the cooling effect, and when the water temperature is lower, the operation frequency of the frequency converter is correspondingly reduced so as to reduce the waste of energy. The method comprises the steps of dividing a maximum allowable water temperature interval in a circulating pipeline of the cooling system to form a plurality of preset temperature intervals, judging the preset temperature interval according to a specific numerical value of the water temperature after the water temperature in the circulating pipeline of the cooling system is obtained, and accordingly correspondingly adjusting the running frequency of a frequency converter according to the current water temperature.
It should be noted that the preset temperature interval may specifically be: setting 20 degrees or less as a first preset temperature interval, setting more than 20 degrees and less than or equal to 30 degrees as a second preset temperature interval, setting more than 30 degrees and less than or equal to 40 degrees as a third preset temperature interval, setting more than 40 degrees and less than or equal to 50 degrees as a fourth preset temperature interval, setting more than 50 degrees and less than or equal to 60 degrees as a fifth preset temperature interval, setting more than 60 degrees and less than or equal to 70 degrees as a sixth preset temperature interval, and so on.
It should be understood that different epitaxial devices have different operating temperatures, the above setting of the preset temperature interval is only a preferred example, and is not a limitation on the division manner of the preset temperature interval, and the specific division manner of the preset temperature interval and the temperature difference value of each temperature interval should also depend on the specific application scenario and the specific device, and the application does not further limit this. In addition, the adjacent preset temperature intervals may be continuous closed intervals or discontinuous intervals with temperature difference intervals.
Step 220: and adjusting the current operating frequency of the frequency converter to a preset operating frequency range according to the preset temperature range of the water temperature of the cooling system.
The preset operation frequency interval is a frequency interval set for the preset temperature interval, and is used for correspondingly adjusting the operation frequency of the frequency converter corresponding to the preset temperature interval of the water temperature when the water temperature of the cooling system is determined, so that the operation frequency of the frequency converter corresponds to the real-time water temperature, and in addition, each preset temperature interval is correspondingly provided with a preset operation frequency interval. Namely, when the water temperature is in a higher temperature range, the running frequency of the frequency converter is increased, so that the output of a driving motor of the circulating water pump is increased, and the falling speed of the water temperature is accelerated; when the water temperature is in a lower temperature range, the operating frequency of the frequency converter is correspondingly reduced, so that the output of a driving motor of the circulating water pump is reduced, and the energy consumption is reduced.
Specifically, in one implementation, as shown in fig. 2, the step 100 (obtaining the water temperature of the cooling system) may further include the following steps:
step 110: and acquiring a sensing signal transmitted by the temperature sensing device, wherein the sensing signal is used for indicating the water temperature of the cooling system.
The temperature sensing device is used for detecting the water temperature in the circulating pipeline of the cooling system, and specifically can be a temperature transmitter and the like. The temperature sensing probe of the temperature sensing device is arranged at the water outlet of the water circulation pipeline, the temperature sensing probe detects real-time water temperature to generate a temperature signal, the temperature signal is converted into a voltage analog signal through the temperature transmitter, if the voltage analog signal is converted into a voltage analog signal of 0-10V correspondingly at 0-100 ℃, the voltage analog signal is transmitted to the control device of the dynamic adjusting device through the temperature transmitter, so that the control device can determine the temperature of cooling water in the current pipeline according to the voltage analog signal, the running frequency of the frequency converter is adjusted according to the water temperature, the cooling effect of the cooling system is improved, and the temperature requirement of the silicon carbide epitaxial equipment is responded timely.
Corresponding to the dynamic regulation control method of the cooling system, the embodiment of the application also discloses a dynamic regulation control device of the cooling system. The dynamic adjustment control device 100 of this cooling system will be described with reference to the drawings.
Fig. 3 is a block diagram illustrating a configuration of a dynamic adjustment control apparatus of a cooling system according to an embodiment of the present application. As shown in fig. 3, the dynamic adjustment control apparatus 100 of the cooling system provided in the present application may specifically include: a water temperature acquisition module 101, an operation frequency adjustment module 102 and a circulating water pump operation frequency adjustment module 103. The water temperature obtaining module 101 is used for obtaining the water temperature of the cooling system; the operation frequency adjusting module 102 is used for adjusting the operation frequency of the frequency converter 300 according to the water temperature of the cooling system; the circulating water pump operation frequency adjusting module 103 is configured to adjust a driving frequency of the circulating water pump 400 of the cooling system according to the operation frequency of the frequency converter 300. The dynamic adjustment control device 100 of the cooling system can be used for performing the following steps of the method: acquiring the water temperature of a cooling system; adjusting the operating frequency of the frequency converter 300 according to the water temperature of the cooling system; and adjusting the driving frequency of the circulating water pump 400 of the cooling system according to the operating frequency of the inverter 300. This kind of cooling system's dynamic adjustment controlling means 100 gathers the temperature of cooling water among the cooling system in real time, and correspond the operating frequency who adjusts converter 300 according to the real-time temperature of cooling water, thereby make converter 300 correspond the regulation to circulating water pump 400's output drive frequency, so can agree with the present cooling demand of silicon carbide epitaxial equipment more, guarantee cooling system's pipeline operation is at reasonable temperature category, thereby effectively guarantee cooling system's cooling effect, and then improve the reliability of epitaxial equipment use.
In addition, another embodiment of the application also provides a dynamic regulation control system of the cooling system. Fig. 4 is a block diagram illustrating a dynamic adjustment control system of a cooling system according to an embodiment of the present application. As shown in fig. 4, the dynamic regulation control system of the cooling system may include: the temperature sensing device, the frequency converter 300 and the dynamic adjustment control device 100 of the cooling system described in the above embodiments. The temperature sensing device is used to detect the water temperature of the cooling system, and may also send the detected water temperature to the dynamic adjustment control device 100 in a data transmission or signal transmission manner. The inverter 300 is electrically connected to the temperature sensing device and the circulating water pump 400 of the cooling system, and the dynamic adjustment control device 100 is electrically connected to the temperature sensing device, the inverter 300, and the circulating water pump 400. The frequency converter 300 is controlled by the dynamic adjustment control device 100, and multi-stage speed control is performed based on the real-time water temperature of the cooling system, that is, the real-time water temperature of the cooling system is taken as an input variable, and under the output control of the dynamic adjustment control device 100, the real-time dynamic adjustment of the running frequency is realized, so that the driving motor of the circulating water pump 400 correspondingly adjusts the output frequency, and the current cooling requirement of the corresponding silicon carbide epitaxial equipment ensures the use effect of the silicon carbide epitaxial equipment.
The dynamic regulation control system of the cooling system can be used for carrying out the steps in the following method: acquiring the water temperature of a cooling system; adjusting the operating frequency of the frequency converter 300 according to the water temperature of the cooling system; and adjusting the driving frequency of the circulating water pump 400 of the cooling system according to the operating frequency of the inverter 300. The dynamic regulation control system of the cooling system collects the temperature of cooling water in the cooling system in real time, and correspondingly regulates the operating frequency of the frequency converter 300 according to the real-time temperature of the cooling water, so that the frequency converter 300 correspondingly regulates the output driving frequency of the circulating water pump 400, the current cooling requirement of silicon carbide epitaxial equipment can be met, the pipeline of the cooling system is ensured to operate in a reasonable temperature range, the cooling effect of the cooling system is effectively ensured, and the reliability of the use process of the epitaxial equipment is further improved.
Specifically, the input end of the dynamic adjustment control device 100 is connected to the temperature sensing device, and the output end of the dynamic adjustment control device 100 is connected to the input/output point of the frequency converter 300. After the temperature sensing device detects the current water temperature of the cooling system, the temperature sensing device processes the temperature signal to generate an analog signal which can be received by the dynamic regulation control device 100, the analog signal representing the water temperature of the cooling system is transmitted to the input end of the dynamic regulation control device 100 and is used as an output variable of the frequency conversion regulation of the frequency converter 300, the output end of the dynamic regulation control device 100 is connected with the frequency converter 300 to correspondingly regulate the running frequency of the frequency converter 300, and the frequency converter 300 regulates the output frequency of the driving motor of the circulating water pump 400, so that the circulation of the cooling water is accelerated or slowed down to adapt to the current water temperature of the cooling water in the cooling system.
In a possible implementation manner, fig. 5 is a block diagram illustrating a dynamic adjustment control system of a cooling system according to another embodiment of the present application. As shown in fig. 5, the dynamic adjustment control device 100 may be integrated into a control module of the frequency converter 300, and by setting parameters inside the frequency converter 300, the frequency converter 300 adjusts its operating frequency at different water temperatures, so as to make the output frequency of the circulating water pump 400 self-adapt to the water temperature.
Specifically, in one embodiment, as shown in FIG. 4, the temperature sensing device can be a temperature transmitter 200, wherein the temperature transmitter 200 converts an input temperature signal into a voltage signal for output. Temperature transmitter 200 is developed from a sensor that is capable of outputting a standardized signal. The detected temperature signal is converted into a voltage analog signal by the temperature transmitter 200, so that the signal is received by the frequency converter 300.
Alternatively, as shown in fig. 5, the temperature transmitter 200 includes: the temperature probe 201, the temperature probe 201 is disposed at the water return port of the cooling system, so that the temperature transmitter 200 can detect the temperature of the cooling water in the circulation pipeline of the cooling system in real time, and the instant temperature of the cooling water is transmitted to the frequency converter 300.
In another possible implementation manner, as shown in fig. 5, the frequency converter 300 is further electrically connected to a start circuit 401 and a stop circuit 402 of the circulating water pump 400, respectively, and the frequency converter 300 is used for controlling the start and stop of the circulating water pump 400, so that the control functions of the circulating water pump 400 are integrated and the number of devices is reduced.
Corresponding to the dynamic regulation control method, the device and the system of the cooling system, the embodiment of the application also discloses epitaxial equipment.
The epitaxial equipment can be used for silicon carbide epitaxy, and specifically comprises: a cooling system and a dynamic adjustment control system of the cooling system described in the above embodiments, the dynamic adjustment system being electrically connected to the cooling system.
The silicon carbide epitaxial equipment comprises the dynamic regulation control system of the cooling system, so that the oil circuit anti-blocking control method in the embodiment can be implemented, and the beneficial effects produced by the method are the same as those of the device and the system, and the description is not repeated.
Next, an electronic apparatus according to an embodiment of the present application is described with reference to fig. 6.
FIG. 6 illustrates a block diagram of an electronic device in accordance with an embodiment of the present application.
As shown in fig. 6, the electronic device 10 includes one or more processors 11 and memory 12.
The processor 11 may be a Central Processing Unit (CPU) or other form of processing unit having data processing capabilities and/or instruction execution capabilities, and may control other components in the electronic device 10 to perform desired functions.
Memory 12 may include one or more computer program products that may include various forms of computer-readable storage media, such as volatile memory and/or non-volatile memory. The volatile memory may include, for example, random Access Memory (RAM), cache memory (cache), and/or the like. The non-volatile memory may include, for example, read Only Memory (ROM), hard disk, flash memory, etc. One or more computer program instructions may be stored on the computer readable storage medium and executed by the processor 11 to implement the dynamic adjustment control method of the cooling system of the various embodiments of the present application described above and/or other desired functions.
In one example, the electronic device 10 may further include: an input device 13 and an output device 14, which are interconnected by a bus system and/or other form of connection mechanism (not shown).
When the electronic device is a stand-alone device, the input means 13 may be a communication network connector for receiving the acquired input signals from the first device and the second device.
The input device 13 may also include, for example, a keyboard, a mouse, and the like.
The output device 14 may output various information including the determined distance information, direction information, and the like to the outside. The output devices 14 may include, for example, a display, speakers, a printer, and a communication network and its connected remote output devices, among others.
Of course, for simplicity, only some of the components of the electronic device 10 relevant to the present application are shown in fig. 6, and components such as buses, input/output interfaces, and the like are omitted. In addition, the electronic device 10 may include any other suitable components depending on the particular application.
As a third aspect of the present application, there is provided a computer-readable storage medium storing a computer program for executing the steps of:
acquiring the water temperature of a cooling system; adjusting the operating frequency of the frequency converter according to the water temperature of the cooling system; and adjusting the driving frequency of a circulating water pump of the cooling system according to the running frequency of the frequency converter.
Specifically, the computer program may further execute the following steps:
judging a preset temperature interval to which the water temperature of the cooling system belongs according to the water temperature of the cooling system and the preset temperature interval; adjusting the current operating frequency of the frequency converter to a preset operating frequency interval according to the preset temperature interval of the water temperature of the cooling system; wherein, every temperature interval of predetermineeing all corresponds and is equipped with the frequency interval of predetermineeing.
And acquiring a sensing signal transmitted by the temperature sensing device, wherein the sensing signal is used for indicating the water temperature of the cooling system.
In addition to the above-described methods and apparatus, embodiments of the present application may also be a computer program product comprising computer program information which, when executed by a processor, causes the processor to perform the steps in the method of dynamic adjustment control of a cooling system according to various embodiments of the present application described in the present specification.
The computer program product may include program code for carrying out operations for embodiments of the present application in any combination of one or more programming languages, including an object oriented programming language such as Java, C + + or the like and conventional procedural programming languages, such as the "C" programming language or similar programming languages. The program code may execute entirely on the user's computing device, partly on the user's device, as a stand-alone software package, partly on the user's computing device and partly on a remote computing device, or entirely on the remote computing device or server.
Furthermore, embodiments of the present application may also be a computer-readable storage medium having stored thereon computer program information which, when executed by a processor, causes the processor to perform the steps in the dynamic adjustment control method of a cooling system according to various embodiments of the present application.
A computer-readable storage medium may employ any combination of one or more readable media. The readable medium may be a readable signal medium or a readable storage medium. A readable storage medium may include, for example, but not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or a combination of any of the foregoing. More specific examples (a non-exhaustive list) of the readable storage medium include: an electrical connection having one or more wires, a portable disk, a hard disk, a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.
The basic principles of the present application have been described above with reference to specific embodiments, but it should be noted that advantages, effects, etc. mentioned in the present application are only examples and are not limiting, and the advantages, effects, etc. must not be considered to be possessed by various embodiments of the present application. Furthermore, the foregoing disclosure of specific details is for the purpose of illustration and description and is not intended to be limiting, since the foregoing disclosure is not intended to be exhaustive or to limit the disclosure to the precise details disclosed.
The block diagrams of devices, apparatuses, systems referred to in this application are only given as illustrative examples and are not intended to require or imply that the connections, arrangements, configurations, etc. must be made in the manner shown in the block diagrams. These devices, apparatuses, devices, systems may be connected, arranged, configured in any manner, as will be appreciated by those skilled in the art. Words such as "including," "comprising," "having," and the like are open-ended words that mean "including, but not limited to," and are used interchangeably herein. The words "or" and "as used herein mean, and are used interchangeably with, the word" and/or, "unless the context clearly dictates otherwise. The word "such as" is used herein to mean, and is used interchangeably with, the phrase "such as but not limited to".
It should also be noted that in the devices, apparatuses, and methods of the present application, the components or steps may be decomposed and/or recombined. These decompositions and/or recombinations are to be considered as equivalents of the present application.
Claims (10)
1. A method for dynamic adjustment control of a cooling system, comprising:
acquiring the water temperature of a cooling system;
adjusting the operating frequency of the frequency converter according to the water temperature of the cooling system; and
and adjusting the driving frequency of a circulating water pump of the cooling system according to the running frequency of the frequency converter.
2. The method for controlling dynamic adjustment of a cooling system according to claim 1, wherein the adjusting of the operating frequency of the inverter according to the water temperature of the cooling system comprises:
determining a preset temperature interval to which the water temperature of the cooling system belongs according to the water temperature of the cooling system and a plurality of preset temperature intervals;
adjusting the current operating frequency of the frequency converter to a preset operating frequency interval according to the preset temperature interval of the water temperature of the cooling system;
and each preset temperature interval is correspondingly provided with the preset operating frequency interval.
3. The method for controlling dynamic adjustment of a cooling system according to claim 1, wherein the obtaining of the water temperature of the cooling system comprises:
and acquiring a sensing signal transmitted by a temperature sensing device, wherein the sensing signal is used for representing the water temperature of the cooling system.
4. A dynamic adjustment control device for a cooling system, comprising:
the water temperature acquisition module is used for acquiring the water temperature of the cooling system;
the operation frequency adjusting module is used for adjusting the operation frequency of the frequency converter according to the water temperature of the cooling system; and
and the circulating water pump running frequency adjusting module is used for adjusting the driving frequency of the circulating water pump of the cooling system according to the running frequency of the frequency converter.
5. A dynamic adjustment control system for a cooling system, comprising:
the temperature sensing device is used for detecting the water temperature of the cooling system;
the frequency converter is electrically connected with the temperature sensing device and a circulating water pump of the cooling system;
the dynamic adjustment control device of a cooling system according to claim 4, wherein the dynamic adjustment control device is electrically connected to the temperature sensing device, the frequency converter, and the circulating water pump.
6. The dynamic tuning control system of a cooling system of claim 5, wherein the temperature sensing device is a temperature transducer that converts an input temperature signal into a voltage signal for output.
7. The dynamic tuning control system of a cooling system of claim 6, wherein the temperature transmitter comprises:
and the temperature probe is arranged at a water return port of the cooling system.
8. The dynamic-adjustment control system of a cooling system according to claim 5, characterized in that the dynamic-adjustment control means is integrated in the frequency converter.
9. The dynamic adjustment control system of a cooling system according to claim 5, wherein the frequency converters are electrically connected to a start circuit and a stop circuit of the circulating water pump, respectively, and are configured to control the start and stop of the circulating water pump.
10. An epitaxial apparatus for performing silicon carbide epitaxy, comprising:
a cooling system;
a dynamic adjustment control system for a cooling system as claimed in any one of claims 5 to 9, said dynamic adjustment system being electrically connected to said cooling system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211652053.2A CN115950133A (en) | 2022-12-21 | 2022-12-21 | Dynamic regulation control method, device and system of cooling system and epitaxial equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211652053.2A CN115950133A (en) | 2022-12-21 | 2022-12-21 | Dynamic regulation control method, device and system of cooling system and epitaxial equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115950133A true CN115950133A (en) | 2023-04-11 |
Family
ID=87296194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211652053.2A Pending CN115950133A (en) | 2022-12-21 | 2022-12-21 | Dynamic regulation control method, device and system of cooling system and epitaxial equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115950133A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116765358A (en) * | 2023-06-04 | 2023-09-19 | 东莞市和镁五金有限公司 | Die casting equipment and control system with safety precaution |
-
2022
- 2022-12-21 CN CN202211652053.2A patent/CN115950133A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116765358A (en) * | 2023-06-04 | 2023-09-19 | 东莞市和镁五金有限公司 | Die casting equipment and control system with safety precaution |
| CN116765358B (en) * | 2023-06-04 | 2024-01-16 | 东莞市和镁五金有限公司 | Die casting equipment and control system with safety precaution |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106091231B (en) | The control method and equipment of air-conditioning equipment in a kind of data center | |
| CN115950133A (en) | Dynamic regulation control method, device and system of cooling system and epitaxial equipment | |
| CN102348365A (en) | Method and device for regulating temperature of cabinet and cabinet | |
| KR101894634B1 (en) | Power management for datacenter power architectures | |
| CN110543196A (en) | Control method and control device for heat dissipation element | |
| CN101739037A (en) | Method and device for controlling radiator | |
| CN103557206B (en) | The method for controlling number of revolution of cooling blower and device in hydraulic system | |
| CN115129133A (en) | Server liquid cooling system regulation and control device, method, terminal and storage medium | |
| CN110647224A (en) | Method and device for controlling running state | |
| CN113377178A (en) | Notebook computer heat dissipation control method, system, processing terminal and storage medium | |
| CN104122962A (en) | Temperature regulation device and method | |
| CN114727563A (en) | Flow-control liquid cooling heat dissipation system and method thereof and liquid cooling cabinet | |
| CN112461036B (en) | Cooling tower fan control method and device, terminal equipment and storage medium | |
| CN116820214B (en) | Intelligent regulation and control method and system for ventilation and heat dissipation of server | |
| CN115686102B (en) | Motor temperature control method and device and engineering vehicle | |
| CN113966153B (en) | Switch heat dissipation control system and control method | |
| CN114883702B (en) | Method and device for controlling heat of battery after charging based on air temperature prediction | |
| US9879600B2 (en) | Turbine component cooling system | |
| CN101697140A (en) | Optimized dispatching method of operating system | |
| CN109582060A (en) | A kind of intelligent control system of liquid bath temperature control device | |
| JP2022084840A (en) | Thermal management system, information technology component cooling method, non-transitory machine readable media, and computer program for cooling electronic rack | |
| CN113541572B (en) | Method and device for predicting temperature of MOS (metal oxide semiconductor) tube of driving circuit, controller and automobile | |
| CN114564850A (en) | Electric-heating combined simulation method, system and terminal for power electronic system | |
| CN113464480A (en) | Fan control method and system | |
| CN111405824B (en) | UPS heat dissipation method and device and UPS heat dissipation system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 518107 1b, building A6, Guangming Science Park, China Merchants Group, sightseeing Road, Fenghuang community, Fenghuang street, Guangming District, Shenzhen City, Guangdong Province Applicant after: Shenzhen Nashe Intelligent Equipment Co.,Ltd. Address before: 3/F, Building A3, China Merchants Guangming Science Park, No. 3009, Sightseeing Road, Guangming District, Shenzhen, Guangdong 518107 Applicant before: Shenzhen Nashi Intelligent Equipment Co.,Ltd. |