CN115945776A - A device and method capable of realizing multiple laser shot peening under a rigid constrained layer - Google Patents

A device and method capable of realizing multiple laser shot peening under a rigid constrained layer Download PDF

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CN115945776A
CN115945776A CN202211673722.4A CN202211673722A CN115945776A CN 115945776 A CN115945776 A CN 115945776A CN 202211673722 A CN202211673722 A CN 202211673722A CN 115945776 A CN115945776 A CN 115945776A
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black paint
laser
particle
layer
deposition layer
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CN115945776B (en
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葛勇州
任旭东
张宇泽
童照鹏
周王凡
陈兰
刘怀乐
顾嘉阳
刘畅
杨浩杰
于天琪
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Jiangsu University
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Abstract

本发明提供了一种可实现刚性约束层下多次激光喷丸成形的装置及方法,包括运动系统、激光喷丸强化系统、激光加热升温系统、颗粒流动系统和工作槽,所述工作槽内安装待加工工件,所述工作槽和颗粒流动系统连通形成一个闭环,通过颗粒流动系统使带电荷的黑漆颗粒吸附在待加工工件表面;所述激光加热升温系统用于使带电荷的黑漆颗粒在待加工工件表面形成黑漆沉积层;所述激光喷丸强化系统用于对待加工工件表面进行激光抛丸。本发明利用了带电小颗粒易吸附在金属表面的特点,并采用纳秒脉冲激光加热的方法使微小黑漆颗粒在指定位置熔化沉积,从而实现对吸收层的及时补充和对吸收层厚度的精准控制。

Figure 202211673722

The invention provides a device and method capable of realizing multiple laser shot peening under a rigid constrained layer, including a motion system, a laser shot peening strengthening system, a laser heating and heating system, a particle flow system, and a working tank. The workpiece to be processed is installed, and the working tank is connected with the particle flow system to form a closed loop, and the charged black paint particles are adsorbed on the surface of the workpiece to be processed through the particle flow system; the laser heating and heating system is used to make the charged black paint The particles form a black paint deposition layer on the surface of the workpiece to be processed; the laser shot peening strengthening system is used for laser shot blasting on the surface of the workpiece to be processed. The invention utilizes the characteristic that charged small particles are easy to adsorb on the metal surface, and adopts nanosecond pulse laser heating method to melt and deposit tiny black paint particles at designated positions, thereby realizing timely replenishment of the absorbing layer and accurate thickness of the absorbing layer control.

Figure 202211673722

Description

一种可实现刚性约束层下多次激光喷丸成形的装置及方法A device and method capable of realizing multiple laser shot peening under a rigid constrained layer

技术领域technical field

本发明涉及激光冲击成形领域,特别涉及一种可实现刚性约束层下多次激光喷丸成形的装置及方法。The invention relates to the field of laser shock forming, in particular to a device and method capable of realizing multiple laser shot peening forming under a rigid constrained layer.

背景技术Background technique

激光喷丸成形是一种柔性精密无模成形新方法,它是利用高能激光束对板料的逐点逐次冲击,激光烧蚀产生的气化物对金属材料的冲击使金属材料产生压缩塑性变形,利用金属材料塑性延展变形特性,积小变形成宏观的大变形。已被广泛应用于航空航天、空间科学、海洋船舶等领域。Laser shot peening is a new method of flexible and precise moldless forming. It uses the high-energy laser beam to impact the sheet material point by point, and the impact of the vapor produced by laser ablation on the metal material causes the metal material to produce compression plastic deformation. Utilizing the plastic ductility and deformation characteristics of metal materials, small deformations can be accumulated to form large macroscopic deformations. Has been widely used in aerospace, space science, marine ships and other fields.

理论和实践证明了约束层可以通过阻碍气化物的逸散,来大幅度增加激光冲击波的压力并延长其持续时间,可以获得更好的成形效益。Theory and practice have proved that the confinement layer can greatly increase the pressure of the laser shock wave and prolong its duration by hindering the escape of vapors, so that better forming benefits can be obtained.

常见的约束层分为液体约束层、柔性约束层、刚性约束层,其中,由于刚性约束层不变形,可以较长时间得维持高压气团的初始状态,之后汽化物从约束层和工件之间的缝隙进行扩散。Common constrained layers are divided into liquid constrained layers, flexible constrained layers, and rigid constrained layers. Among them, since the rigid constrained layer does not deform, it can maintain the initial state of the high-pressure air mass for a long time, and then the vapor from the constrained layer and the workpiece Diffusion through gaps.

虽然刚性约束层对气化物的约束效果最佳,但是,目前激光喷丸成形通常不采用刚性约束层,这是因为有以下几个难点无法解决:Although the rigid constrained layer has the best confinement effect on vapors, at present, the rigid constrained layer is usually not used in laser shot peening, because the following difficulties cannot be solved:

1、激光喷丸成形产生是有色气化物会粘附在刚性吸收层表面,若多次冲击会阻碍激光束照射在金属工件表面,并对约束层造成不可修复的损伤。1. Laser shot peening produces colored vapors that will adhere to the surface of the rigid absorbing layer. If multiple impacts will prevent the laser beam from irradiating the surface of the metal workpiece, and cause irreparable damage to the constrained layer.

2、由于激光喷丸会产生凹坑,并且工件成形后中心会产生凹陷,刚性约束层和吸收层的间隙过大不利于对气化物的约束,会大大降低冲击力大小和持续时间。2. Since laser peening will produce pits, and the center of the workpiece will be depressed after forming, the gap between the rigid constrained layer and the absorbing layer is too large, which is not conducive to the restraint of vaporized substances, and will greatly reduce the magnitude and duration of the impact force.

3、吸收层过厚不利于冲击力传播到工件表面,吸收层过薄时,若进行多次激光喷丸需要更换吸收层,过程繁琐。3. If the absorbing layer is too thick, it is not conducive to the transmission of impact force to the surface of the workpiece. When the absorbing layer is too thin, the absorbing layer needs to be replaced if laser peening is performed many times, and the process is cumbersome.

发明内容Contents of the invention

针对现有技术中存在的不足,本发明提供了一种可实现刚性约束层下多次激光喷丸成形的装置及方法,利用了带电小颗粒易吸附在金属表面的特点,并采用纳秒脉冲激光加热的方法使微小黑漆颗粒在指定位置熔化沉积,从而实现对吸收层的及时补充和对吸收层厚度的精准控制,采用飞秒脉冲激光多次喷丸成形,成形精度极高;加热升温系统结合高速流动气流可将光学玻璃表面沾附的黑漆杂质熔化并柔性去除,不损伤光学玻璃又不影响下次激光喷丸的效益。Aiming at the deficiencies in the prior art, the present invention provides a device and method capable of realizing multiple laser shot peening under a rigid constrained layer, which utilizes the characteristic that small charged particles are easily adsorbed on the metal surface, and adopts nanosecond pulse The method of laser heating makes the tiny black paint particles melt and deposit at the designated position, so as to realize the timely replenishment of the absorbing layer and the precise control of the thickness of the absorbing layer. The femtosecond pulse laser is used for multiple shot peening, and the forming accuracy is extremely high; heating and heating The system combined with the high-speed flowing airflow can melt and remove the black paint impurities attached to the surface of the optical glass flexibly, without damaging the optical glass or affecting the benefits of the next laser peening.

本发明是通过以下技术手段实现上述技术目的的。The present invention achieves the above-mentioned technical purpose through the following technical means.

一种可实现刚性约束层下多次激光喷丸成形的装置,包括运动系统、激光喷丸强化系统、激光加热升温系统、颗粒流动系统和工作槽,A device that can realize multiple laser shot peening under a rigid constrained layer, including a motion system, a laser shot peening strengthening system, a laser heating and heating system, a particle flow system and a working tank,

所述工作槽内安装待加工工件,所述工作槽和颗粒流动系统连通形成一个闭环,通过颗粒流动系统使带电荷的黑漆颗粒吸附在待加工工件表面;所述激光加热升温系统用于使带电荷的黑漆颗粒在待加工工件表面形成黑漆沉积层;所述激光喷丸强化系统用于对待加工工件表面进行激光抛丸;所述运动系统用于使激光喷丸强化系统、激光加热升温系统和待加工工件移动。The workpiece to be processed is installed in the working tank, and the working tank and the particle flow system are connected to form a closed loop, and the charged black paint particles are adsorbed on the surface of the workpiece to be processed through the particle flow system; the laser heating system is used to make the Charged black paint particles form a black paint deposition layer on the surface of the workpiece to be processed; the laser shot peening strengthening system is used to perform laser shot blasting on the surface of the workpiece to be processed; the motion system is used to make the laser shot peening strengthening system, laser heating The heating system and the workpiece to be processed move.

进一步,所述颗粒流动系统包括壳体,电子喷射器、电子存储腔、高速风扇、制冷棒、颗粒粉碎机、颗粒存储箱、压力传感器探头和气压泵;Further, the particle flow system includes a housing, an electronic injector, an electronic storage chamber, a high-speed fan, a cooling rod, a particle pulverizer, a particle storage box, a pressure sensor probe and an air pump;

所述壳体的封闭流道内设有工作槽,所述工作槽上方的壳体上设有光学玻璃,所述封闭流道根据流向依次安装颗粒粉碎机、颗粒存储箱、高速风扇、电子存储腔和待加工工件;所述颗粒存储箱内存放黑漆颗粒,所述制冷棒用于将回收的汽化的黑漆进行降温;所述颗粒粉碎机用于将降温后的黑漆打碎成黑漆颗粒;所述颗粒粉碎机出口处设有气压泵,用于使封闭流道内保持压力;The closed channel of the housing is provided with a working tank, the housing above the working tank is provided with optical glass, and the closed channel is sequentially installed with a particle grinder, a particle storage box, a high-speed fan, and an electronic storage device according to the flow direction. cavity and the workpiece to be processed; black paint particles are stored in the particle storage box, and the refrigeration rod is used to cool the recovered vaporized black paint; the particle crusher is used to break the cooled black paint into black Paint particles; an air pump is provided at the outlet of the particle pulverizer to maintain pressure in the closed flow channel;

所述颗粒存储箱一侧壁面上半部分为网孔结构,所述颗粒存储箱一侧壁面下半部分为封闭边界;所述颗粒存储箱另一侧壁面为双层挡板,一层挡板为网孔挡板,另一层为可移动的封闭挡板;所述颗粒存储箱上安装可移动的移动压盘机构,用于将颗粒存储箱分成流通区和黑漆颗粒区;所述电子存储腔上下两侧为网状结构,所述电子存储腔上安装电子喷射器,用于使电子存储腔内部产生游离电子。The upper half of one side wall of the particle storage box is a mesh structure, the lower half of the one side wall of the particle storage box is a closed boundary; the other side wall of the particle storage box is a double-layer baffle, and a layer of baffle It is a mesh baffle, and the other layer is a movable closed baffle; a movable platen mechanism is installed on the particle storage box, which is used to divide the particle storage box into a circulation area and a black paint particle area; the electronic The upper and lower sides of the storage cavity are net-like structures, and electron injectors are installed on the electronic storage cavity to generate free electrons inside the electronic storage cavity.

进一步,所述激光加热升温系统包括纳秒激光器、第二反射镜和第二聚焦镜;所述纳秒激光器发出的激光束经第二反射镜进行反射后通过第二聚焦镜聚焦在待加工工件表面,用于使带电荷的黑漆颗粒在待加工工件表面形成黑漆沉积层;当所述黑漆沉积层高度增加时,通过改变第二聚焦镜的焦点位置,使激光束聚焦在黑漆沉积层上表面的黑漆颗粒吸附层上;所述激光喷丸强化系统包括飞秒激光器、第一反射镜和第一聚焦镜;所述飞秒激光器发出的激光束经第一反射镜进行反射后通过第一聚焦镜聚焦至黑漆沉积层上表面。Further, the laser heating and heating system includes a nanosecond laser, a second reflector and a second focus mirror; the laser beam emitted by the nanosecond laser is reflected by the second reflector and then focused on the workpiece to be processed by the second focus mirror The surface is used to make the charged black paint particles form a black paint deposition layer on the surface of the workpiece to be processed; when the height of the black paint deposition layer increases, the laser beam is focused on the black paint by changing the focus position of the second focusing mirror On the black paint particle adsorption layer on the upper surface of the deposition layer; the laser shot peening strengthening system includes a femtosecond laser, a first reflector and a first focusing mirror; the laser beam emitted by the femtosecond laser is reflected by the first reflector Afterwards, it is focused to the upper surface of the black paint deposition layer by the first focusing mirror.

进一步,所述运动系统包括第一滑轨、第一滑块、第二滑块、第二滑轨、第三滑块和移动平台,所述第一滑块、第二滑块分别安装在第一滑轨上;所述第一滑块与第一反射镜连接,所述第二滑块与第二反射镜连接;所述第三滑块安装在第二滑轨上;所述第三滑块与第二聚焦镜连接,用于改变第二聚焦镜的焦点位置;所述移动平台上放置待加工工件。Further, the motion system includes a first slide rail, a first slide block, a second slide block, a second slide rail, a third slide block and a mobile platform, and the first slide block and the second slide block are respectively installed on the On a slide rail; the first slide block is connected with the first reflector, and the second slide block is connected with the second reflector; the third slide block is installed on the second slide rail; the third slide The block is connected with the second focusing mirror, and is used to change the focus position of the second focusing mirror; the workpiece to be processed is placed on the moving platform.

进一步,还包括三维信息采集器、压力传感器和位移传感器,所述三维信息采集器对准光学玻璃下表面,用于捕捉光学玻璃下表面是否存在黑漆气化物附着;所述位移传感器用于检测黑漆沉积层的厚度和黑漆沉积层与光学玻璃之间的距离;所述压力传感器用于检测封闭流道内的压力。Further, it also includes a three-dimensional information collector, a pressure sensor and a displacement sensor, the three-dimensional information collector is aimed at the lower surface of the optical glass, and is used to capture whether there is black paint vapor attached to the lower surface of the optical glass; the displacement sensor is used to detect The thickness of the black paint deposition layer and the distance between the black paint deposition layer and the optical glass; the pressure sensor is used to detect the pressure in the closed flow channel.

一种可实现刚性约束层下多次激光喷丸成形的装置的方法,包括以下步骤:A method capable of realizing multiple laser shot peening devices under a rigid constrained layer, comprising the following steps:

通过气压泵使封闭流道内充满高压气体,当压力传感器达到第一设定值后关闭气压泵;Fill the closed channel with high-pressure gas through the air pump, and close the air pump when the pressure sensor reaches the first set value;

通过控制高速风扇启动,使颗粒存储箱内的黑漆颗粒在封闭流道内内循环流动;所述黑漆颗粒经过电子存储腔后通过电子喷射器使黑漆颗粒带电荷;带电荷的黑漆颗粒吸附在待加工工件表面;By controlling the high-speed fan to start, the black paint particles in the particle storage box are circulated in the closed flow channel; after the black paint particles pass through the electronic storage chamber, the black paint particles are charged by the electronic injector; the charged black paint particles Adsorbed on the surface of the workpiece to be processed;

控制第二滑块移动,使纳秒激光器的光线经第二反射镜反射抵达待加工工件表面;通过激光焦点对准待加工工件表面吸附的黑漆颗粒层,用于形成黑漆沉积层;当通过位移传感器确定黑漆沉积层的厚度达到设计值时,关闭纳秒激光器;Control the movement of the second slider so that the light of the nanosecond laser is reflected by the second reflector and reaches the surface of the workpiece to be processed; the laser focus is used to align the black paint particle layer adsorbed on the surface of the workpiece to be processed to form a black paint deposition layer; when When it is determined by the displacement sensor that the thickness of the black paint deposition layer reaches the design value, the nanosecond laser is turned off;

控制第一滑块移动,使飞秒激光器的光线经第一反射镜反射抵达黑漆沉积层表面;通过移动压盘机构将颗粒存储箱分成流通区和黑漆颗粒区;控制可移动的封闭挡板使流通区与封闭流道连通;通过飞秒激光器产生的激光对黑漆沉积层进行激光喷丸;Control the movement of the first slider so that the light of the femtosecond laser is reflected by the first reflector and reaches the surface of the black paint deposit layer; the particle storage box is divided into a circulation area and a black paint particle area by moving the pressure plate mechanism; The plate connects the flow area with the closed flow channel; the black paint deposit is laser peened by the laser generated by the femtosecond laser;

通过三维信息采集器捕捉光学玻璃下表面是否存在附着的黑漆气化物,当存在黑漆气化物,通过纳秒激光器产生的激光聚焦到光学玻璃下表面进行激光清洗;控制高速风扇风速,利用封闭流道内气流流动吹走融化或气化的黑漆附着物。The three-dimensional information collector captures whether there is black paint vapor attached to the lower surface of the optical glass. When there is black paint vapor, the laser generated by the nanosecond laser is focused on the lower surface of the optical glass for laser cleaning; the wind speed of the high-speed fan is controlled. The air flow in the runner blows away the melted or vaporized black paint attachments.

进一步,还包括如下步骤:Further, the following steps are also included:

在激光喷丸过程中,所述位移传感器实时监测黑漆沉积层的厚度,当黑漆沉积层厚度小于第二设定值时,停止激光喷丸加工,控制可移动的封闭挡板使黑漆颗粒区与封闭流道连通,通过控制高速风扇启动,使带电荷的黑漆颗粒吸附在待黑漆沉积层表面;控制纳秒激光器的光线经第二反射镜反射抵达黑漆沉积层表面;通过激光焦点对准黑漆沉积层表面吸附的黑漆颗粒层,用于补充黑漆沉积层。During the laser peening process, the displacement sensor monitors the thickness of the black paint deposit in real time, and when the thickness of the black paint deposit is less than the second set value, the laser peening process is stopped, and the movable closed baffle is controlled to make the black paint The particle area is connected with the closed flow channel, and the charged black paint particles are adsorbed on the surface of the black paint deposition layer by controlling the high-speed fan to be started; the light of the nanosecond laser is controlled to be reflected by the second reflector to reach the surface of the black paint deposition layer; The laser focus is aimed at the black paint particle layer adsorbed on the surface of the black paint deposition layer, which is used to supplement the black paint deposition layer.

进一步,根据位移传感器监测值控制纳秒激光器聚焦点位置,使所述黑漆沉积层厚度为1~100μm;通过控制移动平台,使所述黑漆沉积层与光学玻璃的距离为5~20μm;颗粒存储箱内的颗粒直径在1μm以内;所述黑漆粉碎机将降温后的块状的黑漆碾碎成直径小于1μm的颗粒。Further, control the focus point position of the nanosecond laser according to the monitoring value of the displacement sensor, so that the thickness of the black paint deposition layer is 1-100 μm; by controlling the mobile platform, the distance between the black paint deposition layer and the optical glass is 5-20 μm; The diameter of the particles in the particle storage box is within 1 μm; the black paint grinder crushes the cooled block black paint into particles with a diameter of less than 1 μm.

进一步,所述电子喷射器喷射电子流量远大于封闭流道内颗粒通过高速风扇的瞬时流量;当纳秒激光器加热黑漆颗粒形成黑漆沉积层时,所述高速风扇的流速为1~10mm/s,控制可移动的封闭挡板下移,用于增加流通截面;Further, the flow rate of electrons ejected by the electron injector is much greater than the instantaneous flow rate of the particles in the closed flow channel passing through the high-speed fan; when the nanosecond laser heats the black paint particles to form a black paint deposition layer, the flow rate of the high-speed fan is 1-10 mm/s , to control the downward movement of the movable closed baffle, which is used to increase the flow section;

当飞秒激光器对黑漆沉积层进行激光喷丸时,所述高速风扇的流速为10~100mm/s,控制可移动的封闭挡板上移,用于减小流通截面;When the femtosecond laser performs laser peening on the black paint deposition layer, the flow rate of the high-speed fan is 10-100mm/s, and the movable closed baffle is controlled to move up, so as to reduce the flow section;

当纳秒激光器产生的激光清洗光学玻璃下表面时,所述高速风扇的流速为100~1000mm/s,控制可移动的封闭挡板上移,用于减小流通截面。When the laser generated by the nanosecond laser cleans the lower surface of the optical glass, the flow rate of the high-speed fan is 100-1000mm/s, and the movable closed baffle is controlled to move up to reduce the flow section.

进一步,所述纳秒激光器采用正方形光斑,光斑边长0.1-1mm,激光能量为0.03~5mJ,激光脉宽为5-10ns;Further, the nanosecond laser adopts a square spot, the side length of the spot is 0.1-1mm, the laser energy is 0.03-5mJ, and the laser pulse width is 5-10ns;

所述飞秒激光器采用圆形光斑,光斑直径为3-5mm,激光能量为3~15mJ,激光脉宽为300-500fs。The femtosecond laser adopts a circular spot with a spot diameter of 3-5 mm, a laser energy of 3-15 mJ, and a laser pulse width of 300-500 fs.

本发明的有益效果在于:The beneficial effects of the present invention are:

1.本发明可实现刚性约束层下多次激光喷丸成形的装置及方法,通过流动的细小带电黑漆颗粒可在沉积层表面形成一层颗粒薄膜,结合纳米激光加热技术可及时补充激光喷丸产生的凹坑和工件形变产生的中心凹陷,可进行精准修复,避免表面形貌变化对冲击效益的衰减。1. The present invention can realize the device and method of multiple laser shot peening under the rigid constrained layer. A layer of particle film can be formed on the surface of the deposition layer through the flowing fine charged black paint particles. Combined with nano-laser heating technology, the laser spray can be supplemented in time. The pits produced by the shot and the central depression produced by the deformation of the workpiece can be accurately repaired to avoid the attenuation of the impact effect caused by the change of the surface topography.

2.本发明可实现刚性约束层下多次激光喷丸成形的装置及方法,红外线测距仪可以实时检测黑漆沉积层的厚度及与刚性约束层的间距,有效保证约束层对气化物的约束效果和减少冲击力沿沉积层的衰减。2. The present invention can realize the device and method of multiple laser shot peening under the rigid constrained layer, and the infrared range finder can detect the thickness of the black paint deposition layer and the distance from the rigid constrained layer in real time, effectively ensuring that the constrained layer is free from gasification Confinement effects and reduced attenuation of impact forces along sediment layers.

3.本发明可实现刚性约束层下多次激光喷丸成形的装置及方法,通过三维信息采集器可实时检测刚性约束层表面气化物附着情况,控制系统可及时清理去除,避免了污渍对激光能量的吸收,提高激光能量利用率又减少刚性约束层的损伤,可保证每次激光喷丸效果基本不变。3. The present invention can realize the device and method of multiple laser shot peening under the rigid constrained layer. The three-dimensional information collector can detect the adhesion of vapors on the surface of the rigid constrained layer in real time, and the control system can be cleaned and removed in time, avoiding the impact of stains on the laser The absorption of energy improves the utilization rate of laser energy and reduces the damage of the rigid constrained layer, which can ensure that the effect of each laser peening is basically unchanged.

4.本发明可实现刚性约束层下多次激光喷丸成形的装置及方法,黑漆颗粒在密闭空间内气化又冷凝进行循环,颗粒粉碎机可将冷凝的块状黑漆碾压成符合要求的颗粒状,从而进行重复利用。4. The present invention can realize the device and method of multiple laser shot peening under the rigid constrained layer. The black paint particles are gasified and condensed in the closed space for circulation, and the particle pulverizer can roll the condensed massive black paint into a Granularity required for repeated use.

5.本发明可实现刚性约束层下多次激光喷丸成形的装置及方法,激光喷丸成形时,吸收层和约束层孔隙内流动的气流可将黑漆气化物带走,避免在光学玻璃表面凝固影响喷丸效果。5. The present invention can realize the device and method of multiple laser shot peening under the rigid constrained layer. During laser peening, the airflow flowing in the pores of the absorbing layer and the constrained layer can take away the black paint vapor, avoiding the formation of the black paint on the optical glass. Surface solidification affects the shot peening effect.

6.本发明可实现刚性约束层下多次激光喷丸成形的装置及方法,在激光脉冲过程中,目标表面温度和压力积累,形成了不平衡的克努森层。克努森层的压力迅速释放,导致超压在激波的演化过程中呈指数衰减。过压的衰减是因为空气密度相对较低,可压缩性相对较高。激光烧蚀产物不断压缩空气进行工作,导致不可逆的能量损失。而气压泵保证了激光喷丸成形区域初始环境为高压状态,密度增加,可压缩性减小,可增加克努森层压力释放前的峰值,减缓气化物挤压空气的速度,从而降低超压的衰减速度,这提高了冲击力的峰值和持续时间,对激光喷丸成形有促进效益。6. The present invention can realize the device and method of multiple laser shot peening forming under the rigid constrained layer. During the laser pulse process, the target surface temperature and pressure accumulate to form an unbalanced Knudsen layer. The pressure in the Knudsen layer is released rapidly, causing the overpressure to decay exponentially during the evolution of the shock wave. The attenuation of overpressure is due to the relatively low density and relatively high compressibility of air. Laser ablation products continuously compress the air to work, resulting in irreversible energy loss. The air pressure pump ensures that the initial environment of the laser shot peening area is a high pressure state, the density increases, and the compressibility decreases, which can increase the peak value of the Knudsen layer before the pressure is released, slow down the speed at which the gasification product squeezes the air, and thereby reduce the overpressure The attenuation speed, which improves the peak value and duration of the impact force, has a promotion effect on laser shot peening.

附图说明Description of drawings

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,下面描述中的附图是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,显而易见地还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. For some embodiments, it is obvious to those skilled in the art that other drawings can be obtained based on these drawings without any creative effort.

图1为本发明所述的可实现刚性约束层下多次激光喷丸成形的装置的装配图。Fig. 1 is an assembly diagram of a device capable of realizing multiple laser shot peening under a rigid constrained layer according to the present invention.

图2为本发明所述的可实现刚性约束层下多次激光喷丸成形的加工方法的工艺流程图。Fig. 2 is a process flow chart of the processing method capable of realizing multiple laser shot peening under the rigid constrained layer according to the present invention.

图中:In the picture:

1-第一滑轨;2-第一滑块;3-第二滑块;4-飞秒激光器;5-第一反射镜;6-第二反射镜;7-纳秒激光器;8-计算机;9-三维信息采集器;10-第一聚焦镜;11-第二聚焦镜;12-第二滑轨;13-第三滑块;14-光学玻璃;15-位移传感器;16-壳体;17-黑漆颗粒;18-运动控制器;19-黑漆沉积层;20-待加工工件;21-移动平台;22-电子喷射器;23-电子存储腔;24-游离电子;25-高速风扇;26-制冷棒;27-颗粒粉碎机;28-颗粒存储箱;29-风速控制器;30-移动压盘机构;31-压力传感器;32-挡板控制器;33-气压泵。1-first slide rail; 2-first slider; 3-second slider; 4-femtosecond laser; 5-first mirror; 6-second mirror; 7-nanosecond laser; 8-computer ;9-three-dimensional information collector; 10-first focusing mirror; 11-second focusing mirror; 12-second slide rail; 13-third slider; 14-optical glass; 15-displacement sensor; ;17-black paint particles; 18-motion controller; 19-black paint deposition layer; 20-workpiece to be processed; 21-moving platform; 22-electronic injector; 23-electronic storage cavity; High-speed fan; 26-refrigerating rod; 27-particle pulverizer; 28-particle storage box; 29-wind speed controller; 30-moving plate mechanism; 31-pressure sensor; 32-baffle controller; 33-air pressure pump.

具体实施方式Detailed ways

下面结合附图以及具体实施例对本发明作进一步的说明,但本发明的保护范围并不限于此。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but the protection scope of the present invention is not limited thereto.

下面详细描述本发明的实施例,所述实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的,旨在用于解释本发明,而不能理解为对本发明的限制。Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

在本发明的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“轴向”、“径向”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中,“多个”的含义是两个或两个以上,除非另有明确具体的限定。In describing the present invention, it is to be understood that the terms "central", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "axial", The orientation or positional relationship indicated by "radial", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description , rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and thus should not be construed as limiting the invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

在本发明中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection" and "fixation" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

如图1所示,本发明所述的可实现刚性约束层下多次激光喷丸成形的装置,包括运动系统、激光喷丸强化系统、激光加热升温系统、颗粒流动系统和工作槽,所述工作槽内安装待加工工件20,所述工作槽和颗粒流动系统连通形成一个闭环,通过颗粒流动系统使带电荷的黑漆颗粒17吸附在待加工工件20表面;所述激光喷丸强化系统和激光加热升温系统分别位于待加工工件20上方,所述激光加热升温系统用于使带电荷的黑漆颗粒17在待加工工件20表面形成黑漆沉积层19;所述激光喷丸强化系统用于对待加工工件20表面进行激光抛丸;所述运动系统用于使激光喷丸强化系统、激光加热升温系统和待加工工件20移动。本发明利用了带电小颗粒易吸附在金属表面的特点,并采用纳秒脉冲激光加热的方法使微小黑漆颗粒在指定位置熔化沉积,从而实现对吸收层的及时补充和对吸收层厚度的精准控制,采用飞秒脉冲激光多次喷丸成形,成形精度极高;加热升温系统结合高速流动气流可将光学玻璃表面沾附的黑漆杂质熔化并柔性去除,不损伤光学玻璃又不影响下次激光喷丸的效益。As shown in Figure 1, the device of the present invention that can realize multiple laser shot peening under a rigid constrained layer includes a motion system, a laser shot peening strengthening system, a laser heating and heating system, a particle flow system and a working tank. The workpiece 20 to be processed is installed in the working tank, and the working tank and the particle flow system are connected to form a closed loop, and the charged black paint particles 17 are adsorbed on the surface of the workpiece 20 to be processed through the particle flow system; the laser shot peening strengthening system and The laser heating and heating system is respectively located above the workpiece 20 to be processed, and the laser heating and heating system is used to make the charged black paint particles 17 form a black paint deposition layer 19 on the surface of the workpiece 20 to be processed; the laser shot peening strengthening system is used for Laser shot peening is performed on the surface of the workpiece 20 to be processed; the motion system is used to move the laser shot peening strengthening system, the laser heating system and the workpiece 20 to be processed. The invention utilizes the characteristic that charged small particles are easy to adsorb on the metal surface, and adopts nanosecond pulse laser heating method to melt and deposit tiny black paint particles at designated positions, thereby realizing timely replenishment of the absorbing layer and accurate thickness of the absorbing layer Control, using femtosecond pulse laser multiple shot peening forming, the forming accuracy is extremely high; the heating system combined with high-speed flowing air flow can melt and remove the black paint impurities attached to the surface of the optical glass, without damaging the optical glass and not affecting the next time Benefits of laser peening.

所述颗粒流动系统包括壳体16,电子喷射器22、电子存储腔23、高速风扇25、制冷棒26、颗粒粉碎机27、颗粒存储箱28、压力传感器探头31和气压泵33;所述壳体16的封闭流道内设有工作槽,所述工作槽上方的壳体上设有光学玻璃14,所述封闭流道根据流向依次安装颗粒粉碎机27、颗粒存储箱28、高速风扇25、电子存储腔23和待加工工件20;所述颗粒存储箱28内存放黑漆颗粒,所述制冷棒26用于将回收的汽化的黑漆进行降温;所述颗粒粉碎机27用于将降温后的黑漆打碎成黑漆颗粒;所述颗粒粉碎机27出口处设有气压泵33,用于使封闭流道内保持压力;所述颗粒存储箱28一侧壁面上半部分为网孔结构,所述颗粒存储箱28一侧壁面下半部分为封闭边界;所述颗粒存储箱28另一侧壁面为双层挡板,一层挡板为网孔挡板,另一层为可移动的封闭挡板;所述颗粒存储箱28上安装可移动的移动压盘机构30,用于将颗粒存储箱28分成流通区和黑漆颗粒区;所述电子存储腔23上下两侧为网状结构,所述电子存储腔23上安装电子喷射器22,用于使电子存储腔23内部产生游离电子24。The particle flow system includes a housing 16, an electronic injector 22, an electronic storage chamber 23, a high-speed fan 25, a refrigeration rod 26, a particle pulverizer 27, a particle storage box 28, a pressure sensor probe 31 and an air pump 33; The closed channel of the body 16 is provided with a working tank, the housing above the working tank is provided with an optical glass 14, and the closed channel is sequentially installed with a particle grinder 27, a particle storage box 28, a high-speed fan 25, Electronic storage chamber 23 and workpiece 20 to be processed; black paint particles are stored in the particle storage box 28, and the cooling rod 26 is used to cool down the vaporized black paint recovered; the particle grinder 27 is used to cool down The black paint is broken into black paint particles; the outlet of the particle pulverizer 27 is provided with an air pump 33, which is used to maintain the pressure in the closed flow channel; the half part of the side wall surface of the particle storage box 28 is a mesh structure, The lower half of one side wall of the particle storage box 28 is a closed boundary; the other side wall of the particle storage box 28 is a double-layer baffle, one layer of baffle is a mesh baffle, and the other is a movable closed A baffle plate; a movable platen mechanism 30 is installed on the particle storage box 28, which is used to divide the particle storage box 28 into a circulation area and a black paint particle area; the upper and lower sides of the electronic storage chamber 23 are mesh structures, An electron injector 22 is installed on the electron storage chamber 23 for generating free electrons 24 inside the electron storage chamber 23 .

所述激光加热升温系统包括纳秒激光器7、第二反射镜6和第二聚焦镜11;所述纳秒激光器7发出的激光束经第二反射镜6进行反射后通过第二聚焦镜11聚焦在待加工工件20表面,用于使带电荷的黑漆颗粒17在待加工工件20表面形成黑漆沉积层19;当所述黑漆沉积层19高度增加时,通过改变第二聚焦镜11的焦点位置,使激光束始终聚焦在黑漆沉积层19上表面的黑漆颗粒17吸附层上;所述激光喷丸强化系统包括飞秒激光器4、第一反射镜5和第一聚焦镜10;所述飞秒激光器4发出的激光束经第一反射镜5进行反射后通过第一聚焦镜10聚焦至黑漆沉积层19上表面。The laser heating system includes a nanosecond laser 7, a second reflector 6 and a second focus mirror 11; the laser beam emitted by the nanosecond laser 7 is reflected by the second reflector 6 and then focused by the second focus mirror 11 On the surface of the workpiece 20 to be processed, it is used to make the charged black paint particles 17 form a black paint deposition layer 19 on the surface of the workpiece 20 to be processed; The focus position makes the laser beam focus on the black paint particle 17 adsorption layer on the black paint deposition layer 19 upper surface all the time; the laser shot peening strengthening system includes a femtosecond laser 4, the first reflecting mirror 5 and the first focusing mirror 10; The laser beam emitted by the femtosecond laser 4 is reflected by the first reflecting mirror 5 and then focused to the upper surface of the black paint deposition layer 19 by the first focusing mirror 10 .

所述运动系统包括第一滑轨1、第一滑块2、第二滑块3、第二滑轨12、第三滑块13和移动平台21,所述第一滑块2、第二滑块3分别安装在第一滑轨1上;所述第一滑块2与第一反射镜5连接,所述第二滑块3与第二反射镜6连接;所述第三滑块13安装在第二滑轨12上;所述第三滑块13与第二聚焦镜11连接,通过带动第二聚焦镜11上下运动从而实时改变焦点相对黑漆沉积层19和光学玻璃14的位置,用于改变第二聚焦镜11的焦点位置;所述移动平台21上放置待加工工件20,所述移动平台21连接运动控制器18,所述光学玻璃14与移动平台21最大间距可达10mm。The motion system comprises a first slide rail 1, a first slide block 2, a second slide block 3, a second slide rail 12, a third slide block 13 and a mobile platform 21, and the first slide block 2, the second slide block The blocks 3 are installed on the first slide rail 1 respectively; the first slide block 2 is connected with the first reflector 5, and the second slide block 3 is connected with the second reflector 6; the third slide block 13 is installed On the second slide rail 12; the third slide block 13 is connected with the second focusing mirror 11, and by driving the second focusing mirror 11 to move up and down so as to change the relative position of the focus relative to the black paint deposition layer 19 and the optical glass 14 in real time, use The focus position of the second focusing mirror 11 is changed; the workpiece 20 to be processed is placed on the mobile platform 21, and the mobile platform 21 is connected to the motion controller 18, and the maximum distance between the optical glass 14 and the mobile platform 21 can reach 10 mm.

本发明所述的可实现刚性约束层下多次激光喷丸成形的装置还包括三维信息采集器9、压力传感器31和位移传感器15,所述三维信息采集器9对准光学玻璃下表面,用于捕捉光学玻璃14下表面是否存在黑漆气化物附着;所述位移传感器15用于检测黑漆沉积层19的厚度和黑漆沉积层19与光学玻璃14之间的距离;所述压力传感器31用于检测封闭流道内的压力。The device of the present invention that can realize multiple laser shot peening under the rigid constrained layer also includes a three-dimensional information collector 9, a pressure sensor 31 and a displacement sensor 15, the three-dimensional information collector 9 is aligned with the lower surface of the optical glass, and Whether there is black paint vaporization attached to the lower surface of catching optical glass 14; Described displacement sensor 15 is used for detecting the distance between the thickness of black paint deposition layer 19 and black paint deposition layer 19 and optical glass 14; Described pressure sensor 31 Used to detect the pressure in a closed flow channel.

计算机8控制第一滑块2、第二滑块3、飞秒激光器4、纳秒激光器7、三维信息采集器9、第三滑块13、位移传感器15、运动控制器18、电子喷射器22、风速控制器29、压力传感器30、挡板控制器32、气压泵33。所述风速控制器29用于控制高速风扇25的风速。所述挡板控制器32用于控制颗粒存储箱28上的可移动封闭挡板。运动控制器18用于控制移动平台21的移动。The computer 8 controls the first slider 2, the second slider 3, the femtosecond laser 4, the nanosecond laser 7, the three-dimensional information collector 9, the third slider 13, the displacement sensor 15, the motion controller 18, and the electronic injector 22 , wind speed controller 29, pressure sensor 30, baffle controller 32, air pressure pump 33. The wind speed controller 29 is used to control the wind speed of the high-speed fan 25 . The baffle controller 32 is used to control the movable closure baffle on the pellet storage bin 28 . The motion controller 18 is used to control the movement of the mobile platform 21 .

如图2所示,本发明所述的可实现刚性约束层下多次激光喷丸成形的装置的加工方法,包括以下步骤:As shown in Figure 2, the processing method of the device described in the present invention that can realize multiple laser shot peening under the rigid constrained layer includes the following steps:

通过气压泵33使封闭流道内充满高压气体,当压力传感器31达到第一设定值后关闭气压泵33;The air pump 33 is used to fill the closed channel with high-pressure gas, and when the pressure sensor 31 reaches the first set value, the air pump 33 is closed;

通过控制高速风扇25启动,使颗粒存储箱28内的黑漆颗粒17在封闭流道内内循环流动;所述黑漆颗粒17经过电子存储腔23后通过电子喷射器22使黑漆颗粒17带电荷;带电荷的黑漆颗粒17吸附在待加工工件20表面;By controlling the high-speed fan 25 to start, the black paint particles 17 in the particle storage box 28 are circulated in the closed flow channel; after the black paint particles 17 pass through the electronic storage chamber 23, the black paint particles 17 are charged by the electronic injector 22 ; Charged black paint particles 17 are adsorbed on the surface of workpiece 20 to be processed;

控制第二滑块3移动,使纳秒激光器7的光线经第二反射镜6反射抵达待加工工件20表面;通过激光焦点对准待加工工件20表面吸附的黑漆颗粒层,用于形成黑漆沉积层19;当通过位移传感器15确定黑漆沉积层19的厚度达到设计值时,关闭纳秒激光器7;Control the movement of the second slider 3 so that the light of the nanosecond laser 7 is reflected by the second reflector 6 and reaches the surface of the workpiece 20 to be processed; the laser focus is used to align the black paint particle layer adsorbed on the surface of the workpiece 20 to be processed to form a black Paint deposition layer 19; When the thickness of black paint deposition layer 19 is determined to reach the design value by displacement sensor 15, close nanosecond laser 7;

控制第一滑块2移动,使飞秒激光器4的光线经第一反射镜5反射抵达黑漆沉积层19表面;通过移动压盘机构30将颗粒存储箱28分成流通区和黑漆颗粒区;控制可移动的封闭挡板使流通区与封闭流道连通;通过飞秒激光器4产生的激光对黑漆沉积层19进行激光喷丸;Control the movement of the first slider 2, so that the light of the femtosecond laser 4 is reflected by the first reflector 5 and reaches the surface of the black paint deposition layer 19; the particle storage box 28 is divided into a circulation area and a black paint particle area by moving the platen mechanism 30; Control the movable closed baffle to make the flow area communicate with the closed flow channel; the black paint deposition layer 19 is laser peened by the laser generated by the femtosecond laser 4;

通过三维信息采集器9捕捉光学玻璃14下表面是否存在附着的黑漆气化物,当存在黑漆气化物,通过纳秒激光器7产生的激光聚焦到光学玻璃14下表面进行激光清洗;控制高速风扇25风速,利用封闭流道内气流流动吹走融化或气化的黑漆附着物。Use the three-dimensional information collector 9 to capture whether there is black paint vapor attached to the lower surface of the optical glass 14. When there is black paint vapor, the laser generated by the nanosecond laser 7 is focused on the lower surface of the optical glass 14 for laser cleaning; control the high-speed fan 25 wind speed, use the air flow in the closed flow channel to blow away the melted or vaporized black paint attachments.

在激光喷丸过程中,所述位移传感器15实时监测黑漆沉积层19的厚度,当黑漆沉积层19厚度小于第二设定值时,停止激光喷丸加工,控制可移动的封闭挡板使黑漆颗粒区与封闭流道连通,通过控制高速风扇25启动,使带电荷的黑漆颗粒17吸附在待黑漆沉积层19表面;控制纳秒激光器7的光线经第二反射镜6反射抵达黑漆沉积层19表面;通过激光焦点对准黑漆沉积层19表面吸附的黑漆颗粒层,用于补充黑漆沉积层19。During the laser peening process, the displacement sensor 15 monitors the thickness of the black paint deposition layer 19 in real time, and when the thickness of the black paint deposition layer 19 is less than the second set value, the laser peening process is stopped and the movable closed baffle is controlled. Make the black paint particle area communicate with the closed flow channel, start by controlling the high-speed fan 25, make the charged black paint particles 17 adsorb on the surface of the black paint deposition layer 19 to be deposited; control the light of the nanosecond laser 7 to be reflected by the second reflector 6 Arrive at the surface of the black paint deposition layer 19 ; the black paint particle layer adsorbed on the surface of the black paint deposition layer 19 is aimed at the laser focus to supplement the black paint deposition layer 19 .

根据位移传感器15监测值控制纳秒激光器7聚焦点位置,使所述黑漆沉积层19厚度为1~100μm;通过控制移动平台21,使所述黑漆沉积层19与光学玻璃14的距离为5~20μm,保证了光学玻璃14对激光喷丸起到约束作用,又不易使光学玻璃破碎;所述移动平台21与光学玻璃14间距最大为10mm,方便黑漆颗粒17流动及黑漆沉积层19的沉积。颗粒存储箱28内的颗粒直径在1μm以内;所述黑漆粉碎机27将降温后的块状的黑漆碾碎成直径小于1μm的颗粒。According to the monitoring value of the displacement sensor 15, the focus position of the nanosecond laser 7 is controlled, so that the thickness of the black paint deposition layer 19 is 1-100 μm; by controlling the mobile platform 21, the distance between the black paint deposition layer 19 and the optical glass 14 is 5-20 μm, which ensures that the optical glass 14 has a restraining effect on the laser shot peening, and is not easy to break the optical glass; the maximum distance between the mobile platform 21 and the optical glass 14 is 10mm, which is convenient for the flow of black paint particles 17 and black paint deposition 19 depositions. The diameter of the particles in the particle storage tank 28 is within 1 μm; the black paint grinder 27 crushes the cooled block black paint into particles with a diameter less than 1 μm.

当纳秒激光器7加热黑漆颗粒17形成黑漆沉积层19时,所述高速风扇25的流速为1~10mm/s,控制可移动的封闭挡板下移,用于增加流通截面;当飞秒激光器4对黑漆沉积层19进行激光喷丸时,所述高速风扇25的流速为10~100mm/s,控制可移动的封闭挡板上移,用于减小流通截面;当纳秒激光器7产生的激光清洗光学玻璃14下表面时,所述高速风扇25的流速为100~1000mm/s,控制可移动的封闭挡板上移,用于减小流通截面。When the nanosecond laser 7 heated the black paint particles 17 to form the black paint deposition layer 19, the flow velocity of the high-speed fan 25 was 1 to 10mm/s, and the movable closed baffle plate was controlled to move down to increase the flow section; When the second laser 4 is laser peening the black paint deposition layer 19, the flow velocity of the high-speed fan 25 is 10 to 100mm/s, and the movable closed baffle is controlled to move up to reduce the flow section; when the nanosecond laser 7. When the laser generated by 7 cleans the lower surface of the optical glass 14, the flow rate of the high-speed fan 25 is 100-1000mm/s, and the movable closed baffle is controlled to move up to reduce the flow section.

所述纳秒激光器7采用正方形光斑,光斑边长0.1-1mm,激光能量为0.03~5mJ,激光脉宽为5-10ns;所述飞秒激光器4采用圆形光斑,光斑直径为3-5mm,激光能量为3~15mJ,激光脉宽为300-500fs。The nanosecond laser 7 adopts a square spot with a side length of 0.1-1mm, the laser energy is 0.03-5mJ, and the laser pulse width is 5-10ns; the femtosecond laser 4 adopts a circular spot with a spot diameter of 3-5mm. The laser energy is 3-15mJ, and the laser pulse width is 300-500fs.

所述电子喷射器22喷射电子流量远大于封闭流道内颗粒通过高速风扇25的瞬时流量,保证95%以上的黑漆颗粒17附着电子带负电性并能在金属工件表面吸附形成短暂1~3s的薄薄的一层黑漆颗粒层,这是因为当颗粒带电时同性排斥;当颗粒电子被金属工件掠夺变成不带电时,无吸附力的作用会使黑漆颗粒17被高速高压流体吹走,这既避免黑漆颗粒17相互粘合又有利于黑漆沉积层19高精度地逐点逐面修补及逐层快速沉积。当黑漆颗粒17受热熔化变成黑漆沉积层19时,由于黑漆沉积层19和金属工件超过3s的接触会变成电中性,黑漆沉积层19又可短暂1~3s吸附黑漆颗粒17。The flow rate of electrons ejected by the electron injector 22 is much greater than the instantaneous flow rate of the particles in the closed flow channel passing through the high-speed fan 25, ensuring that more than 95% of the black paint particles 17 are negatively charged and can be adsorbed on the surface of the metal workpiece to form a short-term 1-3s. A thin layer of black paint particle layer, this is because of homosexual repulsion when the particles are charged; when the particle electrons are plundered by the metal workpiece and become uncharged, the non-adsorption effect will cause the black paint particles 17 to be blown away by the high-speed and high-pressure fluid , which not only prevents the black paint particles 17 from adhering to each other, but also facilitates the black paint deposition layer 19 to be repaired point by point with high precision and rapidly deposited layer by layer. When the black paint particles 17 are heated and melted to form the black paint deposition layer 19, the contact between the black paint deposition layer 19 and the metal workpiece for more than 3 seconds will become electrically neutral, and the black paint deposition layer 19 can absorb black paint for a short period of 1 to 3 seconds. particles17.

实施例1中的可实现刚性约束层下多次激光喷丸成形的方法,包括以下步骤:The method that can realize multiple laser shot peening under the rigid constrained layer in embodiment 1 comprises the following steps:

S1:所述工作槽内安装待加工工件20,待加工工件20为金属工件。一般为微米/纳米级的机械电子和MEMS产品。打开气压泵33使封闭流道内充满高压气体,当压力传感器30达到2-5atm后关闭气压泵33;S1: The workpiece 20 to be processed is installed in the working tank, and the workpiece 20 to be processed is a metal workpiece. Generally micro/nano mechanical electronics and MEMS products. Open the air pump 33 to fill the closed channel with high-pressure gas, and close the air pump 33 when the pressure sensor 30 reaches 2-5atm;

S2:计算机8控制电子喷射器22、风速控制器29、制冷棒26、颗粒粉碎机27开启,使颗粒存储箱28内的黑漆颗粒17在封闭流道内循环流动,黑漆颗粒17经过电子存储腔23后带负电,并且带电黑漆颗粒17经金属工件表面时会有短暂的吸附效果;S2: The computer 8 controls the electronic injector 22, the wind speed controller 29, the cooling rod 26, and the particle pulverizer 27 to turn on, so that the black paint particles 17 in the particle storage box 28 circulate in the closed flow channel, and the black paint particles 17 are electronically stored. The cavity 23 is negatively charged, and the charged black paint particles 17 have a short-term adsorption effect when passing through the surface of the metal workpiece;

S3:计算机8控制第二滑块3移动,使纳秒激光器7的光线经第二反射镜6反射抵达加工区域的坐标原点,此时,启动纳秒激光器7、运动控制器18、第三滑块13和非接触式红外线测距仪,运动控制器18控制移动平台21三维运动,激光焦点对准金属工件20表面暂时吸附的黑漆颗粒层,使其融化并逐渐堆积,形成黑漆沉积层19,用非接触式红外线测距仪观测黑漆沉积层19的厚度,达到合适厚度后关闭纳秒激光器7、第三滑块13、风速控制器29,并启动第二滑块3控制第二反射镜6远离工作台上方,运动控制器18控制移动平台21归位并上升一定距离,使黑漆沉积层与光学玻璃14间距合适;S3: The computer 8 controls the movement of the second slider 3, so that the light of the nanosecond laser 7 is reflected by the second mirror 6 and arrives at the coordinate origin of the processing area. At this time, start the nanosecond laser 7, the motion controller 18, and the third slider. The block 13 and the non-contact infrared rangefinder, the motion controller 18 controls the three-dimensional movement of the mobile platform 21, and the laser focus is aimed at the black paint particle layer temporarily adsorbed on the surface of the metal workpiece 20, so that it melts and accumulates gradually to form a black paint deposition layer 19, observe the thickness of the black paint deposition layer 19 with a non-contact infrared rangefinder, close the nanosecond laser 7, the third slide block 13, the wind speed controller 29 after reaching a suitable thickness, and start the second slide block 3 to control the second The reflector 6 is far away from the top of the workbench, and the motion controller 18 controls the mobile platform 21 to return to its original position and rise a certain distance, so that the distance between the black paint deposition layer and the optical glass 14 is suitable;

S4:计算机8控制第一滑块2移动,使飞秒激光器4的光线经第一反射镜5反射抵达加工区域的坐标原点,启动移动压盘机构30将颗粒存储箱28分成流通区和黑漆颗粒区,控制可移动的封闭挡板使流通区与封闭流道连通;并通过控制风速控制器29来使气体达到合适流速,此时,启动飞秒激光器4、运动控制器18、三维信息采集器9,实现对黑漆沉积层19的多次激光喷丸;S4: The computer 8 controls the movement of the first slider 2, so that the light of the femtosecond laser 4 is reflected by the first reflector 5 and arrives at the coordinate origin of the processing area, and the moving platen mechanism 30 is started to divide the particle storage box 28 into a circulation area and a black paint In the particle area, control the movable closed baffle to connect the flow area with the closed flow channel; and control the wind speed controller 29 to make the gas reach an appropriate flow rate. At this time, start the femtosecond laser 4, the motion controller 18, and the three-dimensional information collection Device 9, realizes multiple times of laser shot peening to black paint deposition layer 19;

S5:非接触式红外线测距仪随时监测黑漆沉积层19整个平面上不同截面的厚度,当某个截面厚度低于一定范围时重复S3操作对黑漆沉积层19进行定向补充;S5: The non-contact infrared range finder monitors the thickness of different sections on the entire plane of the black paint deposition layer 19 at any time, and when the thickness of a certain section is lower than a certain range, repeat the operation of S3 to supplement the black paint deposition layer 19 in a directional manner;

S6:三维信息采集器9随时捕捉光学玻璃14下表面是否有黑漆气化物附着,如若有则启动第二滑块3、纳秒激光器7、运动控制器18、第三滑块13、风速控制器29、挡板控制器32,选择合适的激光参数使激光焦点聚焦在黑色区域使黑漆附着物熔化或气化,挡板控制器32控制挡板高出颗粒存储箱28内颗粒存储高度,风速控制器29控制高速风扇25风速,使管道内纯高压气流高速流动吹走融化或气化的黑漆附着物;S6: The three-dimensional information collector 9 captures at any time whether there is black paint vapor attached to the lower surface of the optical glass 14, and if so, starts the second slider 3, the nanosecond laser 7, the motion controller 18, the third slider 13, and the wind speed control Device 29, baffle controller 32, select appropriate laser parameters to focus the laser focus on the black area to melt or vaporize the black paint attachment, the baffle controller 32 controls the baffle to be higher than the particle storage height in the particle storage box 28, The wind speed controller 29 controls the wind speed of the high-speed fan 25, so that the pure high-pressure airflow in the pipeline flows at a high speed and blows away the melted or gasified black paint attachments;

S7:循环S4-S6,完成工件的激光喷丸成形,关闭所有设备。S7: cycle S4-S6, complete the laser shot peening of the workpiece, and close all equipment.

应当理解,虽然本说明书是按照各个实施例描述的,但并非每个实施例仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施例中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施方式。It should be understood that although this description is described according to various embodiments, not each embodiment only includes an independent technical solution, and this description of the description is only for clarity, and those skilled in the art should take the description as a whole , the technical solutions in the various embodiments can also be properly combined to form other implementations that can be understood by those skilled in the art.

上文所列出的一系列的详细说明仅仅是针对本发明的可行性实施例的具体说明,它们并非用以限制本发明的保护范围,凡未脱离本发明技艺精神所作的等效实施例或变更均应包含在本发明的保护范围之内。The series of detailed descriptions listed above are only specific descriptions for feasible embodiments of the present invention, and they are not intended to limit the protection scope of the present invention. Any equivalent embodiment or All changes should be included within the protection scope of the present invention.

Claims (10)

1. A device capable of realizing multiple times of laser shot peening forming under a rigid constraint layer is characterized by comprising a motion system, a laser shot peening strengthening system, a laser heating system, a particle flowing system and a working tank,
a workpiece (20) to be processed is arranged in the working groove, the working groove is communicated with the particle flow system to form a closed loop, and charged black paint particles (17) are adsorbed on the surface of the workpiece (20) to be processed through the particle flow system; the laser heating temperature rising system is used for enabling charged black paint particles (17) to form a black paint deposition layer (19) on the surface of a workpiece (20) to be processed; the laser shot blasting strengthening system is used for carrying out laser shot blasting on the surface of a workpiece (20) to be processed; the motion system is used for enabling the laser shot peening system, the laser heating temperature rising system and the workpiece (20) to be processed to move.
2. Device capable of achieving multiple laser shot peening formations under rigid constraining layers according to claim 1, characterized in that the particle flow system comprises a housing (16), an electronic ejector (22), an electronic storage chamber (23), a high speed fan (25), a refrigeration rod (26), a particle crusher (27), a particle storage tank (28), a pressure sensor probe (31) and a pneumatic pump (33);
a working groove is arranged in a closed flow channel of the shell (16), optical glass (14) is arranged on the shell above the working groove, and a particle crusher (27), a particle storage box (28), a high-speed fan (25), an electronic storage cavity (23) and a workpiece (20) to be processed are sequentially arranged in the closed flow channel according to the flow direction; the particle storage box (28) is internally provided with black paint particles, and the refrigeration stick (26) is used for cooling the recycled vaporized black paint; the particle crusher (27) is used for crushing the cooled black paint into black paint particles; the outlet of the particle crusher (27) is provided with a pneumatic pump (33) for keeping the pressure in the closed flow channel; the upper half part of one side wall surface of the particle storage box (28) is of a mesh structure, and the lower half part of one side wall surface of the particle storage box (28) is a closed boundary; the other side wall surface of the particle storage box (28) is a double-layer baffle, one layer of baffle is a mesh baffle, and the other layer of baffle is a movable closed baffle; the particle storage tank (28) is provided with a movable platen mechanism (30) which is used for dividing the particle storage tank (28) into a circulation area and a black paint particle area; the upper side and the lower side of the electronic storage cavity (23) are of a net structure, and an electronic ejector (22) is mounted on the electronic storage cavity (23) and used for generating free electrons (24) in the electronic storage cavity (23).
3. Device capable of achieving multiple laser shot peening under a rigid constraining layer according to claim 1, characterized in that the laser heating temperature raising system comprises a nanosecond laser (7), a second mirror (6) and a second focusing mirror (11); the laser beam emitted by the nanosecond laser (7) is reflected by the second reflecting mirror (6) and then focused on the surface of the workpiece (20) to be processed through the second focusing mirror (11) to form a black paint deposition layer (19) on the surface of the workpiece (20) to be processed by the black paint particles (17) with charges; when the height of the black paint deposition layer (19) is increased, the laser beam is focused on the black paint particle (17) adsorption layer on the upper surface of the black paint deposition layer (19) by changing the focal position of the second focusing lens (11); the laser shot peening system comprises a femtosecond laser (4), a first reflecting mirror (5) and a first focusing mirror (10); and laser beams emitted by the femtosecond laser (4) are reflected by the first reflector (5) and then focused to the upper surface of the black paint deposition layer (19) through the first focusing mirror (10).
4. The device capable of achieving multiple times of laser shot peening forming under the rigid constraint layer is characterized in that the motion system comprises a first slide rail (1), a first slide block (2), a second slide block (3), a second slide rail (12), a third slide block (13) and a moving platform (21), wherein the first slide block (2) and the second slide block (3) are respectively installed on the first slide rail (1); the first sliding block (2) is connected with the first reflector (5), and the second sliding block (3) is connected with the second reflector (6); the third sliding block (13) is arranged on the second sliding rail (12); the third sliding block (13) is connected with the second focusing mirror (11) and is used for changing the focus position of the second focusing mirror (11); and a workpiece (20) to be processed is placed on the moving platform (21).
5. The device capable of realizing multiple times of laser shot peening forming under the rigid constraint layer is characterized by further comprising a three-dimensional information collector (9), a pressure sensor (31) and a displacement sensor (15), wherein the three-dimensional information collector (9) is aligned to the lower surface of the optical glass and is used for capturing whether black paint vapor is attached to the lower surface of the optical glass (14); the displacement sensor (15) is used for detecting the thickness of the black paint deposition layer (19) and the distance between the black paint deposition layer (19) and the optical glass (14); the pressure sensor (31) is used for detecting the pressure in the closed flow channel.
6. A method for processing an apparatus capable of achieving multiple times of laser peening forming under a rigid constraint layer according to any one of claims 1 to 5, comprising the steps of:
the closed flow channel is filled with high-pressure gas through a pneumatic pump (33), and the pneumatic pump (33) is closed when the pressure sensor (31) reaches a first set value;
the black paint particles (17) in the particle storage box (28) circularly flow in the closed flow passage by controlling the high-speed fan (25) to be started; the black paint particles (17) pass through the electronic storage cavity (23) and then are charged through the electronic ejector (22); the charged black paint particles (17) are adsorbed on the surface of a workpiece (20) to be processed;
controlling the second sliding block (3) to move, so that the light of the nanosecond laser (7) is reflected by the second reflecting mirror (6) to reach the surface of the workpiece (20) to be processed; aiming at the black paint particle layer absorbed on the surface of the workpiece (20) to be processed through the laser focus to form a black paint deposition layer (19); when the thickness of the black paint deposition layer (19) is determined to reach a design value through the displacement sensor (15), the nanosecond laser (7) is turned off;
controlling the first sliding block (2) to move, so that the light of the femtosecond laser (4) is reflected by the first reflecting mirror (5) to reach the surface of the black paint deposition layer (19); dividing a particle storage tank (28) into a circulation area and a black paint particle area by moving a platen mechanism (30); controlling the movable sealing baffle plate to enable the circulation area to be communicated with the sealing flow channel; performing laser shot blasting on the black paint deposition layer (19) by laser generated by a femtosecond laser (4);
whether black paint vapor attached to the lower surface of the optical glass (14) exists or not is captured through the three-dimensional information collector (9), and when the black paint vapor exists, laser generated by the nanosecond laser (7) is focused on the lower surface of the optical glass (14) for laser cleaning; the air speed of the high-speed fan (25) is controlled, and melted or gasified black paint attachments are blown away by the flowing of air flow in the closed flow channel.
7. The method for processing an apparatus capable of performing multiple laser peening forming under a rigid constraint layer according to claim 6, further comprising the steps of:
in the laser shot blasting process, the displacement sensor (15) monitors the thickness of the black paint deposition layer (19) in real time, when the thickness of the black paint deposition layer (19) is smaller than a second set value, laser shot blasting processing is stopped, the movable sealing baffle is controlled to enable the black paint particle area to be communicated with the sealing flow channel, and the high-speed fan (25) is controlled to start, so that the black paint particles (17) with charges are adsorbed on the surface of the black paint deposition layer (19); controlling the light of the nanosecond laser (7) to be reflected by the second reflector (6) to reach the surface of the black paint deposition layer (19); the black paint particle layer adsorbed on the surface of the black paint deposition layer (19) is focused by laser to supplement the black paint deposition layer (19).
8. The processing method of the device capable of realizing multiple times of laser shot peening forming under the rigid constraint layer is characterized in that the position of a focus point of a nanosecond laser (7) is controlled according to a monitoring value of a displacement sensor (15), so that the thickness of the black paint deposition layer (19) is 1-100 μm; controlling a moving platform (21) to enable the distance between the black paint deposition layer (19) and the optical glass (14) to be 5-20 mu m; the particle diameter in the particle storage tank (28) is within 1 mu m; and the black paint crusher (27) crushes the blocky black paint after temperature reduction into particles with the diameter less than 1 mu m.
9. The machining method of the device capable of realizing multiple times of laser shot peening under the rigid constraint layer is characterized in that the electron jet (22) jets the electron flow rate which is far larger than the instantaneous flow rate of particles in the closed flow channel through the high-speed fan (25); when the nanosecond laser (7) heats the black paint particles (17) to form a black paint deposition layer (19), the flow rate of the high-speed fan (25) is 1-10 mm/s, and the movable sealing baffle is controlled to move downwards to increase the flow cross section; when the femtosecond laser (4) carries out laser shot blasting on the black paint deposition layer (19), the flow rate of the high-speed fan (25) is 10-100 mm/s, and the movable sealing baffle is controlled to move upwards to reduce the flow cross section; when the laser generated by the nanosecond laser (7) cleans the lower surface of the optical glass (14), the flow rate of the high-speed fan (25) is 100-1000 mm/s, and the movable sealing baffle is controlled to move upwards to reduce the flow cross section.
10. The processing method of the device capable of realizing the multiple laser shot peening forming under the rigid constraint layer according to claim 6, wherein the nanosecond laser (7) adopts a square light spot, the side length of the light spot is 0.1-1mm, the laser energy is 0.03-5 mJ, and the pulse width of the laser is 5-10ns; the femtosecond laser (4) adopts a circular light spot, the diameter of the light spot is 3-5mm, the laser energy is 3-15 mJ, and the laser pulse width is 300-500fs.
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