CN115945338A - Photoresist spraying mechanism of semiconductor gluing equipment - Google Patents

Photoresist spraying mechanism of semiconductor gluing equipment Download PDF

Info

Publication number
CN115945338A
CN115945338A CN202211663717.5A CN202211663717A CN115945338A CN 115945338 A CN115945338 A CN 115945338A CN 202211663717 A CN202211663717 A CN 202211663717A CN 115945338 A CN115945338 A CN 115945338A
Authority
CN
China
Prior art keywords
position department
flush coater
semiconductor
lieing
sliding door
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202211663717.5A
Other languages
Chinese (zh)
Inventor
安礼余
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yuhongyan Technology Suzhou Co ltd
Original Assignee
Yuhongyan Technology Suzhou Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yuhongyan Technology Suzhou Co ltd filed Critical Yuhongyan Technology Suzhou Co ltd
Priority to CN202211663717.5A priority Critical patent/CN115945338A/en
Publication of CN115945338A publication Critical patent/CN115945338A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

The invention discloses a photoresist spraying mechanism of semiconductor gluing equipment, which comprises a spraying machine and a fixed frame, wherein the front end of the spraying machine is provided with the fixed frame at the middle position, the inner position of the fixed frame is provided with a sleeving column, the right end position of the sleeving column is provided with a magnet, the inner side of the fixed frame is provided with a drawable plate at the right position, the front end position of the spraying machine is provided with a sliding door, the inner side position of the sliding door is provided with an expansion rubber plug, the lower end of the fixed plate is provided with expansion rubber plugs at the four corners, the upper end position of the fixed plate is provided with a dilution sponge, the fixed frame is welded at the front end position of the spraying machine, the drawable plate can be drawn out, the magnet is adsorbed at the inner side position of the drawable plate, then an object can be placed at the upper end position of the drawable plate, and the drawable plate can be pushed into the inner position after use is finished.

Description

Photoresist spraying mechanism of semiconductor gluing equipment
Technical Field
The invention belongs to the technical field related to photoresist spraying mechanisms of semiconductor gluing equipment, and particularly relates to a photoresist spraying mechanism of semiconductor gluing equipment.
Background
The photoresist is also called photoresist, and refers to a resist etching film material whose solubility changes by the irradiation or radiation of ultraviolet light, electron beam, ion beam, X-ray, etc., and the photoresist spraying mechanism is a process test instrument used in the technical fields of physics, electronics and communication.
Through retrieval, the patent document with the application number of CN202210578943.7 discloses photoresist spraying equipment, which relates to the field of semiconductor production and comprises a spraying rack, a tray and a spraying assembly; the spraying assembly comprises a spraying head assembly, a feed box, a feed pump and a bearing driving mechanism, the spraying head assembly comprises an outer shell, a rotary atomization piece and a liquid guide thin tube, the bearing driving mechanism comprises a support bracket, a support bracket sliding rail, a hexagonal prism and a driving piece, the support bracket is fixed on a spraying rack, the hexagonal prism rotates and is arranged on the support bracket, the tooth space between multiple groups of racks and the tooth space between each group of racks are different on the outer wall of the hexagonal prism, the support bracket sliding rail is arranged on the side part of the support bracket and on the support bracket sliding rail and is provided with a support piece sliding on the support bracket, and an outer gear meshed with one group of racks is arranged on the outer wall of the rotary atomization piece. The invention has simple structure, can atomize the photoresist for spraying and adjust the atomization and spraying speed of the photoresist, and has uniform spraying and convenient operation;
the above patents are used in which the material to be sprayed is stored only at locations within the applicator and can contaminate the sliding door during spraying.
Summary of the invention
The invention aims to provide a photoresist spraying mechanism of semiconductor gluing equipment, which aims to solve the problems that the sprayed material in the background art can only be placed in an inner position of a spraying machine for storage and a sliding door can be dirtied during spraying.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a photoresist of semiconductor rubber coating equipment sprays mechanism, includes flush coater and fixed frame, the front end of flush coater is provided with fixed frame in lieing in intermediate position department, the inside position department of fixed frame is provided with the cover post, the right-hand member position department of cover post is provided with the magnet, but the inboard of fixed frame is provided with the pull board in lieing in right-hand position department, the front end position department of flush coater is provided with the sliding door, the inboard position department of sliding door is provided with, the lower extreme of fixed plate is provided with the inflation plug in lieing in four corners position department, the upper end position department of fixed plate is provided with the dilution sponge.
Preferably, the front end of flush coater is provided with control button at the position of lieing in the left side, the front end of flush coater is provided with the data plate at the position of lieing in left side below position, the front end of flush coater is provided with liquid crystal display at the position of lieing in right side top position, the front end of flush coater is provided with controls the panel at the position of lieing in the middle of the right side top position, the front end of flush coater is provided with the chamber door at the position of lieing in below position, the upper end of flush coater is provided with the alarm lamp at the position of lieing in the right side, the lower extreme of flush coater is provided with the removal universal wheel at lieing in four corners position.
Preferably, the inner wall position department of flush coater is provided with the ventilation hole, the inboard position department of flush coater is provided with the shower nozzle, the inboard position department of being located the top of flush coater is provided with work platform.
Preferably, a display window is arranged at the front end of the sliding door, a fixed handle is arranged at the lower position of the front end of the sliding door, and the sliding door is fixedly connected with the spraying machine through a hydraulic rod.
Preferably, the control button is provided with a plurality of, the control button can control flush coater and shower nozzle and carry out work, the control mode of control button sets up to push type and rotation type.
Preferably, the number of the movable universal wheels is four, the movable universal wheels can rotate at any angle, and the movable universal wheels are fixedly connected with the spraying machine through fixing bolts.
Preferably, the shape structure of the fixed plate is a cuboid structure, and the fixed plate is sleeved with the sliding door through an expansion rubber plug.
Preferably, the drawable plate is sleeved at the inner position of the fixed frame, the fixed frame is welded with the spraying machine, and the sleeved column and the magnet are sleeved at the inner position of the drawable plate.
Compared with the prior art, the invention provides a photoresist spraying mechanism of semiconductor gluing equipment, which has the following beneficial effects:
1. the welding of front position department at the flush coater has fixed frame, when needs placing object article, can pull out drawable plate for the magnet adsorbs the inboard position department that can draw the plate, then can place the object in the upper end position department that can draw the plate, use after accomplishing can with draw the plate propulsion inside position department.
2. The inboard position department at the sliding door is provided with dilutes the sponge, dilutes the sponge and cup joints together through the inflation plug with the sliding door, dilutes the sponge when spraying and can dilute the glue, prevents that it from making dirty the sliding door.
Drawings
Fig. 1 is a schematic structural diagram of a photoresist spraying mechanism of the semiconductor gluing equipment.
Fig. 2 is a schematic view of an opening structure of a sliding door of a photoresist spraying mechanism of the semiconductor glue spreading device.
FIG. 3 is a schematic diagram of a photoresist spraying mechanism dilution sponge structure of the semiconductor glue spreading device of the present invention.
FIG. 4 is a schematic diagram of a drawable plate structure of a photoresist spraying mechanism of a semiconductor glue coating apparatus according to the present invention.
FIG. 5 is a schematic structural view of the working principle of a drawable plate of the photoresist spraying mechanism of the semiconductor glue spreading device of the present invention.
Fig. 6 is a schematic view of an inner part of a drawable plate of a photoresist spraying mechanism of the semiconductor glue spreading device according to the present invention.
In the figure: 1. a spray coater; 2. a control button; 3. fixing a handle; 4. a nameplate; 5. moving the universal wheel; 6. a box door; 7. a drawable plate; 8. a control panel; 9. a liquid crystal display screen; 10. an alarm lamp; 11. a display window; 12. sliding the door; 13. a hydraulic lever; 14. diluting the sponge; 15. a vent hole; 16. a spray head; 17. a working platform; 18. a fixing plate; 19. expanding the rubber plug; 20. fixing the frame; 21. sleeving the column; 22. and (4) a magnet.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides a photoresist spraying mechanism of semiconductor gluing equipment as shown in figures 1-6, which comprises a spraying machine 1 and a fixed frame 20, wherein the fixed frame 20 is arranged at the middle position of the front end of the spraying machine 1, a sleeving column 21 is arranged at the inner position of the fixed frame 20, a magnet 22 is arranged at the right end position of the sleeving column 21, a drawable plate 7 is arranged at the right position of the inner side of the fixed frame 20, a sliding door 12 is arranged at the front position of the spraying machine 1, 28 is arranged at the inner side position of the sliding door 12, an expansion rubber plug 19 is arranged at the four corners of the lower end of a fixed plate 18, and a dilution sponge 14 is arranged at the upper end position of the fixed plate 18.
As shown in fig. 1 and 2, in order to spray a semiconductor, a control button 2 is provided at a position located at the left side of the front end of the sprayer 1, a nameplate 4 is provided at a position located at the left side lower side of the front end of the sprayer 1, a liquid crystal display 9 is provided at a position located at the right side upper side of the front end of the sprayer 1, a control panel 8 is provided at a position located at the right side middle upper side of the front end of the sprayer 1, a box door 6 is provided at a position located at the lower side of the front end of the sprayer 1, an alarm lamp 10 is provided at a position located at the right side of the upper end of the sprayer 1, movable universal wheels 5 are provided at four corners of the lower end of the sprayer 1, a vent hole 15 is provided at an inner wall position of the sprayer 1, a spray head 16 is provided at an inner side position of the sprayer 1, a working platform 17 is provided at an upper side position of the inner side of the sprayer 1, a display window 11 is provided at a front end of a sliding door 12, a fixed handle 3 is provided at a position located at a lower side of the sliding door 12, the sliding door 12 is fixedly connected with the sprayer 1 through a hydraulic rod 13, the control button 2 and the movable universal wheels 5 are provided at a position of the movable universal wheels 5, the movable universal wheels are connected with the sprayer 1, and the sprayer 1, the sprayer working control button 5, and the movable universal wheels 5, and the movable universal wheels are connected with the movable universal wheels.
As shown in fig. 2 and 3, in order to prevent the sliding door 12 from being stained by glue, the fixing plate 18 is configured in a rectangular parallelepiped structure, the fixing plate 18 is sleeved with the sliding door 12 through an expansion rubber plug 19, and the sliding door 12 can be prevented from being stained by the dilution sponge 14.
As shown in fig. 4 and 5, in order to place materials conveniently, the drawable plate 7 is sleeved at the inner position of the fixed frame 20, the fixed frame 20 is welded with the spraying machine 1, the sleeved column 21 and the magnet 22 are sleeved at the inner position of the drawable plate 7, and the drawable plate 7 is pulled out towards the outside and placed at the upper end position of the drawable plate 7.
The working principle of the invention is as follows: the staff removes the device to appointed position department, then put through the internal power line and the external power source of device, open sliding door 12 and place the semiconductor that needs the spraying in work platform 17's upper end position department, start flush coater 1 through control button 2, control flush coater 1 through controlling panel 8 and carry out work, close sliding door 12 after setting up the working procedure, spray the semiconductor through shower nozzle 16, it can to take out the semiconductor to open sliding door 12 after the work is accomplished, and for the convenience of placing the material, it has fixed frame 20 to weld in flush coater 1's front end position department, when needing to place article, can pull out drawable board 7, make magnet 22 adsorb in the inboard position department that can drawable board 7, then can place the object in drawable board 7's upper end position department, after the use is accomplished can with drawable board 7 propulsion internal position department.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still make modifications to the technical solutions described in the foregoing embodiments, or make equivalent substitutions and improvements to part of the technical features of the foregoing embodiments, and any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (8)

1. The utility model provides a photoresist of semiconductor rubber coating equipment sprays mechanism, includes flush coater (1) and fixed frame (20), its characterized in that: the front end of flush coater (1) is provided with fixed frame (20) in lieing in intermediate position department, the inside position department of fixed frame (20) is provided with cup jointing post (21), the right-hand member position department of cup jointing post (21) is provided with magnet (22), but the inboard of fixed frame (20) is provided with pull board (7) in lieing in right-hand position department, the front end position department of flush coater (1) is provided with sliding door (12), the inboard position department of sliding door (12) is provided with (28), the lower extreme of fixed plate (18) is provided with inflation plug (19) in lieing in four corners position department, the upper end position department of fixed plate (18) is provided with dilution sponge (14).
2. The photoresist spraying mechanism of a semiconductor gumming device as claimed in claim 1, wherein: the front end of flush coater (1) is provided with control button (2) lieing in left side position department, the front end of flush coater (1) is provided with data plate (4) lieing in left side below position department, the front end of flush coater (1) is provided with liquid crystal display (9) lieing in right side top position department, the front end of flush coater (1) is provided with in the middle of lieing in the right side above position department and controls panel (8), the front end of flush coater (1) is provided with chamber door (6) lieing in below position department, the upper end of flush coater (1) is provided with alarm lamp (10) lieing in right side position department, the lower extreme of flush coater (1) is provided with removal universal wheel (5) lieing in four corners position department.
3. The photoresist spraying mechanism of a semiconductor gumming device as claimed in claim 1, wherein: the inner wall position department of flush coater (1) is provided with ventilation hole (15), the inboard position department of flush coater (1) is provided with shower nozzle (16), the inboard of flush coater (1) is provided with work platform (17) in the position department that is located the top.
4. The photoresist spraying mechanism of a semiconductor gumming device as claimed in claim 1, wherein: the front end position department of sliding door (12) is provided with display window (11), the front end of sliding door (12) is provided with fixed handle (3) in the position department of being located the below, sliding door (12) pass through hydraulic stem (13) and flush coater (1) fixed connection.
5. The photoresist spraying mechanism of a semiconductor gumming device as claimed in claim 2, wherein: the control button (2) is provided with a plurality of, control button (2) can control flush coater (1) and shower nozzle (16) and carry out work, the control mode of control button (2) sets up to push type and rotation type.
6. The photoresist spraying mechanism of the semiconductor gluing equipment as recited in claim 2, wherein: remove universal wheel (5) and be provided with four, remove universal wheel (5) and can carry out arbitrary angle and rotate, remove universal wheel (5) and pass through fixing bolt and flush coater (1) fixed connection.
7. The photoresist spraying mechanism of a semiconductor gumming device as claimed in claim 1, wherein: the shape structure of fixed plate (18) sets up to the cuboid structure, fixed plate (18) cup joints together through inflation plug (19) and sliding door (12).
8. The photoresist spraying mechanism of a semiconductor gumming device as claimed in claim 1, wherein: the drawable plate (7) is sleeved at the inner position of the fixed frame (20), the fixed frame (20) is welded with the spraying machine (1), and the sleeved column (21) and the magnet (22) are sleeved at the inner position of the drawable plate (7).
CN202211663717.5A 2022-12-23 2022-12-23 Photoresist spraying mechanism of semiconductor gluing equipment Pending CN115945338A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211663717.5A CN115945338A (en) 2022-12-23 2022-12-23 Photoresist spraying mechanism of semiconductor gluing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211663717.5A CN115945338A (en) 2022-12-23 2022-12-23 Photoresist spraying mechanism of semiconductor gluing equipment

Publications (1)

Publication Number Publication Date
CN115945338A true CN115945338A (en) 2023-04-11

Family

ID=87290663

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202211663717.5A Pending CN115945338A (en) 2022-12-23 2022-12-23 Photoresist spraying mechanism of semiconductor gluing equipment

Country Status (1)

Country Link
CN (1) CN115945338A (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201841087U (en) * 2010-09-11 2011-05-25 安徽蓝柯复合材料有限公司 High polymer pulp spraying cabinet with a sponge absorbing layer
DE102010050704A1 (en) * 2010-11-03 2012-05-03 Gerd Wurster Method for coating and/or spray painting elongated components e.g. rotor blade, for offshore wind turbine of e.g. aircraft, involves applying coating on components within cabin that is partially operated with re-circulating air operation
CN211099818U (en) * 2019-08-20 2020-07-28 惠安彬彬胶带加工厂 High-efficient flush coater convenient to adjust
CN211972916U (en) * 2020-02-24 2020-11-20 苏州万敦新材料有限公司 Papermaking coating integral type equipment
CN212791588U (en) * 2020-06-30 2021-03-26 宁波极微纳新材料科技有限公司 Reciprocating type automatic spraying machine for loading photocatalyst to filter screen
CN112916280A (en) * 2021-01-25 2021-06-08 江苏瑾辰汽车饰件有限公司 Processing method and processing equipment for single-side metal sprayed part
CN215015168U (en) * 2021-01-25 2021-12-07 四川富美高电子有限公司 Electronic device placing frame

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201841087U (en) * 2010-09-11 2011-05-25 安徽蓝柯复合材料有限公司 High polymer pulp spraying cabinet with a sponge absorbing layer
DE102010050704A1 (en) * 2010-11-03 2012-05-03 Gerd Wurster Method for coating and/or spray painting elongated components e.g. rotor blade, for offshore wind turbine of e.g. aircraft, involves applying coating on components within cabin that is partially operated with re-circulating air operation
CN211099818U (en) * 2019-08-20 2020-07-28 惠安彬彬胶带加工厂 High-efficient flush coater convenient to adjust
CN211972916U (en) * 2020-02-24 2020-11-20 苏州万敦新材料有限公司 Papermaking coating integral type equipment
CN212791588U (en) * 2020-06-30 2021-03-26 宁波极微纳新材料科技有限公司 Reciprocating type automatic spraying machine for loading photocatalyst to filter screen
CN112916280A (en) * 2021-01-25 2021-06-08 江苏瑾辰汽车饰件有限公司 Processing method and processing equipment for single-side metal sprayed part
CN215015168U (en) * 2021-01-25 2021-12-07 四川富美高电子有限公司 Electronic device placing frame

Similar Documents

Publication Publication Date Title
CN110586410A (en) Gluing device for processing conductive aluminum foil adhesive tape
CN115945338A (en) Photoresist spraying mechanism of semiconductor gluing equipment
CN110732446A (en) board spraying process
CN217615445U (en) Spraying device that box component was used
CN208004221U (en) A kind of Art Design display board spraying dry dust removal device
CN217753215U (en) Nozzle cleaning device
CN215313361U (en) Spraying device for machining differential case of heavy truck
CN206984386U (en) A kind of spray boom telescoping mechanism of plant protection unmanned plane
CN220969590U (en) Mechanical paint spraying device
CN215694993U (en) Auxiliary device is repaired with part to spray paint
CN219334655U (en) Paint spraying equipment for machining transformer framework
CN219664081U (en) Paint spraying equipment based on three-dimensional intelligent recognition, positioning and tracking
CN219232750U (en) Quick continuous coating system for metal coiled material
CN220572424U (en) Automatic sterilizing device for international logistics transportation packages
CN219519373U (en) Automatic plate-turning glue spreader for plate processing
CN216826772U (en) PVD instrument vacuum coating machine
CN219896530U (en) Atomizing disinfection device
CN220738169U (en) Powder coating spraying device capable of realizing omnibearing rapid spraying
CN217250013U (en) Novel spraying device
CN218132813U (en) Novel automobile part spraying device
CN214811913U (en) Paint spraying device for machining steel fireproof door
CN216173601U (en) Automatic change material spraying device
CN209174206U (en) A kind of rotating type spraying instrument
CN220635123U (en) Cooling structure for processing color plate
CN219534169U (en) Flat copper wire painting equipment of high-speed enamelling machine

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination