CN115910874B

CN115910874B - Wafer storage frame

Info

Publication number: CN115910874B
Application number: CN202310222346.5A
Authority: CN
Inventors: 李健儿; 冯永; 胡仲波; 敬春云; 蒋红全
Original assignee: Sichuan Shangte Technology Co ltd
Current assignee: Sichuan Shangte Technology Co ltd
Priority date: 2023-03-09
Filing date: 2023-03-09
Publication date: 2023-05-23
Anticipated expiration: 2043-03-09
Also published as: CN115910874A

Abstract

The utility model provides a wafer storage frame, which belongs to the technical field of auxiliary devices for producing semiconductor silicon wafers, and comprises: the side plates are parallel to each other, the inner walls of the side plates are provided with strip-shaped grooves which are arranged in pairs, and a supporting plate is arranged below the two side plates. The rear end of backup pad rotates to be connected in the one end of two curb plates, and pivoted axis perpendicular to curb plate is equipped with the connecting axle of perpendicular to curb plate in the both sides of backup pad front end, all slides on the connecting axle of backup pad both sides and is equipped with the fixture block to through the fixture block butt in the inner wall of curb plate, so that the backup pad is fixed. The storage frame is convenient for loading and unloading wafers, and can effectively prevent the wafers from falling off.

Description

Wafer storage frame

Technical Field

The utility model belongs to the technical field of auxiliary devices for semiconductor silicon wafer production, and particularly relates to a wafer storage frame.

Background

In the process of producing wafers, the wafers are required to be placed at intervals by utilizing a storage rack in the links of corrosion, cleaning, glass powder coating and the like. As the patent application 202020773634.1 discloses a wafer rack for cleaning wafers, at least one pair of placing grooves are used for fixing the wafers, and as can be directly seen from the drawing of the specification, after the wafer rack stores the wafers, all the wafers are positioned at the same height, and although the placing grooves have intervals, in order to enable one wafer rack to place a plurality of wafers, the interval between the placing grooves is not too large, the wafers usually present a dense placing state, and the wafers are inconvenient to take out.

Disclosure of Invention

In order to solve the defects in the prior art, the utility model provides the wafer storage frame which is convenient for loading and unloading wafers and can effectively prevent the wafers from falling.

In order to achieve the object of the utility model, the following scheme is adopted:

a wafer storage frame, comprising: the side plates are parallel to each other, the inner walls of the side plates are provided with strip-shaped grooves which are arranged in pairs, and a supporting plate is arranged below the two side plates.

The rear end of backup pad rotates to be connected in the one end of two curb plates, and pivoted axis perpendicular to curb plate is equipped with the connecting axle of perpendicular to curb plate in the both sides of backup pad front end, all slides on the connecting axle of backup pad both sides and is equipped with the fixture block to through the fixture block butt in the inner wall of curb plate, so that the backup pad is fixed.

Further, the arc holes are formed in the two side plates, and the connecting shafts on the two sides of the supporting plate penetrate through the arc holes on the corresponding sides respectively.

Further, the connecting shafts are sleeved with springs, and the springs are located between the supporting plates and the clamping blocks and used for providing pressure to the side plates for the clamping blocks.

Further, the fixture block all is equipped with the telescopic link towards one side of backup pad, in the backup pad was worn to locate by the tip of telescopic link, and have the interval between the tip of two telescopic links, rectangular hole has all been seted up to the tip of telescopic link, rectangular hole's extending direction is unanimous with the length direction of backup pad, the preceding terminal surface of backup pad is worn to be equipped with the locking piece, and the locking piece removes along the length direction of backup pad and set up, the front end of locking piece is V type structure, and the entity position of V type structure both sides wears to locate respectively in the rectangular hole of two telescopic links, two inclined planes of V type structure inside respectively with rectangular hole's inner wall sliding contact.

Further, the positions of the inner walls of the side plates, which correspond to the clamping blocks for pressing, are provided with tooth patterns which are arranged in an arrangement mode, and the extending directions of the tooth patterns are parallel to the bottom surfaces of the side plates.

Further, the bottoms of the two side plates are connected to the same bottom plate, the bottom plate is of a hollow structure, and two ends of the two side plates are connected through a handle.

Further, the top of curb plate all is equipped with the depression bar, and the both ends of depression bar all rotate through branch and connect in the outer terminal surface of curb plate, and the depression bar is equipped with the pendulum rod towards the outside of curb plate, and the tip of pendulum rod passes through ball hinge structure to be connected in the upper end of a pull rod, and the lower extreme of pull rod links to each other with the connecting axle of backup pad both sides respectively.

Further, the limiting groove is formed in the outer wall of the side plate along the arrangement direction of the pull rod, the pull rod is arranged in the limiting groove, and spaces are formed between the pull rod and the three inner walls of the limiting groove.

Further, the lower end of the pull rod is provided with a connecting hole, two ends of the connecting hole are horn-shaped, and the connecting shaft penetrates through the connecting hole.

The utility model has the beneficial effects that:

1. through rotating the backup pad, can make it slope for the bottom surface of curb plate to the wafer that makes the different bar inslot place is the echelonment and arranges, thereby makes things convenient for the loading in and taking out of wafer.

2. Utilize the depression bar to compress tightly the wafer in the bar groove, can prevent that the wafer from depositing the frame and drop to cooperate in the time of through backup pad and depression bar, can make the whole structure that presents the cylinder of wafer, its outer wall is neat structural state, so that the depression bar compresses tightly spacingly to all wafers, prevents that part wafer from depositing the frame and rocking.

Drawings

The drawings described herein are for illustration of selected embodiments only and not all possible implementations, and are not intended to limit the scope of the utility model.

Fig. 1 shows a schematic overall structure of a preferred embodiment of the present application.

Fig. 2 shows a partial enlarged view at a in fig. 1.

Fig. 3 shows a partial enlarged view at B in fig. 1.

Fig. 4 shows a partial enlarged view at C in fig. 1.

Fig. 5 shows a partial sectional view of the telescopic rod and the locking piece in the support plate.

Fig. 6 is a schematic view showing a state when the wafer is stored in the present application.

Fig. 7 shows a cross-sectional view along the connecting axis when wafers are stored in the present application.

Fig. 8 shows a partial enlarged view at D in fig. 7.

Fig. 9 shows a partial enlarged view at E in fig. 7.

Fig. 10 is a schematic view showing a state when the wafer is loaded and unloaded in the present application.

Fig. 11 shows a cross-sectional view along the connecting axis when the wafer is loaded and unloaded in the present application.

The marks in the figure: the side plate-1, the strip-shaped groove-11, the arc-shaped hole-12, the insection-13, the bottom plate-14, the handle-15, the limit groove-16, the support plate-2, the connecting shaft-21, the limit screw-22, the clamping block-3, the telescopic rod-31, the rectangular hole-311, the spring-4, the locking block-5, the compression bar-6, the supporting rod-61, the swing bar-62, the pull rod-7 and the 71-connecting hole.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the following detailed description of the embodiments of the present utility model will be given with reference to the accompanying drawings, but the described embodiments of the present utility model are some, but not all embodiments of the present utility model.

Example 1

As shown in fig. 1, a wafer storage frame includes: the wafer placing device comprises a pair of side plates 1 which are parallel to each other, wherein strip-shaped grooves 11 which are arranged in pairs are formed in the inner walls of the side plates 1 and are used for placing wafers, and a supporting plate 2 is arranged below the two side plates 1.

Specifically, as shown in fig. 1, the rear end of the supporting plate 2 is rotatably connected to one ends of the two side plates 1, the axis of rotation is perpendicular to the side plates 1, and the supporting plate 2 is rotated to incline relative to the bottom surface of the side plate 1, so that wafers placed in different strip-shaped grooves 11 are arranged in a step shape, loading and unloading of the wafers are convenient, connecting shafts 21 perpendicular to the side plates 1 are arranged on two sides of the front end of the supporting plate 2, clamping blocks 3 are slidably arranged on the connecting shafts 21 on two sides of the supporting plate 2, and the clamping blocks 3 are abutted to the inner walls of the side plates 1, so that the supporting plate 2 is fixed, and the wafers are conveniently and fixedly supported.

More specifically, the bottoms of the two side plates 1 are connected to the same bottom plate 14, and the bottom plate 14 is in a hollow structure so as to lighten the overall weight of the wafer storage frame, and facilitate liquid discharge, and the two ends of the two side plates 1 are respectively connected through a handle 15, so that the wafer storage frame has a structure convenient to hold, and the structural stability between the two side plates 1 is improved.

Preferably, as shown in fig. 1 and 2, the two side plates 1 are provided with arc holes 12, the arc axes of the arc holes 12 are coincident with the rotation axes of the support plates 2, and the connecting shafts 21 on two sides of the support plates 2 are respectively arranged in the arc holes 12 on the corresponding sides in a penetrating manner, so that when the support plates 2 rotate, the connecting shafts 21 move in the arc holes 12 to improve the stability of the support plates 2 during installation and rotation.

Further preferably, as shown in fig. 2 and 3, the connecting shafts 21 are respectively sleeved with a spring 4, and the springs 4 are located between the support plate 2 and the clamping blocks 3 and are used for providing pressure to the side plates 1 for the clamping blocks 3, so that the clamping blocks 3 can be stably pressed on the side plates 1, and the clamping blocks 3 can be loosened from the side plates 1 by moving the clamping blocks 3 towards the support plate 2.

Preferably, as shown in fig. 3 and 5, the clamping block 3 is provided with a telescopic rod 31 towards one side of the supporting plate 2, the end parts of the telescopic rod 31 are penetrated in the supporting plate 2, an interval is arranged between the end parts of the two telescopic rods 31, rectangular holes 311 are formed in the end parts of the telescopic rod 31, the extending direction of the rectangular holes 311 is consistent with the length direction of the supporting plate 2, the front end surface of the supporting plate 2 is penetrated with a locking block 5, the locking block 5 is movably arranged along the length direction of the supporting plate 2, the front end of the locking block 5 is of a V-shaped structure, the entity parts on two sides of the V-shaped structure are respectively penetrated in the rectangular holes 311 of the two telescopic rods 31, and two inclined planes inside the V-shaped structure are respectively in sliding contact with the inner walls of the rectangular holes 311. When the locking piece 5 is pressed in the supporting plate 2, two inclined planes inside the V-shaped structure can be utilized to drive two telescopic rods 31 to move towards the supporting plate 2 simultaneously through sliding fit between the two inclined planes and the inner wall of the rectangular hole 311, so that the two clamping blocks 3 are simultaneously loosened from the side plate 1, one-key control is realized, the supporting plate 2 is conveniently controlled, and when the locking piece 5 is loosened, the clamping blocks 3 are pushed to move towards two sides automatically under the action of the elastic force of the spring 4, and meanwhile, the telescopic rods 31 are utilized to push the locking piece 5 to move towards the outside of the supporting plate 2, so that automatic reset is realized.

More specifically, as shown in fig. 3 and 5, the front end surface of the support plate 2 is provided with a limit screw 22, and the outer wall of the locking piece 5 has a stepped structure for being matched with the head of the limit screw 22 to limit the locking piece 5 so as to prevent the locking piece 5 from falling.

Preferably, as shown in fig. 2, the positions of the inner walls of the side plates 1 corresponding to the pressing positions of the clamping blocks 3 are provided with the insections 13 which are arranged in an arrayed manner, and the extending direction of the insections 13 is parallel to the bottom surface of the side plate 1 so as to prevent the clamping blocks 3 from skidding.

Example 2

Specifically, as shown in fig. 1, the rear end of the supporting plate 2 is rotatably connected to one ends of the two side plates 1, the axis of rotation is perpendicular to the side plates 1, and the supporting plate 2 can be inclined relative to the bottom surface of the side plates 1 by rotating the supporting plate 2, so that wafers placed in different strip-shaped grooves 11 are arranged in a step shape, and thus the wafers can be conveniently loaded and unloaded, the connecting shafts 21 perpendicular to the side plates 1 are arranged on two sides of the front end of the supporting plate 2, the clamping blocks 3 are slidably arranged on the connecting shafts 21 on two sides of the supporting plate 2, and are abutted to the inner walls of the side plates 1 through the clamping blocks 3

Specifically, as shown in fig. 1, 4 and 6 to 11, a compression bar 6 is disposed above the side plate 1, two ends of the compression bar 6 are rotatably connected to an outer end surface of the side plate 1 through a support rod 61, a swing rod 62 is disposed on an outer side of the compression bar 6 toward the side plate 1, an end portion of the swing rod 62 is connected to an upper end of a pull rod 7 through a ball hinge structure, and lower ends of the pull rod 7 are respectively connected to connecting shafts 21 on two sides of the support plate 2.

As shown in fig. 6 and 7, when the support plate 2 moves to be parallel to the compression bar 6, the compression bar 6 is located between the two side plates 1 to compress the wafers in the strip-shaped grooves 11, so that the wafers are prevented from falling from the storage frame, and at this time, the wafers on the support plate 2 are arranged in a linear structure along the length direction of the support plate 2, all the wafers are in a cylindrical structure, and the outer walls of the wafers are in a regular structure, so that the compression bar 6 can compress and limit all the wafers at the same time, and shaking of part of the wafers in the storage frame is prevented.

As shown in fig. 10 and 11, when the supporting plate 2 rotates downward to be in an inclined state, the connecting shaft 21 simultaneously pulls the pressing rod 6 to the outer side of the side plate 1 through the pull rod 7, so that the pressing rod 6 rotates to the outer side of the corresponding side plate 1 to contact with the pressed state of the wafer, and meanwhile, the wafer is also arranged in a step shape on the supporting plate 2, so that the loading and the unloading are convenient.

Preferably, as shown in fig. 6 and 7, the outer wall of the side plate 1 is provided with a limit groove 16 along the arrangement direction of the pull rod 7, the pull rod 7 is arranged in the limit groove 16, and spaces are arranged between the pull rod 7 and three inner walls of the limit groove 16. The limiting groove 16 is utilized to enable the pull rod 7 to move within a fixed range so as to ensure stability in the use process, and the limiting groove 16 is utilized to accommodate the pull rod 7, so that the outside of the wafer storage frame is tidier, and the wafer storage frame is convenient to arrange and arrange.

As a preferred solution of this embodiment, as shown in fig. 7, when the two side plates 1 are provided with the arc holes 12, the arc axes of the arc holes 12 are coincident with the rotation axes of the support plates 2, and the connecting shafts 21 on two sides of the support plates 2 are respectively inserted into the arc holes 12 on the corresponding sides, the bottom of the limit groove 16 is communicated with the upper ends of the arc holes 12, so as to facilitate the arrangement and installation of the pull rods 7.

Preferably, as shown in fig. 9, the lower end of the pull rod 7 has a connection hole 71, and both ends of the connection hole 71 are horn-shaped, and the connection shaft 21 passes through the connection hole 71, so that the pull rod 7 can swing along the axis of the connection hole 71 and the connection shaft 21 to accommodate the rotation of the support plate 2.

Example 3

As shown in fig. 1 to 11, as a further preferable embodiment of the present application, on the basis of embodiment 2, the connecting shafts 21 are each sleeved with a spring 4, and the springs 4 are located between the support plate 2 and the clamping block 3, for providing pressure to the side plate 1 to the clamping block 3.

Specifically, as shown in fig. 3 and 5, the clamping block 3 is provided with a telescopic rod 31 towards one side of the supporting plate 2, the end parts of the telescopic rod 31 are penetrated in the supporting plate 2, an interval is arranged between the end parts of the two telescopic rods 31, rectangular holes 311 are formed in the end parts of the telescopic rod 31, the extending direction of the rectangular holes 311 is consistent with the length direction of the supporting plate 2, the front end surface of the supporting plate 2 is penetrated with a locking block 5, the locking block 5 is movably arranged along the length direction of the supporting plate 2, the front end of the locking block 5 is of a V-shaped structure, the entity parts on two sides of the V-shaped structure are respectively penetrated in the rectangular holes 31 of the two telescopic rods 31, and two inclined planes inside the V-shaped structure are respectively in sliding contact with the inner walls of the rectangular holes 311.

According to the structural design, through the operation of the locking piece 5, not only can the supporting plate 2 be rotationally adjusted, but also the position of the pressing rod 6 can be controlled simultaneously, so that the pressing rod 6 is matched with the movement of the supporting plate 2 to compress and release wafers, one-key control is realized by utilizing the locking piece 5, and the operation and use method is further simplified.

The foregoing description of the preferred embodiments of the utility model is merely exemplary and is not intended to be exhaustive or limiting of the utility model. It will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the utility model.

Claims

1. A wafer storage frame, comprising: a pair of curb plate (1) that are parallel to each other, and the bar groove (11) that set up in pairs have been seted up to the inner wall of curb plate (1), the below between two curb plates (1) is equipped with backup pad (2), a serial communication port, the rear end rotation of backup pad (2) is connected in the one end of two curb plates (1), pivoted axis perpendicular to curb plate (1), the both sides of backup pad (2) front end are equipped with connecting axle (21) of perpendicular to curb plate (1), all slide on connecting axle (21) of backup pad (2) both sides and be equipped with fixture block (3), through fixture block (3) butt in the inner wall of curb plate (1) to make backup pad (2) fixed.

2. The wafer storage frame according to claim 1, wherein the two side plates (1) are provided with arc-shaped holes (12), and the connecting shafts (21) on both sides of the support plate (2) are respectively arranged in the arc-shaped holes (12) on the corresponding sides in a penetrating manner.

3. Wafer storage frame according to claim 1, characterized in that the connecting shafts (21) are each sleeved with a spring (4), the springs (4) being located between the support plate (2) and the clamping blocks (3) for providing the clamping blocks (3) with pressure to the side plates (1).

4. The wafer storage frame according to claim 3, wherein the clamping blocks (3) are respectively provided with a telescopic rod (31) towards one side of the supporting plate (2), the end parts of the telescopic rods (31) are penetrated in the supporting plate (2), an interval is arranged between the end parts of the two telescopic rods (31), rectangular holes (311) are respectively formed in the end parts of the telescopic rods (31), the extending direction of the rectangular holes (311) is consistent with the length direction of the supporting plate (2), the front end surface of the supporting plate (2) is penetrated with a locking piece (5), the locking piece (5) is movably arranged along the length direction of the supporting plate (2), the front ends of the locking pieces (5) are in a V-shaped structure, and the entity parts on two sides of the V-shaped structure are respectively penetrated in the rectangular holes (311) of the two telescopic rods (31), and two inclined surfaces inside the V-shaped structure are respectively in sliding contact with the inner walls of the rectangular holes (311).

5. The wafer storage frame according to claim 1 or 4, wherein the positions of the inner walls of the side plates (1) corresponding to the pressing positions of the clamping blocks (3) are provided with insections (13) which are arranged in an arrayed manner, and the extending direction of the insections (13) is parallel to the bottom surface of the side plates (1).

6. The wafer storage frame according to claim 1, wherein bottoms of the two side plates (1) are connected to the same bottom plate (14), the bottom plate (14) is in a hollow structure, and two ends of the two side plates (1) are connected through a handle (15).

7. The wafer storage frame according to claim 1 or 4, wherein a pressing rod (6) is arranged above the side plate (1), two ends of the pressing rod (6) are rotatably connected to the outer end face of the side plate (1) through supporting rods (61), a swinging rod (62) is arranged on the outer side of the pressing rod (6) towards the side plate (1), the end portion of the swinging rod (62) is connected to the upper end of a pull rod (7) through a spherical hinge structure, and the lower ends of the pull rods (7) are connected with connecting shafts (21) on two sides of the supporting plate (2) respectively.

8. The wafer storage frame according to claim 7, wherein the outer wall of the side plate (1) is provided with a limit groove (16) along the arrangement direction of the pull rod (7), the pull rod (7) is arranged in the limit groove (16), and spaces are arranged between the pull rod (7) and three inner walls of the limit groove (16).

9. The wafer storage frame according to claim 8, wherein the lower end of the tie rod (7) has a connection hole (71), and both ends of the connection hole (71) are horn-shaped, and the connection shaft (21) passes through the connection hole (71).