CN115903403B - Light source optical module of exposure machine - Google Patents

Light source optical module of exposure machine Download PDF

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CN115903403B
CN115903403B CN202310120269.2A CN202310120269A CN115903403B CN 115903403 B CN115903403 B CN 115903403B CN 202310120269 A CN202310120269 A CN 202310120269A CN 115903403 B CN115903403 B CN 115903403B
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light source
light
cylinder
source body
fixedly connected
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CN115903403A (en
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王�华
陈志特
吴中海
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Guangdong Keshi Optical Technology Co ltd
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Guangdong Keshi Optical Technology Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P60/00Technologies relating to agriculture, livestock or agroalimentary industries
    • Y02P60/14Measures for saving energy, e.g. in green houses

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Abstract

The invention discloses a light source optical module of an exposure machine, which belongs to the technical field of light sources of exposure machines, in the technical scheme, a compensation condensing mechanism performs light compensation through a light supplementing lamp, light is concentrated with the light of the UV-LED light source body by matching with the condensation of a condensing lens, the illumination intensity is enhanced, meanwhile, a telescopic dimming mechanism utilizes the heat generated by illumination to drive a plurality of reflecting films to bulge, and the light scattered by the UV-LED light source body is regulated and corrected by matching with a light reflecting layer, and gathered towards the condensing lens, so that the luminous power is improved, the stable operation of the exposure machine is ensured, and a multiple heat dissipation mechanism realizes the dual heat dissipation of air cooling and liquid cooling by the radiation of a cold air fan, thereby greatly improving the heat dissipation efficiency of the UV-LED light source body and the light supplementing lamp, enhancing the cooling effect and ensuring the stable light emission of the UV-LED light source body and the light supplementing lamp.

Description

Light source optical module of exposure machine
Technical Field
The invention relates to the technical field of exposure machine light sources, in particular to an exposure machine light source optical module.
Background
An exposure machine refers to a machine device that transfers image information on a film or other transparent body to a surface coated with a photosensitive substance by turning on light to emit ultraviolet rays of UVA wavelength. The light source of the exposure machine is a UV-LED light source, which has long service life, instant lighting, high light efficiency, energy saving, good monochromaticity, narrow light emitting spectrum and no infrared and heat radiation.
The problem that the luminous power is little and the luminous angle is big exists for its in-process that gives out light, illumination intensity is not strong, easily causes the influence to the work of exposure machine, and light dispersion, and the utilization is limited, easily causes the wasting of resources, and in the in-process of UV-LED light source work, the heat dissipation is not fully comprehensive enough simultaneously, easily influences the work of UV-LED light source.
Disclosure of Invention
1. Technical problem to be solved
The invention aims to solve the problems in the prior art, and provides a light source optical module of an exposure machine, in the light emission of a UV-LED light source body, a compensation light condensing mechanism performs light compensation through a light supplementing lamp, light condensing of a light condensing lens is matched, the light is concentrated with the light of the UV-LED light source body, illumination intensity is enhanced, meanwhile, a telescopic light adjusting mechanism utilizes heat generated by illumination to drive a plurality of reflecting films to bulge, a light reflecting layer is matched for adjusting and correcting the light dispersed by the UV-LED light source body, the light is gathered towards the light condensing lens, light emitting power is improved, stable operation of the exposure machine is ensured, and a multiple heat dissipating mechanism realizes dual heat dissipation of air cooling and liquid cooling through the conduction and absorption of cold air emission and cooling liquid of a fan, so that heat dissipation efficiency of the UV-LED light source body and the light supplementing lamp is greatly improved, a cooling effect is enhanced, and stable light emission of the UV-LED light source body and the light supplementing lamp is ensured.
2. Technical proposal
In order to solve the problems, the invention adopts the following technical scheme.
The utility model provides an exposure machine light source optical module, includes a light source installation section of thick bamboo, the mount pad is installed to the inner wall of light source installation section of thick bamboo, and installs the UV-LED light source body in the upper end of mount pad, be equipped with compensation spotlight mechanism between mount pad and the light source installation section of thick bamboo, the outer pot head of light source installation section of thick bamboo is equipped with flexible dimming mechanism, be equipped with multiple cooling mechanism between compensation spotlight mechanism and the UV-LED light source body, compensation spotlight mechanism includes the heat conduction hemisphere of fixed connection at light source installation section of thick bamboo lower extreme, a plurality of evenly distributed's light filling lamps are installed to the outer end of mount pad, and a plurality of light filling lamps encircle the outside at the UV-LED light source body, the dig has a plurality of printing opacity micropore on the mount pad, the inside of heat conduction hemisphere is equipped with the optical reflection layer, the condenser lens is installed to the upper end of light source installation section of thick bamboo, flexible dimming mechanism includes the annular shroud of cup jointing on the outer end of light source installation section of thick bamboo, the inner wall of the annular sleeve is fixedly connected with a plurality of uniformly distributed built-in straight cylinders, the inside of the built-in straight cylinders is connected with a movable rod in a sliding manner, a deformation memory spring is fixedly connected between the built-in straight cylinders and the movable rod, a through hole is drilled on the inner wall of the built-in straight cylinders, the movable rod penetrates through the through hole and extends to the outer side of the built-in straight cylinders, the outer end of the movable rod is fixedly connected with an extrusion block, the outer end of the light source mounting cylinder is drilled with a plurality of uniformly distributed mounting holes, the inner wall of the mounting holes is fixedly connected with a reflecting film, the extrusion block penetrates through the mounting holes and is fixedly connected with the reflecting film, the multiple heat dissipation mechanism comprises a connecting sleeve shell fixedly connected with the outer end of a heat conducting hemisphere, a cold air fan is mounted at the inner bottom end of the connecting sleeve, a cooling cylinder is mounted on the heat conducting hemisphere in an embedded manner, and cooling liquid is arranged inside the cooling cylinder, the cooling cylinder is rotationally connected with a rotating rod, the lower end of the rotating rod is fixedly connected with a cold air fan, the outer end of the rotating rod is fixedly connected with a plurality of stirring blades which are uniformly distributed, the outer end of the cooling cylinder is fixedly connected with a plurality of heat conducting strips with the lower end of a mounting seat, in the process of the light emission of the UV-LED light source body, the light compensation and concentration mechanism performs light compensation through a light supplementing lamp and is matched with the light concentration of a light gathering lens, the light source is concentrated with the light of the UV-LED light source body to enhance illumination intensity, the telescopic dimming mechanism utilizes heat generated by illumination to drive the plurality of reflecting films to bulge, the light reflecting layer is matched to regulate and correct the light dispersed by the UV-LED light source body, the light is gathered together towards the condensing lens to improve luminous power, the stable work of the exposure machine is ensured, the multiple radiating mechanism radiates cold air through the cold air fan and conducts and absorbs the cooling liquid, realize the dual heat dissipation of air cooling and liquid cooling, greatly improve the heat dissipation efficiency of the UV-LED light source body and the light supplementing lamps, strengthen the cooling effect, ensure the stable light emission of the UV-LED light source body and the light supplementing lamps, the light compensating and condensing mechanism performs light emission compensation in the light emission process of the UV-LED light source body, strengthen the illumination intensity of the UV-LED light source body, simultaneously, the light scattered by the UV-LED light source body and the light supplementing lamps is trimmed through the conduction of light transmission micropores and the reflection of the light reflecting layer, and faces the condensing lens, the light is condensed through the condensing lens, the light of the UV-LED light source body and the light supplementing lamps is concentrated together, the illumination intensity and the luminous power are improved, the stable work of the light machine is ensured, the telescopic light adjusting mechanism drives the deformation memory spring to extend by means of the illumination heat of the light supplementing lamps and the UV-LED light source body, and the movable rod is pushed to move towards the outer side of the built-in straight cylinder, the extrusion block is driven to extrude the reflecting film to bulge in the light source installation cylinder, thereby a plurality of reflecting bulges are formed in the light source installation cylinder, light of the UV-LED light source body and the light supplementing lamp is regulated and trimmed, light beam concentration is guaranteed, dispersion is reduced, luminous efficiency is improved, the multiple heat dissipation mechanism guides heat generated by the operation of the UV-LED light source body and the light supplementing lamp into the cooling cylinder through the plurality of heat conducting strips, cold air fan rotates and emits cold air, the heat is further absorbed in the heat conducting hemisphere through the conduction of the diamond carbon film, temperature is reduced, the rotating rod and the stirring blade rotate along with the cold air fan, the cooling liquid is stirred, heat accumulation in the rotating rod is reduced, cold and hot alternation is guaranteed, and therefore the heat dissipation of the UV-LED light source body and the light supplementing lamp is realized in a double heat dissipation mode of air cooling and liquid cooling, the heat dissipation efficiency of the UV-LED light source body and the light supplementing lamp is improved greatly, the cooling effect is enhanced, and stable light emission of the UV-LED light source body and the light supplementing lamp is guaranteed.
Further, the light of light filling lamp and the light phase-match of UV-LED light source body, the outer end of heat conduction hemisphere is equipped with diamond carbon film, through setting up the light phase-match of light filling lamp and UV-LED light source body, can effectually compensate the reinforcing to the light of UV-LED light source body, improves luminous intensity, and the setting of diamond carbon film makes the heat conduction hemisphere have good heat conduction effect, realizes conducting the heat that light filling lamp and UV-LED light source body produced.
Further, two symmetrical sliding wheels are arranged at the outer end of the movable rod, the two sliding wheels are in sliding connection with the inner wall of the built-in straight cylinder, and the movable rod keeps stable movement in the movement process through the arrangement of the sliding wheels, so that friction influence is reduced, and the movable rod is smoother and more convenient to move.
Further, the deformation memory spring is made of a shape memory alloy material, the initial state of the deformation memory spring is a contracted state, and the deformation memory spring made of the shape memory alloy material has a memory function, and after the temperature rises, the deformation extends, and after the temperature drops, the deformation memory spring returns to the initial contracted state.
Further, the inner wall fixedly connected with sealing washer of through-hole, and the inner wall and the outer end in close contact of movable rod of sealing washer, through the setting of sealing washer, make the dust be difficult for entering into in the built-in straight section of thick bamboo through the gap between through-hole and the movable rod, reinforcing dustproof effect.
Further, the heat conduction strip adopts metal copper material to make, the outer end of connection sleeve shell is equipped with high strength insulating layer, through the heat conduction strip of using metal copper material to make, has good heat conduction effect, realizes leading-in the cooling cylinder with the heat that UV-LED light source body and light filling lamp work produced, and the setting of high strength insulating layer, the insulating properties of reinforcing connection sleeve shell makes it be difficult for taking place to damage in long-term use, prolongs its life.
3. Advantageous effects
Compared with the prior art, the invention has the advantages that:
(1) In the light emission of the UV-LED light source body, the compensation light condensing mechanism performs light compensation through the light supplementing lamp, light condensation of the light supplementing lens is matched, the compensation light condensing mechanism and light of the UV-LED light source body are concentrated together, the illumination intensity is enhanced, meanwhile, the telescopic light adjusting mechanism utilizes heat generated by illumination to drive a plurality of reflecting films to bulge, the light scattered by the UV-LED light source body is adjusted and corrected by the light reflecting layer, the light is gathered together towards the light supplementing lens, the luminous power is improved, the stable work of the exposure machine is ensured, the multiple heat dissipating mechanism realizes the double heat dissipation of air cooling and liquid cooling through the cool air emission of the cool air fan, the heat dissipation efficiency of the UV-LED light source body and the light supplementing lamp is greatly improved, the cooling effect is enhanced, the stable light emission of the UV-LED light source body and the light supplementing lamp is ensured, the light compensating light condensing mechanism emits light through the plurality of the light supplementing lamps, in the process of the light emission of the UV-LED light source body, the light emission compensation is carried out, the illumination intensity of the UV-LED light source body is enhanced, meanwhile, the light scattered by the UV-LED light source body and the plurality of light supplementing lamps is conducted through the light transmission micropores and reflected by the light reflection layer, the light is trimmed, the light is directed towards the condensing lens, the light is condensed by the condensing lens, the light of the UV-LED light source body and the plurality of light supplementing lamps is concentrated, the illumination intensity and the light emitting power are improved, the stable work of the exposure machine is ensured, the telescopic dimming mechanism drives the deformation memory spring to extend by the illumination heat of the light supplementing lamps and the UV-LED light source body, the movable rod is pushed to move towards the outer side of the built-in straight cylinder, the extrusion block is driven to extrude the reflecting film to bulge towards the light source installation cylinder, so that a plurality of reflecting bulges are formed in the light source installation cylinder, the light adjustment and trimming of the UV-LED light source body and the light supplementing lamps are realized, the heat radiation device has the advantages that the concentration of light beams is guaranteed, the dispersion is reduced, the luminous efficiency is improved, the heat generated by the operation of the UV-LED light source body and the light supplementing lamp is LED into the cooling cylinder through the plurality of heat conducting strips, the heat and the cold are alternately carried out with the cooling liquid, meanwhile, the cold air fan rotates, cold air is emitted, the heat is further absorbed through the conduction of the diamond carbon film and enters the heat conducting hemisphere, the temperature is reduced, the rotating rod and the stirring blade rotate along with the cold air fan, the cooling liquid is stirred, the accumulation of the heat in the cooling liquid is reduced, the cold and hot alternation of the cooling liquid is guaranteed, the heat radiation of the UV-LED light source body and the light supplementing lamp is realized through the double heat radiation mode of air cooling and liquid cooling, the heat radiation is more complete, the heat radiation efficiency of the UV-LED light source body and the light supplementing lamp is greatly improved, the cooling effect is enhanced, and the stable luminescence of the UV-LED light source body and the light supplementing lamp is guaranteed. .
(2) The light of light filling lamp and the light phase-match of UV-LED light source body, the outer end of heat conduction hemisphere is equipped with the diamond carbon film, through setting up the light phase-match of light filling lamp and UV-LED light source body, can effectually compensate the reinforcing to the light of UV-LED light source body, improves luminous intensity, and the setting of diamond carbon film makes the heat conduction hemisphere have good heat conduction effect, realizes conducting the heat that light filling lamp and UV-LED light source body produced.
(3) Two symmetrical sliding wheels are arranged at the outer end of the movable rod, the two sliding wheels are in sliding connection with the inner wall of the built-in straight cylinder, and the movable rod keeps stable movement in the movement process through the arrangement of the sliding wheels, so that friction influence is reduced, and the movable rod moves smoothly and conveniently.
(4) The deformation memory spring is made of a shape memory alloy material, the initial state of the deformation memory spring is a contracted state, and the deformation memory spring made of the shape memory alloy material has a memory function, and after the temperature is increased, the deformation extends, and after the temperature is reduced, the deformation memory spring returns to the initial contracted state.
(5) The inner wall fixedly connected with sealing washer of through-hole, and the inner wall and the outer end in close contact of movable rod of sealing washer, through the setting of sealing washer, make the dust be difficult for entering into in the built-in straight section of thick bamboo through the gap between through-hole and the movable rod, reinforcing dustproof effect.
(6) The heat conducting strip adopts the metal copper material to make, and the outer end of connection sleeve shell is equipped with the high strength insulating layer, through the heat conducting strip of using the metal copper material to make, has good heat conduction effect, realizes leading-in the cooling cylinder with the heat that UV-LED light source body and light filling lamp work produced in, and the setting of high strength insulating layer, the insulating properties of reinforcing connection sleeve shell makes it be difficult for taking place to damage in long-term use, prolongs its life.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic perspective view of the present invention;
FIG. 3 is a schematic perspective view of a light source mounting barrel according to the present invention;
FIG. 4 is a schematic diagram showing the distribution of the light compensating lamps according to the present invention;
FIG. 5 is a schematic view of a partial cross-sectional structure of a telescopic dimming mechanism according to the present invention;
fig. 6 is a schematic cross-sectional view of a multiple heat dissipation mechanism according to the present invention.
The reference numerals in the figures illustrate:
100. a light source mounting cylinder; 200. a mounting base; 300. a UV-LED light source body; 400. a compensating condensing mechanism; 401. a thermally conductive hemisphere; 402. a light supplementing lamp; 403. a light-transmitting micropore; 404. a light reflection layer; 405. a condensing lens; 500. a telescopic dimming mechanism; 501. an annular shroud; 502. a straight cylinder is arranged in the inner part; 503. a movable rod; 5031. a sliding wheel; 504. a deformation memory spring; 505. extruding a block; 506. a mounting port; 507. a reflective film; 600. a multiple heat dissipation mechanism; 601. connecting the casings; 602. a cold air fan; 603. a cooling cylinder; 604. a cooling liquid; 605. a rotating lever; 606. stirring blades; 607. and a heat conducting strip.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention; it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments, and that all other embodiments obtained by persons of ordinary skill in the art without making creative efforts based on the embodiments in the present invention are within the protection scope of the present invention.
In the description of the present invention, it should be noted that the positional or positional relationship indicated by the terms such as "upper", "lower", "inner", "outer", "top/bottom", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "configured to," "engaged with," "connected to," and the like are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Examples:
referring to fig. 1-6, an optical module of a light source of an exposure machine comprises a light source mounting cylinder 100, a mounting seat 200 is mounted on the inner wall of the light source mounting cylinder 100, a UV-LED light source body 300 is mounted on the upper end of the mounting seat 200, a compensating condensing mechanism 400 is arranged between the mounting seat 200 and the light source mounting cylinder 100, a telescopic dimming mechanism 500 is sleeved on the outer end of the light source mounting cylinder 100, a multiple heat dissipation mechanism 600 is arranged between the compensating condensing mechanism 400 and the UV-LED light source body 300, the compensating condensing mechanism 400 comprises a heat conducting hemisphere 401 fixedly connected to the lower end of the light source mounting cylinder 100, a plurality of uniformly distributed light supplementing lamps 402 are mounted on the outer end of the mounting seat 200, the plurality of light supplementing lamps 402 encircle the outer side of the UV-LED light source body 300, a plurality of light transmitting micropores 403 are cut on the mounting seat 200, a light reflecting layer 404 is arranged in the heat conducting hemisphere 401, a condensing lens 405 is mounted on the upper end of the light source mounting cylinder 100, the telescopic dimming mechanism 500 comprises an annular sleeve 501 sleeved on the outer end of the light source mounting cylinder 100, a plurality of evenly distributed built-in straight cylinders 502 are fixedly connected to the inner wall of the annular sleeve 501, movable rods 503 are slidably connected to the inner part of the built-in straight cylinders 502, deformation memory springs 504 are fixedly connected between the built-in straight cylinders 502 and the movable rods 503, through holes are cut on the inner wall of the built-in straight cylinders 502, the movable rods 503 penetrate through the through holes and extend to the outer side of the built-in straight cylinders 502, an extrusion block 505 is fixedly connected to the outer end of the movable rods 503, a plurality of evenly distributed mounting holes 506 are cut on the outer end of the light source mounting cylinder 100, a reflecting film 507 is fixedly connected to the inner wall of the mounting holes 506, the extrusion block 505 passes through the mounting holes 506 and is fixedly connected with the reflecting film 507, the multiple heat dissipation mechanism 600 comprises a connecting sleeve 601 fixedly connected with the outer end of a heat conducting hemisphere 401, and a cold air fan 602 is mounted at the inner bottom end of the connecting sleeve 601, the heat conduction hemisphere 401 is embedded with a cooling cylinder 603, cooling liquid 604 is arranged in the cooling cylinder 603, a rotating rod 605 is rotationally connected to the cooling cylinder 603, the lower end of the rotating rod 605 is fixedly connected with a cold air fan 602, the outer end of the rotating rod 605 is fixedly connected with a plurality of uniformly distributed stirring blades 606, the outer end of the cooling cylinder 603 is fixedly connected with a plurality of heat conducting strips 607 at the lower end of a mounting seat 200, in the process of lighting of the UV-LED light source body 300, the compensation light gathering mechanism 400 performs light compensation through a light supplementing lamp 402, the light gathering of the light gathering lens 405 is matched, the light gathering is concentrated with the light of the UV-LED light source body 300, the illumination intensity is enhanced, meanwhile, the telescopic light adjusting mechanism 500 utilizes the heat generated by illumination to drive a plurality of reflecting films 507 to be protruded, the light scattered by the UV-LED light source body 300 is adjusted and corrected by matching a light reflecting layer 404, and the light is gathered towards the light gathering lens 405, the light-emitting power is improved, the stable work of the exposure machine is ensured, the multiple heat dissipation mechanism 600 realizes the dual heat dissipation of air cooling and liquid cooling through the cool air emission of the cool air fan 602 and the conduction absorption of the cooling liquid 604, the heat dissipation efficiency of the UV-LED light source body 300 and the light supplementing lamps 402 is greatly improved, the cooling effect is enhanced, the stable light emission of the UV-LED light source body 300 and the light supplementing lamps 402 is ensured, the light emission of the light supplementing lamps 402 is ensured by the light compensating mechanism 400, the light emission compensation is carried out in the light emission process of the UV-LED light source body 300, the light intensity of the UV-LED light source body 300 is enhanced, meanwhile, the light scattered by the UV-LED light source body 300 and the light supplementing lamps 402 is trimmed through the conduction of the light transmitting micropores 403 and the reflection of the light reflecting layer 404, the light is concentrated towards the light gathering lens 405, the light gathering of the UV-LED light source body 300 and the light supplementing lamps 402 is concentrated together, the light intensity and the luminous power are improved, the stable work of the exposure machine is ensured, the telescopic dimming mechanism 500 drives the deformation memory spring 504 to extend by means of the light heat of the light supplementing lamp 402 and the UV-LED light source body 300, the movable rod 503 is pushed to move towards the outer side of the built-in straight barrel 502, the movable rod 505 is driven to extrude the reflecting film 507 to bulge towards the inside of the light source installation barrel 100, thereby a plurality of reflecting bulges are formed in the light source installation barrel 100, the light of the UV-LED light source body 300 and the light supplementing lamp 402 is regulated and trimmed, the concentration of light beams is ensured, the dispersion is reduced, the luminous efficiency is improved, the multiple heat dissipation mechanism 600 conducts heat generated by the work of the UV-LED light source body 300 and the light supplementing lamp 402 into the cooling barrel 603 through the plurality of heat conducting strips 607, cold and hot alternation is carried out with the cooling liquid 604, meanwhile, the cold air is emitted through the conduction of the diamond carbon film, the heat is further absorbed into the heat conducting hemisphere 401, the temperature is reduced, and the rotating rod 605 and the stirring blade 606 rotate along with the cold air 602, the accumulation of the heat inside the cooling liquid 604 is reduced, the alternation is ensured, the double heat dissipation mode of the UV-LED light source body 300 and the light supplementing lamp 402 is cooled by the double heat dissipation mode of the air cooling body and the liquid cooling body and the light supplementing lamp 402, the light source 300 and the full heat dissipation effect is improved, and the full heat dissipation effect of the UV light source is ensured, and the LED light source is cooled and the light source is cooled.
Referring to fig. 1, the light of the light compensating lamp 402 is matched with the light of the UV-LED light source body 300, the diamond carbon film is arranged at the outer end of the heat conducting hemisphere 401, and the light of the light compensating lamp 402 is matched with the light of the UV-LED light source body 300, so that the light of the UV-LED light source body 300 can be effectively compensated and enhanced, the luminous intensity is improved, and the diamond carbon film is arranged, so that the heat conducting hemisphere 401 has a good heat conducting effect, and the heat generated by the light compensating lamp 402 and the UV-LED light source body 300 is conducted.
Referring to fig. 5, two symmetrical sliding wheels 5031 are mounted at the outer end of the movable rod 503, and the two sliding wheels 5031 are slidably connected with the inner wall of the built-in straight cylinder 502, so that the movable rod 503 keeps stable movement in the movement process through the arrangement of the sliding wheels 5031, and meanwhile friction influence is reduced, so that the movement is smoother and more convenient.
Referring to fig. 5, the shape memory spring 504 is made of a shape memory alloy material, and the initial state of the shape memory spring 504 is a contracted state, and the shape memory spring 504 made of the shape memory alloy material has a memory function, and after the temperature increases, the shape changes to extend, and after the temperature decreases, the shape memory spring returns to the initial contracted state.
Referring to fig. 5, a sealing ring is fixedly connected to an inner wall of the through hole, and the inner wall of the sealing ring is in close contact with an outer end of the movable rod 503, so that dust is not easy to enter the built-in straight cylinder 502 through a gap between the through hole and the movable rod 503 by the arrangement of the sealing ring, and a dust prevention effect is enhanced.
Referring to fig. 6, the heat conducting strip 607 is made of a metal copper material, the outer end of the connecting sleeve 601 is provided with a high-strength insulating layer, and the heat conducting strip 607 made of the metal copper material has a good heat conducting effect, so that heat generated by the operation of the UV-LED light source body 300 and the light compensating lamp 402 is LED into the cooling cylinder 603, and the insulating property of the connecting sleeve 601 is enhanced due to the arrangement of the high-strength insulating layer, so that the connecting sleeve is not easy to damage in a long-term use process, and the service life of the connecting sleeve is prolonged.
In the invention, when a related technician uses, the UV-LED light source body 300 emits light, meanwhile, the plurality of light supplementing lamps 402 emit light to enhance the illumination intensity of the UV-LED light source body 300, the dispersed light beams irradiate into the heat conducting hemisphere 401 through the light transmitting micropore 403 and are regulated and trimmed through the reflection of the light reflecting layer 404, the dispersed light beams are LED to face the condensing lens 405 again through the light transmitting micropore 403, the temperature inside the light source mounting cylinder 100 is gradually increased under the illumination of the light supplementing lamps 402 and the UV-LED light source body 300, the deformation memory spring 504 is heated and extends, the movable rod 503 is pushed to move towards the outer side of the built-in straight cylinder 502 to drive the extrusion block 505 to extrude the reflecting film 507 into the light source mounting cylinder 100, thereby forming a plurality of reflecting bulges in the light source mounting cylinder 100, realizing the regulation and trimming of the light of the UV-LED light source body 300 and the light supplementing lamps 402, the concentration of light beams is ensured, the dispersion is reduced, the luminous efficiency is improved, and in the process of the light-supplementing lamp 402 and the UV-LED light source body 300 emitting light, the generated heat is LED into the cooling cylinder 603 through the plurality of heat conducting strips 607 to alternate with the cooling liquid 604, meanwhile, the cold air fan 602 rotates to emit cold air, the cold air enters the heat conducting hemisphere 401 through the conduction of the diamond carbon film, the heat is further absorbed, the temperature is reduced, the rotating rod 605 and the stirring blade 606 rotate along with the cold air fan 602, the cooling liquid 604 is stirred, the accumulation of the heat in the rotating rod is reduced, the alternation of the heat and the heat is ensured, thereby realizing the double heat dissipation modes of air cooling and liquid cooling to the UV-LED light source body 300 and the light-supplementing lamp 402, ensuring the heat dissipation to be more complete, greatly improving the heat dissipation efficiency of the UV-LED light source body 300 and the light-supplementing lamp 402, enhancing the cooling effect, the stable light emission of the UV-LED light source body 300 and the light supplement lamp 402 is ensured.
The above description is only of the preferred embodiments of the present invention; the scope of the invention is not limited in this respect. Any person skilled in the art, within the technical scope of the present disclosure, may apply to the present invention, and the technical solution and the improvement thereof are all covered by the protection scope of the present invention.

Claims (6)

1. The utility model provides an exposure machine light source optical module, includes light source installation section of thick bamboo (100), its characterized in that: the inner wall of the light source installation cylinder (100) is provided with an installation seat (200), the upper end of the installation seat (200) is provided with a UV-LED light source body (300), a compensation light condensing mechanism (400) is arranged between the installation seat (200) and the light source installation cylinder (100), the outer end of the light source installation cylinder (100) is sleeved with a telescopic light modulating mechanism (500), a plurality of heat radiating mechanisms (600) are arranged between the compensation light condensing mechanism (400) and the UV-LED light source body (300), the compensation light condensing mechanism (400) comprises a heat conducting hemisphere (401) fixedly connected to the lower end of the light source installation cylinder (100), the outer end of the installation seat (200) is provided with a plurality of uniformly distributed light supplementing lamps (402), the plurality of light supplementing lamps (402) encircle the outer side of the UV-LED light source body (300), a plurality of light transmitting micropores (403) are drilled on the installation seat (200), the inner part of the heat conducting hemisphere (401) is provided with a light reflecting layer (404), the upper end of the light source installation cylinder (100) is provided with a plurality of lenses (405), the heat conducting hemisphere (500) comprises a heat conducting hemisphere (401) fixedly connected to the inner wall (502) of the light source installation cylinder (100), the light modulating rod (501) is fixedly connected to the inner wall (502) of the light source installation cylinder (501), a deformation memory spring (504) is fixedly connected between the built-in straight cylinder (502) and the movable rod (503), a through hole is cut on the inner wall of the built-in straight cylinder (502), the movable rod (503) penetrates through the through hole and extends to the outer side of the built-in straight cylinder (502), a pressing block (505) is fixedly connected to the outer end of the movable rod (503), a plurality of uniformly distributed mounting holes (506) are cut on the outer end of the light source mounting cylinder (100), a reflecting film (507) is fixedly connected to the inner wall of the mounting hole (506), the pressing block (505) penetrates through the mounting holes (506) and is fixedly connected with the reflecting film (507), the multiple heat dissipation mechanism (600) comprises a connecting sleeve (601) fixedly connected with the outer end of the heat conducting hemisphere (401), a cold air fan (602) is mounted at the inner bottom end of the connecting sleeve (601), a cooling cylinder (603) is mounted on the heat conducting hemisphere (401), a cooling liquid (604) is arranged in the cooling cylinder (603) in a rotating manner, a plurality of uniformly distributed mounting holes (605) are connected to the cooling cylinder (603), the rotating rod (605) is rotatably, the rotating blades (605) are fixedly connected with the outer ends of the cooling fan (605) and the uniformly distributed blades (605), the outer end of the cooling cylinder (603) is fixedly connected with a plurality of heat conducting strips (607) with the lower end of the mounting seat (200).
2. The exposure machine light source optical module according to claim 1, wherein: light of the light supplementing lamp (402) is matched with light of the UV-LED light source body (300), and a diamond carbon film is arranged at the outer end of the heat conducting hemisphere (401).
3. The exposure machine light source optical module according to claim 1, wherein: two symmetrical sliding wheels (5031) are arranged at the outer end of the movable rod (503), and the two sliding wheels (5031) are both in sliding connection with the inner wall of the built-in straight cylinder (502).
4. The exposure machine light source optical module according to claim 1, wherein: the deformation memory spring (504) is made of a shape memory alloy material, and the initial state of the deformation memory spring (504) is a contracted state.
5. The exposure machine light source optical module according to claim 1, wherein: the inner wall of the through hole is fixedly connected with a sealing ring, and the inner wall of the sealing ring is tightly contacted with the outer end of the movable rod (503).
6. The exposure machine light source optical module according to claim 1, wherein: the heat conducting strip (607) is made of metal copper material, and a high-strength insulating layer is arranged at the outer end of the connecting sleeve (601).
CN202310120269.2A 2023-02-16 2023-02-16 Light source optical module of exposure machine Active CN115903403B (en)

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CN116909107B (en) * 2023-07-25 2024-03-01 上海图双精密装备有限公司 Light source system for illumination of lithography equipment
CN117515476B (en) * 2024-01-05 2024-04-26 广州励鑫照明灯具股份有限公司 LED projection lamp composition and control method thereof

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