CN115903130B - Super-surface lens taper waveguide based on reverse design and wave front shaping method thereof - Google Patents
Super-surface lens taper waveguide based on reverse design and wave front shaping method thereof Download PDFInfo
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- CN115903130B CN115903130B CN202211498280.4A CN202211498280A CN115903130B CN 115903130 B CN115903130 B CN 115903130B CN 202211498280 A CN202211498280 A CN 202211498280A CN 115903130 B CN115903130 B CN 115903130B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention discloses a reverse-design-based ultra-surface lens taper waveguide and a wave front shaping method thereof. The super-surface lens region and the compact cone region are connected between the optical signal input end and the optical signal output end through topological optimization reverse design, and the optical signal is focused to the cone region through the super-surface lens region and is output from the optical signal output end. The invention carries out topological optimization reverse design on the device based on the level set method, realizes short-distance focusing by utilizing the on-chip super-surface lens, greatly shortens the length of the conical region, and has insertion loss of less than 1db. The invention mainly combines the focusing effect of the super-surface lens and the optimization method of reverse design, and provides a new mode for realizing wave front shaping on the chip by regulating and controlling the integrated light on the chip, thereby further advancing to a more miniaturized and compact integrated optical device.
Description
Technical Field
The invention relates to the field of micro-nano optics and optical chip integration, in particular to a super-surface lens taper waveguide based on reverse design and a wave front shaping method thereof.
Background
The super surface (Metasurface), also known as two-dimensional Metamaterial (Metamaterial), is composed of ultra-thin sub-wavelength artificial nano structures, and can control a plurality of basic characteristics such as amplitude, phase and polarization of light. Over the last decade, supersurfaces have been used in beam deflectors, color displays and other devices, as well as in hologram technology. Super surface lenses, simply referred to as superlenses (metalenses), have shown great potential as a typical application in compact on-chip imaging systems, attracting many researchers to conduct intensive research. Superlenses exhibit many unique characteristics compared to conventional refractive lenses, such as broadband achromatic effects, multiplexed focusing, etc.; the light can be adjusted more flexibly, short-distance light adjustment and control can be realized, the integration of optical devices can break through the diffraction limit to focus the light, and the phase difference problem of the traditional lens is fundamentally solved. Recently, researchers have found that the light in the waveguide can also be modulated using superlenses, providing a new approach to wavefront shaping on-chip.
In recent years, the traditional design mode is changed by the occurrence of a reverse method of an optical waveguide device, the reverse design is mainly to calculate and design a specific structure of the device waveguide through the preset of the target performance of the device, and finally, the calculated device structure is subjected to topological optimization by utilizing an optimization algorithm. For the reverse design of the superlens, firstly, the spatial phase required by the focusing of the superlens is determined, and the arrangement of each structural unit is ensured to meet the distribution of the focusing phase, so that the original structural parameters are obtained, and the structural parameters are optimized through the reverse design on the basis of the structure to meet the set performance requirements of a target device. The reverse design method overcomes the defects that a target device in the traditional design method must meet a fixed size structure, the exploration of devices with irregular structures and sub-wavelength structures is lacking, the advantages of the high-precision silicon-based micro-nano manufacturing process are not fully utilized, the defect that the traditional device design is strongly dependent on the optical waveguide analysis theory is overcome, and the wider innovation of the device function is realized in smaller device size.
With the development of Silicon-based photonics, research On Silicon-On-Insulator (SOI) optical waveguide devices On an insulating substrate is in progress and functions of optical devices are continuously perfected, so that in order to promote further integration of an optical communication system, a researcher is required to explore design modes of various optical waveguide devices by utilizing an optical waveguide to realize more device functions. The traditional optical waveguide device mainly comprises a multimode interference coupler, a directional coupler, a filter based on Mach-Zehnder interference, an array waveguide grating, a grating coupler, a mode converter and the like. The devices are connected by waveguides with different widths, and the waveguides with different widths form different modes, so that the transition conversion is performed by using taper waveguides with enough length to avoid the reduction of the performance of the devices. At present, in a traditional silicon optical device, a grating coupling device and a mode conversion device realize optical wave transmission by connecting a long conical waveguide, which can lead to huge occupied area and lower integration level, and simultaneously introduce great insertion loss. Therefore, it is very important to design and realize a miniaturized device on a chip, improve the conversion efficiency, and reduce the insertion loss, which is very challenging.
Disclosure of Invention
In order to solve the problems in the background art, the invention aims to disclose a super-surface lens tapered waveguide based on reverse design and a wave front shaping method thereof, which replace the traditional manual adjustment of structural parameters, use a reverse design optimization algorithm to optimize the structural parameters, and combine the focusing effect of a super-lens to enable the integration of on-chip devices to be more efficient, simple and compact.
The invention can be realized by the following technical scheme:
the invention discloses a reverse-design-based ultra-compact on-chip ultra-surface lens taper waveguide, which comprises an input multimode waveguide end for transmitting optical signals, an ultra-surface lens area, a taper area for focusing and an output single-mode waveguide end for transmitting light waves, wherein the ultra-surface lens area and the taper area are uniformly divided into a plurality of unit structures and are connected between the input multimode waveguide end and the output single-mode waveguide end through topological optimization reverse design; the wave signal is input by the input multimode waveguide end, focused to the conical area through the reverse designed super-surface lens area and output through the single-mode waveguide end.
Preferably, the design method of the super-surface lens region and the conical region specifically comprises the following steps: according to the principle of the traditional super-surface lens, the spatial phase required by super-lens focusing is determined through a phase distribution formula, each unit structure meeting the focusing phase distribution requirement is obtained, so that initial structural parameters are obtained, and the structural parameters are further optimized through reverse design on the basis of the initial structural parameters.
Preferably, the super-surface lens region and the conical region are divided into unit structures with different sizes of N multiplied by N according to different accuracies of a silicon-based micro-nano manufacturing process, and then the structural shape is optimized through topological reverse design.
Preferably, the materials adopted by the super-surface lens region, the conical region and the input/output waveguide are all silicon, and the material filled in the groove region is silicon dioxide or air.
Preferably, the on-chip super-surface lens area is obtained by topological optimization reverse design, and a level set optimization algorithm is adopted to optimize the structure.
Preferably, the tapered waveguide shortens the length of the tapered waveguide connected between the input multimode waveguide end and the output single-mode waveguide end by utilizing the focusing effect of the superlens.
Preferably, the on-chip ultra-compact tapered waveguide of the reverse design is manufactured based on an SOI process, and comprises the technologies of photoetching, electron beam exposure, focused ion beam etching, nano imprinting and the like.
The invention has the beneficial effects that:
(1) The focusing effect of the super-surface lens is utilized, so that the wave front regulation and control of the light waves on the chip are realized, and the coupling length of the connection between the waveguides is greatly reduced;
(2) The target device is designed by utilizing various optimization algorithms based on reverse design, so that the dependence of the traditional device on a specified structure is broken through, and the device function is realized and meanwhile, the device has a smaller-size structure;
(3) Compared with the traditional device on the silicon substrate, the invention is based on the combination mode of the super-surface lens and the reverse design, and overcomes the defects of large size and complicated design of the traditional device;
(4) And the SOI technology is adopted, so that the integration of a silicon photon device is easy, and the development of photon technology is further promoted.
The features and advantages of the present invention will be described in detail by way of example with reference to the accompanying drawings.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
the left graph in FIG. 2 is a 5 μm focusing electric field distribution diagram obtained by the structural simulation of the invention, and the right graph in FIG. 2 is a spectrum transmission diagram which corresponds to the continuous iterative change of the left graph along with the topological optimization reverse design;
the left graph in FIG. 3 is a 2 μm focusing electric field distribution diagram obtained by the structural simulation of the invention, and the right graph in FIG. 3 is a spectrum transmission diagram which corresponds to the continuous iterative change of the left graph along with the topological optimization reverse design;
in the figure: 1. inputting a multimode waveguide end; 2. a super-surface lens region; 3. a tapered region; 4. outputting a single-mode waveguide end; 5. cell structure.
Detailed Description
Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings. The specific embodiments described herein are illustrative only and are not intended to limit the scope of the invention.
As shown in fig. 1, an embodiment of the present invention provides an on-chip ultra-surface lens and inverse design-based ultra-compact tapered waveguide, in which a shape optimized by inverse design is etched in a silicon-based waveguide, so as to realize optical wave transmission of an on-chip ultra-compact device. The optical waveguide device comprises an input multimode waveguide end 1 for transmitting optical signals, a super-surface lens area 2, a conical area 3 for focusing and an output single-mode waveguide end 4 for transmitting optical waves, wherein the super-surface lens area 2 and the conical area 3 are uniformly divided into a plurality of unit structures and are connected between the input multimode waveguide end 1 and the output single-mode waveguide end 4 through topological optimization and reverse design; the wave signal is input from the input multimode waveguide end 1, focused to the conical area 3 through the reversely designed super-surface lens area 2, and output from the output single-mode waveguide end 4.
The design method of the super-surface lens region 2 and the conical region 3 specifically comprises the following steps: according to the principle of the traditional super-surface lens, the spatial phase required by super-lens focusing is determined through a phase distribution formula, each unit structure meeting the focusing phase distribution requirement is obtained, so that initial structural parameters are obtained, and the structural parameters are further optimized through reverse design on the basis of the initial structural parameters. Specifically, the ultra-surface lens region 2 calculates initial structural parameters according to the following formula through phase distribution required by focusing, continuously optimizes the structural parameters through topological optimization reverse design on the basis of the structure, and finally meets target performance. Wherein the phase profile required for initial focusing satisfies:
；
wherein phi (x, y) is the phase value of any point on the super surface lens; (x, y) is the coordinates of any point on the subsurface lens; lambda is the wavelength; f is the focal length of the lens.
The super-surface lens region 2 and the conical region 3 are divided into unit structures with different sizes of N multiplied by N according to different accuracies of silicon-based micro-nano manufacturing processes, specifically, the super-surface lens region 2 and the conical region 3 are divided into structural units with 20 x 20nm in a three-dimensional space evenly, and then the structural shapes are optimized through topological reverse design.
The material properties of each unit structure into which the super surface lens region and the tapered region are uniformly divided are both possible, air or silicon material. All the unit structures are combined to form the structural shape of the super-surface lens, the different arrangement of the material property states of each unit structure in the area 2 corresponds to a group of objective functions, and the performance of the target device is measured by controlling the objective functions, so that the material property state of each unit structure is determined.
The optimization mode adopted by the reverse-designed super-surface lens region 2 and the conical region 3 can be gradient-based optimization algorithms such as an accompanying method and a level set method, non-gradient-based optimization algorithms such as a genetic algorithm, a particle swarm algorithm, a binary search algorithm and a simulated annealing algorithm, and data driving algorithms based on deep learning; finally, the performance of the target device is measured by controlling the objective function. The embodiment of the invention optimizes the structure by adopting a level set optimization algorithm.
The on-chip ultra-compact tapered waveguide with reverse design is manufactured based on an SOI process, is easy to integrate a silicon photon device, and comprises photoetching, electron beam exposure, focused ion beam etching, nanoimprint and other technologies.
The tapered waveguide shortens the length of the tapered waveguide connected between the input waveguide end and the output waveguide end by utilizing the focusing effect of the superlens.
The input multimode waveguide end 1, the reverse designed super-surface lens area 2, the conical area 3 and the output single-mode waveguide end 4 are sequentially connected and integrated on a silicon optical chip; the grating coupler, the mode converter, the wave-division multiplexer and other traditional silicon optical devices can be connected with the input multimode waveguide end 1, optical signals are sequentially output through the reverse designed super-surface lens area 2, the reverse designed conical area 3 and the output single-mode waveguide end 4, so that an ultra-compact on-chip integrated device is realized, and the insertion loss of the conical waveguide is only less than 1db.
In the implementation, the substrate material and the cladding layer of the device are silicon dioxide, the materials of the input multimode waveguide end 1, the super-surface lens area 2, the conical area 3 and the output single-mode waveguide end 4 are all silicon, and the etched part of the material is air or silicon dioxide.
In a specific implementation, the adopted process is a standard SOI process, the thickness of waveguide silicon is 220nm, and the thickness of upper and lower cladding silicon dioxide is 2 mu m.
The left graph in fig. 2 and the left graph in fig. 3 show simulated electric field distribution diagrams of focusing conditions when 1550nm light waves transmitted from an input multimode waveguide end pass through a super-surface lens region 2, simulation software adopted is commercial software of Lumerical FDTD, and the light waves can be focused at different distances through the region 2, so that free regulation and control of on-chip light wave fronts are realized. The left diagram in fig. 2 and the left diagram in fig. 3 respectively show different focusing conditions, the left diagram in fig. 2 realizes focusing of 5 μm, the left diagram in fig. 3 realizes focusing of 2 μm, and the insertion loss is less than 1db.
In particular, fig. 2 and 3 only show typical focusing at two distances, and the structure of the present invention is not limited to these two focusing distances (see L in fig. 1), and the desired target focus point can be customized.
The right graph in fig. 2 and the right graph in fig. 3 are trend graphs of device performance variation in the continuous iteration process when the structure is optimized through the level set algorithm, and the parameter of the y coordinate in the graphs is the transmittance of the light waves. It can be found from the graph that as the structure is continuously iterated and optimized, the transmittance effect of the light wave is continuously improved, and a stable state can be basically maintained when the final iteration is performed for more than 70 times.
In this embodiment, although 1550nm optical wave is shown, the present embodiment is not limited to this wavelength, but is also applicable to other wavelengths, including the O-band and the C-band, which are typical optical communication bands.
In this embodiment, although the level set algorithm is adopted to perform the optimization structure, the optimization algorithm of the reverse design of the present invention is not limited to the gradient-based optimization algorithm such as the accompanying method and the level set method, and is also applicable to the non-gradient-based optimization algorithm such as the genetic algorithm, the particle swarm algorithm, the binary search algorithm, the simulated annealing algorithm, and the data driving algorithm based on the deep learning.
In this embodiment, the specific implementation flow is as follows:
firstly uniformly dividing a super-surface lens region 2 and a conical region 3 into a plurality of unit structures, then determining the space phase required by focusing of the super-lens according to the principle of the traditional super-surface lens and a phase distribution formula according to the parameters of the traditional optical waveguide device connected with an input multimode waveguide end 1, obtaining each unit structure meeting the focusing phase distribution requirement, thus obtaining initial structural parameters, further optimizing the structural parameters through reverse design on the basis of the initial structural parameters, regulating and controlling the performance of a target device through regulating and controlling the material property state of each unit structure in the super-surface lens region, sequentially connecting the input multimode waveguide end, the reversely designed super-surface lens region, the conical region and an output single-mode waveguide end on a silicon optical chip after the performance is regulated, connecting the traditional optical waveguide device with the multimode waveguide end, sequentially passing through the reversely designed super-surface lens region and the conical region, realizing wave front shaping, and finally outputting an optical signal through the output single-mode waveguide end.
While particular embodiments of the present invention have been described above, it should be understood that these are by way of example only and that various changes and modifications can be made to these embodiments without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (7)
1. A reverse-engineered ultra-surface lens-taper waveguide comprising: the optical fiber comprises an input multimode waveguide end for transmitting optical signals, a super-surface lens area, a conical area for focusing and an output single-mode waveguide end for transmitting light waves, wherein the super-surface lens area and the conical area are uniformly divided into a plurality of unit structures and are connected between the input multimode waveguide end and the output single-mode waveguide end through topological optimization reverse design; the wave signal is input by the input multimode waveguide end, focused to the conical area through the super-surface lens area in reverse design, and output through the single-mode waveguide end, wherein the design method of the super-surface lens area and the conical area specifically comprises the following steps: according to the principle of the traditional super-surface lens, the spatial phase required by super-lens focusing is determined through a phase distribution formula, each unit structure meeting the focusing phase distribution requirement is obtained, so that initial structural parameters are obtained, and the structural parameters are further optimized through reverse design on the basis of the initial structural parameters.
2. The reverse-engineered, ultra-surface lens cone waveguide of claim 1, wherein: the super-surface lens area and the conical area are divided into N multiplied by N unit structures with different sizes according to different precision of a silicon-based micro-nano manufacturing process, and then the structural shape is optimized through topological reverse design.
3. The reverse-engineered, ultra-surface lens cone waveguide of claim 1, wherein: the material property of each unit structure which is uniformly divided into the super-surface lens region and the conical region is air or silicon material, and the performance of a target device is regulated and controlled by regulating and controlling the material property state of each unit structure in the super-surface lens region.
4. The reverse-engineered, ultra-surface lens cone waveguide of claim 1, wherein: the optimization method adopted by the reverse design of the super-surface lens region and the conical region comprises a gradient-based optimization algorithm, a non-gradient-based optimization algorithm and a data driving algorithm based on deep learning.
5. The reverse-engineered, ultra-surface lens cone waveguide of claim 4, wherein: the gradient-based optimization algorithm comprises an accompanying method and a level set method; the optimization algorithm based on the non-gradient comprises a genetic algorithm, a particle swarm algorithm, a binary search algorithm and a simulated annealing algorithm.
6. The reverse-engineered, ultra-surface lens cone waveguide of claim 1, wherein: the ultra-surface lens taper waveguide is manufactured by adopting an SOI process, and the manufacturing process comprises photoetching, electron beam exposure, focused ion beam etching and nanoimprint.
7. A wavefront shaping method based on the super surface lens cone waveguide of any one of claims 1-6: the method is characterized by comprising the following steps of:
s1, uniformly dividing a super-surface lens area and the conical area into a plurality of unit structures;
s2, determining the space phase required by the focusing of the super lens according to the principle of the traditional super surface lens and a phase distribution formula according to the parameters of the traditional optical waveguide device connected with the input multimode waveguide end, and obtaining each unit structure meeting the focusing phase distribution requirement, thereby obtaining initial structural parameters;
s3, further optimizing the structural parameters through reverse design on the basis of the initial structural parameters;
s4, regulating and controlling the performance of a target device by regulating and controlling the material attribute state of each unit structure in the super-surface lens region;
s5, sequentially connecting and integrating an input multimode waveguide end, a reverse designed super-surface lens area, a conical area and an output single-mode waveguide end on a silicon optical chip;
s6, connecting the traditional optical waveguide device with the multimode waveguide end, sequentially passing through the reverse designed super-surface lens area and the conical area to realize wave front shaping, and finally outputting an optical signal through the output single-mode waveguide end.
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