CN115863123A - Degassing method for body of gyrotron - Google Patents
Degassing method for body of gyrotron Download PDFInfo
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- CN115863123A CN115863123A CN202211669491.XA CN202211669491A CN115863123A CN 115863123 A CN115863123 A CN 115863123A CN 202211669491 A CN202211669491 A CN 202211669491A CN 115863123 A CN115863123 A CN 115863123A
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Abstract
The invention relates to the field of vacuum device manufacturing, in particular to a method for degassing a gyrotron tube body, which comprises the following steps of performing electrical property detection before the gyrotron tube body is arranged on degassing equipment, arranging the gyrotron tube body on the degassing equipment, performing leak detection treatment before degassing the gyrotron tube body, degassing and baking the gyrotron tube body, electrifying a filament of the gyrotron tube body, performing leak detection treatment after degassing the gyrotron tube body, and sealing the gyrotron tube body away from the degassing equipment; the invention discloses a degassing method for a body of a gyrotron, which can basically remove gas in the body of the gyrotron through the degassing method, so that the gyrotron obtains a high-vacuum working environment, the working reliability of the gyrotron is improved, the service life of the gyrotron is prolonged, and meanwhile, the method is high in process repeatability and consistency and is beneficial to operation.
Description
Technical Field
The invention relates to the field of vacuum device manufacturing, in particular to a method for degassing a pipe body of a gyrotron.
Background
The terahertz science and technology is a new interdisciplinary science, and a macroscopic classical electromagnetic wave theory and a microscopic quantum theory are linked.
Since 2000, terahertz vacuum electronics has developed rapidly and achieved important achievements, and high-power terahertz sources capable of working in terahertz frequency band vacuum electronics mainly comprise gyrotrons, smithPurcell effect devices, backward wave tubes and the like.
Among the devices, the gyrotron is a fast wave device, the size of a high-frequency structure is greatly superior to that of other devices, and the signal output of a watt level to a kilowatt level or even higher power can be realized in a frequency band of more than 220GHz and even THz.
In order to improve the reliability of the operation of the convolute duct and to extend the service life of the duct, it is necessary to perform a degassing operation on the convolute duct.
Although the existing degassing equipment is of an existing structure, in actual operation, the operation mode is not uniform, so that the degassing of the pipe body is not consistent.
Therefore, in order to improve the above problems, a degassing method which can be used for degassing a cyclone body in cooperation with an existing degassing apparatus is needed.
Disclosure of Invention
The invention aims to provide a degassing method for degassing a body of a gyrotron.
In order to achieve the purpose, the invention adopts the technical scheme that:
a method of degassing a convolute duct body, the degassing method comprising the steps of:
step 1: before the body of the gyrotron to be degassed is arranged on degassing equipment, electrical property detection is required to be carried out;
and 2, step: after the step 1 is finished, mounting the body of the gyrotron, of which the electrical property is detected in the step 1, on degassing equipment;
and step 3: after the step 2 is finished and before degassing, requiring the body of the gyrotron to carry out leak detection treatment;
and 4, step 4: after the step 3 is finished, degassing and baking the body of the gyrotron;
and 5: after the step 4 is finished, activating and degassing a cathode assembly of the electron gun of the gyrotron by electrifying a filament of a tube body of the gyrotron;
step 6: after the step 5 is finished, performing leakage detection treatment on the body of the gyrotron after degassing;
and 7: after the step 6 is finished, sealing the pipe body of the gyrotron away from degassing equipment;
and 8: and 7, after the step 7 is finished, finishing the degassing operation of one gyrotron tube body, if the degassing operation needs to be carried out on the other gyrotron tube body, and repeating the steps 1-7.
In the step 1, the electrical property detection comprises checking whether the resistance of the lamp filament circuit of the gyrotron meets the design requirement by using a multimeter and measuring the insulativity between electrodes of the gyrotron by using a megohmmeter.
The steps required for installing the gyrotron pipe body on the degassing equipment in the step 2 are as follows:
s1: wiping the joint of the interface flange of the degassing equipment and the exhaust pipe of the gyrotron to be degassed by cotton cloth dipped with alcohol;
s2: placing the joint of the exhaust pipe of the gyrotron on a flange plate of degassing equipment;
s3: connecting a lead of a filament power supply part on degassing equipment with a hot wire lead on the gyrotron;
s4: and lowering the degassing equipment furnace cover to the sealing connection of the degassing equipment furnace cover.
The leak detection processing in the step 3 comprises the following steps:
a1: pumping the furnace cover chamber of the degassing equipment until the vacuum degree reaches 1 multiplied by 10 -1 P a or less; forming external vacuum in the furnace cover chamber;
a2: pre-pumping the gyrotron to be degassed until the vacuum degree reaches 2.7 multiplied by 10 -5 Performing the next operation after P a; forming internal vacuum in the gyrotron;
a3: and closing the degassing equipment, opening a gas release valve, and filling air into the furnace cover chamber of the degassing equipment so as to perform leak detection on the body of the gyrotron.
In a 3;
if the internal vacuum degree is not deteriorated during inflation, the cyclone tube to be degassed can be judged to be airtight; repeating the operation a1 and continuing to degas the gyrotron;
if the air pressure of the inner vacuum degree is increased and worsened during inflation, the air leakage of the inner vacuum degassing system can be judged, the furnace cover of the degassing equipment needs to be lifted, the flange plate screw cap is screwed again, and the connecting part of the flange plate and the exhaust pipe of the gyrotron is sealed;
if the vacuum degree of the gyrotron becomes better after resealing, the gyrotron to be degassed can be judged to be airtight, and the degassing equipment furnace cover is lowered to the sealing connection position;
repeating the operation a1, and continuing to degas the gyrotron;
if the vacuum degree of the gyrotron is not changed after resealing, coating alcohol on all welding positions of the gyrotron from bottom to top in sequence to find leakage points; if the air leakage of the body of the gyrotron is judged, the body needs to be repaired.
The degassing and baking treatment comprises the following steps:
b1: if the body of the gyrotron is determined to be airtight, degassing is carried out on the furnace cover chamber of the degassing equipment again, and the degassing equipment (a mechanical pump or a roots pump and the like) with external vacuum is connected until the air pressure reaches 1 multiplied by 10 -1 After Pa, turning on an external vacuum molecular pump;
b2: the external vacuum reaches 1 x 10 -3 And after Pa, switching on a heater of the degassing equipment, setting a temperature rise program control program of the degassing equipment according to the temperature process curve regulation of the temperature rise baking of the gyrotron, and starting to heat and bake the gyrotron body.
The step 5 of activating and degassing the cathode component of the electron gun of the cyclotron by electrifying the filament of the tube body of the cyclotron comprises the following steps:
c1, when the temperature in the furnace cover chamber of the degassing equipment rises to the range of 450-550 ℃, keeping the temperature for 15-20 h; starting a filament power supply on degassing equipment to start to power up a filament of a tube body of the gyrotron;
c2, performing power-on operation on the gyrotron filament according to a specified current value, and if the vacuum degree in the gyrotron tube body during the power-on process does not meet the process setting requirement, prolonging the power-on maintaining time until the process setting requirement of the vacuum degree in the gyrotron tube body is met;
and C3, after the electrification is finished, slowly reducing the voltage on the lamp filament of the gyrotron to zero, and cutting off the lamp filament power supply on the degassing equipment.
In step 6, the body of the cyclone tube after degassing is subjected to degassing and post-leakage detection again, and the post-degassing leakage detection treatment comprises the following steps: when the temperature in the furnace cover of the degassing equipment is reduced to below 60 ℃, the exhaust equipment of the outer vacuum furnace cover is closed, the gas charging valve of the furnace cover is opened, and the furnace cover is charged with air for leak detection.
When leak detection treatment is carried out after degassing:
if the vacuum degree in the body of the gyrotron is not deteriorated during inflation, the gyrotron can be judged to be airtight, and the subsequent steps are continued;
if the air pressure of the vacuum degree in the body of the gyrotron rises and becomes poor during inflation, the air leakage of the body of the gyrotron can be judged, the exact position of the air leakage of the body of the gyrotron is searched and determined by an alcohol leak detection method, and then the air leakage part is coated by a plugging agent;
lowering the furnace cover of the degassing equipment again after the leak stoppage is finished, carrying out vacuum degassing again according to the method, heating and baking to 200-300 ℃, and keeping the temperature for 2-4 hours, wherein the heating rate is less than or equal to 80 ℃ per hour, so that the leak stoppage agent is solidified, and the current of the filament is slowly added to the maximum value of the current specified by the process within 30-60 minutes and kept for 1-2 hours; and after the completion of the lamp filament and the baking heating power supply, when the temperature of the degassing equipment furnace cover is reduced to below 60 ℃, repeatedly operating the leakage detection operation step after baking and degassing the gyrotron tube body until the completion of the leakage stoppage of the gyrotron.
The operation steps of the sealing and degassing equipment for the body of the gyrotron are as follows:
d1, placing cold sealing pliers on an exhaust pipe of a gyrotron pipe body, enabling the exhaust pipe to be positioned in the center of a knife edge, enabling the exhaust pipe and the knife edge to be mutually vertical, and fixing the gyrotron to seal off the gyrotron;
d1, covering a copper sheet with the thickness of 0.5mm on the sealing position of the calandria, fixing the copper sheet by using a nickel-chromium wire, coating a tin soldering flux, putting the calandria into a crucible filled with molten soldering tin, and keeping the crucible for 1-2 seconds to complete the tin immersion of the sealing knife edge of the calandria.
The invention has the advantages that:
the invention discloses a degassing method for a pipe body of a gyrotron, which can basically remove gas in the pipe body of the gyrotron through the degassing method, so that the gyrotron obtains a high-vacuum working environment, the working reliability of the gyrotron is improved, the service life of the pipe is prolonged, and meanwhile, the method has high process repeatability and consistency and is beneficial to operation.
Drawings
The contents of the expressions in the various figures of the present specification and the labels in the figures are briefly described as follows:
FIG. 1 is a schematic view of a convolute duct structure to be degassed according to the present invention:
the main reference symbols in the drawings have the following meanings:
1. s01, a gyrotron body to be degassed; 2. s02, connecting the exhaust pipe of the gyrotron; 3. s03, an electron gun component of a gyrotron body; 4. s04-a hot wire lead of the gyrotron body.
Detailed Description
The following description of preferred embodiments of the invention will be made in further detail with reference to the accompanying drawings.
A method of degassing a convolute duct body, the degassing method comprising the steps of:
step 1: before the body of the gyrotron to be degassed is arranged on degassing equipment, electrical property detection is required to be carried out;
and 2, step: after the step 1 is finished, mounting the body of the gyrotron, of which the electrical property is detected in the step 1, on degassing equipment;
and step 3: after the step 2 is finished and before degassing, requiring the body of the gyrotron to carry out leak detection treatment;
and 4, step 4: after the step 3 is finished, degassing and baking the body of the gyrotron;
and 5: after the step 4 is finished, activating and degassing a cathode assembly of the electron gun of the gyrotron by electrifying a filament of a tube body of the gyrotron;
step 6: after the step 5 is finished, performing leakage detection treatment on the body of the gyrotron after degassing;
and 7: after the step 6 is finished, sealing the pipe body of the gyrotron away from degassing equipment;
and 8: and 7, after the step 7 is finished, finishing the degassing operation of one convolution tube body, if the degassing operation needs to be carried out on the other convolution tube body, and repeating the steps 1-7.
The invention can basically remove the gas in the body of the gyrotron through the degassing method, so that the gyrotron obtains a high vacuum working environment, the working reliability of the gyrotron is improved, the service life of the gyrotron is prolonged, and meanwhile, the method has high process repeatability and consistency and is beneficial to operation.
The method mainly comprises seven steps of electrical property detection before the gyrotron tube body is arranged on degassing equipment, mounting the gyrotron tube body on the degassing equipment, leak detection before the gyrotron tube body degassing, degassing and baking the gyrotron tube body, electrifying filaments of the gyrotron tube body, leak detection after the gyrotron tube body degassing, and sealing the gyrotron tube body off the degassing equipment; the method can thoroughly remove the gas in the body of the gyrotron, so that the gyrotron obtains a high-vacuum working environment, the working reliability of the gyrotron can be improved, the service life of the gyrotron can be prolonged, and meanwhile, the method is high in process repeatability and consistency and beneficial to operation.
The invention aims to provide a degassing method for a pipe body of a gyrotron, which adopts the technical scheme that the degassing method comprises the following steps:
step 1: before the gyrotron tube body is arranged on a degassing equipment table, electrical property detection is carried out:
the detection content comprises the following steps: using a universal meter to check that the resistance of the lamp filament circuit of the gyrotron is in accordance with the specification of a design value range;
the insulation condition between the electrodes of the gyrotron is measured by a megohmmeter, and the resistance between the electrodes is in accordance with the design range.
Step 2: the gyrotron pipe body is arranged on a degassing equipment table:
the operation steps are as follows:
s1: wiping the joint of the flange plate of the degassing equipment interface and the exhaust pipe of the gyrotron to be degassed by using cotton cloth dipped with alcohol to ensure cleanness;
s2: placing the joint of the exhaust pipe of the gyrotron on a flange plate of degassing equipment, screwing a flange plate screw cap of the degassing equipment until reaching a fulcrum, and sealing the joint of the flange plate and the exhaust pipe of the gyrotron to ensure the cold sealing vacuum airtightness;
s3: connecting a lead of a filament power supply part on degassing equipment with a hot wire lead on a gyrotron;
s4: and wiping the sealing joint of the furnace cover of the degassing equipment by using cotton cloth dipped with alcohol to ensure cleanness, and lowering the furnace cover of the degassing equipment until the sealing joint is reached.
And step 3: the body of the gyrotron is subjected to leak detection on a degassing device table:
the operation steps are as follows:
a1: pumping the furnace cover chamber of the degassing equipment until the vacuum degree reaches 1 multiplied by 10 -1 Below P a; forming external vacuum in the furnace cover chamber;
a2: pre-pumping the gyrotron to be degassed until the vacuum degree reaches 2.7 multiplied by 10 -5 Performing the next operation after P a; forming internal vacuum in the gyrotron;
a3: and closing the degassing equipment, opening a gas release valve, and filling air into the furnace cover chamber of the degassing equipment so as to perform leak detection on the body of the gyrotron.
In the specific implementation:
a1: according to the operating rule of the degassing equipment, the furnace cover chamber (external vacuum) of the degassing equipment is pumped until the vacuum degree reaches 1 multiplied by 10 -1 Below P a;
a2: operating according to the operating rules of degassing equipment, pre-pumping the cyclone tube (internal vacuum) to be degassed until the vacuum degree reaches 2.7X 10 -5 Performing the next operation after P a;
a3: operating according to the operating specification of the degassing equipment, closing the degassing equipment (a mechanical pump or a roots pump and the like) and an external vacuum gauge of external vacuum, opening a gas release valve, filling air into a furnace cover chamber of the degassing equipment, and detecting the leakage of a pipe body of a gyrotron;
the above-mentioned leakage detection is respectively treated according to the following conditions:
if the vacuum degree is not deteriorated during inflation, the cyclone tube to be degassed is judged to be airtight, the operation of the step a1 is repeated, and degassing is continuously carried out on the cyclone tube;
if the air pressure of the inner vacuum degree is increased and worsened during inflation, the air leakage of the inner vacuum degassing system can be judged, the furnace cover of the degassing equipment needs to be lifted, the flange plate screw cap is screwed again, and the connecting part of the flange plate and the exhaust pipe of the gyrotron is sealed. If the vacuum degree of the gyrotron becomes better after resealing, the gyrotron to be degassed can be judged to be airtight, a degassing equipment furnace cover is lowered to the sealing connection position, the operation of the step a1 is repeated, and degassing is continuously carried out on the gyrotron; if the vacuum degree of the gyrotron is not changed after resealing, all welding positions of the gyrotron body are coated with alcohol in sequence from bottom to top to search for leakage points (an alcohol leakage detection method which is well known in the industry), and if the gyrotron body is judged to be leaked, repair treatment is needed.
And 4, step 4: baking the pipe body of the gyrotron on a degassing equipment table:
the method comprises the following specific operation steps:
b1: if the body of the gyrotron is determined to be airtight, degassing is carried out on the furnace cover chamber of the degassing equipment again, and the degassing equipment (a mechanical pump or a roots pump and the like) with external vacuum is connected until the air pressure reaches 1 multiplied by 10 -1 After Pa, turning on an external vacuum molecular pump;
b2: the external vacuum reaches 1 x 10 -3 And after Pa, switching on a heater of the degassing equipment, setting a temperature rise program control program of the degassing equipment according to the temperature process curve regulation of the temperature rise baking of the gyrotron, and starting to heat and bake the gyrotron body.
In step 5, energizing the filament of the tube body of the gyrotron to activate and degas the cathode component of the electron gun of the gyrotron:
the method comprises the following specific operation steps:
c1, when the temperature in the furnace cover chamber of the degassing equipment rises to the range of 450-550 ℃, keeping the temperature for 15-20 h continuously, and then starting a filament power supply on the degassing equipment to electrify a filament of the gyrotron tube body;
c2, performing power-on operation on the gyrotron filament according to a current value specified by a power-on process, and if the vacuum degree in the gyrotron tube body during the power-on process does not meet the process setting requirement, prolonging the power-on maintaining time until the process setting requirement of the vacuum degree in the gyrotron tube body is met;
c3, after the power-on is finished, slowly reducing the voltage on the lamp filament of the gyrotron to zero, cutting off a lamp filament power supply on degassing equipment,
step 6: carrying out gas tightness leak detection after baking and degassing a gyrotron body:
the method comprises the following specific operation steps: when the temperature in the furnace cover chamber of the degassing equipment is reduced to below 60 ℃, the exhaust equipment (a molecular pump, a mechanical pump or a roots pump and the like) and an external vacuum gauge of the external vacuum furnace cover are closed according to the operation rules, and an inflation valve of the furnace cover is opened to inflate air into the furnace cover for leak detection.
The case of performing the leak detection processing in this step is as follows, and the processing is performed according to the following cases:
if the vacuum degree in the body of the gyrotron is not deteriorated during inflation, the gyrotron can be judged to be airtight, and the subsequent steps are continued;
if the air pressure in the body of the gyrotron is increased and the air pressure in the body of the gyrotron is changed during inflation, the air leakage of the body of the gyrotron can be judged, the exact position of the air leakage of the body of the gyrotron needs to be carefully searched and determined by the alcohol leakage detection method, and then the air leakage part is coated by the leakage blocking agent. And lowering the furnace cover of the degassing equipment again after the leak stoppage is finished, carrying out vacuum degassing again according to the method, heating and baking to 200-300 ℃, keeping the temperature for 2-4 hours, wherein the heating rate is less than or equal to 80 ℃/hour, solidifying the leak stoppage agent, slowly adding the filament current to the maximum value of the current specified by the process within 30-60 minutes during the heat preservation, and keeping the maximum value for 1-2 hours. And after the end, the lamp filament is closed, the heating power supply is baked, and when the temperature of the furnace cover of the degassing equipment is reduced to below 60 ℃, the operation step of leak detection after baking and degassing of the body of the gyrotron is repeatedly operated until the completion of the leak stoppage of the gyrotron.
And 7: the gyrotron body seals off the degasser:
the method comprises the following specific operation steps:
d1, placing cold sealing pliers on the calandria of the gyrotron body, enabling the calandria to be positioned in the center of a knife edge, enabling the calandria to be perpendicular to each other, and fixing the gyrotron to seal off the gyrotron;
and D2, covering a copper sheet with the thickness of 0.5mm on the sealing position of the calandria, fixing the copper sheet by using a nickel-chromium wire, coating a tin welding flux, and putting the copper sheet into a crucible filled with molten soldering tin for 1-2 seconds to finish the immersion tin of the sealing knife edge of the calandria.
So far, the degassing work of the body of the gyrotron is completed.
The method has the advantages that the gas in the body of the gyrotron can be thoroughly exhausted by the method, so that the gyrotron obtains a high-vacuum working environment, the working reliability of the gyrotron is improved, the service life of the gyrotron is prolonged, and meanwhile, the method is high in process repeatability and consistency and beneficial to operation.
In addition, in the present invention, it is required that the resistance of the filament and the insulation between the electrodes should be checked to meet design specifications before the body of the convolution tube is mounted on the degassing apparatus; besides an alcohol leak detection method, other general leak detection methods in the industry can be used for leak detection of the gyrotron body, for example, a helium mass spectrometer leak detector can also be used for leak detection; the highest temperature of degassing and baking the gyrotron tube body is preferably 500-550 ℃; the vacuum degree of the cyclone tube body after degassing is 10 -8 And Pa grade.
The specific embodiment is as follows:
the embodiment of degassing 800GHz convolute tube body is further described.
The specific operating method is described as follows:
before the gyrotron tube body is arranged on a degassing equipment table, electrical property detection is carried out:
the content detection comprises the following steps:
the resistance of the lamp filament circuit of the gyrotron is checked to meet the requirements of a design value range by using a multimeter. The filament resistance of the 800GHz gyrotron of the embodiment is 0.53 +/-0.1 ohm;
the insulation between the electrodes of the gyrotron is measured by a megohmmeter, and the resistance between the electrodes is in accordance with the design range. The resistance between the electrodes of the 800GHz convolute tube of this example is shown in the following table:
and 2, step: the gyrotron pipe body is arranged on a degassing equipment table:
the operation steps are as follows:
s1: wiping the joint of the flange plate of the degassing equipment interface and the exhaust pipe of the gyrotron to be degassed by using cotton cloth dipped with alcohol to ensure cleanness;
s2: placing the joint of the exhaust pipe of the gyrotron on a flange plate of degassing equipment, screwing a flange plate screw cap of the degassing equipment until reaching a fulcrum, and sealing the joint of the flange plate and the exhaust pipe of the gyrotron to ensure the cold sealing vacuum airtightness;
s3: connecting a lead of a filament power supply part on degassing equipment with a hot wire lead on a gyrotron;
s4: and wiping the sealing joint of the furnace cover of the degassing equipment by using cotton cloth dipped with alcohol to ensure cleanness, and lowering the furnace cover of the degassing equipment until the sealing joint is reached.
And step 3: the body of the gyrotron is subjected to leak detection on a degassing equipment platform:
the operation steps are as follows:
a1: according to the operating rule of the degassing equipment, the furnace cover chamber (external vacuum) of the degassing equipment is pumped until the vacuum degree reaches 1 multiplied by 10 -1 Below P a;
a2: operating according to the operating rules of degassing equipment, pre-pumping the cyclone tube (internal vacuum) to be degassed until the vacuum degree reaches 2.7X 10 -5 Performing the next operation after P a;
a3: and (3) operating according to the operating specification of the degassing equipment, closing the degassing equipment (a mechanical pump, a roots pump and the like) and an external vacuum gauge of external vacuum, opening a gas release valve, filling air into a furnace cover chamber of the degassing equipment, and detecting the leakage of the body of the gyrotron.
The following conditions were used:
if the vacuum degree is not deteriorated during inflation, the cyclone tube to be degassed is judged to be airtight, the operation of the step a1 is repeated, and degassing is continuously carried out on the cyclone tube;
if the internal vacuum degree and the air pressure are increased and worsened during inflation, the air leakage of the internal vacuum degassing system can be judged, the furnace cover of the degassing equipment needs to be lifted, the flange plate screw cap is screwed again, and the connecting part of the flange plate and the exhaust pipe of the gyrotron is sealed. If the vacuum degree of the gyrotron becomes good after resealing, the gyrotron to be degassed is judged to be airtight, a degassing equipment furnace cover is lowered to the sealing connection position, the operation of the step a1 is repeated, and degassing is continuously carried out on the gyrotron; if the vacuum degree of the convolute tube is not changed after resealing, all welding positions of the body of the convolute tube must be coated with alcohol from bottom to top in sequence to search for leakage points (an alcohol leakage detection method, a known leakage detection method in the industry), and if the body of the convolute tube is judged to be leaked, repair treatment is needed.
And 4, step 4: baking the pipe body of the gyrotron on a degassing equipment table:
the operation steps are as follows:
b1: if the body of the gyrotron is determined to be airtight, degassing is carried out on the furnace cover chamber of the degassing equipment again, and the degassing equipment (a mechanical pump or a roots pump and the like) with external vacuum is connected until the air pressure reaches 1 multiplied by 10 -1 After Pa, turning on an external vacuum molecular pump;
b2: the external vacuum reaches 1 x 10 -3 And after Pa, switching on a heater of the degassing equipment, setting a temperature rise program control program of the degassing equipment according to the temperature process curve regulation of the temperature rise baking of the gyrotron, and starting to heat and bake the gyrotron body.
The temperature process curve of the 800GHz convolute duct body heating and baking of the example is shown in the following table:
and 5: activating and degassing a cathode component of a gyrotron electron gun by electrifying filaments of a gyrotron tube body:
the operation steps are as follows:
c1, when the temperature in the furnace cover of the degassing equipment rises to 500 ℃, keeping the temperature for 15-20 h, and then starting a filament power supply on the degassing equipment to electrify a filament of the gyrotron tube body;
and C2, performing power-on operation on the gyrotron filament according to a current value specified by a power-on process, and if the vacuum degree in the gyrotron tube body during the power-on process does not meet the process setting requirement, prolonging the power-on maintaining time until the vacuum degree process setting requirement in the gyrotron tube body is met.
The specified requirements of the power-up process of the 800GHz gyrotron filament of the embodiment are as follows: the current is 0.5A to be one gear, and the holding time of each gear is 10 min-20 min until the maximum current of the lamp filament of the gyrotron is added to 4.9A. The vacuum degree in the body of the gyrotron is not lower than 8.5 multiplied by 10 after each gear of power-on and heat preservation in the power-on process －7 Pa。
And C3, after the electrification is finished, slowly reducing the voltage on the lamp filament of the gyrotron to zero, and cutting off the lamp filament power supply on the degassing equipment.
And 6: carrying out gas tightness leak detection after baking and degassing a gyrotron body:
the operation steps are as follows;
when the temperature in the furnace cover of the degassing equipment is reduced to below 60 ℃, the degassing equipment (a molecular pump, a mechanical pump or a Roots pump and the like) and an external vacuum gauge of the external vacuum furnace cover are closed according to the operation rules, an inflation valve of the furnace cover is opened, and the furnace cover is inflated with air for leak detection.
The following conditions were used:
if the vacuum degree in the body of the gyrotron is not deteriorated during inflation, judging that the gyrotron is airtight, and continuing the subsequent steps;
if the air pressure in the body of the gyrotron is increased and the air pressure in the body of the gyrotron is changed during inflation, the air leakage of the body of the gyrotron can be judged, the exact position of the air leakage of the body of the gyrotron needs to be carefully searched and determined by the alcohol leakage detection method, and then the air leakage part is coated by the leakage blocking agent. And after the leak stopping is finished, lowering the furnace cover of the degassing equipment again, carrying out vacuum degassing again according to the method, heating and baking to 200-300 ℃, and keeping the temperature for 2-4 hours, wherein the heating rate is less than or equal to 80 ℃ per hour, so that the leak stopping agent is solidified, and slowly adding the filament current to the maximum value of the current specified by the process within 30-60 minutes during the heat preservation and keeping the current for 1-2 hours. And after the completion of the lamp filament and the baking heating power supply, when the temperature of the degassing equipment furnace cover is reduced to below 60 ℃, repeatedly operating the leakage detection operation step after baking and degassing the gyrotron tube body until the completion of the leakage stoppage of the gyrotron.
And 7: sealing and degassing equipment for a pipe body of the gyrotron:
the operation steps are as follows:
d1, placing cold sealing pliers on the calandria of the gyrotron body, enabling the calandria to be positioned in the center of a knife edge, enabling the calandria to be perpendicular to each other, and fixing the gyrotron to seal off the gyrotron;
and D2, covering a copper sheet with the thickness of 0.5mm on the sealing position of the calandria, fixing the copper sheet by using a nickel-chromium wire, coating a tin welding flux, and putting the copper sheet into a crucible filled with molten soldering tin for 1-2 seconds to finish the immersion tin of the sealing knife edge of the calandria.
So far, the degassing work of the body of the gyrotron is completed.
It is clear that the specific implementation of the invention is not restricted to the above-described embodiments, but that various insubstantial modifications of the inventive process concept and technical solutions are within the scope of protection of the invention.
Claims (10)
1. A degassing method for a body of a gyrotron, which is characterized by comprising the following steps:
step 1: before the body of the gyrotron to be degassed is arranged on degassing equipment, electrical property detection is required to be carried out;
step 2: after the step 1 is finished, mounting the body of the gyrotron, of which the electrical property is detected in the step 1, on degassing equipment;
and step 3: after the step 2 is finished and before degassing, the body of the gyrotron is required to be subjected to leakage detection treatment;
and 4, step 4: after the step 3 is finished, degassing and baking the body of the gyrotron;
and 5: after the step 4 is finished, activating and degassing a cathode assembly of the electron gun of the gyrotron by electrifying a filament of a tube body of the gyrotron;
step 6: after the step 5 is finished, performing leakage detection treatment on the body of the gyrotron after degassing;
and 7: after the step 6 is finished, sealing the pipe body of the gyrotron away from degassing equipment;
and 8: and 7, after the step 7 is finished, finishing the degassing operation of one convolution tube body, if the degassing operation needs to be carried out on the other convolution tube body, and repeating the steps 1-7.
2. The method of claim 1 wherein said electrical property testing step 1 comprises using a multimeter to check the resistance of the coil filament circuit for compliance with design requirements and using a megohmmeter to measure the insulation between the coil electrodes.
3. The method of degassing a convolute duct body of claim 1 wherein said step 2 of installing said convolute duct body into a degassing apparatus comprises the steps of:
s1: wiping the joint of the interface flange of the degassing equipment and the exhaust pipe of the gyrotron to be degassed by cotton cloth dipped with alcohol;
s2: placing the joint of the exhaust pipe of the gyrotron on a flange plate of degassing equipment;
s3: connecting a lead of a filament power supply part on degassing equipment with a hot wire lead on the gyrotron;
s4: and lowering the degassing equipment furnace cover to the sealing connection of the degassing equipment furnace cover.
4. A method of degassing a convolute duct body as claimed in claim 1, wherein said leak detection process of step 3 comprises the steps of:
a1: pumping the furnace cover chamber of the degassing equipment until the vacuum degree reaches 1 multiplied by 10 -1 Below P a;
forming external vacuum in the furnace cover chamber;
a2: pre-pumping the gyrotron to be degassed until the vacuum degree reaches 2.7 multiplied by 10 -5 Performing the next operation after P a; forming internal vacuum in the gyrotron;
a3: and closing the degassing equipment, opening a gas release valve, and filling air into the furnace cover chamber of the degassing equipment so as to perform leak detection on the body of the gyrotron.
5. The method as claimed in claim 4, wherein in a 3; if the internal vacuum degree is not deteriorated during inflation, the cyclone tube to be degassed can be judged to be airtight; repeating the operation a1 and continuing to degas the gyrotron;
if the air pressure of the inner vacuum degree is increased and worsened during inflation, the air leakage of the inner vacuum degassing system can be judged, the furnace cover of the degassing equipment needs to be lifted, the flange plate screw cap is screwed again, and the connecting part of the flange plate and the exhaust pipe of the gyrotron is sealed;
if the vacuum degree of the gyrotron becomes better after resealing, the gyrotron to be degassed can be judged to be airtight, and the degassing equipment furnace cover is lowered to the sealing connection position;
repeating the operation a1, and continuing to degas the gyrotron;
if the vacuum degree of the gyrotron is not changed after resealing, all welding positions of the gyrotron body are coated with alcohol in sequence from bottom to top to find leakage points; if the air leakage of the body of the gyrotron is judged, the body needs to be repaired.
6. The method of claim 5, wherein the degas bake process comprises the steps of:
b1: if the body of the gyrotron is determined to be airtight, degassing is carried out on the furnace cover chamber of the degassing equipment again, and the degassing equipment (a mechanical pump or a roots pump and the like) with external vacuum is connected until the air pressure reaches 1 multiplied by 10 -1 After Pa, turning on an external vacuum molecular pump;
b2: the external vacuum reaches 1 x 10 -3 And after Pa, switching on a heater of the degassing equipment, setting a temperature rise program control program of the degassing equipment according to the temperature process curve regulation of the temperature rise baking of the gyrotron, and starting to heat and bake the gyrotron body.
7. The method of degassing a convolute duct body of claim 6, wherein; the step 5 of activating and degassing the cathode component of the electron gun of the cyclotron by electrifying the filament of the tube body of the cyclotron comprises the following steps:
c1, when the temperature in the furnace cover chamber of the degassing equipment rises to the range of 450-550 ℃, keeping the temperature for 15-20 h;
starting a filament power supply on degassing equipment to start to power up a filament of a tube body of the gyrotron;
c2, performing power-on operation on the gyrotron filament according to a specified current value, and if the vacuum degree in the gyrotron tube body during the power-on process does not meet the process setting requirement, prolonging the power-on maintaining time until the process setting requirement of the vacuum degree in the gyrotron tube body is met;
and C3, after the electrification is finished, slowly reducing the voltage on the lamp filament of the gyrotron to zero, and cutting off the lamp filament power supply on degassing equipment.
8. The method of claim 1, wherein the degassing of the body of the gyrotron in step 6 is performed again by a degassing leak detection process, and the degassing leak detection process comprises the following steps: and when the temperature in the furnace cover of the degassing equipment is reduced to below 60 ℃, closing the exhaust equipment of the outer vacuum furnace cover, opening the gas charging valve of the furnace cover, and charging air into the furnace cover for leak detection.
9. The method of degassing a convolute duct body of claim 8, wherein during a post-degassing leak detection process:
if the vacuum degree in the body of the gyrotron is not deteriorated during inflation, the gyrotron can be judged to be airtight, and the subsequent steps are continued;
if the air pressure of the vacuum degree in the body of the gyrotron rises and becomes poor during inflation, the air leakage of the body of the gyrotron can be judged, the exact position of the air leakage of the body of the gyrotron is searched and determined by an alcohol leak detection method, and then the air leakage part is coated by a plugging agent;
lowering the furnace cover of the degassing equipment again after the leak stoppage is finished, carrying out vacuum degassing again according to the method, heating and baking to 200-300 ℃, and keeping the temperature for 2-4 hours, wherein the heating rate is less than or equal to 80 ℃ per hour, so that the leak stoppage agent is solidified, and the current of the filament is slowly added to the maximum value of the current specified by the process within 30-60 minutes and kept for 1-2 hours; and after the completion of the lamp filament and the baking heating power supply, when the temperature of the degassing equipment furnace cover is reduced to below 60 ℃, repeatedly operating the leakage detection operation step after baking and degassing the gyrotron tube body until the completion of the leakage stoppage of the gyrotron.
10. The method of claim 1, wherein the step of sealing the convolute duct from the degassing apparatus comprises:
d1, placing cold sealing pliers on an exhaust pipe of a gyrotron body to enable the exhaust pipe to be positioned in the center of a knife edge and to be mutually vertical, and fixing the gyrotron to seal off the gyrotron;
and D1, covering a copper sheet with the thickness of 0.5mm on the sealing position of the calandria, fixing the copper sheet by using a nickel-chromium wire, coating a tin welding flux, and putting the copper sheet into a crucible filled with molten soldering tin for 1-2 seconds to finish the immersion tin of the sealing knife edge of the calandria.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211669491.XA CN115863123A (en) | 2022-12-24 | 2022-12-24 | Degassing method for body of gyrotron |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211669491.XA CN115863123A (en) | 2022-12-24 | 2022-12-24 | Degassing method for body of gyrotron |
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| Publication Number | Publication Date |
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| CN115863123A true CN115863123A (en) | 2023-03-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202211669491.XA Pending CN115863123A (en) | 2022-12-24 | 2022-12-24 | Degassing method for body of gyrotron |
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| Country | Link |
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| CN (1) | CN115863123A (en) |
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