CN107180733B - Method for recycling cathode assembly - Google Patents
Method for recycling cathode assembly Download PDFInfo
- Publication number
- CN107180733B CN107180733B CN201710486240.0A CN201710486240A CN107180733B CN 107180733 B CN107180733 B CN 107180733B CN 201710486240 A CN201710486240 A CN 201710486240A CN 107180733 B CN107180733 B CN 107180733B
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- China
- Prior art keywords
- cathode assembly
- cathode
- recycled
- anode
- recovery method
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/50—Repairing or regenerating used or defective discharge tubes or lamps
- H01J9/505—Regeneration of cathodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W30/00—Technologies for solid waste management
- Y02W30/50—Reuse, recycling or recovery technologies
- Y02W30/82—Recycling of waste of electrical or electronic equipment [WEEE]
Abstract
The invention discloses a recycling method of a cathode assembly, wherein the recycling method comprises the following steps: 1) carrying out size detection on the cathode assembly to be recovered; 2) etching and coating the surface of the cathode assembly to be recovered, which is qualified through size detection, to prepare a coated cathode assembly to be recovered; 3) and (3) packaging the coated cathode assembly to be recovered and the coated anode after being assembled, detecting the emission current of the coated cathode assembly after the cathode assembly is exhausted, the cathode is activated and aged and the anode is degassed, and recovering the coated cathode assembly if the emission current is qualified, otherwise, scrapping the coated cathode assembly. According to the invention, the emission current of the cathode assembly to be recovered is detected after sequentially carrying out size detection, etched coating, packaging, cathode assembly exhaust, cathode activation aging and anode degassing, whether the cathode assembly is qualified or not is judged by judging the emission current result, and the cathode assembly is recovered. Thereby greatly improving the recovery rate of the cathode assembly and reducing the use cost in a relatively simple mode.
Description
Technical field
The present invention relates to microwave vacuum device cathode electronics, and source component occurs, and in particular, to the recycling of cathode assembly
Method.
Background technique
Barium-tungsten dispense cathode is widely used in modern high power microwave device, is used as electron source launching electronics, is microwave device
" heart " of part.
Initial stage is developed in microwave device especially travelling-wave tubes, needs to make a large amount of test short tube verifying electron-optical system
Reasonability or verify technological design reasonability.In the process with regard to needing to consume a large amount of barium-tungsten dispense cathode, wave is caused
Take.Due to travelling-wave tubes develop initial stage production test short tube only verify design rationality and the anticathode service life does not do too high want
It asks, as long as cathode meets launch requirements.
Therefore it provides a kind of energy cathode assembly of the recovery test in short tube electron gun, greatly improves its utilization rate, reduces
The problem of recovery method of the cathode assembly of experimentation cost is urgent need to resolve of the present invention.
Summary of the invention
For the above-mentioned prior art, it is an object of the invention to overcome to generally require to disappear in the prior art during the test
The problem of consuming a large amount of barium-tungsten dispense cathode, be easy to causeing waste, thus provide it is a kind of can be in recovery test short tube electron gun
Cathode assembly greatly improves its utilization rate, reduces the recovery method of the cathode assembly of experimentation cost.
To achieve the goals above, the present invention provides a kind of recovery methods of cathode assembly, wherein the recovery method
Include:
1) size detection is carried out to cathode assembly to be recycled;
2) to the plated film after the cathode assembly surface to be recycled of size detection qualification performs etching, after plated film is made wait return
Receive cathode assembly;
3) encapsulated after installing the cathode assembly to be recycled after plated film with anode unit, and after through cathode assembly exhaust,
Cathode activation is seasoned with after anode degasification, detects its emission current, if emission current is qualified, is recycled, conversely, then carrying out
It scraps.
Preferably, cathode assembly to be recycled is to be isolated out of electronics gun housing by way of grinding or turning in step 1)
Cathode assembly to be recycled.
It preferably, further include by cathode assembly to be recycled before carrying out size detection to cathode assembly to be recycled in step 1)
Burr rejecting is carried out, and the cathode assembly surface to be recycled after rejecting burr is purged.
Preferably, the flushing processes are to be purged using compressed nitrogen.
Preferably, in step 2) etching coating process be placed in ion etching coating machine to carry out, and etch with a thickness of
5-9 μm, coating film thickness is 0.3-0.5 μm.
Preferably, the plated film is osmium iridium aluminium film.
Preferably, assembling and encapsulation process include: that the cathode assembly to be recycled for having plated film is shelved stem in step 3)
It goes up and assembles test anode, be then encapsulated into glass shell, cathode assembly to be recycled is finally sealed to cathode exhaust gas platform
On.
Preferably, cathode assembly is vented in step 3), cathode activation is seasoned and anode degasification includes:
Cathode assembly exhaust: when vacuum degree reaches not higher than 2 × 10-4Pa in exhaust station, connecting baking oven heating power supply,
1-2h is kept the temperature after so that oven temperature is risen to 370-390 DEG C, and heating rate control is at 4 DEG C/min;
Cathode activation is seasoned: when vacuum degree reaches not higher than 2.7 × 10-5Pa in exhaust station, by cathode assembly to be recycled
On the binding post of heater lead and seasoned power supply connect, be gradually powered on to cathode assembly, so that cathode assembly temperature reaches
To after 1100-1150 DEG C, 1.5-2h is kept the temperature;
Anode degasification: connecting and anode supply and slowly increase anode voltage, get to emission of cathode electronics on anode, when dividing
When the power on anode reaches 4.5-5W, the retention time is no less than 15 minutes cloth, in vacuum system after the retention time
Vacuum degree is not higher than 7.0 × 10-6Pa。
Preferably, detection process in step 3) are as follows: assembled cathode assembly to be recycled is powered on anode, is carried out
Cathode test, and it is whether qualified by drawing Cathodic Voltammetric Characteristics curve detection emission current.
Through the above technical solutions, the present invention by cathode assembly to be recycled sequentially through being plated after size detection, etching
Film, encapsulation after cathode assembly is vented, cathode activation is seasoned and anode degasification, detect its emission current, by emission current knot
Whether the judgement of fruit is qualified to determine it, and is recycled.To substantially increase cathode assembly by relatively simple mode
The rate of recovery, reduce use cost.
Other features and advantages of the present invention will the following detailed description will be given in the detailed implementation section.
Detailed description of the invention
The drawings are intended to provide a further understanding of the invention, and constitutes part of specification, with following tool
Body embodiment is used to explain the present invention together, but is not construed as limiting the invention.In the accompanying drawings:
Fig. 1 is a kind of flow chart of recovery method provided by the invention;
Fig. 2 is a kind of circuit diagram for testing circuit provided by the invention;
Fig. 3 is a kind of structural schematic diagram of short tube structure provided by the invention.
Description of symbols
The rectangular voltage power supply 2- that 1- leads to equipment leads to the mains lighting supply of equipment
3- water cooling collector 4- electron gun
Specific embodiment
Detailed description of the preferred embodiments below.It should be understood that described herein specific
Embodiment is merely to illustrate and explain the present invention, and is not intended to restrict the invention.
The present invention provides a kind of recovery methods of cathode assembly, wherein as shown in Figure 1, the recovery method includes:
1) size detection is carried out to cathode assembly to be recycled;
2) to the plated film after the cathode assembly surface to be recycled of size detection qualification performs etching, after plated film is made wait return
Receive cathode assembly;
3) encapsulated after installing the cathode assembly to be recycled after plated film with anode unit, and after through cathode assembly exhaust,
Cathode activation is seasoned with after anode degasification, detects its emission current, if emission current is qualified, is recycled, conversely, then carrying out
It scraps.
Above-mentioned design by cathode assembly to be recycled sequentially through plated film, encapsulation, cathode assembly after size detection, etching
Exhaust after cathode activation is seasoned and anode degasification, detects its emission current, determines it by the judgement to emission current result
It is whether qualified, and recycled.To substantially increase the rate of recovery of cathode assembly by relatively simple mode, reducing makes
Use cost.
Here cathode assembly to be recycled can be isolated according to suitable mode, for example, a kind of preferred embodiment
In, cathode assembly to be recycled is that cathode sets to be recycled are isolated out of electronics gun housing by way of grinding or turning in step 1)
Part.
It, can be with before carrying out size detection to cathode assembly to be recycled in step 1) in further preferred embodiment
Including cathode assembly to be recycled is carried out burr rejecting, and the cathode assembly surface to be recycled after rejecting burr is purged.
Here purging can be operated according to suitable mode, for example, being in a kind of more preferably embodiment
Purging effect is further increased, the flushing processes are to be purged using compressed nitrogen.
In further preferred embodiment, in step 2) etching coating process be placed in ion etching coating machine into
Row, and etch with a thickness of 5-9 μm, coating film thickness is 0.3-0.5 μm.
Here plated film can be the type of conventional selection, certainly, in one kind more preferably embodiment, the plated film
It can choose as osmium iridium aluminium film.
In a kind of preferred embodiment, assembling and encapsulation process include: that will plate the cathode to be recycled of film in step 3)
Component is shelved on stem and assembles test anode, is then encapsulated into glass shell, finally seals cathode assembly to be recycled
It is connected on cathode exhaust gas platform.
In one kind more preferably embodiment, cathode assembly is vented in step 3), cathode activation is seasoned and anode degasification
Include:
Cathode assembly exhaust: when vacuum degree reaches not higher than 2 × 10 in exhaust station-4When Pa, baking oven heating power supply is connected, is made
Oven temperature keeps the temperature 1-2h after rising to 370-390 DEG C, and heating rate control is at 4 DEG C/min;
Cathode activation is seasoned: when vacuum degree reaches not higher than 2.7 × 10 in exhaust station-5When Pa, by cathode assembly to be recycled
On the binding post of heater lead and seasoned power supply connect, be gradually powered on to cathode assembly, so that cathode assembly temperature reaches
To after 1100-1150 DEG C, 1.5-2h is kept the temperature;
Anode degasification: connecting and anode supply and slowly increase anode voltage, get to emission of cathode electronics on anode, when dividing
When the power on anode reaches 4.5-5W, the retention time is no less than 15 minutes cloth, in vacuum system after the retention time
Vacuum degree is not higher than 7.0 × 10-6Pa。
Here test can be carried out according to suitable mode, for example, in a kind of preferred embodiment, inspection in step 3)
Survey process are as follows: assembled cathode assembly to be recycled is powered on anode, carries out cathode test, and by drawing cathode volt
Whether qualified pacify characteristic curve detection emission current.
It is illustrated in detail below.
As shown in figure 3, Dissection test short tube, passes through oil-free method for turning turning S02 electron gun rear end cap flange argon
Arc welding position, then turning S01 electron gun drive end bearing bracket flange argon arc welding position is removed after opening electron gun with scalpel
The solder joint of S03 heat shielding and the welding of electronics gun housing, slowly takes out cathode assembly;Amplify 24 times under the microscope, it will using scalpel
The cathode assembly that dissection comes out rejects burr, and is purged cathode surface completely with compressed nitrogen;Dissection is measured under micrometer
Cathode assembly out, detection cathode component architecture size continue to operate in next step after meeting design drawing requirement, otherwise cathode
Component is scrapped;The cathode assembly that dissection comes out is put into plated film tooling, is then put into togerther in ion etching coating machine, to yin
Pole surface carries out 9 μm of ion etching, finally sputtering plating osmium iridium aluminium film, and 0.5 μm of film thickness;The cathode assembly for having plated film is shelved into core
On column and test anode is assembled, then carries out being encapsulated into glass tube shell, cathode assembly is finally sealed to cathode row
On gas platform;Cathode assembly is vented, when system vacuum reaches 2 × 10-4When Pa, baking oven heating power supply is connected, is made warm in baking oven
Degree rises to (380 ± 10) DEG C heat preservation 2h, and heating rate is controlled at 4 DEG C/min;Cathode assembly progress cathode activation is seasoned, when
System vacuum reaches 2.7 × 10-5When Pa, the binding post of heater lead and seasoned power supply on cathode assembly is connected,
It is gradually powered on to cathode assembly, so that cathode assembly temperature up to 1150 DEG C, keeps the temperature 1.5h;Anode degasification is given, anode supply is connected
And slowly increase anode voltage, get to emission of cathode electronics on anode, when the power being distributed on anode reaches (4.5~5) W
When, the retention time is no less than 15 minutes under this power, after the retention time in vacuum system vacuum degree be better than 7.0 ×
10-6Pa;Circuit diagram powers on as shown in Figure 2, carries out cathode test, and draw Cathodic Voltammetric Characteristics curve, emission current is close
Degree meets 4A/cm2It may determine that cathode qualification, otherwise scrap.
The preferred embodiment of the present invention has been described above in detail, still, during present invention is not limited to the embodiments described above
Detail within the scope of the technical concept of the present invention can be with various simple variants of the technical solution of the present invention are made, this
A little simple variants all belong to the scope of protection of the present invention.
It is further to note that specific technical features described in the above specific embodiments, in not lance
In the case where shield, can be combined in any appropriate way, in order to avoid unnecessary repetition, the present invention to it is various can
No further explanation will be given for the combination of energy.
In addition, various embodiments of the present invention can be combined randomly, as long as it is without prejudice to originally
The thought of invention, it should also be regarded as the disclosure of the present invention.
Claims (9)
1. a kind of recovery method of cathode assembly, which is characterized in that the recovery method includes:
1) size detection is carried out to cathode assembly to be recycled;
2) yin to be recycled to the plated film after the cathode assembly surface to be recycled of size detection qualification performs etching, after plated film is made
Pole component;
3) encapsulated after installing the cathode assembly to be recycled after plated film with anode unit, and after through cathode assembly exhaust, cathode
After activating seasoned and anode degasification, its emission current is detected, if emission current is qualified, is recycled, conversely, then being reported
It is useless.
2. recovery method according to claim 1, which is characterized in that cathode assembly to be recycled is to pass through grinding in step 1)
Or the mode of turning isolates cathode assembly to be recycled out of electronics gun housing.
3. recovery method according to claim 1 or 2, which is characterized in that in step 1) to cathode assembly to be recycled into
Further include before row size detection by cathode assembly to be recycled carry out burr rejecting, and by reject burr after cathode assembly to be recycled
Surface is purged.
4. recovery method according to claim 3, which is characterized in that the purging is to be purged using compressed nitrogen.
5. recovery method according to claim 1 or 2, which is characterized in that in step 2) etching coating process be placed in from
Is carried out in son etching coating machine, and etch with a thickness of 5-9 μm, coating film thickness is 0.3-0.5 μm.
6. recovery method according to claim 5, which is characterized in that the plated film is osmium iridium aluminium film.
7. recovery method according to claim 1 or 2, which is characterized in that in step 3) assembling and encapsulation process include: by
The cathode assembly to be recycled for having plated film is shelved on stem and assembles test anode, is then encapsulated into glass shell, finally
Cathode assembly to be recycled is sealed on cathode exhaust gas platform.
8. recovery method according to claim 1 or 2, which is characterized in that cathode assembly exhaust, cathode activation in step 3)
It is seasoned to include: with anode degasification
Cathode assembly exhaust: when vacuum degree reaches not higher than 2 × 10 in exhaust station-4When Pa, baking oven heating power supply is connected, baking oven is made
Interior temperature keeps the temperature 1-2h after rising to 370-390 DEG C, and heating rate control is at 4 DEG C/min;
Cathode activation is seasoned: when vacuum degree reaches not higher than 2.7 × 10 in exhaust station-5It, will be on cathode assembly to be recycled when Pa
The binding post of heater lead and seasoned power supply connects, and is gradually powered on to cathode assembly, so that cathode assembly temperature reaches
After 1100-1150 DEG C, 1.5-2h is kept the temperature;
Anode degasification: it connects anode supply and simultaneously slowly increases anode voltage, get to emission of cathode electronics on anode, when being distributed in
When power on anode reaches 4.5-5W, the retention time is no less than 15 minutes, to vacuum in vacuum system after the retention time
Degree is not higher than 7.0 × 10-6Pa。
9. recovery method according to claim 1 or 2, which is characterized in that detection process in step 3) are as follows: will be assembled
Cathode assembly to be recycled powers on anode, carries out cathode test, and by drawing the transmitting of Cathodic Voltammetric Characteristics curve detection
Whether electric current is qualified.
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CN201710486240.0A CN107180733B (en) | 2017-06-23 | 2017-06-23 | Method for recycling cathode assembly |
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CN201710486240.0A CN107180733B (en) | 2017-06-23 | 2017-06-23 | Method for recycling cathode assembly |
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CN107180733B true CN107180733B (en) | 2018-12-18 |
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CN201274275Y (en) * | 2008-08-20 | 2009-07-15 | 南京凯燕电子有限公司 | Electronic gun recovering device for kinescope |
CN102226980A (en) * | 2011-05-06 | 2011-10-26 | 安徽华东光电技术研究所 | Aging process of multi-beam traveling wave cathode |
CN105023820A (en) * | 2014-04-29 | 2015-11-04 | 安徽华东光电技术研究所 | Vacuum treatment method of multi-injection cathode assembly |
Family Cites Families (1)
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KR101371290B1 (en) * | 2012-10-30 | 2014-03-07 | 고등기술연구원연구조합 | Cold cathoded flourscent lamp recycling method |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201274275Y (en) * | 2008-08-20 | 2009-07-15 | 南京凯燕电子有限公司 | Electronic gun recovering device for kinescope |
CN102226980A (en) * | 2011-05-06 | 2011-10-26 | 安徽华东光电技术研究所 | Aging process of multi-beam traveling wave cathode |
CN105023820A (en) * | 2014-04-29 | 2015-11-04 | 安徽华东光电技术研究所 | Vacuum treatment method of multi-injection cathode assembly |
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Address after: 241000 Emshan Road, Yijiang District, Wuhu City, Anhui Province Patentee after: ANHUI HUADONG PHOTOELECTRIC TECHNOLOGY INSTITUTE Co.,Ltd. Address before: 241000 Huaxia science and Technology Park, Wuhu high tech Industrial Development Zone, Anhui Patentee before: Anhui Huadong Polytechnic Institute |
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