CN115857073B - Diaphragm array of multi-focal-length curved-surface micro-lens array and preparation method thereof - Google Patents
Diaphragm array of multi-focal-length curved-surface micro-lens array and preparation method thereof Download PDFInfo
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Abstract
The invention belongs to the field of micromachining, and particularly relates to a diaphragm array preparation method of a multi-focal-length curved-surface micro-lens array, which comprises the steps of masking a silicon wafer through a positive mask plate, forming a photoresist mask through a photolithography method, transferring the micro-lens array onto the silicon wafer, spraying photoresist on the lower surface of the silicon wafer, performing masking and back alignment through a negative mask plate, preparing a curved-surface fly-eye lens through pumping and inverse molding a PDMS film, spraying a developer on the curved-surface fly-eye lens to enhance reflected light, processing a resin material, adding a light shielding agent to obtain a light shielding resin with good light shielding property, performing three-dimensional scanning on the prepared curved-surface fly-eye lens under three-dimensional coordinates, performing in-situ diaphragm modeling on a scanned curved-surface fly-eye lens three-dimensional model, printing the light shielding resin onto the curved-surface fly-eye lens through 3D printing to obtain the fly-eye diaphragm, so that most stray light of the multi-focal-length curved-surface fly-eye lens can be eliminated, and imaging quality is greatly improved.
Description
Technical Field
The invention relates to the technical field of micromachining, in particular to a diaphragm array of a multi-focal-length curved-surface micro lens array and a preparation method thereof.
Background
The compound eye is the main visual organ of insects, and consists of a plurality of small eyes, and each small eye has the structures of cornea, crystalline cone, pigment cells, retina cells and visual rods, and is an independent photosensitive unit. The angle of vision of compound eye animals can reach 180 degrees, and the compound eye has the characteristic of being sensitive to moving objects, so that the response speed of the compound eye animals can reach 5 times of that of human beings. In recent years, multi-focal-length curved fly-eye lenses have been designed and manufactured by following the imaging principle of insect fly-eye, and the system has a large field angle and can form multi-channel images. Compared with the traditional single-aperture imaging system, the system has the characteristics of small volume, motion sensitivity and large field of view.
At present, high and new technologies are gradually developed in the direction of high integration and miniaturization. The existing optical system mainly comprises a monocular system, and the requirement for large-view-field miniaturization cannot be met. The biological compound eye in nature is researched, and the compound eye has the advantages of high sensitivity, large visual field, small volume, light weight and the like. The compound eyes can image in a large view field, but are limited by the size of a single eye, the resolution cannot be very high, but the imaging effect is relatively balanced in the imaging range of approximately 180 degrees, and the compound eyes have very high sensitivity to moving objects, so that the compound eyes are also the reason that the compound eyes always avoid the aggressive behavior of human beings in advance. The bionic compound eye is initiated by main visual organs of insects, has the characteristics of small volume, large field angle, high sensitivity and the like, and is a micro-optical-electromechanical system which is researched more in recent years. The research of the bionic compound eye imaging system is hopefully applied to solving a plurality of problems exposed by the application of the traditional single-aperture optical system in the fields of military, medical treatment, civil engineering and the like. At present, the fly-eye lens has been greatly developed in the manufacturing process, and the imaging quality of the designed fly-eye lens is greatly improved. Part of research results of the bionic compound eyes are widely applied to the fields of monitoring and positioning, missile guidance, compound eye cameras, LED performance improvement and the like, and have huge potential application values in the fields of machine vision, industrial detection, military operations, quick response and the like.
The single-lens multi-focal-length curved-surface micro-lens array can realize multi-channel imaging on one main lens, however, gaps among sub-eyes can lead stray light to enter, so that imaging quality is reduced. In order to balance the duty ratio of the fly-eye lens and the intensity in the preparation process, the distance between adjacent sub-eyes cannot exceed two hundred micrometers, so that the diaphragm array of the multi-focal-length curved-surface micro-lens array is required to have enough precision, and meanwhile, the diaphragm and the sub-eyes are required to be in one-to-one correspondence, and the diaphragm gap is required to be smooth. Since the height of the sub-eyes is generally small, the requirements can be well met by adopting in-situ diaphragm modeling. Therefore, it is necessary to study a method for preparing a diaphragm array of a multi-focal length curved microlens array.
Disclosure of Invention
In view of this, embodiments of the present invention provide a diaphragm array of a multi-focal-length curved microlens array and a method for manufacturing the same.
In a first aspect, an embodiment of the present invention provides a method for preparing a diaphragm array of a multi-focal-length curved-surface microlens array, including:
masking the silicon wafer through a positive mask plate, and forming a first photoresist mask on the upper surface of the silicon wafer by a photoetching method;
etching the upper surface of the silicon wafer coated with the first photoresist mask, and transferring the micro lens array to the silicon wafer;
spraying glue on the lower surface of the silicon wafer, and carrying out mask and back alignment by using a negative mask;
pumping air and reversely molding the PDMS film to form a curved fly-eye lens;
treating a resin material, drying matrix resin in a drying oven for 4 hours, putting the dried resin material in a high-speed mixer for low-speed mixing for 2 minutes, adding a light shielding agent, uniformly mixing at room temperature, and putting the mixture in the drying oven for drying to obtain light shielding resin with good light shielding property;
carrying out three-dimensional scanning on the manufactured curved fly-eye lens under three-dimensional coordinates to obtain a three-dimensional file;
performing in-situ diaphragm modeling on the scanned curved fly-eye lens three-dimensional model by utilizing the three-dimensional file to obtain a fly-eye diaphragm;
and printing the shading resin on the fly-eye lens by using 3D printing with the modeled fly-eye diaphragm taking the three-dimensional coordinates of the curved fly-eye lens as a reference to obtain the fly-eye diaphragm.
As an alternative, the method further includes, before performing three-dimensional scanning on the manufactured curved fly-eye lens under three-dimensional coordinates to obtain a three-dimensional file:
and spraying a developer on the curved fly-eye lens.
As an alternative, the method further comprises:
and (3) finishing the aperture of each diaphragm on the compound eye diaphragm by using femtosecond laser until the aperture of each diaphragm is consistent.
As an alternative, the printing the light shielding resin onto the curved fly-eye lens by 3D printing to obtain a fly-eye diaphragm includes:
and directly printing the manufactured shading resin on the curved fly-eye lens by adopting a micro-nano 3D printer to obtain the fly-eye diaphragm.
In a second aspect, an embodiment of the present invention provides a diaphragm array of a multi-focal-length curved-surface microlens array, which is manufactured by the method for manufacturing a diaphragm array of a multi-focal-length curved-surface microlens array.
The method for preparing the diaphragm array of the multi-focal-length curved-surface micro lens array comprises the steps of masking a silicon wafer through a positive mask plate, forming a first photoresist mask on the upper surface of the silicon wafer through a photoetching method, etching the upper surface of the silicon wafer coated with the first photoresist mask, transferring the micro lens array onto the silicon wafer, spraying photoresist on the lower surface of the silicon wafer, masking and back alignment through a negative mask plate, manufacturing a curved-surface fly-eye lens through air suction and reverse molding of a PDMS film, spraying a developer on the curved-surface fly-eye lens to strengthen reflected light rays, processing a resin material, drying matrix resin in a drying box for 4h, mixing the dried resin material in a high-speed mixer for 2min at a low speed, and adding a light shielding agent for uniform mixing at room temperature. And then placing the compound eye lens into a drying box for drying to obtain shading resin with good shading performance, carrying out three-dimensional scanning on the manufactured curved compound eye lens under three-dimensional coordinates, leading out a scanned high-precision three-dimensional file, carrying out in-situ diaphragm modeling on the scanned curved compound eye lens three-dimensional model, taking the three-dimensional coordinates of the curved compound eye lens as a reference of the modeled compound eye diaphragm, and directly printing the shading resin on the curved compound eye lens by 3D printing to obtain the compound eye diaphragm, so that most of stray light of the multi-focal-length curved compound eye lens can be eliminated, and the imaging quality is greatly improved.
Drawings
FIG. 1 is a flowchart of a method for preparing a diaphragm array of a multi-focal length curved microlens array according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a curved fly-eye lens in a method for manufacturing a diaphragm array of a multi-focal length curved microlens array according to an embodiment of the present invention;
fig. 3 is a structural cross-sectional view of a compound eye diaphragm in a diaphragm array preparation method of a multi-focal length curved surface microlens array according to an embodiment of the present invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
The terms first, second, third, fourth and the like in the description and in the claims and in the above drawings are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments described herein may be implemented in other sequences than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Referring to fig. 1, in an embodiment of the present invention, a method for preparing a diaphragm array of a multi-focal length curved microlens array is provided, including:
s101, masking a silicon wafer through a positive mask plate, and forming a first photoresist mask on the upper surface of the silicon wafer by using a photoetching method;
s102, etching the upper surface of the silicon wafer coated with the first photoresist mask, and transferring the micro lens array to the silicon wafer;
s103, spraying glue on the lower surface of the silicon wafer, and carrying out mask and back alignment by using a negative mask;
s104, performing air suction and inverse molding on the PDMS film to form a curved fly-eye lens, and combining with the illustration of FIG. 2;
s105, treating the resin material, putting the matrix resin into a drying box for drying for 4 hours, putting the dried resin material into a high-speed mixer for low-speed mixing for 2 minutes, adding a light shading agent, uniformly mixing at room temperature, and putting into the drying box for drying to obtain the light shading resin with good light shading property;
s106, carrying out three-dimensional scanning on the manufactured curved fly-eye lens under three-dimensional coordinates to obtain a three-dimensional file;
s107, performing in-situ diaphragm modeling on the scanned curved fly-eye lens three-dimensional model by utilizing the three-dimensional file to obtain a fly-eye diaphragm;
s108, printing the shading resin on the curved fly-eye lens by using the modeled fly-eye diaphragm and using the three-dimensional coordinates of the curved fly-eye lens as a reference, and combining the 3D printing with the figure 3.
In S106, before the three-dimensional scanning is performed on the manufactured curved fly-eye lens under the three-dimensional coordinates to obtain the three-dimensional file, the method further includes:
and (3) spraying a developer on the curved fly-eye lens, and performing three-dimensional scanning pretreatment, wherein the curved fly-eye lens has the characteristics of good light transmittance, low reflectivity and the like, so that the developer is sprayed on the curved fly-eye lens to enhance reflected light.
In order to facilitate the adjustment of the aperture of the fly-eye diaphragm, after the 3D printing is used for printing the shading resin on the curved fly-eye lens to obtain the fly-eye diaphragm, the aperture of each diaphragm on the fly-eye diaphragm is refined to be consistent by using the femtosecond laser.
In some embodiments, the printing the shading resin onto the curved fly-eye lens by 3D printing to obtain a fly-eye diaphragm includes:
and directly printing the manufactured shading resin on the curved fly-eye lens by adopting a micro-nano 3D printer to obtain the fly-eye diaphragm.
In the embodiment of the invention, the microlens array is designed in an annular arrangement, the caliber and the height of each level of sub-eyes are changed, and the gap between the sub-eyes is matched with a compound eye diaphragm made of shading resin.
The method for preparing the diaphragm array of the multi-focal-length curved-surface micro lens array provided by the embodiment of the invention comprises the following steps:
s201, masking the silicon wafer through a positive mask plate, and forming a first photoresist mask on the upper surface of the silicon wafer by a photoetching method. Etching the upper surface coated with the first photoresist mask transfers the microlens array to a silicon wafer having an upper surface and a lower surface.
S202, spraying glue on the lower surface of the silicon wafer, and masking and back alignment are carried out by using a negative mask.
S203, performing air suction and reverse molding on the PDMS film to obtain the curved fly-eye lens.
S204, spraying developer on the curved fly-eye lens to strengthen the reflected light.
S205, treating the resin material, putting the matrix resin into a drying box for drying for 4 hours, putting the dried resin into a high-speed mixer for low-speed mixing for 2 minutes, adding a light shading agent, mixing uniformly at room temperature, and putting into the drying box for drying to obtain the light shading resin with good light shading property.
S206, carrying out three-dimensional scanning on the manufactured curved fly-eye lens under three coordinates to derive a scanned high-precision three-dimensional file.
S207, in-situ diaphragm modeling is carried out on the scanned curved fly-eye lens three-dimensional model, and the aperture of the modeling model is slightly smaller than the actual aperture.
S208, the modeled compound eye diaphragm is used for directly printing the manufactured shading resin on the curved compound eye lens by using the micro-nano 3D printer with the three-dimensional coordinates of the curved compound eye lens as a reference.
S209, finishing the aperture of each diaphragm of the compound eye diaphragm by using femtosecond laser until the aperture of each diaphragm is consistent.
The method for preparing the diaphragm array of the multi-focal-length curved-surface micro lens array comprises the steps of masking a silicon wafer through a positive mask plate, forming a first photoresist mask on the upper surface of the silicon wafer through a photoetching method, etching the upper surface of the silicon wafer coated with the first photoresist mask, transferring the micro lens array onto the silicon wafer, spraying photoresist on the lower surface of the silicon wafer, masking and back alignment through a negative mask plate, manufacturing a curved-surface fly-eye lens through air suction and reverse molding of a PDMS film, spraying a developer on the curved-surface fly-eye lens to strengthen reflected light rays, processing a resin material, drying matrix resin in a drying box for 4h, mixing the dried resin material in a high-speed mixer for 2min at a low speed, and adding a light shielding agent for uniform mixing at room temperature. And then placing the compound eye lens into a drying box for drying to obtain shading resin with good shading performance, carrying out three-dimensional scanning on the manufactured curved compound eye lens under three-dimensional coordinates, leading out a scanned high-precision three-dimensional file, carrying out in-situ diaphragm modeling on the scanned curved compound eye lens three-dimensional model, taking the three-dimensional coordinates of the curved compound eye lens as a reference of the modeled compound eye diaphragm, and directly printing the shading resin on the curved compound eye lens by 3D printing to obtain the compound eye diaphragm, so that most of stray light of the multi-focal-length curved compound eye lens can be eliminated, and the imaging quality is greatly improved.
Correspondingly, the embodiment of the invention provides the diaphragm array of the multi-focal-length curved-surface micro lens array, which is prepared by the diaphragm array preparation method of the multi-focal-length curved-surface micro lens array, so that most of stray light of the multi-focal-length curved-surface fly-eye lens can be eliminated, and the imaging quality is greatly improved.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present disclosure may be performed in parallel, sequentially, or in a different order, so long as the desired result of the technical solution of the present disclosure is achieved, and the present disclosure is not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (5)
1. A method for preparing a diaphragm array of a multi-focal-length curved-surface micro lens array is characterized by comprising the following steps:
masking the silicon wafer through a positive mask plate, and forming a first photoresist mask on the upper surface of the silicon wafer by a photoetching method;
etching the upper surface of the silicon wafer coated with the first photoresist mask, and transferring the micro lens array to the silicon wafer;
spraying glue on the lower surface of the silicon wafer, and carrying out mask and back alignment by using a negative mask;
pumping air and reversely molding the PDMS film to form a curved fly-eye lens;
treating a resin material, drying matrix resin in a drying oven for 4 hours, putting the dried resin material in a high-speed mixer for low-speed mixing for 2 minutes, adding a light shielding agent, uniformly mixing at room temperature, and putting the mixture in the drying oven for drying to obtain light shielding resin with good light shielding property;
carrying out three-dimensional scanning on the manufactured curved fly-eye lens under three-dimensional coordinates to obtain a three-dimensional file;
performing in-situ diaphragm modeling on the scanned curved fly-eye lens three-dimensional model by utilizing the three-dimensional file to obtain a fly-eye diaphragm;
and printing the shading resin on the curved fly-eye lens by using 3D printing with the modeled fly-eye diaphragm taking the three-dimensional coordinates of the curved fly-eye lens as a reference to obtain the fly-eye diaphragm.
2. The method for preparing a diaphragm array of a multi-focal length curved surface microlens array according to claim 1, wherein before the three-dimensional scanning is performed on the manufactured curved surface fly-eye lens under three-dimensional coordinates to obtain a three-dimensional file, the method further comprises:
and spraying a developer on the curved fly-eye lens.
3. The method for preparing a diaphragm array for a multi-focal length curved microlens array according to claim 1, further comprising:
and (3) finishing the aperture of each diaphragm on the compound eye diaphragm by using femtosecond laser until the aperture of each diaphragm is consistent.
4. The method for preparing a diaphragm array for a multi-focal length curved microlens array according to claim 1, wherein the step of printing the light shielding resin onto the curved fly-eye lens by 3D printing to obtain a fly-eye diaphragm comprises:
and directly printing the manufactured shading resin on the curved fly-eye lens by adopting a micro-nano 3D printer to obtain the fly-eye diaphragm.
5. A diaphragm array of a multi-focal length curved microlens array, characterized by being produced by the diaphragm array production method of a multi-focal length curved microlens array according to any one of claims 1 to 4.
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| CN112649905A (en) * | 2020-12-28 | 2021-04-13 | 中国科学院长春光学精密机械与物理研究所 | Preparation method of fly-eye lens with free-form surface substrate |
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| JP2010271465A (en) * | 2009-05-20 | 2010-12-02 | Ricoh Co Ltd | Manufacturing method and device for microlens array with light shielding film and the microlens array with light shielding film |
| CN104834030B (en) * | 2015-04-30 | 2016-08-24 | 天津大学 | A kind of diaphragm array-processing method of bionic compound eyes imaging system |
| CN105529299B (en) * | 2015-09-14 | 2019-03-22 | 上海交通大学 | A method of plating filling silicon substrate TSV pinboard |
| CN105668509B (en) * | 2016-01-28 | 2017-08-01 | 华东医药（杭州）基因科技有限公司 | A kind of method for etching micron silicon hole |
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| CN111175861B (en) * | 2020-01-17 | 2021-06-15 | 中国科学院长春光学精密机械与物理研究所 | Design and preparation method of multi-focal-length curved fly-eye lens |
| CN112578484B (en) * | 2020-12-28 | 2021-12-07 | 中国科学院长春光学精密机械与物理研究所 | Non-uniform curved surface fly-eye lens and preparation method thereof |
| CN113126188A (en) * | 2021-04-26 | 2021-07-16 | 中国科学院长春光学精密机械与物理研究所 | Curved fly-eye lens and preparation method thereof |
| CN114325894B (en) * | 2021-12-23 | 2023-04-28 | 中国科学院上海微系统与信息技术研究所 | Preparation method of micro-lens array, system and equipment |
| CN114918415A (en) * | 2022-06-02 | 2022-08-19 | 上海天阳钢管有限公司 | Method for manufacturing metal porous layer through 3D printing |
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| CN102901997A (en) * | 2012-09-14 | 2013-01-30 | 华中科技大学 | Preparation method of curved compound eye |
| CN112649905A (en) * | 2020-12-28 | 2021-04-13 | 中国科学院长春光学精密机械与物理研究所 | Preparation method of fly-eye lens with free-form surface substrate |
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