CN115839435B

CN115839435B - Flange type quick-release valve for manufacturing 12-inch wafer semiconductor

Info

Publication number: CN115839435B
Application number: CN202310001101.XA
Authority: CN
Inventors: 季红生; 叶品华; 韩涧希
Original assignee: Haipri Changzhou Clean System Technology Co ltd
Current assignee: Haipri Changzhou Clean System Technology Co ltd
Priority date: 2023-01-03
Filing date: 2023-01-03
Publication date: 2023-05-09
Anticipated expiration: 2043-01-03
Also published as: CN115839435A

Abstract

The invention relates to a flange type quick-release valve for manufacturing a 12-inch wafer semiconductor, which comprises a body component, a piston component capable of moving left and right relative to the body component, a quartz groove connecting component used for connecting with a quartz groove, a connecting column component used for connecting the quartz groove connecting component with the body component and a shell component capable of draining liquid, wherein the shell component is arranged between the quartz groove connecting component and the body component; the piston assembly comprises a sealing jacket for directly controlling the liquid discharge on-off of the quartz groove, and the quartz groove connecting assembly comprises a gasket matched with the sealing jacket for directly controlling the liquid discharge on-off of the quartz groove; the sealing jacket is tubular, the periphery of the sealing jacket is in a shape of two sections with small left and large right, or the middle part of the periphery of the sealing jacket is provided with an annular bulge; the sealing sleeve and the gasket are coaxially arranged, and a buffer liquid channel is arranged between the inner wall of the central through hole of the gasket and the outer wall of the left section of the sealing sleeve. The quick-release valve has very fine vibration and low ion and particle precipitation.

Description

Flange type quick-release valve for manufacturing 12-inch wafer semiconductor

Technical Field

The invention relates to the field of valves, in particular to a quick-release valve for semiconductor manufacturing.

Background

At present, the fields of semiconductors and photovoltaics in China are developing at a high speed, silicon wafers are main materials for photovoltaic power generation, and semiconductor silicon materials are the most main element semiconductor materials, so that photovoltaics belongs to the general semiconductor industry. The continuous development of the semiconductor industry leads to the continuous improvement of the application of various mediums with strong acid, strong alkali, strong oxidizing property and the like. In the field of semiconductor manufacturing, in particular in chip manufacturing processes, for example etching processes for chips, which require a pretreatment: oil stain, dust, dirt and oxide film on the surface of the material are removed by oil injection; then press (film): and coating photosensitive adhesive on both sides according to the requirement. Re-exposure: transferring and imaging through ultraviolet exposure of a photomask; and (3) re-developing: solidifying the pattern after exposure to expose the corrosion part and removing the photoresist layer which is not needed by the product; and (5) drying: the photoresist is removed to clean the metal surface without adhesion, impurities and the like; re-etching: corroding metal by etching liquid, wherein the process involves parameters such as concentration, temperature, pressure, speed and the like of the solution; finally, peeling (peeling operation): puffing the residual photoresist layer after etching by adopting an acid-base neutralization method, and cleaning the redundant photoresist layer by using clear water and ultrasonic waves; almost every part in the process flow needs cleaning operation, the cleaning operation of the semiconductor needs to put a piece to be cleaned into a quartz groove or a quartz basket, and quartz is very suitable for manufacturing the semiconductor due to excellent high purity, high temperature resistance, corrosion resistance, thermal stability, light transmittance and electrical insulation property, but the quartz groove is easy to break. In order to develop the high-end 12-inch wafer cleaning equipment which is automatically researched and developed in China in a matched mode, the valve of key parts is required to have extremely low metal precipitation requirement, the cleaning equipment is used for keeping ultrahigh purity, a container groove for cleaning the wafer is made of high-purity quartz, the quartz material is similar to glass in characteristics, in the process flow, if the conventional pneumatic ball valve is adopted for installation, ions and particles are precipitated highly, the working condition requirement cannot be met, the pneumatic diaphragm valve is adopted for large impact vibration, and the container of the quartz groove is easy to break, so that the corresponding quick-release valve with independent intellectual property is urgently needed for automatically researching and developing the 12-inch wafer cleaning equipment in China in a matched mode.

Disclosure of Invention

The invention aims to solve the technical problem of providing a flange type quick-release valve for manufacturing a 12-inch wafer semiconductor, which has extremely fine switching vibration and extremely low ion and particle precipitation.

The technical scheme for realizing the aim of the invention is to provide a flange type quick-release valve for manufacturing a 12-inch wafer semiconductor, which comprises a body component, a piston component capable of moving left and right relative to the body component, a quartz groove connecting component used for connecting with a quartz groove, a connecting column component used for connecting the quartz groove connecting component with the body component and a shell component capable of draining liquid, wherein the shell component is arranged between the quartz groove connecting component and the body component;

the piston assembly comprises a sealing jacket for directly controlling the liquid discharge on-off of the quartz groove, and the quartz groove connecting assembly comprises a gasket matched with the sealing jacket for directly controlling the liquid discharge on-off of the quartz groove; the sealing jacket is tubular, the periphery of the sealing jacket is in a shape of two sections with small left and large right, or the middle part of the periphery of the sealing jacket is provided with an annular bulge; the gasket is in a flange shape provided with a central through hole, and the radius of the central through hole of the gasket is 0.7 to 1.4 mm larger than the outer radius of the left section of the sealing jacket; the sealing sleeve and the gasket are coaxially arranged, so that a gap of 0.7-1.4 mm exists between the inner wall of the central through hole of the gasket and the outer wall of the left section of the sealing sleeve, and the gap is a slow release liquid channel.

Further, the piston assembly further comprises a piston, a third O-ring and a sealing liner. The piston is in the three-section form that gradually enlarges from left to right, including connecting portion, mobile jib portion and the headstock disk portion that connects gradually from left to right, the periphery of headstock disk portion is equipped with the third O type circle groove, and the right-hand member face of headstock disk portion is equipped with annular protrusion so that its center has quotation form space.

The sealing lining is tubular with an opening to the right; the sealing jacket is tubular with an opening to the right, and the inner diameter of the sealing jacket corresponds to the outer diameter of the sealing lining;

the sealing jacket is sleeved on the periphery of the sealing lining and is detachably connected, and the piston is detachably connected with the sealing lining through the connecting part of the piston; the piston, the sealing lining and the sealing jacket are coaxial and can move in a left-right direction in a linkage way; the third O-ring is arranged in a third O-ring groove of the piston.

Further, the quartz groove connecting assembly further comprises a pressing ring and a fourth O-shaped ring. The radial inner side of the left end face of the gasket is provided with an annular fourth O-shaped ring groove, and the right end face of the gasket is in a two-stage ladder shape with radially high outside and low inside; the pressing ring is in a flange plate shape with a central through hole, and is an annular integral piece or an annular assembly piece with two semicircular symmetrical arrangement. The fourth O-ring is arranged in the fourth O-ring groove. The pressing ring and the gasket can be clamped at the liquid discharge openings at the corresponding positions of the quartz groove through the fastening piece. The sealing jacket, the pressing ring and the gasket are all made of PTFE materials.

Further, the connecting part of the piston is provided with external threads; the middle part of the periphery of the sealing lining is provided with a section of external thread part; the center of the left end face of the sealing lining is provided with a piston connecting hole which is provided with internal threads and corresponds to the connecting part of the piston. The middle part of the inner peripheral surface of the sealing jacket is provided with a section of internal thread part corresponding to the external thread part of the sealing lining; the left section and the right section of the sealing jacket are in smooth transition.

The piston is connected with the piston connecting hole of the sealing lining in a screwing way through the connecting part of the piston, the sealing jacket is sleeved on the periphery of the sealing lining and is connected with the outer thread part of the sealing lining in a screwing way through the inner thread part of the sealing jacket, and the left end face of the sealing lining is propped against the leftmost end of the inside of the sealing jacket.

Further, the body assembly includes a body, a filter joint, a piston end cap, a first O-ring, and a second O-ring. The body is in a flange shape with a neck, comprises a disk part and a neck part connected to the center of the left side of the disk part, a first joint counter bore with internal threads is arranged in the center of the disk part, and a first vent hole communicated with the inner cavity of the neck part is arranged at the first joint counter bore; the opening of the neck part is left, the opening of the left end of the neck part is in a ladder shape with the left and right small diameters, the tail end of the left hole part is provided with a first O-shaped ring groove, and the right hole part is a piston movement guide groove. The disk part is provided with a second joint counter bore above the first joint counter bore, an air channel axially extending along the wall of the neck part is arranged at the second joint counter bore, the left end of the air channel is provided with a second vent hole which is communicated with the leftmost end of the right hole part of the neck part and is obliquely arranged, and the diameters of the first vent hole and the second vent hole are all 0.7-1.4 mm.

The filter joint is a pneumatic quick joint, and the number of the filter joints is 2, and the filter joints are respectively arranged in a first joint counter bore and a second joint counter bore of the body in a screwed mode.

The piston end cover is nut-shaped, the outer diameter of the piston end cover corresponds to the left hole part of the neck part of the body, and 2 second O-shaped ring grooves which are uniformly spaced are arranged on the inner end surface of the piston end cover; the piston end cover is limited and arranged in the left hole part of the neck part of the body. The first O-shaped ring is arranged in the first O-shaped ring groove; the number of the second O-shaped rings is 2, and the second O-shaped rings are respectively arranged in the corresponding second O-shaped ring grooves.

The outer diameter of the main rod part of the piston corresponds to the inner diameter of the piston end cover, and the outer diameter of the opening and closing disc part corresponds to the inner diameter of the right hole part of the neck part of the body; the inner diameter of the sealing lining corresponds to the outer diameter of the neck of the body; the piston end cover is sleeved on the main rod part of the piston, and the second O-shaped ring is arranged between the piston end cover and the main rod part to seal; the sealing liner is positioned outside the neck of the body.

Further, the connecting column assembly comprises a connecting column. The number of the connecting columns is a, the value range of a is 5 to 10, and each connecting column is connected between the disc part of the body and the gasket through a fastener, so that the pressing ring and the gasket are sleeved at the front middle part of the periphery of the sealing sleeve; when the piston is positioned at the leftmost end, the right section with larger diameter of the sealing sleeve is blocked by the gasket, so that an annular ventilation space with the thickness of 0.7-1 mm exists between the left end face of the opening and closing disc part of the piston and the right end face of the piston end cover.

Further, the quartz groove connecting assembly further comprises a full-tooth outer hexagon screw. The edge of the disk surface of the gasket is provided with 2a connecting holes which are communicated left and right, wherein a is a second counter bore which is arranged from left to right, and a is a second straight hole which is arranged at intervals with the second through hole; the edge of the right end face of the pressing ring is provided with a internal thread blind holes corresponding to the second straight holes; the number of the full-tooth outer hexagon screws is a, and the full-tooth outer hexagon screws pass through the corresponding second through holes of the gasket and then are screwed in the corresponding inner threaded blind holes of the pressing ring.

The edge of the disk part of the body is provided with 2a connecting holes which are penetrated left and right, wherein a is a first counter bore, and a is a first straight hole which is arranged at intervals with the first through hole;

the left hole part of the neck part of the body is provided with an internal thread; the piston end cover is provided with external threads corresponding to the left hole part of the neck part of the body, and the tail part of the right end of the piston end cover is provided with a light part which corresponds to the first O-shaped ring groove and is not provided with threads; the piston end cover is screwed in the left hole part of the neck part of the body by the external thread and is blocked rightward by the right hole part of the neck part of the body;

the connecting column assembly further comprises an inner tooth and outer tooth conversion nut, a dust plug, a half-round head inner hexagonal screw and a fifth O-shaped ring; the left and right end faces of the connecting column are respectively provided with an annular fifth O-shaped ring groove, and the centers of the left and right end faces of the connecting column are respectively provided with an inner screw hole. The number of the inner and outer tooth conversion nuts, the dust plug, the semicircular head inner hexagonal screw and the fifth O-shaped ring are two times that of the connecting column. The inner and outer tooth conversion nuts are screwed into inner screw holes at two ends of the corresponding connecting column, the inner and outer tooth conversion nuts in the corresponding inner screw holes at the right end of the connecting column are screwed into corresponding first counter holes of the disk part of the body through a number of inner hexagon screws of the half-round heads, the inner and outer tooth conversion nuts in the corresponding inner screw holes at the left end of the connecting column are screwed into corresponding second counter holes of the gasket through another number of inner hexagon screws of the half-round heads, the dust plugs are buckled into all the first counter holes and the second counter holes in a tight fit mode, and a fifth O-shaped ring is arranged between the connecting column and the gasket and between the connecting column and the disk part of the body.

Further, the housing assembly includes a housing and a rotation stop pin. The shell is tubular, an arc opening is arranged at the right lower part of the shell in the axial direction, the arc opening is a liquid outlet, and a pin groove is arranged on the wall of the left end face of the shell. The outer diameter of the outer shell corresponds to the diameter of the lower part of the inner ring of the right end surface of the gasket. The shell is arranged between the lower part of the inner ring of the gasket and the disk part of the body, is covered by the connecting column and is propped against and limited by the major arc plane of the connecting column, the lower part of the inner ring of the right end surface of the gasket is provided with a rotation stopping pin groove, and the rotation stopping pin is arranged in the pin groove of the shell and the rotation stopping pin groove of the gasket. The outer shell is limited by the outer ring high part of the right end surface of the gasket in the radial direction, is limited by the gasket and the disk part of the body in the axial direction, and is limited by the rotation stopping pin in the circumferential direction.

Further, the body, the filter joint, the piston end cover, the piston, the sealing lining, the full-tooth outer hexagon screw, the connecting column, the dust plug and the rotation stopping pin are all made of PP polypropylene materials, and the shell is made of PTFE materials. The first O-shaped ring, the second O-shaped ring, the third O-shaped ring, the fourth O-shaped ring and the fifth O-shaped ring are all made of FFKM material. The inner and outer tooth conversion nut and the half round head inner hexagon screw are made of 304L stainless steel materials.

Further, when the flange type quick-release valve for manufacturing the 12-inch wafer semiconductor works, when the piston is at the leftmost end, the valve is in a closed state, the piston is blocked by the gasket, after the opening operation of the valve is implemented, the filter joint for closing is positioned below for pressure release, the filter joint for opening is positioned above for inflation, and gas enters the ventilation space through the second ventilation hole and the gas channel, so that the piston moves rightwards with the sealing inner liner and the sealing outer sleeve. When the left end of the sealing jacket moves into the gasket, liquid in the quartz groove can be slowly discharged into the shell through the slow liquid discharge channel and is discharged from the liquid discharge port of the shell; with the continuous rightward movement of the piston, the discharge speed of the liquid in the quartz tank is gradually increased from slow to fast until the left end of the sealing sleeve moves completely rightward to be separated from the gasket, and when the piston moves rightward to the rightmost end, the valve is completely opened and the liquid in the quartz tank is discharged at the highest speed. When the valve is in an open state and needs to be closed, after the valve is closed, the filter joint for opening positioned above is decompressed, the filter joint for closing positioned below is inflated, and as a disk-shaped space is formed between the annular bulge on the outer end surface of the opening and closing disk part of the piston and the body, gas enters the disk-shaped space through the first vent hole and pushes the piston to move leftwards until the right section with larger diameter of the sealing sleeve is blocked by the gasket, and the valve is closed.

The invention has the positive effects that: (1) The flange type quick-release valve for manufacturing the 12-inch wafer semiconductor solves the problem of controlling and discharging the liquid discharge valve of the quartz groove in the high-end manufacturing of the 12-inch wafer semiconductor, a gasket of the quick-release valve is in a flange plate shape with a central through hole, and the radius of the central through hole of the gasket is 0.7 to 1.4 mm larger than the outer radius of the left section of the sealing jacket; the sealing sleeve and the gasket are coaxially arranged, so that a gap of 0.7-1.4 mm exists between the inner wall of the central through hole of the gasket and the left section outer wall of the sealing sleeve, the gap is a slow liquid discharge channel, when the left end of the sealing sleeve moves into the gasket, liquid in the quartz groove can be slowly discharged into the shell through the slow liquid discharge channel and discharged from the liquid discharge port of the shell, the flow rate of liquid discharge is gradually increased from small to large, the quick discharge valve vibrates less in the liquid discharge process, and the quartz is glass and fragile due to the nature of quartz, so that the quick discharge valve is good in safety, suitable for manufacturing semiconductors, and solves the problem of autonomous manufacturing pain points in the field in China.

(2) The sealing jacket, the pressing ring, the gasket and the shell of the flange type quick-release valve for manufacturing the 12-inch wafer semiconductor are made of PTFE materials, PTFE has extremely low precipitation characteristics, but the material has lower strength, the material cannot be used as a structural member, the PP material of the sealing lining has higher strength, the sealing lining is used as a supporting piece to be matched with the sealing jacket, and the strength of the whole valve core is ensured under the condition of meeting the extremely low precipitation requirements of ions and particles, and the sealing performance and the service life are ensured.

(3) When the piston of the flange type quick-release valve for manufacturing the 12-inch wafer semiconductor is at the leftmost end, the valve is in a closed state, the piston is blocked by the gasket, after the opening operation of the valve is implemented, the lower filter joint for closing is decompressed, the upper filter joint for opening is inflated, and gas enters the ventilation space through the second ventilation hole and the gas channel, so that the piston moves rightwards with the sealing inner liner and the sealing outer sleeve. When the left end of the sealing jacket moves into the gasket, liquid in the quartz groove can be slowly discharged into the shell through the slow liquid discharge channel and is discharged from the liquid discharge port of the shell; with the continuous rightward movement of the piston, the discharge speed of the liquid in the quartz tank is gradually increased from slow to fast until the left end of the sealing sleeve moves completely rightward to be separated from the gasket, and when the piston moves rightward to the rightmost end, the valve is completely opened and the liquid in the quartz tank is discharged at the highest speed. When the valve is in an open state and needs to be closed, after the valve is closed, the filter joint for opening positioned above is decompressed, the filter joint for closing positioned below is inflated, and as a disk-shaped space is formed between the annular bulge on the outer end surface of the opening and closing disk part of the piston and the body, gas enters the disk-shaped space through the first vent hole and pushes the piston to move leftwards until the right section with larger diameter of the sealing sleeve is blocked by the gasket, and the valve is closed. The design of the second ventilation hole, the air channel, the ventilation space and the disc-shaped space is ingenious, the vibration of the inflation and deflation is small, and the stable opening and closing operation of the quick-release valve is ensured.

(4) The flange type quick-release valve for manufacturing the 12-inch wafer semiconductor adopts the design of the multi-contact-surface sealing ring of the first to fifth O-shaped rings, so that the sealing is ensured, and the effect of damping is also achieved.

Drawings

FIG. 1 is a schematic view (front view) of a flange-type quick drain valve for 12-inch wafer semiconductor manufacturing according to the present invention;

FIG. 2 is a left side view of FIG. 1;

FIG. 3 is a schematic perspective view of a flange type quick drain valve for manufacturing a 12 inch wafer semiconductor according to the present invention;

FIG. 4 is a cross-sectional view taken along the A-A plane of FIG. 2;

FIG. 5 is a schematic perspective view of a connecting column according to the present invention;

FIG. 6 is a schematic perspective view of the housing of the present invention;

FIG. 7 is a schematic view of the travel state of the flange-type quick drain valve for 12-inch wafer semiconductor manufacturing shown in FIG. 4;

fig. 8 is a schematic view of the flange type quick drain valve for 12-inch wafer semiconductor manufacturing shown in fig. 4 in an open state.

The labels in the above figures are as follows:

a body 11, a first vent hole h1, a gas passage h2, a second vent hole h3, a filter joint 12, a piston end cover 13, a first O-ring 14, a second O-ring 15,

a piston 21, a third O-ring 22, a sealing liner 23, a sealing jacket 24,

a pressing ring 31, a gasket 32, a fourth O-ring 33, a full-thread external hexagonal screw 34,

a connecting column 41, an inner and outer tooth conversion nut 42, a dust plug 43, a half-round head inner hexagonal screw 44, a fifth O-ring 45,

a housing 51, a rotation stop pin 52,

a ventilation space h4, a slow liquid discharge channel h5,

quartz groove 6.

Detailed Description

Example 1

Referring to fig. 1 to 4, the flange type quick drain valve for manufacturing a 12-inch wafer semiconductor of the present embodiment includes a body assembly, a piston assembly capable of making a left-right piston movement with respect to the body assembly, a quartz groove connection assembly for connecting with a quartz groove, a connection column assembly for connecting the quartz groove connection assembly with the body assembly, and a housing assembly capable of discharging liquid.

The body assembly includes a body 11, a filter joint 12, a piston end cap 13, a first O-ring 14 and a second O-ring 15. The body 11 is in a flange shape with a neck, comprises a disk part and a neck part connected to the center of the left side of the disk part, wherein 12 connecting holes which are communicated left and right are arranged at the edge of the disk part, 6 of the connecting holes are first counter bores, the other 6 of the connecting holes are first straight holes, the first counter bores are arranged at intervals with the first through holes, a first joint counter bore with internal threads is arranged in the center of the disk part, and a first vent hole h1 communicated with the inner cavity of the neck part is arranged at the first joint counter bore; the neck opening is left, the left end opening part of the neck opening is in a ladder shape with a large diameter and a small diameter, the left hole part is provided with an internal thread, the tail end of the left hole part is provided with a first O-shaped ring groove, and the right hole part is a piston movement guide groove. The dish portion sets up the second and connects the counter bore in the top of first joint counter bore, and second connects counter bore department setting and follows neck pipe wall axial extension's gas channel h2, sets up the second vent h3 that the slant that link up with the left end of the right hole portion of neck set up in gas channel h 2's left end, and first vent h1 and second vent h 3's diameter is 1 millimeter.

The filter joint 12 is a pneumatic quick joint, and 2 filter joints 12 are respectively arranged in the first joint counter bore and the second joint counter bore of the body 11 in a screwed mode.

The piston end cover 13 is nut-shaped, and has an outer diameter corresponding to the left hole of the neck of the body 11, an external thread corresponding to the left hole of the neck of the body 11, a light part corresponding to the first O-ring groove position and having no thread at the right end tail, and 2 second O-ring grooves uniformly spaced at the inner end surface. The piston end cap 13 is screwed into the left hole portion of the neck portion of the body 11 by its external thread and is blocked rightward by the right hole portion of the neck portion of the body 11. A first O-ring 14 is disposed in the first O-ring groove to seal between the body 11 and the piston end cap 13; the number of the second O-rings 15 is 2, and the second O-rings are respectively arranged in the corresponding second O-ring grooves.

The piston assembly comprises a piston 21, a third O-ring 22, a sealing liner 23 and a sealing jacket 24. The piston 21 is in a three-section shape which is gradually enlarged from left to right, and comprises a connecting part, a main rod part and an opening and closing disc part which are sequentially connected from left to right, wherein the connecting part is provided with external threads, the outer diameter of the main rod part corresponds to the inner diameter of the piston end cover 13, the outer diameter of the opening and closing disc part corresponds to the inner diameter of a right hole part of the neck part of the body 11, a third O-shaped ring groove is formed in the periphery of the opening and closing disc part, and an annular bulge is arranged on the outer end face (namely, the right end face) of the opening and closing disc part so that a disc-shaped space is formed in the center of the opening and closing disc part.

The sealing lining 23 is tubular with an opening rightward, the inner diameter of the sealing lining corresponds to the outer diameter of the neck of the body 11, and a section of external thread part is arranged in the middle of the periphery of the sealing lining 23; the center of the left end surface of the seal liner 23 is provided with a piston connecting hole having an internal thread and corresponding to the connecting portion of the piston 21.

The sealing jacket 24 is tubular with a rightward opening, the inner diameter of the sealing jacket corresponds to the outer diameter of the sealing liner 23, and the middle part of the inner peripheral surface of the sealing jacket is provided with a section of internal thread part corresponding to the external thread part of the sealing liner 23; the outer periphery of the seal jacket 24 has two sections with a smaller left and a larger right, and the left and right sections are in smooth transition.

The piston 21 is screwed with the piston connecting hole of the sealing liner 23 by the connecting part, the sealing jacket 24 is sleeved on the periphery of the sealing liner 23 and screwed with the external thread part of the sealing liner 23 by the internal thread part, and the left end face of the sealing liner 23 is abutted to the leftmost end inside the sealing jacket 23. The piston end cover 13 is sleeved on the main rod part of the piston 21, and the second O-shaped ring 15 is arranged between the piston end cover and the main rod part to seal; the third O-ring 22 is disposed in the third O-ring groove of the piston 21 to seal between the open-close disc portion of the piston 21 and the neck portion of the body 11; the sealing liner 23 is located outside the neck of the body 11.

The quartz groove connection assembly includes a press ring 31, a washer 32, a fourth O-ring 33, and a full-thread male hex screw 34. The gasket 32 is in a flange shape with a central through hole, the radial inner side of the left end face of the gasket is provided with an annular fourth O-shaped ring groove, and the right end face of the gasket is in a two-stage ladder shape with radially high outer side and low inner side; the edge of the disk surface of the gasket 32 is provided with 12 connecting holes which are communicated left and right, wherein 6 of the connecting holes are second counter bores which are arranged from left to right, and the other 6 connecting holes are second straight holes, and the second counter bores are arranged at intervals with the second through holes; the lower part of the inner ring of the right end face of the gasket 32 is provided with a rotation stopping pin groove. The radius of the central through hole of the gasket 32 is 1mm larger than the outer radius of the left section of the seal housing 24.

The pressing ring 31 is in a flange shape with a central through hole, the edge of the right end face of the pressing ring is provided with 6 internal thread blind holes corresponding to the second straight hole, and the pressing ring 31 can be arranged as an annular integral piece or as an annular assembly piece with two semicircular symmetrical arrangement. A fourth O-ring 33 is disposed in the fourth O-ring groove. The number of the full-tooth outer hexagon screws 34 is 6, and the full-tooth outer hexagon screws 34 pass through corresponding second through holes of the gasket 32 and then are screwed into corresponding inner thread blind holes of the pressing ring 31, so that when the full-tooth outer hexagon screws are used, the full-tooth outer hexagon screws can be clamped at liquid discharge holes at corresponding positions of the quartz groove through the pressing ring 31 and the gasket 32.

The coupling post assembly includes a coupling post 41, an inside-outside thread transition nut 42, a dust plug 43, a half-head socket head cap screw 44, and a fifth O-ring 45. The number of the connecting columns 41 is 6, as shown in fig. 5, the cross section of the connecting column 41 is preferably arc-shaped, the left end face and the right end face of the connecting column are respectively provided with an annular fifth O-shaped ring groove, and the centers of the left end face and the right end face of the connecting column are respectively provided with an inner screw hole. The number of the inside and outside thread switching nuts 42, the dust plug 43, the half head inside hexagonal screw 44 and the fifth O-ring 45 is twice that of the connecting post 41. The fifth O-rings 45 are respectively disposed in the fifth O-ring grooves at both ends of each connecting post 41, each connecting post 41 is connected between the disk portion of the body 11 and the gasket 32 by means of fasteners, so that the pressing ring 31 and the gasket 32 are sleeved in the front middle portion of the outer circumference of the sealing jacket 24, specifically, the inner and outer tooth conversion nuts 42 are screwed into the inner screw holes at both ends of the corresponding connecting post 41, then the 6 half-head inner hexagon screws 44 are screwed into the inner and outer tooth conversion nuts 42 in the corresponding inner screw holes at the right end of the connecting post 41 after passing through the corresponding first counter bores of the disk portion of the body 11, then the other 6 half-head inner hexagon screws 44 are screwed into the inner and outer tooth conversion nuts 42 in the corresponding inner screw holes at the left end of the connecting post 41 after passing through the corresponding second counter bores of the gasket 32, the fifth O-rings 45 are tightly fitted into the dust plugs 43 on all the first counter bores and the second counter bores, and the fifth O-rings 45 are sealed between the connecting post 41 and the gasket 32 and the disk portion of the body 11. Since the radius of the central through hole of the gasket 32 is 1mm larger than the outer radius of the left section of the seal housing 24, there is a gap of 1mm between the inner wall at the central through hole of the gasket 32 and the outer wall of the left section of the seal housing 24, which is the relief passage h5. When the piston 21 is located at the leftmost end, the larger diameter right section of the sealing jacket 24 is blocked by the gasket 32, so that an annular ventilation space h4 of 1mm thickness exists between the left end face of the open-close disc portion of the piston 21 and the right end face of the piston end cover 13.

The housing assembly includes a housing 51 and a rotation stop pin 52. Referring to fig. 6, the casing 51 is tubular and has an arc opening at the right lower part in the axial direction, the arc opening is a liquid outlet, and a pin slot is provided on the left end wall of the casing 51. The outer diameter of the outer case 51 corresponds to the diameter of the inner ring lower portion of the right end surface of the gasket 32. The housing 51 is disposed between the lower portion of the inner ring of the washer 32 and the disk portion of the body 11, is covered by the connecting post 41 and is restrained against by the major arc plane of the connecting post 41, and the rotation stopping pins 52 are disposed in the pin grooves of the housing 51 and the rotation stopping pin grooves of the washer 32. The housing 51 is radially restrained by the outer ring high portion of the right end surface of the washer 32, axially restrained by the washer 32 and the disk portion of the body 11, and circumferentially restrained by the rotation stopper pin 52.

The body 11, the filter joint 12, the piston end cover 13, the piston 21, the sealing liner 23, the full-tooth outer hexagon screw 34, the connecting column 41, the dust plug 43 and the rotation stopping pin 52 are all made of PP polypropylene materials, the sealing jacket 24, the pressing ring 31, the gasket 32 and the shell 51 are all made of high-purity PTFE (polytetrafluoroethylene) materials, the PTFE has extremely low precipitation characteristics, but the strength of the PTFE materials is low, the PTFE materials cannot be used as structural members, the PP material of the sealing liner 23 has high strength, and the sealing liner 23 is used as a supporting piece to be matched with the sealing jacket 24. The first O-ring 14, the second O-ring 15, the third O-ring 22, the fourth O-ring 33 and the fifth O-ring 45 are all O-rings made of FFKM material. The inner and outer tooth conversion nut 42 and the half-round head inner hexagon screw 44 are made of 304L stainless steel materials, and the connection strength is high.

In the flange-type quick-release valve for manufacturing a 12-inch wafer semiconductor of the embodiment, as the sealing outer sleeve 24 and the sealing inner sleeve 23 are connected together by adopting threads, the sealing inner sleeve 23 supports the sealing outer sleeve 24, and the sealing outer sleeve 24 and the sealing inner sleeve 23 are combined into a whole and connected with the piston 21 by threads, so that the sealing outer sleeve 24 and the sealing inner sleeve 23 move forwards and backwards along with the piston 21. When the left end of the sealing sleeve 24 moves into the gasket 32, the liquid in the quartz groove 6 can be slowly discharged into the shell 51 through the slow liquid discharge channel h5 and discharged from the liquid discharge port of the shell 51; with the continued rightward movement of the piston 21, the discharge rate of the liquid in the quartz bath 6 gradually increases from slow to fast until the left end of the seal housing 24 moves completely rightward to the release washer 32, and when the piston 21 moves rightward to the rightmost end, blocked by the body 11, the entire quick-discharge valve is completely opened, and the liquid in the quartz bath 6 is discharged at the highest rate, see fig. 8. When the quick-release valve is in an open state and needs to be closed, after the closing operation of the quick-release valve is implemented, the upper opening filter joint 12 is depressurized, the lower closing filter joint 12 is inflated, and as a disc-shaped space is formed between the annular bulge of the outer end surface of the opening and closing disc part of the piston 21 and the body 11, gas enters the disc-shaped space through the first vent hole h1 and pushes the piston 21 leftwards until the right section with the larger diameter of the sealing sleeve 24 is blocked by the gasket 32, and the whole quick-release valve is closed.

It is apparent that the above examples are merely illustrative of the present invention and are not limiting of the embodiments of the present invention. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While remaining within the scope of the invention, obvious variations or modifications are incorporated by reference herein.

Claims

1. A flange-type quick-release valve for manufacturing a 12-inch wafer semiconductor, characterized in that: the device comprises a body component, a piston component capable of moving left and right relative to the body component, a quartz groove connecting component used for being connected with a quartz groove, a connecting column component used for connecting the quartz groove connecting component with the body component, and a shell component capable of being used for draining liquid, wherein the shell component is arranged between the quartz groove connecting component and the body component;

the piston assembly comprises a piston (21), a third O-shaped ring (22), a sealing liner (23) and a sealing jacket (24) for directly performing liquid discharge on-off control on the quartz groove, wherein the piston (21) is in a three-section shape which is gradually enlarged from left to right, the piston assembly comprises a connecting part, a main rod part and an on-off disc part which are sequentially connected from left to right, the periphery of the on-off disc part is provided with the third O-shaped ring groove, and the right end face of the on-off disc part is provided with an annular bulge so that the center of the on-off disc part is provided with a disc-shaped space;

the sealing lining (23) is tubular with an opening to the right; the sealing jacket (24) is tubular with an opening to the right, and the inner diameter of the sealing jacket corresponds to the outer diameter of the sealing lining (23);

the piston (21), the sealing lining (23) and the sealing jacket (24) are coaxial and can move in a left-right linkage manner; the third O-shaped ring (22) is arranged in a third O-shaped ring groove of the piston (21);

the connecting part of the piston (21) is provided with external threads; the middle part of the periphery of the sealing lining (23) is provided with a section of external thread part; a piston connecting hole which is provided with internal threads and corresponds to the connecting part of the piston (21) is arranged in the center of the left end surface of the sealing liner (23); the middle part of the inner peripheral surface of the sealing jacket (24) is provided with an internal thread part corresponding to the external thread part of the sealing liner (23);

the piston (21) is screwed with a piston connecting hole of the sealing lining (23) through a connecting part of the piston, the sealing jacket (24) is sleeved on the periphery of the sealing lining (23) and screwed with an external thread part of the sealing lining (23) through an internal thread part of the sealing jacket, and the left end face of the sealing lining (23) is abutted to the leftmost end in the sealing jacket (24);

the quartz groove connecting assembly comprises a gasket (32) which is matched with the sealing jacket (24) to directly control the liquid discharge on-off of the quartz groove; the sealing jacket (24) is tubular, the periphery of the sealing jacket (24) is in a shape of two sections with small left and large right, and the two sections of the sealing jacket (24) are in smooth transition; the gasket (32) is in a flange plate shape with a central through hole, the radius of the central through hole of the gasket (32) is 0.7-1.4 mm larger than the outer radius of the left section of the sealing sleeve (24), and when the piston (21) is positioned at the leftmost end, the right section with the larger diameter of the sealing sleeve (24) is blocked by the gasket (32); the sealing jacket (24) is coaxially arranged with the gasket (32) so that a gap of 0.7 to 1.4 mm exists between the inner wall of the central through hole of the gasket (32) and the outer wall of the left section of the sealing jacket (24), and the gap is a slow release liquid channel (h 5).

2. The flange-type quick drain valve for 12-inch wafer semiconductor manufacturing according to claim 1, wherein:

the sealing jacket (24) is sleeved on the periphery of the sealing lining (23) and is detachably connected, and the piston (21) is detachably connected with the sealing lining (23) through the connecting part of the piston.

3. The flange-type quick drain valve for 12-inch wafer semiconductor manufacturing according to claim 2, wherein: the quartz groove connecting assembly further comprises a pressing ring (31) and a fourth O-shaped ring (33); the radial inner side of the left end surface of the gasket (32) is provided with an annular fourth O-shaped groove, and the right end surface of the gasket is in a two-stage ladder shape with radially high outside and low inside; the pressing ring (31) is in a flange plate shape with a central through hole, and the pressing ring (31) is an annular integral piece or an annular assembly piece with two semicircular symmetrical arrangement; the fourth O-shaped ring (33) is arranged in the fourth O-shaped ring groove; the pressing ring (31) and the gasket (32) can be clamped at the liquid discharge opening of the corresponding position of the quartz groove through the fastening piece; the sealing jacket (24), the pressing ring (31) and the gasket (32) are made of PTFE materials.

4. A flange-type quick drain valve for 12-inch wafer semiconductor manufacturing according to claim 3, wherein: the body assembly comprises a body (11), a filter joint (12), a piston end cover (13), a first O-shaped ring (14) and a second O-shaped ring (15); the body (11) is in a flange shape with a neck, comprises a disk part and a neck part connected to the left center of the disk part, wherein a first joint counter bore with internal threads is arranged in the center of the disk part, and a first vent hole (h 1) communicated with the inner cavity of the neck part is arranged at the first joint counter bore; the opening of the neck part is left, the opening of the left end of the neck part is in a ladder shape with the left and right diameters, the tail end of the left hole part is provided with a first O-shaped ring groove, and the right hole part is a piston movement guide groove; the disc part is provided with a second joint counter bore above the first joint counter bore, an air channel (h 2) axially extending along the wall of the neck part is arranged at the second joint counter bore, a second vent hole (h 3) which is communicated with the leftmost end of the right hole part of the neck part and is obliquely arranged is arranged at the left end of the air channel (h 2), and the diameters of the first vent hole (h 1) and the second vent hole (h 3) are all 0.7-1.4 mm;

the filter joints (12) are pneumatic quick joints, and 2 filter joints (12) are respectively screwed into a first joint counter bore and a second joint counter bore of the body (11);

the piston end cover (13) is nut-shaped, the outer diameter of the piston end cover corresponds to the left hole part of the neck part of the body (11), and 2 second O-shaped ring grooves which are uniformly spaced are arranged on the inner end surface of the piston end cover; the piston end cover (13) is limited and arranged in the left hole part of the neck part of the body (11); the first O-shaped ring (14) is arranged in the first O-shaped ring groove; 2 second O-shaped rings (15) are respectively arranged in the corresponding second O-shaped ring grooves;

the outer diameter of the main rod part of the piston (21) corresponds to the inner diameter of the piston end cover (13), and the outer diameter of the opening and closing disc part corresponds to the inner diameter of the right hole part of the neck part of the body (11); the inner diameter of the sealing lining (23) corresponds to the outer diameter of the neck of the body (11); the piston end cover (13) is sleeved on the main rod part of the piston (21), and the second O-shaped ring (15) is arranged between the piston end cover and the main rod part to seal; the sealing liner (23) is located outside the neck of the body (11).

5. The flange type quick drain valve for manufacturing a 12-inch wafer semiconductor according to claim 4, wherein: the connection post assembly comprises a connection post (41); the number of the connecting columns (41) is a, the value range of a is 5 to 10, each connecting column (41) is connected between the disc part of the body (11) and the gasket (32) through a fastener, and therefore the pressing ring (31) and the gasket (32) are sleeved at the front middle part of the periphery of the sealing jacket (24); when the piston (21) is positioned at the leftmost end, the right section of the sealing sleeve (24) with larger diameter is blocked by the gasket (32), so that an annular ventilation space (h 4) with the thickness of 0.7-1 mm exists between the left end face of the opening and closing disc part of the piston (21) and the right end face of the piston end cover (13).

6. The flange-type quick drain valve for 12-inch wafer semiconductor manufacturing according to claim 5, wherein: the quartz groove connecting assembly further comprises a full-tooth outer hexagonal screw (34); 2a connecting holes which are communicated left and right are arranged at the edge of the disc surface of the gasket (32), wherein a is a second counter bore which is arranged from left to right, and a is a second straight hole which is arranged at intervals with the second through hole; the edge of the right end surface of the pressing ring (31) is provided with a blind hole with internal threads corresponding to the second straight hole; the number of the full-tooth outer hexagon screws (34) is a, and the full-tooth outer hexagon screws (34) pass through corresponding second through holes of the gasket (32) and are screwed in corresponding inner thread blind holes of the pressing ring (31);

2a connecting holes which are penetrated left and right are arranged at the edge of the disk part of the body (11), wherein a is a first counter bore, a is a first straight hole, and the first counter bore and the first through hole are arranged at intervals;

the left hole part of the neck part of the body (11) is provided with an internal thread; the piston end cover (13) is provided with external threads corresponding to the left hole part of the neck part of the body (11), and the tail part of the right end of the piston end cover is provided with a light part which corresponds to the first O-shaped ring groove and is not provided with threads; the piston end cover (13) is screwed in the left hole part of the neck part of the body (11) by the external thread and is blocked rightward by the right hole part of the neck part of the body (11);

the connecting column assembly further comprises an inner tooth and outer tooth conversion nut (42), a dust plug (43), a half-round head inner hexagonal screw (44) and a fifth O-shaped ring (45); the left and right end surfaces of the connecting column (41) are respectively provided with an annular fifth O-shaped ring groove, and the centers of the left and right end surfaces of the connecting column are respectively provided with an inner screw hole; the number of the inner and outer tooth conversion nuts (42), the dust plug (43), the half-round head inner hexagon screws (44) and the fifth O-shaped rings (45) is twice as large as that of the connecting column (41); the inner and outer tooth conversion nuts (42) are screwed into inner screw holes at two ends of the corresponding connecting column (41), the inner and outer tooth conversion nuts (42) in the corresponding inner screw holes at the right end of the connecting column (41) are screwed into corresponding first counter bores of the disk part of the body (11) through a semicircular head inner hexagonal screws (44), the inner and outer tooth conversion nuts (42) in corresponding inner screw holes at the left end of the connecting column (41) are screwed into corresponding second counter bores of the gasket (32) through another a semicircular head inner hexagonal screws (44), the dustproof plug (43) is tightly matched and buckled on all the first counter bores and the second counter bores, and a fifth O-shaped ring (45) is arranged between the connecting column (41) and the gasket (32) and between the connecting column (41) and the disk part of the body (11).

7. The flange-type quick drain valve for 12-inch wafer semiconductor manufacturing according to claim 5, wherein: the housing assembly includes a housing (51) and an anti-rotation pin (52); the shell (51) is tubular, the right lower part of the shell is provided with an arc opening, the arc opening is a liquid outlet, and the wall of the left end face of the shell (51) is provided with a pin groove; the outer diameter of the shell (51) corresponds to the diameter of the lower part of the inner ring of the right end surface of the gasket (32); the shell (51) is arranged between the lower part of the inner ring of the gasket (32) and the disc part of the body (11), is covered by the connecting column (41) and is propped and limited by the major arc plane of the connecting column (41), the lower part of the inner ring of the right end surface of the gasket (32) is provided with a rotation stopping pin groove, and the rotation stopping pin (52) is arranged in the pin groove of the shell (51) and the rotation stopping pin groove of the gasket (32); the housing (51) is radially restrained by the outer ring high portion of the right end face of the washer (32), axially restrained by the washer (32) and the disk portion of the body (11), and circumferentially restrained by the rotation stop pin (52).

8. The flange-type quick drain valve for 12-inch wafer semiconductor manufacturing according to claim 7, wherein: the body (11), the filter joint (12), the piston end cover (13), the piston (21), the sealing lining (23), the full-tooth outer hexagonal screw (34), the connecting column (41), the dust plug (43) and the rotation stopping pin (52) are all made of PP polypropylene materials, and the shell (51) is made of PTFE materials; the first O-shaped ring (14), the second O-shaped ring (15), the third O-shaped ring (22), the fourth O-shaped ring (33) and the fifth O-shaped ring (45) are all made of FFKM O-shaped rings; the inner and outer tooth conversion nut (42) and the half-round head inner hexagon screw (44) are made of 304L stainless steel materials.

9. The flange-type quick drain valve for 12-inch wafer semiconductor manufacturing according to claim 7, wherein: when the flange type quick-release valve for manufacturing the 12-inch wafer semiconductor works, when the piston (21) is at the leftmost end, the valve is in a closed state, the piston (21) is blocked by the gasket (32), after the opening operation of the valve is implemented, the lower filter joint (12) for closing is decompressed, the upper filter joint (12) for opening is inflated, and gas enters the ventilation space (h 4) through the second ventilation hole (h 3) and the gas channel (h 2) so that the piston (21) moves rightwards with the sealing liner (23) and the sealing jacket (24); when the left end of the sealing jacket (24) moves into the gasket (32), liquid in the quartz groove (6) can be slowly discharged into the shell (51) through the slow liquid discharge channel (h 5) and is discharged from a liquid outlet of the shell (51); with the continuous rightward movement of the piston (21), the discharge speed of the liquid in the quartz groove (6) gradually increases from slow to fast until the left end of the sealing sleeve (24) completely moves rightward to be separated from the gasket (32), when the piston (21) moves rightward to the rightmost end, the valve is completely opened and the liquid in the quartz groove (6) is discharged at the highest speed; when the valve is in an open state and needs to be closed, after the closing operation of the valve is implemented, the upper opening filter joint (12) is depressurized, the lower closing filter joint (12) is inflated, and as a disc-shaped space is formed between the annular bulge of the outer end surface of the opening and closing disc part of the piston (21) and the body (11), gas enters the disc-shaped space through the first vent hole (h 1) and pushes the piston (21) leftwards until the right section with the larger diameter of the sealing sleeve (24) is blocked by the gasket (32), and the valve is closed.