CN217633923U - Quick-release valve based on semiconductor cleaning - Google Patents
Quick-release valve based on semiconductor cleaning Download PDFInfo
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- CN217633923U CN217633923U CN202221016344.8U CN202221016344U CN217633923U CN 217633923 U CN217633923 U CN 217633923U CN 202221016344 U CN202221016344 U CN 202221016344U CN 217633923 U CN217633923 U CN 217633923U
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- quick
- blow vent
- valve body
- air cavity
- vent
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
- 238000004140 cleaning Methods 0.000 title claims abstract description 15
- 230000000694 effects Effects 0.000 claims abstract description 3
- 230000007306 turnover Effects 0.000 claims abstract 2
- 238000007789 sealing Methods 0.000 claims description 6
- 230000000903 blocking effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000007788 liquid Substances 0.000 description 7
- 238000005406 washing Methods 0.000 description 6
- 230000003044 adaptive effect Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011324 bead Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
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Abstract
The utility model discloses a quick-release valve based on semiconductor cleaning, the bottom of the valve body extends to the lower end to form an air cavity, the side of the air cavity is respectively provided with a first vent and a second vent which are communicated with the outside, the top of the valve body is provided with a connector, and the middle position of the valve body is provided with a cavity structure which is communicated with the outside; the piston spare is located the air cavity indoor, and first blow vent and second blow vent are located the indoor piston spare of air cavity about both sides position respectively to the business turn over tolerance through first blow vent of control and second blow vent realizes the piston spare and moves about at the indoor upper and lower direction of air cavity, and the piston spare top stretches out the air cavity chamber and upwards is connected with the shutoff piece, and drives the shutoff piece through the piston spare and open and shut the formation of connector position. Realize the lift activity of pneumatic control piston through first blow vent and second blow vent, and then control shutoff piece to the operation of opening and shutting of connector position, the precision degree of automation of control is high.
Description
Technical Field
The utility model belongs to the technical field of valve equipment, concretely relates to arrange valve soon based on semiconductor cleaning.
Background
Semiconductors are commonly used as components and parts at present, and are applied to the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, illumination, high-power conversion and the like. Meanwhile, with the continuous superposition of technologies, the novel semiconductor material has a stable structure, excellent electrical characteristics and more applications in the industrial aspect.
The semiconductor need wash the wafer at first in the production course of working to get rid of the multiple impurity composition on wafer surface, because impurity composition is more, need wash the operation respectively through multiple washing liquid and flow, washing liquid concentration and quantity requirement to every kind of washing link are higher, traditional washing liquid is when annotating the liquid, the weeping circumstances such as the leakproofness is poor appear easily, this kind of weeping can cause the concentration of washing liquid to change, thereby influence the abluent cleanliness factor of wafer surface. There is therefore a need for a fill valve that can accurately control cleaning fluid.
SUMMERY OF THE UTILITY MODEL
To the deficiency of the prior art, the utility model aims to provide a quick-release valve based on semiconductor cleaning has solved the above-mentioned technical problem who exists among the prior art.
The purpose of the utility model can be realized by the following technical scheme:
a quick exhaust valve based on semiconductor cleaning comprises a valve body, a plugging piece and a piston piece, wherein the bottom of the valve body extends to the lower end to form an air chamber, a first air vent and a second air vent which are communicated with the outside are respectively arranged on the side of the air chamber, a connecting port is arranged at the top of the valve body, and a cavity structure which is communicated with the outside is arranged in the middle of the valve body;
the piston piece is located the air cavity indoor, just first blow vent and second blow vent are located the indoor piston piece of air cavity upper and lower both sides position respectively to the air inlet and outlet volume through controlling first blow vent and second blow vent realizes that the piston piece is connected with the shutoff piece upwards in the indoor upper and lower direction of air cavity, the piston piece top stretches out the air cavity chamber, the shutoff piece is located valve body place middle part position to drive the shutoff piece through the piston piece and form to open and shut the connector position.
Furthermore, the connector position is provided with a locking member, and the external pipeline connected with the connector is locked through the locking member.
Further, the retaining member is of an annular structure and is attached to the outer wall where the connecting port is located.
Furthermore, an annular sealing gasket is arranged on the lower edge of the connecting port where the locking piece is located.
Furthermore, the locking piece adopts the screw thread mode of screwing and is connected with the outer wall at connector place.
Furthermore, the upper end part where the plugging piece is located is in a circular truncated cone-shaped structure and is in adaptive connection with the lower end part where the connecting interface is located.
The utility model has the advantages that:
1. this device realizes the lift activity of pneumatic control piston through first blow vent and second blow vent, and then control shutoff piece to the operation that opens and shuts of connector position, and the precision degree of automation of control is high to whole valve body presents overall structure, and bearing capacity is strong, and it is fixed to need not extra support.
2. The sealing performance of the device when the position of the connecting port is connected with an external pipeline can be improved through the arrangement of the locking piece and the sealing washer at the position of the lower edge port.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below.
FIG. 1 is a schematic view of the overall structure of a quick-release valve according to an embodiment of the present invention;
fig. 2 is a general schematic view of the usage status of the embodiment of the present invention;
fig. 3 is a schematic cross-sectional structural view of the sealing state of the plugging member according to the embodiment of the present invention;
fig. 4 is a schematic cross-sectional structure view of the blocking member according to the embodiment of the present invention in an open state.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
As shown in fig. 1 and 2, the embodiment of the utility model provides a quick exhaust valve based on semiconductor cleaning, including valve body 1, shutoff piece 2, piston piece 3, the downward tip in valve body 1 place bottom stretches out and forms air chamber 11, and the side at air chamber 11 place is provided with first blow vent 101 and the second blow vent 102 with outside intercommunication respectively, and the top of valve body 1 is provided with connector 103, and the middle part position that is located valve body 1 place sets up the cavity structure for outside intercommunication for the washing liquid accessible of external pipeline flows out by this cavity.
Retaining member 12 is the annular structure and laminates in the outer wall setting at connector 103 place, through retaining member 12 to the external pipeline locking (adopting the screw thread mode of screwing and the outer wall connection at connector 103 place) of being connected with connector 103, the lower bead that is located the connector 103 at retaining member 12 place this moment is provided with annular seal ring 121, through the locking of retaining member 12, realize that annular seal ring 121 seals end position to external pipeline and carries out sealed laminating, reduce the weeping.
The piston member 3 is located in the air chamber 11, and the first vent 101 and the second vent 102 are respectively located at the upper side and the lower side of the piston member 3 in the air chamber 11 (the upper position and the lower position of the first vent 101 and the second vent 102 can be interchanged), as shown in fig. 3, when in use, the piston member 3 is located at the bottom position of the air chamber 11, air suction is realized through the first vent 101 located at the upper end portion (meanwhile, air inflation is realized through the second vent 102 located at the lower end portion), and the piston member 3 moves upwards along the air chamber 11, so as to block the plugging member 2 at the position of the connection port 103; as shown in fig. 4, the first vent 101 is adjusted to perform the inflation operation (while the second vent 102 at the lower end performs the evacuation operation), so that the piston member 3 moves downward along the air chamber 11, thereby separating the block member 2 from the connection port 103, and the cleaning liquid of the external pipe continues to flow out from the connection port 103.
The up-and-down movement of the piston piece 3 in the air chamber 11 is realized by controlling the air inlet and outlet amount of the first air vent 101 and the second air vent 102, the top of the piston piece 3 extends out of the air chamber 11 and is connected with the plugging piece 2 upwards, and the plugging piece 2 is driven by the piston piece 3 to open and close the connecting port 103.
The upper end part of the plugging piece 2 is in a circular truncated cone-shaped structure and is in adaptive connection with the lower end part of the connecting interface 103, so that the sealing performance of the plugging piece 2 when contacting with the connecting interface 103 is improved.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention.
Claims (6)
1. A quick exhaust valve based on semiconductor cleaning comprises a valve body (1), a blocking piece (2) and a piston piece (3), and is characterized in that the bottom of the valve body (1) extends out of the lower end to form an air chamber (11), a first air vent (101) and a second air vent (102) communicated with the outside are respectively arranged on the side of the air chamber (11), a connecting port (103) is arranged at the top of the valve body (1), and a cavity structure communicated with the outside is arranged in the middle of the valve body (1);
piston spare (3) are located air cavity room (11), just both sides position about piston spare (3) that first blow vent (101) and second blow vent (102) are located air cavity room (11) respectively to the business turn over tolerance through controlling first blow vent (101) and second blow vent (102) realizes the upper and lower direction activity of piston spare (3) in air cavity room (11), piston spare (3) top is stretched out air cavity room (11) and is upwards connected with shutoff piece (2), shutoff piece (2) are located valve body (1) place middle part position, and drive shutoff piece (2) through piston spare (3) and form to open and shut connector (103) position.
2. The quick-release valve based on semiconductor cleaning according to claim 1, characterized in that the connecting port (103) is provided with a locking member (12), and an external pipeline connected with the connecting port (103) is locked by the locking member (12).
3. The quick-release valve based on semiconductor cleaning according to claim 2, characterized in that the locking member (12) has a ring-shaped structure and is attached to the outer wall of the connecting port (103).
4. The quick-release valve based on semiconductor cleaning according to claim 2, characterized in that the lower edge of the connecting port (103) where the retaining member (12) is located is provided with an annular sealing gasket (121).
5. The quick-release valve based on semiconductor cleaning according to claim 2, characterized in that the retaining member (12) is screwed to the outer wall where the connection port (103) is located.
6. The quick-release valve based on semiconductor cleaning according to claim 1, wherein the upper end of the blocking piece (2) is in a truncated cone-shaped structure and is in fit connection with the lower end of the connecting port (103).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221016344.8U CN217633923U (en) | 2022-04-28 | 2022-04-28 | Quick-release valve based on semiconductor cleaning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221016344.8U CN217633923U (en) | 2022-04-28 | 2022-04-28 | Quick-release valve based on semiconductor cleaning |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217633923U true CN217633923U (en) | 2022-10-21 |
Family
ID=83651160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221016344.8U Active CN217633923U (en) | 2022-04-28 | 2022-04-28 | Quick-release valve based on semiconductor cleaning |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217633923U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115839435A (en) * | 2023-01-03 | 2023-03-24 | 海普瑞(常州)洁净系统科技有限公司 | Flange type quick discharge valve for manufacturing 12-inch wafer semiconductor |
-
2022
- 2022-04-28 CN CN202221016344.8U patent/CN217633923U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115839435A (en) * | 2023-01-03 | 2023-03-24 | 海普瑞(常州)洁净系统科技有限公司 | Flange type quick discharge valve for manufacturing 12-inch wafer semiconductor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A Quick Release Valve Based on Semiconductor Cleaning Effective date of registration: 20231012 Granted publication date: 20221021 Pledgee: Bank of Suzhou Co.,Ltd. Hushuguan Development Zone Sub branch Pledgor: SUZHOU YAXINHUA ELECTRONIC TECHNOLOGY Co.,Ltd. Registration number: Y2023980060965 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20221021 Pledgee: Bank of Suzhou Co.,Ltd. Hushuguan Development Zone Sub branch Pledgor: SUZHOU YAXINHUA ELECTRONIC TECHNOLOGY Co.,Ltd. Registration number: Y2023980060965 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right |