CN115816264A - Quick polishing device for end face of cylindrical body of fluoride crystal ingot - Google Patents
Quick polishing device for end face of cylindrical body of fluoride crystal ingot Download PDFInfo
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- CN115816264A CN115816264A CN202211637301.6A CN202211637301A CN115816264A CN 115816264 A CN115816264 A CN 115816264A CN 202211637301 A CN202211637301 A CN 202211637301A CN 115816264 A CN115816264 A CN 115816264A
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Abstract
The fluoride crystal ingot cylindrical end surface rapid polishing processing device comprises an ingot rotating and clamping mechanism, a polishing mold rotating mechanism, a swinging pressurizing mechanism and a cooling liquid circulating mechanism, wherein the ingot rotating and clamping mechanism comprises a clamping control unit, a three-jaw chuck and a camera, the clamping control unit comprises an image recognition module and an image analysis module, the image recognition module is used for carrying out image acquisition and recognition on a crystal ingot to be clamped, and the image analysis module is used for acquiring data acquired by the image recognition module, including the diameter, the height and the surface concave-convex data of the crystal ingot; the clamping control module comprises a neural network algorithm and is used for judging the rotation sequence and the rotation stop position of the three wrenches according to the clamping diameter of the crystal ingot and controlling the wrench rotating device to execute clamping and fixing of the crystal ingot according to calculated data; and the polishing die rotating mechanism, the swinging pressurizing mechanism and the cooling liquid circulating mechanism finish polishing the end face of the held crystal ingot.
Description
Technical Field
The invention relates to the technical field of optical material processing, in particular to a rapid polishing processing device for the end face of a cylindrical body of a fluoride crystal ingot.
Background
Fluoride crystals are superior in optical properties, and commonly used fluoride crystals include: caF2, mgF2, baF2, liF, srF2, pbF2, etc., and such fluoride crystals have various outstanding properties and unique applications, and are important in the field of optical materials. The fluoride crystal is generally grown in a vacuum furnace by adopting a crucible descending method, a cylindrical crucible is generally adopted, the bottom of the crucible is a cone, when the growth process of the single crystal is started, the crystal starts to grow from the tip of the cone, single crystals such as CaF2, baF2, liF, srF2, pbF2 and the like grow, the single crystal is obtained by adopting a method of spontaneous nucleation and competitive elimination, and the MgF2 single crystal grows by adopting a method of placing a seed crystal at the tip of the cone due to anisotropy and the need of a determined direction in the use process.
After the growth of the fluoride single crystal is finished, the crystal ingot taken out of the crucible is a cylinder with a cone at one end, all surfaces of the crystal ingot are rough and opaque, and at the moment, the internal quality of the crystal ingot needs to be detected at first to determine whether the grown fluoride single crystal has defects or not, so that the problem that the quality of a crystal material is found after other processing procedures are finished is avoided.
Since the surface of the grown fluoride crystal ingot is rough and opaque, it is difficult to accurately judge the presence or absence of the light band when the light band is dark and weak.
Therefore, the problems of the prior art are to be further improved and developed.
Disclosure of Invention
The object of the invention is: in order to solve the problems in the prior art, the invention aims to provide a fluoride crystal ingot cylinder end face rapid polishing device which is used for processing a crystal ingot cylinder end face and mainly used for meeting the detection and polishing requirements of a fluoride crystal ingot.
The technical scheme is as follows: in order to solve the technical problem, the technical scheme provides a rapid polishing device for the end face of a cylindrical body of a fluoride crystal ingot, which comprises an ingot rotary clamping mechanism, a polishing die rotating mechanism, a swinging pressurizing mechanism and a cooling liquid circulating mechanism, wherein,
the ingot rotating and clamping mechanism comprises a clamping control unit, a three-jaw chuck and a camera; the three-jaw chuck comprises a jaw and a jaw locking mechanism, wherein three bevel pinions of the jaw locking mechanism are respectively provided with a wrench, the wrench is connected with a wrench rotating device, and the wrench rotating device is connected with a clamping control unit;
the clamping control unit comprises an image recognition module and an image analysis module, the image recognition module is used for carrying out image acquisition and recognition on a crystal ingot to be clamped, the image analysis module is used for acquiring data acquired by the image recognition module and analyzing three-dimensional data of the crystal ingot, and the three-dimensional data comprises the diameter, the height and surface concave-convex data of the crystal ingot;
the clamping control unit also comprises a clamping control module, wherein the clamping control module comprises a neural network algorithm and is used for judging the rotation sequence and the rotation stop position of the three wrenches according to the clamping diameter of the crystal ingot and controlling the wrench rotating device to execute clamping and fixing of the crystal ingot according to calculated data;
and the polishing die rotating mechanism, the swinging pressurizing mechanism and the cooling liquid circulating mechanism finish polishing the end face of the held crystal ingot.
The rapid polishing device for the end face of the fluoride crystal ingot cylinder is characterized in that the image recognition module collects three-dimensional data to reconstruct the three-dimensional data of the crystal ingot, and calculates to obtain a three-dimensional image of the crystal ingot.
The rapid polishing device for the end face of the fluoride crystal ingot cylinder is characterized in that the three-jaw chuck comprises a pressure sensor, the pressure sensor comprises a pressure sensitive element and a pressure signal processing module, and the pressure sensitive element is embedded at the tail end of the clamping jaw.
The rapid polishing device for the end face of the cylindrical body of the fluoride crystal ingot is characterized in that the surface layer of the pressure sensitive element is provided with a wear-resistant coating, and the surface of the pressure sensitive element is parallel to the surface of the three-jaw chuck.
The fluoride crystal ingot cylinder end face rapid polishing device is characterized in that a neural network algorithm of the clamping control module is trained for sample data, and input data comprise the clamping diameter of a crystal ingot, the clamping pressure of a corresponding three-jaw chuck during clamping and the clamping position of a clamping jaw.
The fluoride crystal ingot cylinder end face rapid polishing device is characterized in that a first neural network algorithm of the neural network algorithm is used for training the corresponding relation between the input clamping diameter and the pressure, and the corresponding relation algorithm of the clamping diameter of the crystal ingot is obtained according to the input clamping diameter and the corresponding pressure.
The fluoride crystal ingot cylinder end face rapid polishing device is characterized in that a second neural network algorithm of the neural network algorithms is connected with a first neural network algorithm, jaw rotation calculation is carried out according to the execution clamping diameter and the precision of three bevel pinions corresponding to three jaws, and the rotation sequence and the rotation stop positions of the three jaws are obtained.
Fluoride crystal ingot cylinder terminal surface polish processingequipment fast, wherein, polishing mould slewing mechanism includes: the polishing device comprises a speed regulating motor, a thimble, a shifting pin and a polishing die; the speed regulating motor is fixed on the swing arm, a main shaft of the speed regulating motor is directly connected with the thimble, and the thimble provides pressure vertical to the polishing surface; the shifting pin is arranged in a groove above the polishing die, and the speed regulating motor drives the polishing die to rotate through the shifting pin.
The fluoride crystal ingot cylinder end surface rapid polishing device is characterized in that the swinging pressurizing mechanism comprises an eccentric wheel, a cylinder, a swing arm shaft, a positioning bolt and a swing arm; the eccentric wheel rotates to drive the swing arm to swing, the contact position of the swing arm and the eccentric wheel is adjusted along the radius direction of the eccentric wheel, the swing amplitude is increased when the contact position of the swing arm and the eccentric wheel is far away from the circle center, and the length of the swing arm is adjusted through a positioning bolt.
(III) the beneficial effects are as follows: according to the fluoride crystal ingot cylinder end face rapid polishing processing device provided by the invention, the image recognition and three-dimensional image reconstruction of the crystal ingot are realized through the improvement of the crystal ingot rotating and clamping mechanism, the convex and concave surfaces of the crystal on the outer wall of the crystal ingot cylinder in the growth process are fully considered, the automatic clamping of the crystal ingot by the three-jaw chuck is realized, the efficiency of rapid polishing of the fluoride crystal ingot cylinder end face is improved, and the clamping firmness is further improved.
Drawings
FIG. 1 is a schematic view of a rapid polishing apparatus for the end face of a cylindrical body of a fluoride crystal ingot according to an embodiment of the present invention;
FIG. 2 is a block diagram of a polishing mold in an embodiment of the present invention;
FIG. 3 is a longitudinal cross-sectional view of a three-jaw chuck according to an embodiment of the present invention;
FIG. 4 is a schematic view of a pressure sensitive element embedded in the surface of a crystal ingot fixed by the clamping jaws of the three-jaw chuck in the embodiment of the invention;
FIG. 5 is a schematic structural diagram of a holding control unit according to an embodiment of the present invention;
1-swinging arm; 2-positioning the bolt; 3-speed regulating motor; 4-a thimble; 5-pulling a pin; 6-polishing the die; 7-a crystal ingot; 8-a three-jaw chuck; 9-hollow rotating platform; 10-a waterproof cover; 11-outer waterproof baffle; 12-inner waterproof barrier; 13-a platform; 14-a scaffold; 15-polishing liquid box; 16-a water return pipe; 17-a water pump; 18-a water supply pipe; 19-a nozzle; 20-a cylinder; 21-a swing arm shaft; 22-eccentric wheel; 601-a metal base; 602-a resilient pad; 603-polishing flannelette; 801-chuck jaws; 802-a cartridge shell; 803-jaw locking mechanism.
Detailed Description
The present invention will be described in further detail with reference to preferred embodiments, and more details are set forth in the following description in order to provide a thorough understanding of the present invention, but it is apparent that the present invention can be embodied in many other forms different from the description herein and can be similarly generalized and deduced by those skilled in the art based on the practical application without departing from the spirit of the present invention, and therefore, the scope of the present invention should not be limited by the contents of this detailed embodiment.
The drawings are schematic representations of embodiments of the invention, and it is noted that the drawings are made by way of example only and are not drawn to scale and should not be construed as limiting the actual scope of the invention.
The invention provides a rapid polishing processing device for the end surface of a cylindrical body of a fluoride crystal ingot, which comprises an ingot rotary clamping mechanism, a polishing die rotating mechanism, a swinging pressurizing mechanism, a cooling liquid circulating mechanism and a rack, and is shown in figure 1. The crystal ingot rotating and clamping mechanism is provided with a clamping control unit, and the clamping control unit is used for automatically clamping a crystal ingot and comprises the identification of the diameter of the crystal ingot and the automatic control of the clamping position of the three-jaw chuck.
The ingot rotating and clamping mechanism comprises a clamping control unit, a three-jaw chuck and a camera; the three-jaw chuck comprises a jaw and a jaw locking mechanism, wherein the jaw locking mechanism is formed by respectively configuring a spanner for three bevel pinions, the spanner is connected with a spanner rotating device, and the spanner rotating device is connected with a clamping control unit; the clamping control unit comprises an image recognition module and an image analysis module, as shown in fig. 5, the image recognition module is used for carrying out image acquisition and recognition on a crystal ingot to be clamped, the image analysis module is used for acquiring data acquired by the image recognition module and analyzing three-dimensional data of the crystal ingot, and the three-dimensional data comprises the diameter, the height and surface concave-convex data of the crystal ingot; the clamping control unit also comprises a clamping control module, wherein the clamping control module comprises a neural network algorithm and is used for judging the rotation sequence and the rotation stop position of the three wrenches according to the diameter of the crystal ingot clamping part and controlling the wrench rotating device to carry out clamping and fixing of the crystal ingot according to calculated data; and the polishing die rotating mechanism, the swinging pressurizing mechanism and the cooling liquid circulating mechanism finish polishing the end face of the held crystal ingot.
The rack comprises a platform 13 and a support 14, the platform 13 is horizontally arranged, as shown in fig. 1, the support 14 is fixed on one side of the platform 13, which is close to a plane where the fluoride crystal ingot cylinder end face rapid polishing processing device is placed, and is fixed with the platform 13, and the support 14 supports the whole platform 13 and an electric control part.
The ingot rotation holding mechanism includes: a three-jaw chuck 8 and a hollow rotary platform 9, wherein the three-jaw chuck 8 is a three-jaw self-centering chuck and is used for clamping a crystal ingot. The model of the three-jaw chuck 8 can be 250 models, and crystal ingots with the diameter of phi 20-phi 80mm can be clamped. The hollow rotary platform 9 is arranged on the side of the platform 13 away from the support 14, and the platform 13 carries the hollow rotary platform 9.
The three-jaw chuck 8 is at least composed of jaws 801, a chuck shell 802 and a jaw locking mechanism 803, as shown in fig. 3, wherein the jaw locking mechanism 803 is used for realizing the movement and fixation of the jaws through driving a large bevel gear by a small bevel gear.
The jaw locking mechanism of the three-jaw chuck 8 is characterized in that three bevel pinions are respectively provided with a spanner, and the three bevel pinions comprise a first spanner, a second spanner and a third spanner, wherein the first spanner, the second spanner and the third spanner are respectively connected with a spanner rotating device, the spanner rotating device is connected with a spanner rotating module of a clamping control unit, and the spanner rotating module controls the corresponding bevel pinions to rotate.
The crystal ingot rotating and clamping mechanism can be provided with a camera, preferably, the camera is arranged on the three-jaw chuck or the rack without limitation, and the clamping control unit comprises an image recognition module which is used for carrying out image acquisition and recognition on a crystal ingot to be clamped. The holding control unit further comprises an image analysis module used for obtaining data collected by the image recognition module and analyzing three-dimensional data of the crystal ingot, wherein the three-dimensional data comprises the diameter, the height, the surface concave-convex data and the like of the columnar body, the three-dimensional data is used for reconstructing the three-dimensional data of the crystal ingot through the three-dimensional data, and the three-dimensional image of the crystal ingot is obtained through calculation.
The three-jaw chuck comprises jaws, a jaw locking mechanism and a pressure sensor, wherein the pressure sensor comprises a pressure sensitive element and a pressure signal processing module, the tail ends of the jaws are embedded with the pressure sensitive element, as shown in fig. 4, the surface layer of the pressure sensitive element is provided with a wear-resistant coating, the surface of the pressure sensitive element is parallel to the surface of the three-jaw chuck, and the wear-resistant coating can be worn synchronously along with the abrasion of the jaws within a certain thickness.
The ingot rotating and clamping mechanism further comprises a clamping control unit, the pressure signal processing module is connected with the clamping control unit, and the clamping control unit further comprises a clamping control module. The clamping control module comprises a neural network algorithm and is used for judging the rotation sequence and the rotation stop position of the three wrenches and the clamping position of the clamping jaw in the three-jaw chuck.
One end of the crystal ingot is clamped, the cylindrical outer wall of the crystal ingot has a convex-concave surface due to crystal growth, the convex-concave surface is within 2mm, and uncertainty exists, so that the clamping position of each crystal ingot in a three-jaw chuck is different.
According to the invention, three-dimensional data of the crystal ingot and convex-concave data of the surface of the crystal ingot can be obtained through image recognition, so that automatic clamping of the three-jaw chuck is realized. The invention needs to train sample data for a neural network algorithm of a clamping control module, and input data comprises clamping pressure when a three-jaw chuck corresponding to the clamping diameter (a clamping part generally located at one end of a crystal ingot) of the crystal ingot is clamped and clamping positions of clamping jaws. The neural network algorithm includes a convolutional neural network, a deep neural network, or a combination thereof, which is not limited herein. And the first neural network algorithm of the neural network algorithms is used for calculating the training of the corresponding relation between the input clamping diameter and the pressure, and obtaining the corresponding relation algorithm of the crystal ingot execution clamping diameter according to the input clamping diameter and the corresponding pressure. When the crystal ingot is CaF2, baF2, liF, srF2 or PbF2, the first neural network algorithm is different, and adjustment can be performed according to the corresponding relation between training input holding diameter calculation and corresponding pressure. The first neural network algorithm also obtains an execution clamping diameter for the input clamping diameter to obtain a more stable clamping effect.
And a second neural network algorithm of the neural network algorithms is connected with the first neural network algorithm, and jaw rotation calculation is carried out according to the execution clamping diameter and the precision of three bevel pinions corresponding to the three jaws to obtain the rotation sequence and the rotation number of the three jaws, namely the rotation stop positions of the three jaws, so that the high-precision execution clamping diameter is obtained.
The ingot rotating and clamping mechanism can automatically clamp any crystal ingot without manually screwing a spanner, and specifically comprises the following steps:
101, the holding control unit performs image acquisition and identification on a crystal ingot to be held through an image identification module; and acquiring three-dimensional data of the crystal ingot through an image analysis module, wherein the three-dimensional data comprises the diameter and the height of the columnar body and the concave-convex data of the surface, and calculating to obtain a three-dimensional image of the crystal ingot.
102, putting a crystal ingot into a three-jaw chuck, and acquiring the position of the crystal ingot after the crystal ingot is put into the three-jaw chuck, wherein the image recognition module can acquire the placement position of the whole crystal ingot in the three-jaw chuck by monitoring the position of a specific area on the surface of the crystal ingot; the image analysis module obtains a three-dimensional image of the crystal ingot and images of the outer wall of the cylinder corresponding to the three clamping jaws, so that three diameter data corresponding to the three clamping jaws for clamping the crystal ingot are obtained, and the largest numerical value in the three diameter data is used as an input clamping diameter. The invention fully considers the influence of the unevenness of the outer wall of the cylinder caused by the convex and concave crystals on the outer wall of the cylinder of the crystal ingot on the automatic clamping, so as to improve the firmness of the automatic clamping.
103, sending the input clamping diameter to a neural network algorithm of the clamping control module, wherein the first neural network algorithm calculates an execution clamping diameter corresponding to the input clamping diameter, and the second neural network algorithm calculates a rotation sequence and a rotation number of three clamping jaws corresponding to the execution clamping diameter.
And 104, controlling the wrenches corresponding to the three clamping jaws to automatically clamp and fix according to the rotation sequence and the rotation number of the three clamping jaws corresponding to the clamping diameter.
The three-jaw chuck 8 is fixedly arranged on the hollow rotating platform 9, the hollow rotating platform 9 is fixedly arranged on a platform 13 of the frame, the crystal ingot 7 to be processed with two ends cut off and end faces of two ends finely ground is clamped in the three-jaw chuck 8, the hollow rotating platform 9 drives the crystal ingot 7 to rotate along the axis of the crystal ingot, and the rotating speed is preferably 20-100 revolutions per minute. The hollow rotary platform 9 has a central through hole of preferably 90mm diameter and is itself equipped with a 750W servo motor.
Because the crystal ingot 7 to be processed after cutting off two ends and finely grinding end faces of the two ends has a certain length, the three-jaw chuck 8 and the hollow rotary platform 9 are used, the crystal ingot 7 can extend into the hollow rotary platform 9 through a central hole of the large-aperture three-jaw chuck 8, so that the height of a polishing working surface is reduced, and the swing of the polishing surface is reduced. The three-jaw chuck 8 is adopted to clamp the cylindrical crystal ingot 7, a commercial large-aperture three-jaw self-centering chuck of a corresponding model can be selected according to the diameter range of the processed crystal ingot, the three-jaw chuck of the selected model can be suitable for the cylinder diameter of the crystal ingot in a certain range, a clamp does not need to be specially customized for each cylinder diameter, and the grown crystal ingot can be used for processing the end face even if the cylindrical surface of the cylinder is not particularly regular.
Taking the example of processing a CaF2 single crystal rod with phi 60 as an example, the total length of a crystal ingot is 280mm, and an inner circle cutting machine or a wire cutting machine is adopted to cut two ends of the crystal: the bottom cone and the top irregular part are generally based on the principle of Bridgman method crystal growth, the impurity content of the head part and the tail part is the highest, the parts are generally not used as finished crystals, crystal ingots at two ends are cut off to form a cylinder, and the cylinder crystal ingots are further cut into specification blanks according to the required size after being preliminarily detected to be qualified. The diameter of the cutting line of the wire cutting machine is 0.42mm, and the length of the crystal ingot cylinder cut off two ends is 240mm.
Single crystal materials such as CaF2, mgF2, baF2, liF, srF2, pbF2, etc. are soft crystal materials, and are precisely ground on a flat grinder using W10 or W7 green emery to remove cutting scratches of a cutting saw blade. Grinding each end face for 3-5 minutes, cleaning the ground crystal ingot, clamping the crystal ingot 7 to be processed with the end faces finely ground in a three-jaw chuck 8 in the vertical direction, driving the crystal ingot 7 to rotate along the axis of the crystal ingot by a hollow rotating platform 9, wherein the rotating speed is adjustable, the adjusting range of the rotating speed is 20-100 revolutions per minute, and the adjusting range of the rotating speed is 30 revolutions per minute.
Polishing mould slewing mechanism includes: the polishing machine comprises a speed regulating motor 3, a thimble 4, a shifting pin 5 and a polishing die 6; the speed regulating motor 3 is fixed on the swing arm 1, a main shaft of the speed regulating motor 3 is directly connected with the ejector pin 4, and the ejector pin 4 only provides pressure perpendicular to the polishing surface and does not generate force in other directions. The tip of the thimble 4 is made of hard alloy produced by Tanzhou hard alloy factories so as to reduce the abrasion of the tip of the thimble under pressure. The shifting pin 5 is arranged in a groove above the polishing die 6, the speed regulating motor 3 drives the polishing die 6 to rotate through the shifting pin 5, and the rotating speed of the polishing die 6 is 100-300 revolutions per minute, specifically 120 revolutions per minute.
The polishing mold 6 is a high-elasticity polishing mold, and is composed of a metal seat 601, an elastic pad 602 and polishing flannelette 603, as shown in fig. 2, the metal seat 601 is made of bronze, the elastic pad 602 is made of PU polyurethane, such as a polyurethane elastic pad, the thickness of the elastic pad 602 is 10mm, and the high-elasticity design of the polishing mold is beneficial to the overall contact between the polishing mold and the polishing surface. The polishing fleece 603 is a commercial polishing fleece: the back of the polishing surface is provided with a back adhesive, the polishing surface is made of flannelette with grid grooves, the grooves are beneficial to enabling polishing liquid to enter a polishing interface, the diameter of the polishing die 6 is 60-80% of the diameter of the end face of the processed crystal ingot 7, and the polishing diameter of the CaF2 single crystal rod polishing die 6 with the diameter of phi 60 is 38mm.
The swing pressurization mechanism comprises an eccentric wheel 22, a cylinder 20, a swing arm shaft 21, a positioning bolt 2 and a swing arm 1. The eccentric wheel 22 rotates to drive the swing arm 1 to swing, the contact position of the swing arm 1 and the eccentric wheel 22 can be adjusted along the radius direction of the eccentric wheel 22, the swing amplitude is increased when the contact position of the swing arm 1 and the eccentric wheel 22 is far away from the circle center, the length of the swing arm 1 can be adjusted through the positioning bolt 2, and the length of the swing arm is adjusted according to the principle that when the swing amplitude of the swing arm 1 is minimum, the thimble 4 is aligned to a half of the radius of the cylindrical end face of the crystal ingot 7. The amplitude of oscillation is adjustable according to the following steps: when the swing is maximized, the center point of polishing mold 6 should fall within the cylindrical polishing surface of crystal ingot 7. The swing speed is adjustable, 10-50 times/min. The swing speed was adjusted to 12 times/min in the CaF2 single crystal rod example of Φ 60. The air cylinder 20 provides pressure to the thimble 4 through the swing arm shaft 21, so that the polishing die 6 is pressed on the end face of the crystal ingot 7. The cylinder 20 selects pressure according to the size of the end face, the pressure intensity is in direct proportion to the polishing removal rate, the pressure intensity applied to the end face of the crystal ingot 7 can be adjusted, and the adjustment range of the pressure intensity is 0.1-0.5Kg/cm 2 . When processingThe selective pressure of the CaF2 single crystal rod with the diameter of 60 is 0.3Kg/cm 2 . The swing arm shaft 21 is fixed to the side of the platform 13 on which the hollow rotary platform 9 is provided, and the platform 13 carries the swing arm shaft 21 as far as the position of the platform 13 near the edge.
Swing loading system and polishing mould slewing mechanism simultaneous working, 7 terminal surfaces of crystal spindle self rotations, polishing mould 6 self rotation swing simultaneously, and 7 terminal surfaces of crystal spindle and polishing mould 6 relative motion under certain pressure can get rid of 7 terminal surfaces of crystal spindle surface layer materials fast, reach the purpose of quick polishing. The distribution of the polishing removal amount on the end face of the crystal ingot can be controlled by adjusting the swing amplitude of the swing arm 1, the rotation speed of the polishing die 6, the pressure applied to the polishing die 6 and the length of the swing arm 1, namely, the removal rate of the middle of the end face or the removal rate of the edge of the end face is controlled to be high, the obtained surface shape of the polished end face can be expected to be slightly concave or slightly convex by adjusting the parameters, the unevenness is in the micron order, the influence on the polishing effect for detection is very small, the key point is that the effect of uniformly removing the surface layer material is obtained by adjusting the parameters, namely, the material removal rate of each point on the polished end face is equal, and thus, the polishing work of the end face of the crystal ingot 7 can be completed in the shortest time.
The cooling liquid circulating mechanism comprises a polishing liquid tank 15, a water pump 17, a water feeding pipe 18, a water return pipe 16, a nozzle 19, an outer waterproof baffle 11, an inner waterproof baffle 12 and a waterproof cover 10. The polishing liquid tank 15 is filled with polishing liquid, and the polishing liquid is mixed liquid of water and cerium oxide polishing powder. The particle size of the cerium oxide polishing powder is 1-3 mu m, 20-100g of cerium oxide polishing powder is generally added into 1 kilogram of water, the particle size of the cerium oxide polishing powder is 1 mu m when a CaF2 single crystal rod with the diameter of 60 is processed, 10Kg of water can be filled in a polishing solution box 15, 300g of cerium oxide polishing powder is simultaneously added, and the cerium oxide polishing powder is suspended in the water under the stirring action of a water pump to form the polishing solution. The polishing liquid in the polishing liquid tank 15 is delivered to the polishing interface by the water pump 17 through the water supply pipe 18 and the nozzle 19, so that the polishing medium is supplied to the polishing interface. Meanwhile, the polishing interface is cooled to prevent the crystal ingot from cracking due to the high-speed rotation friction heat of the polishing die 6, and the polishing liquid flowing through the interface returns to the polishing liquid tank 15 through the water return pipe 16. The nozzle 19 is a universal joint nozzle, and the direction of the universal joint nozzle can be adjusted, so that the polishing solution can be accurately delivered to a polishing interface. The outer waterproof baffle 11, the inner waterproof baffle 12 and the waterproof cover 10 prevent the polishing liquid from contacting the hollow rotary platform and the electrical control part.
When the fluoride crystal ingot cylinder end face rapid polishing processing device is used for processing a calcium fluoride crystal ingot with the diameter of 60mm, the rapid polishing needs 8 minutes for finishing single-face processing, the surface shape of the end face can be controlled within 10 light rings through adjusting various processing parameters, the surface roughness of the end face can reach 80-50S/D, and the requirement of detection polishing can be completely met. A green semiconductor laser with the wavelength of 532nm and the power of 180mW is adopted, a layer of kerosene is coated on the cylindrical surface of a crystal ingot, laser beams penetrate through the surface of the cylinder and penetrate through the cylindrical crystal ingot, any fine scattering particles can be observed very clearly, and the device is particularly effective for finding independent scattering particles.
The rapid polishing device for the end face of the cylindrical body of the fluoride crystal ingot can also be used for processing the end face of other crystal ingots, such as detecting and polishing the end face of crystal ingots of BGO, LN and the like.
The one side that platform 13 kept away from the support sets up outer waterproof baffle 11, sets up inlayer waterproof baffle 12 in outer waterproof baffle 11, and the one end of keeping away from platform 13 in outer waterproof baffle 11 sets up buckler 10. Set up cavity rotary platform 9 in the waterproof baffle of inlayer 12, the one end that platform 13 was kept away from to cavity rotary platform 9 sets up three-jaw chuck 8, and the vertical placing of crystal ingot 7 is in three-jaw chuck 8 centers to pass waterproof cover 10, outer waterproof baffle 11, the waterproof baffle of inlayer 12 and platform 13 in proper order.
Place polishing solution case 15 on platform one side fluoride crystal ingot cylinder terminal surface rapid polishing processingequipment's the face of placing, polishing solution case 15 keeps away from the one end of placing the face and sets gradually wet return 16, upper hose 18 and water pump 17, and wet return 16, upper hose 18 and water pump 17 communicate in polishing solution case 15 respectively. One end of the upper water pipe 18 far away from the polishing solution box 15 is fixed on the swing arm shaft 21 and is connected with a nozzle 19, and the water outlet of the nozzle 19 faces the position where the end face of the crystal ingot 7 is contacted with the polishing die 7.
The swing arm 1 is arranged on the swing arm shaft 21 which is positioned at one end of the swing arm shaft 21 far away from the platform 13, namely, above the fixed water feeding pipe 18, and the swing arm 1 is vertical to the swing arm shaft 21. One end of the swing arm 1 is arranged vertically above the crystal ingot 7, and the other end extends out of the platform 13. A speed regulating motor 3 is fixed at one end of the swing arm 1, which is vertically above a crystal ingot 7, the speed regulating motor 3 is connected with a thimble 4, one end of the thimble 4, which is far away from the speed regulating motor 3, is connected with a polishing die 6 through a pulling pin 5, and one surface of the polishing die 6, which is far away from the thimble 4, is in contact with the end surface of the crystal ingot 7. An air cylinder 20 is arranged vertically below the other end of the swing arm 1, and an eccentric wheel 22 is arranged on the swing arm 1 above the air cylinder 20.
According to the fluoride crystal ingot cylinder end face rapid polishing processing device provided by the invention, the image recognition and the three-dimensional image reconstruction of the crystal ingot are realized through the improvement of the ingot rotating and clamping mechanism, the convex and concave surfaces of the crystal on the outer wall of the crystal ingot cylinder in the growth process are fully considered, the automatic clamping of the crystal ingot by the three-jaw chuck is realized, the efficiency of the fluoride crystal ingot cylinder end face during rapid polishing is improved, and the clamping firmness is further improved.
The above description is provided for the purpose of illustrating the preferred embodiments of the present invention and will assist those skilled in the art in more fully understanding the technical solutions of the present invention. However, these examples are merely illustrative, and the embodiments of the present invention are not to be considered as being limited to the description of these examples. It will be apparent to those skilled in the art that numerous, simple, and obvious alterations and modifications can be made without departing from the inventive concepts herein.
Claims (9)
1. A rapid polishing device for the end face of a cylindrical body of a fluoride crystal ingot comprises a crystal ingot rotating and clamping mechanism, a polishing die rotating mechanism, a swinging pressurizing mechanism and a cooling liquid circulating mechanism, and is characterized in that,
the ingot rotating and clamping mechanism comprises a clamping control unit, a three-jaw chuck and a camera; the three-jaw chuck comprises a jaw and a jaw locking mechanism, wherein three bevel pinions of the jaw locking mechanism are respectively provided with a wrench, the wrench is connected with a wrench rotating device, and the wrench rotating device is connected with a clamping control unit;
the clamping control unit comprises an image recognition module and an image analysis module, the image recognition module is used for carrying out image acquisition and recognition on a crystal ingot to be clamped, the image analysis module is used for acquiring data acquired by the image recognition module and analyzing three-dimensional data of the crystal ingot, and the three-dimensional data comprises the diameter, the height and surface concave-convex data of the crystal ingot;
the clamping control unit also comprises a clamping control module, wherein the clamping control module comprises a neural network algorithm and is used for judging the rotation sequence and the rotation stop position of the three wrenches according to the clamping diameter of the crystal ingot and controlling the wrench rotating device to execute clamping and fixing of the crystal ingot according to calculated data;
and the polishing die rotating mechanism, the swinging pressurizing mechanism and the cooling liquid circulating mechanism finish polishing the end face of the held crystal ingot.
2. The fluoride crystal ingot cylinder end-face rapid polishing processing device according to claim 1, wherein the image recognition module collects three-dimensional data to reconstruct the three-dimensional data of the crystal ingot, and calculates to obtain a three-dimensional image of the crystal ingot.
3. The fluoride crystal ingot cylinder end-face rapid polishing processing device of claim 1, wherein the three-jaw chuck comprises a pressure sensor, the pressure sensor comprises a pressure sensitive element and a pressure signal processing module, and the pressure sensitive element is embedded at the tail end of the jaw.
4. The fluoride crystal ingot cylinder end-face rapid polishing processing device of claim 3, wherein the surface layer of the pressure sensitive element is provided with a wear-resistant coating, and the surface of the pressure sensitive element is parallel to the surface of the three-jaw chuck.
5. The fluoride crystal ingot cylinder end-face rapid polishing processing device of claim 4, wherein the neural network algorithm of the clamping control module is trained for sample data, and the input data comprises the clamping diameter of the crystal ingot, the clamping pressure of the corresponding three-jaw chuck during clamping, and the clamping position of the clamping jaws.
6. The fluoride crystal ingot cylinder end-face rapid polishing processing apparatus of claim 5, wherein a first neural network algorithm of the neural network algorithms is used for training of calculating a corresponding relationship between an input clamping diameter and pressure, and the corresponding relationship algorithm of the clamping diameter is executed on the crystal ingot obtained according to the input clamping diameter and the corresponding pressure.
7. The fluoride crystal ingot cylinder end face rapid polishing processing device according to claim 6, wherein a second neural network algorithm of the neural network algorithms is connected with a first neural network algorithm, and jaw rotation calculation is performed according to the execution clamping diameter and the precision of three bevel pinions corresponding to three jaws to obtain the rotation sequence and rotation stop positions of the three jaws.
8. The fluoride crystal ingot cylinder end-face rapid polishing processing device of claim 4, wherein the polishing mold rotating mechanism comprises: the polishing device comprises a speed regulating motor, a thimble, a shifting pin and a polishing die; the speed regulating motor is fixed on the swing arm, a main shaft of the speed regulating motor is directly connected with the thimble, and the thimble provides pressure vertical to the polishing surface; the shifting pin is arranged in a groove above the polishing die, and the speed regulating motor drives the polishing die to rotate through the shifting pin.
9. The fluoride crystal ingot cylinder end-face rapid polishing processing device of claim 8, wherein the swinging pressurizing mechanism comprises an eccentric wheel, a cylinder, a swing arm shaft, a positioning bolt and a swing arm; the eccentric wheel rotates to drive the swing arm to swing, the contact position of the swing arm and the eccentric wheel is adjusted along the radius direction of the eccentric wheel, the swing amplitude is increased when the contact position of the swing arm and the eccentric wheel is far away from the circle center, and the length of the swing arm is adjusted through a positioning bolt.
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