CN219521764U

CN219521764U - Jig for cleaning and trimming polishing cloth

Info

Publication number: CN219521764U
Application number: CN202223574074.5U
Authority: CN
Inventors: 汪祖一
Original assignee: Shanghai Crystal Silicon Material Co ltd
Current assignee: Shanghai Crystal Silicon Material Co ltd
Priority date: 2022-12-30
Filing date: 2022-12-30
Publication date: 2023-08-15
Anticipated expiration: 2032-12-30

Abstract

The utility model discloses a jig for cleaning and trimming polishing cloth, which comprises a disc, wherein a trimming part for trimming the polishing cloth is arranged on the disc, the trimming part comprises at least three groups of grinding wheels, the diameter of each grinding wheel is smaller than that of the disc, the grinding wheels are uniformly distributed on the disc in the circumferential direction, and a connecting piece for connecting the output end of a polishing machine is arranged at the center position of the surface of the other side of the disc. According to the utility model, the diamond grinding wheel is adopted, the plastic brush hair is replaced by diamond particles, the service life of the diamond particles is long, the diamond particles cannot deform, the flatness of the whole jig is good, the flatness of the polishing cloth after finishing is good, and the surface quality of the polished silicon wafer is good.

Description

Jig for cleaning and trimming polishing cloth

Technical Field

The utility model relates to the technical field of polishing cloth cleaning and repairing tools, in particular to a tool for cleaning and repairing polishing cloth.

Background

In the technical field of IC-level silicon wafer polishing, the polishing cloth is blocked on the surface by reactants in the use process, a vitrification glaring phenomenon is formed, so that the polishing efficiency is reduced, and the surface quality of a polishing sheet is reduced, so that the polishing cloth is required to be continuously dressed in the polishing process, the polishing efficiency and the quality of the polishing sheet are maintained, and the polishing cloth is required to be dressed.

The traditional polishing cloth repairing jig adopts a mechanical brushing disc structure, bristles are made of plastic materials, the wear-resistant service life is short, and the flatness of the whole jig is poor because the plastic is easy to bend, so that the flatness of the polishing cloth is poor, and the flatness of a polished silicon wafer is poor.

Disclosure of Invention

The utility model aims to provide a jig for cleaning and trimming polishing cloth, which is characterized in that a diamond grinding wheel is adopted, diamond particles are used for replacing plastic bristles, the service life of the diamond particles is long, the diamond particles cannot deform, the flatness of the whole jig is good, the flatness of the polishing cloth after final trimming is good, and the surface quality of a polished silicon wafer is good, so that the problems in the prior art are solved.

In order to achieve the above purpose, the present utility model provides the following technical solutions:

the utility model provides a tool for polishing cloth cleaning and trimming, includes the disc, be equipped with the trimming part that is used for repairing polishing cloth on the disc, the trimming part includes three at least groups emery wheel, the diameter of emery wheel is less than the diameter of disc, the emery wheel is circumference evenly arranged on the disc, the central point of the opposite side surface of disc is equipped with the connecting piece that is used for connecting the burnishing machine output.

Preferably, the grinding wheel is provided as a diamond grinding wheel.

Preferably, the diamond density on the wheel is 3.52g/cm3.

Preferably, the diamond particles on the wheel are 40 μm in size.

Compared with the prior art, the utility model has the beneficial effects that:

according to the utility model, the diamond grinding wheel is adopted, the plastic brush hair is replaced by diamond particles, the service life of the diamond particles is long, the diamond particles cannot deform, the flatness of the whole jig is good, the flatness of the polishing cloth after finishing is good, and the surface quality of the polished silicon wafer is good.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

fig. 2 is a schematic structural view of the disc of the present utility model.

In the figure: 1. a disc; 2. grinding wheel; 3. and a connecting piece.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-2, the present utility model provides a technical solution:

the utility model provides a tool for polishing cloth cleaning and trimming, includes disc 1, is equipped with the trimming part that is used for repairing polishing cloth on the disc 1, and the trimming part includes at least three group's emery wheel 2, and the diameter of emery wheel 2 is less than the diameter of disc 1, and emery wheel 2 is circumference evenly arranged on disc 1, and the central point of the opposite side surface of disc 1 is equipped with the connecting piece 3 that is used for connecting the burnishing machine output.

The grinding wheel 2 was set as a diamond grinding wheel, the diamond density on the grinding wheel 2 was 3.52g/cm3, and the diamond particle size on the grinding wheel 2 was 40. Mu.m.

The fixing mode of the grinding wheel 2 and the disc 1 is one of fixing by a fixing screw and bonding by glue, but is not limited to the two modes, and can be selected according to requirements, so long as the fixing function is achieved.

The disc 1 is connected with the polishing machine through the connecting piece 3, specifically, the connection mode of the polishing machine and the connecting piece 3 is one of fixed screw installation and pin rod pin connection, but the connection mode is not limited to the two modes, and the connection mode can be selected according to requirements, and only a fixing effect is achieved.

The material of the disc 1 can be one of plastics, metals and ceramics.

When the polishing machine is used, the whole disc 1 is placed on polishing cloth (diamond particles face downwards and are in contact with the surface of the polishing cloth), a large polishing machine disc is started, the disc 1 performs planetary motion, the function of trimming and cleaning the polishing cloth is achieved, specifically, the particle size-density-distribution and the like of diamond on a diamond grinding wheel, the number, the material, the thickness, the diameter and the like of the diamond grinding wheel, and the material, the thickness, the diameter and the like of the disc 1 can be designed according to different polishing equipment and processes and corresponding different polishing cloth types.

The polishing cloth is trimmed by using the device, and the specific operation mode is consistent with that of the traditional mechanical brush, so that the use difficulty is not increased. Can be directly applied to all the non-wax polishing or wax polishing procedures, and can prolong the service life of polishing cloth by more than 1 time compared with the traditional mechanical brush. And the surface quality level of the processed polishing pad is kept stable during the whole life of the polishing cloth (the surface quality of the processed polishing pad is increasingly deteriorated during the whole life of the polishing cloth by the traditional mechanical brush), and the quality and the economic benefit are obvious.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

While embodiments of the present utility model have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the utility model, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the utility model.

Claims

1. A tool for polishing cloth cleaning and trimming, its characterized in that: the polishing device comprises a disc (1), wherein a trimming part for trimming polishing cloth is arranged on the disc (1), the trimming part comprises at least three groups of grinding wheels (2), the diameter of each grinding wheel (2) is smaller than that of the disc (1), the grinding wheels (2) are uniformly distributed circumferentially on the disc (1), and a connecting piece (3) used for connecting the output end of a polishing machine is arranged at the central position of the surface of the other side of the disc (1).

2. The jig for cleaning and trimming a polishing cloth according to claim 1, wherein: the grinding wheel (2) is set as a diamond grinding wheel.

3. The jig for cleaning and trimming a polishing cloth according to claim 1, wherein: the diamond density on the grinding wheel (2) is 3.52g/cm3.

4. The jig for cleaning and trimming a polishing cloth according to claim 1, wherein: the diamond particle size on the grinding wheel (2) is 40 mu m.