CN115808777B - Long-wave infrared microscope for transfer function instrument - Google Patents
Long-wave infrared microscope for transfer function instrument Download PDFInfo
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- CN115808777B CN115808777B CN202211578699.0A CN202211578699A CN115808777B CN 115808777 B CN115808777 B CN 115808777B CN 202211578699 A CN202211578699 A CN 202211578699A CN 115808777 B CN115808777 B CN 115808777B
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- 238000012546 transfer Methods 0.000 title claims abstract description 26
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 36
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims abstract description 36
- 238000003384 imaging method Methods 0.000 claims abstract description 16
- 230000004075 alteration Effects 0.000 claims abstract description 13
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 10
- 230000005499 meniscus Effects 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000013461 design Methods 0.000 abstract description 7
- 230000003321 amplification Effects 0.000 abstract description 4
- 238000012937 correction Methods 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 abstract description 4
- 238000003199 nucleic acid amplification method Methods 0.000 abstract description 4
- 238000004971 IR microspectroscopy Methods 0.000 abstract description 2
- 238000012360 testing method Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 238000003703 image analysis method Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 241000186781 Listeria Species 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000021615 conjugation Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
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Abstract
The invention discloses a long-wave infrared microscope for a transfer function instrument, and relates to the field of infrared microscopy. The invention adopts the design form of infinity correction, the form is simple and reliable, the imaging quality of the front group and the rear group of the device can be conveniently evaluated in the debugging detection stage, the debugging requirement is reduced, and the absolute length is 115.81mm. The system comprises a front group and a rear group, wherein the front group comprises 3 lenses, the rear group comprises 2 lenses, the lens materials are all common materials of germanium and zinc selenide of the infrared lens, and the apochromatic aberration and 5-time amplification of 8-12 um waves Duan Pingchang are realized through the matching of different materials and the matching of a conventional lens, an aspheric surface and a diffraction surface. The focal length of the objective lens is 15mm, and the focal length of the tube lens is 75mm. The microscope focal length is 22mm, the object space numerical aperture is 0.75, the microscope is suitable for 640 x 512 long wave uncooled detector, and has the characteristics of large numerical aperture, high resolution, flat field apochromatic, simplicity, reliability, easy adjustment and the like.
Description
Technical Field
The invention belongs to the technical field of infrared microscopy, and particularly relates to a long-wave infrared microscope for a transfer function instrument.
Background
The method for measuring the long-wave infrared microscope by the transfer function instrument mainly comprises a scanning method and an image analysis method. The scanning method generally needs to select a point element detector with a liquid nitrogen refrigerating device as a system receiver, the testing step is relatively troublesome, and the testing efficiency is relatively low. The image analysis method selects an area array detector device, is matched with a microscopic amplification system, can visually display star imaging patterns, can provide more comprehensive image quality analysis basis for design, assembly and debugging personnel, and has the advantages of quick test and great improvement of test efficiency.
When the image analysis method is used for testing the long-wave infrared transfer function, the long-wave microscope is mainly used for realizing the conjugation of the object plane and the image plane of the long-wave microscope respectively corresponding to the focal plane of the tested lens and the target plane of the area array detector; and the imaging of the focal plane of the tested lens is amplified to the target surface of the area array detector, so that the image amplification and transmission are realized, and the image identification and optical transfer function (Modulation Transfer Function, MTF) is convenient to calculate.
When the image quality is evaluated after the conventional long-wave microscope is assembled and tuned, the object distance and the optical axis of the conventional long-wave microscope are required to be controlled in the test, the process is complex and complicated, the condition of inaccurate test exists, and if the assembling and tuning effect cannot be known, the result of the subsequent transfer function calculation is error.
Disclosure of Invention
Aiming at the defects or improvement demands of the prior art, the invention provides a long-wave infrared microscope for a transfer function instrument, which has a large numerical aperture, is used for testing the long-wave infrared microscope by an image analysis method, can realize the apochromatic of a long-wave 8-12 mu m wave band flat field, and simplifies the adjustment difficulty.
In order to achieve the above object, the present invention provides a long-wave infrared microscope for a transfer function instrument, which is provided with five coaxial lenses, wherein the lenses are divided into a front group and a rear group from an object side to an image side, a light incident direction is the object side, and a light emergent direction is the image side, wherein:
The front group consists of a first front group lens, a second front group lens and a third front group lens;
The rear group consists of a first rear group lens and a second rear group lens;
The object space imaging light beam sequentially passes through the first front group lens, the second front group lens and the third front group lens to form parallel light beams, and then passes through the first rear group lens and the second rear group lens to be imaged on the detector;
The five lenses are matched with germanium and zinc selenide materials and comprise conventional lenses, aspheric surfaces and diffraction surfaces, and are used for realizing apochromatic of 8-12 um waves Duan Pingchang.
In some alternative embodiments, the first front group lens is a concave object side positive meniscus germanium lens, the second front group lens is a concave object side positive meniscus zinc selenide lens, the third front group lens is a concave object side positive meniscus germanium lens, the first back group lens is a convex object side positive meniscus germanium lens, and the second back group lens is a convex object side positive meniscus germanium lens.
In some alternative embodiments, the first surface of the third front group lens proximate the object side is an aspheric diffractive surface of a germanium substrate.
In some alternative embodiments, the second face of the first front group lens remote from the object is an aspherical face of the germanium substrate.
In some alternative embodiments, the second face of the first rear group lens remote from the object is an aspherical face of the germanium substrate.
In some alternative embodiments, the first face of the second rear group lens proximate the object is an aspherical face of the germanium substrate.
In some alternative embodiments, the microscope has a focal length of 22mm, an object side numerical aperture of 0.75, and a magnification of 5.
In some alternative embodiments, the distance from the vertex of the first front group of lenses near the first face of the object to the image plane is maintained at 115.81mm.
In some alternative embodiments, the microscope is suitable for large target area long wave uncooled detectors with a pixel count of 640 x 512 and a pixel size of 12 x 12 μm.
In some alternative embodiments, the microscope achieves apochromatic of 8-12 um waves Duan Pingchang.
In some alternative embodiments, the first front group lens is located near the first face vertex of the object side at a distance of 4.2mm from the object point in the direction of the optical path, and the second rear group lens is located at a distance of 18.6mm from the target face of the detector.
In general, the above technical solutions conceived by the present invention, compared with the prior art, enable the following beneficial effects to be obtained:
1. The front group of the microscope is based on the influence of complex surface type on imaging effect, and a piece of aspheric diffraction element based on a germanium substrate and a piece of aspheric element based on the germanium substrate are used, so that the chromatic aberration is less than 1 time of focal depth, and the apochromatic requirement is met; the distance from the meridian and sagittal image surface to the ideal image surface is less than 1um, and the field curvature meets the requirements of a flat image field. The Listeria judgment in the field of view can reach 0.99, and the condition of perfect imaging is achieved.
2. The rear group of the microscope uses two aspheric diffraction elements based on germanium substrates, the color spherical aberration is less than 1 time of focal depth, and the imaging quality is good; the astigmatism is about 2um, and the imaging is clear. The Listeria judgment in the field of view can reach 0.99, and the condition of perfect imaging is achieved.
3. The microscope realizes an infinite correction design form through lens materials, the curvature radius of the lens and the lens interval design, is simple and reliable, is convenient for evaluating imaging quality of a front group and a rear group of the microscope in an adjustment detection stage, and reduces adjustment requirements.
Drawings
FIG. 1 is a schematic view of a microscope provided in an embodiment of the present invention;
FIG. 2 is a two-dimensional view of a microscope provided in an embodiment of the present invention;
FIG. 3 is a graph showing MTF curves for a microscope at each field of view of 20lp/mm provided in an embodiment of the present invention;
FIG. 4 is a graph showing MTF curves for a front microscope set at 20lp/mm fields of view, provided in an embodiment of the present invention;
FIG. 5 is a graph showing MTF curves for a rear microscope set at 20lp/mm fields of view according to an embodiment of the present invention;
FIG. 6 shows the color spherical aberration, field curvature, and distortion of a microscope according to an embodiment of the present invention;
FIG. 7 shows the color spherical aberration, field curvature, and distortion of a front group of a microscope provided by an embodiment of the present invention;
FIG. 8 shows the color spherical aberration, field curvature, and distortion of a rear group of a microscope provided by an embodiment of the invention;
in the figure, 1-first front group lens, 2-second front group lens, 3-third front group lens, 4-first rear group lens, 5-second rear group lens.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
In the examples of the present invention, "first," "second," etc. are used to distinguish between different objects, and are not used to describe a particular order or sequence.
According to the long-wave infrared microscope for the transfer function instrument, as shown in fig. 1 and 2, the long-wave infrared microscope comprises a front group and a rear group, wherein the front group comprises three lenses including a first front group lens 1, a second front group lens 2, a third front group lens 3 and the like, the rear group comprises two lenses including a first rear group lens 4 and a second rear group lens 5, an object imaging beam sequentially passes through the first front group lens 1, the second front group lens 2 and the third front group lens 3, is collimated into a parallel beam, and then passes through the first rear group lens 4 and the second rear group lens 5 to be imaged on a detector.
The system adopts an infinity corrected design form, five lenses are coaxially arranged, the number of lenses of a microscope is reduced, the adjustment difficulty is simplified, and the absolute length is 115.81mm.
Furthermore, the lens materials used in the system are germanium and zinc selenide which are commonly used in an infrared lens, the incident direction of light is the object side, the emergent direction of light is the image side, the first front group lens is a meniscus germanium positive lens with a concave surface facing the object side, the second front group lens is a meniscus zinc selenide positive lens with a concave surface facing the object side, the third front group lens is a meniscus germanium positive lens with a concave surface facing the object side, the first rear group lens is a meniscus germanium positive lens with a convex surface facing the object side, and the second rear group lens is a meniscus germanium positive lens with a convex surface facing the object side.
The long-wave infrared microscope for the transfer function instrument has the focal length of 22mm, the numerical aperture of an object space of 0.75 and high resolution. The focal length of a pinhole target with the thickness of 0.3mm of the transfer function instrument and a lens to be measured is 50mm, and after a 12 x 12um detector is added at the rear end, the final imaging image height can occupy 2.83 pixels, so that the transfer function resolving requirement is met.
In the embodiment of the invention, imaging light beams of an object space are collimated into parallel light after passing through the first front group lens 1, the second front group lens 2 and the third front group lens 3 in sequence, then are imaged on a detector after passing through the first rear group lens 4 and the second rear group lens 5, the focal length of a microscope is 22mm, the numerical aperture of the object space is 0.75, and the resolution ratio is high.
The system utilizes the principle that refractive indexes of different materials are different, the first front group lens 1 is a meniscus germanium positive lens with a concave surface facing an object space, the second surface far away from the object space is an aspheric surface of a germanium substrate, the second front group lens 2 is a meniscus zinc selenide positive lens with a concave surface facing the object space, the third front group lens 3 is a meniscus germanium positive lens with a concave surface facing the object space, the first surface close to the object space is an aspheric diffraction surface, the first rear group lens 4 is a meniscus germanium positive lens with a convex surface facing the object space, the second surface far away from the object space is an aspheric surface, and the second rear group lens 5 is a meniscus germanium positive lens with a convex surface facing the object space.
The system adopts three aspheric surfaces, namely an aspheric diffraction surface, and well corrects chromatic aberration and field curvature through the matching of different lens materials and the matching of a conventional lens and a diffraction lens, thereby realizing flat field apochromatic aberration.
Furthermore, the microscope adopts an infinite correction design form, is simple and reliable, can be convenient for evaluating the imaging quality of the front group and the rear group respectively in the adjustment detection stage, and reduces the adjustment requirement when the front group and the rear group are in butt joint;
Further, in the embodiment of the present invention, the distance between the vertex of the first surface of the first front group lens 1, which is close to the object space, and the object point along the optical path direction is 4.2mm, and the distance between the second rear group lens 5 and the target surface of the detector is 18.6mm.
FIG. 3 shows MTF curves for a microscope of the present invention at 20lp/mm fields of view; FIG. 4 shows MTF curves for the front microscope set of the present invention at 20lp/mm fields of view; FIG. 5 shows MTF curves for a rear microscope set of the present invention at 20lp/mm fields of view; FIG. 6 shows the color spherical aberration, field curvature, and distortion of the microscope of the present invention; FIG. 7 shows the color spherical aberration, curvature of field, and distortion of the front microscope set of the present invention; fig. 8 shows the color spherical aberration, curvature of field, and distortion of the rear microscope set of the present invention.
In summary, the long-wave infrared microscope for the transfer function instrument adopts an infinity correction design form, is simple and reliable, is convenient to evaluate imaging quality of a front group and a rear group of the microscope respectively in an adjustment detection stage, reduces adjustment requirements, and has an absolute length of 115.81mm; the long-wave infrared lens is made of silicon, germanium, zinc selenide and the like, the silicon material has the physical characteristics of brittleness and hardness and the like, the problem of edge breakage and the like easily occurs due to vibration between a cutter and the material in the processing process, and the surface finish and the surface accuracy are difficult to control, so that a diffraction surface is manufactured on soft materials such as germanium, zinc selenide and the like. The invention uses one diffraction surface based on the germanium substrate, and three aspheric surfaces based on the germanium substrate, thereby realizing apochromatic aberration and 5 times amplification of 8-12 um waves Duan Pingchang. The long-wave infrared microscope for the transfer function instrument has the characteristics of large numerical aperture, apochromatic property in a flat field, small volume, easy assembly and adjustment and the like.
It should be noted that each step/component described in the present application may be split into more steps/components, or two or more steps/components or part of operations of the steps/components may be combined into new steps/components, according to the implementation needs, to achieve the object of the present application.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (9)
1. The utility model provides a transfer letter is long wave infrared microscope for appearance, its characterized in that is equipped with five coaxial lenses altogether, lens divide into front group and back group from object space to image space, and the light incident direction is the object space, and the light outgoing direction is the image space, wherein:
The front group consists of a first front group lens, a second front group lens and a third front group lens;
The rear group consists of a first rear group lens and a second rear group lens;
The object space imaging light beam sequentially passes through the first front group lens, the second front group lens and the third front group lens to form parallel light beams, and then passes through the first rear group lens and the second rear group lens to be imaged on the detector;
the five lenses are matched by adopting germanium and zinc selenide materials, comprise conventional lenses, aspheric surfaces and lenses with diffraction surfaces, and are used for realizing apochromatic aberration of 8-12 um waves Duan Pingchang;
The first front group lens is a meniscus germanium positive lens with a concave surface facing an object, the second front group lens is a meniscus zinc selenide positive lens with a concave surface facing the object, the third front group lens is a meniscus germanium positive lens with a concave surface facing the object, the first rear group lens is a meniscus germanium positive lens with a convex surface facing the object, and the second rear group lens is a meniscus germanium positive lens with a convex surface facing the object.
2. The long-wave infrared microscope for a transfer function instrument according to claim 1, wherein the first surface of the third front group lens close to the object side is an aspherical diffraction surface of the germanium substrate.
3. The long-wave infrared microscope for a transfer function instrument according to claim 1, wherein the second surface of the first front group lens away from the object side is an aspherical surface of the germanium substrate.
4. The long-wave infrared microscope for a transfer function instrument according to claim 1, wherein the second surface of the first rear group lens away from the object is an aspherical surface of the germanium substrate.
5. The long-wave infrared microscope for a transfer function instrument according to claim 1, wherein the first surface of the second rear group lens close to the object side is an aspherical surface of the germanium substrate.
6. The long-wave infrared microscope for a transfer function meter according to any one of claims 1 to 5, wherein the focal length of the microscope is 22mm, the object side numerical aperture is 0.75, and the magnification is 5 times.
7. The long-wave infrared microscope for a transfer function meter according to claim 6, wherein a distance from an apex of the first surface of the first front group lens close to the object side to the image surface is kept to be 115.81mm.
8. The long-wave infrared microscope for a transfer function instrument according to claim 7, wherein the microscope is suitable for a large-target-surface long-wave uncooled detector with 640 x 512 pixels and 12 x 12 μm pixels.
9. The long-wave infrared microscope for a transfer function meter according to claim 1, wherein the distance from the vertex of the first surface of the first front group lens close to the object side to the object point in the optical path direction is 4.2mm, and the distance from the second rear group lens to the target surface of the detector is 18.6mm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211578699.0A CN115808777B (en) | 2022-12-05 | 2022-12-05 | Long-wave infrared microscope for transfer function instrument |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211578699.0A CN115808777B (en) | 2022-12-05 | 2022-12-05 | Long-wave infrared microscope for transfer function instrument |
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| CN115808777A CN115808777A (en) | 2023-03-17 |
| CN115808777B true CN115808777B (en) | 2024-07-09 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN202230242U (en) * | 2011-09-06 | 2012-05-23 | 云南北方驰宏光电有限公司 | Long wave non-refrigerating infrared micro-objective |
| KR20130052110A (en) * | 2011-11-11 | 2013-05-22 | 한국기초과학지원연구원 | High resolution infrared thermal imaging microscope |
| CN102435789A (en) * | 2011-12-26 | 2012-05-02 | 吉林大学 | Electrooptic solid immersion probe |
| US9823451B2 (en) * | 2013-04-12 | 2017-11-21 | Daylight Solutions, Inc. | Infrared refractive objective lens assembly |
| CN111474684B (en) * | 2020-05-29 | 2021-12-10 | 苏州东方克洛托光电技术有限公司 | Medium-long wave infrared dual-waveband microscopic imaging additional lens |
| CN113534429A (en) * | 2021-07-15 | 2021-10-22 | 宁波舜宇仪器有限公司 | Microscope imaging system |
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