CN217846758U - Dispersive lens group with large axial chromatic aberration - Google Patents
Dispersive lens group with large axial chromatic aberration Download PDFInfo
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- CN217846758U CN217846758U CN202221686873.9U CN202221686873U CN217846758U CN 217846758 U CN217846758 U CN 217846758U CN 202221686873 U CN202221686873 U CN 202221686873U CN 217846758 U CN217846758 U CN 217846758U
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Abstract
The utility model discloses a dispersive lens group of big axial colour difference includes slit, first shading diaphragm, first battery of lens, second shading diaphragm, second battery of lens, third shading diaphragm and detection face in proper order from the direction of transmission of light. The utility model relates to a can be applied to the confocal chromatic dispersion objective of big axial chromatic aberration of line scanning spectrum, can consider the aberration of chromatic dispersion objective and rectify and the balance between the chromatic dispersion scope. The utility model discloses but wide application in optical objective technical field.
Description
Technical Field
The utility model relates to an optical objective technical field especially relates to a chromatic dispersion lens group of big axial chromatic aberration.
Background
In the spectrum confocal sensor, a wide spectrum light source with a wide wavelength range is adopted as a light source, incident light passes through a pinhole positioned at a focus and then forms parallel light through a collimating prism, the upward incident light passes through a beam splitter and then enters a special dispersion objective lens, the dispersion objective lens can form axial dispersion distributed according to each wavelength, the objective lens can focus light on different positions of an optical axis, displacement information of the surface of a detected sample can be replaced by wavelength information of reflected light, the light is reflected back to the beam splitter and is imaged in front of a small hole in front of a detector. And the aperture at the light source, the detector aperture and the object focal plane are in conjugate relation.
The dispersive objective lens determines the separation degree of different wavelengths, namely the size of axial dispersion or the size of a measurement range, and the conversion relation between displacement fluctuation of a detection surface and reflected light also influences the measurement precision and resolution, and is the key of the whole spectrum confocal microscope system.
SUMMERY OF THE UTILITY MODEL
In order to solve the above technical problem, the present invention provides a chromatic dispersion objective lens capable of being applied to the confocal large axial chromatic aberration of the line scanning spectrum, which can consider the balance between the chromatic aberration correction and the chromatic dispersion range of the chromatic dispersion objective lens.
The utility model adopts the technical proposal that: a large axial chromatic aberration dispersion lens group comprises a slit, a first shading diaphragm, a first lens group, a second shading diaphragm, a second lens group, a third shading diaphragm and a detection surface in sequence from the transmission direction of light.
Further, the focal length of the first lens group is a long focal length, and the value range of the focal length is 100mm to 150mm.
Further, the first lens group comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens which are coaxial in sequence.
Further, the first lens is a negative focal length lens, and the focal length value range is-250 mm to-200 mm; the second lens is a positive focal length lens, and the focal length value range is 100mm to 150mm; the third lens is a positive focal length lens, and the focal length value range is 180mm to 220mm; the fourth lens is a negative focal length lens, and the focal length value range is-100 mm to-140 mm; the fifth lens is a positive focal length lens, and the focal length range is 200mm to 240mm; the sixth lens is a positive focal length lens, and the focal length range is 160mm to 200mm; the seventh lens is a negative focal length lens, and the focal length value range is-1000 m to-1200 mm.
Further, the first lens is a plano-concave lens, and the concave surface of the first lens faces the object space; the second lens is a positive meniscus lens, and the convex surface faces the image space; the third lens is a positive meniscus lens, and the convex surface faces the object space; the fourth lens is a biconcave lens; the fifth lens is a positive meniscus lens, and the convex surface faces the image space; the sixth lens is a plano-convex lens, and the convex surface of the sixth lens faces the object space; the seventh lens is a negative meniscus lens, and the convex surface faces the image space.
Further, the focal length of the second lens group is a long focal length, and the range of the focal length is 100mm to 150mm.
Further, the second lens group includes, in order coaxially, an eighth lens, a ninth lens, a tenth lens, an eleventh lens, a twelfth lens, a thirteenth lens, and a fourteenth lens.
Furthermore, the eighth lens is a negative focal length lens, and the focal length ranges from-330 mm to-350 mm; the ninth lens is a positive focal length lens, and the focal length range is 200mm to 230mm; the tenth lens is a positive focal length lens, and the focal length value range is 170mm to 200mm; the eleventh lens is a negative focal length lens, and the focal length value range is-130 mm to-150 mm; the twelfth lens is a positive focal length lens, and the focal length value range is 150mm to 180mm; the thirteenth lens is a positive focal length lens, and the focal length value range is 140mm to 170mm; the fourteenth lens is a negative focal length lens, and the focal length value range is-160 mm to-190 mm.
Further, the eighth lens is a negative meniscus lens, and the convex surface faces the object space; the ninth lens is a plano-convex lens, and the convex surface of the ninth lens faces the image space; the tenth lens is a positive meniscus lens, and the convex surface faces the object space; the eleventh lens is a biconcave lens; the twelfth lens is a biconvex lens; the thirteenth lens is a positive meniscus lens, and the convex surface faces the object space; the fourteenth lens is a plano-concave lens, and the concave surface faces the object space.
Further, the slit is a rectangular shading diaphragm, the length of the slit is 10mm to 20mm, and the width of the slit is 10 μm to 25 μm.
The utility model has the advantages that: the utility model discloses increase many places shading diaphragm restriction incident ray angle and other disturbing lights of non-detection surface wave band of filtering, improve the imaging quality, object space heart through first battery of lens control system, carry out preliminary dispersion and correction system's aberration to the detecting light, be used for image space heart in control system through the second battery of lens, further dispersion and correction system's residual aberration is carried out to the detecting light, finally obtain the chromatic dispersion objective of being applied to the confocal great axial chromatic aberration of line scanning spectrum.
Drawings
Fig. 1 is a block diagram of a dispersive lens group with large axial chromatic aberration according to the present invention;
fig. 2 is a top view of the optical path of the present invention during the detection by the objective lens;
fig. 3 is a front view of the optical path of the dispersion objective of the present invention during detection;
fig. 4 is a schematic view of the structure of the shading diaphragm of the present invention.
Reference numerals are as follows: 101. a slit; a1, a first shading diaphragm; l1, a first lens; l2, a second lens; l3, a third lens; l4, a fourth lens; l5, a fifth lens; l6, a sixth lens; l7, seventh lens; g1, a first lens group; a2, a second shading diaphragm; l8, an eighth lens; l9, ninth lens; l10, tenth lens; l11, eleventh lens; l12, twelfth lens; l13, thirteenth lens; l14, fourteenth lens; a3, a third shading diaphragm; g2 and a second lens group.
Detailed Description
Referring to fig. 1, the utility model provides a dispersive lens group of big axial chromatic aberration includes slit 101, first shading diaphragm A1, first lens group G1, second shading diaphragm A2, second lens group G2, third shading diaphragm A3 and detection face in proper order from the transmission direction of light.
Specifically, the first lens group G1 is used for controlling the object-side telecentricity of the system, performing preliminary dispersion on the detection light and correcting the aberration of the system, and the second lens group G2 is used for controlling the image-side telecentricity of the system, performing further dispersion on the detection light and correcting the residual aberration of the system.
In addition, the addition of the shading diaphragm is very necessary for the whole system, and the size and the position of the shading diaphragm influence the performance of the system. For incident light, the angle of the incident light can be limited by adding a plurality of shading diaphragms, which is very important for a system with a plurality of lenses, so that the difficulty of assembly can be reduced; for the reflected light, other interference light of a non-detection surface wave band can be filtered by adding a plurality of shading diaphragms, and the imaging quality is improved.
As a further preferred embodiment of the present invention, the focal length of the first lens group G1 is a long focal length, and the focal length value range is 100mm to 150mm, the first lens group G1 includes a first lens L1, a second lens L2, a third lens L3, a fourth lens L4, a fifth lens L5, a sixth lens L6, and a seventh lens L7, which are coaxial, the first lens L1 is a negative focal length lens, and the focal length value range is-250 mm to-200 mm, the second lens L2 is a positive focal length lens, and the focal length value range is 100mm to 150mm, the third lens L3 is a positive focal length lens, and the focal length value range is 180mm to 220mm, the fourth lens L4 is a negative focal length lens, and the focal length value range is-100 mm to-140 mm, the fifth lens L5 is a positive focal length lens, the focal length value range is 200mm to 240mm, the sixth lens L6 is a positive focal length lens, the focal length value range is 160mm to 200mm, the seventh lens L7 is a negative focal length lens, the focal length value range is-1000 m to-1200 mm, the first lens L1 is a plano-concave lens, the concave surface faces the object space, the second lens L2 is a positive meniscus lens, the convex surface faces the image space, the third lens L3 is a positive meniscus lens, the convex surface faces the object space, the fourth lens L4 is a biconcave lens, the fifth lens L5 is a positive meniscus lens, the convex surface faces the image space, the sixth lens L6 is a plano-convex lens, the convex surface faces the object space, the seventh lens L7 is a negative meniscus lens, and the convex surface faces the image space.
Specifically, the first lens L1 is configured to adjust an aperture of the detection light and control object telecentricity, the second lens L2 has different refractive powers for light with different wavelengths, and completes preliminary dispersion, the third lens L3 is configured to correct spherical aberration of the detection light passing through the front system and control a focal length of the first lens group to be a long focal length, the fourth lens L4 is configured to diverge incident light and correct distortion of the detection light, the fifth lens L5 is configured to further disperse the detection light, the sixth lens L6 is configured to correct spherical aberration caused by the system and further disperse the detection light, and the seventh lens L7 is configured to shape a beam of the detection light, so as to ensure that the detection light can be shielded by a diaphragm.
Further as the utility model discloses preferred embodiment, the focus of second lens group G2 is long focal length, and the focus value range is 100mm to 150mm. The second lens group G2 includes an eighth lens L8, a ninth lens L9, a tenth lens L10, an eleventh lens L11, a twelfth lens L12, a thirteenth lens L13, and a fourteenth lens L14 on the same axis. The eighth lens L8 is a negative focal length lens, the focal length value range is-330 mm to-350 mm, the ninth lens L9 is a positive focal length lens, the focal length value range is 200mm to 230mm, the tenth lens L10 is a positive focal length lens, the focal length value range is 170mm to 200mm, the eleventh lens L11 is a negative focal length lens, the focal length value range is-130 mm to-150 mm, the twelfth lens L12 is a positive focal length lens, the focal length value range is 150mm to 180mm, the thirteenth lens L13 is a positive focal length lens, the focal length value range is 140mm to 170mm, the fourteenth lens L14 is a negative focal length lens, and the focal length value range is-160 mm to-190 mm. The eighth lens element L8 is a negative meniscus lens element with a convex surface facing the object space, the ninth lens element L9 is a plano-convex lens element with a convex surface facing the image space, the tenth lens element L10 is a positive meniscus lens element with a convex surface facing the object space, the eleventh lens element L11 is a biconcave lens element, the twelfth lens element L12 is a biconvex lens element, the thirteenth lens element L13 is a positive meniscus lens element with a convex surface facing the object space, and the fourteenth lens element L14 is a plano-concave lens element with a concave surface facing the object space.
Specifically, the eighth lens L8 is configured to collect the probe light emitted from the light blocking diaphragm and correct coma aberration of the probe light, the ninth lens L9 is configured to further disperse the probe light and correct spherical aberration caused by the system, the tenth lens L10 is configured to correct astigmatism caused by the system and further disperse the probe light, the eleventh lens L11 is configured to correct spherical aberration caused by the system, the twelfth lens L12 is configured to further focus the probe light and correct spherical aberration caused by the system, the thirteenth lens L13 has different refractive powers for light with different wavelengths to complete final dispersion, and the fourteenth lens L14 is configured to correct residual focal length aberration of the probe light passing through the previous system and control the long focal length of the second lens group.
Further as a preferred embodiment of the present invention, the shading diaphragms A1, A2, A3 are circular diaphragms symmetrical about the optical axis, as shown in fig. 4.
Further as the preferred embodiment of the present invention, the slit is a rectangular light shielding diaphragm, the length of the slit is 10mm to 20mm, and the width of the slit is 10 μm to 25 μm.
Further as a preferred embodiment of the present invention, the angle of oblique incidence of the light is 10 ° to 20 °.
Further as a preferred embodiment of the invention, the axial dispersion of the dispersive objective lens is 5 to 20mm.
The utility model provides a dispersion objective of big axial colour difference, the outside white light LED that uses is as the light source, and the light of light source output hits the slit back with certain angle slope, and the light that can seem into the light that the line source of similar ideal sends by the light of slit outgoing, and the one side of dispersion objective is incited to the light slope of slit outgoing, just also only leans on one side as the transmission light path. Assuming a slit length of 12.5mm and a half axis as a transmission path, the radius of the lens needs to be large, thus restricting the radius of curvature from being too small. Lenses with too small a radius of curvature do not have strong divergence and focusing capabilities, and therefore multiple lenses need to be added to accomplish the design goal.
Fig. 2 and 3 are optical path diagrams of the dispersive objective lens during detection. An external wide-spectrum LED light source with the wave band of 450nm to 750nm is integrated and contracted into a line light source with uniform light emission through an optical fiber, white light emitted by the light source is incident to a lens set at an inclined angle of 15 degrees through a rectangular slit with the length of 12.5mm and the width of 15um, the aperture angle is 15 degrees, and the white light passes through a light path in the graph 2 and is irradiated onto a detection surface. Light with different wavelengths is reflected back by the detector at different heights, the light with the wavelengths is emitted to the spectrometer from the slit after passing through the shading diaphragm A1, the shading diaphragm A2 and the shading diaphragm A3, only the light with wave bands reflected back by the detector can be emitted to the spectrometer for detection, and height information of the detector is obtained according to the wavelength of the light. It can be seen from the figure that, when the detection reflection surface is in the red light 750nm waveband, the light of the other wavebands is interference light, and the return light path can be filtered by the shading diaphragms A1, A2 and A3, and only the light of the wavebands reflected by the detection object can be emitted.
As an example, the lens face type parameters for each lens are shown in table 1 below:
while the preferred embodiments of the present invention have been described, the present invention is not limited to the above embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and such equivalent modifications or substitutions are intended to be included within the scope of the present invention as defined by the appended claims.
Claims (10)
1. A chromatic dispersion lens group with large axial chromatic aberration is characterized by sequentially comprising a slit, a first shading diaphragm, a first lens group, a second shading diaphragm, a second lens group, a third shading diaphragm and a detection surface from the transmission direction of light.
2. The lens group of claim 1, wherein the first lens group has a focal length of 100mm to 150mm, which is the long focal length.
3. The chromatic lens group of large axial chromatic aberration of claim 1, wherein the first lens group comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens coaxially in this order.
4. The lens group of claim 3, wherein:
the first lens is a negative focal length lens, and the focal length range is-250 mm to-200 mm;
the second lens is a positive focal length lens, and the focal length range is 100mm to 150mm;
the third lens is a positive focal length lens, and the focal length range is 180 mm-220 mm;
the fourth lens is a negative focal length lens, and the focal length value range is-100 mm to-140 mm;
the fifth lens is a positive focal length lens, and the focal length value range is 200mm to 240mm;
the sixth lens is a positive focal length lens, and the focal length range is 160mm to 200mm;
the seventh lens is a negative focal length lens, and the focal length value range is-1000 m to-1200 mm.
5. The lens group of claim 3, wherein:
the first lens is a plano-concave lens, and the concave surface of the first lens faces the object space;
the second lens is a positive meniscus lens, and the convex surface faces the image space;
the third lens is a positive meniscus lens, and the convex surface faces the object space;
the fourth lens is a biconcave lens;
the fifth lens is a positive meniscus lens, and the convex surface faces the image space;
the sixth lens is a plano-convex lens, and the convex surface of the sixth lens faces the object space;
the seventh lens is a negative meniscus lens, and the convex surface faces the image space.
6. The large axial chromatic aberration dispersing lens group of claim 1, wherein the focal length of the second lens group is a long focal length, and the focal length ranges from 100mm to 150mm.
7. The dispersive lens group with large axial chromatic aberration of claim 1, wherein the second lens group comprises an eighth lens, a ninth lens, a tenth lens, an eleventh lens, a twelfth lens, a thirteenth lens and a fourteenth lens coaxially in sequence.
8. The lens group of claim 7, wherein:
the eighth lens is a negative focal length lens, and the focal length ranges from-330 mm to-350 mm;
the ninth lens is a positive focal length lens, and the focal length range is 200mm to 230mm;
the tenth lens is a positive focal length lens, and the focal length value range is 170mm to 200mm;
the eleventh lens is a negative focal length lens, and the focal length value range is-130 mm to-150 mm;
the twelfth lens is a positive focal length lens, and the focal length value range is 150mm to 180mm;
the thirteenth lens is a positive focal length lens, and the focal length value range is 140mm to 170mm;
the fourteenth lens is a negative focal length lens, and the focal length value range is-160 mm to-190 mm.
9. The large axial chromatic aberration dispersing lens group of claim 7, wherein:
the eighth lens is a negative meniscus lens, and the convex surface faces the object space;
the ninth lens is a plano-convex lens, and the convex surface of the ninth lens faces the image space;
the tenth lens is a positive meniscus lens, and the convex surface faces the object space;
the eleventh lens is a biconcave lens;
the twelfth lens is a biconvex lens;
the thirteenth lens is a positive meniscus lens, and the convex surface faces the object space;
the fourteenth lens is a plano-concave lens, and the concave surface faces the object space.
10. The large axial chromatic aberration dispersing lens group of claim 1, wherein the object, the slit is a rectangular light shielding diaphragm, the length of the slit is 5mm to 20mm, and the width of the slit is 5 μm to 25 μm.
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| CN202221686873.9U CN217846758U (en) | 2022-07-01 | 2022-07-01 | Dispersive lens group with large axial chromatic aberration |
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| CN202221686873.9U CN217846758U (en) | 2022-07-01 | 2022-07-01 | Dispersive lens group with large axial chromatic aberration |
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