CN115792381A - Device and method for precisely measuring load coefficient by adopting combined quantum Hall resistor - Google Patents

Device and method for precisely measuring load coefficient by adopting combined quantum Hall resistor Download PDF

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CN115792381A
CN115792381A CN202211482898.1A CN202211482898A CN115792381A CN 115792381 A CN115792381 A CN 115792381A CN 202211482898 A CN202211482898 A CN 202211482898A CN 115792381 A CN115792381 A CN 115792381A
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quantum hall
resistor
resistance
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CN115792381B (en
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鲁云峰
杨镇宇
赵建亭
贺青
翟昌伟
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National Institute of Metrology
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Abstract

The invention discloses a device and a method for precisely measuring a load coefficient by adopting a combined quantum Hall resistor, wherein the device comprises the following steps: a current comparator resistance bridge and a combined quantum Hall resistance device; two poles of the active current source are respectively connected with the head end of the main winding and one end of the combined quantum Hall resistance device; two poles of the driven current source are respectively connected with the head end of the secondary winding and one end of the measured resistor; two ends of the null indicator are respectively connected to the combined quantum Hall resistance device and the measured resistor; the unbalanced magnetic flux detector induces unbalanced magnetic flux of the main winding and the auxiliary winding during resistance comparison through the detection coil, and the other end of the unbalanced magnetic flux detector is fed back to the driven current source; the reference standard selects quantum Hall resistors without load effect and adopts a combined quantum Hall resistor device to combine a plurality of quantum Hall resistors in a unique mode of series-parallel connection for completing resistance comparison under more power. The invention can realize high-accuracy determination of the resistance load coefficient under the upper limit of wide load.

Description

Device and method for precisely measuring load coefficient by adopting combined quantum Hall resistor
Technical Field
The invention belongs to the field of metering and testing instruments, and particularly relates to a resistance load coefficient precision measurement device and method.
Background
The resistor is one of the most common electrical components, and the high-accuracy resistor plays an important role in the fields of precision measurement and the like. For this reason, the international metering world has started research on replacing the traditional physical resistance standard with the quantum hall resistance standard after 1990, and the Quantum Hall Resistance (QHR) natural standard has become the internationally recognized highest resistance metering standard so far. The basic structure of the quantum Hall resistor is 8-pin Chinese character feng shape called Hall bar, as shown in FIG. 1, wherein 1# -8# are pins. Under normal working conditions, the 1# -5# end is electrified, and the 2# -8# end, the 3# -7# end and the 4# -6# end measure voltages. Particularly, in order to further expand the freedom of the quantum hall resistor on the resistance value, a combined quantum hall resistor is provided, which obtains the special forms of different reference resistance values through the combination mode of series connection and parallel connection of different quantum hall resistors on the basis of a single quantum hall resistor, and the quantum hall resistor with the decimal resistance value is realized internationally.
The resistance load effect is one of the important characteristics of the resistor, and is represented as resistance change caused by heating when different currents flow, and is specifically represented by a load coefficient. The relative resistance change amount per unit power consumption is generally regarded as the resistance load factor. When the resistor is used as a precision measurement standard, a reference resistor, a critical component of an instrument and the like, the influence caused by the load effect cannot be ignored, and therefore, the determination of the load factor of the resistor is of great significance. However, for the measurement of the load factor with high accuracy, how to find the reference source of the resistance which remains unchanged under different currents is always used as the key to be solved urgently in this link.
Disclosure of Invention
The invention aims to provide a device and a method for precisely measuring a load coefficient by adopting a combined quantum Hall resistor, so as to realize high-accuracy measurement of the resistance load coefficient.
In order to achieve the above object, a first aspect of the present invention provides an apparatus for precisely measuring a load factor by using a combined quantum hall resistor, comprising: the device comprises a current comparator resistance bridge, a combined quantum Hall resistance device and a measured resistor;
the current comparator resistance bridge comprises a driving current source, a driven current source, a null indicator, an unbalanced flux detector, a main winding and an auxiliary winding;
two poles of the active current source are respectively connected with the head end of the main winding and one end of the combined quantum Hall resistance device, and the tail end of the main winding is connected with the other end of the combined quantum Hall resistance device;
two poles of the driven current source are respectively connected with the head end of the auxiliary winding and one end of the resistor to be tested, and the tail end of the auxiliary winding is connected with the other end of the resistor to be tested;
two ends of the zero indicator are respectively connected to the combined quantum Hall resistance device and the tested resistor, and the zero indicator is used for indicating a differential pressure signal between the combined quantum Hall resistance device and the tested resistor;
the unbalanced magnetic flux detector detects unbalanced magnetic flux of the main winding and the auxiliary winding during current comparison through a detection coil, one end of the unbalanced magnetic flux detector is connected to a driven current source, and the unbalanced magnetic flux detector feeds the detected unbalanced magnetic flux as a feedback quantity back to the driven current source so as to maintain the stability of bridge comparison;
the combined quantum Hall resistor device is formed by connecting a plurality of quantum Hall resistors in series and parallel, and the resistance value of the combined quantum Hall resistor device is the same as that of a single quantum Hall resistor;
and when the load factor of the measured resistor is measured, the combined quantum Hall resistor device is used as a reference standard of the current comparator resistor bridge.
Preferably, the number of the quantum hall resistors forming the combined quantum hall resistor device is determined by the power range to be evaluated by the measured resistor;
the combined quantum Hall resistor comprises n 2 N is not less than 2, n is the quantum Hall resistance 2 The quantum Hall resistors are combined in a series-parallel mode in a crossed mode to form the combined quantum Hall resistor; the upper limit circulating current of the combined quantum Hall resistance device is n times of the upper limit circulating current of a single quantum Hall resistance, and the upper limit ratio power of the combined quantum Hall resistance device is n times of the upper limit circulating current of the single quantum Hall resistance 2 And (4) doubling.
Preferably, the quantum Hall resistor has no load effect in the up-current limiting current.
Preferably, the current comparator resistance bridge is a low-temperature current comparator resistance bridge, a direct current comparator resistance bridge or a low-frequency current comparator resistance bridge.
Preferably, the turns ratio between the primary winding and the secondary winding is 2065, or 4001, or 6066 -8
In a second aspect, the present invention provides a method for precisely measuring a load factor of a resistor, which utilizes the apparatus for precisely measuring a load factor by using a combined quantum hall resistor of the first aspect, and the method includes:
s1: the active current source leads main current I to the main winding, wherein the main current I needs to be less than or equal to the upper limit circulating current of the combined quantum Hall resistance device, the driven current source leads auxiliary current to the auxiliary winding, the ratio of the auxiliary current to the main current is equal to the turn ratio of the main winding to the auxiliary winding, the combined quantum Hall resistance device is used as a reference standard, and the proportional value of the measured resistance to the reference standard under one power P is measured;
s2: the main current is gradually increased according to the set current multiplying power increasing step length, the step S1 is respectively repeated under different main currents, and the resistance proportion values of the measured resistance and the reference standard at a plurality of power comparison points are measured; the upper limit of the main current is the upper limit circulating current of the combined quantum Hall resistance device;
s3: and obtaining actual resistance values of the measured resistor at different power comparison points according to the steps S1 and S2, and obtaining a resistance value fluctuation curve and a load coefficient of the measured resistor in a data fitting mode based on the actual resistance values of the measured resistor at different power points.
Preferably, the data fitting is by a least squares method.
The invention has the beneficial effects that:
the invention relates to a resistance load factor precision measuring device which comprises a current comparator resistance bridge, a combined quantum Hall resistance device and a measured resistor, wherein the combined quantum Hall resistance device is formed by combining a plurality of quantum Hall resistors in a series-parallel unique mode, the influence of series-parallel contact resistors is reduced to be extremely low, the upper limit circulating current is improved, the resistance value identical to that of a single quantum Hall resistor is maintained, when the measured resistor is subjected to load factor measurement, the combined quantum Hall resistance device is used as a reference standard for comparison of the resistance bridge, the upper limit of a load when the load factor of the measured resistor is measured can be effectively improved, and meanwhile, the no-load effect of the quantum Hall resistor is utilized to improve the measurement precision.
In the precision measurement method for the resistance load coefficient, because the reference standard selects the combined quantum Hall resistor device without the load effect, the upper limit circulating current is high, the resistance bridge of the current comparator can be used for completing the comparison and measurement of the measured resistor for multiple times under different powers, and finally the resistance value change curve and the load coefficient of the measured resistor are obtained by fitting the measured data, so that the high-accuracy measurement of the resistance load coefficient can be realized.
The system of the present invention has other features and advantages which will be apparent from or are set forth in detail in the accompanying drawings and the following detailed description, which are incorporated herein, and which together serve to explain certain principles of the invention.
Drawings
The above and other objects, features and advantages of the present invention will become more apparent by describing in more detail exemplary embodiments thereof with reference to the attached drawings, in which like reference numerals generally represent like parts.
Fig. 1 shows a basic structural diagram of a quantum hall resistor.
Fig. 2 shows a schematic structural diagram of an apparatus for precisely measuring a load factor by using a combined quantum hall resistor according to the present invention.
Fig. 3 shows a schematic structural diagram of a combined quantum hall resistor including 4 quantum hall resistors in an embodiment of the present invention.
Fig. 4 shows a schematic structural diagram of a combined quantum hall resistor including 9 quantum hall resistors in an embodiment of the present invention.
Detailed Description
The invention will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
Example 1
As shown in fig. 2, the present embodiment provides a precision measuring apparatus for resistance load factor, comprising: the current comparator comprises a resistance bridge 9, a combined quantum Hall resistance device 7 and a measured resistor 8;
the current comparator resistance bridge 9 comprises a driving current source 1, a driven current source 3, a null indicator 6, an unbalanced flux detector 2, a main winding 4 and an auxiliary winding 5;
two poles of the active current source 1 are respectively connected with the head end of the main winding 4 and one end of the combined quantum Hall resistance device 7, and the tail end of the main winding 4 is connected with the other end of the combined quantum Hall resistance device 7;
two poles of the driven current source 3 are respectively connected with the head end of the secondary winding 5 and one end of the measured resistor 8, and the tail end of the secondary winding 5 is connected with the other end of the measured resistor 8;
two ends of the zero indicator 6 are respectively connected to the combined quantum hall resistor device 7 and the measured resistor 8, and the zero indicator 6 is used for indicating a differential pressure signal between the combined quantum hall resistor device 7 and the measured resistor 8;
one end of the unbalanced magnetic flux detector 2 detects unbalanced magnetic flux when the main winding 4 and the sub-winding 5 are current-aligned through a detection coil, the other end of the unbalanced magnetic flux detector 2 is connected to the driven current source 3, the unbalanced magnetic flux detector 2 feeds back the detected unbalanced magnetic flux as a feedback quantity to the driven current source 3, and stability of bridge alignment is maintained.
The quantity of the quantum Hall resistors forming the combined quantum Hall resistor device is determined by the power range to be evaluated by the measured resistor; the combined quantum Hall resistance device may include n 2 Quantum Hall resistance, n is not less than 2, n 2 The quantum Hall resistors are combined in a series-parallel mode in a crossed mode to form a combined quantum Hall resistor; the upper limit circulating current of the combined quantum Hall resistance device is n times of the upper limit circulating current of a single quantum Hall resistance, and the upper limit measuring power of the combined quantum Hall resistance device is n times of the upper limit circulating current of the single quantum Hall resistance 2 And (4) doubling. When the load factor of the measured resistor 8 is measured, the combined quantum Hall resistance device 7 is used as a reference standard for comparison of the current comparator resistance bridge 9.
As shown in fig. 1, a single quantum Hall resistor generally has 8 pins in a Hall bar shape, wherein one current pin and 3 voltage pins on one side form a resistor head end, and the rest form a resistor tail end. The combined quantum Hall resistance device is formed by connecting a plurality of quantum Hall resistance devices in series and parallel, wherein 2 the series connection of the quantum Hall resistance devices needs to connect a head end current pin of one device to a tail end current pin of the other device, and simultaneously connect two voltage pins at the head end with two voltage pins at the tail end of the other device; 2 quantum Hall resistance devices are connected in parallel, the current pins at the head ends of the two devices need to be connected, and the two voltage pins at the head ends of the two devices need to be connected.
In this embodiment, the combined quantum hall resistor device 7 includes 4 quantum hall resistors, and the 4 quantum hall resistors are combined in series-parallel connection in a cross manner to form the combined quantum hall resistor 7; the upper limit circulating current of the combined quantum Hall resistor 7 is 2 times of the upper limit circulating current of a single quantum Hall resistor. Preferably, the quantum Hall resistance material is gallium arsenide, the upper limit circulation current of a single quantum Hall resistance is 38.75uA, and the quantum Hall resistance has no load effect in the upper limit circulation current.
Specifically, as shown in fig. 3, the combined quantum hall resistance device 7 is composed of 4 quantum hall resistances: QHR-1, QHR-2, QHR-3 and QHR-4, wherein QHR-1 is connected with QHR-3, QHR-2 is connected with QHR-4 in parallel, QHR-1 is connected with QHR-2, QHR-3 is connected with QHR-4 in series, and then connected together in cross combination to form a serial-parallel connection mode between two devices, the unique connection mode not only reduces the influence of the contact resistance of the series-parallel leads to be extremely low, but also improves the upper limit current of the sample by two times, maintains the same resistance value as the single quantum Hall resistor, and improves the upper limit power during resistor comparison.
In other embodiments, when the power range required to be evaluated by the measured resistance is larger, the combined quantum hall resistance device can also adopt 9, 16, 25 and the like n 2 The quantum Hall resistors with the number are combined in a series-parallel connection mode in a crossed mode to form a combined quantum Hall resistor device. As shown in fig. 4, the combined quantum hall resistor device is formed by 9 quantum hall resistors QHR-1 to QHR-9, the upper limit flowing current of the combined quantum hall resistor device is 3 times the upper limit flowing current of a single quantum hall resistor, and the upper limit measurement power of the combined quantum hall resistor device is 9 times the upper limit measurement power of the single quantum hall resistor.
In this embodiment, the current comparator resistance bridge 9 is a low-temperature current comparator resistance bridge, and in other embodiments, the current comparator resistance bridge 9 may also be a direct current comparator resistance bridge or a low-frequency current comparator resistance bridge.
In this embodiment, the number of turns W of the main winding 4 in the current comparator resistance bridge 9 1 Number of turns W of secondary winding 5 2 Turn ratio W between 1 /W 2 4001 -8 . In other embodiments, the turns between the primary winding 4 and the secondary winding 5The ratio of ratios can also be 2065 -8
In this embodiment, two ends of the nulling instrument 6 are respectively connected to the combined quantum hall resistor device 7 and the measured resistor 8, and a differential voltage formed between the two is indicated, and the nulling instrument 6 in this embodiment is a nanovoltmeter.
In this embodiment, the unbalanced magnetic flux detector 2 uses a superconducting quantum interferometer (SQUID), and the unbalanced magnetic flux detector 2 detects unbalanced magnetic flux between the main winding 4 and the auxiliary winding 5 in the current comparator resistance bridge 9 through the detection coil, and then feeds the unbalanced magnetic flux back to the driven current source 3, so that the current proportion of the two windings of the current comparator resistance bridge 9 during resistance comparison is stable and balanced.
Example 2
The present embodiment provides a precision measurement method of a resistance load factor, which uses the precision measurement device of embodiment 1, and the measurement method includes the following steps:
s1: the method comprises the following steps that a main current I is introduced into a main winding 4 in a resistance bridge by an active current source 1, wherein the main current I needs to be less than or equal to the upper limit circulation current of a combined quantum Hall resistance device, an auxiliary current is introduced into an auxiliary winding 5 in the resistance bridge by a driven current source 3, the ratio of the auxiliary current to the main current is equal to the turn ratio of the main winding to the auxiliary winding, and the ratio of a measured resistor 8 to a reference standard under one-time power P is measured by taking a combined quantum Hall resistance device 7 as a reference standard;
specifically, this step is a comparison measurement performed at one time of power, i.e., the flowing current I (38.74 uA).
The active current source 1 supplies current I to the main winding 4 (namely the combined quantum Hall resistance device 7 side), the selected current in the embodiment is 38.74uA, and the driven current source 3 (3) is based on the turn ratio W of the main winding to the auxiliary winding 5 1 :W 2 A proportional current IW is led to the secondary winding 5 (namely the side of the measured resistor 8) 1 /W 2 Completion of 1 (1) 2 ) And comparing the resistance under the condition of double power, and measuring the resistance ratio of the measured resistance 8 and the reference standard at a power-doubled comparison point.
S2: the main current is gradually increased according to the set current multiplying power increasing step length, the step S1 is respectively repeated under different main currents, and the resistance proportion values of the measured resistance 8 and the reference standard at a plurality of power comparison points are measured; the upper limit of the main current is the upper limit circulating current of the combined quantum Hall resistance device 7;
specifically, this step is performed first by a comparative measurement in the case of 2.25 times the power, i.e., the flowing current of 1.5I.
The active current source 1 leads current 1.5I to the main winding 4 (namely the combined quantum Hall resistance device 7 side), the current selected in the embodiment is 58.11uA, and the driven current source 3 is based on the turn ratio W of the main winding to the auxiliary winding 5 1 :W 2 A proportional current 1.5IW is introduced to the secondary winding 5 (namely the side of the measured resistor 8) 1 /W 2 Completion of 2.25 (1.5) 2 ) Comparing the resistance under the condition of double power; the resistance ratio of the measured resistance 8 to the reference at the 2.25 power comparison point is measured.
Then, comparison measurement is carried out under the condition of 4 times of power, namely, the flowing current 2I.
The active current source 1 supplies current 2I to the main winding 4 (namely the combined quantum Hall resistance device 7 side), the current selected in the embodiment is 77.48uA, and the driven current source 3 is based on the winding ratio W 1 :W 2 A proportional current 2IW is introduced to the secondary winding 5 (i.e. the side of the measured resistor 8) 1 /W 2 Completion of 4 (2) 2 ) Comparing the resistance under the condition of double power; and measuring the resistance ratio of the measured resistance 8 to the reference standard at the 4-time power comparison point.
S3: and obtaining actual resistance values of the measured resistor 8 at different comparison power points according to the multiple resistor ratios measured in the steps S1 and S2, and then obtaining a resistance value fluctuation curve and a load coefficient curve of the measured resistor 8 in a data fitting mode.
Specifically, the present step performs data fitting processing on the measurement data obtained in steps S1 and S2 by using the least square method.
According to the resistance ratio between the measured resistance 8 and the combined quantum Hall resistance 7 measured by the three comparison measurements of the steps S1 and S2, the measured resistance 8 under the power of 1 time, the power of 2.25 times and the power of 4 times is calculatedActual resistance value { R 1P ,R 2.25P ,R 4P And is denoted as { x } 1 ,x 2 ,x 3 }; the power point { P,2.25P,4P } used in the test is denoted as { P } 1 ,p 2 ,p 3 Then, the method of least square method is adopted to carry out x k And p k And (6) performing data fitting. The steps of data fitting and analysis are as follows:
let the fitting function be
f(p)=x 1 (1+η(p i -p 1 )) (1)
To make the function at p i Value f (p) of i ) And track data x i Close to, the function (1) at each power point p i The sum of squared residuals at (d) is:
Figure BDA0003962452820000091
when the equation (2), i.e., the sum of squared residuals, is minimum, i.e., the best-fit curve is obtained, η in this case is the load factor; simultaneously according to the value of the measured resistor 8 { R 1P ,R 2.25P ,R 4P And corresponding power { P } 1 ,P 2.25 ,P 4 The power-resistance curve can be drawn.
Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments.

Claims (7)

1. The utility model provides an adopt device of combination formula quantum hall resistance precision measurement load factor which characterized in that includes: the device comprises a current comparator resistance bridge, a combined quantum Hall resistance device and a measured resistor;
the current comparator resistance bridge comprises a driving current source, a driven current source, a null indicator, an unbalanced flux detector, a main winding and an auxiliary winding;
the two poles of the active current source are respectively connected with the head end of the main winding and one end of the combined quantum Hall resistance device, and the tail end of the main winding is connected with the other end of the combined quantum Hall resistance device;
two poles of the driven current source are respectively connected with the head end of the secondary winding and one end of the resistor to be tested, and the tail end of the secondary winding is connected with the other end of the resistor to be tested;
two ends of the zero indicator are respectively connected to the combined quantum Hall resistance device and the tested resistor, and the zero indicator is used for indicating a differential pressure signal between the combined quantum Hall resistance device and the tested resistor;
the unbalanced magnetic flux detector detects unbalanced magnetic flux of the main winding and the auxiliary winding during current comparison through a detection coil, one end of the unbalanced magnetic flux detector is connected to a driven current source, and the unbalanced magnetic flux detector feeds the detected unbalanced magnetic flux as a feedback quantity back to the driven current source so as to maintain the stability of bridge comparison;
the combined quantum Hall resistor device is formed by connecting a plurality of quantum Hall resistors in series and parallel, and the resistance value of the combined quantum Hall resistor device is the same as that of a single quantum Hall resistor;
and when the load factor of the measured resistor is measured, the combined quantum Hall resistor device is used as a reference standard of the resistance bridge of the current comparator.
2. The device of claim 1, wherein the number of quantum hall resistors constituting the combined quantum hall resistance device is determined by the power range to be evaluated by the measured resistor;
the combined quantum Hall resistor comprises n 2 N is more than or equal to 2, n is the quantum Hall resistance 2 The quantum Hall resistors are combined in a series-parallel connection mode in a crossed mode to form the combined quantum Hall resistor; the upper limit circulating current of the combined quantum Hall resistance device is that of a single quantum Hall resistancen times, the upper limit ratio of the combined quantum Hall resistance device is n of a single quantum Hall resistance 2 And (4) doubling.
3. The apparatus of claim 2, wherein the quantum hall resistor has no load effect during up-current limiting of the passing current.
4. The apparatus of claim 1, wherein the current comparator resistive bridge is a cryogenic current comparator resistive bridge, a direct current comparator resistive bridge, or a low frequency current comparator resistive bridge.
5. The apparatus of claim 1, wherein the turns ratio between the primary winding and the secondary winding is 2065, or 4001, or 6066 -8
6. A method for precisely measuring a load factor of a resistor, which uses the device for precisely measuring the load factor by using the combined quantum hall resistor according to any one of claims 1 to 5, wherein the method comprises the following steps:
s1: the active current source leads main current to the main winding, wherein the main current needs to be less than or equal to the upper limit circulating current of the combined quantum Hall resistance device, the driven current source leads auxiliary current to the auxiliary winding, the ratio of the auxiliary current to the main current is equal to the turn ratio of the main winding to the auxiliary winding, the combined quantum Hall resistance device is used as a reference standard, and the proportional value of the measured resistance to the reference standard under one power P is measured;
s2: the main current is gradually increased according to the set current multiplying power increasing step length, the step S1 is respectively repeated under different main currents, and the resistance proportion values of the measured resistance and the reference standard at a plurality of power comparison points are measured; the upper limit of the main current is the upper limit circulating current of the combined quantum Hall resistance device;
s3: and obtaining actual resistance values of the measured resistor at different power comparison points according to the steps S1 and S2, and obtaining a resistance value fluctuation curve and a load coefficient of the measured resistor in a data fitting mode based on the actual resistance values of the measured resistor at different power points.
7. The method of claim 6, wherein the data fitting is performed by least squares.
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