CN115783477A - MO source bottle fixing device and MO source bottle temperature control device - Google Patents
MO source bottle fixing device and MO source bottle temperature control device Download PDFInfo
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- 230000000712 assembly Effects 0.000 claims abstract description 5
- 238000000429 assembly Methods 0.000 claims abstract description 5
- 238000007599 discharging Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 18
- 210000005056 cell body Anatomy 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 13
- 230000008014 freezing Effects 0.000 claims description 12
- 238000007710 freezing Methods 0.000 claims description 12
- 230000004308 accommodation Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 4
- 238000013459 approach Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 210000002421 cell wall Anatomy 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention discloses an MO source bottle fixing device and an MO source bottle temperature control device, wherein the MO source bottle fixing device comprises a groove body, a supporting piece and at least two fixing assemblies, the supporting piece and the fixing assemblies are positioned in a containing cavity of the groove body, each fixing assembly comprises a bearing fixing plate and a connecting rod, the outer end of each connecting rod is hinged to the groove body, the inner end of each connecting rod is hinged to the corresponding bearing fixing plate, the supporting piece is connected with each bearing fixing plate, a containing space capable of containing an MO source bottle is formed by enclosing the plurality of bearing fixing plates and the supporting piece, and the supporting piece can stretch out and draw back so that the bearing fixing plates can approach to or keep away from each other when the connecting rods rotate around the outer ends of the supporting plates. The MO source bottle fixing device and the MO source bottle temperature control device provided by the invention can ensure the stability requirements of source bottles with different specifications under different installation conditions, ensure the external stability of the source bottles in the using process and achieve the purpose of stable source discharge.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to an MO source bottle fixing device and an MO source bottle temperature control device comprising the MO source bottle fixing device.
Background
With the wide application of MOCVD equipment in the semiconductor industry, the MO source bottle temperature control device as one of the supporting facilities is more and more important. MO Source bottle is the special packaging container of MO (Metaorganic Source) Source. An MO source bottle of the MOCVD equipment needs to be placed in an MO source bottle temperature control device to control different temperature conditions of epitaxial growth. MO source bottle temperature control device generally is unified specification, and the MO source bottle specification that each MO source producer provided is not of uniform size, leads to some MO source bottles to place when MO source bottle temperature control device's cell body bottom, and solution will not cross whole source bottle, very obviously does not conform to the installation requirement. In addition, the MO source bottle is pulled by only two tiny gas tubes, so that the source bottle is suspended in the MO source bottle temperature control device and cannot be well supported.
The conventional method is to artificially elevate the bottoms of MO source bottles with different specifications to temporarily support the MO source bottles with different specifications, but the fluctuation of solution in the temperature control device of the MO source bottles still causes the MO source bottles with different specifications to shake, so that metal fatigue at the mounting interface of the MO source bottles is easily caused in the past, a metal pipeline is broken, and further serious consequences of MO source and special gas leakage are caused, most MO sources and special gas are inflammable, explosive and highly toxic, and irreparable huge loss is easily caused to human safety and production safety.
In addition, a part of MO sources used at present are solid sources, cavity regions are easily formed in the solid sources in the using process, the solid sources are prone to collapse due to shaking in the growing process under an unstable external growing environment, source discharge is unstable, concentration fluctuation is caused greatly, and finally the uniformity of a grown product is poor, and loss is caused.
Disclosure of Invention
The invention aims to provide an MO source bottle fixing device which can realize the installation and fixation of MO source bottles with different specifications and avoid the MO source bottles from shaking, thereby reducing the risk of MO source and special gas leakage and ensuring the stability of source outlet.
In order to achieve the above purpose, the present invention provides an MO source bottle fixing device, which includes a tank, a supporting member, and at least two fixing assemblies, where the supporting member and the fixing assemblies are both located in an accommodating cavity of the tank, each fixing assembly includes a supporting fixing plate and a connecting rod, an outer end of the connecting rod is hinged to the tank, an inner end of the connecting rod is hinged to the supporting fixing plate, the supporting member connects to each supporting fixing plate, an accommodating space capable of accommodating an MO source bottle is surrounded by a plurality of supporting fixing plates and the supporting member, and the supporting member is capable of extending and retracting, so that the supporting fixing plates can approach or move away from each other when the connecting rod rotates around the outer end of the connecting rod.
In a preferred embodiment, the support and fixation plate is L-shaped.
In a preferred embodiment, the contact surface of the supporting and fixing plate and the MO source bottle is a circular arc surface.
In a preferred embodiment, the number of said fixing members is seven.
In a preferred embodiment, the support member is an elastic mesh.
In a preferred embodiment, the MO source bottle fixing device further comprises a locking member for locking the connecting rod to prevent the connecting rod from moving.
In a preferred embodiment, the locking piece includes a locking plate and a locking driving piece, the middle part of the locking plate is hinged to the groove body, the locking driving piece is used for driving the locking plate to rotate, a first locking sawtooth is arranged at the inner end of the locking plate, a second locking sawtooth capable of being clamped with the first locking sawtooth is arranged on the connecting rod, and the locking driving piece can drive the locking plate to rotate around the hinge shaft so that the first locking sawtooth and the second locking sawtooth can be clamped and separated.
In a preferred embodiment, the locking driving member includes a locking pull rod, the tank body is provided with a mounting hole, the locking pull rod is slidably mounted in the mounting hole up and down, the lower end of the locking pull rod is hinged to the locking plate, and the upper end of the locking pull rod extends out of the mounting hole in the tank body.
In a preferred embodiment, a scale is arranged at one end of the connecting rod hinged to the groove body, and a pointer pointing to the scale is fixedly mounted on the groove body to indicate the rotating angle of the connecting rod.
In a preferred embodiment, the channel is a telescoping channel.
In a preferred embodiment, the tank body comprises an elastic tank bottom, a plurality of elastic tank walls and a plurality of fixed columns, the lower ends of the fixed columns are fixedly connected to the elastic tank bottom, the elastic tank walls are arranged between two adjacent fixed columns and are fixedly connected with the fixed columns, an elastic tank wall is arranged between every two adjacent fixed columns, each elastic tank wall is fixedly connected with the elastic tank bottom, the elastic tank walls and the fixed columns enclose a containing cavity of the tank body, and the outer ends of the connecting rods are hinged to the fixed columns.
Another object of the present invention is to provide a temperature control device for MO source bottles, which can fix MO source bottles of different specifications, and avoid shaking of the MO source bottles, so as to reduce the risk of leakage of MO source and special gas, and ensure the stability of the output.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
the utility model provides a MO source bottle temperature control device, includes control main part and foretell MO source bottle fixing device, the control main part includes casing, control panel, heating member and temperature detection spare, the solution chamber has on the casing, MO source bottle fixing device's cell body is installed on the casing, the solution chamber with the chamber intercommunication that holds of cell body, heating member and temperature detection spare are installed the solution intracavity, control panel installs on the casing, the heating member with temperature detection spare with control panel connects.
In a preferred embodiment, a freezing point concentration detecting piece is further installed in the solution cavity of the shell, and the freezing point concentration detecting piece is connected with the control panel.
In a preferred embodiment, a liquid level detecting member is further installed in the solution cavity of the housing, the liquid level detecting member is connected with the control panel, a solution adding tank and a solution discharging tank are respectively installed on two sides of the housing, the solution adding tank can convey solution to the solution cavity through a conveying member, and the solution in the solution cavity can be conveyed to the solution discharging tank through a discharging member.
In a preferred embodiment, trapezoidal mounting grooves are respectively formed in two sides of the housing, trapezoidal connecting blocks capable of being inserted into the trapezoidal mounting grooves are respectively arranged on the solution adding tank and the solution discharging tank, and the solution adding tank and the solution discharging tank are respectively inserted into the housing through the trapezoidal connecting blocks.
In a preferred embodiment, the number of the solution addition tanks is two.
In a preferred embodiment, a weight detector capable of contacting with the bottom of the MO source bottle is mounted on the supporting and fixing plate of the MO source bottle fixing device, and the weight detector is connected with the control panel.
The MO source bottle fixing device and the MO source bottle temperature control device are different from the prior art in that when the MO source bottle fixing device and the MO source bottle temperature control device are used, before the MO source bottle is placed in the accommodating space for the first time, the accommodating space defined by the supporting fixing plate and the supporting piece is larger than the outer diameter of the MO source bottle, so that the MO source bottle can be easily placed in the accommodating space, after the MO source bottle is placed in the accommodating space, the bottle bottom of the MO source bottle presses on the supporting piece to generate downward pressure on the supporting piece, the supporting fixing plate is driven to synchronously move downwards along with the downward movement of the supporting piece, and the connecting rod is hinged to the supporting fixing plate, so that the connecting rod rotates downwards around a hinged shaft at the outer end of the connecting rod along with the downward movement of the supporting fixing plate, and meanwhile, inward thrust is generated on the supporting fixing plate, and the supporting piece can stretch, so that the supporting fixing plate is pushed inwards by the connecting rod, and a plurality of supporting fixing plates surround the MO source bottle and abut against the MO source bottle, and the MO source bottle is fixed. When solution in the cell body takes place undulantly, because MO source bottle is supported by a plurality of bearing fixed plates to the bearing fixed plate passes through the connecting rod to be connected with the cell body, it can not be rotatory along with the undulantation of solution under the effect of MO source bottle gravity to connect the dead lever, therefore MO source bottle is under bearing fixed plate, connecting rod and support piece's fixed, even solution takes place undulantly, MO source bottle also can not rock. When MO source bottles with different specifications are placed, the supporting and fixing plate can move towards the center under the action of gravity of the MO source bottles to fix the MO source bottles. Therefore, the MO source bottle fixing device and the MO source bottle temperature control device provided by the invention can realize the installation and fixation of MO source bottles with different specifications, avoid the MO source bottles from shaking, further reduce the risk of MO source and special gas leakage and ensure the stability of the source outlet.
Drawings
FIG. 1 is a schematic structural diagram of a MO source bottle temperature control device according to an embodiment of the present invention;
FIG. 2 is a right side view of the MO source bottle temperature control device shown in FIG. 1;
FIG. 3 is a right side cross-sectional view of the MO source bottle temperature control apparatus shown in FIG. 1;
FIG. 4 is a schematic structural view of a MO source bottle temperature control device according to another embodiment of the present invention, wherein an MO source bottle has been placed in a holding space;
FIG. 5 is a right side cross-sectional view of FIG. 4;
FIG. 6 is a schematic view of an assembly structure provided with a scale connecting rod and a pointer;
FIG. 7 is a schematic view showing the structure of an MO source vial temperature control device in which two source vials are placed;
FIG. 8 is a rear view of a control body of the MO source bottle temperature control device;
FIG. 9 is a right side sectional view of the MO source bottle temperature control device;
FIG. 10 is a right side view of the MO source bottle temperature control device, wherein a trapezoidal mounting groove is provided on the housing of the control main body;
FIG. 11 is a top cross-sectional view of a control body with trapezoidal mounting slots on each side;
FIG. 12 is a schematic view of the structure of the solution discharge tank;
fig. 13 is a plan view of the solution discharge tank shown in fig. 12;
description of reference numerals:
1-a groove body; 2-supporting a fixed plate; 3-a connecting rod; 4-an elastic net; 5-a locking plate; 6-locking the pull rod; 7-mounting holes; 8-graduation; 9-a pointer; 10-elastic groove bottom; 11-an elastic cell wall; 12-fixed columns; 13-a housing; 14-a control panel; 15-a heating element; 16-a temperature probe; 17-a solution chamber; 18-a freezing point concentration probe; 19-a liquid level detection member; 20-solution addition tank; 21-solution drain tank; 22-trapezoidal mounting grooves; 23-a trapezoidal connecting block; 24-a weight detector; 25-MO source bottle.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is further described in detail below with reference to the accompanying drawings in combination with the detailed description. It should be understood that the description is intended to be exemplary only, and is not intended to limit the scope of the present application. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present application.
In the drawings, a schematic diagram of a layer structure according to an embodiment of the application is shown. The figures are not drawn to scale, wherein certain details are exaggerated and possibly omitted for clarity. The various regions, shapes, and relative sizes and positional relationships therebetween shown in the drawings are merely exemplary, and deviations may occur in practice due to manufacturing tolerances or technical limitations, and those skilled in the art may additionally design regions having different shapes, sizes, relative positions, as the actual requirements may dictate.
It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is noted that the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In addition, the technical features mentioned in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.
The MO source bottle fixing device and the MO source bottle temperature control device provided by the present application are described in detail below with reference to the accompanying drawings by specific embodiments and application scenarios thereof.
Referring to fig. 1 and 3, an MO source bottle fixing device according to an embodiment of the present invention includes a tank 1, a supporting member, and at least two fixing members. The supporting piece and the fixing component are both positioned in the accommodating cavity of the tank body 1. The fixing component comprises a bearing fixing plate 2 and a connecting rod 3, as shown in figure 3, the outer end of the connecting rod 3 is hinged to the groove body 1, the inner end of the connecting rod 3 is hinged to the bearing fixing plate 2, and the supporting piece is connected with each bearing fixing plate 2. A plurality of said supporting and securing plates 2 are arranged around said supporting members. The plurality of support fixing plates 2 and the support member define a containing space capable of containing the MO source bottle 25.
The supporting piece can stretch out and draw back, so that when the connecting rod 3 rotates around the outer end (the end hinged with the groove body) of the connecting rod, the bearing fixing plates 2 can be close to or far away from each other. When the connecting rod 3 is rotated upward around the outer end thereof, the supporting members are stretched and the retainer plates 2 are spaced apart from each other, and when the connecting rod 3 is rotated downward around the outer end thereof, the supporting members are shortened and the retainer plates 2 approach each other. When the bearing fixing plate 2 is far away from each other, the bearing fixing plate 2 can be in a translational motion, and can also be far away from the bearing fixing plate 2 in a mode that the upper end of the bearing fixing plate inclines outwards.
The MO source bottle fixing device that above-mentioned embodiment provided is before putting into MO source bottle 25, connecting rod 3 upwards rotates, make the accommodation space that bearing fixed plate 2 and support piece enclose be greater than MO source bottle 25's external diameter, after MO source bottle 25 puts into the accommodation space, the bottle end pressure of MO source bottle 25 is on support piece, produce decurrent pressure to support piece, along with support piece downstream, drive bearing fixed plate 2 downstream thereupon, because connecting rod 3 articulates on bearing fixed plate 2, consequently along with the moving down of bearing fixed plate 2, connecting rod 3 rotates downwards around the articulated shaft of its outer end, produce inward thrust to bearing fixed plate 2 simultaneously, because support piece can stretch out and draw back, consequently bearing fixed plate 2 is inwards promoted by connecting rod 3, a plurality of bearing fixed plates 2 surround and support MO source bottle 25 around MO source bottle 25, thereby the fixed of MO source bottle has been realized.
In the present invention, as shown in fig. 3, it is preferable that the support fixing plate 2 has an L-shape. Will bearing fixed plate 2 sets up to the L shape, after MO source bottle 25 put into the accommodation space that bearing fixed plate 2 and support piece enclose, MO source bottle 25 can press on the part of 2 downside of bearing fixed plate to can guarantee that the surface of bearing fixed plate 2 and MO source bottle 25 contact can be fully with MO source bottle contact.
Further preferably, the contact surface between the supporting and fixing plate 2 and the MO source bottle 25 is a circular arc surface, that is, the vertical inner surface of the supporting and fixing plate 2 is a circular arc surface (the cross section is a circular arc line). For the MO source bottles 25 with different specifications, when the outer diameter (radius) of the MO source bottle 25 is the same as the radius of the arc surface, the support fixing plate 2 can be attached to the outer circumferential surface of the MO source bottle 25, when the outer diameter of the MO source bottle 25 is larger than the radius of the arc surface, the support fixing plate 2 and the outer circumferential surface of the MO source bottle 25 can have two parallel contact lines, and when the outer diameter of the MO source bottle 25 is smaller than the radius of the arc surface, the middle part of the support fixing plate 2 contacts with the outer circumferential surface line of the MO source bottle 25, so that for the MO source bottles 25 with various specifications and sizes, the support fixing plate 2 can firmly fix the MO source bottle 25 and prevent the MO source bottle 25 from shaking.
In a preferred embodiment of the present invention, the number of the fixing members is seven as shown in fig. 4. The number of the fixing components is seven, so that the MO source bottle 25 can be firmly fixed and can be conveniently installed on the control main body of the MO source bottle temperature control device.
In the present invention, the supporting member may be made of any suitable stretchable structure, for example, a stretchable rod, and in the present invention, the supporting member is preferably made of an elastic net 4. The elastic net 4 can be made of materials with high elasticity and toughness, such as rubber.
On the basis of the above embodiment, in another preferred embodiment of the present invention, the MO source bottle fixing device further includes a locking member for locking the connecting rod 3 to prevent the connecting rod 3 from moving. By arranging the locking piece, the connecting rod 3 can be further locked by the locking piece after the MO source bottle 25 is fixed by the fixing device, so that the condition that the MO source bottle 25 shakes due to other possible factors is avoided; or before placing the MO source bottle 25, the connecting rod 3 is adjusted to a proper angle and locked, thereby facilitating the placement of the MO source bottle 25.
The locking member may be any of various known members capable of locking the movement of the connecting rod 3, for example, by providing a latch to prevent relative rotation of the hinge shaft and the connecting rod 3.
In a preferred embodiment of the present invention, as shown in fig. 5, the locking member includes a locking plate 5 whose middle portion is hinged to the housing 1, and a locking driving member for driving the locking plate 5 to rotate. The inner of locking plate 5 is provided with first locking sawtooth, be provided with on the connecting rod 3 can with the second locking sawtooth of first locking sawtooth block, the locking driving piece can drive locking plate 5 rotates around the articulated shaft so that first locking sawtooth and second locking sawtooth block and separation. When the connecting rod 3 needs to be locked, the locking driving piece drives the locking plate 5 to rotate upwards, so that the first locking sawteeth and the second locking sawteeth are clamped; when the connecting rod 3 needs to be unlocked, the locking driving piece drives the locking plate 5 to rotate downwards, so that the first locking sawteeth are separated from the second locking sawteeth.
The lock driving member may be any suitable member capable of driving the lock plate 5 to rotate, such as a motor. In a preferred embodiment, as shown in fig. 5, the locking driving member includes a locking pull rod 6, a mounting hole 7 is formed in the tank body 1, the locking pull rod 6 is slidably mounted in the mounting hole 7 up and down, a lower end of the locking pull rod 6 is hinged to the locking plate 5, and an upper end of the locking pull rod 6 extends out of the mounting hole 7 in the tank body 1. When the locking pull rod 6 is pulled up, the locking plate 5 rotates downward, so that the first locking saw teeth are separated from the second locking saw teeth; when the locking pull rod 6 is pressed down, the locking plate 5 rotates upwards, so that the first locking saw teeth and the second locking saw teeth are clamped.
In this embodiment, through setting up the locking driving piece into locking pull rod 6, can conveniently control locking plate 5 locking connecting rod 3 in the upper end of cell body 1, have simple structure, the reliable advantage of operation.
On the basis of the above embodiment, it is further preferable that, as shown in fig. 6, a scale 8 is provided at one end of the connecting rod 3 hinged to the tank body 1, and a pointer 9 pointing to the scale 8 is fixedly installed on the tank body 1 to indicate the rotation angle of the connecting rod 3. In this embodiment, when the connecting rod 3 is rotated, the pointer 9 is fixed, and thus it is possible to cooperate with the locking member, to set the rotation angle of the connecting rod 3 according to MO source bottles 25 of different specifications, and to indicate by the pointer 9, so that after the specification of the MO source bottles 25 is determined, the connecting rod 3 can be first adjusted to the set angle according to the scale 8 indicated by the pointer 9, and then the connecting rod 3 is locked by the locking member. For example, a single 400g MO source bottle 25 may be adjusted to an angle of 6, a single 4300g MO source bottle 25 may be adjusted to an angle of 2, and two 1200g MO source bottles may be aligned in series to an angle of 4.
Therefore, by the structure, when the MO source bottle is installed, the MO source bottles 25 with different specifications can meet the installation requirement, and convenience is provided for later installation.
In the present invention, it is preferable that the tank 1 is a stretchable tank so that it can be adapted to the fixing of different numbers of MO source bottles 25. The trough body 1 is a telescopic trough body, which means that when the number of the MO source bottles 25 put in at the same time is large, the trough wall of the trough body 1 can move outwards, so that the connecting rod 3 integrally moves outwards, and when the number of the MO source bottles 25 put in is small, the trough wall of the trough body 1 can move inwards, so that the connecting rod 3 integrally moves inwards. As shown in fig. 4, the housing 1 is in a state of being placed in one MO source bottle 25, and as shown in fig. 7, when two MO source bottles 25 are placed in the housing 1, the housing 1 is extended outward, so that the holding space enclosed by the connecting rod 3 and the support fixing plate 2 can hold the two MO source bottles 25.
The tank body 1 may adopt any suitable telescopic structure, preferably, as shown in fig. 7, 9 and 10, the tank body 1 includes an elastic tank bottom 10, a plurality of elastic tank walls 11 and a plurality of fixed columns 12, the lower ends of the fixed columns 12 are fixedly connected to the elastic tank bottom 10, the elastic tank walls 11 are disposed between two adjacent fixed columns 12 and are fixedly connected to the fixed columns 12, an elastic tank wall 11 is disposed between each two adjacent fixed columns 12, each elastic tank wall 11 is fixedly connected to the elastic tank bottom 10, the elastic tank walls 11 and the fixed columns 12 enclose an accommodating cavity of the tank body 1, and the outer ends of the connecting rods 3 are hinged to the fixed columns 12. The receiving chamber may receive a solution. The fixed column 12 is preferably a metal fixed column, and the elastic groove bottom 10 and the elastic groove wall 11 are preferably made of rubber materials.
Based on the MO source bottle fixing device provided by the embodiment, the invention also provides an MO source bottle temperature control device, which comprises a control main body and the MO source bottle fixing device. As shown in fig. 8, 9, and 1, the control body includes a housing 13, a control panel 14, a heating member 15, and a temperature detecting member 16. The MO source bottle fixing device is characterized in that a solution cavity 17 is formed in the shell 13, the groove body 1 of the MO source bottle fixing device is installed on the shell 13, and the solution cavity 17 is communicated with the containing cavity of the groove body 1. When the tank body 1 comprises an elastic tank bottom 10, a plurality of elastic tank walls 11 and a plurality of fixed columns 12, a hole communicated with the solution cavity 17 can be formed in the elastic tank wall 11 between two fixed columns 12; or the elastic groove wall 11 is detached to form a containing cavity of the groove body 1 and a hole of the solution cavity 17, and at the moment, the two fixing columns 12 are respectively fixed on two sides of the shell 13.
As shown in fig. 1, the control panel 14 is fixedly installed at the upper end of the housing 13, and various function keys and a control chip are disposed on the control panel 14. The heating member 15 may be various members capable of heating the solution, and the temperature detecting member 16 may be various suitable temperature sensors, and preferably, as shown in fig. 8 and 9, the heating member 15 is a heating pipe, and the temperature detecting member 16 is a temperature detecting rod. The heating element 15 and the temperature detecting element 16 are installed in the solution chamber 17, and the heating element 15 and the temperature detecting element 16 are fixed on the housing 13 and connected with the control panel 14 in a wired or wireless manner.
As shown in fig. 8 and 9, a freezing point concentration detecting member 18 is further installed in the solution chamber 17 of the housing 13, and the freezing point concentration detecting member 18 is fixed on the housing 13 and connected to the control panel 14 in a wired or wireless manner. By arranging the freezing point concentration detection piece 18, the freezing point and the concentration of the solution can be detected in real time.
Further preferably, as shown in fig. 8 and 9, a liquid level detecting member 19 is further installed in the solution chamber 17 of the housing 13, and the liquid level detecting member 19 is fixed on the housing 13 and connected to the control panel 14 in a wired or wireless manner. The level detector 19 is preferably a level sensor. As shown in fig. 1, 4 and 7, a solution adding tank 20 and a solution discharging tank 21 are respectively installed on both sides of the housing 13, the solution adding tank 20 can transfer a solution to the solution chamber 17 through a transfer member, and the solution in the solution chamber 17 can be transferred to the solution discharging tank 21 through a discharging member. Wherein the discharging member and the conveying member can be a common device capable of conveying solution, such as a water pump.
In this embodiment, through setting up liquid level detection piece 19, can implement the liquid level height who detects solution in the cell body 1, when the solution liquid level is too high, can control during discharge piece discharges jar 21 with unnecessary solution exhaust solution, when the solution liquid level was crossed lowly, can control the transport piece and add the solution in jar 20 with solution and carry to in the solution chamber 17, thereby can avoid the solution in the solution chamber 17 to carry out artifical interpolation or discharge solution in-process when the change appearance of environment increases and decreases, the solution spills and spills on the detector that leaks of board bottom, and lead to the board to be down because of the protection mechanism, cause the possibility of loss.
In order to facilitate the loading and unloading of the solution adding tank 20 and the solution discharging tank 21, it is preferable that, as shown in fig. 10 and 11, trapezoidal mounting grooves 22 are respectively provided on both sides of the housing 13, and referring to fig. 12 and 13, trapezoidal connecting blocks 23 capable of being inserted into the trapezoidal mounting grooves 22 are provided on both the solution adding tank 20 and the solution discharging tank 21, and both the solution adding tank 20 and the solution discharging tank 21 are inserted into the housing 13 through the trapezoidal connecting blocks 23.
As shown in fig. 1, 4 and 7, in the preferred embodiment of the present invention, the number of the solution adding tanks 20 is two. By providing two solution addition tanks 20, the concentration of the solution in the tank body 1 can be adjusted.
Further preferably, as shown in fig. 3, a weight detector 24 capable of contacting the bottom of the MO source bottle 25 is attached to the support fixing plate 2, and the weight detector 24 is connected to the control panel 14. By providing the weight detector 24, the weight variation trend of the MO source bottle can be monitored.
As shown in fig. 1, the control panel 14 can display parameters such as temperature, freezing point, concentration and liquid level of the solution in the tank body 1, and is provided with a switch, a buzzer alarm, a traffic light and other components.
When a solution is added into the groove body 1 of the MO source bottle temperature control device and a switch is started, the weight detector 24, the temperature detection piece 16, the freezing point concentration detection piece 18, the liquid level detection piece 19 and other detectors start to work, and when any one monitoring value is not within a set range, an alarm is given out through a buzzer alarm or a red-green indicating lamp. When the liquid level detecting piece 19 detects that the liquid level of the solution in the tank body 1 is higher than or lower than a set liquid level, the solution adding tank 20 and the solution discharging tank 21 automatically add and discharge the solution correspondingly until the liquid level is normal; when the freezing point concentration detection piece 18 detects that the solution concentration in the cell body 1 is not in the set range, two solution adding tanks 20 will add different solutions into the cell body 1 according to a certain proportion until the solution concentration in the cell body 1 reaches the set range.
The materials involved in the present invention are not limited to a particular material, but it is ensured that the material is wear resistant and must have properties that meet the high cleanliness of a clean room.
In summary, the MO source bottle fixing device and the MO source bottle temperature control device provided by the invention can ensure the stability requirements under different installation conditions when source bottles with different specifications are used, ensure the external stability during the use of the source bottles, and achieve the purpose of stable source output. The purpose of automatic supplement or solution discharge is realized, the stability of the liquid level in the tank body of the device is ensured, and the loss caused by manual operation is avoided. Through setting up multiple monitoring element, guarantee stability and security in process of production, reduced the human cost, improved production efficiency.
The sequence of the above embodiments is merely for convenience of description, and does not represent the merits of the embodiments.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions in the embodiments of the present application.
Claims (17)
1. The utility model provides a MO source bottle fixing device, its characterized in that, includes cell body (1), support piece and two at least fixed subassemblies, support piece and fixed subassembly all are located in the chamber that holds of cell body (1), fixed subassembly includes bearing fixed plate (2) and connecting rod (3), the outer end of connecting rod (3) articulates on cell body (1), the inner of connecting rod (3) with bearing fixed plate (2) are articulated, support piece connects every bearing fixed plate (2), and is a plurality of bearing fixed plate (2) and support piece enclose into the accommodation space that can hold MO source bottle (25), support piece can stretch out and draw back, so that when connecting rod (3) rotate around its outer end, bearing fixed plate (2) can be close each other or keep away from.
2. The MO source bottle holding device according to claim 1, characterized by that the supporting holding plate (2) is L-shaped.
3. The MO source bottle fixing device of claim 2, wherein the contact surface of the supporting and fixing plate (2) and the MO source bottle (25) is a circular arc surface.
4. The MO source vial retaining device of claim 1, wherein the number of retaining assemblies is seven.
5. The MO source bottle holding device according to claim 2, characterized in that said support is an elastic net (4).
6. The MO source bottle holding device according to claim 1, further comprising a locking member locking the connecting rod (3) to prevent the connecting rod (3) from moving.
7. The MO source bottle fixing device of claim 6, wherein the locking piece comprises a locking plate (5) with a middle portion hinged on the tank body (1) and a locking driving piece for driving the locking plate (5) to rotate, a first locking sawtooth is arranged at an inner end of the locking plate (5), a second locking sawtooth capable of being clamped with the first locking sawtooth is arranged on the connecting rod (3), and the locking driving piece can drive the locking plate (5) to rotate around a hinged shaft so that the first locking sawtooth is clamped with and separated from the second locking sawtooth.
8. The MO source bottle fixing device of claim 7, wherein the locking driving member comprises a locking pull rod (6), a mounting hole (7) is formed in the tank body (1), the locking pull rod (6) is slidably mounted in the mounting hole (7) up and down, the lower end of the locking pull rod (6) is hinged to the locking plate (5), and the upper end of the locking pull rod (6) extends out of the mounting hole (7) in the tank body (1).
9. The MO source bottle fixing device of claim 6, wherein a scale (8) is provided at one end of the connecting rod (3) hinged to the tank body (1), and a pointer (9) pointing to the scale (8) is fixedly installed on the tank body (1) to indicate the rotation angle of the connecting rod (3).
10. The MO source bottle holding device according to any one of claims 1-9, wherein the tank (1) is a retractable tank.
11. The MO source bottle fixing device of claim 10, wherein the trough body (1) comprises an elastic trough bottom (10), a plurality of elastic trough walls (11) and a plurality of fixing columns (12), the lower ends of the fixing columns (12) are fixedly connected to the elastic trough bottom (10), the elastic trough walls (11) are arranged between two adjacent fixing columns (12) and are fixedly connected with the fixing columns (12), the elastic trough walls (11) are arranged between every two adjacent fixing columns (12), each elastic trough wall (11) is fixedly connected with the elastic trough bottom (10), the elastic trough bottoms (10), the elastic trough walls (11) and the fixing columns (12) enclose an accommodating cavity of the trough body (1), and the outer ends of the connecting rods (3) are hinged to the fixing columns (12).
12. An MO source bottle temperature control device, characterized in that, including the control main part and according to any one of claims 1-11 MO source bottle fixing device, the control main part includes casing (13), control panel (14), heating member (15) and temperature detection spare (16), solution chamber (17) have on casing (13), MO source bottle fixing device's cell body (1) is installed on casing (13), solution chamber (17) with the chamber intercommunication that holds of cell body (1), heating member (15) and temperature detection spare (16) are installed in solution chamber (17), control panel (14) are installed on casing (13), heating member (15) with temperature detection spare (16) with control panel (14) are connected.
13. The MO source bottle temperature control device according to claim 12, wherein a freezing point concentration detector (18) is further installed in the solution chamber (17) of the housing (13), and the freezing point concentration detector (18) is connected to the control panel (14).
14. The MO source bottle temperature control device according to claim 12, wherein a liquid level detector (19) is further installed in the solution chamber (17) of the housing (13), the liquid level detector (19) is connected to the control panel (14), a solution adding tank (20) and a solution discharging tank (21) are respectively installed on two sides of the housing (13), the solution adding tank (20) can convey the solution to the solution chamber (17) through a conveying member, and the solution in the solution chamber (17) can be conveyed to the solution discharging tank (21) through the discharging member.
15. The MO source bottle temperature control device according to claim 14, wherein trapezoidal mounting grooves (22) are respectively provided on both sides of the housing (13), trapezoidal connection blocks (23) capable of being inserted into the trapezoidal mounting grooves (22) are provided on both the solution adding tank (20) and the solution discharging tank (21), and both the solution adding tank (20) and the solution discharging tank (21) are inserted into the housing (13) through the trapezoidal connection blocks (23).
16. The MO source bottle temperature control apparatus according to claim 14, wherein the number of the solution adding tanks (20) is two.
17. The MO source bottle temperature control device according to claim 12, wherein a weight detector (24) capable of contacting the bottom of the MO source bottle (25) is mounted on the supporting and fixing plate (2) of the MO source bottle fixing device, and the weight detector (24) is connected to the control panel (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211560676.7A CN115783477B (en) | 2022-12-07 | 2022-12-07 | MO source bottle fixing device and MO source bottle temperature control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211560676.7A CN115783477B (en) | 2022-12-07 | 2022-12-07 | MO source bottle fixing device and MO source bottle temperature control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115783477A true CN115783477A (en) | 2023-03-14 |
| CN115783477B CN115783477B (en) | 2024-02-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202211560676.7A Active CN115783477B (en) | 2022-12-07 | 2022-12-07 | MO source bottle fixing device and MO source bottle temperature control device |
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| CN (1) | CN115783477B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204529977U (en) * | 2015-04-02 | 2015-08-05 | 安徽三安光电有限公司 | A kind of MO source bottle |
| CN209828879U (en) * | 2019-04-04 | 2019-12-24 | 安徽三安光电有限公司 | MO source bottle constant temperature bath |
| CN212922533U (en) * | 2020-07-10 | 2021-04-09 | 浙江交通职业技术学院 | Aviation case convenient to it is fixed |
| CN214190690U (en) * | 2020-06-19 | 2021-09-14 | 宜宾市美斯特包装有限公司 | Pop-up wine box packaging structure |
| CN214650001U (en) * | 2021-05-18 | 2021-11-09 | 河北省地质调查院 | Portable atmosphere settlement sampling barrel placing box |
| CN216333538U (en) * | 2021-09-26 | 2022-04-19 | 吴振东 | Medicine bottle placer for health care and health preservation |
| CN217146832U (en) * | 2022-07-11 | 2022-08-09 | 烟台东星集团有限公司 | Protection device of quick multicavity hydraulic cylinder |
-
2022
- 2022-12-07 CN CN202211560676.7A patent/CN115783477B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204529977U (en) * | 2015-04-02 | 2015-08-05 | 安徽三安光电有限公司 | A kind of MO source bottle |
| CN209828879U (en) * | 2019-04-04 | 2019-12-24 | 安徽三安光电有限公司 | MO source bottle constant temperature bath |
| CN214190690U (en) * | 2020-06-19 | 2021-09-14 | 宜宾市美斯特包装有限公司 | Pop-up wine box packaging structure |
| CN212922533U (en) * | 2020-07-10 | 2021-04-09 | 浙江交通职业技术学院 | Aviation case convenient to it is fixed |
| CN214650001U (en) * | 2021-05-18 | 2021-11-09 | 河北省地质调查院 | Portable atmosphere settlement sampling barrel placing box |
| CN216333538U (en) * | 2021-09-26 | 2022-04-19 | 吴振东 | Medicine bottle placer for health care and health preservation |
| CN217146832U (en) * | 2022-07-11 | 2022-08-09 | 烟台东星集团有限公司 | Protection device of quick multicavity hydraulic cylinder |
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|---|---|
| CN115783477B (en) | 2024-02-23 |
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