CN115783477B - MO source bottle fixing device and MO source bottle temperature control device - Google Patents
MO source bottle fixing device and MO source bottle temperature control device Download PDFInfo
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- CN115783477B CN115783477B CN202211560676.7A CN202211560676A CN115783477B CN 115783477 B CN115783477 B CN 115783477B CN 202211560676 A CN202211560676 A CN 202211560676A CN 115783477 B CN115783477 B CN 115783477B
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Abstract
The invention discloses an MO source bottle fixing device and an MO source bottle temperature control device, wherein the MO source bottle fixing device comprises a groove body, a supporting piece and at least two fixing components, the supporting piece and the fixing components are both positioned in an accommodating cavity of the groove body, the fixing components comprise a bearing fixing plate and a connecting rod, the outer end of the connecting rod is hinged on the groove body, the inner end of the connecting rod is hinged with the bearing fixing plate, the supporting piece is connected with each bearing fixing plate, a plurality of bearing fixing plates and supporting pieces enclose an accommodating space capable of accommodating an MO source bottle, and the supporting pieces can stretch and retract, so that the bearing fixing plates can be mutually close to or far away from each other when the connecting rod rotates around the outer end of the connecting rod. The MO source bottle fixing device and the MO source bottle temperature control device provided by the invention can ensure the stability requirements of source bottles with different specifications and under different installation conditions, ensure the external stability of the source bottles in the use process, and achieve the purpose of stable source output.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to an MO source bottle fixing device and an MO source bottle temperature control device comprising the same.
Background
Along with the wide application of MOCVD equipment in the semiconductor industry, an MO source bottle temperature control device serving as one of supporting facilities is also more and more important. MO source bottles are special packaging containers for MO (Metalorganic Source) sources. The MO source bottle of the MOCVD apparatus needs to be placed in a MO source bottle temperature control device to control different temperature conditions of epitaxial growth. The MO source bottle temperature control device is generally of a uniform specification, and MO source bottles provided by MO source manufacturers are different in specification, so that when some MO source bottles are placed at the bottom of a groove body of the MO source bottle temperature control device, a solution can overflow the whole source bottle, and the installation requirement is obviously not met. In addition, the MO source bottle only relies on two tiny gas tubes to hold the source bottle, so that the source bottle is suspended in the MO source bottle temperature control device and cannot be well supported.
The prior method has the advantages that the bottom of the MO source bottle with different specifications is artificially heightened, the purpose of temporarily supporting the MO source bottle with different specifications is achieved, but fluctuation of solution in the temperature control device of the MO source bottle still can cause shaking of the MO source bottle with different specifications, so that metal fatigue at the installation interface of the MO source bottle is extremely easy to cause metal pipeline breakage, serious consequences of leakage of the MO source and the extra gas are caused, most of the MO source and the extra gas are inflammable, explosive and extremely toxic, and irreparable huge losses are easily brought to personal safety and production safety.
In addition, some of the MO sources used at present are solid sources, which are easy to form hollow areas inside during use, and unstable external growth environment is easy to cause collapse of the solid sources due to shaking during growth, so that the source is unstable, further the concentration is greatly fluctuated, and finally the uniformity of the grown product is poor, and loss is caused.
Disclosure of Invention
The invention aims to provide an MO source bottle fixing device which can realize the installation and fixation of MO source bottles with different specifications, and avoid the shaking of the MO source bottle, so that the risks of leakage of an MO source and special gas can be reduced, and the stability of the outlet source is ensured.
In order to achieve the above object, the present invention provides a MO source bottle fixing device, including a tank body, a supporting member and at least two fixing assemblies, wherein the supporting member and the fixing assemblies are located in a receiving cavity of the tank body, the fixing assemblies include a supporting fixing plate and a connecting rod, an outer end of the connecting rod is hinged to the tank body, an inner end of the connecting rod is hinged to the supporting fixing plate, the supporting member is connected to each supporting fixing plate, a plurality of supporting fixing plates and supporting members enclose a receiving space capable of receiving a MO source bottle, and the supporting members are capable of stretching and retracting, so that the supporting fixing plates can approach or separate from each other when the connecting rod rotates around an outer end of the connecting rod.
In a preferred embodiment, the bearing fixing plate is L-shaped.
In a preferred embodiment, the contact surface of the supporting and fixing plate and the MO source bottle is an arc surface.
In a preferred embodiment, the number of said fixing elements is seven.
In a preferred embodiment, the support is an elastic net.
In a preferred embodiment, the MO source bottle holding device further comprises a locking member locking the connecting rod to prevent movement of the connecting rod.
In a preferred embodiment, the locking member comprises a locking plate with a middle part hinged to the groove body and a locking driving member for driving the locking plate to rotate, a first locking saw tooth is arranged at the inner end of the locking plate, a second locking saw tooth capable of being clamped with the first locking saw tooth is arranged on the connecting rod, and the locking driving member can drive the locking plate to rotate around the hinge shaft so that the first locking saw tooth is clamped with and separated from the second locking saw tooth.
In a preferred embodiment, the locking driving member comprises a locking pull rod, the groove body is provided with a mounting hole, the locking pull rod is installed in the mounting hole in a vertically sliding mode, the lower end of the locking pull rod is hinged to the locking plate, and the upper end of the locking pull rod extends out of the mounting hole in the groove body.
In a preferred embodiment, a scale is provided on an end of the connecting rod hinged to the tank body, and a pointer pointing to the scale is fixedly installed on the tank body to indicate the rotation angle of the connecting rod.
In a preferred embodiment, the tank is a telescoping tank.
In a preferred embodiment, the tank body comprises an elastic tank bottom, a plurality of elastic tank walls and a plurality of fixed columns, wherein the lower ends of the fixed columns are fixedly connected to the elastic tank bottom, the elastic tank walls are arranged between two adjacent fixed columns and are fixedly connected with the fixed columns, elastic tank walls are arranged between every two adjacent fixed columns, each elastic tank wall is fixedly connected with the elastic tank bottom, the elastic tank walls and the fixed columns form an accommodating cavity of the tank body, and the outer ends of the connecting rods are hinged to the fixed columns.
The invention further aims to provide the MO source bottle temperature control device which can realize the installation and fixation of MO source bottles of different specifications and avoid the shaking of the MO source bottle, so that the risks of leakage of the MO source and the extra gas can be reduced, and the stability of the outlet source is ensured.
In order to achieve the above purpose, the technical scheme of the invention is realized as follows:
the utility model provides a MO source bottle temperature control device, includes control main part and foretell MO source bottle fixing device, control main part includes casing, control panel, heating element and temperature detection spare, have the solution chamber on the casing, MO source bottle fixing device's cell body is installed on the casing, the solution chamber with the chamber intercommunication holds of cell body, heating element and temperature detection spare are installed the solution intracavity, control panel installs on the casing, the heating element with temperature detection spare with control panel connects.
In a preferred embodiment, a freezing point concentration detecting member is further installed in the solution cavity of the housing, and the freezing point concentration detecting member is connected with the control panel.
In a preferred embodiment, a liquid level detecting member is further installed in the solution cavity of the housing, the liquid level detecting member is connected with the control panel, a solution adding tank and a solution discharging tank are installed on two sides of the housing respectively, the solution adding tank can convey solution to the solution cavity through a conveying member, and the solution in the solution cavity can be conveyed to the solution discharging tank through the discharging member.
In a preferred embodiment, both sides of the shell are respectively provided with a trapezoid mounting groove, the solution adding tank and the solution discharging tank are respectively provided with a trapezoid connecting block which can be inserted into the trapezoid mounting grooves, and the solution adding tank and the solution discharging tank are respectively inserted into the shell through the trapezoid connecting blocks.
In a preferred embodiment, the number of solution addition tanks is two.
In a preferred embodiment, a weight detector capable of contacting with the bottom of the MO source bottle is mounted on the supporting fixing plate of the MO source bottle fixing device, and the weight detector is connected with the control panel.
The MO source bottle fixing device and the MO source bottle temperature control device are characterized in that when the MO source bottle fixing device and the MO source bottle temperature control device are used, before the MO source bottle is put into the bottle for the first time, the containing space surrounded by the supporting fixing plate and the supporting piece is larger than the outer diameter of the MO source bottle, so that the MO source bottle can be easily put into the containing space, after the MO source bottle is put into the containing space, the bottle bottom of the MO source bottle is pressed on the supporting piece, downward pressure is generated on the supporting piece, the supporting fixing plate is driven to synchronously move downwards along with the downward movement of the supporting piece, the connecting rod is hinged to the supporting fixing plate, the connecting rod rotates downwards around the hinge shaft at the outer end of the connecting rod along with the downward movement of the supporting fixing plate, meanwhile, inward pushing force is generated on the supporting fixing plate, and the supporting fixing plate is pushed inwards by the connecting rod. When solution in the cell body fluctuates, because MO source bottle is supported by a plurality of bearing fixed plates to the bearing fixed plate passes through the connecting rod and is connected with the cell body, and the connecting rod can not rotate along with fluctuation of solution under the effect of MO source bottle gravity, so the MO source bottle is under the fixed of bearing fixed plate, connecting rod and support piece, even solution takes place to fluctuate, the MO source bottle also can not rock. When placing the MO source bottle of different specifications, the bearing fixed plate also can remove to the center under the action of MO source bottle's gravity and fixed MO source bottle. Therefore, the MO source bottle fixing device and the MO source bottle temperature control device provided by the invention can realize the installation and fixing of the MO source bottles with different specifications, and avoid the shaking of the MO source bottle, so that the risks of leakage of the MO source and the extra gas can be reduced, and the stability of the outlet source is ensured.
Drawings
FIG. 1 is a schematic diagram of a temperature control device for an MO source bottle according to an embodiment of the present invention;
FIG. 2 is a right side view of the MO source bottle temperature control device shown in FIG. 1;
FIG. 3 is a right side cross-sectional view of the MO source bottle temperature control device shown in FIG. 1;
FIG. 4 is a schematic diagram of a temperature control device for an MO source bottle according to another embodiment of the present invention, wherein an MO source bottle is placed in the accommodating space;
FIG. 5 is a right side cross-sectional view of FIG. 4;
FIG. 6 is a schematic diagram of an assembled structure provided with a graduated connecting rod and a pointer;
FIG. 7 is a schematic diagram of a MO source bottle temperature control device with two source bottles placed therein;
FIG. 8 is a rear view of the control body of the MO source bottle temperature control device;
FIG. 9 is a right side cross-sectional view of the MO source bottle temperature control device;
FIG. 10 is a right side view of the MO source bottle temperature control device with a trapezoidal mounting slot provided in the housing of the control body;
FIG. 11 is a top cross-sectional view of a control body with trapezoidal mounting slots on each side;
FIG. 12 is a schematic view of the structure of the solution discharging tank;
FIG. 13 is a top view of the solution discharge tank shown in FIG. 12;
reference numerals illustrate:
1-a groove body; 2-supporting the fixed plate; 3-connecting rods; 4-an elastic web; 5-locking plate; 6-locking pull rod; 7-mounting holes; 8-scale; 9-pointer; 10-an elastic groove bottom; 11-elastic groove walls; 12-fixing columns; 13-a housing; 14-a control panel; 15-heating element; 16-a temperature probe; 17-a solution chamber; 18-freezing point concentration detecting member; 19-a liquid level detecting member; 20-a solution addition tank; 21-a solution discharge tank; 22-trapezoid mounting grooves; 23-trapezoid connecting blocks; 24-weight detector; 25-MO source bottle.
Detailed Description
For the purposes of making the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail below with reference to the accompanying drawings. It should be understood that the description is only exemplary and is not intended to limit the scope of the present application. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the concepts of the present application.
A layer structure schematic diagram according to an embodiment of the present application is shown in the drawings. The figures are not drawn to scale, wherein certain details may be exaggerated and some details may be omitted for clarity. The various regions, shapes and relative sizes and positional relationships between them shown in the drawings are merely exemplary, may in practice deviate due to manufacturing tolerances or technical limitations, and one skilled in the art may additionally design regions having different shapes, sizes and relative positions as actually required.
It will be apparent that the embodiments described are some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.
In the description of the present application, it should be noted that the terms "first," "second," and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In addition, the technical features described below in the different embodiments of the present application may be combined with each other as long as they do not collide with each other.
The MO source bottle fixing device and the MO source bottle temperature control device provided in the present application are described in detail below with reference to the accompanying drawings by means of specific embodiments and application scenarios thereof.
Referring to fig. 1 and 3, an MO source bottle fixing device according to an embodiment of the present invention includes a tank body 1, a support member, and at least two fixing members. The support and the fixing assembly are both located in the receiving cavity of the tank body 1. The fixing component comprises a bearing fixing plate 2 and a connecting rod 3, as shown in fig. 3, the outer end of the connecting rod 3 is hinged to the groove body 1, the inner end of the connecting rod 3 is hinged to the bearing fixing plate 2, and the supporting piece is connected with each bearing fixing plate 2. A plurality of said holding and fixing plates 2 are arranged around said support. A plurality of bearing fixing plates 2 and supporting pieces enclose a containing space capable of containing the MO source bottle 25.
The support member can be extended and contracted so that the bearing fixing plates 2 can be moved toward or away from each other when the connecting rod 3 is rotated around its outer end (the end of the connecting rod hinged to the tank). When the connecting rod 3 rotates upward around its outer end, the supporting members are stretched, the support fixing plates 2 are far away from each other, and when the connecting rod 3 rotates downward around its outer end, the supporting members are shortened, and the support fixing plates 2 are close to each other. When the supporting and fixing plates 2 are far away from each other, the supporting and fixing plates 2 can translate, and can also be far away from the supporting and fixing plates 2 in a way that the upper ends of the supporting and fixing plates incline outwards.
According to the MO source bottle fixing device provided in the above embodiment, before the MO source bottle 25 is placed, the connecting rod 3 rotates upwards, so that the accommodating space surrounded by the supporting fixing plate 2 and the supporting member is larger than the outer diameter of the MO source bottle 25, when the MO source bottle 25 is placed in the accommodating space, the bottle bottom of the MO source bottle 25 is pressed on the supporting member, downward pressure is generated on the supporting member, the supporting fixing plate 2 is driven to move downwards along with the downward movement of the supporting member, the connecting rod 3 is hinged on the supporting fixing plate 2, so that the connecting rod 3 rotates downwards around the hinge shaft at the outer end of the connecting rod along with the downward movement of the supporting fixing plate 2, meanwhile, inward thrust is generated on the supporting fixing plate 2, and the supporting member can stretch and retract, so that the supporting fixing plate 2 is pushed inwards by the connecting rod 3, and a plurality of supporting fixing plates 2 surround the periphery of the MO source bottle 25, thereby realizing the fixing of the MO source bottle.
In the present invention, as shown in fig. 3, the supporting and fixing plate 2 is preferably L-shaped. Will the bearing fixed plate 2 sets up to L shape, after MO source bottle 25 put into the accommodation space that bearing fixed plate 2 and support piece enclose, MO source bottle 25 can press on the part of bearing fixed plate 2 downside to can guarantee that the surface of bearing fixed plate 2 and MO source bottle 25 contact can fully contact with the MO source bottle.
Further preferably, the contact surface of the supporting and fixing plate 2 with the MO source bottle 25 is an arc surface, that is, the vertical inner surface of the supporting and fixing plate 2 is an arc surface (the cross section is an arc line). For the MO source bottle 25 of different specifications, when the external diameter (radius) of MO source bottle 25 is the same with the radius of this arc, bearing fixed plate 2 can laminate with the outer periphery of MO source bottle 25, when the external diameter of MO source bottle 25 is greater than the radius of this arc, bearing fixed plate 2 can have two parallel contact lines with the outer periphery of MO source bottle 25, when the external diameter of MO source bottle 25 is less than the radius of this arc, bearing fixed plate 2 middle part and the outer periphery line contact of MO source bottle 25, thereby to the MO source bottle 25 of various specification sizes, bearing fixed plate 2 can both play firm fixed MO source bottle 25, prevent the effect that MO source bottle 25 rocked.
In a preferred embodiment of the invention, as shown in fig. 4, the number of the fixing members is seven. The number of fixing members is seven, so that not only the MO source bottle 25 can be firmly fixed, but also the mounting on the control body of the MO source bottle temperature control device is facilitated.
In the present invention, the support may be of any suitable telescopic construction, for example, a telescopic rod, and in the present invention, the support is preferably an elastic net 4. The elastic net 4 can be made of materials with high elasticity and toughness, such as rubber.
On the basis of the above-described embodiments, in another preferred embodiment of the present invention, the MO source bottle holding device further includes a locking member that locks the connection rod 3 to prevent the movement of the connection rod 3. By arranging the locking piece, after the MO source bottle 25 is fixed by the fixing device, the connecting rod 3 can be further locked by the locking piece, so that the condition that the MO source bottle 25 shakes due to other factors possibly occurring is avoided; or the connecting rod 3 is adjusted to an appropriate angle and locked before the MO source bottle 25 is placed, thereby facilitating the placement of the MO source bottle 25.
The locking member can be any of various existing means for locking the movement of the connecting rod 3, such as by providing a latch to prevent relative rotation of the hinge shaft and connecting rod 3.
In a preferred embodiment of the present invention, as shown in fig. 5, the locking member includes a locking plate 5 hinged to the tub 1 at the middle thereof and a locking driving member for driving the locking plate 5 to rotate. The inner end of the locking plate 5 is provided with a first locking saw tooth, the connecting rod 3 is provided with a second locking saw tooth which can be clamped with the first locking saw tooth, and the locking driving piece can drive the locking plate 5 to rotate around the hinge shaft so that the first locking saw tooth can be clamped with and separated from the second locking saw tooth. When the connecting rod 3 needs to be locked, the locking driving piece drives the locking plate 5 to rotate upwards, so that the first locking saw teeth are clamped with the second locking saw teeth; when the connecting rod 3 needs to be unlocked, the locking driving piece drives the locking plate 5 to rotate downwards, so that the first locking saw teeth are separated from the second locking saw teeth.
The locking driving member may be any suitable member capable of driving the locking plate 5 to rotate, such as a motor. In a preferred embodiment, as shown in fig. 5, the locking driving member includes a locking pull rod 6, the slot body 1 is provided with a mounting hole 7, the locking pull rod 6 is slidably mounted in the mounting hole 7 up and down, the lower end of the locking pull rod 6 is hinged with the locking plate 5, and the upper end of the locking pull rod 6 extends out of the mounting hole 7 on the slot body 1. When the lock lever 6 is pulled up, the lock plate 5 is rotated downward so that the first lock serration is separated from the second lock serration; when the locking pull rod 6 is pressed down, the locking plate 5 rotates upward, so that the first locking saw teeth are clamped with the second locking saw teeth.
In this embodiment, the locking driving member is set as the locking pull rod 6, so that the locking plate 5 can be conveniently controlled to lock the connecting rod 3 at the upper end of the tank body 1, and the locking device has the advantages of simple structure and reliable operation.
On the basis of the above embodiment, it is further preferable that, as shown in fig. 6, a scale 8 is provided on an end of the connecting rod 3 hinged to the slot body 1, and a pointer 9 pointing to the scale 8 is fixedly installed on the slot body 1 to indicate a rotation angle of the connecting rod 3. In this embodiment, when the connecting rod 3 rotates, the pointer 9 is fixed, so that it can cooperate with the locking member, the rotation angle of the connecting rod 3 is set according to MO source bottles 25 with different specifications, and the rotation angle is indicated by the pointer 9, so that after the specification of the MO source bottle 25 is determined, the connecting rod 3 can be adjusted to the set angle according to the scale 8 indicated by the pointer 9, and then the connecting rod 3 is locked by the locking member. For example, a single 400g gauge MO source bottle 25 would be adjusted to angle 6, a single 4300g gauge MO source bottle 25 would be adjusted to angle 2, and a double 1200g gauge MO source bottle would be adjusted to angle 4 when connected in series.
Therefore, by the structure, when the MO source bottle is installed, the MO source bottles 25 with different specifications can be ensured to meet the installation requirement, and convenience is provided for later installation.
In the present invention, the tank 1 is preferably a retractable tank, so that it can be adapted to the fixation of different numbers of MO source bottles 25. The tank body 1 is a telescopic tank body, namely the tank wall of the tank body 1 can move outwards when the number of the MO source bottles 25 put in simultaneously is large, so that the connecting rod 3 integrally moves outwards, and the tank wall of the tank body 1 can move inwards when the number of the MO source bottles 25 put in is small, so that the connecting rod 3 integrally moves inwards. As shown in fig. 4, when two MO source bottles 25 are placed in the tank 1, the tank 1 extends outwards, so that the accommodating space enclosed by the connecting rod 3 and the supporting and fixing plate 2 can accommodate two MO source bottles 25, as shown in fig. 7.
The tank body 1 may adopt any suitable telescopic structure, preferably, as shown in fig. 7, 9 and 10, the tank body 1 includes an elastic tank bottom 10, a plurality of elastic tank walls 11 and a plurality of fixing columns 12, the lower ends of the fixing columns 12 are fixedly connected to the elastic tank bottom 10, the elastic tank walls 11 are disposed between two adjacent fixing columns 12 and are fixedly connected to the fixing columns 12, elastic tank walls 11 are disposed between every two adjacent fixing columns 12, each elastic tank wall 11 is fixedly connected to the elastic tank bottom 10, the elastic tank walls 11 and the fixing columns 12 enclose a containing cavity of the tank body 1, and the outer ends of the connecting rods 3 are hinged to the fixing columns 12. The receiving chamber may receive a solution. The fixing column 12 is preferably a metal fixing column, and the elastic groove bottom 10 and the elastic groove wall 11 are preferably made of rubber materials.
Based on the MO source bottle fixing device provided by the above embodiment, the present invention further provides a MO source bottle temperature control device, including a control main body and the MO source bottle fixing device described above. As shown in fig. 8, 9, and 1, the control body includes a housing 13, a control panel 14, a heating member 15, and a temperature detecting member 16. The housing 13 is provided with a solution cavity 17, the tank body 1 of the MO source bottle fixing device is arranged on the housing 13, and the solution cavity 17 is communicated with a containing cavity of the tank body 1. When the tank body 1 includes an elastic tank bottom 10, a plurality of elastic tank walls 11 and a plurality of fixing columns 12, holes for communicating with the solution cavity 17 can be formed in the elastic tank walls 11 between two of the fixing columns 12; or the elastic groove wall 11 is removed to form a hole of the containing cavity and the solution cavity 17 of the groove body 1, and at the moment, the two fixing columns 12 are respectively fixed at two sides of the shell 13.
As shown in fig. 1, the control panel 14 is fixedly installed at the upper end of the housing 13, and various functional keys and control chips are disposed on the control panel 14. The heating element 15 may be any of various elements capable of heating a solution, the temperature detecting element 16 may be any of various suitable temperature sensors, and preferably, as shown in fig. 8 and 9, the heating element 15 is a heating tube, and the temperature detecting element 16 is a temperature detecting rod. The heating element 15 and the temperature detecting element 16 are installed in the solution chamber 17, and the heating element 15 and the temperature detecting element 16 are fixed on the housing 13 and connected with the control panel 14 by a wired or wireless manner.
As shown in fig. 8 and 9, a freezing point concentration detector 18 is also installed in the solution chamber 17 of the housing 13, and the freezing point concentration detector 18 is fixed on the housing 13 and connected with the control panel 14 in a wired or wireless manner. By providing the freeze point concentration sensing element 18, the freeze point and concentration of the solution can be sensed in real time.
Further preferably, as shown in fig. 8 and 9, a liquid level detecting member 19 is further installed in the solution chamber 17 of the housing 13, and the liquid level detecting member 19 is fixed on the housing 13 and connected to the control panel 14 by a wired or wireless manner. The liquid level detector 19 is preferably a liquid level sensor. As shown in fig. 1, 4 and 7, a solution adding tank 20 and a solution discharging tank 21 are respectively installed at both sides of the housing 13, the solution adding tank 20 can deliver a solution to the solution chamber 17 through a delivery member, and the solution in the solution chamber 17 can be delivered to the solution discharging tank 21 through a discharging member. Wherein the discharging member and the transporting member may be a common device capable of transporting a solution such as a water pump.
In this embodiment, by setting the liquid level detecting member 19, it is able to detect the liquid level of the solution in the tank body 1, when the liquid level of the solution is too high, it is able to control the discharging member to discharge the excessive solution from the solution discharging tank 21, and when the liquid level of the solution is too low, it is able to control the conveying member to convey the solution in the solution adding tank 20 to the solution cavity 17, thereby avoiding the possibility that the solution in the solution cavity 17 is splashed onto the water leakage detector at the bottom of the machine and the machine is down due to the protection mechanism, resulting in loss.
In order to facilitate the attachment and detachment of the solution adding tank 20 and the solution discharging tank 21, it is preferable that, as shown in fig. 10 and 11, trapezoidal mounting grooves 22 are provided on both sides of the housing 13, respectively, and, referring to fig. 12 and 13, a trapezoidal connection block 23 capable of being inserted into the trapezoidal mounting grooves 22 is provided on each of the solution adding tank 20 and the solution discharging tank 21, and each of the solution adding tank 20 and the solution discharging tank 21 is inserted into the housing 13 through the trapezoidal connection block 23.
As shown in fig. 1, 4 and 7, in a preferred embodiment of the present invention, the number of the solution adding tanks 20 is two. By providing two solution addition tanks 20, the concentration of the solution in the tank 1 can be adjusted.
Further preferably, as shown in fig. 3, a weight detector 24 capable of contacting with the bottom of the MO source bottle 25 is mounted on the support fixing plate 2, and the weight detector 24 is connected to the control panel 14. By providing the weight detector 24, the tendency of the MO source bottle to change in weight can be monitored.
As shown in fig. 1, the control panel 14 can display parameters such as temperature, freezing point, concentration, liquid level and the like of the solution in the tank body 1, and is provided with a switch, a buzzer alarm, a red-green indicator lamp and the like.
When the solution is added into the tank body 1 of the MO source bottle temperature control device and a switch is started, all the detectors such as the weight detector 24, the temperature detecting piece 16, the freezing point concentration detecting piece 18, the liquid level detecting piece 19 and the like start to work, and when any monitoring value is not within a set range, the alarm is given through a buzzer alarm or a red-green indicator lamp. When the liquid level detection piece 19 detects that the liquid level of the solution in the tank body 1 is higher or lower than the set liquid level, the solution adding tank 20 and the solution discharging tank 21 can automatically add and discharge the solution correspondingly until the liquid level is normal; when the freezing point concentration detecting member 18 detects that the concentration of the solution in the tank body 1 is not within the set range, the two solution adding tanks 20 add different solutions to the tank body 1 in a certain ratio until the concentration of the solution in the tank body 1 reaches the set range.
The materials involved in the present invention are not limited to a particular material, but are required to be resistant to abrasion and must have characteristics that meet the high cleanliness of clean workshops.
In summary, the MO source bottle fixing device and the MO source bottle temperature control device provided by the invention can ensure the stability requirements under different installation conditions when source bottles with different specifications are used, ensure the external stability in the use process of the source bottle, and achieve the purpose of stable source output. The purpose of automatic supplementing or discharging solution is also realized, the stability of the liquid level in the tank body of the device is ensured, and the loss caused by manual operation is avoided. Through setting up multiple monitoring element, ensure stability and security in the production process, reduced the human cost, improved production efficiency.
The order of the above embodiments is merely for convenience of description, and does not represent advantages or disadvantages of the embodiments.
Finally, it should be noted that: although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present application.
Claims (14)
1. The utility model provides a MO source bottle fixing device, its characterized in that includes cell body (1), support piece and two at least fixed subassemblies, support piece and fixed subassembly all are located the holding chamber of cell body (1), fixed subassembly includes bearing fixed plate (2) and connecting rod (3), the outer end of connecting rod (3) articulates on cell body (1), the inner of connecting rod (3) with bearing fixed plate (2) articulates, support piece connects every bearing fixed plate (2), a plurality of bearing fixed plate (2) and support piece enclose into the accommodation space that can hold MO source bottle (25), support piece is elastic net (4), support piece can stretch out and draw back, so that when connecting rod (3) rotate around its outer end, bearing fixed plate (2) can be close or keep away from each other;
the novel locking device is characterized by further comprising a locking piece which locks the connecting rod (3) to prevent the connecting rod (3) from moving, wherein the locking piece comprises a locking plate (5) with the middle part hinged to the groove body (1) and a locking driving piece used for driving the locking plate (5) to rotate, first locking saw teeth are arranged at the inner end of the locking plate (5), second locking saw teeth which can be clamped with the first locking saw teeth are arranged on the connecting rod (3), and the locking driving piece can drive the locking plate (5) to rotate around a hinged shaft to enable the first locking saw teeth to be clamped with and separated from the second locking saw teeth.
2. MO source bottle holder according to claim 1, characterized in that the holding and holding plate (2) is L-shaped.
3. MO source bottle holder according to claim 2, characterized in that the contact surface of the holding and fixing plate (2) with the MO source bottle (25) is an arc surface.
4. The MO source bottle holding device according to claim 1, wherein the number of said holding members is seven.
5. The MO source bottle fixing apparatus according to claim 1, wherein the locking driving member comprises a locking pull rod (6), a mounting hole (7) is provided on the tank body (1), the locking pull rod (6) is slidably mounted in the mounting hole (7) up and down, the lower end of the locking pull rod (6) is hinged with the locking plate (5), and the upper end of the locking pull rod (6) extends out of the mounting hole (7) on the tank body (1).
6. MO source bottle fixing device according to claim 1, characterized in that the end of the connecting rod (3) hinged to the tank body (1) is provided with a scale (8), and the tank body (1) is fixedly provided with a pointer (9) pointing to the scale (8) to indicate the rotation angle of the connecting rod (3).
7. MO source bottle holder according to one of the claims 1 to 6, characterized in that the tank (1) is a telescopic tank.
8. The MO source bottle fixing device according to claim 7, wherein the tank body (1) comprises an elastic tank bottom (10), a plurality of elastic tank walls (11) and a plurality of fixing columns (12), the lower ends of the fixing columns (12) are fixedly connected to the elastic tank bottom (10), the elastic tank walls (11) are arranged between two adjacent fixing columns (12) and fixedly connected to the fixing columns (12), elastic tank walls (11) are respectively arranged between every two adjacent fixing columns (12), each elastic tank wall (11) is fixedly connected to the elastic tank bottom (10), the elastic tank walls (11) and the fixing columns (12) enclose a containing cavity of the tank body (1), and the outer ends of the connecting rods (3) are hinged to the fixing columns (12).
9. MO source bottle temperature control device, characterized in that, include control main part and according to any one of claims 1-8 MO source bottle fixing device, control main part includes casing (13), control panel (14), heating element (15) and temperature detection spare (16), have solution chamber (17) on casing (13), MO source bottle fixing device's cell body (1) is installed on casing (13), solution chamber (17) with cell body (1) hold the chamber intercommunication, heating element (15) and temperature detection spare (16) are installed in solution chamber (17), control panel (14) are installed on casing (13), heating element (15) with temperature detection spare (16) with control panel (14) are connected.
10. MO source bottle temperature control device according to claim 9, characterized in that a freezing point concentration detection element (18) is further installed in the solution cavity (17) of the housing (13), the freezing point concentration detection element (18) being connected with the control panel (14).
11. MO source bottle temperature control device according to claim 9, characterized in that a liquid level detection member (19) is further installed in the solution cavity (17) of the housing (13), the liquid level detection member (19) is connected with the control panel (14), a solution adding tank (20) and a solution discharging tank (21) are respectively installed at two sides of the housing (13), the solution adding tank (20) can convey the solution to the solution cavity (17) through a conveying member, and the solution in the solution cavity (17) can be conveyed to the solution discharging tank (21) through a discharging member.
12. MO source bottle temperature control device according to claim 11, characterized in that both sides of the housing (13) are provided with trapezoid mounting grooves (22) respectively, the solution adding tank (20) and the solution discharging tank (21) are provided with trapezoid connecting blocks (23) which can be inserted into the trapezoid mounting grooves (22), and the solution adding tank (20) and the solution discharging tank (21) are inserted on the housing (13) through the trapezoid connecting blocks (23).
13. MO source bottle temperature control device according to claim 11, characterized in that the number of solution addition tanks (20) is two.
14. MO source bottle temperature control device according to claim 9, characterized in that a weight detector (24) which can be in contact with the bottom of the MO source bottle (25) is mounted on the holding and fixing plate (2) of the MO source bottle fixing device, the weight detector (24) being connected with the control panel (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211560676.7A CN115783477B (en) | 2022-12-07 | 2022-12-07 | MO source bottle fixing device and MO source bottle temperature control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211560676.7A CN115783477B (en) | 2022-12-07 | 2022-12-07 | MO source bottle fixing device and MO source bottle temperature control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115783477A CN115783477A (en) | 2023-03-14 |
| CN115783477B true CN115783477B (en) | 2024-02-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211560676.7A Active CN115783477B (en) | 2022-12-07 | 2022-12-07 | MO source bottle fixing device and MO source bottle temperature control device |
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| Country | Link |
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| CN (1) | CN115783477B (en) |
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| CN204529977U (en) * | 2015-04-02 | 2015-08-05 | 安徽三安光电有限公司 | A kind of MO source bottle |
| CN209828879U (en) * | 2019-04-04 | 2019-12-24 | 安徽三安光电有限公司 | MO source bottle constant temperature bath |
| CN212922533U (en) * | 2020-07-10 | 2021-04-09 | 浙江交通职业技术学院 | Aviation case convenient to it is fixed |
| CN214190690U (en) * | 2020-06-19 | 2021-09-14 | 宜宾市美斯特包装有限公司 | Pop-up wine box packaging structure |
| CN214650001U (en) * | 2021-05-18 | 2021-11-09 | 河北省地质调查院 | Portable atmosphere settlement sampling barrel placing box |
| CN216333538U (en) * | 2021-09-26 | 2022-04-19 | 吴振东 | Medicine bottle placer for health care and health preservation |
| CN217146832U (en) * | 2022-07-11 | 2022-08-09 | 烟台东星集团有限公司 | Protection device of quick multicavity hydraulic cylinder |
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2022
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Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204529977U (en) * | 2015-04-02 | 2015-08-05 | 安徽三安光电有限公司 | A kind of MO source bottle |
| CN209828879U (en) * | 2019-04-04 | 2019-12-24 | 安徽三安光电有限公司 | MO source bottle constant temperature bath |
| CN214190690U (en) * | 2020-06-19 | 2021-09-14 | 宜宾市美斯特包装有限公司 | Pop-up wine box packaging structure |
| CN212922533U (en) * | 2020-07-10 | 2021-04-09 | 浙江交通职业技术学院 | Aviation case convenient to it is fixed |
| CN214650001U (en) * | 2021-05-18 | 2021-11-09 | 河北省地质调查院 | Portable atmosphere settlement sampling barrel placing box |
| CN216333538U (en) * | 2021-09-26 | 2022-04-19 | 吴振东 | Medicine bottle placer for health care and health preservation |
| CN217146832U (en) * | 2022-07-11 | 2022-08-09 | 烟台东星集团有限公司 | Protection device of quick multicavity hydraulic cylinder |
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| Publication number | Publication date |
|---|---|
| CN115783477A (en) | 2023-03-14 |
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