CN115756019A - Temperature control system and method - Google Patents
Temperature control system and method Download PDFInfo
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- CN115756019A CN115756019A CN202211328213.8A CN202211328213A CN115756019A CN 115756019 A CN115756019 A CN 115756019A CN 202211328213 A CN202211328213 A CN 202211328213A CN 115756019 A CN115756019 A CN 115756019A
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Abstract
The invention relates to the technical field of semiconductors, in particular to a temperature control system and a temperature control method. The temperature of the middle circulation liquid of the temperature control system that can reduce by a great extent, especially the influence of high temperature circulation liquid to the water tank temperature, the high temperature resistant requirement of level sensor and insulation material etc. in the reduction water tank improves equipment security and reliability, solves the system design problem of water tank high temperature, reduces the risk that high temperature brought.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a temperature control system and a temperature control method.
Background
In the integrated circuit manufacturing industry, heat exchanger type temperature control equipment for controlling the temperature to be more than 25 ℃ is required to control the temperature of a part needing to maintain a certain high temperature or to mix the temperature of high-temperature liquid and low-temperature liquid. The current high temperature requirement is basically within the range of 20-100 ℃, the new process needs to use the high temperature of more than 100 ℃, and the adopted high temperature type temperature control equipment brings the risk of high temperature scald of the whole circulating system and the requirement of high temperature devices and needs to be met with a larger cost.
The technique of current heat exchanger type temperature control equipment adopts single circulation or dual cycle system, all has the higher and not high temperature resistant problem of level sensor of water tank temperature, owing to need the liquid recovery function in integrated circuit special temperature control equipment, the water tank volume is generally great, consequently brings the inside high temperature scald risk of whole equipment, and all has negative effects to inside electrical part and electronic box temperature. When the existing system is used in a high-temperature interval, liquid in the water tank is high-temperature liquid, and high-temperature risks and high-temperature resistance problems of the liquid level sensor and the heat insulation material exist.
Disclosure of Invention
The invention provides a temperature control system and a temperature control method, which are used for solving one of the technical problems in the prior art, and can reduce the temperature of a middle circulating liquid of the temperature control system to a greater extent, particularly the influence of a high-temperature circulating liquid on the temperature of a water tank, and reduce the high-temperature resistant requirements of a liquid level sensor, a heat insulation material and the like in the water tank.
The invention provides a temperature control system which comprises a heat exchange device, a water tank and a branch pipeline, wherein an outlet of a heat release channel of the heat exchange device is communicated with an inlet of the water tank, an outlet of the water tank is communicated with a load through a first main pipeline, the load is communicated with an outlet of the heat release channel of the heat exchange device through a second main pipeline, and two ends of the branch pipeline are respectively communicated with the first main pipeline and the second main pipeline.
According to the temperature control system provided by the invention, a three-way valve is arranged at the joint of the branch pipeline and the second main pipeline.
According to the temperature control system provided by the invention, the first main pipeline is sequentially provided with the pump body and the heater along the circulating liquid flowing direction.
According to the temperature control system provided by the invention, a first temperature sensor is arranged on the first main pipeline between the position where the branch pipeline is communicated with the first main pipeline and the pump body, so that the opening degree of the three-way valve is controlled according to the detection value of the first temperature sensor.
According to the temperature control system provided by the invention, the first main pipeline between the heater and the load is provided with the second temperature sensor, so that the heating temperature of the heater is controlled according to the detection value of the second temperature sensor.
According to the temperature control system provided by the invention, a third temperature sensor is arranged on the second main pipeline between the communication position of the branch pipeline and the second main pipeline and the load, so that the opening degree of the three-way valve is controlled according to the detection value of the third temperature sensor.
According to the temperature control system provided by the invention, the first main pipeline is connected with the load through the first valve body, the second main pipeline is connected with the load through the second valve body, and the rear part of the first valve body along the direction of the circulating liquid flow is provided with the vent pipe.
The invention also provides a temperature control method, which applies the temperature control system and comprises the following steps:
and controlling the opening proportion of the three-way valve according to the actual temperature value of the circulating liquid after the first main pipeline is merged with the branch pipeline.
According to a temperature control method provided by the invention, the step of controlling the opening proportion of the three-way valve according to the actual temperature value of the circulating liquid after the first main pipeline is merged into the branch pipeline comprises the following steps:
and outputting a PID2 parameter to control the opening of the three-way valve according to the difference between the set temperature value of the circulating liquid after the first main pipeline confluence branch pipeline and the actual temperature value of the circulating liquid after the first main pipeline confluence branch pipeline.
According to the temperature control method provided by the invention, the method further comprises the following steps:
and controlling the output duty ratio of the heater according to the actual temperature value of the circulating liquid at the outlet of the heater.
According to the temperature control method provided by the invention, the controlling the output duty ratio of the heater according to the actual temperature value of the circulating liquid at the outlet of the heater comprises the following steps:
and outputting a PID1 parameter to control the output duty ratio of the heater according to the difference value between the set temperature value of the circulating liquid at the outlet of the heater and the actual temperature value of the circulating liquid at the outlet of the heater.
According to the temperature control method provided by the invention, the method further comprises the following steps:
and controlling the opening degree of the three-way valve according to the actual temperature value of the circulating liquid in front of the second main pipeline shunt branch pipeline.
According to the temperature control method provided by the invention, the step of controlling the opening degree of the three-way valve according to the actual temperature value of the circulating liquid before the second main pipeline branches into the branch pipelines comprises the following steps:
and determining that the variation per second of the actual temperature value of the circulating liquid before the second main pipeline branch pipeline is larger than the first set value, and the time lasts for the set time, reducing the set temperature value of the circulating liquid after the first main pipeline branches into the second set value, or increasing the set value of the PID of the actual temperature value of the circulating liquid after the first main pipeline branches into the first branch pipeline, and keeping the set temperature value of the circulating liquid after the first main pipeline branches into the first branch pipeline unchanged.
According to the temperature control method provided by the present invention, the controlling the opening degree of the three-way valve according to the actual temperature value of the circulating liquid before the second main pipeline branches the branch pipeline further comprises:
and determining that the variation per second of the actual temperature value of the circulating liquid before the branch pipeline of the second main pipeline is smaller than the first set value, and the time lasts for the set time, increasing the set temperature value of the circulating liquid after the branch pipeline of the first main pipeline is merged by the second set value, or reducing the set value of PID of the actual temperature value of the circulating liquid after the branch pipeline of the first main pipeline is merged, and keeping the set temperature value of the circulating liquid after the branch pipeline of the first main pipeline unchanged.
In the temperature control system provided by the invention, a heat release channel, a water tank and a load of a heat exchange device are sequentially communicated to form a circulation loop, wherein high-temperature circulation liquid which completes heat exchange and temperature control in the load flows out of the load and enters the temperature control system, the high-temperature circulation liquid can be divided into two paths when passing through a second main pipeline, one path directly flows into a first main pipeline through a branch pipeline without any heat exchange cooling, the other path passes through the heat release channel of the heat exchange device and exchanges heat with cooling liquid in a heat absorption channel of the heat exchange device for cooling, the cooled circulation liquid flows into the water tank again for heat preservation, then flows out of the water tank and enters the first main pipeline, and then flows into the load after being converged with uncooled high-temperature circulation liquid.
The invention can meet the special high-temperature control of semiconductors above 100 ℃, the flow proportion of high-temperature circulating liquid entering a heat exchange device for cooling can be changed by controlling the flow of a branch pipeline of a water tank in a low-temperature loop formed by the heat exchange device, and the water tank and the high-temperature liquid which is not cooled are mixed to reach the target temperature, so that the temperature of the middle circulating liquid of the temperature control system can be greatly reduced, especially the influence of the high-temperature circulating liquid on the temperature of the water tank, the high-temperature resistant requirements of a liquid level sensor, a heat insulation material and the like in the water tank are reduced, the safety and the reliability of equipment are improved, the design problem of a high-temperature system of the water tank is solved, and the risk brought by high temperature is reduced.
In addition to the technical problems addressed by the present invention, the technical features constituting the technical solutions and the advantages brought by the technical features of the technical solutions described above, other technical features of the present invention and the advantages brought by the technical features of the present invention will be further described with reference to the accompanying drawings or will be understood by the practice of the present invention.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a temperature control system provided by the present invention;
reference numerals are as follows:
100. a heat exchange device; 200. a water tank; 300. a branch pipeline;
400. a first main pipeline; 410. a pump body; 420. a heater; 430. a first temperature sensor; 440. a second temperature sensor; 450. a first valve body;
500. a second main pipeline; 510. a third temperature sensor; 520. a second valve body;
600. a three-way valve; 700. and (4) loading.
Detailed Description
Embodiments of the present invention will be described in further detail with reference to the drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the embodiments of the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the embodiments of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present invention, it should be noted that the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, a fixed connection, a detachable connection, or an integral connection, unless explicitly stated or limited otherwise; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. Specific meanings of the above terms in the embodiments of the present invention may be understood as specific cases by those of ordinary skill in the art.
In embodiments of the invention, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "above," and "over" a second feature may be directly on or obliquely above the second feature, or simply mean that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In addition, in the description of the embodiments of the present invention, unless otherwise specified, "a plurality" and "a plurality" mean two or more, and "a plurality", "several" and "several groups" mean one or more.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of an embodiment of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
As shown in fig. 1, the temperature control system according to the embodiment of the present invention includes a heat exchanging device 100, a water tank 200, and a branch pipe 300, wherein an outlet of a heat releasing channel of the heat exchanging device 100 is communicated with an inlet of the water tank 200, an outlet of the water tank 200 is communicated with a load 700 through a first main pipe 400, the load 700 is communicated with an outlet of the heat releasing channel of the heat exchanging device 100 through a second main pipe 500, and two ends of the branch pipe 300 are respectively communicated with the first main pipe 400 and the second main pipe 500.
In the temperature control system according to the embodiment of the present invention, the heat release channel of the heat exchanging device 100, the water tank 200, and the load 700 are sequentially communicated to form a circulation loop, wherein a high temperature circulation fluid that completes heat exchange temperature control in the load 700 flows out of the load 700 and enters the temperature control system, and can be divided into two paths when passing through the second main line 500, one path directly flows into the first main line 400 through the branch line 300 without any heat exchange cooling, the other path passes through the heat release channel of the heat exchanging device 100 to exchange heat with a cooling fluid in the heat absorption channel of the heat exchanging device 100 for cooling, the cooled circulation fluid flows into the water tank 200 for heat preservation, and then flows out of the water tank 200 and enters the first main line 400, joins with the uncooled high temperature circulation fluid, and then flows into the load 700.
The invention can meet the special high-temperature control of semiconductors with the temperature of more than 100 ℃, the water tank 200 can change the flow proportion of high-temperature circulating liquid which enters the heat exchange device 100 for cooling through the flow control of the branch pipeline 300 in a low-temperature loop formed by the heat exchange device 100, and the high-temperature circulating liquid is mixed with the high-temperature liquid which is not cooled to reach the target temperature, so that the temperature of the middle circulating liquid of the temperature control system can be greatly reduced, particularly the influence of the high-temperature circulating liquid on the temperature of the water tank 200, the high-temperature resistant requirements of a liquid level sensor, a heat insulation material and the like in the water tank 200 are reduced, the safety and the reliability of equipment are improved, the design problem of the high-temperature system of the water tank 200 is solved, and the risk caused by high temperature is reduced.
In this embodiment, the heat absorption path of the heat exchanging device 100 is communicated with a cooling system, the cooling system uses cooling water as a cold source, and the heat exchanging device 100 may employ a plate heat exchanger or a tube cooling water heat exchanger.
According to one embodiment of the present invention, a three-way valve 600 is provided at the junction of the branch conduit 300 and the second main conduit 500. In this embodiment, the three-way valve 600 is disposed on the second main pipeline 500, and the branch pipeline 300 is connected through the three-way valve 600, that is, the high-temperature circulating liquid flowing out of the load 700 in the second main pipeline 500 can be divided into two paths after passing through the three-way valve 600, one path is a low-temperature loop formed by the heat exchanger 100 and the water tank 200, and the other path is a high-temperature loop formed by directly connecting the branch pipeline 300 to the first main pipeline 400. The flow ratio of the high-temperature circulating liquid entering the heat exchanging device 100 for cooling and the high-temperature circulating liquid entering the branch pipeline 300 is controlled by the three-way valve 600, and the mixed circulating liquid flowing into the load 700 in the first main pipeline 400 meets the temperature requirement.
In other embodiments, valve bodies may be disposed on the second main pipe 500 and the branch pipe 300, respectively, so as to control the flow of the high-temperature circulating liquid into the low-temperature loop and the branch pipe 300.
According to an embodiment of the present invention, the first main pipe 400 is provided with a pump body 410 and a heater 420 in sequence along a circulation direction of the circulation fluid. In this embodiment, the low-temperature circulating fluid flowing out of the water tank 200 and the high-temperature circulating fluid flowing out of the branch line 300 are mixed in the first main line 400, and then are pumped by the power of the pump body 410, and enter the load 700 after being temperature-adjusted again by the heater 420. The heater 420 performs high precision temperature control, and then outputs to the load 700 of the main process equipment after passing through a series of sensors of flow, pressure, and temperature, completing a cycle.
According to an embodiment of the present invention, a first temperature sensor 430 is disposed on the first main pipeline 400 between the pump body 410 and the communication position of the branch pipeline 300 and the first main pipeline 400, so as to control the opening degree of the three-way valve 600 according to the detection value of the first temperature sensor 430. In this embodiment, after the low temperature circulation liquid that flows out in the water tank 200 and the high temperature circulation liquid that flows out by branch pipe 300 mix at first main pipeline 400, earlier detect the circulation liquid temperature after mixing through first temperature sensor 430, this position is the circulation liquid temperature of mixing the initial stage, it is more accurate to detect, according to the circulation liquid temperature value that first temperature sensor 430 detected, adjust the aperture proportion of three-way valve 600, promptly in time adjust the flow through cooling and uncooled circulation liquid, and then make the interior whole circulation liquid temperature control precision of temperature control system higher.
According to an embodiment of the present invention, a second temperature sensor 440 is disposed on the first main line 400 between the heater 420 and the load 700 to control the heating temperature of the heater 420 according to a detection value of the second temperature sensor 440. In this embodiment, after the temperature of the mixed circulation liquid is adjusted by the heater 420, the temperature of the circulation liquid is detected by the second temperature sensor 440, and if the temperature does not meet the temperature requirement of the circulation liquid entering the load 700, the heating temperature of the heater 420 is adjusted according to the temperature value of the circulation liquid detected by the second temperature sensor 440, so as to further improve the temperature control accuracy.
According to an embodiment of the present invention, a third temperature sensor 510 is provided on the second main line 500 between the load 700 and a position where the branch line 300 and the second main line 500 communicate with each other, so as to control the opening degree of the three-way valve 600 according to a detection value of the third temperature sensor 510. In this embodiment, the high-temperature circulating liquid flowing out of the load 700 first detects the temperature of the circulating liquid through the third temperature sensor 510, and then is divided into two paths of circulating liquids through the three-way valve 600, and according to the temperature value of the circulating liquid detected by the third temperature sensor 510, the opening ratio of the three-way valve 600 is controlled, that is, the temperature of the circulating liquid which just flows into the temperature control system and is not distributed by the three-way valve 600 is detected, the three-way valve 600 is subjected to feed-forward control through the detection result, and the corresponding control process of the first temperature sensor 430 can be adjusted through the result of the temperature, so that the temperature control precision is higher, and the system safety effect is better.
According to an embodiment of the present invention, the first main pipeline 400 is connected to the load 700 through the first valve body 450, the second main pipeline 500 is connected to the load 700 through the second valve body 520, and the first valve body 450 is provided with a vent pipe at the rear side along the direction of the circulating fluid flow. In this embodiment, the installation of the vent pipe can realize the function of recycling the circulating liquid in the temperature control system and the load 700. Closing the power supply of the system and the process equipment, closing the first valve body 450, opening the second valve body 520, injecting nitrogen or dry compressed air through the vent pipe outside the outlet of the first valve body 450, blowing the circulating liquid in the external pipeline and the load 700 to the second valve body 520, recycling the circulating liquid to the water tank 200 after passing through the three-way valve 600 and the heat exchange device 100, opening the first valve body 450 when the system and the process equipment are used again, and then starting the system and the process equipment to convey the circulating liquid in the water tank 200 to the load 700.
The embodiment of the invention also provides a temperature control method, which is applied to the temperature control system of the embodiment and comprises the following steps:
and controlling the opening ratio of the three-way valve 600 according to the actual temperature value of the circulating liquid after the first main pipeline 400 is merged with the branch pipeline 300.
The temperature control method of the embodiment of the invention is based on a circulation loop consisting of the heat exchange device 100, the water tank 200, the pump body 410, the heater 420, the three-way valve 600 and the load 700. The low temperature circulation liquid that flows out by in the water tank 200 mixes the back with the high temperature circulation liquid that flows out by branch pipe 300 at first main line 400, earlier through the circulation liquid temperature after first temperature sensor 430 detects the mixture, this position is the circulation liquid temperature of mixing the initial stage, it is more accurate to detect, according to the circulation liquid temperature value that first temperature sensor 430 detected, adjust the proportion of 600 apertures of three-way valve, in time adjust the flow through cooling and uncooled circulation liquid promptly, and then make the interior whole circulation liquid temperature control precision of temperature control system higher.
According to an embodiment of the present invention, controlling the opening ratio of the three-way valve 600 according to the actual temperature value of the circulating liquid after the first main pipe 400 joins the branch pipe 300 includes:
and outputting a PID2 parameter to control the opening of the three-way valve 600 according to the difference between the set temperature value of the circulating liquid after the first main pipeline 400 merges with the branch pipeline 300 and the actual temperature value of the circulating liquid after the first main pipeline 400 merges with the branch pipeline 300.
In this embodiment, the PID2 parameter is output based on the difference between the set value of the first temperature sensor 430 and the detection value of the first temperature sensor 430 as an input value, and the opening ratio of the three-way valve 600 is controlled. In other embodiments, the first temperature sensor 430 may also use other control logic to adjust the opening ratio of the three-way valve 600, such as through set mapping conditions.
According to an embodiment provided by the present invention, the temperature control method further includes:
the duty ratio of the output of the heater 420 is controlled according to the actual temperature value of the circulating liquid at the outlet of the heater 420.
In this embodiment, after the temperature of the mixed circulation liquid is adjusted by the heater 420, the temperature of the circulation liquid is detected by the second temperature sensor 440, and if the temperature does not meet the temperature requirement of the circulation liquid entering the load 700, the temperature of the circulation liquid is detected by the second temperature sensor 440, the heating temperature of the heater 420 is adjusted, and the temperature control precision can be further improved.
According to an embodiment provided by the present invention, controlling the output duty cycle of the heater 420 according to the actual temperature value of the circulating liquid at the outlet of the heater 420 comprises:
and outputting a PID1 parameter to control the output duty ratio of the heater 420 according to the difference value between the set temperature value of the circulating liquid at the outlet of the heater 420 and the actual temperature value of the circulating liquid at the outlet of the heater 420.
In the present embodiment, the PID1 parameter is output based on the difference between the set value of the second temperature sensor 440 and the detection value of the first temperature sensor as an input value, and the output duty of the heater 420 is controlled. In other embodiments, the second temperature sensor 440 may also employ other control logic to adjust the output duty cycle of the heater 420, such as through set mapping conditions, etc.
According to an embodiment provided by the present invention, the temperature control method further includes:
and controlling the opening degree of the three-way valve 600 according to the actual temperature value of the circulating liquid before the second main pipeline 500 branches the branch pipeline 300.
In this embodiment, the high-temperature circulating liquid flowing out of the load 700 firstly detects the temperature of the circulating liquid through the third temperature sensor 510, and then is divided into two paths of circulation through the three-way valve 600, according to the temperature value of the circulating liquid detected by the third temperature sensor 510, the opening proportion of the three-way valve 600 is controlled, namely, the temperature of the circulating liquid which just flows into the temperature control system and is not distributed through the three-way valve 600 is detected, the three-way valve 600 is subjected to feedforward control through the detection result, the corresponding control process of the first temperature sensor 430 is adjusted through the result of the temperature, so that the temperature control precision is higher, and the system safety effect is better.
According to an embodiment provided by the present invention, controlling the opening of the three-way valve 600 according to an actual temperature value of the circulating liquid before the second main pipe 500 branches the branch pipe 300 includes:
determining that the variation per second of the actual temperature value of the circulating liquid before the second main pipe 500 branches the branch pipe 300 is greater than the first set value, and the time lasts for the set time, the set temperature value of the circulating liquid after the first main pipe 400 merges the branch pipe 300 is decreased by the second set value, or the set value of the PID of the actual temperature value of the circulating liquid after the first main pipe 400 merges the branch pipe 300 is increased, and the set temperature value of the circulating liquid after the first main pipe 400 merges the branch pipe 300 is unchanged.
According to an embodiment provided by the present invention, controlling the opening of the three-way valve 600 according to an actual temperature value of the circulating liquid before the second main pipe 500 branches the branch pipe 300 further includes:
determining that the variation per second of the actual temperature value of the circulating liquid before the second main pipe 500 branches the branch pipe 300 is smaller than the first set value, and the time lasts for the set time, the set temperature value of the circulating liquid after the first main pipe 400 merges the branch pipe 300 is increased by the second set value, or the set value of the PID of the actual temperature value of the circulating liquid after the first main pipe 400 merges the branch pipe 300 is decreased, and the set temperature value of the circulating liquid after the first main pipe 400 merges the branch pipe 300 is unchanged.
In this embodiment, the first setting value may be a plurality of interval range values, and the second setting value may be an interval range value corresponding to each interval range value of the first setting value.
When in use, the valve body is not limited to be an electric valve, an electromagnetic valve or other valves capable of being opened and closed.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (14)
1. A temperature control system, characterized by: the heat exchange device comprises a heat exchange device, a water tank and a branch pipeline, wherein an outlet of a heat release channel of the heat exchange device is communicated with an inlet of the water tank, an outlet of the water tank is communicated with a load through a first main pipeline, the load is communicated with an outlet of the heat release channel of the heat exchange device through a second main pipeline, and two ends of the branch pipeline are respectively communicated with the first main pipeline and the second main pipeline.
2. The temperature control system of claim 1, wherein: and a three-way valve is arranged at the joint of the branch pipeline and the second main pipeline.
3. The temperature control system of claim 2, wherein: the first main pipeline is sequentially provided with a pump body and a heater along the circulation direction of the circulating liquid.
4. The temperature control system of claim 3, wherein: and a first temperature sensor is arranged on the first main pipeline between the communicated position of the branch pipeline and the first main pipeline and the pump body, so that the opening degree of the three-way valve is controlled according to the detection value of the first temperature sensor.
5. The temperature control system of claim 3, wherein: and a second temperature sensor is arranged on the first main pipeline between the heater and the load so as to control the heating temperature of the heater according to the detection value of the second temperature sensor.
6. The temperature control system of claim 3, wherein: and a third temperature sensor is arranged on the second main pipeline between the communication position of the branch pipeline and the second main pipeline and the load, so that the opening degree of the three-way valve is controlled according to the detection value of the third temperature sensor.
7. The temperature control system of claim 2, wherein: the first main pipeline is connected with the load through a first valve body, the second main pipeline is connected with the load through a second valve body, and a vent pipe is arranged behind the first valve body along the direction of the circulating liquid flow.
8. A temperature control method is characterized by comprising the following steps: the temperature control system according to any one of claims 2 to 7, comprising:
and controlling the opening proportion of the three-way valve according to the actual temperature value of the circulating liquid after the first main pipeline is merged into the branch pipeline.
9. The temperature control method according to claim 8, characterized in that: the controlling the opening proportion of the three-way valve according to the actual temperature value of the circulating liquid behind the first main pipeline confluence branch pipeline comprises:
and outputting a PID2 parameter to control the opening degree of the three-way valve according to the difference value between the set temperature value of the circulating liquid after the first main pipeline is merged into the branch pipeline and the actual temperature value of the circulating liquid after the first main pipeline is merged into the branch pipeline.
10. The temperature control method according to claim 8, characterized in that: further comprising:
and controlling the output duty ratio of the heater according to the actual temperature value of the circulating liquid at the outlet of the heater.
11. The temperature control method according to claim 10, wherein: the controlling the output duty ratio of the heater according to the actual temperature value of the circulating liquid at the outlet of the heater comprises:
and outputting a PID1 parameter to control the output duty ratio of the heater according to the difference value between the set temperature value of the circulating liquid at the outlet of the heater and the actual temperature value of the circulating liquid at the outlet of the heater.
12. The temperature control method according to claim 8, characterized in that: further comprising:
and controlling the opening degree of the three-way valve according to the actual temperature value of the circulating liquid in front of the second main pipeline shunt branch pipeline.
13. The temperature control method according to claim 12, characterized in that: the controlling the opening degree of the three-way valve according to the actual temperature value of the circulating liquid in front of the second main pipeline branch pipeline comprises the following steps:
and determining that the variation per second of the actual temperature value of the circulating liquid before the second main pipeline branch pipeline is larger than the first set value, and the time lasts for the set time, reducing the set temperature value of the circulating liquid after the first main pipeline branches into the second set value, or increasing the set value of the PID of the actual temperature value of the circulating liquid after the first main pipeline branches into the first branch pipeline, and keeping the set temperature value of the circulating liquid after the first main pipeline branches into the first branch pipeline unchanged.
14. The temperature control method according to claim 12, characterized in that: the controlling the opening degree of the three-way valve according to the actual temperature value of the circulating liquid before the second main pipeline shunting branch pipeline further comprises:
and determining that the variation per second of the actual temperature value of the circulating liquid before the second main pipeline branch pipeline is smaller than a first set value, and the time lasts for a set time, so that the set temperature value of the circulating liquid after the first main pipeline branch pipeline is merged is increased by the second set value, or the set value of the PID of the actual temperature value of the circulating liquid after the first main pipeline branch pipeline is merged is reduced, and the set temperature value of the circulating liquid after the first main pipeline branch pipeline is merged is unchanged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202211328213.8A CN115756019A (en) | 2022-10-27 | 2022-10-27 | Temperature control system and method |
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| CN202211328213.8A CN115756019A (en) | 2022-10-27 | 2022-10-27 | Temperature control system and method |
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