CN115753023A - Inclined mirror execution precision measurement method based on intra-cavity loss model - Google Patents
Inclined mirror execution precision measurement method based on intra-cavity loss model Download PDFInfo
- Publication number
- CN115753023A CN115753023A CN202211465270.0A CN202211465270A CN115753023A CN 115753023 A CN115753023 A CN 115753023A CN 202211465270 A CN202211465270 A CN 202211465270A CN 115753023 A CN115753023 A CN 115753023A
- Authority
- CN
- China
- Prior art keywords
- mirror
- cavity
- loss model
- ring
- precision measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The invention provides an intracavity loss model-based tilt mirror execution precision measurement method. The next application of drive to the tilting mirror produces the desired angular tilt. According to the intracavity loss model of the optical cavity ring-down system, the actual angle inclination quantity of the inclined mirror can be obtained. The execution accuracy of the tilting mirror can be calculated according to the deviation between the actual execution angle tilting amount and the expected amount. The method utilizes the characteristic that the loss in the ring-down cavity is extremely sensitive to the inclination angle of the cavity mirror, has high sensitivity in the aspect of execution precision measurement of the tilting mirror, and can be used as an effective means for testing the related performance of the tilting mirror.
Description
Technical Field
The invention relates to the technical field of laser, in particular to a tilt mirror execution precision measurement method based on an intracavity loss model, which can be applied to the fields of adaptive optics, optical axis control and the like.
Background
The tilting mirror can generate the angle tilting amount in the horizontal direction and the vertical direction, and the optical axis pointing control of the incident light beams is realized. The tilting mirror is one of the key devices in the technical field of beam control, and the performance of the tilting mirror has important influence on the accuracy and stability of beam control. The execution accuracy of the tilting mirror is one of the important technical indicators of the tilting mirror. If the execution precision of the tilting mirror has deviation, a feedback error is brought to a light beam control system, and the control precision and the control efficiency are influenced.
In recent years, in order to improve the execution precision of the tilting mirror, a series of methods have been developed (chinese patent CN110927920A, "a device and method for controlling the position and speed of a fast tilting mirror based on a grating ruler"; chinese patent CN103809651A "piezoelectric tilting mirror driving power supply system"). However, there is no technical means for measuring the execution accuracy. At present, the main measurement means all depend on the light spot positioning of a detection light beam (chinese patent CN110530612A, "a system and a test method for testing a tilted mirror using PSD"; chinese patent CN104215431A, "a performance test device for a fast tilted mirror"), and in practical application, the measurement accuracy of the above means is limited by the pixel size of an area array detector or the system complexity.
In view of the above, the invention utilizes the characteristic that the intracavity loss of the ring-down cavity is extremely sensitive to the cavity mirror detuning angle, the tilting mirror is taken as one of the cavity mirrors and is incorporated into the cavity ring-down system, the angle execution quantity of the tilting mirror is taken as the angle misalignment quantity of the cavity mirror, the error between the actual angle execution quantity and the expected execution quantity of the tilting mirror can be obtained with high precision according to the intracavity loss model, and the two-dimensional distribution of the execution error in the horizontal direction and the vertical direction can be obtained. The method can improve the measurement accuracy of the execution precision of the tilting mirror, and has important significance in the technical field of beam control.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: at present, measurement means aiming at the execution precision of the tilting mirror all depend on light spot positioning, and the positioning precision is limited by the pixel size of an area array detector and the complexity of an optical system.
The technical scheme adopted by the invention to solve the technical problem is as follows: by utilizing the characteristic that the intracavity loss of the ring-down cavity is extremely sensitive to the cavity mirror detuning angle, the inclined mirror is used as the cavity mirror to build the optical cavity ring-down system, so that the angle execution quantity of the inclined mirror is converted into the angle misadjustment quantity of the cavity mirror, and the error between the actual angle execution quantity and the expected execution quantity of the inclined mirror can be obtained at high precision according to the intracavity loss model.
The technical scheme adopted by the invention is as follows: a tilt mirror execution precision measurement method based on an intracavity loss model comprises the following specific implementation steps:
and (1) constructing a cavity ring-down system, which comprises 6 parts of a narrow-linewidth continuous wave laser, a plane cavity mirror, a plano-concave cavity mirror, a photoelectric detector, an inclined mirror to be detected, a processor and the like. Wherein, the output laser line width of the narrow line width continuous wave laser is not more than 1nm, the output wavelength lambda and the reflectivity R of the inclined mirror at the wavelength λ Should satisfy R λ ≥98％；
And (2) establishing an intra-cavity loss model M of the optical cavity ring-down system. The intracavity loss model is a relationship between an intracavity loss factor δ and a tilt mirror tilt angle α, which can be described as δ = M (α) x,y ) Subscripts denote horizontal and vertical directions, respectively. The method for establishing the intracavity loss model can adopt 3 modes of theoretical calculation, system simulation and experimental actual measurement.
And (3) injecting a narrow-line-width continuous wave light beam into the ring-down cavity, and simultaneously monitoring and recording an intra-cavity transmission signal in real time by using a photoelectric detector. And applying a tilt angle amount alpha to the tilting mirror, simultaneously calculating an actually executed angle amount theta according to the intracavity loss model M, wherein the difference value of the alpha and the theta is the execution precision of the tilting mirror.
The tilt angle α may be a single value in the horizontal direction (denoted as x direction), the vertical direction (denoted as y direction), or may be two-dimensionally distributed in both directions.
The principle of the invention is as follows: the intracavity loss of the ring-down cavity is extremely sensitive to the cavity mirror detuning angle, and the cavity mirror detuning angle corresponding to the cavity loss factor can be obtained at high precision according to the intracavity loss model.
Compared with the prior art, the invention has the following advantages: the method has the characteristics of simple structure, convenience and quickness in operation and high efficiency in measurement, and has extremely high theoretical precision and high sensitivity. The method can provide a high-sensitivity means for detecting the related technical indexes of the tilting mirror, and is a beneficial supplement in the technical field.
Drawings
FIG. 1 is a schematic diagram of an apparatus for performing a precision measurement method for a tilted mirror based on an intracavity loss model according to the present invention; wherein 1 is a narrow linewidth continuous wave laser, 2 is a plane cavity mirror, 3 is a plane concave cavity mirror, 4 is a photoelectric detector, 5 is a to-be-detected inclined mirror, and 6 is a processor.
Fig. 2 is an exemplary diagram of an intracavity loss model of a tilted mirror implementation precision measurement method based on the intracavity loss model.
Fig. 3 is a diagram of an embodiment of a method for performing accuracy measurement on a tilted mirror based on an intracavity loss model according to the present invention.
Detailed Description
The invention is further described with reference to fig. 1 and the following detailed description.
As shown in fig. 1, the method for measuring the execution precision of the tilted mirror based on the intracavity loss model includes the following specific steps:
and (1) constructing a cavity ring-down system, which comprises 6 parts such as a narrow-linewidth continuous wave laser 1, a plane cavity mirror 2, a plano-concave cavity mirror 3, a photoelectric detector 4, a to-be-detected inclined mirror 5, a processor 6 and the like. The plane cavity mirror 2, the plano-concave cavity mirror 3 and the inclined mirror 5 to be measured jointly form a folding type ring-down cavity, the narrow-linewidth continuous wave laser 1 emits laser beams, the laser beams are coupled into the ring-down cavity through the plane cavity mirror 2, a light intensity signal of the ring-down cavity is transmitted by the plano-concave cavity mirror 3, and transmitted light intensity enters the photoelectric detector 4. The ring down cavity transmission signal detected by the photodetector is forwarded to the processor 6 for processing.
In this embodiment, the narrow-linewidth continuous wave laser 1 is a continuous wave laser with a central wavelength of 1064nm and a linewidth of 0.5nm, the employed tilted mirror 5 to be measured is a high-speed piezoelectric tilted mirror, the reflectivity at the 1064nm waveband is above 99.9%, and the design stroke amount is ± 0.01 °.
Step (2), establishing an intra-cavity loss model delta = M (alpha) of the optical cavity ring-down system x,y )；
In the embodiment, an intra-cavity loss model is established in a theoretical calculation mode, a theoretical model of an optical cavity ring-down system is established according to parameters such as the reflectivity of a plane cavity mirror 2, the reflectivity of a planoconcave cavity mirror 3, the curvature radius, the reflectivity of a to-be-measured tilting mirror 5 and the like, and then a two-dimensional angle scanning alpha is applied to the to-be-measured tilting mirror 5 in the theoretical model x,y . The scan stroke was ± 0.01 °, and the resulting two-dimensional profile of the cavity loss factor versus angle is shown in fig. 2.
And (3) injecting a narrow-linewidth continuous wave light beam into the ring-down cavity, and simultaneously monitoring and recording an intra-cavity transmission signal in real time by using the photoelectric detector 4. And applying an inclination angle alpha to the inclined mirror 5 to be measured, meanwhile, calculating the actually executed angle theta according to the intracavity loss model M, wherein the difference value of the alpha and the theta is the execution precision of the inclined mirror.
In this embodiment, the tilt mirror is held at-0.01 ° in the x direction, and a series of tilt angles are applied to the tilt mirror 5 to be measured. Wherein at a position α = -0.009 °, a cavity transmission signal is recorded, and an intra-cavity loss factor δ is calculated from the transmission signal α 990ppm. According to delta α In a table look-up manner with the intracavity loss M, the theoretical cavity loss factor should be about 990.8ppm at the position of α = -0.009 °, and the angular coordinate θ ≈ -0.0095 ° corresponding to 990ppm. From this, the difference between α and θ can be calculated to be about 0.0005 °. This example shows that the actual implementation error of the tilted mirror under test is about 0.0005 ° in the x-direction-0.01 ° and y-direction-0.009 °. And further carrying out two-dimensional scanning to obtain two-dimensional distribution of the execution precision of the tilting mirror. The implementation can also be expressed as: f (alpha-theta) = delta α -M(α)。
Those skilled in the art will appreciate that the invention may be practiced without these specific details.
Claims (6)
1. A tilted mirror execution precision measurement method based on an intracavity loss model is characterized by comprising the following implementation steps:
step (1), building a cavity ring-down system, which comprises a narrow-linewidth continuous wave laser (1), a plane cavity mirror (2), a plano-concave cavity mirror (3), a photoelectric detector (4), a to-be-detected inclined mirror (5) and a processor (6); the system comprises a planar cavity mirror (2), a plano-concave cavity mirror (3) and an inclined mirror (5) to be detected, wherein a folding ring-down cavity is formed by the planar cavity mirror (2), a narrow-line-width continuous wave laser (1) emits laser beams, the laser beams are coupled into the ring-down cavity by the planar cavity mirror (2), light intensity signals in the ring-down cavity are transmitted into a photoelectric detector (4) through the plano-concave cavity mirror (3), and ring-down cavity transmission signals detected by the photoelectric detector are processed by a processor (6);
step (2), establishing an intra-cavity loss model M of the optical cavity ring-down system;
and (3) injecting a narrow-line-width continuous wave light beam into the ring-down cavity, simultaneously monitoring and recording a transmission signal in the cavity in real time by using a photoelectric detector, applying an inclination angle quantity alpha to the inclined mirror, simultaneously calculating an actually executed angle quantity theta according to the loss model M in the cavity, and determining the difference value of the alpha and the theta as the execution precision of the inclined mirror.
2. The method for performing the precision measurement on the tilting mirror based on the intracavity loss model according to claim 1, wherein: the narrow linewidth continuous wave laser in the step (1) has the linewidth of output laser not more than 1nm.
3. The method for performing the precision measurement on the tilting mirror based on the intracavity loss model according to claim 1, wherein: the narrow linewidth continuous wave laser in the step (1) outputs the wavelength lambda and the reflectivity R of the inclined mirror at the wavelength λ Should satisfy R λ ≥98％。
4. The method for performing the precision measurement on the tilting mirror based on the intracavity loss model according to claim 1, wherein the method comprises the following steps: the intracavity loss model in step (2) is a relationship between an intracavity loss factor δ and a tilt angle α of the tilting mirror, and can be described as δ = M (α) x,y ) The angle alpha subscripts denote the horizontal and vertical directions, respectively.
5. The method for performing the precision measurement on the tilting mirror based on the intracavity loss model according to claim 1, wherein: the method for establishing the intracavity loss model in the step (2) can adopt 3 modes of theoretical calculation, system simulation and experimental actual measurement.
6. The method for performing the precision measurement on the tilting mirror based on the intracavity loss model according to claim 1, wherein the method comprises the following steps: the inclination angle α in step (3) may be a single value in which the horizontal direction is recorded as the x direction and the vertical direction is recorded as the y direction, or may be two-dimensional distribution in two directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211465270.0A CN115753023A (en) | 2022-11-22 | 2022-11-22 | Inclined mirror execution precision measurement method based on intra-cavity loss model |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211465270.0A CN115753023A (en) | 2022-11-22 | 2022-11-22 | Inclined mirror execution precision measurement method based on intra-cavity loss model |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115753023A true CN115753023A (en) | 2023-03-07 |
Family
ID=85334838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211465270.0A Pending CN115753023A (en) | 2022-11-22 | 2022-11-22 | Inclined mirror execution precision measurement method based on intra-cavity loss model |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115753023A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117906923A (en) * | 2024-03-19 | 2024-04-19 | 国科大杭州高等研究院 | Optical bonding technology stability measuring method based on annular cavity system |
-
2022
- 2022-11-22 CN CN202211465270.0A patent/CN115753023A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117906923A (en) * | 2024-03-19 | 2024-04-19 | 国科大杭州高等研究院 | Optical bonding technology stability measuring method based on annular cavity system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4355904A (en) | Optical inspection device for measuring depthwise variations from a focal plane | |
| US7430070B2 (en) | Method and system for correcting angular drift of laser radar systems | |
| US20110235049A1 (en) | Wavefront Sensing Method and Apparatus | |
| CN115753023A (en) | Inclined mirror execution precision measurement method based on intra-cavity loss model | |
| CN102520412A (en) | Laser active detecting device based on MEMS (micro-electromechanical system) two-dimensional scanning mirror array | |
| CN109579777A (en) | The anti-interference big working distance autocollimation of double light sources high-precision and method | |
| CN115184954B (en) | Radar system and method for detecting atmospheric coherence length and turbulence profile | |
| US4981353A (en) | Position locating apparatus for an underwater moving body | |
| CN105446051A (en) | Laser acousto-optical scanning method and device thereof | |
| CN105333815A (en) | Super lateral resolution surface three-dimensional online interference measuring system based on spectral dispersion line scanning | |
| CN111443354A (en) | Multipoint projection device for improving laser ranging precision and measuring method thereof | |
| CN111238408A (en) | Device and method for rapidly measuring parallelism of parallel flat plate | |
| CN109579776A (en) | Anti-interference big working distance autocollimation and method in high precision | |
| CN111272083B (en) | Measuring device and measuring method for off-axis quantity of off-axis parabolic mirror | |
| CN208751507U (en) | A kind of continuous angular transducer of novel smooth arm scale-up version high-precision | |
| CN114279684B (en) | High-precision large-caliber optical element assembling and correcting surface shape online detection device and method | |
| CN113671461B (en) | Method and system for detecting laser radar emission beam direction and laser radar device | |
| CN113251932B (en) | Displacement measurement method integrating confocal method and trigonometry | |
| CN113358030B (en) | Dispersion confocal measurement system and error correction method thereof | |
| CN106197295B (en) | A kind of laser thickness gauge | |
| CN205539857U (en) | Laser reputation scanning device | |
| JP3596561B2 (en) | X-ray stress measuring method and apparatus | |
| CN110146257B (en) | Device and method for rapidly measuring change of optical axis of space laser load | |
| CN113991415A (en) | Laser adaptive coupling cavity matching system and method for ultrastable laser | |
| JPH10267624A (en) | Measuring apparatus for three-dimensional shape |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |