CN115739859A - Carbon film removing device and method - Google Patents
Carbon film removing device and method Download PDFInfo
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- CN115739859A CN115739859A CN202211316342.5A CN202211316342A CN115739859A CN 115739859 A CN115739859 A CN 115739859A CN 202211316342 A CN202211316342 A CN 202211316342A CN 115739859 A CN115739859 A CN 115739859A
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 133
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 77
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Abstract
The invention discloses a carbon film removing device and a method, the device comprises a pipeline, a magnetic field control system, an ignition mechanism, an auxiliary anode and a first arc power supply, the pipeline is of a hollow structure, the magnetic field control system is arranged on the outer side of the pipeline, the ignition mechanism can be operated to move on the pipeline, the ignition mechanism comprises a graphite brush, the graphite brush is close to or abutted against the inner wall of the pipeline, the first arc power supply is provided with an N1 pole, a P1 pole and an L1 pole, one end of the L1 pole is electrically connected with an arc striking pole of the first arc power supply, and the other end of the L1 pole is electrically connected with the ignition mechanism; one end of the P1 pole is electrically connected with the positive pole of the first arc power supply, and the other end of the P1 pole is electrically connected with the auxiliary anode; one end of the N1 pole is electrically connected with the negative electrode of the first arc power supply, and the other end of the N1 pole is electrically connected with the pipeline. The device can efficiently remove the carbon film on the inner wall of the pipeline, and has the advantages of simple structure, environment-friendly process, convenience and low cost.
Description
Technical Field
The invention relates to the technical field of cleaning of arc coating equipment, in particular to a carbon film removing device and method.
Background
The tetrahedral amorphous carbon (ta-C) film in the diamond-like coating has extremely high sp3 bond content, extremely high hardness, excellent friction-reducing and wear-resisting properties, extremely high thermal conductivity, excellent thermal shock resistance, extremely high resistivity and good doping performance. The ta-C coating is generally deposited by adopting a bent pipe magnetic filtering electric arc technology, but a thick carbon film layer is formed on the inner wall of a magnetic filtering bent pipe or a cavity after long-term use, so that a large amount of dust is accumulated and gas is adsorbed. The thick film is accumulated on the inner wall of the bent pipe or the cavity, so that the resistance of equipment and a deposition electric field are influenced; meanwhile, the release of the adsorbed gas is slow in the vacuum process, and the air extraction speed of the equipment is prolonged; in addition, dust particles cannot be removed completely, and can float in the deposition process and be deposited on the surface of a product, so that the quality is influenced. Therefore, the carbon film on the inner wall needs to be cleaned regularly to ensure the normal operation of the electric field in the elbow and the quality of the coating.
At present, the clean mode that cavity inner wall carbon film layer was commonly used has: (1) Physical polishing, such as taking out the bent pipe for sand blasting, brushing and polishing in the pipe, beating by a file and the like; but the conventional physical polishing method cannot well remove the film layer; the pipe wall or the lining needs to be disassembled through a physical sand blasting process, so that the time is long and the efficiency is low; (2) Chemical deplating needs to use chemical reagents and has environmental protection risks, and the thicker the film thickness is, the longer the treatment time is, the lower the efficiency is, and the cost is high.
In addition, chinese patent CN213316660U discloses a cleaning device for a cavity of a thin film deposition reaction chamber, wherein when the cleaning device is used, a motor drives a main shaft to rotate, the main shaft drives a first scraper and a second scraper to rotate, and drives a brush head to rotate, so as to complete a detailed cleaning process for an inner wall of the cavity.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a carbon film removing device which can remove a carbon film on the inner wall of a pipeline in an efficient and environment-friendly manner.
In order to achieve the above object, the present invention discloses a carbon film removing apparatus, comprising a pipeline, a magnetic field control system, an ignition mechanism, an auxiliary anode and a first arc power supply,
the pipeline is of a hollow structure, the magnetic field control system is arranged on the outer side of the pipeline, the ignition mechanism is operated to move on the pipeline and comprises a graphite electric brush, the graphite electric brush is close to or abutted against the inner wall of the pipeline,
the first arc power supply is provided with an N1 pole, a P1 pole and an L1 pole, one end of the L1 pole is electrically connected with an arc striking pole of the first arc power supply, and the other end of the L1 pole is electrically connected with the ignition mechanism; one end of the P1 pole is electrically connected with the positive pole of the first arc power supply, and the other end of the P1 pole is electrically connected with the auxiliary anode; one end of the N1 pole is electrically connected with the negative electrode of the first arc power supply, and the other end of the N1 pole is electrically connected with the pipeline.
Compared with the prior art, the carbon film removing device has the advantages that after the first arc power supply is started, the graphite brush, the pipeline and the auxiliary anode are respectively electrified, then the ignition mechanism is operated to move in the pipeline, the graphite brush of the ignition mechanism is enabled to abut against and scratch the carbon film on the inner wall of the pipeline, the carbon film on the inner wall of the pipeline is ignited, ablation is started, graphite arc spot movement and a large number of particles are generated, the magnetic field control system provides guidance, under the synergistic effect of an electric field and a magnetic field, arc spots can be continuously ablated on the pipe wall to remove the carbon film on the inner wall of the pipeline, the pipe wall is exposed, the conductivity and the cleanness of the pipe wall are improved, the carbon film on the inner wall of the pipeline can be efficiently removed through the device, and the device is simple, environment-friendly, convenient and low in cost.
Preferably, the ignition mechanism further comprises a flange seal, an ignition rod, a driving portion and an elastic portion, the flange seal is located at one end of the pipeline to achieve sealing, the driving portion can drive the ignition rod to move in the pipeline, the graphite electric brush is connected with the ignition rod through the elastic portion, and the elastic portion enables the graphite electric brush to move towards the direction of the inner wall of the pipeline constantly.
Preferably, the auxiliary anode is made of a metal rod material with good conductivity, not limited to copper or stainless steel, and structurally comprises a water cooling channel for cooling, and is electrically insulated from all parts of the ignition mechanism.
Preferably, the driving part comprises a movable cylinder and a cylinder control air pipe, the cylinder control air pipe extends into the pipeline through the flange seal and is connected with the movable cylinder, and the movable cylinder is connected with the ignition rod.
Preferably, the density of the graphite brush>1.7g/cm 3 The porosity is less than or equal to 10 percent, the hardness is more than or equal to 54MPa, and the strength is more than or equal to 38Pa.
Preferably, the voltage between L1 and N1 is 80-85V and the voltage between P1 and N1 is 30-50V.
Preferably, the pipeline is of a bent pipe structure and comprises a primary pipe, a secondary pipe and a tertiary pipe which are sequentially communicated, the primary pipe and the tertiary pipe are straight pipes, the secondary pipe is of an arc structure, an insulating structure is arranged between the primary pipe and the secondary pipe, the secondary pipe and the tertiary pipe are electrically conductive, and the other end of the N1 pole is electrically connected with the primary pipe;
the magnetic field control system comprises an arc stabilizing coil, an arc pushing coil, a guiding coil and a diverging coil, the arc stabilizing coil and the arc pushing coil are arranged on the outer side of the primary tube, the guiding coil is arranged on the outer side of the secondary tube, the diverging coil is arranged on the outer side of the tertiary tube,
the carbon film removing device also comprises a second arc power supply which is provided with an N2 pole, a P2 pole and an L2 pole, one end of the L2 pole is electrically connected with an arc striking pole of the second arc power supply, and the other end of the L2 pole is electrically connected with the ignition mechanism; one end of the P2 pole is electrically connected with the anode of the second arc power supply, and the other end of the P2 pole is electrically connected with the auxiliary anode; one end of the N2 pole is electrically connected with the cathode of the second arc power supply, and the other end of the N2 pole is electrically connected with the diode or the triode.
Preferably, the current of the arc stabilizing coil is 2-5A, the current of the arc pushing coil is 1-5A, the current of the guiding coil is 4-8A, and the current of the diverging coil is 10-20A.
Preferably, the number of turns of the arc stabilizing coil is 150-250 bundles, the number of turns of the arc pushing coil is 120-200 bundles, the number of turns of the guiding coil is 300-1000 bundles, the number of turns of the diverging coil is 150-250 bundles, and preferably, the diameter (wire diameter) of a coil wire is 1-3mm.
Preferably, the voltage between L2 and N2 is 80-85V and the voltage between P2 and N2 is 30-50V.
Correspondingly, the invention also provides a carbon film removing method which is high in efficiency, environment-friendly, convenient and fast and low in cost. The carbon film removing device comprises the following steps:
(1) One end of the L1 pole is electrically connected with a first arc power supply arc striking pole, and the other end of the L1 pole is electrically connected with an ignition mechanism; one end of the P1 pole is electrically connected with the positive pole of the power supply, and the other end of the P1 pole is electrically connected with the auxiliary anode; one end of the N1 pole is electrically connected with the negative electrode of the power supply, and the other end of the N1 pole is electrically connected with the pipeline;
(2) After the first arc power supply is started, the auxiliary anode, the pipeline and the graphite electric brush are respectively electrified, the ignition mechanism is operated to move in the pipeline, the graphite electric brush ignites a carbon film on the inner wall of the pipeline to start ablation, graphite arc spot movement and plasma are generated, and under the cooperation of the magnetic field control system and the first arc power supply, the arc spots are continuously ablated on the inner wall of the pipeline to remove the carbon film on the inner wall of the pipeline.
The invention has the following beneficial effects:
(1) The carbon film removing device disclosed by the invention adopts the combination of the arc stabilizing coil, the arc pushing coil, the guide coil and the divergent coil, so that the independent cleaning and the continuous cleaning of the primary tube, the secondary tube and the tertiary tube are realized, and the device is particularly suitable for bent tubes;
(2) The graphite electric brush is connected with the ignition rod by virtue of the elastic part, has a buffering effect, ensures the normal operation of arc striking and prevents scratching a pipeline cavity;
(3) The graphite electric brush is controlled to move in a pneumatic control mode of moving the air cylinder and controlling the air pipe by the air cylinder, so that the precision is controllable and programmable, and full automation is realized;
(4) The carbon film removing device disclosed by the invention is operated in a vacuum manner in a pipeline, so that a large amount of dust is avoided, and the device is efficient and environment-friendly.
Drawings
FIG. 1 is a schematic view showing the structure of a carbon film removing apparatus according to the present invention.
Fig. 2 is a schematic structural view of an ignition mechanism and an auxiliary anode in the carbon film removing apparatus shown in fig. 1 (arrows indicate the moving directions thereof).
Fig. 3 is a partial schematic structural view of the ignition mechanism shown in fig. 2.
Fig. 4 is a top view of fig. 2.
Fig. 5 is the same structure as fig. 2, only expressing that the graphite brush is moved to a different state (the arrow represents the direction in which it is movable).
Fig. 6 is the same structure as fig. 2, and only shows a different state of the movement of the graphite brush.
FIG. 7 is a graph showing the effect that a carbon film has fallen from the inner wall of a pipe into the pipe after the inner wall of the pipe has been treated in example 1 of the present invention.
FIG. 8 is a graph showing the effect that after the inner wall of the pipe was treated in example 2 of the present invention, a carbon film had fallen from the inner wall of the pipe into the pipe.
Description of the symbols
The device comprises a pipeline 10, a primary tube 11, a secondary tube 13, a tertiary tube 15, an arc stabilizing coil 21, an arc pushing coil 23, a guide coil 25, a divergent coil 27, an ignition mechanism 30, a graphite brush 31, a flange seal 32, an ignition rod 33, a driving part 34, a moving cylinder 341, a cylinder control air pipe 343, an elastic part 35, an auxiliary anode 40, a main body part 41, a water inlet pipe 43, a water outlet pipe 45, a first arc power supply 50 and a second arc power supply 60.
Detailed Description
In order to explain technical contents, structural features, and objects and effects of the present invention in detail, the following description is given in detail with reference to the embodiments.
Referring to fig. 1, the present invention provides a carbon film removing apparatus, including a pipe 10, a magnetic field control system, an ignition mechanism 30, an auxiliary anode 40 and a first arc power supply 50, wherein the pipe 10 is hollow, the magnetic field control system is disposed outside the pipe 10, the ignition mechanism 30 is operable to move in the pipe 10, the ignition mechanism 30 includes a graphite brush 31, the graphite brush 31 is close to or abutted against an inner wall of the pipe 10, the first arc power supply 50 has an N1 pole, a P1 pole and an L1 pole, one end of the L1 pole is electrically connected to an arc striking pole of the first arc power supply 50, and the other end of the L1 pole is electrically connected to the ignition mechanism 30; one end of the P1 pole is electrically connected with the positive pole of the first arc power supply 50, and the other end of the P1 pole is electrically connected with the auxiliary anode 40; one end of the N1 pole is electrically connected with the negative electrode of the first arc power supply 50, and the other end of the N1 pole is electrically connected with the pipeline 10.
In operation, the output ends L1 and N1 of the first arc power supply output 50 supply power, arc sparks are generated by the contact of an arc ignition electrode (arc ignition electrode) and graphite thick film/dust on a pipeline, the pipe wall is ignited, a large number of particles are generated, and a current loop is formed in the contact of the electrodes; the output terminals N1 and P1 of the first arc power supply 50 are supplied with power, and electrons in the particles migrate to the auxiliary anode 40, i.e., the positive electrode, so that a current loop is formed, and thus, the arc is stabilized. After the first arc power supply 50 is activated, the tube 10 and graphite brush 31 are energized for igniting graphite, and the tube 10 and auxiliary anode 40 are energized for arc stable ablation; the ignition mechanism 30 is operated to move in the pipeline 10, so that a graphite brush 31 (carbon brush) of the ignition mechanism 30 is abutted against and scratches a carbon film on the inner wall of the pipeline 10, the positive electrode and the negative electrode of a power supply are in short circuit instantly, electric sparks are generated, huge energy is released, the carbon film on the inner wall of the pipeline 10 is ignited, ablation is started, graphite arc spot movement and a large number of particles (plasma) are generated, a magnetic field control system provides guidance and pulls electron movement, and under the synergistic action of an electric field and a magnetic field, arc spots can be continuously ablated on the pipe wall to remove the carbon film on the inner wall of the whole pipeline, the pipe wall is exposed, and the conductivity and the cleanness of the pipe wall are improved.
Referring to fig. 2-4, the ignition mechanism 30 further includes a flange seal 32, an ignition rod 33, a driving portion 34, and an elastic portion 35, the flange seal 32 is located at one end of the pipe 10 to achieve sealing, the driving portion 34 can drive the ignition rod 33 to move in the pipe 10, the graphite brush 31 is connected with the ignition rod 33 through the elastic portion 35, and the elastic portion 35 constantly enables the graphite brush 31 to move toward the inner wall of the pipe 10. It should be noted that the driving portion 34 can drive the ignition rod 33 to move arbitrarily in the pipe 10 (as shown in fig. 2 and fig. 5-6, but not limited to this state), so that the ignition rod 33 drives the graphite brush 31 to abut against or rub against any position of the inner wall of the pipe, so as to ignite the carbon film and remove all the carbon film. The movement mode includes, but is not limited to, up and down movement, left and right movement, spiral movement, circular movement, and also can be movement of a combination of various movements to perform friction ignition on the carbon film at each position on the inner wall of the pipeline 10, so as to generate graphite arc spot movement and ablation. The control of the movement pattern may be by conventional structure or programming and is not specifically described herein. In a preferred embodiment, the ignition rod 33 is controlled pneumatically to achieve the above-mentioned various motions, and specifically, the driving part 34 includes a moving cylinder 341 and a cylinder control air pipe 343, the cylinder control air pipe 343 extends into the pipeline 10 through the flange seal 32 to connect the moving cylinder 341, and the moving cylinder 341 is connected to the ignition rod 33. The change in position of the displacement cylinder 341 and thus the movement of the ignition rod 33 is effected by means of the cylinder control gas pipe 343. Furthermore, an elastic portion 35 is provided between the graphite brush 31 and the ignition rod 33, and the inner wall of the pipe 10 is not damaged by the friction between the graphite brush 31 and the carbon film on the inner wall of the pipe 10 due to the buffering action of the elastic portion 35, wherein the elastic portion 35 includes, but is not limited to, a spring.
Referring to fig. 2-4, the auxiliary anode 40 is centered on the flange seal 32 on the ignition mechanism 30 and is sealed and insulated by an insulating sleeve structure. The auxiliary anode 40 includes a main body portion 41, a water inlet pipe 43 and a water outlet pipe 45, and the water inlet pipe 43 and the water outlet pipe 45 are located in the main body portion 41 to cool it. The main body 41 is made of a metal material, such as but not limited to copper or stainless steel, and the auxiliary anode 40 has a structural water cooling channel for cooling, and is electrically insulated from all parts of the ignition mechanism 30. An insulating sleeve may be disposed outside the body portion 41 to protect the body portion 41. After the graphite film layer is ignited, the auxiliary anode 40 and the pipeline 10 respectively form output ends on the positive pole and the negative pole of the first arc power supply 50, and a current loop is formed through generated plasma, so that the carbon film is stably ablated.
It should be understood that the graphite brush 31 is made of graphite, and the graphite brush 31 can prevent the carbon film from cracking when it grabs the inner wall of the pipe 10, and in a preferred embodiment, the density of the graphite brush 31>1.7g/cm 3 The porosity is less than or equal to 10 percent, the hardness is more than or equal to 54MPa, and the strength is more than or equal to 38Pa.
In a preferred embodiment, the voltage between L1 and N1 is 80-85V, and the voltage between P1 and N1 is 30-50V, so that a better electric field can be obtained.
In a preferred embodiment, referring to fig. 1, the pipeline 10 is a bent pipe structure, and includes a primary pipe 11, a secondary pipe 13 and a tertiary pipe 15 which are sequentially connected, the primary pipe 11 and the tertiary pipe 15 are straight pipes, the secondary pipe 13 is an arc structure, the primary pipe 11, the secondary pipe 13 and the tertiary pipe 15 form a bent pipe used in the common deposition of the magnetic filtering arc technology, and the embodiment takes the removal of carbon film on the inner wall of the bent pipe as an exampleThe description is given. In this embodiment, an insulation structure is provided between the primary tube 11 and the diode 13, and the diode 13 and the tertiary tube 15 conduct electricity, wherein the primary tube 11 and the diode 13 may be insulated by a teflon or epoxy glass fiber material. The specific connections of the first arc power supply 50 are as follows: one end of the L1 pole is electrically connected with the arc striking pole of the first arc power supply 50, and the other end of the L1 pole is electrically connected with the ignition mechanism 30; one end of the P1 pole is electrically connected with the anode of the first arc power supply 50, and the other end of the P1 pole is electrically connected with the auxiliary anode 40; one end of the N1 pole is electrically connected with the negative electrode of the first arc power supply 50, and the other end of the N1 pole is electrically connected with the primary tube 11. In addition, since the pipe 10 is a bent pipe, the particle direction thereof is also guided by the magnetic field control system and the second arc power supply 60. In a preferred embodiment, the magnetic field control system comprises an arc stabilizing coil 21, an arc pushing coil 23, a guiding coil 25 and a diverging coil 27, the arc stabilizing coil 21 and the arc pushing coil 23 are arranged outside the primary tube 11, the guiding coil 25 is arranged outside the secondary tube 13, and the diverging coil 27 is arranged outside the tertiary tube 15. The second arc power supply 60 has an N2 pole, a P2 pole and an L2 pole, one end of the L2 pole is electrically connected to the ignition pole of the second arc power supply 60, and the other end of the L2 pole is electrically connected to the ignition mechanism 30; one end of the P2 pole is electrically connected with the anode of the second arc power supply 60, and the other end of the P2 pole is electrically connected with the auxiliary anode 40; one end of the N2 pole is electrically connected with the cathode of the second arc power supply 60, and the other end is electrically connected with the diode 13 or the triode 15. That is, to accommodate the removal of the carbon film on the inner wall of the elbow, the second arc power supply 60 and the arc stabilizing coil 21, the push arc coil 23, the guidance coil 25, and the divergent coil 27 are added to guide the mating. The arc stabilizing coil 21 is arranged on the outer side of the primary tube 11 far away from the diode 13, the arc pushing coil 23 is arranged on the outer side of the primary tube 11 close to the diode 13, the arc stabilizing coil 21 is used for stabilizing carbon film ablation, the arc pushing coil 23 drives electron beams to move towards the inner wall of the primary tube 11 according to current control, a guide coil 25 is arranged on the outer side of the diode 13 and guides electrons to spirally move forwards to attract positive ions to move forwards, a divergent coil 27 is arranged on the outer side of the tertiary tube 15, two ends of magnetic lines of force of an electromagnetic field are diverged and deflected outwards, the electrons are diverged spirally along the direction of the magnetic lines of force to attract the positive ions to spirally diverge forwards. When removing the carbon film on the inner wall of the bent pipe, the arc stabilizing coil 21, the arc pushing coil 23, the guiding coil 25 and the diverging coil 27 are started, and one is setThe constant current makes the magnetic force lines form a stable and proper magnetic field, so that the graphite ablation stably moves under the continuous output of the power supply, the graphite is ablated from the primary tube 11 to the secondary tube 13 and the tertiary tube 15, and the film layer is burnt to form CO 2 The substrate is exposed from the tube 10 by evacuation.
In a preferred embodiment, the voltage between L2 and N2 is 80-85V and the voltage between P2 and N2 is 30-50V. The first arc power supply 50 is turned on when the primary diode 11 is cleaned, and the first arc power supply 50 and the second arc power supply 60 are simultaneously turned on when the diode 13 and the tertiary diode 15 are cleaned.
In a preferred embodiment, a suitable reaction gas is introduced into the pipe 10 to stabilize the gas pressure within a certain range, which has an arc stabilizing effect, and the reaction gas may be, but is not limited to, ar, N 2 ，O 2 Or O 2 、N 2 And Ar in different proportions.
In a preferred embodiment, the current of the stationary coil 21 is 2-5A, the current of the pushing coil 23 is 1-5A, the current of the leading coil 25 is 4-8A and the current of the diverging coil 27 is 10-20A. Furthermore, the number of turns of the arc stabilizing coil 21 is 150-250 bundles, the number of turns of the arc pushing coil 23 is 120-200 bundles, the number of turns of the guiding coil 25 is 300-1000 bundles, the number of turns of the diverging coil 27 is 150-250 bundles, and the wire diameter of each coil is 1-3mm.
The method for removing the carbon film on the inner wall of the pipeline by adopting the device comprises the following steps:
(1) One end of the L1 pole is electrically connected with the arc striking pole of the first arc power supply 50, and the other end of the L1 pole is electrically connected with the ignition mechanism 30; one end of the P1 pole is electrically connected with the positive pole of the power supply, and the other end of the P1 pole is electrically connected with the auxiliary anode 40; one end of the N1 pole is electrically connected with the negative electrode of the power supply, and the other end of the N1 pole is electrically connected with the pipeline 10;
(2) After the first arc power supply 50 is started, the auxiliary anode 40, the pipeline 10 and the graphite brush 31 are respectively electrified, the ignition mechanism 30 is operated to move in the pipeline 10, the graphite brush 31 ignites a carbon film on the inner wall of the pipeline 10, ablation is started, graphite arc spot movement and plasma are generated, and under the cooperation of the magnetic field control system and the first arc power supply 50, the arc spots are continuously ablated on the inner wall of the pipeline 10 so as to remove the carbon film on the inner wall of the pipeline 10.
When the pipeline 10 is a bent pipe, the carbon film on the inner wall of the pipeline is removed by adding the second arc power supply 60, the arc stabilizing coil 21, the arc pushing coil 23, the guiding coil 25 and the diverging coil 27 when the direction of the bent pipe is changed, and the method comprises the following steps:
(1) Introducing a proper amount of reaction gas into the pipeline 10 to stabilize the gas pressure within a certain range;
(2) Starting a first arc power supply 50 to respectively electrify the auxiliary anode 40, the graphite brush 31 and the primary tube 11, and adjusting current parameters of the arc stabilizing coil 21, the arc pushing coil 23, the guide coil 25 and the divergent coil 27 to form a stable and proper magnetic field;
(3) Cleaning the primary pipe 11, driving an ignition rod 33 to slide up and down or left and right or in a combined mode in the pipeline 10 by using a driving part 34, adjusting a graphite brush 31 of an ignition mechanism 30 to a specified position of the pipeline 10, contacting, rubbing and electrifying a carbon film on the inner wall of the pipeline 10, igniting the carbon film (the main component is graphite), and starting ablation; meanwhile, current parameters of the arc stabilizing coil 21, the arc pushing coil 23, the guiding coil 25 and the diverging coil 27 are adjusted, the current is generally adjusted according to the distance from the primary tube 11, and the diverging coil 27 at the far point can be in a closed state;
(4) After the primary tube 11 is cleaned, the cleaning stage of the diode 13 is started, the second arc power supply 60 is turned on, so that the diode 13 and the tertiary tube 15 are respectively electrified, and the current parameters of the arc stabilizing coil 21, the arc pushing coil 23, the guide coil 25 and the divergent coil 27 are adjusted, so that the carbon film is ablated to stably move under the continuous output of the power supply, and the carbon film is ablated to the diode 13 and the tertiary tube 15 from the primary tube 11;
(5) Adjusting the position of a graphite brush 31 of an ignition mechanism 30 to perform scratching according to the position of carbon film dust which is not ablated on the pipeline 10, repeating the steps (3) to (4) to perform ablation cleaning, ablating the carbon film dust from the primary tube 11 to the secondary tube 13 and the tertiary tube 15, and burning the film layer to form CO 2 The tube 10 is evacuated to expose the substrate.
The method for removing carbon film on the inner wall of a pipeline according to the present invention is further illustrated by several specific examples, but is not limited thereto.
Example 1
A method for removing a carbon film on the inner wall of a pipeline comprises the following steps:
(1) Evacuating (vacuum value 0.1 Pa) and cooling (temperature maintained at 24 ℃) the pipe 10;
(2) Introducing a reaction gas O of 20sccm into the pipe 10 2 So that the vacuum pressure is stabilized at 0.15-0.2Pa;
(3) Ignition and purge phases
3.1 in the stage of ignition, a first arc power supply 50 is firstly turned on, the voltage between L1 and N1 is 80V, and the voltage between P1 and N1 is 35V, so that the auxiliary anode 40, the graphite brush 31 and the primary tube 11 are respectively electrified; meanwhile, the arc stabilizing coil 21 and the arc pushing coil 23 are in an open state, the guiding coil 25 and the diverging coil 27 are in a closed state, the current of the arc stabilizing coil 21 is controlled to be 3A, the current of the arc pushing coil 23 is controlled to be 1A, the current of the guiding coil 25 is controlled to be 0A, the current of the diverging coil 27 is controlled to be 0A, and the running time is 30s;
3.2 cleaning stage of the first-stage tube 11, opening the leading coil 25, controlling the current of the arc stabilizing coil 21 to be 3A, controlling the current of the arc pushing coil 23 to be 2A, controlling the current of the leading coil 25 to be 1A and the current of the diverging coil 27 to be 0A, and controlling the running time to be 30s,
3.3 in the cleaning stage of the primary tube 11, the arc stabilizing coil 21 is closed, the current of the arc stabilizing coil 21 is controlled to be 0A, the current of the arc pushing coil 23 is controlled to be 3A, the current of the guiding coil 25 is controlled to be 2A, the current of the diverging coil 27 is controlled to be 0A, the running time is 30s,
3.4 diode 13 cleaning stage, second arc power supply 60 is switched on, voltage between L2 and N2 is 80V, voltage between P2 and N2 is 35V, diode 13 and triode 15 are respectively electrified, divergent coil 27 is switched on, current of arc stabilizing coil 21 is controlled to be 0A, current of arc pushing coil 23 is controlled to be 3A, current of leading coil 25 is controlled to be 3A, current of divergent coil 27 is controlled to be 10A, and operation time is 60s,
3.5 in the cleaning stage of the diode 13, the current of the arc stabilizing coil 21 is controlled to be 0A, the current of the arc pushing coil 23 is controlled to be 2A, the current of the leading coil 25 is controlled to be 4A, the current of the diverging coil 27 is controlled to be 12A, the running time is 60s,
3.6 in the cleaning stage of the diode 13, the current of the arc stabilizing coil 21 is controlled to be 0A, the current of the arc pushing coil 23 is controlled to be 1A, the current of the guiding coil 25 is controlled to be 5A, the current of the diverging coil 27 is controlled to be 14A, the running time is 60s,
3.7, in the cleaning stage of the triode 15, the arc pushing coil 23 is closed, the current of the arc stabilizing coil 21 is controlled to be 0A, the current of the arc pushing coil 23 is controlled to be 0A, the current of the guide coil 25 is controlled to be 6A, the current of the divergence coil 27 is controlled to be 16A, and the operation time is 60s;
(4) According to the position of carbon film dust which is not ablated on the pipeline 10, the position of a graphite brush 31 of the ignition mechanism 30 is adjusted to perform scratching by matching the movable air cylinder 341 and the air cylinder control air pipe 343, the step of cleaning the primary tube 11-the step of cleaning the tertiary tube 15 are repeated to perform ablation cleaning, the primary tube 11 is ablated to the secondary tube 13 and the tertiary tube 15, and the film layer is combusted to form CO 2 The pipe 10 is exhausted by air extraction, and the base material is exposed from the pipe;
(5) After cleaning of the plurality of pipes 10 is completed, the vacuum is deflated, the chamber door is opened, and the dust collector is reused to clean floating ash and particles.
Referring to fig. 7, the effect of the carbon film falling into the pipe 10 from the inner wall of the pipe 10 after the inner wall of the pipe 10 is treated by the present embodiment is shown, and as can be seen from fig. 7, the pipe 10 contains a large amount of ash, film lumps and particles falling by bombardment.
The internal resistance of the pipeline 10 before and after cleaning is respectively measured, and is changed from original 10-60M omega (not cleaned) to 5.0-10.0 omega (after cleaning), which shows that the conductivity of the pipeline wall is greatly improved, namely the method for removing the carbon film on the pipeline inner wall has obvious effect.
Example 2
A method for removing a carbon film on the inner wall of a pipeline comprises the following steps:
(1) Evacuating (vacuum value 0.1 Pa) and cooling (temperature maintained at 24 ℃) the pipe 10;
(2) 10sccm of a reaction gas O was introduced into the pipe 10 2 And 25sccm of a reaction gas Ar so that the vacuum pressure is stabilized at 0.3Pa;
(3) Ignition and purge phases
3.1 in the stage of ignition, a first arc power supply 50 is firstly turned on, the voltage between L1 and N1 is 80V, and the voltage between P1 and N1 is 35V, so that the auxiliary anode 40, the graphite brush 31 and the primary tube 11 are respectively electrified; meanwhile, the arc stabilizing coil 21 and the arc pushing coil 23 are in an open state, the guiding coil 25 and the diverging coil 27 are in a closed state, the current of the arc stabilizing coil 21 is controlled to be 3A, the current of the arc pushing coil 23 is gradually increased to 1.5A from 0.5A, the current of the guiding coil 25 is 0A, the current of the diverging coil 27 is 0A, and the running time is 180s;
3.2 cleaning stage of the primary tube 11, opening the guiding coil 25, controlling the current of the arc stabilizing coil 21 to be 3A, gradually increasing the current of the arc pushing coil 23 from 1.5A to 2.5A, increasing the speed to be 0.1A/s (the same applies below), gradually increasing the current of the guiding coil 25 from 0A to 2A, the current of the diverging coil 27 to be 0A, and the running time to be 60s,
3.3 during the cleaning stage of the primary tube 11, the current of the arc-stabilizing coil 21 is controlled to gradually decrease from 3A to 0A (the speed is 0.1A/s), the current of the arc-pushing coil 23 is controlled to gradually increase from 2.5A to 3A, the current of the guiding coil 25 is controlled to gradually increase from 2A to 3A, the current of the diverging coil 27 is 0A, the running time is 60s,
3.4 cleaning stage of the diode 13, turning on the second arc power supply 60, the voltage between L2 and N2 is 80V, the voltage between P2 and N2 is 35V, so that the diode 13 and the triode 15 are respectively electrified, turning on the divergent coil 27, controlling the current of the arc stabilizing coil 21 to be 0A, the current of the arc pushing coil 23 to be 3A, the current of the guide coil 25 to be gradually increased from 3A to 4A, the current of the divergent coil 27 to be gradually increased from 10A to 12A, the running time to be 60s,
3.5 in the cleaning stage of the diode 13, the current of the arc stabilizing coil 21 is controlled to be 0A, the current of the arc pushing coil 23 is gradually reduced from 3A to 1A, the current of the leading coil 25 is gradually increased from 4A to 5A, the current of the diverging coil 27 is gradually increased from 12A to 14A (the speed increase is 0.1A/s), the operation time is 60s,
3.6 in the cleaning stage of the diode 13, the current of the arc stabilizing coil 21 is controlled to be 0A, the current of the arc pushing coil 23 is gradually reduced from 1A to 0A, the current of the guiding coil 25 is gradually increased from 5A to 6A, the current of the diverging coil 27 is gradually increased from 14A to 16A, the running time is 60s,
3.7 cleaning stage of the triode 15, closing the push-arc coil 23, controlling the current of the arc stabilizing coil 21 to be 0A, the current of the push-arc coil 23 to be 0A, the current of the guide coil 25 to be 6A and the current of the divergence coil 27 to be 16A, the running time to be 60s,
(4) According to the position of carbon film dust which is not ablated on the pipeline 10, the position of a graphite brush 31 of the ignition mechanism 30 is adjusted by matching the movable air cylinder 341 and the air cylinder control air pipe 343 for scratching, the cleaning stage of the first-stage tube 11 and the cleaning stage of the third-stage tube 15 are repeated for ablation cleaning, the carbon film is ablated to the second-stage tube 13 and the third-stage tube 15 from the first-stage tube 11, and the carbon film is combusted to form CO 2 The substrate is exposed from the tube 10 by evacuation.
(5) After cleaning of the plurality of pipes 10 is completed, the vacuum is deflated, the chamber door is opened, and the dust collector is reused to clean floating ash and particles.
Referring to fig. 8, the effect of the carbon film falling into the pipe 10 from the inner wall of the pipe 10 after the inner wall of the pipe 10 is treated by the present embodiment is shown, and as can be seen from fig. 8, the pipe 10 contains a large amount of floating ash, film lumps and particles falling by bombardment.
The internal resistance of the pipeline 10 before and after cleaning is respectively measured and is changed from 6-70M omega (not cleaned) to 5.0-10.0 omega (after cleaning), which shows that the conductivity of the pipeline wall is greatly improved, namely the method for removing the carbon film on the pipeline inner wall has obvious effect.
The above disclosure is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, therefore, the present invention is not limited by the appended claims.
Claims (10)
1. A carbon film removing device is characterized by comprising a pipeline, a magnetic field control system, an ignition mechanism, an auxiliary anode and a first arc power supply, wherein the pipeline is of a hollow structure, the magnetic field control system is arranged on the outer side of the pipeline, the ignition mechanism is operated to move on the pipeline, the ignition mechanism comprises a graphite brush, and the graphite brush is close to or abutted against the inner wall of the pipeline,
the first arc power supply is provided with an N1 pole, a P1 pole and an L1 pole, one end of the L1 pole is electrically connected with an arc striking pole of the first arc power supply, and the other end of the L1 pole is electrically connected with the ignition mechanism; one end of the P1 pole is electrically connected with the positive pole of the first arc power supply, and the other end of the P1 pole is electrically connected with the auxiliary anode; one end of the N1 pole is electrically connected with the negative electrode of the first arc power supply, and the other end of the N1 pole is electrically connected with the pipeline.
2. The carbon film removing apparatus of claim 1, wherein the ignition mechanism further comprises a flange seal, an ignition rod, a driving portion, and an elastic portion, the flange seal is located at one end of the pipeline to achieve sealing, the driving portion can drive the ignition rod to move in the pipeline, the graphite brush is connected with the ignition rod by the elastic portion, and the elastic portion constantly drives the graphite brush to move towards the inner wall of the pipeline.
3. The carbon film removing apparatus as claimed in claim 2, wherein the driving part comprises a moving cylinder and a cylinder control gas pipe, the cylinder control gas pipe extends into the pipeline through the flange seal and is connected with the moving cylinder, and the moving cylinder is connected with the ignition rod.
4. The carbon film removal apparatus of claim 1, wherein the density of the graphite brushes>1.7g/cm 3 The porosity is less than or equal to 10 percent, the hardness is more than or equal to 54MPa, and the strength is more than or equal to 38Pa.
5. The carbon film removing apparatus as claimed in claim 1, wherein the voltage between the L1 pole and the N1 pole is 80-85V, and the voltage between the P1 pole and the N1 pole is 30-50V.
6. The carbon film removing device according to claim 1, wherein the pipeline has a bent pipe structure and comprises a primary pipe, a secondary pipe and a tertiary pipe which are sequentially communicated, the primary pipe and the tertiary pipe are straight pipes, the secondary pipe has an arc-shaped structure, an insulating structure is arranged between the primary pipe and the secondary pipe, the secondary pipe and the tertiary pipe are electrically conductive, and the other end of the N1 pole is electrically connected with the primary pipe;
the magnetic field control system comprises an arc stabilizing coil, an arc pushing coil, a guiding coil and a diverging coil, the arc stabilizing coil and the arc pushing coil are arranged on the outer side of the primary tube, the guiding coil is arranged on the outer side of the secondary tube, the diverging coil is arranged on the outer side of the tertiary tube,
the carbon film removing device also comprises a second arc power supply which is provided with an N2 pole, a P2 pole and an L2 pole, one end of the L2 pole is electrically connected with an arc striking pole of the second arc power supply, and the other end of the L2 pole is electrically connected with the ignition mechanism; one end of the P2 pole is electrically connected with the anode of the second arc power supply, and the other end of the P2 pole is electrically connected with the auxiliary anode; one end of the N2 pole is electrically connected with the cathode of the second arc power supply, and the other end of the N2 pole is electrically connected with the diode or the triode.
7. The carbon film removing apparatus as defined in claim 6, wherein the current of the arc-stabilizing coil is 2-5A, the current of the arc-pushing coil is 1-5A, the current of the guiding coil is 4-8A and the current of the diverging coil is 10-20A.
8. The carbon film removal device of claim 6, wherein the arc stabilizing coil has 150-250 turns, the arc pushing coil has 120-200 turns, the guiding coil has 300-1000 turns, and the diverging coil has 150-250 turns; the wire diameter is 1-3mm.
9. The carbon film removing apparatus as claimed in claim 6, wherein the voltage between the L2 pole and the N2 pole is 80-85V, and the voltage between the P2 pole and the N2 pole is 30-50V.
10. A carbon film removing method, which is realized by the carbon film removing apparatus as claimed in any one of claims 1 to 9, comprising the steps of:
(1) One end of the L1 pole is electrically connected with a first arc power supply arc striking pole, and the other end of the L1 pole is electrically connected with an ignition mechanism; one end of the P1 pole is electrically connected with the positive pole of the power supply, and the other end of the P1 pole is electrically connected with the auxiliary anode; one end of the N1 pole is electrically connected with the negative electrode of the power supply, and the other end of the N1 pole is electrically connected with the pipeline;
(2) After the first arc power supply is started, the auxiliary anode, the pipeline and the graphite electric brush are respectively electrified, the ignition mechanism is operated to move in the pipeline, the graphite electric brush ignites a carbon film on the inner wall of the pipeline to start ablation, graphite arc spot movement and a large number of particles are generated, and under the cooperation of the magnetic field control system and the first arc power supply, the arc spots are continuously ablated on the inner wall of the pipeline to remove the carbon film on the inner wall of the pipeline.
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