CN115728393A - Nonlinear ultrasonic coefficient correction method based on pulse inversion technology - Google Patents
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- 239000007822 coupling agent Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
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Abstract
The invention provides a nonlinear ultrasonic coefficient correction method based on a pulse inversion technology, which comprises the following steps of: s1, building a nonlinear ultrasonic detection system; s2, carrying out nonlinear ultrasonic detection on the crack defect test piece by using a pulse inversion technology: the ultrasonic probe 1 respectively excites ultrasonic signals with phases of 0 degrees and 180 degrees and receives the ultrasonic signals reflected by cracks, the ultrasonic probe 2 receives the ultrasonic signals transmitted by the cracks, the reflected and transmitted ultrasonic signals are used for difference to obtain signals which do not contain a system nonlinear source, and then the two difference signals with the excitation phases of 0 degrees and 180 degrees are subjected to time-shift superposition; s3, carrying out Fourier transform on the superposed ultrasonic signals to obtain signals which do not contain a system nonlinear source and enhance the amplitude of second harmonic; and S4, calculating a nonlinear ultrasonic coefficient to evaluate the crack defect. The method solves the problem of influence of a nonlinear source of the system on the detection result, improves the amplitude of the second harmonic and greatly improves the detection accuracy.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of nondestructive testing technology, in particular to a nonlinear ultrasonic coefficient correction method based on a pulse inversion technology.
[ background ] A method for producing a semiconductor device
In recent decades, the field of nondestructive inspection has been rapidly developed, and among them, the ultrasonic inspection has a wide application range and can be used for defect inspection of metal members and non-metal members. Ultrasonic detection is divided into linear ultrasonic detection and nonlinear ultrasonic detection, and the application scenes of the two methods are different. The linear ultrasonic is generally used for detecting the defects of millimeters and above, and the operation is simple; the nonlinear ultrasonic detection is used for detecting below millimeter level, and has complex operation and expensive equipment, so the nonlinear ultrasonic detection is more suitable for detecting the early damage of the material member.
The nonlinear ultrasonic detection is mainly to evaluate the damage state of the material member through the nonlinear response generated by the interaction of the ultrasonic wave and the defect, however, the nonlinear response generated by the detection system is not only from the material member itself, but also from a part of the nonlinear response generated by the detection system, so that the received signal includes the nonlinear response of the material and the nonlinear response of the system, and the accuracy of the detection result needs to be considered. In order to improve the accuracy of the detection result, the influence of the system nonlinearity needs to be attenuated or even eliminated.
Related patents exist that address methods of attenuating system nonlinearities, such as: the invention patent with the application number of CN103969339A discloses a nonlinear ultrasonic guided wave detection method and a device for pipeline micro-damage, which can weaken the influence of a system nonlinear source but can not completely remove the influence of the system nonlinear source by introducing the propagation distance of ultrasonic waves into a nonlinear ultrasonic coefficient; the invention patent with application number CN114910565A discloses a method for correcting relative nonlinear coefficients in nonlinear ultrasonic detection, which eliminates the influence of a nonlinear source of a system by an intercept of a fitting straight line of the nonlinear ultrasonic coefficients and the thickness of a test piece, but is not accurate enough, because the propagation forms of ultrasonic waves in test pieces with different thicknesses are different, especially the forms of ultrasonic waves in the test pieces with the thickness of 10mm are greatly changed, the thickness of the test piece may not present a linear relationship with the nonlinear ultrasonic coefficients.
[ summary of the invention ]
The invention aims to solve the problem that a nonlinear source of a system influences a detection result in the prior art, and provides a nonlinear ultrasonic coefficient correction method based on a pulse inversion technology, so that the influence of the nonlinear source of the system on the detection result is solved, the amplitude of a second harmonic is improved, and the detection accuracy is greatly improved.
In order to achieve the purpose, the invention provides a nonlinear ultrasonic coefficient correction method based on a pulse inversion technology, which comprises the following steps:
s1, building a nonlinear ultrasonic detection system;
s2, carrying out nonlinear ultrasonic detection on the crack defect test piece by using a pulse inversion technology: the ultrasonic probe 1 respectively excites ultrasonic signals with phases of 0 degrees and 180 degrees and receives the ultrasonic signals reflected by cracks, the ultrasonic probe 2 receives the ultrasonic signals transmitted by the cracks, the reflected and transmitted ultrasonic signals are used for difference to obtain signals which do not contain a system nonlinear source, and then the two difference signals with the excitation phases of 0 degrees and 180 degrees are subjected to time-shift superposition;
s3, carrying out Fourier transform on the superposed ultrasonic signals to finally obtain signals which do not contain system nonlinear sources and can enhance the amplitude of second harmonic;
and S4, calculating a nonlinear ultrasonic coefficient to evaluate the crack defect.
Preferably, in step S2, when the ultrasound signal with the excitation phase of 0 ° is obtained, the time domain signal received by the ultrasound probe 1 is subtracted from the time domain signal received by the ultrasound probe 2, so as to obtain a difference signal of the two ultrasound probes when the excitation phase is 0 °; when the excitation phase is 180 degrees, the time domain signal received by the ultrasonic probe 1 is subtracted from the time domain signal received by the ultrasonic probe 2 to obtain a difference signal of the two ultrasonic probes when the excitation phase is 180 degrees.
Preferably, when the reception signals of the two ultrasonic probes differ from each other at the same excitation phase, the reception signal of the ultrasonic probe 1 should be shifted in time to correspond to the reception signal of the ultrasonic probe 2.
Preferably, in step S3, fourier transform is performed on two difference signals at excitation phases of 0 ° and 180 °.
Preferably, in step S4, the expression of the nonlinear ultrasound coefficient is:
wherein A is 1 For the amplitude of the fundamental wave of the received signal, A 2 Is the second harmonic amplitude of the received signal.
Preferably, in step S1, the nonlinear ultrasonic detection system includes a computer, a RAM-5000-SNAP test system, an oscilloscope, an impedance matching device, an attenuator, a low-pass filter, an ultrasonic probe 1, an ultrasonic probe 2, a duplexer, and a preamplifier.
Preferably, the computer is in communication connection with the RAM-5000-SNAP test system and is used for controlling the RAM-5000-SNAP test system to output pulse signals; the RAM-5000-SNAP test system is connected with the impedance matching, the attenuator and the low-pass filter in sequence and then is connected into the duplexer, and pulse signals output by the RAM-5000-SNAP test system sequentially pass through the impedance matching, the attenuator and the low-pass filter and then enter the duplexer; the duplexer is in communication connection with the ultrasonic probe 1 and is used for inputting signals to the ultrasonic probe 1; the ultrasonic probe 1 is used for exciting a signal received by the duplexer into an ultrasonic signal and receiving a reflected wave generated by the ultrasonic signal passing through a crack of a crack defect test piece, the duplexer is in communication connection with the RAM-5000-SNAP test system through a preamplifier, and the reflected wave received by the ultrasonic probe 1 is sent to the RAM-5000-SNAP test system through the duplexer and the preamplifier; the ultrasonic probe 2 is in communication connection with the RAM-5000-SNAP test system through another preamplifier, and the ultrasonic probe 2 is used for receiving ultrasonic signals, generating transmission waves through cracks of a crack defect test piece and sending the transmission waves into the RAM-5000-SNAP test system through the preamplifier; the oscilloscope is connected with the RAM-5000-SNAP test system and used for displaying the detected ultrasonic signals.
Preferably, the ultrasonic probe 1 is a transceiver-integrated ultrasonic probe, and is configured to excite an ultrasonic signal and receive the ultrasonic signal; the ultrasonic probe 2 is a receiving probe and is used for receiving ultrasonic signals.
The invention has the beneficial effects that:
1. the invention eliminates the influence of a nonlinear source of the system on the nonlinear ultrasonic signal by adopting the difference between the reflected wave signal and the transmitted wave signal, thereby improving the detection accuracy;
2. the invention enhances the amplitude of the second harmonic wave by the pulse inversion technology, is convenient for observation and calculation of nonlinear ultrasonic coefficients, and can more accurately evaluate the crack defects of the material.
The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.
[ description of the drawings ]
FIG. 1 is a diagram of a non-linear ultrasonic inspection system in accordance with an embodiment of the present invention;
fig. 2 is a signal obtained by time-shifting a signal received by the ultrasonic probe 1 when an excitation phase is 0 °, wherein a is a time domain signal diagram, and b is a frequency domain signal diagram;
fig. 3 is a received signal of the ultrasonic probe 2 with an excitation phase of 0 ° according to an embodiment of the present invention, wherein a is a time domain signal diagram and b is a frequency domain signal diagram;
fig. 4 is a signal obtained by time-shifting a signal received by the ultrasonic probe 1 when an excitation phase is 180 °, wherein a is a time domain signal diagram, and b is a frequency domain signal diagram;
fig. 5 is a received signal of the ultrasonic probe 2 with an excitation phase of 180 ° according to an embodiment of the present invention, in which a is a time domain signal diagram, and b is a frequency domain signal diagram;
FIG. 6 is a difference signal of two ultrasonic probes with an excitation phase of 0 degree according to an embodiment of the present invention, wherein a is a time domain signal diagram and b is a frequency domain signal diagram;
FIG. 7 is a difference signal of two ultrasonic probes with an excitation phase of 180 degrees according to an embodiment of the present invention, wherein a is a time domain signal diagram and b is a frequency domain signal diagram;
FIG. 8 is a diagram illustrating a process of superimposing two difference signals according to an embodiment of the present invention;
fig. 9 is a time-frequency domain signal after superposition according to an embodiment of the present invention, in which a is a time-domain signal diagram and b is a frequency-domain signal diagram.
[ detailed description ] A
Example 1
The invention relates to a nonlinear ultrasonic coefficient correction method based on a pulse inversion technology, which comprises the following specific implementation steps of:
s0, preparing a crack defect test piece. The sample material used in this example was P91, the length X width X height dimensions were 100X 15 (unit: mm), and a crack having a length of 10mm was prepared on the sample.
S1, building a nonlinear ultrasonic detection system.
1) The nonlinear ultrasonic detection system comprises: a computer, a RAM-5000-SNAP test system, an oscilloscope, impedance matching, an attenuator, a low-pass filter, an ultrasonic probe 1, an ultrasonic probe 2, a duplexer and a preamplifier, as shown in figure 1;
2) The connection mode is as follows: the method comprises the steps that parameters are set through a computer to control an RAM-5000-SNAP test system to output a pulse signal, the signal enters an attenuator through 50-ohm impedance matching, the attenuator adjusts the signal to proper power, a low-pass filter filters a high-frequency signal output by the RAM-5000-SNAP test system, the signal is input into an ultrasonic probe 1 through a duplexer, the ultrasonic probe 1 excites an ultrasonic signal, the ultrasonic signal passes through micro defects (cracks) of a crack defect test piece to generate reflected waves and transmitted waves, the reflected waves are received by the ultrasonic probe 1 and are sent to the RAM-5000-SNAP test system through the duplexer and a preamplifier, the ultrasonic probe 2 receives the transmitted waves and is also sent to the RAM-5000-SNAP test system through the preamplifier, and finally an oscilloscope is connected with the RAM-5000-SNAP test system to display the detected ultrasonic signal.
3) The ultrasonic probe 1 is a transmitting-receiving integrated ultrasonic probe and is responsible for excitation of signals and reception of reflected waves; the ultrasonic probe 2 is a receiving probe and is responsible for receiving the transmitted waves;
4) The excitation signal is a Gaussian pulse train, and 5 pulse trains are selected, wherein the frequency is 0.5MHz;
5) The low-pass filter selects a low-pass filter of 0.5MHz;
6) The ultrasonic probe 1 and the ultrasonic probe 2 are connected with the crack defect test piece by adopting a coupling agent, wherein the coupling agent adopts glycerol;
s2, carrying out nonlinear ultrasonic detection on the crack defect test piece by using a pulse inversion technology: the ultrasonic probe 1 respectively excites ultrasonic signals with phases of 0 degrees and 180 degrees and receives ultrasonic signals reflected by cracks, the ultrasonic probe 2 receives ultrasonic signals transmitted by the cracks, the ultrasonic signals transmitted by the cracks are used for making difference to obtain signals without system nonlinear sources, then the difference signals with excitation phases of 0 degrees and 180 degrees are subjected to time-shift superposition, the superposition process is shown in figure 8, and the wave crest of the difference signal with the excitation phase of 0 degrees corresponds to the wave trough of the difference signal with the excitation phase of 180 degrees.
1) When the ultrasonic signal with the excitation phase of 0 ° is obtained, the received signal of the ultrasonic probe 2 may be obtained, as shown in fig. 3, the received signal of the ultrasonic probe 1 may also be obtained, the time shift thereof corresponds to fig. 3, as shown in fig. 2, the time domain signal of fig. 2 is subtracted from the time domain signal of fig. 3, to obtain the difference signal of the two ultrasonic probes with the excitation phase of 0 °, as shown in fig. 6, it can be seen that the time axes of fig. 2, 3 and 6 are kept consistent, and all the signal fluctuation occurs at 10 μ s;
2) When the ultrasonic signal with the excitation phase of 180 ° is obtained, the received signal of the ultrasonic probe 2 can be obtained, as shown in fig. 5, the received signal of the ultrasonic probe 1 can also be obtained, the time shift thereof corresponds to that of fig. 5, as shown in fig. 4, the time domain signal of fig. 4 is subtracted from the time domain signal of fig. 5, and the difference signal of the two ultrasonic probes with the excitation phase of 180 ° is obtained, as shown in fig. 7, it can be seen that the time axes of fig. 4, 5 and 7 are consistent, and signal fluctuation occurs when 10 μ s;
and S3, carrying out Fourier transform on the superposed ultrasonic signals, wherein the amplitude of the fundamental wave is greatly suppressed and the amplitude of the second harmonic wave is enhanced as shown in FIG. 9.
S4, calculating a nonlinear ultrasonic coefficient of the crack defect test piece, wherein the expression of the nonlinear ultrasonic coefficient is as follows:
wherein A is 1 For the amplitude of the fundamental wave of the received signal, A 2 Is the second harmonic amplitude of the received signal.
TABLE 1 test results of crack defect specimens
The detection results are shown in table 1, and the signals of fig. 2, 3, 4 and 5 all contain the nonlinear response of the system, and the nonlinear ultrasonic coefficient thereof contains the nonlinearity of a part of the detection system, and cannot accurately reflect the crack defects of the material. The signals of fig. 6 and 7 do not contain the nonlinear response of the system, and the nonlinear ultrasonic coefficient only contains the nonlinearity of the material per se, so that the crack defects of the material can be accurately reflected, but the second harmonic amplitude is smaller. The signal of fig. 9 also does not contain the nonlinear response of the system, and the fundamental wave amplitude is minimum, and the second harmonic amplitude is maximum, so the nonlinear ultrasonic coefficient is also maximum, which not only ensures the accuracy of the nonlinear ultrasonic coefficient, but also improves the amplitude of the second harmonic. The nonlinear ultrasonic coefficient correction method is applied to defect damage assessment of material members, and the detection accuracy is high.
The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.
Claims (8)
1. A nonlinear ultrasonic coefficient correction method based on a pulse inversion technology is characterized in that: the method comprises the following steps:
s1, building a nonlinear ultrasonic detection system;
s2, carrying out nonlinear ultrasonic detection on the crack defect test piece by using a pulse inversion technology: the ultrasonic probe 1 respectively excites ultrasonic signals with phases of 0 degree and 180 degree and receives ultrasonic signals reflected by cracks, the ultrasonic probe 2 receives ultrasonic signals transmitted by the cracks, the ultrasonic signals transmitted by the cracks are used for making difference to obtain signals without system nonlinear sources, and then the two difference signals with excitation phases of 0 degree and 180 degree are subjected to time-shift superposition;
s3, carrying out Fourier transform on the superposed ultrasonic signals;
and S4, calculating a nonlinear ultrasonic coefficient to evaluate the crack defect.
2. The method for modifying nonlinear ultrasound coefficients based on pulse inversion technique as claimed in claim 1, wherein: in the step S2, when the ultrasonic signal with the excitation phase of 0 degree is obtained, the time domain signal received by the ultrasonic probe 1 is subtracted from the time domain signal received by the ultrasonic probe 2 to obtain a difference signal of the two ultrasonic probes when the excitation phase is 0 degree; when the excitation phase is 180 degrees, the time domain signal received by the ultrasonic probe 1 is subtracted from the time domain signal received by the ultrasonic probe 2 to obtain a difference signal of the two ultrasonic probes when the excitation phase is 180 degrees.
3. The method for modifying nonlinear ultrasound coefficients based on the pulse inversion technique as claimed in claim 2, wherein: when the receiving signals of the two ultrasonic probes are different in the same excitation phase, the receiving signal of the ultrasonic probe 1 is time-shifted to correspond to the receiving signal of the ultrasonic probe 2.
4. The method for modifying nonlinear ultrasound coefficients based on pulse inversion technique as claimed in claim 2, characterized in that: in step S3, fourier transform is performed on two difference signals at excitation phases of 0 ° and 180 °.
5. The method for modifying nonlinear ultrasound coefficients based on pulse inversion technique as claimed in claim 1, characterized in that: in step S4, the expression of the nonlinear ultrasound coefficient is:
wherein A is 1 For the amplitude of the fundamental wave of the received signal, A 2 Is the second harmonic amplitude of the received signal.
6. The method for modifying nonlinear ultrasound coefficients based on pulse inversion technique as claimed in claim 1, characterized in that: in step S1, the nonlinear ultrasonic detection system comprises a computer, an RAM-5000-SNAP test system, an oscilloscope, an impedance matching device, an attenuator, a low-pass filter, an ultrasonic probe 1, an ultrasonic probe 2, a duplexer and a preamplifier.
7. The method for modifying nonlinear ultrasound coefficients based on pulse inversion technique as claimed in claim 6, characterized in that: the computer is in communication connection with the RAM-5000-SNAP test system and is used for controlling the RAM-5000-SNAP test system to output pulse signals;
the RAM-5000-SNAP test system is connected with the impedance matching, the attenuator and the low-pass filter in sequence, then is connected with the duplexer, and pulse signals output by the RAM-5000-SNAP test system sequentially pass through the impedance matching, the attenuator and the low-pass filter and then enter the duplexer;
the duplexer is in communication connection with the ultrasonic probe 1 and is used for inputting signals to the ultrasonic probe 1;
the ultrasonic probe 1 is used for exciting a signal received by the duplexer into an ultrasonic signal and receiving a reflected wave generated by the ultrasonic signal passing through a crack of a crack defect test piece, the duplexer is in communication connection with the RAM-5000-SNAP test system through a preamplifier, and the reflected wave received by the ultrasonic probe 1 is sent to the RAM-5000-SNAP test system through the duplexer and the preamplifier;
the ultrasonic probe 2 is in communication connection with the RAM-5000-SNAP test system through another preamplifier, and the ultrasonic probe 2 is used for receiving ultrasonic signals, generating transmission waves through cracks of a crack defect test piece and sending the transmission waves into the RAM-5000-SNAP test system through the preamplifier;
the oscilloscope is connected with the RAM-5000-SNAP test system and used for displaying the detected ultrasonic signals.
8. The method for modifying nonlinear ultrasound coefficients based on the pulse inversion technique as claimed in claim 6 or 7, wherein: the ultrasonic probe 1 is an ultrasonic probe integrating receiving and transmitting and is used for exciting ultrasonic signals and receiving the ultrasonic signals; the ultrasonic probe 2 is a receiving probe and is used for receiving ultrasonic signals.
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| CN116026933A (en) * | 2023-03-27 | 2023-04-28 | 天津市特种设备监督检验技术研究院(天津市特种设备事故应急调查处理中心) | Method for determining detection resolution and detection sensitivity of nonlinear ultrasonic detection system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116026933A (en) * | 2023-03-27 | 2023-04-28 | 天津市特种设备监督检验技术研究院(天津市特种设备事故应急调查处理中心) | Method for determining detection resolution and detection sensitivity of nonlinear ultrasonic detection system |
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