CN115701370A

CN115701370A - Light irradiation device

Info

Publication number: CN115701370A
Application number: CN202210875138.0A
Authority: CN
Inventors: 石川直树
Original assignee: Screen Holdings Co Ltd
Current assignee: Screen Holdings Co Ltd
Priority date: 2021-08-02
Filing date: 2022-07-22
Publication date: 2023-02-10
Also published as: JP2023021574A; TW202306689A; TWI808774B; KR20230019777A

Abstract

The invention provides a light irradiation device, which restrains the reduction of light detection precision by restraining the reduction of light quantity caused by transmission. The light irradiation device is provided with: at least one light irradiation section for irradiating light; and a detection unit for detecting light, the detection unit including: a transmission member for transmitting the light irradiated from the light irradiation section; and a photodetector for detecting the light transmitted by the transmission member, the transmission member being provided with at least one transmission direction changing portion that changes a transmission direction of the light transmitted by the transmission member toward the photodetector.

Description

Light irradiation device

Technical Field

The technology disclosed in the present specification relates to a technology for detecting irradiated light.

Background

Conventionally, a photo-processing technique for processing an object by irradiation with light such as laser light has been used (for example, see patent document 1).

Patent document 1: japanese patent laid-open publication No. 2006-272430

Disclosure of Invention

Problems to be solved by the invention

When the light amount of the irradiated light is detected by the photodetector, the light amount may decrease in the process of transmitting the light to the photodetector. In this case, a sufficient amount of light for light detection cannot be obtained in the photodetector, and as a result, the light detection accuracy is lowered.

The technique disclosed in the present specification has been made in view of the above-described problems, and is a technique for suppressing a decrease in light detection accuracy by suppressing a decrease in the amount of light due to transmission.

Means for solving the problems

A light irradiation device according to a first aspect of the technology disclosed in the present specification includes: at least one light irradiation section for irradiating light; and a detection unit for detecting the light, the detection unit including: a transmission member for transmitting the light irradiated from the light irradiation section; and a photodetector for detecting the light transmitted by the transmission member, wherein the transmission member is provided with at least one transmission direction changing portion that changes a transmission direction of the light transmitted by the transmission member in a direction toward the photodetector.

A light irradiation device according to a second aspect of the technology disclosed in the present specification is related to the light irradiation device of the first aspect, wherein the propagation direction changing unit includes a reflecting surface that reflects the light incident on the propagation member, and the reflecting surface reflects the light incident on the propagation member in a direction toward the photodetector and then causes the light to enter the propagation member.

A light irradiation device according to a third aspect of the technology disclosed in the present specification is related to the light irradiation device of the first or second aspect, wherein the propagation direction changing portion has a refraction surface that refracts the light incident on the propagation member in a direction toward the photodetector.

A light irradiation device of a fourth aspect of the technology disclosed in the present specification is associated with the light irradiation device of any one of the first to third aspects, the conveying direction changing portion is provided in plurality, and the plurality of conveying direction changing portions are arranged along a longitudinal direction of the conveying member.

A light irradiation device according to a fifth aspect of the technology disclosed in the present specification is related to the light irradiation device according to any one of the first to fourth aspects, further comprising a stage, wherein the light irradiation section irradiates the light onto an upper surface of the stage, at least one scattering section for scattering the light is provided at least in part of the stage, the scattering section is made of a transparent material, and the transmission member transmits the light incident through the scattering section.

A light irradiation device of a sixth aspect of the technology disclosed in the present specification is related to the light irradiation device of the fifth aspect, and the propagation direction changing portion is disposed in correspondence with a position of the scattering portion.

A light irradiation device according to a seventh aspect of the technology disclosed in the present specification is related to the light irradiation device according to the fifth aspect, and the light irradiation device further includes a chamber in which the stage is placed, and the photodetector detects the light transmitted by the transmission member outside the chamber.

A light irradiation device according to an eighth aspect of the technology disclosed in the present specification is related to the light irradiation device according to the fifth aspect, wherein the detection unit further includes: a condensing lens for condensing the light incident via the scattering portion; and a light shielding plate disposed at a position farther from the scattering portion than the condenser lens and at a converging position of the condenser lens, the transmitting member transmitting the light converged by the condenser lens.

A light irradiation device of a ninth aspect of the technology disclosed in the present specification is related to the light irradiation device of any one of the first to eighth aspects, and the light irradiated from the light irradiation section is laser light.

Effects of the invention

According to at least the first aspect of the technology disclosed in the present specification, the transmission direction of the light incident on the transmission member is changed in the direction in which the photodetector is located by the transmission direction changing unit, and the transmission of the light to the side opposite to the photodetector or the like can be effectively suppressed, and the light can be efficiently transmitted to the photodetector. As a result, the light transmitted to the photodetector can be increased, and the decrease in the light detection accuracy can be suppressed.

In addition, objects, features, aspects and advantages related to the technology disclosed in the present specification will become more apparent from the detailed description and the accompanying drawings shown below.

Drawings

Fig. 1 is a perspective view schematically showing an example of the structure of a light irradiation device according to an embodiment.

Fig. 2 is a cross-sectional view showing an example of the internal structure and the peripheral structure of the vacuum chamber of the light irradiation device of the embodiment.

Fig. 3 is a perspective view mainly showing the light irradiation section and the stage in the configuration illustrated in fig. 2.

Fig. 4 is a cross-sectional view mainly showing an example of the structures of the light irradiation section and the stage in the structure illustrated in fig. 2.

Fig. 5 is a schematic view showing a condensing unit and a transparent rod in the detection section.

Fig. 6 is a schematic view showing a condensing unit and a transparent rod in the detection section.

Fig. 7 is a diagram showing an example of a transmission path of light that reaches the transparent rod.

Description of the reference numerals:

1: light irradiation device

18: light irradiation section

18B: converging lens

18C: laser

42: object stage

62: detection part

62C: light detector

62E: converging lens

118C: light (es)

142A: scattering part

162: converging lens

164: light shading plate

266A: refracting surface

266B, and (3): reflecting surface

Detailed Description

Hereinafter, embodiments will be described with reference to the drawings. In the following embodiments, detailed features and the like are shown for explaining the technology, but these are examples, and all the features are not necessarily essential features for enabling the implementation of the embodiments.

The drawings are schematically illustrated, and the structures are omitted or simplified as appropriate in the drawings for the convenience of description. The mutual relationship between the size and the position of the structures and the like shown in the different drawings is not necessarily described accurately, and may be changed as appropriate. In addition, in the drawings such as a plan view of a non-sectional view, a shadow may be added to facilitate understanding of the contents of the embodiment.

In the following description, the same components are denoted by the same reference numerals and have the same names and functions. Therefore, detailed descriptions thereof may be omitted to avoid redundancy.

In the description of the present specification, when a structural member is referred to as being "provided", "included", or "provided" or the like, unless otherwise specified, it is not an exclusive expression that excludes the presence of other structural members.

In the description of the present specification, even if ordinal numbers such as "first" and "second" are used in some cases, these terms are used for convenience of understanding the contents of the embodiments, and are not limited to the order in which the ordinal numbers are generated.

In the description of the present specification, the expression "a.. Axis positive direction" or "a.. Axis negative direction" or the like denotes that a direction of an arrow along the illustrated.. Axis is a positive direction and a direction opposite to the arrow of the illustrated.. Axis is a negative direction.

In addition, in the description set forth in the present specification, expressions indicating relative or absolute positional relationships, such as "in one direction", "parallel", "orthogonal", "central", "concentric" or "coaxial", and the like, include, unless otherwise specified, cases where positional relationships thereof are strictly expressed and cases where angular or distance displacements occur within a range where tolerance or equivalent degree of function can be obtained.

In the description of the present specification, even though terms indicating specific positions or directions such as "up", "down", "left", "right", "side", "bottom", "front" or "back" are used in some cases, these terms are used for ease of understanding the contents of the embodiments and are not related to the positions or directions in actual implementation.

In the description of the present specification, the term "upper surface" or "lower surface" or the like, as used herein, includes a state in which another structural member is formed on the upper surface or the lower surface of the target structural member, in addition to the upper surface or the lower surface of the target structural member. That is, for example, in the case of the description "B provided on the upper surface of a", the other structural member "C" is not prevented from being interposed between a and B.

< embodiment >

The following describes the light irradiation device according to the present embodiment. In the following embodiments, a light irradiation device in which the chamber is vacuum or a reduced-pressure gas atmosphere is described as an example, but the present invention is also applicable to a case where the chamber is not vacuum.

< construction of light irradiation apparatus >

Fig. 1 is a perspective view schematically showing an example of the structure of a light irradiation device 1 according to the present embodiment. In fig. 1, for convenience, a chamber frame for supporting the vacuum chamber 12, wiring for actual connection, and the like are not illustrated. In addition, the "vacuum" in the present embodiment is preferably a high vacuum (for example, 0.00001 Pa) in order to prevent the characteristic degradation of the substrate W, but includes a vacuum degree lower than the high vacuum.

As illustrated in fig. 1, the light irradiation device 1 includes: a vacuum chamber 12; an external fixing portion 14 such as a stone block; a bellows 16 as a stretchable member, which connects the vacuum chamber 12 and the external fixing portion 14 and is formed of, for example, stainless steel; a light irradiation unit 18 for irradiating light into the vacuum chamber 12; a vacuum pump 21 for reducing the pressure in the vacuum chamber 12 to a vacuum state; and a control unit 22 for controlling the respective driving units of the light irradiation device 1. In the above, as an example of the stretchable member, a corrugated tube made of stainless steel or the like is shown, but a stretchable member made of a metal other than stainless steel or a stretchable member made of a resin or the like may be used according to the required specifications. The shape of the stretchable member may be other than the bellows shape like the bellows 16A.

The vacuum chamber 12 has a space for accommodating the substrate W therein. Examples of the substrate to be processed include a semiconductor wafer, a glass substrate for a liquid crystal display device, a substrate for a Flat Panel Display (FPD) such as an organic EL (electroluminescence) display device, a substrate for an optical disk, a substrate for a magnetic disk, a substrate for an optical disk, a glass substrate for a photomask, a ceramic substrate, a substrate for a Field Emission Display (FED), a substrate for a solar cell, and the like. The substrate W is, for example, a substrate having a thin film formed on the upper surface thereof.

An opening 12A through which the substrate W passes when the substrate W is carried in and out is formed in a side surface of the vacuum chamber 12. When the vacuum chamber 12 becomes a vacuum state, the opening portion 12A is appropriately closed. Other structures housed inside the vacuum chamber 12 are described later.

The light irradiation unit 18 irradiates light on the upper surface of the substrate W accommodated in the vacuum chamber 12. At this time, the substrate W is aligned in advance by a detection unit or the like described later. The light irradiation unit 18 performs ablation (ablation) processing of the substrate W by, for example, laser light irradiation. The light irradiation unit 18 may be a member that irradiates light such as an electron beam according to the purpose of processing or the like. The light irradiation unit 18 irradiates light from the outside of the vacuum chamber 12 to the upper surface of the substrate W accommodated in the vacuum chamber 12 through an irradiation window (transparent plate made of quartz or the like) not shown. Then, the substrate W in the vacuum chamber 12 is moved relative to the light irradiation unit 18 or the upper surface of the substrate W is scanned by light under the control of an optical system in the light irradiation unit 18. The light irradiation unit 18 is disposed on the upper surface of the stage 24 fixed to the external fixing unit 14.

The control section 22 may include: a storage device including a memory (storage medium) including, for example, a Hard Disk Drive (HDD), a Random Access Memory (RAM), a Read Only Memory (ROM), a flash memory, a volatile or nonvolatile semiconductor memory, a magnetic disk, a flexible disk, an optical disk, a compact disk, a mini disk, a DVD, or the like; a processing circuit such as a Central Processing Unit (CPU) that executes a program stored in the storage device, an external CD-ROM, an external DVD-ROM, an external flash memory, or the like; input devices capable of inputting information, such as a mouse, a keyboard, a touch panel, and various switches; and an output device such as a display, a liquid crystal display device, or a lamp capable of outputting information.

The control unit 22 controls the output of the light source and the direction of light irradiation in the light irradiation unit 18, controls the output of the vacuum pump 21, and controls the driving of the driving units, which will be described later.

Fig. 2 is a cross-sectional view showing an example of the internal structure and the surrounding structure of the vacuum chamber 12 of the light irradiation device 1 of the present embodiment. As illustrated in fig. 2, the vacuum chamber 12 includes: a stage 42 on which a substrate W is disposed; a slider 44 that is movable in the Y-axis direction and supports the stage 42 from below; a base 46 fixed to the external fixing unit 14 independently of the vacuum chamber 12; a linear guide 48 fixed to the base 46 and extending in the Y-axis direction; a linear motor mechanism 50 that moves the slider 44 in the Y-axis direction along the linear guide 48; and an elevating pin mechanism 52 having elevating pins 52A, the elevating pins 52A penetrating through holes (not shown) formed in the stage 42 to support the substrate W.

The stage 42 faces the processing surface of the substrate W upward and holds the substrate W substantially horizontally. The detailed structure of the stage 42 is described later. The slider 44 supporting the stage 42 is moved in the Y-axis direction by the linear motor mechanism 50, and the light irradiated from the light irradiation unit 18 is scanned in the X-axis direction, whereby the entire processing area of the substrate W can be scanned by the light in a plan view. Alternatively, the light irradiated from the light irradiation unit 18 may scan the entire processing region of the substrate W with the light in a plan view by scanning the light in the X-axis direction and the Y-axis direction. The lifter pin mechanism 52 is fixed to the base 46.

The linear motor mechanism 50 is fixed to the external fixing portion 14 located on the side of the vacuum chamber 12 through an opening 12B formed in the side surface of the vacuum chamber 12. Specifically, the linear motor mechanism 50 is fixed to an end portion of the hollow columnar member 14A inserted into the bellows 16A welded to the opening portion 12B. At this time, the wiring and the like connected to the linear motor mechanism 50 are led out of the vacuum chamber 12 through the inside of the columnar member 14A. Further, the columnar member 14A included in the external fixation portion 14 is fixed to the external member 14B included in the external fixation portion 14. In addition, the columnar member 14A does not contact the bellows 16A connected to the side of the vacuum chamber 12.

The base 46 is fixed to the external fixing portion 14 located below the vacuum chamber 12 through an opening 12C formed in the bottom surface of the vacuum chamber 12. Specifically, the base 46 is fixed to an end portion of the columnar member 14C that passes through the bellows 16B welded to the opening 12C. Further, the columnar member 14C included in the external fixation portion 14 is fixed to the external member 14B included in the external fixation portion 14. In addition, the columnar member 14C does not contact the bellows 16B connected to the bottom surface of the vacuum chamber 12.

In fig. 2, the external fixing portions 14 are disposed over the sides and the lower side of the vacuum chamber 12, and the external fixing portions 14 at these positions are not necessarily continuous, may be provided at these positions in a dispersed manner, and may be provided only at arbitrary positions. The vacuum chamber 12 is supported and fixed by a chamber frame (not shown) separately from the bellows 16B from the vertical direction, but the chamber frame is provided separately from the external fixing portion 14.

Fig. 3 is a perspective view mainly showing the light irradiation section 18 and the stage 42 in the configuration illustrated in fig. 2. Fig. 3 shows a state in which a substrate W is disposed on the upper surface of the stage 42. The light irradiation unit 18 can scan the irradiation direction of light in the X-axis direction in fig. 3, and the stage 42 can be moved in the Y-axis direction by a linear motor mechanism 50 (see fig. 2). Thus, the light irradiated from the light irradiation unit 18 onto the upper surface of the stage 42 can form a rectangular irradiation region (light irradiation region) on the upper surface of the substrate W.

As shown in fig. 3, the stage 42 includes: an object arrangement region 42A in which a substrate W as an object to be irradiated with light by the light irradiation unit 18 is arranged; and a position calibration area 42B for calibrating the position of the light irradiated by the light irradiation section 18.

The target placement area 42A places the substrate W at a predetermined position in the target placement area 42A. Thereby, the positional relationship between the stage 42 and the substrate W is predetermined. In the position calibration region 42B, the position of the light irradiated from the light irradiation section 18 into the position calibration region 42B is detected. In the position calibration area 42B, before the substrate W in the target arrangement area 42A is subjected to the photo-processing treatment, the correspondence between the set value of the direction of the light irradiated from the light irradiation section 18 and the irradiation position of the detected light is calibrated.

At least a part of the position alignment region 42B is provided with a light transmitting portion 142 that transmits light. The light-transmitting portion 142 is made of quartz (SiO) ₂ ) Or a transparent material such as a glass material or a transparent resin (e.g., silicone resin). The light-transmitting portion 142 is provided from the upper surface to the lower surface of the stage 42 corresponding to the position alignment region 42B. The light irradiated from the light irradiation section 18 to the light transmission section 142 is transmitted from the upper surface to the lower surface of the stage 42.

The light transmitting portion 142 is provided with, for example, two scattering portions 142A. Further, the number of the scattering portions 142A is not limited to two. The scattering portion 142A is made of a transparent material, and reflects or transmits irradiated light while scattering it. The position where the scattering portion 142A is provided is a specific position on the stage 42. That is, the position of the scattering portion 142A is predetermined over the entire stage 42. In fig. 3, the scattering portions 142A are disposed at the ends of the light irradiation region of the light irradiation portion 18 in the X-axis direction, but the positions at which the scattering portions 142A are disposed are not limited to the ends of the light irradiation region of the light irradiation portion 18 as long as they are predetermined positions on the stage 42. The scattering portion 142A has a property of scattering incident light, and is obtained by sand blasting a transparent material such as a glass material or by sanding using hydrofluoric acid or the like, for example. In fig. 3, each scattering portion 142A is formed on the upper surface of the transparent portion 142, but at least one scattering portion 142A may be formed on the lower surface of the transparent portion 142.

In the case shown in fig. 3, the object arrangement region 42A and the position calibration region 42B are separate regions, but at least a part of these regions may overlap. That is, the light-transmitting portion 142 may be provided in a region where at least a part of the substrate W is disposed. In this case, for example, the position of the light irradiated from the light irradiation section 18 may be calibrated at a predetermined position where the substrate W is disposed in a state where the substrate W is not disposed.

The light-transmitting portion 142 may have a scattering portion 142A formed over the entire range thereof. That is, the light may be scattered over the entire area of the light transmission portion 142 so that there is no portion through which only light passes.

In fig. 3, the light transmitting portion 142 is provided to extend in the X axis direction, and the scattering portion 142A is provided at each end in the X axis direction, but the light transmitting portion 142 may be divided into a plurality of portions in the X axis direction. However, in the case where the plurality of scattering portions 142A are provided on the light transmitting portion 142 integrally formed (that is, in the case shown in fig. 3), the light transmitting portion 142 can be attached (fitted in the case shown in fig. 3) to the stage 42 while maintaining the positional accuracy between the plurality of scattering portions 142A when the light transmitting portion 142 is made of a transparent material. Therefore, since the scattering portions 142A are not displaced when mounted on the stage 42, the accuracy of the calibration using the plurality of scattering portions 142A can be kept high.

Fig. 4 is a cross-sectional view mainly illustrating an example of the structures of the light irradiation section 18 and the stage 42 in the structure illustrated in fig. 2. As illustrated in fig. 4, the light irradiation unit 18 includes: a scanner 18A such as a galvanometer mirror or a polygon mirror for controlling the direction of the irradiated light in the X axis direction or the Y axis direction; and a condenser lens 18B for condensing light from a light source not shown. In fig. 4, the light irradiated via the condensing lens 18B and further via the irradiation window 20 formed of quartz is, for example, a laser light 18C. The laser beam 18C can scan the substrate W placed on the upper surface of the stage 42 in the X-axis direction and the Y-axis direction by the control of the scanner 18A. Here, the light irradiation section 18 is preferably capable of controlling light in the X-axis direction and the Y-axis direction, but the light irradiation section 18 may also be capable of controlling light in either the X-axis direction or the Y-axis direction.

The stage 42 includes a light-transmitting portion 142 formed in the position alignment region 42B (see fig. 3), and a scattering portion 142A formed on the upper surface of the light-transmitting portion 142. The laser light 18C irradiated from the light irradiation section 18 may be scanned in a range reaching at least the scattering section 142A in the X-axis direction.

A detector 62 for detecting light is disposed below the stage 42. The detection unit 62 includes: a condensing unit 62A that condenses light in the vacuum chamber 12; a transparent rod 62D made of a transparent material such as glass and transmitting the light condensed by the condensing unit 62A; a prism structure 166 which is provided on the upper surface of the transparent rod 62D and changes the transmission direction of light; an optical fiber 62B that emits light transmitted in the transparent rod 62D from the transparent rod 62D; a condensing lens 62E for condensing the light emitted from the optical fiber 62B; and a photodetector 62C that detects light to be condensed by the condensing lens 62E outside the vacuum chamber 12 through a transparent window 20A provided in a frame of the vacuum chamber 12. The light irradiation unit 18 and the detection unit 62 can be provided to constitute a light detection device.

The prism structure 166 includes: a refractive prism 166A having a refractive surface 266A that primarily refracts light, and a reflective prism 166B having a reflective surface 266B that primarily reflects light. In fig. 4, two prism structures 166 are provided, and in each prism structure 166, a refractive prism 166A is disposed on a side close to the photodetector 62C, and a reflective prism 166B is disposed on a side far from the photodetector 62C.

The prism structure 166 is a polyhedron formed of a transparent medium such as glass or crystal. The prism structure 166 may be mechanically arranged with an air gap between it and the upper surface of the transparent rod 62D, or may be bonded to the upper surface of the transparent rod 62D using a low-outgassing optical glass adhesive or the like.

The prism structure 166 is preferably disposed at a position overlapping the scattering portion 142A in a plan view. In addition, as illustrated in fig. 4, when a plurality of prism structures 166 are provided along the longitudinal direction of one transparent rod 62D, light transmitted from a plurality of detection sites can be transmitted using a single transparent rod 62D, and detection can be performed using a single light detector 62C.

The refractive surface 266A of the refractive prism 166A is, for example, a surface on which a single-layer or multi-layer antireflection film is formed. As a material of the film, for example, magnesium fluoride, silicon dioxide, or the like is conceivable. The inclination angle of the refractive surface 266A is adjusted according to the angle of the incident light. The reflection surface 266B of the reflection prism 166B is, for example, a surface on which a dielectric multilayer film is formed. The reflection prism 166B may be replaced with another mirror member having the same function as the reflection surface 266B. The inclination angle of the reflecting surface 266B is adjusted according to the angle of the incident light.

Fig. 5 and 6 are schematic diagrams illustrating the condensing unit 62A and the transparent rod 62D in the detection section. In fig. 5 and 6, the prism structure 166 shown in fig. 4 is omitted for simplicity.

As illustrated in fig. 5 and 6, the convergence unit 62A includes: a condensing lens 162 that condenses the light incident from the light irradiation section 18 of fig. 4 on the optical axis of the light; and a light shielding plate 164 disposed further downstream of the light path (i.e., on the negative Z-axis direction side in fig. 5 and 6) than the condensing lens 162 on the optical axis of the light incident from the light irradiation section 18. The light blocking plate 164 is a plate-shaped member that blocks incident light, and is disposed at a position farther from the light transmission portion 142 than the condenser lens 162, at the condensing position of the condenser lens 162.

In addition, as illustrated in fig. 5 and 6, the transparent rod 62D is made of quartz (SiO) ₂ ) Or a transparent material such as a glass material or a transparent resin (e.g., silicone resin). The transparent rod 62D is, for example, a rod member having a cylindrical shape, and is formed to extend on a plane (i.e., XY plane) along the surface of the stage 42 in fig. 4. If the transparent rod 62D has a cylindrical shape, when the light condensed by the condensing unit 62A enters the transparent rod 62D, the total reflection condition becomes easy to be satisfied inside the transparent rod 62D, and the light can be efficiently transmitted. The shape of the transparent rod 62D is not limited to a cylindrical shape, and may be, for example, a prismatic shape. In the present embodiment, the transparent rod 62D is shown as a rod, but the transparent rod 62D may have a surface shape corresponding to the entire surface of the stage 42, for example.

The transparent rod 62D is disposed at a position conjugate to the scattering portion 142A with respect to the condenser lens 162 in the Z-axis direction.

The transparent rod 62D is disposed in a range overlapping at least the scattering portion 142A in a plan view (for example, a range including the scattering portion 142A in a plan view). According to such a configuration, the light scattered by the scattering portion 142A and condensed at the condensing unit 62A is efficiently incident to the transparent rod 62D and transmitted

In the case shown in fig. 5, the laser light 18C (parallel light) incident from the light irradiation section 18 (see fig. 4) reaches the condensing unit 62A only through the light transmitting section 142 in the stage 42. On the other hand, in the case shown in fig. 6, the laser light 18C incident from the light irradiation section 18 (see fig. 4) reaches the condensing unit 62A through the scattering section 142A and the light transmitting section 142 in the stage 42. In fig. 6, the laser light 18C passes through the scattering portion 142A and the light transmitting portion 142, but the laser light 18C may pass through only the scattering portion 142A.

In the case shown in fig. 5, the laser light 18C that has passed through the translucent portion 142 other than the scattering portion 142A reaches the condensing unit 62A so that the irradiation range and direction of the light do not change significantly. Then, the laser light 18C is condensed by the condensing lens 162 in the condensing unit 62A and is incident on the light shielding plate 164 disposed at the condensing position of the condensing lens 162. Then, the light is blocked by the mask 164, and therefore the laser light 18C does not reach the transparent rod 62D further downstream than the mask 164 in the path of the light along the optical axis of the laser light 18C.

On the other hand, in the case shown in fig. 6, the laser light 18C that has passed through the scattering portion 142A in the light transmitting portion 142 scatters light when passing through the scattering portion 142A. Then, the laser light 18C reaches the condensing unit 62A in a state where the irradiation range of the laser light 18C is expanded by the scattered light (sand portion in fig. 6). Then, the laser light 18C is condensed by the condensing lens 162 in the condensing unit 62A.

At this time, the laser light 18C whose irradiation range is expanded by the scattering of the light in the scattering section 142A includes many components other than the parallel light, and at least a part of the components are not condensed at the condensing position of the condenser lens 162. Thus, the light blocking plate 164 disposed at the converging position of the converging lens 162 blocks only a part of the laser beam 18C. In other words, a part of the laser light 18C not blocked by the mask 164, that is, scattered light of the laser light 18C reaches the transparent rod 62D downstream of the mask 164 on the path of light along the optical axis of the laser light 18C.

As described above, when the laser light 18C irradiated onto the upper surface of the stage 42 enters the portion of the transparent portion 142 where the scattering portion 142A is formed, the laser light is condensed by the condensing unit 62A and reaches the transparent rod 62D. Then, the light having reached the transparent rod 62D is condensed by the condensing lens 62E after being transmitted within the transparent rod 62D and further within the optical fiber 62B connected to the end of the transparent rod 62D, and is detected in the optical detector 62C. Thus, when the laser beam 18C is irradiated to the scattering portion 142A, the detection portion 62 can detect the scattered light of the laser beam 18C, and therefore the position of the irradiated light can be calibrated so that the setting value of the scanner 18A (see fig. 4) at this time corresponds to the position of the scattering portion 142A. Thus, in the subsequent step, when the substrate W disposed on the upper surface of the stage 42 is optically processed, the position of the light irradiated from the light irradiation section 18 (see fig. 4) can be accurately aligned.

Further, since the translucent portion 142 and the transparent rod 62D to which light is applied by the light applying portion 18 (see fig. 4) are made of transparent materials, even when light of high intensity is repeatedly applied to the translucent portion 142 and the transparent rod 62D in order to align the position of light applied by the light applying portion 18 (see fig. 4), damage to the target (i.e., the translucent portion 142 and the transparent rod 62D) to which light is applied in order to align the position can be suppressed.

Further, since the light detected by the detection unit 62 is not transmitted light that has passed through the light transmission portion 142 without being scattered, it is possible to suppress damage caused by the light in the detection unit 62, as compared with a case where the transmitted light without being scattered is directly detected.

Fig. 7 is a diagram showing an example of a transmission path of the light 118C reaching the transparent rod 62D. The light 118C is, for example, light that is scattered by the scattering portion 142A and condensed by the condensing unit 62A to reach the transparent rod 62D by the laser light 18C irradiated from the light irradiation portion 18 shown in fig. 4.

As illustrated in fig. 7, the light 118C traveling (transmitted) in the Z-axis negative direction first enters the prism structure 166 provided on the upper surface of the transparent rod 62D. Specifically, light 118C is incident on reflective prism 166B in prismatic structure 166. Then, the light 118C is reflected by the reflection surface 266B of the reflection prism 166B, and the traveling direction (transmission direction) thereof changes to the X-axis negative direction.

Light 118C is then incident on refractive prism 166A in prismatic structure 166. Then, the light 118C is refracted at the refractive surface 266A of the refractive prism 166A, so that the component in the Z-axis negative direction is added to the traveling direction (transmission direction) thereof (i.e., the component is bent in the Z-axis negative direction while traveling in the X-axis negative direction), and the light 118C is incident into the transparent rod 62D. Then, the light 118C is transmitted through the transparent rod 62D, further transmitted through the optical fiber 62B attached to the end portion of the transparent rod 62D on the X-axis negative direction side, and finally detected by the photodetector 62C (see fig. 4).

In the case where the prism structure 166 is not provided, as shown in fig. 7, the light 118C incident perpendicularly to the transparent rod 62D is transmitted through the transparent rod 62D or is isotropically scattered on the lower surface of the transparent rod 62D. Then, after the scattering, only the light satisfying the total reflection condition in the transparent rod 62D is transmitted in the transparent rod 62D, and is finally detected by the photodetector 62C (see fig. 4).

Thus, the light detected by the photodetector 62C connected to the one end portion of the transparent rod 62D via the optical fiber 62B is limited to the light scattered to the side where the photodetector 62C is located, of the light incident on the transparent rod 62D, and is further limited to the light satisfying the total reflection condition in the transparent rod 62D. As a result, the light amount of the light detected by the photodetector 62C is insufficient, and the light detection accuracy of the photodetector 62C is lowered.

On the other hand, according to the present embodiment, the light 118C traveling in the Z-axis negative direction first enters the prism structure 166 and is reflected by the reflection surface 266B, whereby the traveling direction thereof is changed to the X-axis negative direction. Further, by refracting the light 118C by the refracting surface 266A, the component in the negative Z-axis direction is added to the traveling direction. That is, the traveling direction of the light 118C changes in the direction toward the photodetector 62C by the reflection surface 266B and the refraction surface 266A of the prism structure 166, respectively.

Thus, most of the light reflected or scattered at the lower surface of the transparent rod 62D travels in a direction toward the photodetector 62C. This increases the amount of light detected by the photodetector 62C as compared to when the prism structure 166 is not provided, and as a result, the accuracy of light detection by the photodetector 62C can be improved.

The prism structure 166 may be provided with only the reflection prisms 166B. In this case, if the inclination angle of the reflecting surface 266B of the reflecting prism 166B is larger than that shown in fig. 7, for example, the light 118C traveling (transmitted) in the Z-axis negative direction is reflected by the reflecting surface 266B of the reflecting prism 166B, and then the component in the X-axis negative direction is added to the traveling direction (transmission direction) and directly enters the transparent rod 62D. In this case, as in the case where the refractive prism 166A is further provided, the light 118C can be efficiently transmitted through the transparent rod 62D.

In addition, the prism structure 166 may be provided with only the refractive prisms 166A. In this case, after the light 118C traveling (transmitted) in the Z-axis negative direction and entering the refracting surface 266A of the refractive prism 166A, for example, is refracted by the refracting surface 266A of the refractive prism 166A, the component in the X-axis negative direction is added to the traveling direction (transmission direction) and is incident into the transparent rod 62D. In this case, as in the case where the reflection prism 166B is further provided, the light 118C can be efficiently transmitted through the transparent rod 62D.

< effects produced by the above-described embodiments >

Next, an example of the effects produced by the above-described embodiments is shown. In the following description, the effect is described based on the specific configuration exemplified in the above-described embodiment, but may be replaced with another specific configuration exemplified in the present specification within a range in which the similar effect is produced. That is, in the following description, for convenience, only one of the corresponding specific configurations may be described as a representative, but the specific configuration described as a representative may be replaced with another corresponding specific configuration.

According to the above-described embodiment, the light irradiation device includes at least one light irradiation unit 18 for irradiating light and a detection unit 62 for detecting light. The detection unit 62 includes a transmission member and a photodetector 62C. Here, the transmission member corresponds to, for example, the transparent rod 62D. The transparent rod 62D transmits the light irradiated from the light irradiation section 18. The photodetector 62C detects light transmitted through the transparent rod 62D. The transparent rod 62D is provided with at least one transmission direction changing portion that changes the transmission direction of the light transmitted through the transparent rod 62D in a direction toward the photodetector 62C. Here, the transmission direction changing portion corresponds to, for example, the prism structure 166.

With such a configuration, the prism structure 166 changes the direction of transmission of the light incident on the transparent rod 62D in the direction in which the photodetector 62C is located, and thus can effectively suppress the transmission of the light to the side opposite to the photodetector 62C, etc., and can efficiently transmit the light to the photodetector 62C. As a result, the light transmitted to the photodetector 62C can be increased, and a decrease in the light detection accuracy can be suppressed.

Further, even when another structure exemplified in this specification is appropriately added to the above-described structure, that is, even when another structure in this specification which is not mentioned as the above-described structure is appropriately added, the same effect can be produced.

In addition, according to the above-described embodiment, the prism structure 166 has the reflection surface 266B that reflects light incident on the transparent rod 62D. The reflecting surface 266B reflects the light incident on the transparent rod 62D in a direction toward the photodetector 62C, and then causes the light to enter the transparent rod 62D. According to such a configuration, by reflecting the light incident on the transparent rod 62D in the direction in which the photodetector 62C is located and then entering the transparent rod 62D, the light can be effectively suppressed from being transmitted to the side opposite to the photodetector 62C, and the light can be efficiently transmitted to the photodetector 62C.

Further, according to the above-described embodiment, the prism structure 166 has the refraction surface 266A that refracts the light incident on the transparent rod 62D in the direction toward the photodetector 62C. According to such a configuration, by refracting the light incident on the transparent rod 62D in the direction in which the photodetector 62C is located, the light can be effectively suppressed from being transmitted to the side opposite to the photodetector 62C, and the light can be efficiently transmitted toward the photodetector 62C.

In addition, according to the above-described embodiment, a plurality of prism structures 166 are provided. The plurality of prism structures 166 are arranged along the longitudinal direction of the transparent rod 62D. With this configuration, light incident from different positions in the longitudinal direction of the transparent rod 62D can be transmitted using the single transparent rod 62D, and can be detected using the single photodetector 62C.

In addition, according to the above-described embodiment, the light irradiation device includes the stage 42. Here, the light irradiation unit 18 irradiates light to the upper surface of the stage 42. At least a part of the stage 42 is provided with at least one scattering portion 142A for scattering light. Further, the scattering portion 142A is made of a transparent material. Also, the transparent rod 62D transmits the light incident via the scattering portion 142A. According to such a configuration, since the scattering portion 142A to which light is applied is made of a transparent material, even when light of high intensity such as the laser light 18C is applied, damage to the portion to which light is applied can be reduced. Therefore, the positional accuracy of the light detected by the detection unit 62 is not easily degraded. Further, by detecting the scattered light scattered by scattering section 142A, even when high-intensity light such as laser light 18C is detected, damage to detection section 62 due to direct irradiation with light can be reduced.

In addition, according to the above-described embodiment, the prism structure 166 is disposed in correspondence with the position of the scattering portion 142A. With such a configuration, by changing the transmission direction of the light scattered by the scattering portion 142A and incident on the transparent rod 62D using the prism structure 166, the light can be efficiently transmitted inside the transparent rod 62D.

In addition, according to the above-described embodiment, the light irradiated from the light irradiation section 18 is the laser light 18C. According to such a configuration, even when high-intensity light such as the laser light 18C is irradiated, the transmission direction of the light incident on the transparent rod 62D can be changed in the direction in which the photodetector 62C is located by the prism structure 166, and the light can be efficiently transmitted toward the photodetector 62C by effectively suppressing the light from being transmitted to the side opposite to the photodetector 62C.

Further, according to the above-described embodiment, the light irradiation device includes the cavity in which the stage 42 is placed. Here, the cavity corresponds to, for example, the vacuum cavity 12 or the like. The photodetector 62C detects light transmitted by the transparent rod 62D outside the vacuum chamber 12. According to such a configuration, since the photodetector 62C in the detection unit 62 is provided outside the vacuum chamber 12, the generation of the off-gas emitted from the photodetector 62C in the vacuum chamber 12 can be suppressed.

Further, according to the above-described embodiment, the detection unit 62 includes: a condensing lens 162 for condensing light incident via the scattering portion 142A; and a light blocking plate 164 disposed at a position farther from the scattering portion 142A than the condensing lens 162 and at a condensing position of the condensing lens 162. Then, the transparent rod 62D transmits the light condensed by the condensing lens 162. With this configuration, by detecting the scattered light scattered by scattering unit 142A while blocking the transmitted light by light blocking plate 164, even when high-intensity light such as laser light 18C is detected, damage to detection unit 62 due to direct irradiation with light can be reduced.

< modification of the above-described embodiment >

In the above-described embodiments, the material, size, shape, relative arrangement, conditions for implementation, and the like of each structural member are described, but the present invention is not limited thereto in all aspects.

Therefore, innumerable modifications and equivalents not illustrated can be conceived within the technical scope disclosed in the present specification. For example, the case where at least one structural member is deformed, added, or omitted is included.

In the above-described embodiments, when a material name or the like is described in a manner not particularly specified, other additives, for example, an alloy or the like may be contained in the material as long as no contradiction occurs.

Claims

1. A light irradiation device, wherein,

the disclosed device is provided with:

at least one light irradiation section for irradiating light; and

a detection section for detecting the light,

the detection unit includes:

a transmission member for transmitting the light irradiated from the light irradiation section; and

a light detector for detecting the light transmitted by the transmission member,

the transmission member is provided with at least one transmission direction changing portion that changes a transmission direction of the light to be transmitted by the transmission member in a direction toward the photodetector.

2. The light irradiation apparatus according to claim 1,

the transmission direction changing portion has a reflection surface that reflects the light incident toward the transmission member,

the reflecting surface reflects the light incident on the transmission member in a direction toward the photodetector, and then causes the light to enter the transmission member.

3. The light irradiation apparatus according to claim 1 or 2,

the transmission direction changing portion has a refraction surface that refracts the light incident on the transmission member in a direction toward the photodetector.

4. The light irradiation apparatus according to claim 1 or 2,

the conveying direction changing part is provided with a plurality of parts,

the plurality of conveyance direction changing portions are arranged along a longitudinal direction of the conveyance member.

5. The light irradiation apparatus according to claim 1 or 2,

the light irradiation device is further provided with an object stage,

the light irradiation unit irradiates the light onto the upper surface of the stage,

at least one scattering portion for scattering the light is provided at least in a part of the stage,

the scattering portion is made of a transparent material,

the transmission member transmits the light incident via the scattering portion.

6. The light irradiation apparatus according to claim 5,

the propagation direction changing portion is disposed corresponding to a position of the scattering portion.

7. The light irradiation apparatus according to claim 5,

the light irradiation device further comprises a cavity, the stage is disposed in the cavity,

the light detector detects the light transmitted by the transmission member outside the cavity.

8. The light irradiation apparatus according to claim 5,

the detection unit further includes:

a condensing lens for condensing the light incident via the scattering portion; and

a light shielding plate disposed at a position farther from the scattering portion than the converging lens and at a converging position of the converging lens,

the transmitting member transmits the light condensed by the condensing lens.

9. The light irradiation apparatus according to claim 1 or 2,

the light irradiated from the light irradiation section is laser light.