CN115683442A - Gas pressure sensor based on interdigital electrode and double electric layer principle and preparation method thereof - Google Patents
Gas pressure sensor based on interdigital electrode and double electric layer principle and preparation method thereof Download PDFInfo
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- CN115683442A CN115683442A CN202211332531.1A CN202211332531A CN115683442A CN 115683442 A CN115683442 A CN 115683442A CN 202211332531 A CN202211332531 A CN 202211332531A CN 115683442 A CN115683442 A CN 115683442A
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Abstract
The invention discloses a gas pressure sensor based on an interdigital electrode and double electric layer principle and a preparation method thereof. Belongs to the technical field of design and manufacture of advanced electronic components. Wherein the interdigital electrode, the conducting wire and the like are obtained by depositing metal materials; the substrate layer can be made of rigid materials or flexible materials, and the electrolyte layer is made of a film made of a composite material formed by mixing a polymer material and a small-molecule electrolyte. The invention maintains the constant pressure of one side of the electrolyte layer by preparing the basal layer with the constant-pressure small chamber, generates the deformation of the film by the change of the pressure difference of two sides of the electrolyte layer, thereby generating the change of the extrusion state of the double electric layers, detects the change of the gas pressure by the change of the electric double layer capacitance generated by the double electric layers, and combines the interdigital electrode and the principle of the double electric layers, so that the gas pressure sensor has high sensitivity, wide dynamic range and low pressure resolution.
Description
Technical Field
The invention belongs to the field of design and manufacture of advanced electronic components, and particularly relates to an electrolyte concentration sensor based on a double electric layer principle, a preparation method and application thereof.
Background
The pressure sensor is used for sensing an external pressure signal and can be applied to the fields of artificial intelligence, health monitoring, man-machine interaction and the like. The principle is mainly of a piezoresistive type, a piezoelectric type, a capacitance type, an optical type, an electromagnetic type and the like. Among them, the capacitor type is widely used due to its characteristics of high sensitivity, high integration, capability of detecting static pressure, etc. The gas pressure sensor is a branch of the pressure sensor, and is mainly applied to the fields of detecting gas pressure change, altitude and the like.
Most of electric body pressure sensors on the market at present mainly realize high-sensitivity detection through a bridge structure based on a piezoresistive principle, and the sensors have 2 constant-value resistors and two variable resistors due to the use of the bridge principle, are complex in wire layout, are commonly used in processes such as semiconductor doping, and have complex manufacturing process and higher cost.
The super capacitor is a capacitor with a very large capacitance value, and the super capacitor principle is used for manufacturing the sensor, so that the anti-interference capability of the sensor can be effectively enhanced. An electric double layer capacitor is a kind of super capacitor, which is characterized in that an electric double layer is generated in a sensitive region without electrochemical reaction. However, the double electric layer capacitor is used for preparing the pressure sensor, and the pressure sensor usually has a multi-layer structure of an upper electrode layer and a lower electrode layer, so that the sensitivity is reduced when the pressure sensor is used for preparing air pressure sensing.
Therefore, the research and development of a gas pressure sensor with high sensitivity, a smart structure and a simple preparation process is a technical problem to be solved urgently at present.
Disclosure of Invention
In view of the above, the present invention is directed to a gas pressure sensor based on the principles of interdigital electrodes and electric double layers and a method for manufacturing the same, so as to overcome the disadvantages of the prior art.
According to a first aspect of the invention, a gas pressure sensor based on interdigital electrodes and an electric double layer principle is provided, which comprises a substrate layer with a cavity, wherein an electrolyte layer capable of completely covering the cavity is arranged above the cavity of the substrate layer, a substrate layer is arranged above the electrolyte layer, an electrode layer is arranged on one side, close to the electrolyte layer, of the substrate layer, the electrode layer is composed of a pair of interdigital electrodes, and the substrate layer are packaged through a PDMS filling block.
The working principle of the invention is as follows: when the external air pressure changes, the electrolyte layer extrudes the electrode through the change of the pressure difference between the inside of the cavity and the external air pressure, the change of electric double layer capacitance between interfaces is generated, and the sensing function of the air pressure is realized, wherein the electrolyte layer is made of a composite material formed by mixing a polymer material and a micromolecule electrolyte.
In the above-mentioned gas pressure sensor based on the interdigital electrode and electric double layer principle, the shape of the electrode layer includes, but is not limited to, square, circular.
In the above-mentioned gas pressure sensor based on the interdigital electrode and the electric double layer principle, the electrode layer is circular, the diameter is 3mm, the width of each interdigital of the interdigital electrode is 50-200 μm, the distance between adjacent interdigital electrodes is 50 μm, each interdigital electrode is connected with a wire penetrating through a PDMS filling block, the wire width is 0.2mm, and the tail end of the wire is provided with a welding point. The interdigital electrode can be connected to a test instrument through a lead wire so as to test calibration and the like.
In the above-mentioned gas pressure sensor based on the interdigital electrode and the electric double layer principle, the interdigital electrode is made of an inert metal material, including, but not limited to, au, ag, cu, and Pt.
In the above-mentioned gas pressure sensor based on the interdigital electrode and the electric double layer principle, an adhesion layer is disposed between the electrode layer and the substrate layer, and the adhesion layer is made of a metal material capable of enhancing adhesion between an inert metal material and a substrate material, including but not limited to Cr and Ti.
In the gas pressure sensor based on the interdigital electrode and the electric double layer principle, the substrate layer is made of materials including, but not limited to, PI, PET, and SiO 2 Si or PMMA, preferably PI or SiO 2 . The PI is polyimide, the PET is polyethylene terephthalate, and the PI and the PET are both flexible materials, so that the manufactured sensor has certain flexibility and is convenient to combine with a curved surface structure; siO2 2 Is made of glass, PMMA is acrylic, and a rigid material, in particular SiO 2 The manufactured sensor can be suitable for places with certain requirements on the structural strength of the sensor.
In the above gas pressure sensor based on the interdigital electrode and electric double layer principle, the cavity of the substrate layer is a columnar groove having a cross-sectional shape identical to that of the electrode layer, and the depth of the columnar groove is 1cm.
In the gas pressure sensor based on the interdigital electrode and the electric double layer principle, the substrate layer is made of a material including but not limited to PDMS, siO2, si, or PMMA.
According to another aspect of the present invention, there is also provided a method of manufacturing an electrolyte concentration sensor based on the electric double layer principle, comprising the steps of:
step one, cleaning a substrate layer: ultrasonically cleaning a substrate layer by using acetone and isopropanol in sequence, then cleaning by using water, and blow-drying by using an air gun, wherein the gas blown out by the air gun is inert gas, preferably nitrogen;
step two, manufacturing a photoresist patterned glass sheet: dropwise adding photoresist on the cleaned substrate layer, spin-coating for 5min at a rotation speed of 500rpm in the front and 4000rpm in the back by a spin coater, and heating and curing by a hot plate at 100-110 ℃, preferably 105 ℃; selecting a prepared mask plate, and developing after exposure by a photoetching machine to obtain a photoresist patterned substrate layer;
step three, preparing an electrode: sequentially performing metal deposition on the adhesion layer metal and the electrode layer metal on the substrate layer patterned by the photoresist obtained in the step two to obtain a pair of interdigital electrodes, wherein the metal deposition method comprises but is not limited to magnetron sputtering, thermal evaporation coating and electron beam evaporation coating, and magnetron sputtering is preferred;
step four, preparing an electrolyte layer: 4g of PVA and 36g of water are mixed and heated at 95 ℃ for 2H and then cooled to room temperature, 3.3mL of H are added 3 PO 4 Stirring for 2 hours, defoaming, pouring onto sand paper with 3000-10000 meshes, spin-coating at 200rpm for 30s, placing on a horizontal table at room temperature, standing for 24 hours to volatilize most of water to obtain an electrolyte film with an area at least capable of covering a circle with a diameter of 3mm, wherein one side of the electrolyte film is smooth, and the other side of the electrolyte film has a microstructure.
Step five, preparing a basal layer: preparing a cylindrical groove with the inner diameter of 3mm and the depth of 1cm on the substrate layer by an etching technology.
Step six, integrated packaging: fixing the smooth side of the electrolyte film prepared in the fourth step above the circular groove of the basal layer through shadowless glue so as to completely cover the groove; and then fixing the substrate layer with the pair of interdigital electrodes obtained in the step three on one side of the microstructure of the electrolyte film, enabling the pair of interdigital electrodes to be in contact with the electrolyte film, and then packaging by adopting PDMS.
Compared with the prior art, the invention has the following advantages:
(1) A gas pressure sensor with a novel structure is designed. The structure is embodied as follows: the electrode structure adopts interdigital electrodes to realize the function that two electrode plates of the capacitor are on the same plane; the film is structurally a sandpaper microstructure, so that the change of the area of an electric double layer is generated when the microstructure extrudes an electrode; the cylindrical chamber is adopted to realize constant pressure in the chamber, and when the external air pressure changes, the pressure difference between the inside and the outside of the film of the chamber 1a is caused to change.
(2) A novel method is provided for making a gas pressure sensor. The method comprises the following steps: the double-electrode theory is combined in the field of gas pressure sensors, and the gas pressure sensing is realized under the condition of low voltage testing when the electrodes do not generate electrochemical reaction with solid electrolyte.
(2) The sensor manufacturing process is simple, and the line width of the interdigital electrode can be properly adjusted to 200 mu m; the intensity of the sensing signal is increased.
(3) The sensor has simple and flexible structure and good performance, can detect the lowest air pressure with the resolution ratio of 10Pa, and has the function of simultaneously detecting positive and negative pressure.
Drawings
FIG. 1 is a schematic view of a sensor structure according to the present invention;
FIG. 2 is a schematic diagram of an interdigital electrode structure of the present invention;
FIG. 3 is a capacitance-pressure characteristic curve of a gas pressure sensor prepared in example 1;
FIG. 4 is a graph of the lowest gas pressure resolution of a gas pressure sensor prepared in example 1;
FIG. 5 is a graph of gas vacuum levels detected by the rigid substrate-based gas pressure sensor prepared in example 1;
in the figure, 1, a basal layer; 1a, a chamber; 2. an electrolyte layer; 3. a substrate layer; 4. an electrode layer; 4a, interdigital electrodes; 4a1, interdigital; 5. an adhesive layer; 6. PDMS filled blocks.
Detailed Description
The technical solution of the present invention will be further described in detail with reference to specific embodiments. It is to be understood that the following examples are only illustrative and explanatory of the present invention and should not be construed as limiting the scope of the present invention. All the technologies realized based on the above-mentioned contents of the present invention are covered in the protection scope of the present invention.
Unless otherwise specified, the raw materials and reagents used in the following examples are all commercially available products or can be prepared by known methods.
In the following embodiments, the substrate layer 3 may be made of flexible or rigid material, including but not limited to PI (polyimide), PET (polyethylene terephthalate), and SiO 2 (glass)) And the like. The electrode pair is made of an inert metal material including, but not limited to, au (gold), ag (silver), cu (copper), pt (platinum), and the like. The adhesion layer 5 is made of a metal material capable of enhancing adhesion between the inert metal material and the substrate material, including but not limited to Cr (chromium), ti (titanium), etc.
In the following examples, the metal deposition method used to prepare the electrode pair includes, but is not limited to, magnetron sputtering, thermal evaporation coating, and electron beam evaporation coating. In addition, screen printing can be used to produce the electrode pairs.
Example 1:
as shown in fig. 1, the gas pressure sensor based on the interdigital electrode and electric double layer principle provided by the present invention comprises a substrate layer 3, an adhesion layer 5, an electrode layer 2, an electrolyte layer 2, and a substrate layer 1 having a chamber 1a, which are sequentially disposed from bottom to top. The adhesion layer 5 and the electrode layer 2 are formed on the substrate layer 3 by adopting a metal deposition method. The electrolyte layer 2 and the substrate layer 1 are fixed through shadowless glue in an adhering mode, the electrode layer 2 is in contact with the electrolyte layer 2, and the substrate layer 3 and the periphery of the substrate layer 1 are packaged through a PDMS filling block 6. The substrate layer 3 and the substrate layer 1 both adopt SiO 2 The adhesion layer 5 is made of Cr, and the electrode layer 2 is made of Au.
Specifically, as shown in fig. 2, the electrode layer 2 is circular, has a diameter of 3mm, and is formed by a pair of interdigital electrodes 4a arranged oppositely. Each interdigital electrode 4a has an interdigital 4a1 width of 50 μm and an adjacent interdigital 4a1 spacing of 50 μm. Each interdigital electrode 4a is connected with a lead wire, the lead wire penetrates through the PDMS filling block 6 to serve as an outgoing line, a welding point is arranged at the tail end of the lead wire, the line width of the lead wire is 0.2mm, and the interdigital electrodes 4a and a test instrument can be connected through the outgoing lines for testing. In other embodiments of the present invention, the electrode layer 2 may also be square, triangular, etc.; the width of the finger 4a1 of each finger electrode 4a may be any value of 50 to 200 μm.
The upper surface of the substrate layer 1 is provided with a groove with a circular section, the depth of the groove is 1cm, the diameter of the groove is 3mm, and the groove is consistent with the electrode layer 2.
The sensor of the above example was prepared by the following method:
the method comprises the following steps: and ultrasonically cleaning the surface of the clean glass sheet by using acetone and isopropanol in sequence, and drying the glass sheet by using a nitrogen gun after the glass sheet is cleaned by using water.
Step two: and manufacturing the photoresist patterned glass sheet. Dropwise adding 5350 photoresist on the glass sheet manufactured in the step one, performing spin coating for 5min by a spin coater at a rotation speed of 4000rpm after the glass sheet rotates at a front speed of 500rpm, and heating and curing at 105 ℃ by using a hot plate; and selecting the prepared mask plate, and developing after exposure by adopting an MA6 photoetching machine to obtain the photoresist patterned glass sheet.
Step three: the interdigital electrode 4a is prepared. And (5) carrying out magnetron sputtering on the photoresist patterned glass sheet obtained in the step two to sequentially deposit Cr and Au metals which are respectively used as an adhesion layer 5 and an electrode layer 2, so as to obtain a pair of interdigital electrodes 4a.
Step four: and preparing the solid electrolyte film. 4g of PVA and 36g of water are mixed and heated at 95 ℃ for 2H and then cooled to room temperature, 3.3mL of H are added 3 PO 4 Stirring was continued for 2h. And then pouring the mixture on sandpaper with 3000 meshes to 10000 meshes after defoaming treatment, spin-coating the mixture at 200rpm for 30s, and placing the mixture on a horizontal table at room temperature for 24h to volatilize most of water.
Step five: and (3) preparing a cylinder with the inner diameter of 3mm and the depth of 1cm from the prepared thickened glass sheet by an etching technology.
Step six: fixing the smooth layer of the solid electrolyte film prepared in the fourth step above a glass wall through shadowless glue to prepare a glass substrate layer 1 with the solid electrolyte film; and (3) fixing the glass substrate layer 3 with the interdigital electrode 4a obtained in the step three on one side of the microstructure of the solid electrolyte membrane on the glass substrate layer 1, packaging the part of the lead by PDMS, and finishing integrated packaging of the lead.
The gas pressure sensor prepared in this example 1 was subjected to capacitance and pressure characteristic tests:
as shown in fig. 3, the lead of the interdigital electrode 4a in the gas pressure sensor is connected to an LCR tester to obtain a capacitance-pressure characteristic curve thereof, thereby realizing the positive pressure and vacuum degree detection function of the same gas pressure sensor.
As shown in fig. 4, applying the gas pressure sensor to highly sensitive gas pressure detection can realize a gas pressure change with a resolution as high as 10 Pa.
As shown in fig. 5, the gas pressure sensor exhibits a wide pressure detection range in which the degree of vacuum is detected at the highest level by 85kPa.
Example 2:
the gas pressure sensor based on the interdigital electrode and electric double layer principle of the present embodiment is substantially the same as that of embodiment 1, except that: the substrate layer 3 in this example is a flexible PI and the substrate layer 1 is an elastic PDMS. The rigid substrate is changed into the flexible substrate, and the rigid base layer 1 is changed into the elastic PDMS, so that the gas pressure sensor has certain flexibility, is convenient for combination of a curved surface environment, and can be flexibly applied to various scenes. For example can be convenient for install and detect height above sea level and atmospheric pressure change on unmanned aerial vehicle curved surface outer wall.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications or additions may be made to the described embodiments, or alternatives may be employed, by those skilled in the art, without departing from the spirit or ambit of the invention as defined in the appended claims.
Claims (10)
1. The gas pressure sensor based on the interdigital electrode and double electric layers is characterized by comprising a substrate layer (1) with a cavity (1 a), wherein an electrolyte layer (2) capable of completely covering the cavity (1 a) is arranged above the cavity (1 a) of the substrate layer (1), a substrate layer (3) is arranged above the electrolyte layer (2), an electrode layer (4) is arranged on one side, close to the electrolyte layer (2), of the substrate layer (3), the electrode layer (4) is composed of a pair of interdigital electrodes, and the substrate layer (3) and the substrate layer (1) are packaged through a PDMS filling block.
2. A gas pressure sensor based on interdigitated electrodes and the electric double layer principle according to claim 1, characterized in that the shape of the electrode layer (4) includes but is not limited to square, circular.
3. An interdigital electrode and electric double layer principle based gas pressure sensor according to claim 2, characterized in that said electrode layer (4) is circular and 3mm in diameter, each finger width of said interdigital electrode is 50-200 μm and the distance between adjacent fingers is 50 μm.
4. A gas pressure sensor based on interdigital electrodes and electric double layer principle according to claim 1, 2 or 3, wherein each interdigital electrode is connected with a lead wire passing through PDMS pad, the width of the lead wire is 0.2mm, and the end of the lead wire is provided with a welding point.
5. A gas pressure sensor based on interdigitated electrodes and electric double layer principle according to claim 1 or 2 or 3, characterized in that the interdigitated electrodes are made of inert metal materials including but not limited to Au, ag, cu and Pt.
6. A gas pressure sensor based on interdigital electrodes and the electric double layer principle, according to claim 1, 2 or 3, wherein an adhesion layer (5) is provided between the electrode layer (4) and the substrate layer (3), and the adhesion layer (5) is made of a metal material capable of enhancing the adhesion between the inert metal material and the substrate material, including but not limited to Cr and Ti.
7. A gas pressure sensor based on interdigital electrodes and the electric double layer principle, according to claim 1, 2 or 3, characterized in that the substrate layer (3) is made of materials including but not limited to PI, PET, siO 2 Si or PMMA.
8. A gas pressure sensor based on the interdigital electrode and electric double layer principle, according to claim 1, 2 or 3, wherein the cavities (1 a) of the substrate layer (1) are cylindrical grooves having a cross-sectional shape conforming to the shape of the electrode layer (4), said cylindrical grooves being obtained with a depth of 1cm.
9. According to the claimA gas pressure sensor based on interdigital electrodes and electric double layer principle as claimed in claim 1 or 2 or 3, characterized in that the material used for the substrate layer (1) includes but is not limited to PDMS, siO 2 Si or PMMA.
10. A preparation method of an electrolyte concentration sensor based on the principle of an electric double layer comprises the following steps:
step one, cleaning a substrate layer (3): the substrate layer (3) is sequentially ultrasonically cleaned by acetone and isopropanol, then cleaned by water and blown dry by an air gun, wherein the gas blown out by the air gun is inert gas, preferably nitrogen;
step two, manufacturing a photoresist patterned glass sheet: dropwise adding photoresist on the cleaned substrate layer (3), performing spin coating for 5min at a rotation speed of 500rpm in the front and 4000rpm in the back by a spin coater, and heating and curing by a hot plate at 100-110 ℃, preferably 105 ℃; selecting a prepared mask plate, and developing after exposure by a photoetching machine to obtain a photoresist patterned substrate layer (3);
step three, preparing an electrode: sequentially carrying out metal deposition on the substrate layer (3) with the patterned photoresist obtained in the step two to obtain an interdigital electrode pair, wherein the metal deposition method comprises but is not limited to magnetron sputtering, thermal evaporation coating and electron beam evaporation coating, and magnetron sputtering is preferred;
step four, preparing an electrolyte layer (2): 4g of PVA and 36g of water are mixed and heated at 95 ℃ for 2H and then cooled to room temperature, 3.3mL of H are added 3 PO 4 Stirring for 2 hours, defoaming, pouring onto sand paper with 3000-10000 meshes, spin-coating at 200rpm for 30s, placing on a horizontal table at room temperature, standing for 24 hours to volatilize most of water to obtain an electrolyte film with an area at least capable of covering a circle with a diameter of 3mm, wherein one side of the electrolyte film is smooth, and the other side of the electrolyte film has a microstructure.
Step five, preparing a substrate layer (1): a cylindrical groove with the inner diameter of 3mm and the depth of 1cm is prepared on the substrate layer (1) through an etching technology.
Step six, integrated packaging: fixing the smooth side of the electrolyte film prepared in the fourth step above the circular groove of the substrate layer (1) through shadowless glue so as to completely cover the groove; and then fixing the substrate layer (3) with the interdigital electrode pairs obtained in the step three on one side of the microstructure of the electrolyte film to enable the interdigital electrode pairs to be in contact with the electrolyte film, and then packaging by adopting PDMS.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211332531.1A CN115683442A (en) | 2022-10-27 | 2022-10-27 | Gas pressure sensor based on interdigital electrode and double electric layer principle and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211332531.1A CN115683442A (en) | 2022-10-27 | 2022-10-27 | Gas pressure sensor based on interdigital electrode and double electric layer principle and preparation method thereof |
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| CN202211332531.1A Pending CN115683442A (en) | 2022-10-27 | 2022-10-27 | Gas pressure sensor based on interdigital electrode and double electric layer principle and preparation method thereof |
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