CN115672597A - Spraying device and spraying method - Google Patents
Spraying device and spraying method Download PDFInfo
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- CN115672597A CN115672597A CN202110851554.2A CN202110851554A CN115672597A CN 115672597 A CN115672597 A CN 115672597A CN 202110851554 A CN202110851554 A CN 202110851554A CN 115672597 A CN115672597 A CN 115672597A
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- storage bin
- unit
- control valve
- gas
- spraying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/02—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling time, or sequence, of delivery
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
- B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
- B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
- B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
- B05B9/047—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump supply being effected by follower in container, e.g. membrane or floating piston, or by deformation of container
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
Abstract
The embodiment of the application discloses a spraying device and a spraying method, wherein the spraying device comprises: the storage bin is used for containing spraying materials; the exhaust compression unit is used for exhausting gas in the storage bin and compressing the volume of the storage bin to enable the spraying material stored in the storage bin to enter the material conveying unit; and the material conveying unit is used for conveying the spraying material to a using end.
Description
Technical Field
The present application relates to the field of semiconductor technology, and relates to, but is not limited to, a spray coating device and a spray coating method.
Background
In the field of semiconductor integrated circuits, the photolithography process has been considered as the most critical step in the manufacture of integrated circuits, and it needs to be used many times in the whole process, and its stability and reliability have important influence on the quality, yield and cost of the product; the photoetching process is a complex process, and its essence is that the circuit structure is copied on the wafer to be etched and ion-implanted in the form of pattern, firstly a layer of photosensitive material-photoresist thin layer is formed on the wafer by using photoresist coating system, then the parallel light is irradiated on the photoresist thin layer by means of mask to make it expose and deteriorate, finally the developing liquor is used to develop so as to implement pattern transfer.
In the related art, referring to FIG. 1, a pumping gas 11 (e.g., nitrogen N) is typically pumped into a photoresist bottle 10 2 ) The Photoresist 12 in the Photoresist bottle is squeezed to spray the Photoresist on the wafer, but sometimes nitrogen gas will dissolve into the Photoresist (PR) to cause the problem of bubbles 13, which will cause poor coating quality and further damage to the Photoresist pattern.
Disclosure of Invention
In view of the above problems, the embodiments of the present application provide a spraying device and a spraying method.
In a first aspect, an embodiment of the present application provides a spray coating device, including:
the storage bin is used for containing spraying materials;
the exhaust compression unit is used for exhausting gas in the storage bin and compressing the volume of the storage bin to enable the spraying material stored in the storage bin to enter the conveying unit;
and the material conveying unit is used for conveying the spraying material to a using end.
In a second aspect, an embodiment of the present application is a method of spraying, the method comprising:
discharging gas in a storage bin in the spraying device through an exhaust compression unit in the spraying device;
after the gas in the storage bin is exhausted, the volume of the storage bin is compressed through the exhaust compression unit, so that the spraying material stored in the storage bin enters the material conveying unit;
and conveying the spraying material to a using end through the material conveying unit.
The embodiment of the application provides a spraying device and a spraying method, wherein the spraying device comprises: the storage bin is used for containing spraying materials; the exhaust compression unit is used for exhausting gas in the storage bin and compressing the volume of the storage bin to enable the spraying material stored in the storage bin to enter the material conveying unit; the conveying unit is used for conveying the spraying material to a using end, so that the traditional spraying device which adopts pumping gas to change the air pressure in the storage bin can be changed, the gas is prevented from being dissolved into the spraying material to generate bubbles, and the coating quality is improved.
Drawings
Fig. 1 is a related art spray coating device;
FIG. 2A is a schematic view of a spray coating device according to an embodiment of the present application;
FIG. 2B illustrates a spray coating method in an embodiment of the present application;
fig. 3 to 12 show a spray device according to an embodiment of the present application.
Detailed Description
Based on the problems in the related art, the embodiment of the application provides a spraying device, which utilizes an exhaust compression unit to exhaust gas in a storage bin, compresses the volume of the storage bin to enable spraying materials stored in the storage bin to enter a material conveying unit, does not pump the gas into the storage bin to extrude the spraying materials to enable the spraying materials to enter the material conveying unit, and avoids the gas from dissolving into the spraying materials, thereby avoiding generating bubbles, improving the quality of film coating, and further improving the quality of products.
In order to make the objects, features and advantages of the embodiments of the present application more comprehensible, embodiments of the present application are described in detail below with reference to the accompanying drawings. The described embodiments are merely some, but not all, of the possible embodiments of the present application and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. In describing the embodiments of the present application in detail, the schematic drawings are for illustrative purposes only and should not be used to limit the scope of the embodiments of the present application; in actual fabrication, three-dimensional dimensions of length, width and depth should be included. The same reference numerals in the drawings denote the same or similar structures, and thus their detailed description will be omitted.
An embodiment of the present application provides a spraying apparatus, please refer to fig. 2A, which includes:
the storage bin 21 is used for containing the spraying material 211;
the exhaust compression unit 22 is used for exhausting the gas in the storage bin 21 and compressing the volume of the storage bin 21 so that the spraying material 211 stored in the storage bin 21 enters the delivery unit 23;
the material conveying unit 23 is used for conveying the spraying material 211 to a using end.
In this embodiment, the exhaust compression unit may be any device capable of compressing the volume of the storage bin, discharging the gas in the storage bin and enabling the spraying material in the storage bin to enter the material conveying unit.
In some embodiments, the storage bin may be made of stainless steel or other materials that do not react with the spraying material; and a light shading layer can be arranged outside the storage bin and used for protecting the spraying material. The light-shielding layer can adopt light-shielding materials such as black polyethylene/aluminum backing paper composite materials and the like.
In practical applications, the gas in the storage bin comprises: bubbles dissolved in the spray material and gas above the spray material. Generally, the gas in the storage bin is generally air, and the composition of the air mainly comprises nitrogen and oxygen; the gas in the storage bin may also be an inert gas such as helium.
In the embodiment, the volume of the storage bin is reduced by adopting the exhaust compression unit to compress the volume of the storage bin, so that the spraying material stored in the storage bin enters the material conveying unit to realize spraying, the problem of bubbles caused in the spraying process by pumping gas into the photoresist bottle to extrude the photoresist in the photoresist bottle in the traditional technology is avoided, the coating quality is improved, and the product quality is further improved.
Based on the apparatus provided in fig. 2A, the embodiment of the present application further provides a spraying method, please refer to fig. 2B, the method includes the following steps:
Wherein step 202 is performed after the gas in the storage bin is exhausted.
And 203, conveying the spraying material to a using end through the conveying unit.
Referring to fig. 3, a spraying device includes a storage bin 21, an exhaust compression unit and a feeding unit 23, wherein,
the storage bin 21 is used for containing spraying materials 211;
the material conveying unit 23 is used for conveying the spraying material 211 to a using end;
the exhaust gas compression unit comprises an exhaust part 221, a lifting part 222, a first control valve 223 and a second control valve 224, wherein the lifting part 222 is used for compressing the volume of the storage bin 21 and discharging the gas in the storage bin 21 through the exhaust part 221 in the state that the first control valve 223 is closed and the second control valve 224 is opened;
the lifting member 222 is further configured to compress the volume of the storage bin 21 to enable the spraying material 211 to enter the feeding unit 23 when the first control valve 223 is opened and the second control valve 224 is closed after the gas in the storage bin 21 is exhausted.
In some embodiments, the air evacuation component may be disposed at the top of the storage bin or at a side wall of the storage bin. The exhaust component is arranged at the top of the storage bin, can completely exhaust the gas in the storage bin, and is not easy to cause the overflow of the spraying material.
In some embodiments, the lifting member may be any member that effects compression of the volume of the storage bin, for example, the lifting member may be disposed at the bottom or top of the storage bin, and the lifting member may be a movable piston that is moved by applying an external force to the movable piston to compress the volume of the storage bin. The movable piston is in close contact with the side wall of the storage bin, and the sealing performance is good.
In some embodiments, the movable piston may serve as the top or bottom of the storage bin, and the storage bin in the spray coating device may not be additionally provided with the top or bottom of the storage bin.
In some embodiments, a movable piston may be provided below the bottom or above the top of the storage bin, which is moved by the piston to move the bottom or top of the storage bin upward to compress the volume of the storage bin. The lifting component can also be realized by a screw rod lifter, a gear hand-operated lifter, a turbine lifter and the like, wherein the gear hand-operated lifter forces the bottom of the storage bin connected with the gear transmission structure to move upwards or forces the top of the storage bin connected with the gear transmission structure to move downwards through the gear transmission structure. In other embodiments, the lifting member may be used in combination with a movable piston, and the lifting member is used to move the piston.
In some embodiments, after all the spraying materials in the storage bin are conveyed to the feeding unit, the lifting member can be restored to the initial position by external force, that is, the initial volume of the storage bin, so that the spraying device can be reused.
Based on the device provided in fig. 3, the embodiment of the present application further provides a spraying method, where the method includes the following steps:
step 301, closing the first control valve 223 and opening the second control valve 224.
Step 302, compressing the volume of the storage bin 21 by the lifting component 222 and discharging the gas in the storage bin 21 by the gas discharging component 221.
Step 303, opening the first control valve 223 and closing the second control valve 224.
Step 304, compressing the volume of the storage bin 21 by the lifting member 222 to make the spraying material 211 enter the feeding unit 23.
Step 305, the spraying material 211 is conveyed to a using end through the conveying unit 23.
Wherein step 303 is performed after the gas in the storage bin is purged.
In some embodiments, referring to fig. 4, the exhaust gas compression unit further comprises a centrifugal component 225; the centrifugal part 225 is disposed in the storage bin 21, and is configured to separate the bubbles in the spraying material 104 from the spraying material 211.
In implementation, the centrifugal part can be implemented by a centrifugal turntable, a centrifugal rod, and the like.
In some embodiments, when the lifting component is arranged at the top, the centrifugal component can also be arranged at the top, when the lifting component is compressed downwards at the top of the storage bin, the centrifugal component can not contact the spraying material within a certain time, so that the centrifugal component can be telescopic, and the centrifugal component can be extended, so that the centrifugal component can fully contact the spraying material, and air bubbles in the spraying material can be efficiently centrifuged. When the residual quantity of the spraying materials in the storage bin is less, the centrifugal part can be compressed, so that the spraying materials in the storage bin can be discharged as much as possible, and the utilization rate of the spraying materials is improved. After all the spraying materials in the storage bin are conveyed to the material conveying unit, if the storage bin needs to be cleaned, the storage bin can be cleaned by continuous up-and-down reciprocating motion of the centrifugal part and the lifting part.
In some embodiments, the centrifugal part 225 can be disposed at the bottom of the storage bin, whether the lifting part is disposed at the bottom or the top of the storage bin, so that the centrifugal part 225 can sufficiently contact the spray material to more efficiently centrifuge out the air bubbles in the spray material. The centrifugal part can be telescopic, the amount of the finally remained spraying material is related to the compressibility degree of the centrifugal part, the more compressible the centrifugal part is, the less the remained spraying material is, and the less compressible the centrifugal part is, the more the remained spraying material is.
In the embodiment, the centrifugal part enables the bubbles with lighter specific gravity to run to the surface of the spraying material through centrifugal force, so that the volume of the storage bin is compressed through the lifting part, the gas in the storage bin is completely discharged, the bubbles are prevented from being mixed in the spraying material, the defects of film shrinkage, pinholes, defects, fish eyes and the like are reduced, the film coating quality is improved, and the product quality is further improved.
Based on the apparatus provided in fig. 4, in some embodiments, the step 302 further includes the following steps: separating the air bubbles in the spray material and the spray material by a centrifugal member.
In practice, the step of separating the bubbles in the coating material from the coating material by the centrifugal part may be performed before step 302, so that the bubbles dissolved in the coating material can be separated before compressing the storage bin, thereby facilitating the discharge of the gas in the storage bin; the step 302 of separating the bubbles in the spraying material and the spraying material by the centrifugal part may also be repeated for a plurality of times, for example, when the storage bin is compressed by the lifting part to the volume of the storage bin to reduce to half, the bubbles in the spraying material and the spraying material are separated by the centrifugal part, and then when the storage bin is compressed to reduce to quarter, the bubbles in the spraying material and the spraying material are separated again by the centrifugal part, so that the gas in the storage bin can be exhausted better by continuously circulating the two steps, so that the spraying material has no bubbles, the quality of the subsequent coating film is improved, and the quality of the product is improved.
In some embodiments, referring to fig. 5, the apparatus further includes: the first driving unit 24 is used for driving the lifting component 222 to compress the volume of the storage bin 21; and a control unit (not shown in the figure) for controlling the first driving unit 24 to drive the lifting component 222 to work.
Here, the lifting means can be understood as being able to compress the storage bin volume manually, or by the control unit controlling the first drive unit. The first driving unit may be a motor or a hydraulic cylinder.
In this embodiment, adopt first drive unit and the control unit can be when the lifting unit compression storage bin volume, be favorable to controlling spraying material to get into defeated material unit with the velocity of invariant to improve and film the homogeneity.
Based on fig. 5, in some embodiments, the step 302 is implemented by: the control unit controls the first driving unit 24 to drive the lifting component 222 to compress the volume of the storage bin 21 and discharge the gas in the storage bin 21; the step 304 is implemented by: the control unit controls the first driving unit 24 to drive the lifting member 222 to compress the volume of the storage bin 21, so that the spraying material 211 enters the feeding unit 23.
In some embodiments, referring to fig. 6, the storage bin 21 includes a cover 212, a barrel 213 and a barrel bottom 214, and at least one of the cover 212 or the barrel bottom 214 is movably connected to the barrel 213; the lifting component 222 is disposed on the cover 212 or the bottom 214 movably connected to the barrel 213.
In this embodiment, at least one of the cover 212 or the bottom 214 is movably connected to the barrel 213 for allowing the lifting member to compress the volume of the storage bin.
An embodiment of the present invention further provides a spraying apparatus, please refer to fig. 7, the apparatus includes: the storage bin 21, the exhaust compression unit, the material conveying unit 23, the first driving unit 24, the second driving unit 25, the third driving unit 26 and the control unit, wherein:
the storage bin 21 is used for containing spraying materials 211;
the exhaust compression unit includes an exhaust part 221, a lifting part 222, a first control valve 223 and a second control valve 224; the elevating means 222 for compressing the volume of the storage silo 21 and discharging the gas in the storage silo 21 through the gas discharging means 221 in a state where the first control valve 223 is closed and the second control valve 224 is opened;
the lifting component 222 is further configured to compress the volume of the storage bin 21 to make the spraying material 211 enter the feeding unit 23 when the first control valve 223 is opened and the second control valve 224 is closed after the gas in the storage bin 21 is exhausted;
the material conveying unit 23 is used for conveying the spraying material 211 to a using end;
the first driving unit 24 is used for driving the lifting component 222 to compress the volume of the storage bin 21;
the second driving unit 25 is configured to drive the first control valve 223 and the second control valve 224 to open or close;
the third driving unit 26 is used for driving the centrifugal part 225 to work;
the control unit is used for controlling the second driving unit 25 to drive the first control valve 223 to close and the second control valve 224 to open, and then controlling the first driving unit 24 to drive the lifting component 222 to compress the volume of the storage bin 21 and controlling the third driving unit 26 to drive the centrifugal component 225 to work;
the control unit is further configured to control the second driving unit 25 to drive the first control valve 223 to open and the second control valve 224 to close after the gas in the storage bin 21 is exhausted.
It is understood here that in practical applications the spray device may include the following:
the first condition is as follows: only the first driving unit is included, and the second driving unit and the third driving unit are not included;
and a second condition: only the second drive unit is included, and the first drive unit and the third drive unit are not included;
and a third situation: only the third driving unit is included, and the first driving unit and the second driving unit are not included;
case four: the driving device comprises a first driving unit, a second driving unit and no third driving unit;
case five: the driving device comprises a first driving unit, a third driving unit and no second driving unit;
case six: the driving device comprises a second driving unit and a third driving unit, and does not comprise a first driving unit;
case seven: comprises a first driving unit, a second driving unit and a third driving unit.
In some embodiments, the spray material is a photoresist, and the spray material may also be other liquids such as paint or water-based paint.
Based on the device provided in fig. 7, the embodiment of the present application further provides a spraying method, where the method includes the following steps:
in step 701, the control unit controls the second driving unit 25 to drive the first control valve 223 to close and the second control valve 224 to open.
Step 702, controlling the third driving unit 26 to drive the centrifugal part 225 to work through the control unit.
And 703, controlling the first driving unit 24 to drive the lifting component 222 to compress the volume of the storage bin 21 by the control unit to discharge the gas in the storage bin 21.
Step 704, controlling the second driving unit 25 by the control unit to drive the first control valve 223 to open and the second control valve 224 to close.
Step 705, the control unit controls the first driving unit 24 to drive the lifting member 222 to compress the volume of the storage bin 21, so that the spraying material 211 enters the feeding unit 23.
Step 706, the spraying material 211 is delivered to the using end through the delivery unit 23.
Wherein the step 704 is performed after the gas in the storage bin is exhausted.
In some embodiments, the steps 702 and 703 may be alternated to allow the gas in the storage bin to be completely discharged.
Since a small amount of gas above the storage silo may be dissolved into the coating material 211 even though the pressure in the storage silo 21 is maintained to be the same as the atmospheric pressure when the elevating member 222 compresses the volume of the storage silo 21 to discharge the gas, the gas can be prevented from being dissolved into the coating material 211 if the gas in the storage silo 21 is pumped out.
Based on this, the embodiment of this application still provides a kind of spraying device, refer to fig. 8, the device includes: storage silo 21, exhaust compression unit and defeated material unit 23, wherein:
the storage bin 21 is used for containing spraying materials 211;
the exhaust compression unit includes a lifting part 222, a first control valve 223 and a vacuum pumping part 226;
the vacuumizing part 226 is used for vacuumizing the gas in the storage bin 21 when the first control valve 223 is in a closed state;
the lifting component 222 is further configured to compress the volume of the storage bin 21 to make the spraying material 211 enter the feeding unit 23 when the first control valve 223 is opened after the gas in the storage bin 21 is exhausted;
the material conveying unit 23 is used for conveying the spraying material 211 to a using end.
In some embodiments, the vacuum-pumping unit can be implemented by a water-jet type air extractor, a steam-jet type air extractor, a reciprocating pump, a centrifugal vacuum pump (a water-ring vacuum pump, a rotary-vane vacuum pump), and the like.
In the embodiment, the vacuumizing part is used for vacuumizing the gas in the storage bin, so that the external pressure is reduced, the volume of the bubbles is increased, the bubbles are broken, the defects of coating shrinkage holes, pinholes, defects, fish eyes and the like are reduced, the coating quality is improved, and the product quality is further improved.
Based on the apparatus provided in fig. 8, an embodiment of the present application further provides a spraying method, where the method includes the following steps:
step 801, close the first control valve 223 in the exhaust gas compression unit.
And 802, pumping out the gas in the storage bin 21 through a vacuum pumping part 226 in the exhaust compression unit.
Step 803, the vacuum pumping unit 226 is closed, and the first control valve 223 is opened.
Step 804, compressing the volume of the storage bin 21 by the lifting member 22 in the exhaust compression unit to make the spraying material 211 enter the feeding unit 23.
Step 805, the spraying material 211 is conveyed to a using end through the conveying unit 23.
Wherein step 803 is performed after the gas in the storage bin is exhausted.
An embodiment of the present application further provides a spraying apparatus, please refer to fig. 9, the apparatus includes: a storage bin 21, an exhaust gas compression unit, a feeding unit 23, a first driving unit 24 and a control unit (not shown), wherein:
the storage bin 21 is used for containing spraying materials 211;
the exhaust compression unit includes a vacuum pumping part 226, a lifting part 222 and a first control valve 223;
the vacuumizing part 226 is used for pumping the gas in the storage bin 21 when the first control valve 223 is in a closed state;
the lifting component 222 is further configured to compress the volume of the storage bin 21 to make the spraying material 211 enter the feeding unit 23 when the first control valve 223 is opened after the gas in the storage bin 21 is exhausted;
the material conveying unit 23 is used for conveying the spraying material 211 to a using end;
the first driving unit 24 is used for driving the lifting component 222 to compress the volume of the storage bin 21;
the control unit is used for controlling the vacuum pumping part 226 to work or stop working;
the control unit is further configured to control the first driving unit 24 to drive the lifting member 222 to work.
Wherein the first driving unit is the same as in some of the previous embodiments. The control unit controls the vacuumizing part 226, so that the vacuumizing speed can be conveniently adjusted as required.
In some embodiments, referring to fig. 9, the apparatus further includes:
a second driving unit 25 for driving the opening and closing of the first control valve 223;
a control unit (not shown) for controlling the second driving unit to drive the first control valve 223 to close before the vacuum pumping part 226 operates;
the control unit is further configured to control the second driving unit 25 to drive the first control valve 223 to open and control the first driving unit 24 to drive the lifting member 222 to compress the volume of the storage bin 21 after the gas in the storage bin 21 is exhausted.
Based on the spraying apparatus provided in fig. 9, the above steps 801 to 804 can be realized by the following steps 901 to 904, respectively: step 901, controlling the second driving unit 25 to close the first control valve 223 by the control unit. And 902, controlling the vacuumizing part 226 to suck the gas in the storage bin 21 through the control unit. And 903, controlling the vacuumizing part 226 to stop working through the control unit, and opening the first control valve 223 through the control unit. Step 904, the control unit controls the first driving unit 24 to drive the lifting member 222 to compress the volume of the storage bin so that the spraying material 211 stored in the storage bin 21 enters the input unit.
In some embodiments, referring to fig. 10, the exhaust gas compression unit further comprises a centrifugal component 225; the centrifugal part 225 is disposed in the storage bin 21, and is configured to separate the bubbles in the coating material 211 from the coating material 211.
In some embodiments, referring to fig. 10, the apparatus further includes:
a third driving unit 26 for driving the centrifugal part 225 to work;
the control unit is used for controlling the third driving unit 26 to drive the centrifugal part 225 to work.
In practical applications, the third driving unit 26 may be a motor or other devices capable of driving a centrifugal component to work, so as to shorten the time for bubbles to reach the surface of the coating material 211. When the third driving unit is a motor, the centrifugal part 225 may be connected to the motor through a rotation shaft. When the lifting component is arranged at the bottom of the storage bin, the centrifugal units above the bottom of the storage bin also need to move synchronously because the lifting component pushes the bottom of the storage bin to move upwards.
Based on the apparatus provided in fig. 10, an embodiment of the present application further provides a spraying method, where the method includes the following steps:
step 1001, the control unit controls the first driving unit 24 to drive the first control valve 223 to close.
Step 1002, controlling the third driving unit 26 to drive the centrifugal part 225 to work through the control unit.
Step 1003, controlling the vacuum pumping part 226 to work through the control unit so as to pump out the gas in the storage bin 21.
And 1004, controlling the vacuumizing part 226 to stop working through the control unit, and opening the first control valve 223 through the control unit.
Step 1005, controlling the first driving unit 24 to drive the lifting member 222 to compress the volume of the storage bin 21 by the control unit so that the spraying material 211 stored in the storage bin 21 enters the input unit.
Step 1006, delivering the spraying material 211 to a using end through the delivery unit 23.
In this embodiment, the spray material may be a photoresist.
In some embodiments, referring to fig. 11, the storage bin 21 includes a cover 212, a barrel 213 and a barrel bottom 214, wherein at least one of the cover 212 or the barrel bottom 214 is movably connected to the barrel 213; the lifting member 222 is disposed on the cover 212 or the bottom 214 movably connected to the barrel 213.
The lifting component can be arranged on the cylinder bottom and can push the cylinder bottom to move upwards, so that the volume of the storage bin is compressed to discharge gas in the storage bin, and the spraying materials stored in the storage bin and the storage bin enter the material conveying unit.
In practical applications, the lifting member may be disposed on the cover, the exhaust member is disposed on the cover, and the lifting member pushes the cover to move downward, so as to compress the volume of the storage bin to exhaust the gas in the storage bin and enable the spraying material stored in the storage bin to enter the material conveying unit.
No matter the lifting component is arranged on the cylinder bottom or the cylinder cover, the cylinder cover or the cylinder bottom is required to be in good contact with the cylinder body, the sealing performance is good, and a rubber sealing ring or a sealing gasket can be arranged at the joint of the cylinder cover or the cylinder bottom and the cylinder body.
In some embodiments, referring to fig. 12, the feeding unit 23 includes a feeding pipe 231;
one end of the material conveying pipe 231 is connected with the storage bin 21, and the other end of the material conveying pipe 231 is connected with the using end;
the first control valve 223 is disposed on the feeding pipe 231.
In some embodiments, please refer to fig. 12, the feeding unit 23 further includes a buffer bin 232; the surge bin 232 is arranged on the material conveying pipe 231 between the first control valve 223 and the using end, and is used for discharging micro-bubbles in the spraying material and storing the spraying material.
In practical application, the buffering bin can be optionally arranged or not arranged, micro bubbles in the spraying material can be further removed by arranging the buffering bin, the subsequent coating quality is improved, and the product quality is further improved. In addition, the buffer bin can also be used for containing the spraying materials which are discharged with air bubbles, and the device does not need to wait for subsequent use, so that the production efficiency is improved.
In some embodiments, the spray material is a photoresist, and the spray material may also be other liquids such as paint or water-based paint.
Based on the apparatus provided in fig. 12, in some embodiments, the step 1006 is implemented by: the spraying material firstly passes through the first control valve, then passes through the buffer bin and finally reaches the use end.
It should be noted that, the definition or description of the structure in this embodiment (spraying method) is similar to or the same as that in the foregoing embodiment (spraying device), and no limitation is made in this embodiment, specifically, refer to the definition or description of the corresponding part in the foregoing embodiment.
The above description is only exemplary of the present application and should not be taken as limiting the scope of the present application, and any modifications, equivalents, improvements, etc. made within the spirit and principle of the present application should be included in the scope of the present application.
Claims (20)
1. A spray coating device, said device comprising:
the storage bin is used for containing spraying materials;
the exhaust compression unit is used for exhausting gas in the storage bin and compressing the volume of the storage bin to enable the spraying material stored in the storage bin to enter the material conveying unit;
and the material conveying unit is used for conveying the spraying material to a using end.
2. The apparatus of claim 1, wherein the exhaust gas compressing unit comprises an exhaust part, a lifting part, a first control valve, and a second control valve;
the lifting component is used for compressing the volume of the storage bin and discharging gas in the storage bin through the exhaust component under the condition that the first control valve is closed and the second control valve is opened;
the lifting component is also used for compressing the volume of the storage bin to enable the spraying material to enter the material conveying unit when the first control valve is opened and the second control valve is closed after the gas in the storage bin is exhausted.
3. The apparatus of claim 2, further comprising:
the first driving unit is used for driving the lifting component to compress the volume of the storage bin;
and the control unit is used for controlling the first driving unit to drive the lifting component to work and compress the volume of the storage bin.
4. The apparatus of claim 3, further comprising:
the second driving unit is used for driving the first control valve and the second control valve to be opened or closed;
the control unit is used for controlling the first driving unit to drive the lifting component to compress the volume of the storage bin after the second driving unit drives the first control valve to close and the second control valve to open;
the control unit is further used for controlling the second driving unit to drive the first control valve to be opened and the second control valve to be opened after the gas in the storage bin is exhausted.
5. The apparatus of claim 1, wherein the exhaust compression unit comprises a vacuum pumping part, a lifting part, and a first control valve;
the vacuumizing component is used for pumping out the gas in the storage bin when the first control valve is closed;
the lifting component is also used for compressing the volume of the storage bin to enable the spraying material to enter the material conveying unit when the first control valve is in an open state after the gas in the storage bin is exhausted.
6. The apparatus of claim 5, further comprising:
the first driving unit is used for driving the lifting component to compress the volume of the storage bin;
the control unit is used for controlling the vacuumizing part to work or stop working;
the control unit is also used for controlling the first driving unit to drive the lifting component to work.
7. The apparatus of claim 2 or 5, wherein the exhaust gas compression unit further comprises a centrifugal component;
the centrifugal part is arranged in the storage bin and is used for separating bubbles in the spraying material from the spraying material.
8. The apparatus of claim 7, further comprising:
the third driving unit is used for driving the centrifugal part to work;
and the control unit is used for controlling the third driving unit to drive the centrifugal part to work.
9. The apparatus according to any one of claims 2 to 6, wherein the storage bin comprises a barrel, a barrel cover and a barrel bottom,
at least one of the cylinder cover or the cylinder bottom is movably connected with the cylinder body;
the lifting component is arranged on the cylinder cover or the cylinder bottom which is movably connected with the cylinder body.
10. An apparatus as claimed in any one of claims 2 to 6, wherein said feed delivery unit comprises a feed delivery pipe;
one end of the conveying pipe is connected with the storage bin, and the other end of the conveying pipe is connected with the using end;
the first control valve is arranged on the conveying pipeline.
11. The apparatus as claimed in claim 10, wherein the feed delivery unit further comprises a surge bin;
the surge bin is arranged between the first control valve and the using end and on the conveying pipeline, and is used for removing micro bubbles in the spraying material and storing the spraying material.
12. The apparatus of claim 11, wherein the spray material is a photoresist.
13. A method of spray coating, the method comprising:
discharging gas in a storage bin in the spraying device through an exhaust compression unit in the spraying device;
after the gas in the storage bin is exhausted, the volume of the storage bin is compressed through the exhaust compression unit, so that the spraying material stored in the storage bin enters the material conveying unit;
and conveying the spraying material to a using end through the conveying unit.
14. The method of claim 13, wherein the exhaust gas compression unit comprises an exhaust component, a lift component, a first control valve, and a second control valve;
the gas in the storage bin in the spraying device is discharged through the exhaust compression unit in the spraying device, and the method comprises the following steps: closing the first control valve, opening the second control valve, compressing the volume of the storage bin through the lifting component and discharging gas in the storage bin through the exhaust component;
work as after the gas in the storage silo is discharged, through the compression of exhaust compression unit the volume messenger of storage silo makes the storage in the spraying material in the storage silo gets into defeated material unit, includes:
after the gas in the storage bin is exhausted, the first control valve is opened, the second control valve is closed, and the lifting component compresses the volume of the storage bin to enable the spraying material to enter the material conveying unit.
15. The method of claim 14, wherein the spray coating device further comprises a first drive unit and a control unit, the method further comprising:
the control unit controls the first driving unit to drive the lifting component to compress the volume of the storage bin.
16. The method of claim 15, wherein the spray coating device further comprises a second drive unit and a control unit, and wherein closing the first control valve and opening the second control valve comprises:
controlling the second driving unit to drive the first control valve to be closed and the second control valve to be opened through the control unit;
after the gas in the storage bin is exhausted, opening the first control valve and closing the second control valve comprises:
and controlling the second driving unit to drive the first control valve to be opened and the second control valve to be closed by the control unit.
17. The method of claim 13, wherein the exhaust compression unit comprises an evacuation component, a lift component, and a first control valve;
the discharging of the gas in the storage bin of the spraying device through the exhaust compression unit of the spraying device comprises:
closing the first control valve, and pumping out the gas in the storage bin through the vacuumizing part;
work as after the gas in the storage silo is discharged, through the compression of exhaust compression unit the volume messenger of storage silo makes the storage in the spraying material in the storage silo gets into defeated material unit, includes:
after the gas in the storage bin is exhausted, the vacuumizing part is closed, the first control valve is opened, and the lifting part compresses the volume of the storage bin to enable the spraying material to enter the material conveying unit.
18. The method of claim 17, wherein the spray coating device further comprises: a first drive unit and a control unit, the method further comprising:
the control unit controls the first driving unit to drive the lifting component to compress the volume of the storage bin;
and the control unit controls the vacuum pumping part to work or stop working.
19. The method of any one of claims 14 or 17, wherein the exhaust gas compression unit further comprises a centrifugal component disposed within the storage bin; the method further comprises the following steps:
separating the air bubbles in the spray material from the spray material by a centrifugal member.
20. The method as claimed in claim 19, wherein the delivery unit further comprises a surge bin, and the delivering the coating material to the user end by the delivery unit comprises:
the spraying material firstly passes through the first control valve, then passes through the buffer bin and finally reaches the use end.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110851554.2A CN115672597A (en) | 2021-07-27 | 2021-07-27 | Spraying device and spraying method |
| PCT/CN2021/129287 WO2023005051A1 (en) | 2021-07-27 | 2021-11-08 | Spraying apparatus and spraying method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110851554.2A CN115672597A (en) | 2021-07-27 | 2021-07-27 | Spraying device and spraying method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115672597A true CN115672597A (en) | 2023-02-03 |
Family
ID=85058998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110851554.2A Pending CN115672597A (en) | 2021-07-27 | 2021-07-27 | Spraying device and spraying method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN115672597A (en) |
| WO (1) | WO2023005051A1 (en) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6116261A (en) * | 1999-05-13 | 2000-09-12 | Rosen; Paul W. | Solvent and air mixing system with air bleed backflow |
| JP2003200084A (en) * | 2001-10-25 | 2003-07-15 | Kansai Paint Co Ltd | Method and apparatus for feeding coating material |
| JP5619613B2 (en) * | 2007-11-09 | 2014-11-05 | オ クォン，チョン | Multi-color paint applicator |
| WO2010081244A1 (en) * | 2009-01-13 | 2010-07-22 | Medmix Systems Ag | Discharge apparatus having compressed gas support |
| JP5986727B2 (en) * | 2011-10-07 | 2016-09-06 | 武蔵エンジニアリング株式会社 | Liquid material discharge apparatus and method |
| JP6541489B2 (en) * | 2015-07-24 | 2019-07-10 | 武蔵エンジニアリング株式会社 | Liquid material discharge device |
| CN211887620U (en) * | 2020-03-02 | 2020-11-10 | 创隆实业(深圳)有限公司 | PVD coating spraying device |
-
2021
- 2021-07-27 CN CN202110851554.2A patent/CN115672597A/en active Pending
- 2021-11-08 WO PCT/CN2021/129287 patent/WO2023005051A1/en unknown
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|---|---|
| WO2023005051A1 (en) | 2023-02-02 |
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