CN115647490A - Servo multi-shaft tapping device for high-precision semiconductor parts - Google Patents
Servo multi-shaft tapping device for high-precision semiconductor parts Download PDFInfo
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- CN115647490A CN115647490A CN202211333222.6A CN202211333222A CN115647490A CN 115647490 A CN115647490 A CN 115647490A CN 202211333222 A CN202211333222 A CN 202211333222A CN 115647490 A CN115647490 A CN 115647490A
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- 238000010079 rubber tapping Methods 0.000 title claims abstract description 31
- 239000004065 semiconductor Substances 0.000 title claims abstract description 26
- 230000000087 stabilizing effect Effects 0.000 claims abstract description 21
- 230000000694 effects Effects 0.000 claims abstract description 10
- 230000003139 buffering effect Effects 0.000 claims description 12
- 230000006978 adaptation Effects 0.000 claims description 6
- 244000309464 bull Species 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 5
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract
The invention discloses a high-precision semiconductor part servo multi-shaft tapping device, which adopts the technical scheme that: the hydraulic push rod type hydraulic lifting device comprises a base platform, wherein an L-shaped plate is fixedly connected to the top of the base platform, two hydraulic push rods are fixedly connected to the inner wall of the top of the L-shaped plate, a connecting plate is fixedly connected to the bottoms of the two hydraulic push rods, a groove is formed in the bottom of the connecting plate, a first motor is fixedly arranged on the top of the connecting plate, a rotating rod is fixedly connected to the output end of the first motor, the bottom of the rotating rod penetrates through the top of the connecting plate and extends into the groove, and the rotating rod is connected with the connecting plate through a bearing. Through the effect that can directly change the multiaxis ware to can change the screw tap when the tapping of different bores is carried out to needs, avoid needing the manual work to dismantle the change to each screw tap, reduce artificial intensity of labour, avoid simultaneously needing to carry out the operation of relocating after changing the screw tap, increased the efficiency of attacking the tooth, the setting of stabilizing the subassembly and inserted bar is fixed linking the piece effectively simultaneously.
Description
Technical Field
The invention relates to the technical field of semiconductor part processing, in particular to a high-precision semiconductor part servo multi-shaft tapping device.
Background
Semiconductors are materials with electrical conductivity ranging from insulators to conductors, which are easily controlled, and which are used as information processing elements, and in processing semiconductor parts, they are subjected to multiple processing steps, in which tapping of the parts may be required.
The existing semiconductor parts can be used with a plurality of screw taps when tapping, so when the bore of the screw tap needs to be changed, each screw tap needs to be disassembled and reinstalled, and then the screw tap can be positioned again, so that the labor intensity of workers is increased, more time is wasted, the working efficiency of a tapping device is reduced, and meanwhile, when tapping is performed, scraps can be generated and can be accumulated on an operation table, so that the scraps need to be manually cleaned, and the screw tap can be damaged after the scraps are accumulated.
Disclosure of Invention
Therefore, the invention provides a high-precision servo multi-shaft tapping device for semiconductor components, which solves the problems of the prior art through the matching of the structures.
In order to achieve the above purpose, the invention provides the following technical scheme: a high-precision semiconductor part servo multi-shaft tapping device comprises a bottom table, wherein an L-shaped plate is fixedly connected to the top of the bottom table, two hydraulic push rods are fixedly connected to the inner wall of the top of the L-shaped plate, and a connecting plate is fixedly connected to the bottoms of the two hydraulic push rods;
the utility model discloses a chip-removing machine, including connecting plate, bull stick output end fixedly connected with bull stick, bull stick output end fixedly connected with screw tap, connecting plate, recess, stabilizing assembly, stabilizer, feed table, the fixed motor that is equipped with in connecting plate top, a motor output end fixedly connected with bull stick, the bull stick bottom runs through the connecting plate top and extends to inside the recess, the bull stick passes through the bearing with the connecting plate and is connected, bull stick bottom fixedly connected with square pole, the connecting plate bottom is equipped with the multiaxis ware, multiaxis ware input end cover is located the square pole outside, multiaxis ware output end fixedly connected with screw tap, two the inside two cavitys, two of having seted up of connecting plate the recess both sides respectively, two the cavity bottom has all seted up through the groove, the equal fixedly connected with L shape pole in multiaxis ware both sides pole one end extends to two the inslot portion, two the equal fixedly connected with in L shape pole one end links up piece, two the inside cavity all is equipped with two stabilizing assembly, two the stabilizing assembly is equipped with link piece front side and rear side respectively, the inside is equipped with the clearance subassembly, the inside of base table, the clearance subassembly extends to the base table outside, the base table top is fixed be equipped with places the frame, place the bottom and has seted up the chip groove, advance the case portion, advance the base table both sides, the chip groove has all seted up.
Preferably, two link up piece one side all seted up the slot and run through and link up the piece, link up the piece front side and the rear side all seted up the draw-in groove.
Preferably, the stabilizing assembly comprises a circular groove, a sliding block, a clamping block and a first spring, the circular groove is formed in the rear side of the cavity, the sliding block is embedded in the circular groove and is in sliding connection with the circular groove, and the rear side of the clamping block is fixedly connected with the front side of the sliding block.
Preferably, a high precision semiconductor part servo multi-axis tapping device as claimed in the claims, wherein: the front side of the clamping block extends into the clamping groove and is matched with the clamping groove, the rear side of the spring is fixedly connected with the inner wall of the rear side of the circular groove, and the front side of the spring is fixedly connected with the rear side of the sliding block.
Preferably, the fixed slot has all been seted up to the connecting plate both sides, two the inside inserted bar that all is equipped with of fixed slot, two the inserted bar all extends to the cavity inside and with run through the slot, two the inserted bar is carried on the back mutually the side and is extended to the fixed slot outside respectively, two the equal dead lever in inserted bar looks dorsal part is connected with the pull ring.
Preferably, the clearance subassembly is including linking up frame, motor two, two belt pulleys, belt one, two eccentric plates, round bar, swing arm, four spring two, sleeve, diaphragm, two activity free bearings, two swash plates, set square, loop bars, it is fixed inside the base frame to link up the frame, it runs through the base frame bottom and extends to the base frame outside to link up the frame bottom, motor two are fixed to be located and link up frame one side, the riser is seted up to the base frame bottom, the round bar is located and links up inside the frame, two adaptation grooves have been seted up to the base frame bottom, two the adaptation groove is seted up respectively in the riser both sides.
Preferably, round bar one side run through linking up frame one side and with motor two output end fixed connection, the round bar passes through the bearing with linking up the frame and is connected, the swing arm is located and links up the frame inside and locate the round bar top, the swing arm both sides run through respectively links up the frame both sides and extend to linking up the frame outside, the swing arm passes through the bearing with linking up the frame and is connected, two the belt pulley is fixed respectively and is located the round bar and the swing arm outside, two belt pulley outsides, two are located to the belt one set the belt pulley passes through a belt drive and connects.
Preferably, two the swing arm outside, two are all fixed to locate to the eccentric plate link frame both sides, two are located respectively to the eccentric plate bottom extends to two adaptation inslots respectively, loop bar bottom and linking frame top fixed connection, the cover barrel cover locate the loop bar outside and with loop bar sliding connection, the diaphragm is fixed to be located the sleeve outside, two activity free bearings respectively with diaphragm both sides fixed connection, two the swash plate opposite side respectively with two activity free bearings dorsal part activity hinge joint, two the swash plate carries on the back the side and extends to inside two chip grooves respectively, diaphragm and sill sliding connection.
Preferably, the two bottoms of the four springs are fixedly connected with four corners of the top of the transverse plate respectively, the bottom of the triangular plate is fixedly connected with the top of the loop bar, the front side and the rear side of the triangular plate are fixedly connected with the inner wall of the front side and the inner wall of the rear side of the base platform respectively, the two tops of the four springs are fixedly connected with four corners of the bottom of the triangular plate respectively, the cleaning assembly further comprises two pushing units, the two pushing units are arranged on two sides of the linking frame respectively, each pushing unit comprises a buffering frame, a knocking rod, two sliding grooves, two stabilizing plates and two springs, the buffering frame is arranged at the top of the eccentric plate, the bottom of the knocking rod is fixedly connected with the top of the buffering frame, the two sliding grooves are arranged on the inner wall of the front side and the inner wall of the rear side of the base platform respectively, two opposite sides of the stabilizing plates are fixedly connected with the front side and the rear side of the buffering frame respectively, the two stabilizing plates are embedded in the two sliding grooves respectively and are connected with the sliding grooves, the three bottoms of the springs are fixedly connected with the tops of the two stabilizing plates respectively.
Preferably, two equal fixedly connected with gag lever post of chip groove bottom inner wall, the gag lever post top all run through the swash plate bottom and with chip groove top inner wall fixed connection, gag lever post and swash plate sliding connection, the equal fixedly connected with support column in sill plate bottom four corners.
The invention has the beneficial effects that:
1. according to the multi-axis device, due to the effect that the multi-axis device can be directly replaced, the screw taps can be replaced when tapping with different calibers is needed, the situation that each screw tap needs to be manually disassembled and replaced is avoided, the labor intensity of workers is reduced, meanwhile, the situation that repositioning operation is needed after the screw taps are replaced is avoided, the tapping efficiency is increased, meanwhile, the stable assembly and the inserting rod are effectively arranged to effectively fix the connecting block, so that the multi-axis device is fixed through the L-shaped rod, the disassembling and replacing modes are simple and rapid, and the replacing efficiency is increased;
2. the setting of clearance subassembly can rotate and drive the eccentric plate through the swing arm and rotate the sweeps that produces when attacking the tooth to make the swash plate shake, and will drop the sweeps on the swash plate and discharge from the chip groove, avoided needing the manual work to clear up the sweeps, avoided the sweeps to pile up the damage that causes the screw tap simultaneously.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It should be apparent that the drawings in the following description are merely exemplary and that other implementation drawings may be derived from the drawings provided to one of ordinary skill in the art without inventive effort.
The structures, ratios, sizes, and other characteristics of the present invention are only used for matching the content disclosed in the specification, so that those skilled in the art can understand and read the present invention, and the present invention is not limited by the conditions that the present invention can be implemented, so that the present invention has no technical essence, and any structural modification, ratio relationship change or size adjustment should still fall within the range that the technical content disclosed in the present invention can cover without affecting the efficacy and the achievable purpose of the present invention
FIG. 1 is a schematic view of the overall structure provided by the present invention;
FIG. 2 is a front cross-sectional view provided by the present invention;
FIG. 3 is a side cross-sectional view provided by the present invention;
FIG. 4 is an enlarged view of the invention at A in FIG. 2;
FIG. 5 is an enlarged view at B of FIG. 3 provided by the present invention;
FIG. 6 is a perspective view of an insert rod provided by the present invention;
in the figure: 1 bottom table, 2L-shaped plate, 3 hydraulic push rod, 4 connecting plate, 5 grooves, 6 motor I, 7 rotating rod, 8 square rod, 9 multi-axis device, 10 chip inlet groove, 11 support column, 12 screw tap, 13 cavity, 14 through groove, 15L-shaped rod, 16 connecting block, 17 slot, 18 clamping groove, 19 circular groove, 20 sliding block, 21 clamping block, 22 spring I, 23 inserting rod, 24 placing frame, 25 chip groove, 26 connecting frame, 27 motor II, 28 belt pulley, 29 belt I, 30 eccentric plate, 31 circular rod, 32 rotating rod, 33 spring II, 34 transverse plate, 35 movable hinge seat, 36 inclined plate, 37 triangular plate, 38 adapting groove, 39 buffer frame, 40 knocking rod, 41 stabilizing plate, 42 spring III and 43 limiting rod.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for the purpose of illustration and explanation and not limitation.
Referring to the attached drawings 1-6, the high-precision semiconductor part servo multi-shaft tapping device provided by the invention comprises a bottom table 1, wherein the top of the bottom table 1 is fixedly connected with an L-shaped plate 2, the inner wall of the top of the L-shaped plate 2 is fixedly connected with two hydraulic push rods 3, and the bottoms of the two hydraulic push rods 3 are fixedly connected with a connecting plate 4;
the bottom of a connecting plate 4 is provided with a groove 5, the top of the connecting plate 4 is fixedly provided with a first motor 6, the output end of the first motor 6 is fixedly connected with a rotating rod 7, the bottom of the rotating rod 7 penetrates through the top of the connecting plate 4 and extends into the groove 5, the rotating rod 7 is connected with the connecting plate 4 through a bearing, the bottom of the rotating rod 7 is fixedly connected with a square rod 8, the bottom of the connecting plate 4 is provided with a multi-axis device 9, the input end of the multi-axis device is sleeved outside the square rod 8, the output end of the multi-axis device is fixedly connected with a screw tap 12, two cavities 13 are formed in the connecting plate 4, the two cavities 13 are respectively arranged on two sides of the groove 5, the bottoms of the two cavities 13 are respectively provided with a groove 14, two sides of the multi-axis device 9 are respectively and fixedly connected with an L-shaped rod 15, one ends of the two L-shaped rods 15 respectively extend into the two through grooves 14, one ends of the two L-shaped rods 15 are respectively and fixedly connected with a connecting block 16, two stabilizing assemblies are respectively arranged in the two cavities 13, the two stabilizing assemblies are respectively provided with the front side and the rear side of the connecting block 16, a cleaning assembly is arranged in the bottom table 1, the bottom of the cleaning assembly extends to the outside of the bottom table 1, the bottom of the bottom table 1, a chip groove is provided with a chip groove 25, and a chip groove, a chip groove is arranged in the bottom groove 1;
in the embodiment, the screw taps 12 and the multi-axis device 9 are integrated, so that the multi-axis device 9 can be directly replaced when tapping with different calibers is required, the step of disassembling and replacing each screw tap 12 is avoided, meanwhile, the connecting block 16 can be effectively fixed by the arrangement of the stabilizing component and the inserting rod 23, so that the multi-axis device 9 is fixed, when tapping is required to be performed on a semiconductor part, firstly, the first motor 6 is started, the output end of the first motor 6 rotates to enable the rotating rod 7 and the square rod 8 to rotate, then, the input end of the multi-axis device rotates through the rotation of the square rod 8, the output end of the multi-axis device rotates through a mechanism inside the multi-axis device 9, so that the screw taps 12 are driven to rotate, then, the hydraulic push rods 3 are started, the hydraulic push rods 3 push the connecting plates 4 downwards and structures connected with the multi-axis device 9 to move downwards, the rotary screw taps 12 move downwards to perform tapping processing on the semiconductor part, and scrap generated by tapping directly falls into the chip grooves 10 from the placing frame 24;
wherein, in order to realize can with the purpose that stabilizes the subassembly and cooperate, this device adopts following technical scheme to realize: slots 17 are formed in one side of each of the two connecting blocks 16 and penetrate through the connecting blocks 16, and clamping grooves 18 are formed in the front side and the rear side of each of the connecting blocks 16;
wherein, in order to realize the purpose that can fix linking piece 16, this device adopts following technical scheme to realize: the stabilizing component comprises a circular groove 19, a sliding block 20, a clamping block 21 and a first spring 22, the circular groove 19 is formed in the rear side of the cavity 13, the sliding block 20 is embedded in the circular groove 19 and is in sliding connection with the circular groove 19, the rear side of the clamping block 21 is fixedly connected with the front side of the sliding block 20, the front side of the clamping block 21 extends into the clamping groove 18 and is matched with the clamping groove 18, the rear side of the first spring 22 is fixedly connected with the inner wall of the rear side of the circular groove 19, and the front side of the first spring 22 is fixedly connected with the rear side of the sliding block 20;
wherein, in order to realize the purpose that can pull out inserted bar 23 better, this device adopts following technical scheme to realize: fixing grooves are formed in two sides of the connecting plate 4, inserting rods 23 are arranged in the two fixing grooves, the two inserting rods 23 extend into the cavity 13 and penetrate through the inserting grooves 17, opposite sides of the two inserting rods 23 respectively extend to the outside of the fixing grooves, and pull rings are fixedly connected to opposite sides of the two inserting rods 23;
wherein, in order to realize the purpose that can discharge the sweeps, this device adopts following technical scheme to realize: the cleaning component comprises a joining frame 26, a second motor 27, two belt pulleys 28, a first belt 29, two eccentric plates 30, a round rod 31, a rotary rod 32, four springs 33, a sleeve, a transverse plate 34, two movable hinged supports 35, two inclined plates 36, a triangular plate 37 and a sleeve rod, wherein the joining frame 26 is fixedly arranged in the base table 1, the bottom of the joining frame 26 penetrates through the bottom of the base table 1 and extends to the outside of the base table 1, the second motor 27 is fixedly arranged on one side of the joining frame 26, the bottom of the base table 1 is provided with a vertical groove, the round rod 31 is arranged in the joining frame 26, the bottom of the base table 1 is provided with two adapting grooves 38, the two adapting grooves 38 are respectively arranged on two sides of the vertical groove, one side of the round rod 31 penetrates through one side of the joining frame 26 and is fixedly connected with the output end of the second motor 27, the round rod 31 is connected with the joining frame 26 through a bearing, the rotary rod 32 is arranged in the joining frame 26 and arranged on the top of the round rod 31, the two sides of the rotary rod 32 respectively penetrate through the two sides of the connecting frame 26 and extend to the outside of the connecting frame 26, the rotary rod 32 is connected with the connecting frame 26 through a bearing, the two belt pulleys 28 are respectively and fixedly arranged at the outer sides of the round rod 31 and the rotary rod 32, the first belt 29 is sleeved at the outer sides of the two belt pulleys 28, the two belt pulleys 28 are in driving connection through the first belt 29, the two eccentric plates 30 are respectively and fixedly arranged at the outer sides of the rotary rod 32, the two eccentric plates 30 are respectively and fixedly arranged at the two sides of the connecting frame 26, the bottoms of the two eccentric plates 30 respectively extend into the two adaptive grooves 38, the bottom of the sleeve rod is fixedly connected with the top of the connecting frame 26, the sleeve is sleeved at the outer sides of the sleeve rod and is in sliding connection with the sleeve rod, the transverse plate 34 is fixedly arranged at the outer side of the sleeve, the two movable hinged seats 35 are respectively and fixedly connected with the two opposite sides of the movable hinged seats 35, the two inclined plates 36 are respectively and movably hinged with the opposite sides of the two movable hinged seats 35, and the opposite sides of the inclined plates 36 respectively extend into the two chip grooves 25, the cleaning assembly further comprises two pushing units, the two pushing units are respectively arranged on two sides of the connecting frame 26, each pushing unit comprises a buffering frame 39, a knocking rod 40, two sliding chutes, two stabilizing plates 41 and two spring three 42, the buffering frame 39 is arranged on the top of the eccentric plate 30, the bottom of the knocking rod 40 is fixedly connected with the top of the buffering frame 39, the two sliding chutes are respectively arranged on the front inner wall and the rear inner wall of the base platform 1, opposite sides of the two stabilizing plates 41 are respectively fixedly connected with the front side and the rear side of the buffering frame 39, the two stabilizing plates 41 are respectively embedded in the two sliding chutes and are slidably connected with the sliding chutes, the bottoms of the two spring three 42 are respectively fixedly connected with the tops of the two stabilizing plates 41, and the tops of the two spring three 42 are respectively fixedly connected with the tops of the two sliding chutes;
wherein, in order to realize the purpose of supporting the base table 1 well, the device adopts the following technical scheme: two gag lever posts 43 of two equal fixedly connected with of inner wall in flute 25 bottoms, gag lever post 43 top all run through the swash plate 36 bottom and with flute 25 top inner wall fixed connection, gag lever post 43 and swash plate 36 sliding connection, the equal fixedly connected with support column 11 in the bottom of sill 1 bottom four corners.
The using process of the invention is as follows: when the tapping machine is used, when a semiconductor part needs to be tapped, firstly, the motor I6 is started, the output end of the motor I6 rotates to enable the rotating rod 7 and the square rod 8 to rotate, then the input end of the multi-axis device rotates through the rotation of the square rod 8, the output end of the multi-axis device rotates through a mechanism inside the multi-axis device 9, so that the screw tap 12 is driven to rotate, then the hydraulic push rod 3 is started, the hydraulic push rod 3 pushes the connecting plate 4 and a structure connected with the multi-axis device 9 downwards, the multi-axis device 9 moves to enable the rotating screw tap 12 to move downwards and tap the semiconductor part to be tapped, waste chips generated by tapping directly fall into the chip inlet groove 10 from the placing frame 24 and fall onto the triangular plate 37 from the chip inlet groove 10, the waste chips can fall onto the inclined plate 36 due to the fact that the top of the triangular plate 37 is an inclined plane, and the motor II 27 is started, the output end of the second motor 27 enables the rotary rod 32 to rotate through the round rod 31, the belt pulley 28 and the first belt 29, the rotary rod 32 enables the eccentric plate 30 to rotate, when the longer end of the eccentric plate 30 is in contact with the buffer frame 39, the buffer frame 39 and the knocking rod 40 can move upwards and drive the stabilizing plate 41 to move upwards, meanwhile, the third spring 42 is pressed, the transverse plate 34 can be knocked by the knocking rod 40 moving upwards, the transverse plate 34 can move upwards and enable the sleeve to slide on the sleeve rod and press the second spring 33, the transverse plate 34 can move through the movable hinge base 35 to enable the inclined plate 36 to move, when the shorter end of the eccentric plate 30 is in contact with the buffer frame 39, the third spring 42 can rebound without stress and enable the stabilizing plate 41 and the buffer frame 39 to move downwards, and the knocking rod 40 is not in contact with the transverse plate 34 any more and enables the second spring 33 to be not stressed and rebound, so that the transverse plate 34 can shake and drive the inclined plate 36 to shake, therefore, scraps on the inclined plate 36 are shaken out of the scrap groove 25, when the tap 12 needs to be replaced, the inserted rod 23 is firstly pulled out through the pull ring, then the L-shaped rod 15 is directly pulled, the L-shaped rod 15 moves downwards, the connecting block 16 moves downwards, the clamping block 21, the sliding block 20 and the first spring 22 are extruded, the clamping block 21 and the sliding block 20 move towards the inside of the circular groove 19, and the first spring 22 is extruded at the same time, so that the multi-axis device 9 can be detached and replaced.
The above description is only a preferred embodiment of the present invention, and any person skilled in the art may modify the present invention or modify it to an equivalent technical solution by using the technical solution described above. Therefore, any simple modifications or equivalent substitutions made in accordance with the technical solution of the present invention are within the scope of the claims of the present invention.
Claims (10)
1. The utility model provides a servo multiaxis tapping device of high accuracy semiconductor part, includes bed (1), its characterized in that: the top of the base platform (1) is fixedly connected with an L-shaped plate (2), the inner wall of the top of the L-shaped plate (2) is fixedly connected with two hydraulic push rods (3), and the bottoms of the two hydraulic push rods (3) are fixedly connected with a connecting plate (4);
the bottom of the connecting plate (4) is provided with a groove (5), the top of the connecting plate (4) is fixedly provided with a first motor (6), the output end of the first motor (6) is fixedly connected with a rotating rod (7), the bottom of the rotating rod (7) penetrates through the top of the connecting plate (4) and extends into the groove (5), the rotating rod (7) is connected with the connecting plate (4) through a bearing, the bottom of the rotating rod (7) is fixedly connected with a square rod (8), the bottom of the connecting plate (4) is provided with a multi-shaft device (9), the input end of the multi-shaft device is sleeved outside the square rod (8), the output end of the multi-shaft device is fixedly connected with a screw tap (12), the inside of the connecting plate (4) is provided with two cavities (13), two cavities (13) are respectively arranged at the two sides of the groove (5), two cavities (13) are all provided with a through groove (14), the two sides of the multi-shaft device (9) are all fixedly connected with an L-shaped rod (15), one end of the L-shaped rod (15) extends into the two through grooves (14), one end of the two L-shaped rods (15) is respectively connected with a connecting block (16), two stable components (16) are arranged at one end of the L-shaped rod (15), and two stable components (1) are respectively arranged at the front side and the rear side of the stable connection component (1), the clearance subassembly extends to base frame (1) outside, fixed being equipped with in base frame (1) top places frame (24), place frame (24) bottom and seted up chip inlet groove (10), chip inlet groove (10) extend to inside base frame (1), chip groove (25) have all been seted up to base frame (1) both sides.
2. The high-precision servo multi-axis tapping device for semiconductor parts as claimed in claim 1, wherein: two link up piece (16) one side all seted up slot (17) and run through and link up piece (16), link up piece (16) front side and rear side and all seted up draw-in groove (18).
3. The high-precision servo multi-axis tapping device for semiconductor parts as claimed in claim 1, wherein: the stabilizing assembly comprises a circular groove (19), a sliding block (20), a clamping block (21) and a first spring (22), the circular groove (19) is arranged on the rear side of the cavity (13), the sliding block (20) is embedded in the circular groove (19) and is in sliding connection with the circular groove (19), and the rear side of the clamping block (21) is fixedly connected with the front side of the sliding block (20).
4. The high-precision servo multi-axis tapping device for semiconductor parts as claimed in claim 3, wherein: the front side of the clamping block (21) extends into the clamping groove (18) and is matched with the clamping groove (18), the rear side of the first spring (22) is fixedly connected with the inner wall of the rear side of the circular groove (19), and the front side of the first spring (22) is fixedly connected with the rear side of the sliding block (20).
5. The high-precision servo multi-axis tapping device for semiconductor parts as claimed in claim 1, wherein: the fixed slot has all been seted up to connecting plate (4) both sides, two fixed slot inside all is equipped with inserted bar (23), two inserted bar (23) all extend to cavity (13) inside and with run through slot (17), two inserted bar (23) mutually the opposite side of the back of the body side respectively extends to the fixed slot outside, two the equal dead lever in inserted bar (23) dorsal part side is connected with the pull ring.
6. The servo multi-axis tapping device for high-precision semiconductor parts as claimed in claim 1, wherein: the clearance subassembly is including linking up frame (26), motor two (27), two belt pulleys (28), belt (29), two eccentric plates (30), round bar (31), swing arm (32), four spring two (33), sleeve, diaphragm (34), two activity free bearings (35), two swash plates (36), set square (37), loop bar, it is inside that linking up frame (26) is fixed to be located end platform (1), it runs through end platform (1) bottom and extends to end platform (1) outside to link up frame (26) bottom, motor two (27) are fixed to be located and link up frame (26) one side, end platform (1) bottom has seted up the vertical slot, round bar (31) are located and link up inside frame (26), two adaptation grooves (38) have been seted up to end platform (1) bottom, two adaptation grooves (38) are seted up respectively in the vertical slot both sides.
7. The high-precision servo multi-axis tapping device for semiconductor parts as claimed in claim 6, wherein: round bar (31) one side runs through and links up frame (26) one side and with two (27) output fixed connection of motor, round bar (31) are connected through the bearing with linking frame (26), swing arm (32) are located and are linked up frame (26) inside and locate round bar (31) top, swing arm (32) both sides run through respectively link up frame (26) both sides and extend to link up frame (26) outside, swing arm (32) are connected through the bearing with linking frame (26), two belt pulley (28) are fixed respectively and are located round bar (31) and swing arm (32) outside, two belt pulley (28) outsides are located in the cover of belt (29), two belt pulley (28) are through belt (29) drive connection.
8. The servo multi-axis tapping device for high-precision semiconductor parts as claimed in claim 6, wherein: two swing arm (32) outside, two are all fixed to eccentric plate (30) and locate the swing arm (30) outside, two eccentric plate (30) are located respectively and are linked up frame (26) both sides, two inside eccentric plate (30) bottom extends to two adaptation grooves (38) respectively, loop bar bottom and linking frame (26) top fixed connection, the sleeve cover is located the loop bar outside and with loop bar sliding connection, the sleeve outside is fixed to be located in diaphragm (34), two activity free bearing (35) respectively with diaphragm (34) both sides fixed connection, two swash plate (36) opposite side respectively with two activity free bearing (35) back of the body side activity articulated, two swash plate (36) back of the body side extend to inside two chip grooves (25) respectively, diaphragm (34) and base frame (1) sliding connection.
9. The high-precision servo multi-axis tapping device for semiconductor parts as claimed in claim 6, wherein: four spring two (33) bottom respectively with diaphragm (34) top four corners fixed connection, set-square (37) bottom and loop bar top fixed connection, set-square (37) front side and rear side respectively with sill (1) front side inner wall and rear side inner wall fixed connection, four spring two (33) top respectively with set-square (37) bottom four corners fixed connection, the clearance subassembly still includes two promotion units, two promote the unit and locate respectively and link up frame (26) both sides, the promotion unit includes buffering frame (39), strikes pole (40), two spouts, two steadying plates (41), two three springs (42), eccentric plate (30) top is located in buffering frame (39), strike pole (40) bottom and buffering frame (39) top fixed connection, two the spout is seted up respectively in sill (1) front side inner wall and rear side inner wall, two steadying plates (41) opposite side respectively with buffering frame (39) front side and rear side fixed connection, two steadying plates (41) inside respectively with two spouts (41) and two fixed connection respectively with two spring (42), two steadying plates (41) top fixed connection respectively with two spouts (42).
10. The high-precision servo multi-axis tapping device for semiconductor parts as claimed in claim 1, wherein: two equal fixedly connected with two gag lever post (43) of chip groove (25) bottom inner wall, gag lever post (43) top all run through swash plate (36) bottom and with chip groove (25) top inner wall fixed connection, gag lever post (43) and swash plate (36) sliding connection, equal fixedly connected with support column (11) in base frame (1) bottom four corners.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211333222.6A CN115647490B (en) | 2022-10-28 | 2022-10-28 | Servo multiaxis tapping device of high-accuracy semiconductor part |
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| CN202211333222.6A CN115647490B (en) | 2022-10-28 | 2022-10-28 | Servo multiaxis tapping device of high-accuracy semiconductor part |
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| CN115647490A true CN115647490A (en) | 2023-01-31 |
| CN115647490B CN115647490B (en) | 2024-06-14 |
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|---|---|
| CN115647490B (en) | 2024-06-14 |
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