CN115635205B - Porous part surface machining method and welding type spray disc manufacturing method - Google Patents
Porous part surface machining method and welding type spray disc manufacturing method Download PDFInfo
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- CN115635205B CN115635205B CN202211266222.9A CN202211266222A CN115635205B CN 115635205 B CN115635205 B CN 115635205B CN 202211266222 A CN202211266222 A CN 202211266222A CN 115635205 B CN115635205 B CN 115635205B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 239000007921 spray Substances 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims description 8
- 238000005493 welding type Methods 0.000 title description 6
- 238000003754 machining Methods 0.000 title description 4
- 238000007710 freezing Methods 0.000 claims abstract description 78
- 230000008014 freezing Effects 0.000 claims abstract description 78
- 238000012545 processing Methods 0.000 claims abstract description 54
- 239000007788 liquid Substances 0.000 claims abstract description 46
- 239000012530 fluid Substances 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 15
- 238000003672 processing method Methods 0.000 claims abstract description 12
- 238000003466 welding Methods 0.000 claims abstract description 12
- 238000001816 cooling Methods 0.000 claims abstract description 11
- 239000007787 solid Substances 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 239000008213 purified water Substances 0.000 claims description 9
- 230000007704 transition Effects 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 14
- 230000000903 blocking effect Effects 0.000 abstract description 5
- 230000002950 deficient Effects 0.000 abstract 1
- 238000009826 distribution Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 230000003139 buffering effect Effects 0.000 description 3
- 238000005057 refrigeration Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000001603 reducing effect Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
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- 244000005700 microbiome Species 0.000 description 1
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- Jigs For Machine Tools (AREA)
Abstract
The invention discloses a surface processing method of a porous part, which comprises the following steps: and (3) putting the porous part into a freezing seat, adding a freezing liquid into the freezing seat, immersing holes of the porous part by the freezing liquid, cooling the freezing seat to freeze the freezing liquid, taking out the porous part, and then processing the surface of the porous part. The invention also discloses a manufacturing method of the welded spray disc, which comprises the following steps: processing according to a drawing; welding a gas flow conduit device to the upper cover and welding the upper cover to the porous part; putting the porous plate into a refrigerating device, adding a refrigerating fluid into a refrigerating seat, immersing air holes by the refrigerating fluid, cooling the refrigerating seat to freeze the refrigerating fluid, taking out the porous part, and then processing the surface of the porous part; and processing the surface of the porous part until the flatness meets the requirement, and obtaining the welded spray disc. The invention prevents the defective material from blocking the hole, and the edge of the hole is not easy to generate burrs, so the processing efficiency is high, and the processing effect is high.
Description
Technical Field
The invention relates to the field of part machining, in particular to a porous part surface machining method and a welding type spray disc manufacturing method.
Background
The welded spray disk is one of important parts of the etching machine, and the welded spray disk structure can be divided into three important parts, namely an upper cover, a porous plate and an air inlet and outlet runner device.
Aiming at the welded spray disc, deviation is caused by the flatness after welding, the perforated plate is difficult to process after welding, the hole on the perforated plate can be plugged by the residual materials generated during the process of processing the surface of the perforated plate, and the problem of burr is easily caused by the adhesion of the residual materials on the edge of the hole during the edge processing of the hole, so that the processing efficiency is low and the processing effect is poor.
Therefore, a new technical solution is needed to solve the above technical problems.
Disclosure of Invention
The invention aims to provide a surface processing method of a porous part, which is characterized in that a frozen liquid is used for plugging holes on the porous part, so that the blocking of a residual material inlet hole is prevented, burrs are not easy to generate at the edges of the holes, the operation is simple, the processing efficiency is high, and the processing effect is good. The invention further aims to provide a manufacturing method of the welded spray disc, which is convenient for processing the surface of the porous plate in the spray disc, has smoother processing surface, prevents air holes from being blocked, and has high processing efficiency and good processing effect.
In order to achieve the technical purpose and meet the technical requirements, the invention adopts the technical scheme that: a surface processing method of a porous part comprises the following steps: and placing the porous part into a freezing seat, adding a freezing liquid into the freezing seat, immersing holes of the porous part by the freezing liquid, cooling the freezing seat to freeze the freezing liquid, taking out the porous part, and then processing the surface of the porous part.
The invention also provides a manufacturing method of the welding type spray disc, which comprises the following steps:
step 1, processing a gas inlet and outlet runner device, an upper cover and a porous plate according to a drawing;
step 2, welding the gas flow channel device on the upper cover, and welding the upper cover on the porous part;
step 3, processing the porous plate obtained in the step 2 by using the porous part surface processing method, wherein a plurality of air holes are formed in the porous plate, specifically, the porous plate is placed in a freezing seat, and a freezing liquid is added into the freezing seat, the air holes are immersed by the freezing liquid, the freezing seat is cooled to freeze the freezing liquid, the porous part is taken out, and then the surface of the porous part is processed;
and 4, after the surface of the porous part is processed until the flatness meets the requirement, cleaning the residual materials generated by processing to obtain the welded spray disc.
As a preferable technical scheme, the refrigerating fluid is industrial purified water.
As a preferable technical scheme, one end of the freezing seat is provided with a freezing groove for accommodating the porous plate.
As the preferable technical scheme, the upper cover is of a cylindrical structure, the porous plate is round, and one end of the porous plate, which faces the upper cover, is provided with a round groove.
As a preferred technical solution, the gas flow passage device comprises a first flow passage portion and a second flow passage portion which are integrally formed, wherein the diameter of the first flow passage portion is smaller than that of the second flow passage portion, and the second flow passage portion is fixedly connected with the upper cover.
As a preferred embodiment, an arcuate transition flow path is provided between the first flow path and the second flow path.
Preferably, the freezing tank is circular, and its diameter is larger than the outer diameter of the porous plate.
As a preferable technical scheme, the porous plate is provided with a plurality of uniformly arranged air holes, and the diameters of the air holes are 1-1.5mm.
As a preferable technical scheme, the number of the air holes is 3200-3600.
The beneficial effects of the invention are as follows:
1) According to the surface processing method of the porous part, the holes of the porous part are immersed by the refrigerating fluid, and then the refrigerating fluid is frozen by the refrigerating device, so that the frozen refrigerating fluid fills the holes of the porous part, and when the surface of the porous part is processed, the residual materials cannot enter the holes, so that the blocking cannot be caused, and when a processing tool passes through the edges of the holes, the frozen refrigerating fluid is solid, supports the holes and protects the edges of the holes, so that the phenomenon of burr turning is prevented, and after the processing is finished, the solid refrigerating fluid is melted to be liquid and cannot stay in the holes, so that the processing efficiency is high, and the processing effect is good;
2) The manufacturing method of the welded spray disc is simple to operate, the gas runner device, the upper cover and the porous plate are welded, the porous plate is placed into the refrigerating device, the air holes are immersed by the refrigerating fluid, the refrigerating fluid of the refrigerating device is started to be frozen into a solid state, the air holes are filled with the frozen refrigerating fluid, so that when the surface of the porous plate is processed, the residual materials cannot enter the holes, the blocking cannot be caused, and when the processing tool passes through the edges of the air holes, the edges of the holes are supported and protected by the frozen refrigerating fluid, the phenomenon of burr turning can be prevented, and after the processing is finished, the solid refrigerating fluid is melted into a liquid state, cannot stay in the air holes, so that the processing efficiency is high, and the processing effect is good;
3) Preferably, the industrial purified water has less impurities and a more stable freezing point;
4) Preferably, the porous plate and the refrigerating fluid are conveniently placed in the refrigerating tank;
5) Preferably, the upper cover and the porous plate form a gas distribution space, so that gas distribution spraying is facilitated;
6) Preferably, the reducing structure is easy for gas diffusion and distribution;
7) Preferably, the transition flow passage part ensures that the gas flow direction is more reasonable and has a buffering effect;
8) Preferably, the shape of the freezing groove is matched with that of the porous plate, so that the waste of the freezing liquid is avoided as much as possible;
9) Preferably, the air holes have better spraying effect at the thickness of 1-1.5mm.
Drawings
FIG. 1 is a block diagram of a freezer seat according to one embodiment of the present invention;
FIG. 2 is a block diagram of a welded shower tray according to one embodiment of the present invention;
FIG. 3 is a block diagram of a gas flow conduit device according to one embodiment of the present invention;
FIG. 4 is a block diagram of an upper cover according to one embodiment of the present invention;
FIG. 5 is a block diagram of a perforated plate according to one embodiment of the present invention;
in fig. 1-5, 1, a freezer seat; 101. a freezing tank; 2. a gas flow path device; 201. a first flow path portion; 202. a second flow path portion; 203. a transition flow path portion; 3. an upper cover; 301. an air tank; 302. a through hole; 4. a porous plate; 401. air holes; 402. a groove.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
The same or similar reference numbers in the drawings of embodiments of the invention correspond to the same or similar components; in the description of the present invention, it should be understood that, if the terms "top", "bottom", "left", "right", "front", "rear", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, it is merely for convenience in describing the present invention, and it is not indicated or implied that the devices or elements referred to must have specific orientations, be configured and operated in specific orientations, so that the terms describing the positional relationships in the drawings are merely illustrative and should not be construed as limitations of the present patent, and specific meanings of the terms described above may be understood by those skilled in the art according to specific circumstances.
Referring to fig. 1-5, an embodiment of the present invention provides a surface processing method for a porous part, which includes the following steps: the method comprises the steps of putting a porous part into a freezing seat 1, adding a freezing liquid into the freezing seat 1, immersing holes of the porous part by the freezing liquid, cooling the freezing seat 1 to freeze the freezing liquid, taking out the porous part, then processing the surface of the porous part, cooling to freeze the freezing liquid, taking out the porous part, then processing the surface of the porous part, immersing the holes of the porous part by the freezing liquid, freezing the freezing liquid, and converting the freezing liquid from a solid state to a liquid state, wherein the holes of the porous part are filled by the frozen freezing liquid, so that when the surface of the porous part is processed, the residual materials cannot enter the holes, the blocking cannot be caused, and when a processing tool passes through the edges of the holes, the phenomenon of supporting and protecting the edges of the holes is prevented because the frozen freezing liquid is a solid state, after the processing is finished, the solid freezing liquid is melted to be a liquid state, and cannot stay in the holes, so that the processing efficiency is high, and the processing effect is good.
The invention also provides a manufacturing method of the welding type spray disc, which comprises the following steps:
step 1, processing a gas inlet and outlet runner device 2, an upper cover 3 and a porous plate 4 according to a drawing;
step 2, welding the gas flow channel device 2 to the upper cover 3, and welding the upper cover 3 to the porous part;
step 3, processing the porous plate 4 obtained in the step 2 by using the porous part surface processing method, wherein a plurality of air holes 401 are formed in the porous plate 4, specifically, the porous plate 4 is placed in a freezing seat 1, freezing liquid is added into the freezing seat 1, the air holes 401 are immersed by the freezing liquid, the freezing seat 1 is cooled to freeze the freezing liquid, the porous part is taken out, and then the surface of the porous part is processed;
and 4, after the surface of the porous part is processed until the flatness meets the requirement, cleaning the residual materials generated by processing to obtain a welded spray disc, and further, drying the liquid freezing liquid on the welded spray disc in a heating drying or air blowing mode.
After the upper cover 3 and the porous plate 4 are welded, the surface flatness of the porous plate 4 is affected, so that uneven gas distribution and poor spraying effect are caused, the manufacture of a semiconductor is affected, the surface of the porous plate 4 is required to be processed by processing tools such as cutters, the diameter of the air holes 401 is generally less than 1.5mm, the number of the holes is more than 3200, the air holes 401 are easily blocked by residual materials generated in the processing, the cleaning is troublesome, the edges of the air holes 401 are easily adhered with residual materials after the processing due to the characteristics of the air holes 401, the air holes 401 are difficult to be blocked by a proper tool, the processing of the surface of the porous plate 4 is not affected, the inventor discovers through research and production practice that the porous plate 4 is immersed in the refrigerating liquid, then the liquid refrigerating liquid is converted into the solid refrigerating liquid through a refrigerating device, the air holes 401 are filled with the solid refrigerating liquid, the processed residual materials cannot enter the air holes 401, the solid refrigerating liquid can form a support for the air holes 401, the deformation is reduced in the processing process, and the phenomenon of burr turnover is prevented due to the fact that the edges of the air holes 401 are easily adhered to the residual materials.
As shown in fig. 1-5, in some embodiments, in the outsourcing industrial refrigerator, a liquid inlet and a liquid outlet are arranged on a refrigeration seat 1, a cooling flow channel is arranged in the refrigeration seat, ethanol is selected as a cooling medium, the ethanol is introduced into the cooling seat, and the cooling seat is cooled to-60 ℃ within 30 minutes by repeated circulation, so that the refrigeration liquid can be quickly frozen.
As shown in fig. 1 to 5, in some embodiments, the freezing solution is industrial pure water, and when impurities are contained in the water, the freezing point is lowered, so that industrial pure water with a higher freezing point is used, and harmful substances such as microorganisms are removed by multi-layer filtration, and meanwhile minerals required by human bodies such as fluorine, potassium, calcium and magnesium are also removed.
As shown in fig. 1 to 5, in some embodiments, a freezing tank 101 for accommodating the porous plate 4 is provided at one end of the freezing base 1, the porous plate 4 is placed in the freezing tank 101, and an appropriate amount of freezing liquid is added into the freezing tank 101, so that the freezing effect is good.
As shown in fig. 1 to 5, in some embodiments, the upper cover 3 has a cylindrical structure, the porous plate 4 has a circular shape, a circular groove 402 is provided at an end of the porous plate 4 facing the upper cover 3, and the upper cover 3 and the groove 402 form a gas distribution space.
As shown in fig. 1-5, in some embodiments, the gas flow channel device 2 includes a first flow channel portion 201 and a second flow channel portion 202 that are integrally formed, the diameter of the first flow channel portion 201 is smaller than that of the second flow channel portion 202, the second flow channel portion 202 is fixedly connected with the upper cover 3, and the reducing effect has a buffering effect.
As shown in fig. 1-5, in some embodiments, a funnel-shaped transition runner 203 is disposed between the first runner 201 and the second runner 202, so that the gas can smoothly transition when entering, and the buffering and guiding effects are improved.
As shown in fig. 1-5, in some embodiments, the center of the upper cover 3 facing one end of the gas flow channel device 2 is provided with a gas groove 301, the center of the bottom surface of the gas groove 301 is provided with a through hole 302 penetrating the gas groove 301 in the axial direction, and the gas groove 301 and the through hole 302 improve the gas passing efficiency.
As shown in fig. 1 to 5, in some embodiments, the freezing tank 101 is circular, and the diameter of the freezing tank is larger than the outer diameter of the porous plate 4, so that the freezing tank 101 is matched with the shape of the porous plate 4, the space utilization rate is improved, and the waste of the freezing liquid can be avoided as much as possible.
In some embodiments, the diameter of the air hole 401 is 1-1.5mm, and if the diameter of the air hole 401 is larger than 1.5mm, the air flow rate is lower, the air distribution effect is poor, and if the diameter of the air hole 401 is smaller than 1mm, the air flow is blocked easily, and the back pressure backflow is caused.
As shown in fig. 1-5, in some embodiments, the number of the air holes 401 is 3200-3600, which has a better spraying effect.
As shown in fig. 1 to 5, in some embodiments, 6 air holes 401 are annularly arranged to form air holes 401, multiple groups of air holes 401 are uniformly arranged, and 2 air holes 401 are shared by 2 adjacent air holes 401, so that the spraying effect can be significantly improved.
Examples
A surface processing method of a porous part comprises the following steps: putting a porous part into a freezing seat 1, adding industrial purified water into the freezing seat 1, immersing holes of the porous part by the industrial purified water, cooling the freezing seat 1 to freeze the industrial purified water, taking out the porous part, then processing the surface of the porous part, cooling to freeze the refrigerant, taking out the porous part, and then processing the surface of the porous part.
A manufacturing method of a welded spray disk comprises the following steps:
step 1, processing a gas inlet and outlet runner device 2, an upper cover 3 and a porous plate 4 according to a drawing;
step 2, welding the gas flow channel device 2 to the upper cover 3, and welding the upper cover 3 to the porous part;
step 3, processing the porous plate 4 obtained in the step 2 by using the porous part surface processing method, wherein a plurality of air holes 401 are formed in the porous plate 4, specifically, the porous plate 4 is placed in a freezing seat 1, industrial purified water is added into the freezing seat 1, the industrial purified water submerges the air holes 401, the freezing seat 1 is cooled to freeze the industrial purified water, the porous part is taken out, and then the surface of the porous part is processed;
and 4, after the surface of the porous part is processed until the flatness meets the requirement, cleaning the residual materials generated by processing to obtain the welded spray disc.
One end of the freezing seat 1 is provided with a freezing groove 101 for accommodating the porous plate 4.
The upper cover 3 is of a cylindrical structure, the porous plate 4 is circular, and a circular groove 402 is formed in one end of the porous plate 4 facing the upper cover 3.
The gas flow channel device 2 comprises a first flow channel portion 201 and a second flow channel portion 202 which are integrally formed, wherein the diameter of the first flow channel portion 201 is smaller than that of the second flow channel portion 202, and the second flow channel portion 202 is fixedly connected with the upper cover 3.
A funnel-shaped transition flow path portion 203 is arranged between the first flow path portion 201 and the second flow path portion 202.
The freezing tank 101 is circular and has a diameter larger than the outer diameter of the porous plate 4.
The diameter of the air holes 401 is 1.02 + -0.025 mm.
The number of the air holes 401 is 3292.
The porous part surface processing method is adopted for processing, holes on the porous part are not blocked, and the processing surface is smooth.
The air holes 401 on the spray disk manufactured by the welding type spray disk manufacturing method of the embodiment are not blocked, and the processing surface is smooth.
The above examples are provided for the purpose of clearly illustrating the invention and are not to be construed as limiting the invention, and other variants and modifications of the various forms may be made by those skilled in the art based on the description, which are not intended to be exhaustive of all embodiments, and obvious variants or modifications of the invention may be found within the scope of the invention.
Claims (10)
1. The surface processing method of the porous part is characterized by comprising the following steps of: and placing the porous part into a freezing seat (1), adding a freezing liquid into the freezing seat (1), immersing the holes of the porous part by the freezing liquid, cooling the freezing seat (1) to enable the freezing liquid to freeze so as to form a solid state, forming a support for the holes by the solid state freezing liquid and protecting the edges of the holes, taking out the porous part, and then processing the surfaces of the porous part.
2. A method of manufacturing a welded shower tray, comprising the steps of:
step 1, processing a gas inlet and outlet runner device (2), an upper cover (3) and a porous plate (4) according to a drawing;
step 2, welding the gas flow channel device (2) onto the upper cover (3), and welding the upper cover (3) onto the porous part;
step 3, processing the porous plate (4) obtained in the step 2 by using the porous part surface processing method in the claim 1, wherein a plurality of air holes (401) are formed in the porous plate (4), specifically, the porous plate (4) is put into a refrigerating device, refrigerating fluid is added into the refrigerating seat (1), the air holes (401) are immersed by the refrigerating fluid, the refrigerating seat (1) is cooled to freeze the refrigerating fluid, the porous part is taken out, and then the surface of the porous part is processed;
and 4, after the surface of the porous part is processed until the flatness meets the requirement, cleaning the residual materials generated by processing to obtain the welded spray disc.
3. The method of manufacturing a welded shower tray of claim 2, wherein the chilled liquid is industrial grade purified water.
4. The method of manufacturing a welded shower tray according to claim 2, characterized in that one end of the freezing base (1) is provided with a freezing tank (101) for receiving the perforated plate (4).
5. The method for manufacturing the welded shower tray according to claim 4, wherein the upper cover (3) has a cylindrical structure, the porous plate (4) has a circular shape, and a circular groove (402) is provided at one end of the porous plate (4) toward the upper cover (3).
6. The method of manufacturing a welded shower tray according to claim 2, characterized in that the gas flow channel device (2) comprises an integrally formed first flow channel portion (201), a second flow channel portion (202), the first flow channel portion (201) having a smaller diameter than the second flow channel portion (202), the second flow channel portion (202) being fixedly connected to the upper cover (3).
7. The method of manufacturing a welded shower tray according to claim 6, characterized in that a funnel-shaped transition flow path portion (203) is provided between the first flow path portion (201) and the second flow path portion (202).
8. The method of manufacturing a welded shower tray according to claim 4, characterized in that the freezing tank (101) is circular and has a diameter larger than the outer diameter of the perforated plate (4).
9. The method of manufacturing a welded shower tray according to claim 2, characterized in that the air holes (401) have a diameter of 1-1.5mm.
10. The method of manufacturing a welded shower tray according to claim 9, wherein the number of air holes (401) is 3200 to 3600.
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| JP2001038557A (en) * | 1999-07-26 | 2001-02-13 | Yoshiyuki Tarumi | Freezing type work processing method and work fixing device |
| CN105328575A (en) * | 2015-10-30 | 2016-02-17 | 广东长盈精密技术有限公司 | Freezing deburring technology and freezing deburring system |
| CN106334961A (en) * | 2016-11-09 | 2017-01-18 | 翎创机电（上海）有限公司 | Shape Adjusting Tool |
| CN106392303A (en) * | 2016-11-08 | 2017-02-15 | 西安交通大学 | Machining method for cooling metal surface laser microtextures |
| CN112192154A (en) * | 2020-09-30 | 2021-01-08 | 靖江先锋半导体科技有限公司 | Processing technology of gas spraying disc for etching machine |
| CN213259069U (en) * | 2020-08-27 | 2021-05-25 | 北京华阳至尚科技有限公司 | Clamping device and machining system with same |
-
2022
- 2022-10-15 CN CN202211266222.9A patent/CN115635205B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001038557A (en) * | 1999-07-26 | 2001-02-13 | Yoshiyuki Tarumi | Freezing type work processing method and work fixing device |
| CN105328575A (en) * | 2015-10-30 | 2016-02-17 | 广东长盈精密技术有限公司 | Freezing deburring technology and freezing deburring system |
| CN106392303A (en) * | 2016-11-08 | 2017-02-15 | 西安交通大学 | Machining method for cooling metal surface laser microtextures |
| CN106334961A (en) * | 2016-11-09 | 2017-01-18 | 翎创机电（上海）有限公司 | Shape Adjusting Tool |
| CN213259069U (en) * | 2020-08-27 | 2021-05-25 | 北京华阳至尚科技有限公司 | Clamping device and machining system with same |
| CN112192154A (en) * | 2020-09-30 | 2021-01-08 | 靖江先锋半导体科技有限公司 | Processing technology of gas spraying disc for etching machine |
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| CN115635205A (en) | 2023-01-24 |
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