CN115615357B - Vibration elimination compensation system of measuring platform - Google Patents
Vibration elimination compensation system of measuring platform Download PDFInfo
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- CN115615357B CN115615357B CN202211637314.3A CN202211637314A CN115615357B CN 115615357 B CN115615357 B CN 115615357B CN 202211637314 A CN202211637314 A CN 202211637314A CN 115615357 B CN115615357 B CN 115615357B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
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Abstract
The invention discloses a vibration elimination compensation system of a measuring platform, which comprises an operation position acquisition module, a vibration waveform analysis module, a vibration offset analysis module, a relative offset statistics module and a vibration offset compensation module. According to the invention, the vibration offset compensation model is adopted to compensate the height of each position point scanned on the sample surface detected by the vibration acquisition point, so that the height of each sampling point on the sample surface detected by the vibration acquisition point after compensation relative to the measurement platform is obtained, the vibration of the measurement platform can be compensated and eliminated, the appearance and the dimension of the sample surface can be accurately obtained, and the vibration offset under different position coordinates on the measurement platform at the same moment and the vibration offset under the same position on the measurement platform at different moments caused by the vibration of the transmission screw driven by the transmission motor are eliminated, so that the vibration of each measurement point on the measurement platform is accurately compensated and eliminated.
Description
Technical Field
The invention belongs to the technical field of measurement platform adjustment, and relates to a measurement platform vibration elimination compensation system.
Background
Along with the precision requirement of products in manufacturing industry, the traditional two-dimensional measurement technology cannot meet the market demand, but the three-dimensional surface measurement technology plays an important role in shape measurement, and the three-dimensional model and the surface size of the part to be measured can be obtained through the three-dimensional surface measurement technology, so that the method is particularly applied to detection of precision products.
At present, a laser confocal sensor is adopted for surface measurement, when a sample is subjected to shape measurement, the connection problem exists at the joint of a motor and a transmission screw and the connection relation between the transmission screw and a base, when the motor drives the screw to rotate, the transmission screw vibrates, and then each measuring point on a measuring platform connected with the transmission screw is subjected to waveform vibration, so that the shape of the sample surface detected by the sample placed on the measuring platform is in error with the shape of the sample real surface due to the vibration of the measuring platform, the shape measurement accuracy of the sample is reduced, and the vibration generated by the connection problem of the transmission screw and the motor of the measuring platform is eliminated in order to improve the shape measurement accuracy of the sample.
Disclosure of Invention
The invention discloses a vibration elimination compensation system of a measuring platform, which solves the problems existing in the prior art.
The measuring platform vibration elimination compensation system comprises an operation position acquisition module, wherein the operation position acquisition module adopts a grating reading head to read a grating ruler arranged on the side surface of the measuring platform to acquire the position of the measuring platform moving along the axial direction of a transmission screw, and the measuring platform vibration elimination compensation system further comprises a vibration acquisition module, a vibration waveform analysis module, a vibration offset analysis module, a relative offset statistics module and a vibration offset compensation module;
the vibration acquisition module is used for acquiring vibration parameters of the center of the measuring platform and boundary measuring points on a plurality of equidistant measuring platforms from the center of the measuring platform in the process that the measuring platform moves along the axis direction of the transmission screw in real time;
the vibration waveform analysis module is used for respectively measuring the vertical distance from a vibration acquisition point to the center of the measuring platform and the boundary measuring points from the measuring point to a plurality of equidistant measuring platforms from the center of the measuring platform
Establishing and analyzing a real-time vibration waveform diagram of the center measuring point and a real-time vibration waveform diagram of each boundary measuring point to obtain a vibration harmonic formula of the center measuring point and a vibration harmonic formula of the boundary measuring point;
the vibration offset analysis module is used for analyzing the relative vibration offset among the center of the measuring platform at the same time point and all boundary measuring points on the measuring platform and analyzing the absolute vibration offset among the same measuring points at different time points;
the relative offset statistics module is used for extracting the distance from the detection vibration measurement point of the sample to the surface of the sample in the moving state of the measurement platform along with the sample and the position coordinates of the sample on the measurement platform corresponding to each distance, and counting the center offset distance between the measurement center position of the measurement platform in each distance relative to the measurement center position of the measurement platform in the initial detection state in the sample detection process
And the relative offset distance between the position coordinates of the real-time sample acquisition point at each distance and the measurement center point of the measurement platform +.>
；
The vibration offset compensation module is used for extracting the center offset distance between the measurement center position of the measurement platform at each distance in the sample detection process counted by the relative offset counting module and the measurement center position of the measurement platform at the initial detection state
And the relative offset distance between the position coordinates of the real-time sample acquisition point at each distance and the measurement center point of the measurement platform +.>
And extracting the relative vibration offset between each boundary measuring point and the center of the measuring platform and the absolute vibration offset between the same measuring points on the measuring platform analyzed by the vibration offset analysis module, and performing vibration offset compensation on the height of each position point scanned on the sample surface detected by the vibration acquisition point by adopting a vibration offset compensation model so as to obtain the height of each sampling point on the sample surface detected by the vibration acquisition point after compensation relative to the measuring platform.
Further, the calculation formula of the relative vibration offset is:
after transformation, the relative vibration offset calculation formula is +.>
，
For the vibration offset between the kth boundary measuring point and the center of the measuring platform in the vertical direction of the measuring platform at the same time and the ith equidistant from the center of the measuring platform, < + >>
For the distance between the detected vibration sampling point and the ith boundary measuring point which is equidistant from the center of the measuring platform in the direction vertical to the measuring platform, +.>
In order to detect the distance from the vibration sampling point to the center of the measuring platform in the direction vertical to the measuring platform, w is the vibration frequency, t is the time,/is the vibration frequency>
Expressed as the vibration amplitude of the measuring platform center in the direction perpendicular to the measuring platform, < >>
Expressed as initial phase of vibration of the center of the measuring platform in the direction perpendicular to the measuring platform, +.>
Vibration amplitude in the direction perpendicular to the measuring platform, expressed as the kth boundary measuring point at the ith equidistant from the measuring platform center,/o>
The initial phase of vibration in the direction perpendicular to the measuring platform is expressed as the i-th equidistant boundary measuring point from the center of the measuring platform.
Further, the calculation formula of the absolute vibration offset is:
，
or->
I=1, 2,..n, k=1, 2,3,4, and after conversion, the absolute vibration offset calculation formula is
，
Expressed as that the same measuring point on the measuring platform is +.>
Time and->
Vibration offset in the vertical direction of the measuring platform at the lower edge of the moment +.>
Is at->
Detecting the distance from the vibration sampling point to the b position of the measuring platform at the moment, < >>
To at the same time
The distance from the vibration sampling point to the position b of the measuring platform is detected at the moment.
Further, center offset distance in sample detection process
And a relative offset distance->
The calculation modes of (a) are respectively as follows:
Further, the vibration offset compensation model is:
，
expressed as sample in->
The height from the surface of the measuring platform of the sample surface after the compensation of the kth boundary measuring point on the ith equidistant at the moment, H is expressed as the height from the vibration sampling point to the surface of the measuring platform in the static state of the measuring platform, and the height is expressed as->
Expressed as +.>
Measuring distance from time vibration acquisition point to the surface of the ith equidistant upper kth boundary measurement point on the sample,/-, is->
Expressed as sample in->
Relative offset distance corresponding to the position of the kth boundary measuring point on the ith equidistant on the measuring platform at the moment,/->
Is indicated at->
The ith boundary measuring point on the ith equidistant of the center of the moment measuring platform is +.>
Vibration offset in the vertical direction of the measuring platform, +.>
Expressed as distance of vibration acquisition point to sample surface right above kth boundary measurement point on ith equidistant on measurement platform, +.>
Expressed as the distance of the vibration acquisition point to the sample surface directly above the center of the measuring platform, +.>
Expressed as +.>
Center offset distance corresponding to the position of the sample of the kth boundary measuring point on the ith equidistant on the measuring platform at the moment +.>
The kth boundary measuring point on the ith equidistant on the measuring platform is shown as +.>
Time and->
Absolute vibration offset between times, +.>
And->
Respectively expressed as->
Time and->
The position of the center of the platform in the axial direction of the transmission screw rod is measured at the moment.
Further, the vibration elimination compensation system of the measuring platform further comprises a compensation repeated calibration module, wherein the compensation repeated calibration module is used for carrying out offset compensation calibration analysis on the measuring platform after the continuous accumulation working time length E, analyzing relative calibration difference rates of relative vibration offset between each boundary measuring point on the measuring platform before and after the continuous accumulation working time length E and absolute calibration difference rates of absolute vibration offset between the same measuring point before and after the continuous accumulation working time length E, respectively judging whether the relative calibration difference rate and the absolute calibration difference rate are larger than a set maximum difference rate, and carrying out repeated calibration compensation on the relative vibration offset corresponding to the relative calibration difference rate larger than the set maximum difference rate or the absolute vibration offset corresponding to the absolute calibration difference rate larger than the set maximum difference rate.
Further, the relative vibration offset corresponding to the relative calibration difference rate larger than the set maximum difference rate is subjected to repeated calibration compensation, and the compensation amount is equal to
Performing repeated calibration compensation on the absolute vibration offset corresponding to the absolute calibration difference rate larger than the set maximum difference rate, wherein the compensation amount is equal to
，
And->
Respectively expressed as vibration offset between the kth boundary measuring point and the center of the measuring platform in the vertical direction of the measuring platform on the ith equidistant of the centers of the measuring platform before and after the continuous accumulated working time length E, +/->
And->
The same measuring point on the measuring platform is respectively expressed as +.>
Time and->
The lower edge of the moment measures the vibration offset in the vertical direction of the platform.
The beneficial effects are that:
according to the vibration elimination compensation system for the measuring platform, provided by the invention, the distance between the center of the measuring platform and a plurality of equidistant boundary measurement points from the center of the measuring platform is detected through the vibration sampling points which have the same moving speed along the axial direction of the transmission screw, the real-time vibration waveform diagram of the center measuring point and the real-time vibration waveform diagram of the boundary measuring points are built according to the detected distances, the relative vibration offset between the boundary measuring points on the measuring platform and the center of the measuring platform and the absolute vibration offset between the same measuring points at different time points on the measuring platform are analyzed, the vibration offset condition between the center of the measuring platform and the boundary measurement and the vibration offset condition between the same measuring points in the process that the measuring platform moves along the axis of the transmission screw can be built, and the relevance between different transmission screw positions and different measuring points on the measuring platform and the center of the measuring platform can be accurately built.
According to the invention, the vibration offset compensation model is adopted to compensate the height of each position point scanned on the sample surface detected by the vibration acquisition point, so that the height of each sampling point on the sample surface detected by the vibration acquisition point after compensation relative to the measurement platform is obtained, the vibration compensation of the measurement platform is realized, the appearance size of the sample surface can be accurately obtained, the sample appearance data can be truly restored, the vibration offset difference under the coordinates of different positions on the measurement platform at the same moment and the vibration offset difference under the same moment caused by the vibration of the transmission screw driven by the motor are eliminated, the double vibration compensation of the movement distance of the measurement platform relative to the transmission screw and the other positions on the measurement platform relative to the center of the measurement platform can be effectively realized, the accuracy of the sample placement on the measurement platform for measuring the appearance of the sample is improved, and the vibration of the measurement platform caused by the connection position of the transmission screw and the transmission motor can be accurately eliminated.
According to the invention, offset compensation calibration analysis is carried out after the continuous accumulation of the working time length E of the measuring platform, and repeated calibration compensation is carried out on the relative vibration offset corresponding to the relative calibration difference rate larger than the set maximum difference rate or the absolute vibration offset corresponding to the absolute calibration difference rate larger than the set maximum difference rate, so that the repeated calibration of the measuring platform after vibration elimination is realized, the condition that the vibration offset gradually increases along with the increase of the accumulation time length is compensated, the measurement errors of the relative vibration offset and the absolute vibration offset after the continuous accumulation of the working time length E are ensured to be in an allowable range, the vibration of the measuring platform is accurately eliminated, and the measurement accuracy of the surface topography of a sample placed on the measuring platform is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of equidistant partitioning of a measurement platform;
FIG. 2 is a schematic diagram of a distance display on a measurement platform;
fig. 3 is a schematic diagram of a moving track of a vibration sampling point on a measurement platform.
Description of the embodiments
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present disclosure more apparent, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present disclosure. It will be apparent that the described embodiments are some, but not all, of the embodiments of the present disclosure. All other embodiments, which can be made by one of ordinary skill in the art without the need for inventive faculty, are within the scope of the present disclosure, based on the described embodiments of the present disclosure.
The measuring platform and the nut fixed connection of transmission lead screw matched with, along with the position change of nut on the transmission lead screw, drive measuring platform and remove along the axis direction of transmission lead screw in step, the drive motor drives the transmission lead screw and rotates, drive lead screw drives the nut with it and remove along the axis direction of transmission lead screw, because the transmission lead screw both ends pass through the bearing spacing to be fixed on the base, when drive motor drives the transmission lead screw and rotates, can lead to the transmission lead screw to take place the wave form vibration because of reasons such as being connected of drive motor and transmission lead screw and the fixed position of transmission lead screw, and then appear measuring platform and carry out synchronous vibration along the direction of perpendicular measuring platform along with the transmission lead screw, thereby because measuring platform takes place the vibration, the in-process sampling point that leads to measuring platform along with transmission lead screw removal to measuring platform surface distance is the change, and then influence measuring platform and place the measuring accuracy of sample.
In the case of the state, the transmission screw rod does not generate vibration deflection, and in the process of moving the nut along the axis direction of the transmission screw rod, the measuring platform connected with the nut is always in the same horizontal plane, namely, the surface of the measuring platform does not generate vibration fluctuation.
A vibration elimination compensation system of a measuring platform comprises an operation position acquisition module, a vibration waveform analysis module, a vibration offset analysis module, a relative offset statistics module, a vibration offset compensation module and a compensation repeated calibration module.
The running position acquisition module adopts a grating reading head to read a grating ruler arranged on the side surface of the measuring platform so as to acquire the position of the measuring platform moving along the axial direction of the transmission screw.
The side of the measuring platform is provided with a grating ruler along the axis direction of the transmission screw, and a grating reading head matched with the grating ruler for use is arranged on a base below the measuring platform and used for reading the position of the grating ruler.
The vibration acquisition module is arranged right above the measurement platform and keeps synchronous moving speed with the measurement platform, namely the movement speed of the measurement platform and the movement speed of the vibration acquisition module along the axis direction of the transmission screw rod are synchronous, so that the vibration acquisition module can be ensured to perform vibration detection on a fixed measurement point on the measurement platform at any time, and the vibration acquisition module is used for real-time acquisitionCollecting vibration parameters of the center of the measuring platform and boundary measuring points on a plurality of equidistant measuring platforms from the center of the measuring platform in the process that the measuring platform moves along the axis direction of the transmission screw, and obtaining vibration sampling points to the center of the measuring platform respectively
Measuring points of the border on the measuring platform which are equidistant from the center of the measuring platform>
(i=1, 2,) n, k=1, 2,3, 4), as shown in fig. 1.
The vibration waveform analysis module is used for extracting vibration sampling points to the center of the measuring platform
Boundary measuring points on the measuring platform at a distance d from the center of the measuring platform>
For the vertical distance from the acquisition point to the center of the measuring platform, and for the boundary measuring points on the measuring platform with a plurality of equal intervals from the measuring platform center>
Establishing a real-time vibration waveform of the center measuring point and a real-time vibration waveform of each boundary measuring point, and analyzing the real-time vibration waveform of the center measuring point and the real-time vibration waveform of the boundary measuring point to obtain a vibration harmonic formula of the center measuring point>
Vibration harmonic formula of boundary measuring point
，
Expressed as the vibration amplitude of the measuring platform center in the direction perpendicular to the measuring platform, < >>
Expressed as initial phase of vibration of the center of the measuring platform in the direction perpendicular to the measuring platform, +.>
Vibration amplitude in the direction perpendicular to the measuring platform, expressed as the kth boundary measuring point at the ith equidistant from the measuring platform center,/o>
The initial phase of vibration in the direction perpendicular to the measuring platform is expressed as the i-th equidistant boundary measuring point from the center of the measuring platform.
The vibration offset analysis module is used for analyzing the relative vibration offset among the center of the measuring platform at the same time point and all boundary measuring points on the measuring platform and the absolute vibration offset among the same measuring points at different time points, and sending the relative vibration offset among all boundary measuring points on the measuring platform and the center of the measuring platform and the absolute vibration offset among the same measuring points to the vibration offset compensation module.
The calculation formula of the relative vibration offset is as follows:
after transformation, the relative vibration offset calculation formula is +.>
，
For the vibration offset between the kth boundary measuring point and the center of the measuring platform in the vertical direction of the measuring platform at the same time and the ith equidistant from the center of the measuring platform, < + >>
For the distance between the detected vibration sampling point and the ith boundary measuring point which is equidistant from the center of the measuring platform in the direction vertical to the measuring platform, +.>
And the distance from the vibration sampling point to the center of the measuring platform in the direction vertical to the measuring platform is measured.
The absolute vibration offset is calculated as:
，
or->
I=1, 2,..n, k=1, 2,3,4, and after conversion, the absolute vibration offset calculation formula is
，
Expressed as that the same measuring point on the measuring platform is +.>
Time and->
The vibration offset in the vertical direction of the platform is measured along the lower edge of the moment,
is at->
Detecting the distance from the vibration sampling point to the b position of the measuring platform at the moment, < >>
Is at->
The distance from the vibration sampling point to the position b of the measuring platform is detected at the moment.
The relative offset statistics module is used for extracting samples from the detection under the state that the samples move along with the measuring platformMeasuring the distance from the vibration measuring point to the sample surface and the position coordinates of the sample corresponding to each distance on the measuring platform, and counting the center offset distance between the measuring center position of the measuring platform at each distance relative to the measuring center position of the measuring platform in the initial detection state in the sample detection process
And the relative offset distance between the position coordinates of the real-time sample acquisition point at each distance and the measurement center point of the measurement platform +.>
。
The sample detection state is that the vibration acquisition point position is fixed and unchanged, and the measurement platform moves back and forth along the axial direction of the transmission screw relative to the vibration acquisition position.
The initial detection state is that the measurement platform is in an initial starting measurement state, and the distance between a sampling point on a sample initially acquired by the vibration sampling point and a measurement center on the measurement platform is known when the measurement platform is initially started for measurement.
As shown in fig. 2, the center offset distance
：
；
Relative offset distance
：
N is expressed as the number of turns r/s of the driving screw per unit time, < >>
In order to ensure that the movement distance of the nut on the transmission screw rod when the transmission screw rod rotates for one circle, T is the rotation time of the transmission screw rod, T is the single time of the measurement platform moving along the single direction of the transmission screw rod, namely the forward rotation time length or the reverse rotation time length of the transmission screw rod,as shown in FIG. 3, r is a positive integer, W is the largest positive integer less than the value of T/T, ">
And->
Respectively expressed as the midpoint position of the measuring platform->
Is,/-on the abscissa of (2)>
And->
Respectively expressed as measuring points on the measuring platform->
And the abscissa of (2).
The vibration offset compensation module is used for extracting the center offset distance between the measurement center position of the measurement platform at each distance in the sample detection process counted by the relative offset counting module and the measurement center position of the measurement platform at the initial detection state
And the relative offset distance between the position coordinates of the real-time sample acquisition point at each distance and the measurement center point of the measurement platform +.>
And extracting the relative vibration offset between each boundary measurement point and the center of the measurement platform and the absolute vibration offset between the same measurement points on the measurement platform analyzed by the vibration offset analysis module, and performing vibration offset compensation on the height of each position point scanned by the sample surface detected by the vibration acquisition point by adopting a vibration offset compensation model so as to obtain the height of each sampling point on the sample surface detected by the compensated vibration acquisition point relative to the measurement platform, so that the shape and the size of the sample surface can be accurately obtained, the shape data of the sample can be truly restored, and the defect caused by measurement is eliminatedVibration deviation conditions of the measuring platform at different transmission screw positions and vibration deviation conditions between measuring points at other positions on the measuring platform and the center of the measuring platform.
The vibration offset compensation model is as follows:
，
expressed as sample in->
The height from the surface of the measuring platform of the sample surface after the compensation of the kth boundary measuring point on the ith equidistant at the moment, H is expressed as the height from the vibration sampling point to the surface of the measuring platform in the static state of the measuring platform, and the height is expressed as->
Expressed as +.>
Measuring distance from time vibration acquisition point to the surface of the ith equidistant upper kth boundary measurement point on the sample,/-, is->
Expressed as sample in->
Relative offset distance corresponding to the position of the kth boundary measuring point on the ith equidistant on the measuring platform at the moment,/->
Is indicated at->
The ith boundary measuring point on the ith equidistant of the center of the moment measuring platform is +.>
Vibration offset in the vertical direction of the measuring platform, +.>
Expressed as distance of vibration acquisition point to sample surface right above kth boundary measurement point on ith equidistant on measurement platform, +.>
Expressed as the distance of the vibration acquisition point to the sample surface directly above the center of the measuring platform, +.>
Expressed as +.>
Center offset distance corresponding to the position of the sample of the kth boundary measuring point on the ith equidistant on the measuring platform at the moment +.>
The kth boundary measuring point on the ith equidistant on the measuring platform is shown as +.>
Time and->
Absolute vibration offset between times, +.>
And->
Respectively expressed as->
Time and->
The position of the center of the platform in the axial direction of the transmission screw rod is measured at the moment.
The vibration offset compensation module eliminates the vibration of the transmission screw rod driven by the motor in the measurement process of the measurement platform, so that the vibration offset of the measurement platform at different positions on the measurement platform at the same moment and the vibration offset of the measurement platform at the same position at different moments are different, and the double vibration compensation of the measurement platform relative to the transmission screw rod and other positions on the measurement platform relative to the center of the measurement platform can be effectively performed according to the moving distance of the measurement platform relative to the transmission screw rod, so that the accuracy of sample surface topography measurement carried out by the sample placed on the measurement platform is improved, and the waveform vibration of the surface of the measurement platform along with the vibration of the transmission screw rod is reduced.
The compensation repeated calibration module is used for carrying out offset compensation calibration analysis on the measurement platform after the continuous accumulation working time length E, analyzing the relative calibration difference rate of the relative vibration offset between each boundary measurement point and the center of the measurement platform on the measurement platform before and after the continuous accumulation working time length E and the absolute calibration difference rate of the absolute vibration offset between the same measurement point before and after the continuous accumulation working time length E, respectively judging whether the relative calibration difference rate and the absolute calibration difference rate are larger than the set maximum difference rate, and carrying out repeated calibration compensation on the relative vibration offset corresponding to the relative calibration difference rate which is larger than the set maximum difference rate or the absolute vibration offset corresponding to the absolute calibration difference rate which is larger than the set maximum difference rate so as to compensate the condition that the vibration offset is gradually increased along with the increase of the accumulation time length, thereby effectively eliminating the vibration compensation of each position on the measurement platform.
The relative calibration difference rate calculation formula is:
；
the absolute calibration difference rate calculation formula is:
e is expressed as a set duration accumulated operating time, < >>
And->
The ith boundary measuring point on the ith equidistant of the centers of the measuring platform before and after the continuous accumulated working time length E is respectively expressed asVibration offset between the center of the measuring platform and the center of the measuring platform in the vertical direction of the measuring platform, +.>
And->
The same measuring point on the measuring platform is respectively expressed as +.>
Time and->
The lower edge of the moment measures the vibration offset in the vertical direction of the platform.
Performing repeated calibration compensation on the relative vibration offset corresponding to the relative calibration difference rate larger than the set maximum difference rate, wherein the compensation amount is equal to
Performing repeated calibration compensation on the absolute vibration offset corresponding to the absolute calibration difference rate larger than the set maximum difference rate, wherein the compensation amount is equal to +.>
。
And the measurement platform after vibration elimination is subjected to repeated calibration through the compensation repeated calibration module, so that the measurement errors of the relative vibration offset and the absolute vibration offset after the continuous accumulation of the working time length E are ensured to be in an allowable range, the increase of the abrasion loss of connection of the transmission screw and the motor caused by continuous measurement is avoided, the vibration of the measurement platform is accurately eliminated, and the measurement accuracy of the surface topography of a sample placed on the measurement platform is improved.
The foregoing examples illustrate only a few embodiments of the invention and are described in detail herein without thereby limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (7)
1. The utility model provides a measuring platform vibration elimination compensation system, includes running position collection module, and running position collection module adopts grating reading head to read the grating chi of setting in measuring platform side, acquires measuring platform along the position that the transmission lead screw axial direction moved, its characterized in that:
the system also comprises a vibration acquisition module, a vibration waveform analysis module, a vibration offset analysis module, a relative offset statistics module and a vibration offset compensation module;
the vibration acquisition module is used for acquiring vibration parameters of the center of the measuring platform and boundary measuring points on a plurality of equidistant measuring platforms from the center of the measuring platform in the process that the measuring platform moves along the axis direction of the transmission screw in real time;
the vibration waveform analysis module is used for respectively measuring the vertical distance from a vibration acquisition point to the center of the measuring platform and the boundary measuring points from the measuring point to a plurality of equidistant measuring platforms from the center of the measuring platform
Establishing and analyzing a real-time vibration waveform diagram of the center measuring point and a real-time vibration waveform diagram of each boundary measuring point to obtain a vibration harmonic formula of the center measuring point and a vibration harmonic formula of the boundary measuring point;
the vibration offset analysis module is used for analyzing the relative vibration offset among the center of the measuring platform at the same time point and all boundary measuring points on the measuring platform and analyzing the absolute vibration offset among the same measuring points at different time points;
the relative offset statistics module is used for extracting the distance from the detection vibration measurement point to the sample surface of the sample in the state that the sample moves along with the measurement platform and the position coordinates of the sample on the measurement platform corresponding to each distance, and counting the measurement center position of the measurement platform in each distance relative to the measurement platform in the initial detection state in the sample detection processIs a center offset distance between the measured center positions
And the relative offset distance between the position coordinates of the real-time sample acquisition point at each distance and the measurement center point of the measurement platform +.>
；
The vibration offset compensation module is used for extracting the center offset distance between the measurement center position of the measurement platform at each distance in the sample detection process counted by the relative offset counting module and the measurement center position of the measurement platform at the initial detection state
And the relative offset distance between the position coordinates of the real-time sample acquisition point at each distance and the measurement center point of the measurement platform +.>
And extracting the relative vibration offset between each boundary measuring point and the center of the measuring platform and the absolute vibration offset between the same measuring points on the measuring platform analyzed by the vibration offset analysis module, and performing vibration offset compensation on the height of each position point scanned on the sample surface detected by the vibration acquisition point by adopting a vibration offset compensation model so as to obtain the height of each sampling point on the sample surface detected by the vibration acquisition point after compensation relative to the measuring platform.
2. The vibration canceling compensation system of claim 1 wherein the relative vibration offset is calculated as:
after transformation, the relative vibration offset calculation formula is as follows
，
For the vibration offset between the kth boundary measuring point and the center of the measuring platform in the vertical direction of the measuring platform at the same time and the ith equidistant from the center of the measuring platform, < + >>
For the distance between the detected vibration sampling point and the ith boundary measuring point which is equidistant from the center of the measuring platform in the direction vertical to the measuring platform, +.>
In order to detect the distance from the vibration sampling point to the center of the measuring platform in the direction vertical to the measuring platform, w is the vibration frequency, t is the time,/is the vibration frequency>
Expressed as the vibration amplitude of the measuring platform center in the direction perpendicular to the measuring platform, < >>
Expressed as initial phase of vibration of the center of the measuring platform in the direction perpendicular to the measuring platform, +.>
Vibration amplitude in the direction perpendicular to the measuring platform, expressed as the kth boundary measuring point at the ith equidistant from the measuring platform center,/o>
The initial phase of vibration in the direction perpendicular to the measuring platform is expressed as the i-th equidistant boundary measuring point from the center of the measuring platform.
3. The vibration canceling compensation system of claim 2 wherein the absolute vibration offset is calculated as:
，
or->
I=1, 2, & gt, n, k=1, 2,3,4, and the absolute vibration offset amount calculation formula after conversion is +.>
，
Expressed as that the same measuring point on the measuring platform is +.>
Time and->
Vibration offset in the vertical direction of the measuring platform at the lower edge of the moment +.>
Is at->
Detecting the distance from the vibration sampling point to the b position of the measuring platform at the moment, < >>
Is at->
The distance from the vibration sampling point to the position b of the measuring platform is detected at the moment.
4. The measurement platform vibration cancellation compensation system of claim 1 wherein center offset distance during sample detection
And a relative offset distance->
The calculation modes of (a) are respectively as follows:
5. The measurement platform vibration cancellation compensation system of claim 1 wherein the vibration offset compensation model is:
，
expressed as sample in->
The height from the surface of the measuring platform of the sample surface after the compensation of the kth boundary measuring point on the ith equidistant at the moment, H is expressed as the height from the vibration sampling point to the surface of the measuring platform in the static state of the measuring platform, and the height is expressed as->
Expressed as +.>
Measuring distance from time vibration acquisition point to the surface of the ith equidistant upper kth boundary measurement point on the sample,/-, is->
Expressed as sample in->
Relative offset distance corresponding to the position of the kth boundary measuring point on the ith equidistant on the measuring platform at the moment,/->
Is indicated at->
The ith boundary measuring point on the ith equidistant of the center of the moment measuring platform is +.>
Vibration offset in the vertical direction of the measuring platform, +.>
Expressed as distance of vibration acquisition point to sample surface right above kth boundary measurement point on ith equidistant on measurement platform, +.>
Expressed as the distance of the vibration acquisition point to the sample surface directly above the center of the measuring platform, +.>
Expressed as +.>
Center offset distance corresponding to the position of the sample of the kth boundary measuring point on the ith equidistant on the measuring platform at the moment +.>
The kth boundary measuring point on the ith equidistant on the measuring platform is shown as +.>
Time and->
Absolute vibration offset between times, +.>
And->
Respectively expressed as->
Time and->
Time of dayThe position of the center of the platform in the axial direction of the transmission screw rod is measured.
6. The vibration canceling and compensating system for measuring platform according to claim 1, further comprising a compensating and repeating calibrating module for performing offset compensating and calibrating analysis after the continuous accumulation working time period E of the measuring platform, analyzing a relative calibration difference rate of relative vibration offsets between each boundary measuring point on the measuring platform before and after the continuous accumulation working time period E and the center of the measuring platform and an absolute calibration difference rate of absolute vibration offsets between the same measuring point before and after the continuous accumulation working time period E, respectively judging whether the relative calibration difference rate and the absolute calibration difference rate are greater than a set maximum difference rate, and performing repeating calibrating and compensating on the relative vibration offsets corresponding to the relative calibration difference rate greater than the set maximum difference rate or the absolute vibration offsets corresponding to the absolute calibration difference rate greater than the set maximum difference rate.
7. The vibration canceling compensation system of claim 6 wherein the relative vibration offset corresponding to a relative calibrated difference greater than a set maximum difference is compensated for by repeated calibration, the compensation being equal to
Performing repeated calibration compensation on the absolute vibration offset corresponding to the absolute calibration difference rate larger than the set maximum difference rate, wherein the compensation amount is equal to +.>
，
And
respectively expressed as the kth edge on the ith equidistant of the centers of the front and rear measuring platforms for continuously accumulating the working time length EVibration offset between boundary measuring point and measuring platform center in measuring platform vertical direction, +.>
And->
The same measuring point on the measuring platform is respectively expressed as +.>
Time and->
The lower edge of the moment measures the vibration offset in the vertical direction of the platform. />
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