CN115615304A - Magnetic suspension motor, position detection sensor and sensor detection circuit - Google Patents

Magnetic suspension motor, position detection sensor and sensor detection circuit Download PDF

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Publication number
CN115615304A
CN115615304A CN202211638226.5A CN202211638226A CN115615304A CN 115615304 A CN115615304 A CN 115615304A CN 202211638226 A CN202211638226 A CN 202211638226A CN 115615304 A CN115615304 A CN 115615304A
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detection
circuit
node
coil
electrically connected
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CN115615304B (en
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尹成科
刘德刚
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Suzhou Suci Intelligent Technology Co ltd
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Suzhou Suci Intelligent Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K11/00Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21Devices for sensing speed or position, or actuated thereby
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K11/00Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21Devices for sensing speed or position, or actuated thereby
    • H02K11/225Detecting coils
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08Structural association with bearings
    • H02K7/09Structural association with bearings with magnetic bearings
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

The invention discloses a magnetic suspension motor, a position detection sensor and a sensor detection circuit. The sensor detection circuit is for being applied to magnetic suspension motor's electric vortex, inductance sensor detection circuit, and it includes: at least one bridge circuit, including a detection bridge arm and a sampling bridge arm; the detection bridge arm comprises a differential detection sensor; the sampling bridge arm comprises a resistor; the input end of the bridge circuit is electrically or magnetically connected with an excitation signal source; the at least one first capacitor is in one-to-one correspondence with the at least one bridge circuit, is connected in parallel with the output end of the bridge circuit, and forms a resonant circuit with the differential detection sensor; and the signal processing circuit is used for processing the resonance signal of the resonance circuit. The technical scheme of the invention can simplify the structure of the circuit and reduce the matching difficulty of devices in the circuit.

Description

Magnetic suspension motor, position detection sensor and sensor detection circuit
Technical Field
The invention relates to the technical field of position detection of a magnetic suspension motor, in particular to a magnetic suspension motor, a position detection sensor and a sensor detection circuit.
Background
The magnetic suspension motor utilizes the principle that like poles repel and opposite poles attract between the exciting magnetic fields of a stator and a rotor in a bearing system to suspend the rotor, and meanwhile, the driving force is generated to drive the rotor to move in a suspension state, so that the magnetic suspension motor has the characteristics of small mechanical wear and convenience in maintenance, overhaul and replacement, and is suitable for the fields of severe environments, extremely cleanness, no pollution and special needs.
During the operation of the magnetic levitation motor, the position of the magnetic levitation motor needs to be detected. The sensors currently used for position detection are generally inductive, eddy current sensors. In the prior art, the detection circuit of the inductance and eddy current sensor includes a bridge circuit, as shown in fig. 1, the bridge circuit includes differential detection sensors L1 'and L2', the sensor L1 'is connected in parallel with the resonant capacitor C1', the sensor L2 'is connected in parallel with the resonant capacitor C2', and at this time, the resonant capacitors C1 'and C2' respectively connected in parallel with the sensors L1 'and L2' should be kept the same.
However, due to the process and other reasons, even the capacitors in the same batch have differences, so that different resonant capacitors in the bridge circuit need to be respectively debugged to meet the requirement of high-precision detection, which increases the matching difficulty of devices and the complexity of the circuit, increases the costs of manpower and material resources, and thus increases the cost of the sensor detection circuit.
Disclosure of Invention
The invention provides a magnetic suspension motor, a position detection sensor and a sensor detection circuit, which are used for simplifying the structure of the circuit and reducing the matching difficulty of devices in the circuit.
According to an aspect of the present invention, there is provided an eddy current and inductance sensor detection circuit applied to a magnetic levitation motor, including:
at least one bridge circuit comprising a detection bridge arm and a sampling bridge arm; the detection bridge arm comprises a differential detection sensor; the sampling bridge arm comprises a resistor; the input end of the bridge circuit is electrically or magnetically connected with an excitation signal source;
the first capacitors are in one-to-one correspondence with at least one bridge circuit, are connected in parallel with the output end of the bridge circuit, and form a resonant circuit with the differential detection sensor;
and the signal processing circuit is used for processing the resonance signal of the resonance circuit.
According to another aspect of the present invention, there is provided a position detecting sensor applied to a magnetic levitation motor, including: the detection circuit is applied to the eddy current and inductance sensor of the magnetic suspension motor.
According to another aspect of the present invention, there is provided a magnetic levitation motor incorporating the position detection sensor as described above for use in a magnetic levitation motor.
According to the technical scheme, the first capacitor connected in parallel with the output end of the bridge circuit and the differential detection sensor of the detection bridge arm form the resonant circuit, and a corresponding resonant capacitor does not need to be arranged for each sensor in the differential detection sensor independently, so that the circuit structure can be simplified; meanwhile, the differential detection sensor of the detection bridge arm and the same first capacitor form a resonant circuit, and the problem of consistency of capacitors connected with different sensors in the differential detection sensor in parallel is not required to be considered, so that the matching difficulty of devices in the circuit can be reduced on the premise of enhancing the signal-to-noise ratio and the anti-interference capacity and ensuring the accuracy of detection signals, manpower and material resources are saved, and the low cost of the sensor detection circuit is facilitated.
It should be understood that the statements in this section do not necessarily identify key or critical features of the embodiments of the present invention, nor do they necessarily limit the scope of the invention. Other features of the present invention will become apparent from the following description.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a sensor detection circuit in the prior art;
FIG. 2 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of another sensor detection circuit according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 5 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 6 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 7 is a schematic diagram of a detection circuit of another sensor provided in an embodiment of the present invention;
FIG. 8 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 9 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 10 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 11 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 12 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 13 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 14 is a schematic diagram of a detection circuit of another sensor provided in an embodiment of the present invention;
FIG. 15 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 16 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 17 is a schematic diagram of a detection circuit of another sensor provided in an embodiment of the present invention;
FIG. 18 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 19 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 20 is a schematic diagram of a sensor detection circuit according to another embodiment of the present invention;
FIG. 21 is a schematic diagram of a detection circuit of another sensor provided in an embodiment of the present invention;
fig. 22 is a schematic structural diagram of another sensor detection circuit according to an embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises" and "comprising," as well as any variations thereof, are intended to cover a non-exclusive inclusion, such that a system, article, or apparatus that comprises a list of elements is not necessarily limited to those elements explicitly listed, but may include other elements not expressly listed or inherent to such product or apparatus.
The embodiment of the invention provides an eddy current and inductance sensor detection circuit for a magnetic suspension motor, which can detect the position of a rotor in a bearing system of the magnetic suspension motor, has a simple structure and can reduce the matching difficulty of devices.
Fig. 2 is a schematic structural diagram of a sensor detection circuit according to an embodiment of the present invention, and as shown in fig. 2, the sensor detection circuit includes at least one bridge circuit 10, at least one first capacitor C1 corresponding to the at least one bridge circuit 10 one to one, and a signal processing circuit 20, where the bridge circuit 10 includes a detection bridge arm 11 and a sampling bridge arm 12; the detection arm 11 is composed of a differential detection sensor 110; the sampling bridge arm 12 is composed of resistors R1 and R2, and the resistors R1 and R2 can adjust the output balance of the bridge circuit; the input end of the bridge circuit 10 is connected with an excitation signal source AC electrically or magnetically; the first capacitor C1 is connected in parallel to the output end of the bridge circuit 10 to form a resonant circuit with the differential detection sensor 110, and the resonant frequency of the resonant circuit is related to the capacitance value of the first capacitor C1 matched with the differential detection sensor 110; the signal processing circuit 20 processes the resonance signal of a specific frequency generated by the resonance circuit and is capable of outputting a corresponding detection signal.
Illustratively, when the excitation signal source AC provides a high-frequency alternating electrical signal, the differential detection sensors 111 and 112 operate in a resonant state with the first capacitor C1 connected in parallel to the output of the bridge circuit 10. Taking the differential detection sensor 110 including the first detection sensor 111 and the second detection sensor 112, and the first detection sensor 111 including the first detection coil L1, and the second detection sensor 112 including the second detection coil L2 as an example, when the detected conductor is in the range of the alternating magnetic field, an eddy current is induced, and the eddy current induced by the detected conductor interacts with the alternating magnetic field around the first detection coil L1 and the second detection coil L2, so that the impedances of the first detection coil L1 and the second detection coil L2 can be changed, and when the distances between the first detection coil L1 and the detected conductor change, the magnetic field coupling strengths between the first detection coil L1 and the detected conductor and between the second detection coil L2 and the detected conductor change, that is, the impedances of the first detection coil L1 and the second detection coil L2 change accordingly. At this time, the rotor in the bearing system of the magnetic levitation motor is used as a detected conductor, and the first detection coil L1 and the second detection coil L2 are symmetrically disposed in the bearing system of the magnetic levitation motor so as to move in a direction away from the second detection coil L2 when the rotor moves in a direction approaching the first detection coil L1, and move in a direction away from the first detection coil L1 when the rotor moves in a direction approaching the second detection coil L2. At this time, when the rotor moves in a direction approaching the first detection coil L1, the magnetic field coupling strength between the first detection coil L1 and the rotor increases, the impedance of the first detection coil L1 increases, the magnetic field coupling strength between the second detection coil L2 and the rotor decreases, and the impedance of the second detection coil L2 decreases; the first detection coil L1 and the second detection coil L2 have different impedance variation tendencies, so that the output end of the bridge circuit 10 outputs a differential signal, the differential signal is input into the signal processing circuit 20 as a resonance signal, the signal processing circuit 20 outputs a corresponding detection signal after processing the differential signal, and based on the detection signal output by the signal processing circuit 20, the positions of the rotor in the magnetic levitation motor relative to the first detection coil L1 and the second detection coil L2 can be known, thereby realizing the detection of the rotor position in the bearing system.
In this way, by adopting the first capacitor C1 connected in parallel to the output of the bridge circuit 10 and forming a resonant circuit with the differential detection sensor 110 of the detection bridge arm 11, it is not necessary to separately provide a corresponding resonant capacitor for each sensor in the differential detection sensor 110, so that the circuit structure can be simplified; meanwhile, the differential detection sensor 110 of the detection bridge arm 11 and the same first capacitor C1 form a resonant circuit, and the problem of consistency of capacitors connected in parallel with different sensors in the differential detection sensor 110 does not need to be considered, so that the matching difficulty of devices in the sensor detection circuit can be reduced on the premise of enhancing the signal-to-noise ratio and the anti-interference capacity and ensuring the accuracy of detection signals, manpower and material resources are saved, and the low cost of the sensor detection circuit is facilitated.
It can be understood that the first detection coil L1 and the second detection coil L2 may also be asymmetrically disposed in the bearing system of the magnetic levitation motor, and at this time, as long as the relative position of the first detection coil L1 and the second detection coil L2 is fixed, the corresponding detection signal may be determined by the resonance signal output by the bridge circuit, so as to determine the rotor position of the magnetic levitation motor. The positions of the first detection coil L1 and the second detection coil L2 may be set as needed, which is not specifically limited in the embodiment of the present invention.
It will also be understood that when the resistance of the resistor R1 is R 1 The resistance value of the resistor R2 is R 2 The impedance of the first detection coil L1 is Z L1 The impedance of the second detection coil L2 is Z L2 When R is present 1 /R 2 =Z L1 /Z L2 Then the bridge circuit 10 is in a balanced state, and at this time, the potential difference of the differential signal output by the output terminal of the bridge circuit 10 is 0V. Therefore, the differential signal output from the output terminal of the bridge circuit 10 is not only related to the impedance of the first detection coil L1 and the second detection coil L2 in the differential detection sensor 110, but also related to the resistance values of the resistors R1 and R2 in the sampling bridge arm 12. The resistance values of the resistors R1 and R2 in the sampling bridge arm 12 may be fixed resistors with fixed resistance values, variable resistors, potentiometers and digital potentiometers having the same efficacy as the resistors, and the like; when the resistances of the resistors R1 and R2 in the sampling bridge arm 12 are adjustable, the output balance of the bridge circuit 10 is adjusted by adjusting the resistances of the resistors R1 and R2, so as to meet different detection requirements. When the output balance of the bridge circuit 10 is adjusted by using the digital potentiometer, the parasitic capacitance of the digital potentiometer affects the matching of the resonant circuit, so that resistors respectively connected in series and in parallel with the digital potentiometer can be further arranged in the circuit, and the values of the two resistors respectively connected in series and in parallel with the digital potentiometer are determined on the premise of reducing the influence of the parasitic capacitance and ensuring the sufficient adjustment range and the resolution ratio of the adjustment of the digital potentiometer. On the premise of realizing position detection, the structure of the sampling bridge arm 12 is not specifically limited in the embodiment of the present invention.
For convenience of description, the following description will exemplarily describe the technical solutions of the embodiments of the present invention by taking the resistors R1 and R2 of the sampling bridge arm 12 as fixed resistors in the embodiments of the present invention as an example.
Alternatively, with continued reference to fig. 2, the signal processing circuit 20 may include at least one operational amplifier U in one-to-one correspondence with the at least one bridge circuit 10; the non-inverting input end and the inverting input end of the operational amplifier U are respectively and electrically connected with two output ends of the bridge circuit 10; the output end of the operational amplifier U is used for outputting a detection signal. Thus, the operational amplifier U can amplify the differential signal between the two output terminals of the bridge circuit 10 and output the corresponding detection signal, which is beneficial to further improving the detection sensitivity. The operational amplifier U may further include a first power signal terminal and a second power signal terminal to receive the first power signal V1 and the second power signal V2, respectively, so that the operational amplifier U can operate normally.
It should be noted that fig. 2 is a schematic diagram of an embodiment of the present invention, and fig. 2 only exemplarily shows a relative position relationship between the bridge circuit 10 and the excitation signal source AC, the first capacitor C1, and the signal processing circuit 20, and on the premise that circuit simplification, difficulty in matching capacitors, and improvement of signal-to-noise ratio and interference rejection capability can be achieved, the embodiment of the present invention does not specifically limit the relative position relationship between the bridge circuit 10 and the excitation signal source AC, the first capacitor C1, and the signal processing circuit 20.
Alternatively, with continued reference to fig. 2, when differential detection sensor 110 comprises first detection sensor 111 and second detection sensor 112, the resistance of sampling leg 12 may comprise first resistance R1 and second resistance R2; the first end of the first resistor R1 and the first end of the second resistor R2 are electrically connected to the first node N1; a second end of the first resistor R1 and a first end of the first detection sensor 111 are electrically connected to the third node N3; a second end of the second resistor R2 and a first end of the second detecting sensor 112 are electrically connected to the fourth node N4; a second terminal of the first detection sensor 111 and a second terminal of the second detection sensor 112 are electrically connected to a second node N2; at this time, the first node N1 and the second node N2 are two input ends of the bridge circuit 10, respectively, and the third node N3 and the fourth node N4 are two output ends of the bridge circuit 10; the excitation signal source AC is electrically connected to the first node N1 and the second node N2, respectively, to provide an excitation signal to the bridge circuit 10; the signal processing circuit 20 is electrically connected to the third node N3 and the fourth node N4, respectively, so that the signal processing circuit 20 outputs signals by collecting nodes, thereby realizing detection of the position of the rotor in the magnetic levitation motor.
It should be noted that fig. 2 only shows an exemplary bridge circuit 10, where the bridge circuit 10 includes a detection bridge arm, that is, the bridge circuit 10 includes a set of differential detection sensors 110, and at this time, the position of the rotor in a certain direction in the magnetic levitation motor can be detected by the set of differential detection sensors 110, that is, the position of the rotor in a certain degree of freedom in the magnetic levitation motor can be detected; in the embodiment of the present invention, a plurality of bridge circuits may be included, that is, a plurality of sets of differential detection sensors may be included, where different differential detection sensors can detect the positions of the rotor in the magnetic levitation motor in different degrees of freedom.
For example, as shown in fig. 3, the number of bridge circuits 10 in the sensor detection circuit may be two, that is, a first bridge circuit and a second bridge circuit, where the first bridge circuit includes one set of differential detection sensors 1101 and one sampling bridge arm 121, and the second bridge circuit includes another set of differential sensors 1102 and another sampling bridge arm 122; each set of differential sensor may be composed of two detection coils, i.e., the differential detection sensor 1101 includes detection coils L11 and L21, and the differential detection sensor 1102 includes detection coils L12 and L22; sampling bridge arm 121 comprises resistors R11 and R21, and sampling bridge arm 122 comprises resistors R12 and R22; the resistor R11 and the detection coil L11 are electrically connected to a node N31, the resistor R21 and the detection coil L21 are electrically connected to a node N41, the resistor R12 and the detection coil L12 are electrically connected to a node N32, and the resistor R22 and the detection coil L22 are electrically connected to a node N42; at this time, the number of the first capacitors in the sensor detection circuit is also two, namely the first capacitors C11 and C12; a first capacitor C11 is electrically connected between nodes N31 and N41, and a first capacitor C12 is electrically connected between nodes N32 and N42, so that the detection coil L11 and the detection coil L21 form a resonant circuit with the first capacitor C11, and the detection coil L12 and the detection coil L22 form a resonant circuit with the first capacitor C12; the signal processing circuit 20 can respectively know the impedance of the detection coils L11 and L21 by acquiring the potentials of the node N31 and the node N41, and can respectively know the impedance of the detection coils L12 and L22 by acquiring the potentials of the node N32 and the node N42.
When the detection coil L11 and the detection coil L21 are symmetrically arranged in the bearing system of the magnetic levitation motor, and the detection coil L12 and the detection coil L22 are symmetrically arranged in the bearing system of the magnetic levitation motor, if the direction from the detection coil L11 to the detection coil L21 is the first direction, the direction from the detection coil L12 to the detection coil L22 is the second direction, and the first direction and the second direction are radial directions with two degrees of freedom, the signal processing circuit 20 obtains the potentials of the node N31, the node N41, the node N32, and the node N42, respectively, and outputs corresponding detection signals, and the detection signals output by the signal processing circuit 20 can obtain the coordinate position of the rotor of the magnetic levitation motor on the plane, thereby detecting the spatial position of the rotor in the magnetic levitation motor.
Accordingly, the signal processing circuit 20 may include a first signal processing circuit and a second signal processing circuit, and when the signal processing circuit 20 is constituted by an operational amplifier, the first signal processing circuit may include an operational amplifier U1, the second signal processing circuit may include an operational amplifier U2, the operational amplifier U1 differentially amplifies the potentials of the node N31 and the node N41, and the operational amplifier U2 differentially amplifies the potentials of the node N32 and the node N42.
For example, as shown in fig. 4, the number of the bridge circuits 10 in the sensor detection circuit may also be three, that is, the first bridge circuit, the second bridge circuit and the third bridge circuit, in this case, the sensor detection circuit may include 3 sets of differential detection sensors 1101, 1102 and 1103, each set of differential detection sensors is composed of two detection coils, the differential detection sensor 1101 includes detection coils L11 and L21, the differential detection sensor 1102 includes detection coils L12 and L22, and the differential detection sensor 1103 includes detection coils L13 and L23; meanwhile, the sensor detection circuit can also comprise three sampling bridge arms (121, 122 and 123) corresponding to the differential detection sensors (1101, 1102 and 1103) of each group, and the three bridge circuits 10 are respectively connected with the three first capacitors (C11, C12 and C13) in parallel. The sampling bridge arm 121 comprises resistors R11 and R21, the sampling bridge arm 122 comprises resistors R12 and R22, the sampling bridge arm 123 comprises resistors R13 and R23, the resistor R11 and the detection coil L11 are electrically connected to a node N31, the resistor R21 and the detection coil L21 are electrically connected to a node N41, the resistor R12 and the detection coil L12 are electrically connected to a node N32, the resistor R22 and the detection coil L22 are electrically connected to a node N42, the resistor R13 and the detection coil L13 are electrically connected to a node N33, the resistor R23 and the detection coil L23 are electrically connected to a node N43, the first capacitor C11 is electrically connected between the nodes N31 and N41, the first capacitor C12 is electrically connected between the nodes N32 and N42, and the first capacitor C13 is electrically connected between the nodes N33 and N43, so that the detection coil L11 and the detection coil L21 form a resonance circuit with the first capacitor C11, the detection coil L12 and the detection coil L22 form a resonance circuit with the first capacitor C12, and the detection coil L13 and the first capacitor C13 form a resonance circuit; the signal processing circuit 20 can respectively know the impedance of the detection coil L11 and the detection coil L21 through the potentials of the acquisition node N31 and the node N41, can respectively know the impedance of the detection coil L12 and the detection coil L22 through the potentials of the acquisition node N32 and the node N42, and can respectively know the impedance of the detection coil L13 and the detection coil L23 through the potentials of the acquisition node N33 and the node N43.
When the detection coil L11 and the detection coil L21 are symmetrically disposed in the bearing system of the magnetic levitation motor, the detection coil L12 and the detection coil L22 are symmetrically disposed in the bearing system of the magnetic levitation motor, and the detection coil L13 and the detection coil L23 are symmetrically disposed in the bearing system of the magnetic levitation motor, if the direction from the detection coil L11 to the detection coil L21 is a first direction, the direction from the detection coil L12 to the detection coil L22 is a second direction, the direction from the detection coil L13 to the detection coil L23 is a third direction, and the first direction, the second direction, and the third direction are directions in three degrees of freedom, the signal processing circuit 20 may include a first signal processing circuit, a second signal processing circuit, and a third signal processing circuit, the first signal processing circuit may process a resonance signal generated by a resonance circuit formed by the first bridge circuit and the first capacitor C11, the second signal processing circuit may process a resonance signal generated by a resonance circuit formed by the second bridge circuit and the first capacitor C12, and the third signal processing circuit may process a resonance signal generated by a resonance circuit formed by the third bridge circuit and the first capacitor C13; in this way, the signal processing circuit 20 obtains the potentials of the node N31, the node N41, the node N32, the node N42, the node N33, and the node N43, respectively, and outputs corresponding detection signals, and the spatial coordinate position of the rotor of the magnetic levitation motor can be known through the detection signals output by the signal processing circuit 20, so that the detection of the spatial position of the rotor in the magnetic levitation motor is realized.
Accordingly, when the signal processing circuit 20 is constituted by an operational amplifier, the signal processing circuit 20 may include three operational amplifiers U1, U2, and U3, the operational amplifier U1 differentially amplifies the potentials of the node N31 and the node N41, the operational amplifier U2 differentially amplifies the potentials of the node N32 and the node N42, and the operational amplifier U3 differentially amplifies the potentials of the nodes N33 and N43.
In addition, because the two detection coils of each set of differential detection sensor shown in fig. 3 and 4 and the respective first capacitors form a resonant circuit, compared with the case that each detection coil is connected with one resonant capacitor in parallel, the circuit structure can be simplified, the matching difficulty is reduced, and the low cost of the sensor detection circuit is facilitated.
It should be understood that fig. 2, fig. 3, and fig. 4 are only exemplary illustrations of the embodiment of the present invention, and are not limiting to the embodiment of the present invention, and in practical applications, the number of the differential detection sensors, the sampling bridge arms, and the first capacitors may be set according to detection requirements, which is not specifically limited in the embodiment of the present invention, and the detection principle may refer to the description of fig. 2, fig. 3, and fig. 4, and is not repeated here. For convenience of description, the following description will exemplarily describe the technical solution of the embodiment of the present invention by taking an example that a bridge circuit includes a set of differential detection sensors.
It should be noted that the connection manner of the differential detection sensor of the detection bridge arm and the resistor of the sampling bridge arm in fig. 2 is only an exemplary diagram of the embodiment of the present invention, and the first detection sensor 111 and the second detection sensor 112 of the differential detection sensor 110 in fig. 2 are connected in series and then form a resonant circuit with the first capacitor C1; in the embodiment of the present invention, the resonant tank formed by the differential detection sensor 110 and the first capacitor C1 is not limited to this, that is, the connection mode between the differential detection sensor of the detection arm and the resistor of the sampling arm is not limited to the connection mode shown in fig. 2.
Optionally, fig. 5 is a structural schematic diagram of another sensor detection circuit according to an embodiment of the present invention, as shown in fig. 5, when the differential detection sensor 110 of the detection bridge arm 11 includes a first detection sensor 111 and a second detection sensor 112, and the resistance of the sampling bridge arm 12 includes a first resistance R1 and a second resistance R2, a connection manner between the differential detection sensor 110 in the detection bridge arm 11 and the resistance (R1 and R2) in the sampling bridge arm 12 may further be: a first end of the first resistor R1 and a first end of the first detecting sensor 111 are electrically connected to the first node N1, a second end of the first resistor R1 and a first end of the second resistor R2 are electrically connected to the third node N3, and a second end of the first detecting sensor 111 and a first end of the second detecting sensor 112 are electrically connected to the fourth node N4; a second terminal of the second detection sensor 112 and a second terminal of the second resistor R2 are electrically connected to a second node N2; the first node N1 and the second node N2 are two input ends of the bridge circuit 10, respectively, and are electrically connected to two ends of the excitation signal source AC; the third node N3 and the fourth node N4 are two output terminals of the bridge circuit 10, and are electrically connected to the signal processing circuit 20, respectively. At this time, the first detection sensor 111, the second detection sensor 112, and the first capacitor C1 form a resonant circuit.
If the first detection sensor 111 includes a first detection coil L1, and the second detection sensor 112 includes a second detection coil L2, the signal processing circuit 20 can also know the impedance change condition of the first detection coil L1 and the second detection coil L2 by acquiring the potentials of the third node N3 and the fourth node N4, so that when the signal processing circuit 20 outputs a detection signal, the position of the rotor in the magnetic levitation motor can be known, and the detection of the position of the rotor in the magnetic levitation motor is realized.
On the basis of the above embodiment, optionally, the sensor detection circuit may further include a first isolation circuit electrically connectable between the input terminal of the bridge circuit and the excitation signal source. The existence of the first isolation circuit can prevent the direct current signal at the excitation signal source side from influencing the resonance signal of the resonance circuit, further improve the signal-to-noise ratio and the anti-interference capability of the sensor detection circuit, and further improve the sensitivity of signal detection.
In an alternative embodiment, as shown in any of fig. 6-7, the first isolation circuit 30 may include a second capacitor C2; a first terminal of the second capacitor C2 is electrically connected to the excitation signal source AC, and a second terminal of the second capacitor C2 is electrically connected to an input terminal of the bridge circuit 10. The second capacitor C2 may only have a dc blocking function, and at this time, even though the second capacitor C2 and the differential detection sensor 110 form a resonant circuit, the resonant frequency of the resonant circuit is much lower than the excitation frequency of the excitation signal source, and there is no requirement for the precision of the second capacitor C2; or, when the first capacitor C1 and the differential detection sensor 110 form a resonant circuit, the second capacitor C2 and the differential detection sensor 110 also form a resonant circuit, and resonant frequencies of the first capacitor C1 and the differential detection sensor can be equal to an excitation frequency of the excitation signal source, at this time, the second capacitor C2 can also improve a quality factor and a signal-to-noise ratio of the resonant circuit on the premise of a blocking function, thereby being beneficial to improving detection sensitivity.
As shown in fig. 6, in addition to preventing the direct current signal at the excitation signal source AC from being transmitted to the bridge circuit 10, the second capacitor C2 can also form a resonant circuit with the differential detection sensor 110, that is, the first detection sensor 111 and the second detection sensor 112 of the differential detection sensor 110 are connected in parallel and then form a resonant circuit with the second capacitor C2; therefore, when the resonant circuit formed by the first detection sensor 111, the second detection sensor 112 and the first capacitor C1 and the resonant circuit formed by the first detection sensor 111, the second detection sensor 112 and the second capacitor C2 resonate, the quality factor of the circuit is the sum of the quality factors of the two resonant circuits, so that the whole resonant circuit has a higher quality factor, the amplitude of the whole resonant circuit near the resonant frequency is larger, and the characteristic of narrow bandwidth is achieved, the resonant signals of other frequencies can be well filtered, the signal-to-noise ratio and the anti-interference capability of the sensor detection circuit can be further improved, and the accuracy and the sensitivity of the detection of the position of the rotor in the magnetic suspension motor are further improved.
As shown in fig. 7, the difference from fig. 6 is that the first detection sensor 111, the second detection sensor 112, and the second capacitance C2 of the differential detection sensor 110 constitute a resonance circuit; at the moment, the quality factor of the resonant circuit can be improved, so that the sensor detection circuit has higher signal-to-noise ratio and anti-interference capability, the detection sensitivity is improved, and the accuracy of the rotor position detection in the magnetic suspension motor is improved.
In an alternative embodiment, when the resonant frequency of the resonant circuit formed by the differential detection sensor 110 and the first capacitor C1 is f1, the resonant frequency of the resonant circuit formed by the differential detection sensor 110 and the second capacitor C2 is f2, and the excitation frequency of the excitation signal source AC is f3, there may be: f1 F3 is more than or equal to f2, or f2 is more than or equal to f3 and less than or equal to f1.
On the basis of the above embodiment, optionally, referring to any one of fig. 8 to 9, the first isolation circuit 30 further includes a first transformer TX1; the first transformer TX1 includes a first primary coil TX11 and a first secondary coil TX12; a first end of the first primary coil TX11 is electrically connected to a second end of the second capacitor C2, and a second end of the first primary coil TX11 is grounded; the first secondary coil TX12 is electrically connected to an input terminal of the bridge circuit 10.
Wherein, when the differential detection sensor 110 at least includes the first detection coil L1 and the second detection coil L2, if the excitation inductance of the first transformer TX1 is L TX1 The inductance values of the first and second detection coils L1 and L2 are L 0 Then should be L TX1 >L 0 In a preferred embodiment L TX1 ≥5*L 0 At this time, the first transformer TX1 may be an approximately ideal transformer. The turn ratio between the first primary coil TX11 and the first secondary coil TX12 of the first transformer TX1 may be designed according to a gain requirement, which is not specifically limited in the embodiment of the present invention. The first transformer TX1 can further reduce the interference of the AC side of the excitation signal source to the bridge circuit 10, so as to further improve the signal-to-noise ratio and the anti-interference capability, and further improve the detection accuracy and sensitivity.
It is to be understood that the structure of the first isolation circuit is not limited to the structures shown in fig. 6 to 9, and may also be other devices capable of transmitting high-frequency alternating signals, and the structure of the first isolation circuit is not particularly limited in the embodiments of the present invention on the premise that the isolation function can be achieved.
In an alternative embodiment, as shown in fig. 10 to 12, the first isolation circuit may also include only the second capacitor C2, and in this case, the first detection sensor 111 and the second detection sensor 112 may include not only the detection coil but also a transformer. At this time, the detection coil may be connected to the bridge circuit 10 through a transformer to isolate common mode interference, and only the differential mode signal is extracted to improve the common mode interference resistance.
In an exemplary embodiment, as shown in fig. 10, the first detection sensor 111 includes a first detection coil L1 and a third transformer TX3; the second detection sensor 112 includes a second detection coil L2 and a fourth transformer TX4; the third transformer TX3 includes a third primary coil TX31 and a third secondary coil TX32; the third primary coil TX31 is electrically connected between the third node N3 and the second node N2; a first end and a second end of the third secondary coil TX32 are electrically connected with a first end and a second end of the first detection coil L1, respectively; the fourth transformer TX4 includes a fourth primary coil TX41 and a fourth secondary coil TX42; the fourth primary coil TX41 is electrically connected between the fourth node N4 and the second node N2; a first end and a second end of the fourth secondary coil TX42 are electrically connected to a first end and a second end of the second detection coil L2, respectively. In a preferred embodiment, the excitation inductance of the third transformer TX3 and the fourth transformer TX4 may be greater than the inductance of the first detection coil L1 and the second detection coil L2, and the excitation inductance of the third transformer TX3 and the fourth transformer TX4 may be greater than five times the inductance of the first detection coil L1 and the second detection coil L2, and the third transformer TX3 and the fourth transformer TX4 may be approximately ideal transformers. The input balance of the differential detection sensor 110 can be adjusted by the resistors R1 and R2 in the sampling circuit 12. Therefore, common-mode interference can be inhibited, and the signal-to-noise ratio and the detection sensitivity can be improved.
In another exemplary embodiment, referring to fig. 11, when the first detection sensor 111 includes a first detection coil L1 and a third transformer TX3, and the second detection sensor 112 includes a second detection coil L2 and a fourth transformer TX4, the connection manner of the first detection sensor 111 and the second detection sensor 112 and the third transformer TX3 and the fourth transformer TX4 may further be: the third primary coil TX31 is electrically connected between the first node N1 and the fourth node N4; a first end and a second end of the third secondary coil TX32 are electrically connected to a first end and a second end of the first detection coil L1, respectively; the fourth primary coil TX41 is electrically connected between the fourth node N4 and the second node N2; a first end and a second end of the fourth secondary coil TX42 are electrically connected to a first end and a second end of the second detection coil L2, respectively. In this connection, the excitation inductances of the third transformer TX3 and the fourth transformer TX4 may also be greater than the inductance values of the first detection coil L1 and the second detection coil L2, in a preferred embodiment, the excitation inductances of the third transformer TX3 and the fourth transformer TX4 may also be greater than five times the inductance values of the first detection coil L1 and the second detection coil L2, respectively, and the third transformer TX3 and the fourth transformer TX4 are approximately ideal transformers. The input balance of the differential detection sensor 110 can be adjusted by the resistors R1 and R2 in the sampling circuit 12. Therefore, common-mode interference can be inhibited, and the signal-to-noise ratio and the detection sensitivity can be improved.
In yet another exemplary embodiment, as shown in fig. 12, when the resistance of the sampling bridge arm 12 includes a first resistance R1 and a second resistance R2, and the differential detection sensor 110 includes a first detection sensor and a second detection sensor, the first detection sensor may include a first detection coil L1 and a fifth transformer TX5, the fifth transformer TX5 may include a fifth primary coil TX51, a fifth a secondary coil TX52 and a fifth b secondary coil TX53, and the second detection sensor may include a second detection coil L2 and a sixth transformer TX6; the sixth transformer TX6 includes a sixth primary coil TX61, a sixth a secondary coil TX62, and a sixth b secondary coil TX63; a first end of the fifth primary coil TX51 is electrically connected to the first node N1, and a second end of the fifth primary coil TX51 is electrically connected to the fourth node N4; the fifth first secondary coil TX52, the first detection coil L1 and the first resistor R1 are connected in parallel; a first end of the fifth second secondary coil TX53 is electrically connected to the third node N3, and a second end of the fifth second secondary coil TX53 is electrically connected to the second node N2; a first end of the sixth primary coil TX61 is electrically connected to the first node N1, and a second end of the sixth primary coil TX61 is electrically connected to the third node N3; the sixth secondary coil TX62, the second detection coil L2, and the second resistor R2 are connected in parallel; a first end of the sixth secondary winding TX63 is electrically connected to the fourth node N4, and a second end of the sixth secondary winding TX63 is electrically connected to the second node N2; at this time, the first node N1 and the second node N2 are two input ends of the bridge circuit 10, respectively; the third node N3 and the fourth node N4 are two output terminals of the bridge circuit 10. In this connection manner, the excitation inductances of the fifth transformer TX5 and the sixth transformer TX6 may also be greater than the inductance values of the first detection coil L1 and the second detection coil L2, and in a preferred embodiment, the excitation inductances of the fifth transformer TX5 and the sixth transformer TX6 may also be greater than five times the inductance values of the first detection coil L1 and the second detection coil L2, respectively, the fifth transformer TX5 and the sixth transformer TX6 are approximate ideal transformers, and the primary-secondary turn ratios of the fifth transformer TX5 and the sixth transformer TX6 may be 2:1. the input balance of the differential detection sensor 110 can be adjusted by the resistors R1 and R2 in the sampling circuit 12, so that the common mode interference can be suppressed, which is beneficial to improving the signal-to-noise ratio and the detection sensitivity.
On the basis of the above embodiment, optionally, referring to any one of fig. 13 to 17, the sensor detection circuit may further include a second isolation circuit 40 electrically connected between the output terminal of the bridge circuit 10 and the signal processing circuit. The second isolation circuit 40 can directly extract the differential mode signal from the bridge circuit 10, so that the requirement on the common mode input voltage range in the operational amplifier U in the signal processing circuit 20 can be reduced to a great extent, and the influence of common mode interference on the output detection signal is reduced; the output balance of the second isolation circuit is achieved by adjusting the resistances of the resistors R1 and R2 of the sampling bridge arm 12.
In an alternative embodiment, with continued reference to any of fig. 13-17, the second isolation circuit 40 may include a second transformer TX2; the second transformer TX2 includes a second primary coil TX21 and a second secondary coil TX22; the second primary coil TX21 is electrically connected to the output terminal of the bridge circuit 10; the second secondary coil TX22 is electrically connected to the signal processing circuit 20. At this moment, the second transformer TX2 can directly take out the differential mode signal from the bridge circuit, so that the requirement for the common mode input voltage range of the operational amplifier U of the signal processing circuit 20 is greatly reduced, i.e., the influence of the common mode interference on the detection signal can be reduced, thus, the operational amplifier U only needs a common amplifier, does not need a specific differential amplifier, and does not need a specific instrument amplifier, a processor, etc., the signal processing function can be realized, and the corresponding detection signal is output, thereby further simplifying the matching difficulty of the circuit, and being beneficial to the low cost of the circuit. The output balance of the second transformer TX2 is adjusted by sampling resistors R3 and R4 of the bridge arm 12.
The second transformer TX2 may only perform an isolation function, or the second transformer TX2 may participate in resonance while having the isolation function. When the second transformer TX2 is an approximately ideal transformer, it does not participate in resonance, and the first capacitor C1 and the differential detection sensor 100 form a series or parallel resonant circuit, at this time, the debugging process can be simplified, the second transformer TX2 can isolate the common mode voltage and extract only the differential mode signal, reducing the requirement for the input common mode voltage range of the operational amplifier in the signal processing circuit 20; when the excitation inductance of the second transformer TX2, the differential detection sensor 110, and the first capacitor C form a resonant circuit, the gain can be increased by the turn ratio of the primary and secondary sides of the second transformer TX2, so that the noise amplification is not increased.
Wherein, when the differential detection sensor 110 at least includes the first detection coil L1 and the second detection coil L2, if the excitation inductance of the second transformer TX2 is L TX2 The inductance values of the first and second detection coils L1 and L2 are L 0 Then should be L TX2 >L 0 In a preferred embodiment L TX2 >5*L 0 At this time, the second transformer TX2 may be an approximately ideal transformer. The turn ratio between the second primary coil TX21 and the second secondary coil TX22 of the second transformer TX2 may be designed according to the gain requirement, which is not specifically limited in the embodiment of the present invention.
In fig. 13 to fig. 17, the first capacitor C1 is electrically connected to the second secondary coil TX22 in the second transformer TX2, that is, a first end of the first capacitor C1 is electrically connected to a first end of the second secondary coil TX22, and a second end of the first capacitor C1 is electrically connected to a second end of the second secondary coil TX 22. In the embodiment of the present invention, the first capacitor may also be electrically connected to the second primary coil of the second transformer.
For example, referring to any of fig. 18-22, a first terminal of the first capacitor C1 is electrically connected to a first terminal of the second primary coil TX21, and a second terminal of the first capacitor C1 is electrically connected to a second terminal of the second primary coil TX 21. At this time, the resonant circuit formed by the first capacitor C1 and the differential detection sensor 110 is not affected by the excitation inductance of the second transformer TX 2.
It is understood that, in the embodiment of the present invention, the sensor detection circuit may include both the first isolation circuit and the second isolation circuit, may also include only the first isolation circuit, or only the second isolation circuit, which may be designed according to actual needs, and this is not specifically limited in the embodiment of the present invention.
Based on the same inventive concept, the embodiment of the invention also provides a position detection sensor applied to the magnetic suspension motor, and the position detection sensor comprises the sensor detection circuit provided by the embodiment of the invention. Therefore, the position detection sensor includes the technical features of the sensor detection circuit provided in the embodiment of the present invention, and the advantageous effects of the sensor detection circuit provided in the embodiment of the present invention can be achieved.
Based on the same inventive concept, the embodiment of the invention also provides a magnetic suspension motor, and the position detection sensor provided by the embodiment of the invention is integrated in the magnetic suspension motor. Therefore, the magnetic levitation motor includes the technical features of the position detection sensor provided in the embodiment of the present invention, that is, includes the technical features of the sensor detection circuit provided in the embodiment of the present invention, and the beneficial effects of the sensor detection circuit provided in the embodiment of the present invention can be achieved.
The above-described embodiments should not be construed as limiting the scope of the invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions may be made in accordance with design requirements and other factors. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (21)

1. An eddy current and inductance sensor detection circuit applied to a magnetic suspension motor is characterized by comprising:
at least one bridge circuit comprising a detection bridge arm and a sampling bridge arm; the detection bridge arm comprises a differential detection sensor; the sampling bridge arm comprises a resistor; the input end of the bridge circuit is electrically or magnetically connected with an excitation signal source;
the at least one first capacitor is in one-to-one correspondence with the at least one bridge circuit, is connected in parallel with the output end of the bridge circuit, and forms a resonant circuit with the differential detection sensor;
and the signal processing circuit is used for processing the resonance signal of the resonance circuit.
2. The eddy current, inductive sensor detection circuit of claim 1, further comprising:
and the first isolation circuit is electrically connected between the input end of the bridge circuit and the excitation signal source.
3. The eddy current, inductive sensor detection circuit of claim 2, wherein said first isolation circuit comprises a second capacitance;
and the first end of the second capacitor is electrically connected with the excitation signal source, and the second end of the second capacitor is electrically connected with the input end of the bridge circuit.
4. The eddy current, inductive sensor testing circuit according to claim 3, wherein said first isolation circuit further comprises a first transformer; the first transformer comprises a first primary coil and a first secondary coil;
a first end of the first primary coil is electrically connected with a second end of the second capacitor, and a second end of the first primary coil is grounded; the first secondary coil is electrically connected to an input terminal of the bridge circuit.
5. The eddy current, inductive sensor detection circuit according to claim 4, wherein said differential detection sensor comprises at least a first detection coil and a second detection coil;
the excitation inductance of the first transformer is L TX1 The inductance values of the first detection coil and the second detection coil are L 0 ;L TX1 >L 0
6. The eddy current, inductive sensor detection circuit of claim 5, wherein L TX1 ≥ 5*L 0
7. The eddy current, inductive sensor detection circuit of claim 3, wherein the resonant frequency of said differential detection sensor and said resonant circuit of said first capacitor is f1, the resonant frequency of said second capacitor and said resonant circuit of said differential detection sensor is f2, and the excitation frequency of said excitation signal source is f3;
wherein f1 is more than or equal to f3 and less than or equal to f2, or f2 is more than or equal to f3 and less than or equal to f1.
8. The eddy current, inductive sensor detection circuit of claim 1, further comprising:
and the second isolation circuit is electrically connected between the output end of the bridge circuit and the signal processing circuit.
9. The eddy current, inductive sensor detection circuit of claim 8, wherein said second isolation circuit comprises a second transformer; the second transformer comprises a second primary coil and a second secondary coil;
the second primary coil is electrically connected to the output end of the bridge circuit; the second secondary coil is electrically connected with the signal processing circuit.
10. The eddy current, inductive sensor detection circuit of claim 9, wherein a first terminal of said first capacitor is electrically connected to a first terminal of said second primary winding and a second terminal of said first capacitor is electrically connected to a second terminal of said second primary winding;
or the first end of the first capacitor is electrically connected with the first end of the second secondary coil, and the second end of the first capacitor is electrically connected with the second end of the second secondary coil.
11. The eddy current, inductive sensor detection circuit according to claim 9, wherein said differential detection sensor comprises a first detection coil and a second detection coil;
the excitation inductance of the second transformer is L TX2 The inductance values of the first detection coil and the second detection coil are L 0 (ii) a Wherein L is TX2 >L 0
12. The eddy current, inductive sensor detection circuit of claim 11, wherein L is TX2 ≥ 5*L 0
13. The eddy current, inductive sensor detection circuit of claim 1, wherein said differential detection sensor comprises a first detection sensor and a second detection sensor; the resistors comprise a first resistor and a second resistor;
the first end of the first resistor and the first end of the second resistor are electrically connected to a first node; the second end of the first resistor and the first end of the first detection sensor are electrically connected to a third node; a second end of the second resistor and a first end of the second detection sensor are electrically connected to a fourth node; a second end of the first detection sensor and a second end of the second detection sensor are electrically connected to a second node;
the first node and the second node are two input ends of the bridge circuit respectively; the third node and the fourth node are two output ends of the bridge circuit.
14. The eddy current, inductive sensor detection circuit according to claim 13, wherein said first detection sensor comprises a first detection coil and a third transformer; the third transformer comprises a third primary coil and a third secondary coil; the third primary coil is electrically connected between the third node and the second node; the first end and the second end of the third secondary coil are respectively and electrically connected with the first end and the second end of the first detection coil;
the second detection sensor comprises a second detection coil and a fourth transformer; the fourth transformer comprises a fourth primary coil and a fourth secondary coil; the fourth primary coil is electrically connected between the fourth node and the second node; and the first end and the second end of the fourth secondary coil are respectively and electrically connected with the first end and the second end of the second detection coil.
15. The eddy current, inductive sensor detection circuit of claim 1, wherein said differential detection sensor comprises a first detection sensor and a second detection sensor; the resistors comprise a first resistor and a second resistor;
a first end of the first resistor and a first end of the first detection sensor are electrically connected to a first node; the second end of the first resistor and the first end of the second resistor are electrically connected to a third node; the second end of the first detection sensor and the first end of the second detection sensor are electrically connected to a fourth node; a second end of the second detection sensor and a second end of the second resistor are electrically connected to a second node;
the first node and the second node are two input ends of the bridge circuit respectively; the third node and the fourth node are two output ends of the bridge circuit.
16. The eddy current, inductive sensor detection circuit according to claim 15, wherein said first detection sensor comprises a first detection coil and a third transformer; the third transformer comprises a third primary coil and a third secondary coil; the third primary coil is electrically connected between the first node and the fourth node; the first end and the second end of the third secondary coil are respectively and electrically connected with the first end and the second end of the first detection coil;
the second detection sensor comprises a second detection coil and a fourth transformer; the fourth transformer comprises a fourth primary coil and a fourth secondary coil; the fourth primary coil is electrically connected between the fourth node and the second node; and the first end and the second end of the fourth secondary coil are respectively and electrically connected with the first end and the second end of the second detection coil.
17. The eddy current, inductive sensor detection circuit of claim 1, wherein said differential detection sensor comprises a first detection sensor and a second detection sensor; the resistors comprise a first resistor and a second resistor;
the first detection sensor comprises a first detection coil and a fifth transformer; the fifth transformer comprises a fifth primary coil, a fifth secondary coil A and a fifth secondary coil B; the first end of the fifth primary coil is electrically connected to a first node, and the second end of the fifth primary coil is electrically connected to a fourth node; the fifth first secondary coil, the first detection coil and the first resistor are connected in parallel; a first end of the fifth second secondary coil is electrically connected to the third node, and a second end of the fifth second secondary coil is electrically connected to the second node;
the second detection sensor comprises a second detection coil and a sixth transformer; the sixth transformer comprises a sixth primary coil, a sixth A secondary coil and a sixth B secondary coil; a first end of the sixth primary winding is electrically connected to the first node, and a second end of the sixth primary winding is electrically connected to the third node; the sixth secondary coil, the second detection coil, and the second resistor are connected in parallel; a first end of the sixth secondary winding is electrically connected to the fourth node, and a second end of the sixth secondary winding is electrically connected to the second node;
the first node and the second node are two input ends of the bridge circuit respectively; the third node and the fourth node are two output ends of the bridge circuit.
18. The eddy current, inductive sensor detection circuit of claim 1, wherein said signal processing circuit comprises at least one operational amplifier in one-to-one correspondence with at least one of said bridge circuits;
the non-inverting input end and the inverting input end of the operational amplifier are respectively and electrically connected with the two output ends of the bridge circuit; and the output end of the operational amplifier is used for outputting a detection signal.
19. The eddy current, inductive sensor detection circuit of claim 1, wherein at least one of said bridge circuits comprises a first bridge circuit, a second bridge circuit, and a third bridge circuit;
the output ends of the first bridge circuit, the second bridge circuit and the third bridge circuit are respectively connected with the first capacitor in parallel;
the signal processing circuit comprises a first signal processing circuit, a second signal processing circuit and a third signal processing circuit;
the first signal processing circuit is used for processing a resonant signal generated by the resonant circuit formed by the first bridge circuit and the first capacitor;
the second signal processing circuit is used for processing a resonance signal generated by the resonance circuit formed by the second bridge circuit and the first capacitor;
the third signal processing circuit is used for processing a resonance signal generated by the resonance circuit formed by the third bridge circuit and the first capacitor.
20. A position detection sensor for a magnetic levitation motor, comprising: an eddy current, inductive sensor detection circuit for application in magnetic levitation motors as recited in any of claims 1-19.
21. A magnetic levitation motor, characterized in that the magnetic levitation motor is integrated with a position detection sensor applied to the magnetic levitation motor as recited in claim 20.
CN202211638226.5A 2022-12-20 2022-12-20 Magnetic suspension motor, position detection sensor and sensor detection circuit Active CN115615304B (en)

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CN110608661A (en) * 2019-09-19 2019-12-24 珠海格力电器股份有限公司 Sensor detection circuit and method and magnetic suspension bearing system
CN111664779A (en) * 2019-03-08 2020-09-15 沃科夏轴承有限公司 Improved signal conditioning circuit for active magnetic bearings
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JP2015175608A (en) * 2014-03-13 2015-10-05 株式会社荏原製作所 eddy current sensor
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