CN115615304B - Magnetic suspension motor, position detection sensor and sensor detection circuit - Google Patents
Magnetic suspension motor, position detection sensor and sensor detection circuit Download PDFInfo
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- CN115615304B CN115615304B CN202211638226.5A CN202211638226A CN115615304B CN 115615304 B CN115615304 B CN 115615304B CN 202211638226 A CN202211638226 A CN 202211638226A CN 115615304 B CN115615304 B CN 115615304B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
- H02K11/225—Detecting coils
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
- H02K7/09—Structural association with bearings with magnetic bearings
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
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Abstract
The invention discloses a magnetic suspension motor, a position detection sensor and a sensor detection circuit. The sensor detection circuit is an eddy current and inductance sensor detection circuit applied to a magnetic suspension motor, and comprises: at least one bridge circuit comprising a detection bridge arm and a sampling bridge arm; the detection bridge arm comprises a differential detection sensor; the sampling bridge arm comprises a resistor; the input end of the bridge circuit is electrically connected or magnetically coupled with an excitation signal source; at least one first capacitor corresponding to the bridge circuit one by one is connected in parallel with the output end of the bridge circuit and forms a resonant loop with the differential detection sensor; and the signal processing circuit is used for processing the resonance signal of the resonance circuit. The technical scheme of the invention can simplify the structure of the circuit and reduce the matching difficulty of devices in the circuit.
Description
Technical Field
The invention relates to the technical field of magnetic suspension motor position detection, in particular to a magnetic suspension motor, a position detection sensor and a sensor detection circuit.
Background
The magnetic suspension motor utilizes the principle of 'like poles repel and opposite poles attract' between the stator and the rotor exciting magnetic field in the bearing system to suspend the rotor, and simultaneously generates driving force to drive the rotor to move in a suspension state, so that the magnetic suspension motor has the characteristics of small mechanical abrasion and convenient maintenance, overhaul and replacement, thereby being applicable to the fields of severe environment, extreme cleanness, no pollution and special requirement.
During the operation of the magnetic levitation motor, the position of the magnetic levitation motor needs to be detected. The current sensors for position detection are typically inductive, eddy current sensors. In the prior art, the detection circuit of the inductance and eddy current sensor comprises a bridge circuit, as shown in fig. 1, wherein the bridge circuit comprises differential detection sensors L1 'and L2', the sensor L1 'is connected in parallel with a resonant capacitor C1', the sensor L2 'is connected in parallel with a resonant capacitor C2', and at this time, the resonant capacitors C1 'and C2' respectively connected in parallel with the sensors L1 'and L2' should be kept consistent.
However, due to reasons such as technology, even capacitors in the same batch will have differences, so that to meet the requirement of high-precision detection, different resonant capacitors in the bridge circuit need to be respectively debugged, which increases the matching difficulty of devices and the complexity of the circuit, increases the cost of manpower and material resources, and increases the cost of the sensor detection circuit.
Disclosure of Invention
The invention provides a magnetic suspension motor, a position detection sensor and a sensor detection circuit, which are used for simplifying the structure of the circuit and reducing the matching difficulty of devices in the circuit.
According to an aspect of the present invention, there is provided an eddy current, inductance sensor detection circuit applied to a magnetic levitation motor, comprising:
At least one bridge circuit comprising a detection bridge arm and a sampling bridge arm; the detection bridge arm comprises a differential detection sensor; the sampling bridge arm comprises a resistor; the input end of the bridge circuit is electrically connected or magnetically coupled with an excitation signal source;
the first capacitors are in one-to-one correspondence with at least one bridge circuit, are connected in parallel with the output ends of the bridge circuits and form a resonant circuit with the differential detection sensor;
and the signal processing circuit is used for processing the resonance signal of the resonance circuit.
According to another aspect of the present invention, there is provided a position detection sensor applied to a magnetic levitation motor, comprising: the detection circuit of the eddy current and inductance sensor is applied to the magnetic suspension motor.
According to another aspect of the present invention, there is provided a magnetic levitation motor integrated with the above-described position detection sensor applied to the magnetic levitation motor.
According to the technical scheme, the first capacitor connected in parallel with the output end of the bridge circuit and the differential detection sensor of the detection bridge arm form a resonant circuit, and each sensor in the differential detection sensor is not required to be provided with a corresponding resonant capacitor, so that the circuit structure can be simplified; meanwhile, the differential detection sensor of the detection bridge arm and the same first capacitor form a resonant circuit, and the problem of consistency of the capacitors connected with different sensors in the differential detection sensor in parallel is not needed to be considered, so that the matching difficulty of devices in the circuit can be reduced on the premise of enhancing the signal-to-noise ratio and the anti-interference capability and ensuring the accuracy of detection signals, the labor and material resources are saved, and the low cost of the sensor detection circuit is further facilitated.
It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the invention or to delineate the scope of the invention. Other features of the present invention will become apparent from the description that follows.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a prior art sensor detection circuit;
fig. 2 is a schematic structural diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of another sensor detection circuit according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 8 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 9 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 10 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 11 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 12 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 13 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 14 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 15 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 16 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 17 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 18 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 19 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 20 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
FIG. 21 is a schematic diagram of a sensor detection circuit according to an embodiment of the present invention;
fig. 22 is a schematic structural diagram of a sensor detection circuit according to another embodiment of the present invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a system, article, or apparatus that comprises a list of elements is not necessarily limited to those elements expressly listed but may include other elements not expressly listed or inherent to such article or apparatus.
The embodiment of the invention provides an eddy current and inductance sensor detection circuit for a magnetic suspension motor, which can detect the position of a rotor in a bearing system of the magnetic suspension motor, has a simple structure and can reduce the matching difficulty of devices.
Fig. 2 is a schematic structural diagram of a sensor detection circuit according to an embodiment of the present invention, where, as shown in fig. 2, the sensor detection circuit includes at least one bridge circuit 10, at least one first capacitor C1 corresponding to the at least one bridge circuit 10 one by one, and a signal processing circuit 20, and the bridge circuit 10 includes a detection bridge arm 11 and a sampling bridge arm 12; the detection bridge arm 11 is composed of a differential detection sensor 110; the sampling bridge arm 12 is composed of resistors R1 and R2, and the resistors R1 and R2 can adjust the output balance of the bridge circuit; the input end of the bridge circuit 10 is electrically or magnetically coupled with an excitation signal source AC; the first capacitor C1 is connected in parallel to the output end of the bridge circuit 10 to form a resonant circuit with the differential detection sensor 110, and the resonant frequency of the resonant circuit is related to the capacitance value of the first capacitor C1 matched with the differential detection sensor 110; the signal processing circuit 20 processes the resonance signal of a specific frequency generated by the resonance circuit and can output a corresponding detection signal.
Illustratively, the differential detection sensors 111 and 112 operate at resonance with a first capacitor C1 connected in parallel to the output of the bridge circuit 10 when the excitation signal source AC provides a high frequency alternating electrical signal. Taking the differential detection sensor 110 including the first detection sensor 111 and the second detection sensor 112, and the first detection sensor 111 including the first detection coil L1 and the second detection sensor 112 including the second detection coil L2 as an example, when the detected conductor is in the alternating magnetic field range, eddy currents are induced, the eddy currents induced by the detected conductor interact with the alternating magnetic field around the first detection coil L1 and the second detection coil L2, the impedance of the first detection coil L1 and the second detection coil L2 can be changed, and when the distance between the first detection coil L1 and the second detection coil L2 and the detected conductor is changed, the magnetic field coupling strength between the first detection coil L1 and the second detection coil L2 and the detected conductor is changed, that is, the impedance of the first detection coil L1 and the second detection coil L2 is changed accordingly. At this time, the rotor in the bearing system of the magnetic levitation motor is used as a conductor to be tested, and the first detection coil L1 and the second detection coil L2 are symmetrically arranged in the bearing system of the magnetic levitation motor, so that when the rotor moves in a direction approaching to the first detection coil L1, it moves in a direction away from the second detection coil L2, and when the rotor moves in a direction approaching to the second detection coil L2, it moves in a direction away from the first detection coil L1. At this time, when the rotor moves in a direction approaching the first detection coil L1, the magnetic field coupling strength between the first detection coil L1 and the rotor increases, the impedance of the first detection coil L1 increases, and the magnetic field coupling strength between the second detection coil L2 and the rotor decreases, and the impedance of the second detection coil L2 decreases; the impedance change trends of the first detection coil L1 and the second detection signal L2 are different, so that the output end of the bridge circuit 10 outputs a differential signal, and the differential signal is input into the signal processing circuit 20 as a resonance signal, so that the signal processing circuit 20 processes the differential signal and then outputs a corresponding detection signal, and based on the detection signal output by the signal processing circuit 20, the position of the rotor in the magnetic levitation motor relative to the first detection coil L1 and the second detection coil L2 can be known, and the detection of the rotor position in the bearing system is realized.
In this way, by adopting the first capacitor C1 connected in parallel to the output of the bridge circuit 10 and the differential detection sensor 110 for detecting the bridge arm 11 to form a resonant circuit, it is unnecessary to separately provide a corresponding resonant capacitor for each sensor in the differential detection sensor 110, so that the circuit structure can be simplified; meanwhile, the differential detection sensor 110 of the detection bridge arm 11 and the same first capacitor C1 form a resonant circuit, so that the problem of consistency of the capacitors connected with different sensors in the differential detection sensor 110 in parallel is not needed to be considered, and on the premise of enhancing the signal-to-noise ratio and the anti-interference capability and ensuring the accuracy of detection signals, the matching difficulty of devices in the sensor detection circuit can be reduced, the labor and material resources are saved, and the low cost of the sensor detection circuit is further facilitated.
It can be understood that the first detection coil L1 and the second detection coil L2 may also be asymmetrically disposed in the bearing system of the magnetic levitation motor, so long as the relative positions of the first detection coil L1 and the second detection coil L2 are fixed, the corresponding detection signals may be determined by the resonance signals output by the bridge circuit, and the rotor position of the magnetic levitation motor may be determined. The positions of the first detection coil L1 and the second detection coil L2 may be set as needed, and the embodiment of the present invention is not particularly limited.
It can also be understood that when the resistance value of the resistor R1 is R 1 The resistance value of the resistor R2 is R 2 The impedance of the first detection coil L1 is Z L1 The impedance of the second detection coil L2 is Z L2 If R is 1 /R 2 ＝Z L1 /Z L2 The bridge circuit 10 is in a balanced state, and at this time, the potential difference of the differential signal output from the output terminal of the bridge circuit 10 is 0V. Therefore, the differential signal output from the output terminal of the bridge circuit 10 is related to the impedance of the first detection coil L1 and the second detection coil L2 in the differential detection sensor 110, and also to the resistance of the resistors R1 and R2 in the sampling bridge arm 12. The resistances of the resistors R1 and R2 in the sampling bridge arm 12 may be fixed resistors with fixed resistance values, variable resistors, potentiometers and digital potentiometers with the same effects as the resistors, and the like; wherein, when sampling the resistances of the resistors R1 and R2 in the bridge arm 12When the value is adjustable, the output balance of the bridge circuit 10 is adjusted by adjusting the resistance values of the resistors R1 and R2, so as to meet different detection requirements. When the digital potentiometer is used to adjust the output balance of the bridge circuit 10, the parasitic capacitance of the digital potentiometer affects the matching of the resonant circuit, so that resistors respectively connected in series and parallel with the digital potentiometer can be further arranged in the circuit, and the values of the two resistors respectively connected in series and parallel with the digital potentiometer are determined on the premise of reducing the influence of the parasitic capacitance, ensuring a sufficient adjustment range and the resolution of the digital potentiometer adjustment. On the premise of realizing position detection, the embodiment of the invention does not specifically limit the structure of the sampling bridge arm 12.
For convenience of description, the technical solutions of the embodiments of the present invention are described below by taking the resistors R1 and R2 of the sampling bridge arm 12 as the resistors with fixed resistance values as examples.
Optionally, with continued reference to fig. 2, the signal processing circuit 20 may include at least one operational amplifier U in one-to-one correspondence with at least one bridge circuit 10; the non-inverting input end and the inverting input end of the operational amplifier U are respectively and electrically connected with the two output ends of the bridge circuit 10; the output end of the operational amplifier U is used for outputting a detection signal. In this way, the operational amplifier U can amplify the differential signals at the two output ends of the bridge circuit 10 and output the corresponding detection signals, which is beneficial to further improving the detection sensitivity. The operational amplifier U may further include a first power signal terminal and a second power signal terminal to receive the first power signal V1 and the second power signal V2, respectively, so that the operational amplifier U can operate normally.
It should be noted that fig. 2 is only an exemplary diagram of an embodiment of the present invention, and fig. 2 only illustrates the relative positional relationship between the bridge circuit 10 and the excitation signal source AC, the first capacitor C1, and the signal processing circuit 20, and the embodiment of the present invention does not specifically limit the relative positional relationship between the bridge circuit 10 and the excitation signal source AC, the first capacitor C1, and the signal processing circuit 20 on the premise that the circuit can be simplified, the difficulty in matching the capacitors can be reduced, and the signal to noise ratio and the anti-interference capability can be improved.
Alternatively, with continued reference to fig. 2, when differential detection sensor 110 includes first detection sensor 111 and second detection sensor 112, the resistances of sampling leg 12 may include first resistance R1 and second resistance R2; the first end of the first resistor R1 and the first end of the second resistor R2 are electrically connected to the first node N1; the second end of the first resistor R1 and the first end of the first detection sensor 111 are electrically connected to the third node N3; the second end of the second resistor R2 and the first end of the second detection sensor 112 are electrically connected to the fourth node N4; the second end of the first detection sensor 111 and the second end of the second detection sensor 112 are electrically connected to the second node N2; at this time, the first node N1 and the second node N2 are two input ends of the bridge circuit 10, and the third node N3 and the fourth node N4 are two output ends of the bridge circuit 10; the excitation signal source AC is electrically connected to the first node N1 and the second node N2, respectively, to provide an excitation signal for the bridge circuit 10; the signal processing circuit 20 is electrically connected with the third node N3 and the fourth node N4 respectively, so that the signal processing circuit 20 outputs signals through the acquisition nodes to realize detection of the position of the rotor in the magnetic levitation motor.
It should be noted that, fig. 2 illustrates only one bridge circuit 10 by way of example, where the bridge circuit 10 includes a detection bridge arm, that is, where the bridge circuit 10 includes a set of differential detection sensors 110, the position of the rotor in the magnetic levitation motor in a certain direction, that is, the position of the rotor in the magnetic levitation motor in a certain degree of freedom, can be detected by the set of differential detection sensors 110; in the embodiment of the invention, a plurality of bridge circuits can be included, namely a plurality of groups of differential detection sensors are included, and at the moment, different differential detection sensors can detect the positions of the rotor in the magnetic levitation motor in different degrees of freedom.
As illustrated in fig. 3, the number of bridge circuits 10 in the sensor detection circuit may be two, i.e., a first bridge circuit including one set of differential detection sensors 1101 and one sampling bridge arm 121, and a second bridge circuit including the other set of differential sensors 1102 and the other sampling bridge arm 122; each group of differential sensors may be constituted by two detection coils, i.e., the differential detection sensor 1101 includes detection coils L11 and L21, and the differential detection sensor 1102 includes detection coils L12 and L22; sampling leg 121 includes resistors R11 and R21, and sampling leg 122 includes resistors R12 and R22; resistor R11 and detection coil L11 are electrically connected to node N31, resistor R21 and detection coil L21 are electrically connected to node N41, resistor R12 and detection coil L12 are electrically connected to node N32, and resistor R22 and detection coil L22 are electrically connected to node N42; at this time, the number of the first capacitors in the sensor detection circuit is two, namely, the first capacitors C11 and C12; the first capacitor C11 is electrically connected between the nodes N31 and N41, and the first capacitor C12 is electrically connected between the nodes N32 and N42, so that the detection coil L11 and the detection coil L21 and the first capacitor C11 form a resonant circuit, and the detection coil L12 and the detection coil L22 and the first capacitor C12 form a resonant circuit; the signal processing circuit 20 can acquire the impedance of the detection coil L11 and the detection coil L21 by acquiring the potential of the node N31 and the node N41, respectively, and can acquire the impedance of the detection coil L12 and the detection coil L22 by acquiring the potential of the node N32 and the node N42, respectively.
When the detection coil L11 and the detection coil L21 are symmetrically disposed in the bearing system of the magnetic levitation motor, and the detection coil L12 and the detection coil L22 are symmetrically disposed in the bearing system of the magnetic levitation motor, if the direction in which the detection coil L11 points to the detection coil L21 is the first direction, the direction in which the detection coil L12 points to the detection coil L22 is the second direction, and the first direction and the second direction are radial directions of two degrees of freedom, respectively, the signal processing circuit 20 obtains the potentials of the node N31, the node N41, the node N32 and the node N42, respectively, and outputs corresponding detection signals, and the coordinate position of the rotor of the magnetic levitation motor on the plane can be obtained by the detection signals output by the signal processing circuit 20, thereby realizing the detection of the spatial position of the rotor in the magnetic levitation motor.
Accordingly, the signal processing circuit 20 may include a first signal processing circuit and a second signal processing circuit, and when the signal processing circuit 20 is constituted by an operational amplifier, the first signal processing circuit may include an operational amplifier U1, the second signal processing circuit may include an operational amplifier U2, the operational amplifier U1 differentially amplifies the potentials of the node N31 and the node N41, and the operational amplifier U2 differentially amplifies the potentials of the node N32 and the node N42.
As shown in fig. 4, the number of bridge circuits 10 in the sensor detection circuit may also be three, namely, a first bridge circuit, a second bridge circuit, and a third bridge circuit, where the sensor detection circuit may include 3 sets of differential detection sensors 1101, 1102, and 1103, each set of differential detection sensors being composed of two detection coils, the differential detection sensor 1101 including detection coils L11 and L21, the differential detection sensor 1102 including detection coils L12 and L22, and the differential detection sensor 1103 including detection coils L13 and L23; meanwhile, the sensor detection circuit may further include three sampling bridge arms (121, 122, 123) corresponding to the respective sets of differential detection sensors (1101, 1102, 1103), and the three bridge circuits 10 are connected in parallel with the three first capacitors (C11, C12, C13), respectively. The sampling bridge arm 121 includes resistors R11 and R21, the sampling bridge arm 122 includes resistors R12 and R22, the sampling bridge arm 123 includes resistors R13 and R23, the resistor R11 and the detection coil L11 are electrically connected to the node N31, the resistor R21 and the detection coil L21 are electrically connected to the node N41, the resistor R12 and the detection coil L12 are electrically connected to the node N32, the resistor R22 and the detection coil L22 are electrically connected to the node N42, the resistor R13 and the detection coil L13 are electrically connected to the node N33, the resistor R23 and the detection coil L23 are electrically connected to the node N43, the first capacitor C11 is electrically connected between the nodes N31 and N41, the first capacitor C12 is electrically connected between the nodes N32 and N42, so that the detection coil L11 and the detection coil L21 and the first capacitor C11 form a resonant circuit, the detection coil L12 and the detection coil L22 and the first capacitor C12 form a resonant circuit, and the detection coil L13 and the first capacitor C13 form a resonant circuit; the signal processing circuit 20 can acquire the impedance of the detection coil L11 and the detection coil L21 by acquiring the potential of the node N31 and the node N41, acquire the impedance of the detection coil L12 and the detection coil L22 by acquiring the potential of the node N32 and the node N42, and acquire the impedance of the detection coil L13 and the detection coil L23 by acquiring the potential of the node N33 and the node N43, respectively.
When the detection coil L11 and the detection coil L21 are symmetrically arranged in the bearing system of the magnetic levitation motor, the detection coil L12 and the detection coil L22 are symmetrically arranged in the bearing system of the magnetic levitation motor, and the detection coil L13 and the detection coil L23 are symmetrically arranged in the bearing system of the magnetic levitation motor, if the direction of the detection coil L11 pointing to the detection coil L21 is a first direction, the direction of the detection coil L12 pointing to the detection coil L22 is a second direction, and the direction of the detection coil L13 pointing to the detection coil L23 is a third direction, and the first direction, the second direction and the third direction are directions in three degrees of freedom respectively, the signal processing circuit 20 may include a first signal processing circuit, a second signal processing circuit and a third signal processing circuit, where the first signal processing circuit may process a resonance signal generated by a resonance circuit formed by the first bridge circuit and the first capacitor C11, the second signal processing circuit may process a resonance signal generated by a resonance circuit formed by the second bridge circuit and the first capacitor C12, and the third signal processing circuit may process a resonance signal generated by the resonance circuit formed by the third bridge circuit and the third capacitor C13; in this way, the signal processing circuit 20 obtains the potentials of the node N31, the node N41, the node N32, the node N42, the node N33 and the node N43 respectively, and outputs corresponding detection signals, and the coordinate position of the rotor of the magnetic levitation motor in space can be obtained through the detection signals output by the signal processing circuit 20, so that the detection of the rotor space position in the magnetic levitation motor is realized.
Accordingly, when the signal processing circuit 20 is constituted by an operational amplifier, the signal processing circuit 20 may include three operational amplifiers U1, U2, and U3, the operational amplifier U1 differentially amplifies the potentials of the node N31 and the node N41, the operational amplifier U2 differentially amplifies the potentials of the node N32 and the node N42, and the operational amplifier U3 differentially amplifies the potentials of the nodes N33 and N43.
In addition, since the two detection coils of each group of differential detection sensors shown in fig. 3 and 4 and the respective first capacitors form a resonant circuit, compared with the case that each detection coil is connected with one resonant capacitor in parallel, the circuit structure can be simplified, the matching difficulty can be reduced, and the low cost of the sensor detection circuit is facilitated.
It should be understood that, the foregoing fig. 2, fig. 3 and fig. 4 are only illustrative examples of the embodiments of the present invention, and are not limiting, and in practical applications, the number of the differential detection sensors, the sampling bridge arms and the first capacitors may be set according to the detection needs, which is not particularly limited, and the detection principles thereof may be referred to the foregoing descriptions of fig. 2, fig. 3 and fig. 4, and are not repeated herein. For convenience of description, the technical solution of the embodiment of the present invention is described below by taking a bridge circuit including a set of differential detection sensors as an example.
It should be noted that, the connection manner between the differential detection sensor of the detection bridge arm and the resistor in the sampling bridge arm in fig. 2 is only an exemplary drawing of the embodiment of the present invention, and the first detection sensor 111 and the second detection sensor 112 of the differential detection sensor 110 in fig. 2 are connected in series and then form a resonant circuit with the first capacitor C1; in the embodiment of the present invention, the resonant circuit formed by the differential detection sensor 110 and the first capacitor C1 is not limited to this, that is, the connection manner of the differential detection sensor of the detection bridge arm and the resistor in the sampling bridge arm is not limited to the connection manner shown in fig. 2.
Optionally, fig. 5 is a schematic structural diagram of a further sensor detection circuit provided in the embodiment of the present invention, as shown in fig. 5, when the differential detection sensor 110 of the detection bridge arm 11 includes a first detection sensor 111 and a second detection sensor 112, and the resistance of the sampling bridge arm 12 includes a first resistance R1 and a second resistance R2, the connection manner between the differential detection sensor 110 in the detection bridge arm 11 and the resistances (R1 and R2) in the sampling bridge arm 12 may be: the first end of the first resistor R1 and the first end of the first detection sensor 111 are electrically connected to the first node N1, the second end of the first resistor R1 and the first end of the second resistor R2 are electrically connected to the third node N3, and the second end of the first detection sensor 111 and the first end of the second detection sensor 112 are electrically connected to the fourth node N4; a second end of the second detection sensor 112 and a second end of the second resistor R2 are electrically connected to the second node N2; the first node N1 and the second node N2 are respectively two input ends of the bridge circuit 10 and are respectively and electrically connected with two ends of the excitation signal source AC; the third node N3 and the fourth node N4 are two output terminals of the bridge circuit 10, and are electrically connected to the signal processing circuit 20, respectively. At this time, the first detection sensor 111, the second detection sensor 112, and the first capacitor C1 constitute a resonant circuit.
If the first detection sensor 111 includes the first detection coil L1, the second detection sensor 112 includes the second detection coil L2, and the signal processing circuit 20 can also learn the impedance change condition of the first detection coil L1 and the second detection coil L2 by collecting the electric potentials of the third node N3 and the fourth node N4, so that when the signal processing circuit 20 outputs a detection signal, the position of the rotor in the magnetic levitation motor can be learned, and the detection of the position of the rotor in the magnetic levitation motor can be realized.
Alternatively, the sensor detection circuit may further comprise a first isolation circuit electrically connectable between the input of the bridge circuit and the excitation signal source. The existence of the first isolation circuit can prevent the direct current signal at the excitation signal source side from affecting the resonance signal of the resonance circuit, further improve the signal-to-noise ratio and the anti-interference capability of the sensor detection circuit, and further improve the sensitivity of signal detection.
In an alternative embodiment, as shown in any of figures 6-7, the first isolation circuit 30 may include a second capacitor C2; the first end of the second capacitor C2 is electrically connected to the excitation signal source AC, and the second end of the second capacitor C2 is electrically connected to the input end of the bridge circuit 10. The second capacitor C2 may only have a blocking effect, and at this time, even if the second capacitor C2 and the differential detection sensor 110 form a resonant circuit, the resonant frequency of the resonant circuit is far lower than the excitation frequency of the excitation signal source, so that no requirement is made on the accuracy of the second capacitor C2; or, while the first capacitor C1 and the differential detection sensor 110 form a resonant circuit, the second capacitor C2 may also form a resonant circuit with the differential detection sensor 110, where the resonant frequencies of the two may be equal to the excitation frequency of the excitation signal source, and at this time, the quality factor and the signal-to-noise ratio of the resonant circuit may also be improved on the premise that the second capacitor C2 has a blocking effect, thereby being beneficial to improving the detection sensitivity.
As shown in fig. 6, the second capacitor C2 can prevent the direct current signal at the excitation signal source AC from being transmitted to the bridge circuit 10, and the second capacitor C2 can also form a resonant circuit with the differential detection sensor 110, that is, the first detection sensor 111 and the second detection sensor 112 of the differential detection sensor 110 are connected in parallel and then form a resonant circuit with the second capacitor C2; in this way, when the resonance circuit formed by the first detection sensor 111, the second detection sensor 112 and the first capacitor C1 and the resonance circuit formed by the first detection sensor 111, the second detection sensor 112 and the second capacitor C2 resonate, the quality factor of the circuit is the sum of the quality factors of the two resonance circuits, so that the whole resonance circuit has a higher quality factor, the amplitude of the whole resonance circuit near the resonance frequency is larger, the resonance circuit has the characteristic of narrow bandwidth, resonance signals of other frequencies can be well filtered, the signal-to-noise ratio and the anti-interference capability of the sensor detection circuit can be further improved, and the accuracy and the sensitivity of detecting the position of the rotor in the magnetic levitation motor are further improved.
As shown in fig. 7, the difference from fig. 6 is that the first detection sensor 111, the second detection sensor 112, and the second capacitance C2 of the differential detection sensor 110 constitute a resonance circuit; at this time, the quality factor of the resonant circuit can be improved, so that the sensor detection circuit has higher signal-to-noise ratio and anti-interference capability, thereby improving the detection sensitivity and further improving the accuracy of detecting the position of the rotor in the magnetic levitation motor.
In an alternative embodiment, when the resonant frequency of the resonant circuit formed by the differential detection sensor 110 and the first capacitor C1 is f1, the resonant frequency of the resonant circuit formed by the differential detection sensor 110 and the second capacitor C2 is f2, and the excitation frequency of the excitation signal source AC is f3, there may be: f1 F3 is more than or equal to f2, or f2 is more than or equal to f3 and less than or equal to f1.
Optionally, on the basis of the above embodiment, referring to any one of fig. 8 to 9, the first isolation circuit 30 further includes a first transformer TX1; the first transformer TX1 includes a first primary coil TX11 and a first secondary coil TX12; a first end of the first primary coil TX11 is electrically connected to a second end of the second capacitor C2, and a second end of the first primary coil TX11 is grounded; the first secondary winding TX12 is electrically connected to the input of the bridge circuit 10.
When the differential detection sensor 110 includes at least the first detection coil L1 and the second detection coil L2, if the exciting inductance of the first transformer TX1 is L TX1 The inductance value of the first detection coil L1 and the second detection coil L2 is L 0 Then there should be L TX1 ＞L 0 In a preferred embodiment L TX1 ≥5*L 0 At this time, the first transformer TX1 may be an approximately ideal transformer. The turns ratio between the first primary winding TX11 and the first secondary winding TX12 of the first transformer TX1 may be designed according to the gain requirement, which is not particularly limited in the embodiment of the present invention. The presence of the first transformer TX1 can further reduce the interference of the excitation signal source AC side to the bridge circuit 10, so that the signal-to-noise ratio and the anti-interference capability can be further improved, and the detection accuracy and the sensitivity can be further improved.
It will be appreciated that the structure of the first isolation circuit is not limited to the structure shown in fig. 6-9, but may be any other device capable of transmitting a high-frequency alternating signal, and the embodiment of the present invention does not specifically limit the structure of the first isolation circuit on the premise of realizing the isolation function.
In an alternative embodiment, as shown in fig. 10-12, the first isolation circuit may also include only the second capacitor C2, where the first detection sensor 111 and the second detection sensor 112 include not only the detection coil but also a transformer. At this time, the detection coil may be connected to the bridge circuit 10 through a transformer to isolate the common mode interference, and only extract the differential mode signal, thereby improving the capability of resisting the common mode interference.
In an exemplary embodiment, as shown in fig. 10, the first detection sensor 111 includes a first detection coil L1 and a third transformer TX3; the second detection sensor 112 includes a second detection coil L2 and a fourth transformer TX4; the third transformer TX3 includes a third primary coil TX31 and a third secondary coil TX32; the third primary coil TX31 is electrically connected between the third node N3 and the second node N2; the first and second ends of the third secondary coil TX32 are electrically connected to the first and second ends of the first detection coil L1, respectively; the fourth transformer TX4 includes a fourth primary coil TX41 and a fourth secondary coil TX42; the fourth primary coil TX41 is electrically connected between the fourth node N4 and the second node N2; the first and second ends of the fourth secondary coil TX42 are electrically connected to the first and second ends of the second detection coil L2, respectively. The excitation inductances of the third transformer TX3 and the fourth transformer TX4 may be greater than the inductance values of the first detection coil L1 and the second detection coil L2, and in a preferred embodiment, the excitation inductances of the third transformer TX3 and the fourth transformer TX4 may be greater than five times the inductance values of the first detection coil L1 and the second detection coil L2, and the third transformer TX3 and the fourth transformer TX4 may be approximately ideal transformers. The input balance of the differential detection sensor 110 can be adjusted by resistors R1 and R2 in the sampling circuit 12. Thus, common mode interference can be suppressed, and signal to noise ratio and detection sensitivity are improved.
In another exemplary embodiment, referring to fig. 11, when the first detection sensor 111 includes the first detection coil L1 and the third transformer TX3, and the second detection sensor 112 includes the second detection coil L2 and the fourth transformer TX4, the connection manner of the first detection sensor 111 and the second detection sensor 112 with the third transformer TX3 and the fourth transformer TX4 may be: the third primary coil TX31 is electrically connected between the first node N1 and the fourth node N4; the first and second ends of the third secondary coil TX32 are electrically connected to the first and second ends of the first detection coil L1, respectively; the fourth primary coil TX41 is electrically connected between the fourth node N4 and the second node N2; the first and second ends of the fourth secondary coil TX42 are electrically connected to the first and second ends of the second detection coil L2, respectively. In this connection, the excitation inductances of the third transformer TX3 and the fourth transformer TX4 may be larger than the inductance values of the first detection coil L1 and the second detection coil L2, and in a preferred embodiment, the excitation inductances of the third transformer TX3 and the fourth transformer TX4 may be larger than the inductance values of the first detection coil L1 and the second detection coil L2, which are five times larger, respectively, and the third transformer TX3 and the fourth transformer TX4 are approximate ideal transformers. The input balance of the differential detection sensor 110 can be adjusted by resistors R1 and R2 in the sampling circuit 12. Thus, common mode interference can be suppressed as well, which is beneficial to improving signal-to-noise ratio and detection sensitivity.
In still another exemplary embodiment, as shown in fig. 12, when the resistance of the sampling bridge arm 12 includes a first resistance R1 and a second resistance R2, and the differential detection sensor 110 includes a first detection sensor and a second detection sensor, the first detection sensor may include a first detection coil L1 and a fifth transformer TX5, the fifth transformer TX5 may include a fifth primary coil TX51, a fifth first secondary coil TX52, and a fifth second secondary coil TX53, and the second detection sensor may include a second detection coil L2 and a sixth transformer TX6; the sixth transformer TX6 includes a sixth primary coil TX61, a sixth first secondary coil TX62, and a sixth second secondary coil TX63; wherein, the first end of the fifth primary coil TX51 is electrically connected to the first node N1, and the second end of the fifth primary coil TX51 is electrically connected to the fourth node N4; the fifth a secondary coil TX52, the first detection coil L1, and the first resistor R1 are connected in parallel; a first end of the fifth b secondary winding TX53 is electrically connected to the third node N3, and a second end of the fifth b secondary winding TX53 is electrically connected to the second node N2; a first end of the sixth primary coil TX61 is electrically connected to the first node N1, and a second end of the sixth primary coil TX61 is electrically connected to the third node N3; the sixth first secondary coil TX62, the second detection coil L2, and the second resistor R2 are connected in parallel; the first end of the sixth secondary winding TX63 is electrically connected to the fourth node N4, and the second end of the sixth secondary winding TX63 is electrically connected to the second node N2; at this time, the first node N1 and the second node N2 are two input terminals of the bridge circuit 10 respectively; the third node N3 and the fourth node N4 are two output terminals of the bridge circuit 10. In this connection, the excitation inductances of the fifth transformer TX5 and the sixth transformer TX6 may be larger than the inductance values of the first detection coil L1 and the second detection coil L2, and in a preferred embodiment, the excitation inductances of the fifth transformer TX5 and the sixth transformer TX6 may be larger than the inductance values of the first detection coil L1 and the second detection coil L2 five times, respectively, the fifth transformer TX5 and the sixth transformer TX6 are approximate ideal transformers, and the primary-secondary turn ratios of the fifth transformer TX5 and the sixth transformer TX6 may be 2:1. the input balance of the differential detection sensor 110 can be adjusted by the resistors R1 and R2 in the sampling circuit 12, so that common-mode interference can be suppressed, which is beneficial to improving the signal-to-noise ratio and the detection sensitivity.
Based on the above embodiments, optionally, referring to any of fig. 13 to 17, the sensor detection circuit may further include a second isolation circuit 40 electrically connected between the output terminal of the bridge circuit 10 and the signal processing circuit. The second isolation circuit 40 can directly take out the differential mode signal from the bridge circuit 10, so that the requirement on the common mode input voltage range of the operational amplifier U in the signal processing circuit 20 can be reduced to a great extent, and the influence of common mode interference on the output detection signal is reduced; the output balance of the second isolation circuit is achieved by adjusting the resistance values of the resistors R1 and R2 of the sampling bridge arm 12.
In an alternative embodiment, with continued reference to any one of fig. 13-17, the second isolation circuit 40 may include a second transformer TX2; the second transformer TX2 includes a second primary coil TX21 and a second secondary coil TX22; the second primary coil TX21 is electrically connected to the output terminal of the bridge circuit 10; the second secondary winding TX22 is electrically connected to the signal processing circuit 20. At this time, the second transformer TX2 may directly take out the differential mode signal from the bridge circuit, so that the requirement on the common mode input voltage range of the operational amplifier U of the signal processing circuit 20 is greatly reduced, that is, the influence of the common mode interference on the detection signal can be reduced. Wherein the output balance of the second transformer TX2 is adjusted by sampling the resistors R3 and R4 of the bridge arm 12.
The second transformer TX2 may only play an isolating role, or the second transformer TX2 may also participate in resonance while having an isolating role. When the second transformer TX2 is an approximately ideal transformer, the second transformer TX2 does not participate in resonance, and the first capacitor C1 and the differential detection sensor 100 form a series or parallel resonant circuit, so that the debugging process can be simplified, the second transformer TX2 can isolate the common-mode voltage and only extract the differential-mode signal, and the requirement on the input common-mode voltage range of the operational amplifier in the signal processing circuit 20 is reduced; when the exciting inductance of the second transformer TX2, the differential detection sensor 110 and the first capacitor C form a resonant circuit, the gain can be increased by the turn ratio of the primary and secondary of the second transformer TX2, so that the noise amplification is not increased.
When the differential detection sensor 110 includes at least the first detection coil L1 and the second detection coil L2, if the exciting inductance of the second transformer TX2 is L TX2 The inductance value of the first detection coil L1 and the second detection coil L2 is L 0 Then there should be L TX2 ＞L 0 In a preferred embodiment L TX2 ＞5*L 0 At this time, the second transformer TX2 may be an approximately ideal transformer. The turns ratio between the second primary winding TX21 and the second secondary winding TX22 of the second transformer TX2 may be designed according to the gain requirement, which is not particularly limited in the embodiment of the present invention.
In fig. 13 to 17, the first capacitor C1 is electrically connected to the second secondary winding TX22 of the second transformer TX2, that is, the first end of the first capacitor C1 is electrically connected to the first end of the second secondary winding TX22, and the second end of the first capacitor C1 is electrically connected to the second end of the second secondary winding TX 22. In the embodiment of the invention, the first capacitor may also be electrically connected to the second primary coil in the second transformer.
For example, referring to any one of fig. 18 to 22, a first end of the first capacitor C1 is electrically connected to a first end of the second primary coil TX21, and a second end of the first capacitor C1 is electrically connected to a second end of the second primary coil TX 21. At this time, the resonance circuit formed by the first capacitor C1 and the differential detection sensor 110 is not affected by the exciting inductance of the second transformer TX 2.
It may be appreciated that in the embodiment of the present invention, the sensor detection circuit may include the first isolation circuit and the second isolation circuit at the same time, or may include only the first isolation circuit, or only the second isolation circuit, which may be designed according to actual needs, and the embodiment of the present invention is not limited in this particular manner.
Based on the same inventive concept, the embodiment of the invention also provides a position detection sensor applied to the magnetic suspension motor, wherein the position detection sensor comprises the sensor detection circuit provided by the embodiment of the invention. Therefore, the position detection sensor includes the technical features of the sensor detection circuit provided by the embodiment of the present invention, so that the beneficial effects of the sensor detection circuit provided by the embodiment of the present invention can be achieved, and the same points can be referred to the description of the sensor detection circuit provided by the embodiment of the present invention, and are not repeated herein.
Based on the same inventive concept, the embodiment of the invention also provides a magnetic suspension motor, wherein the magnetic suspension motor is integrated with the position detection sensor provided by the embodiment of the invention. Therefore, the magnetic levitation motor includes the technical features of the position detection sensor provided by the embodiment of the present invention, that is, includes the technical features of the sensor detection circuit provided by the embodiment of the present invention, so that the beneficial effects of the sensor detection circuit provided by the embodiment of the present invention can be achieved.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (21)
1. An eddy current and inductance sensor detection circuit applied to a magnetic levitation motor, which is characterized by comprising:
at least one bridge circuit; the bridge circuit comprises a detection bridge arm and a sampling bridge arm; the detection bridge arm comprises a differential detection sensor formed by a first detection sensor and a second detection sensor; the sampling bridge arm comprises a resistor; the resistor comprises a first resistor and a second resistor; the two input ends of the bridge circuit are electrically or magnetically coupled with an excitation signal source;
At least one first capacitor corresponding to at least one bridge circuit one by one is connected in parallel with two output ends of the bridge circuit, and forms a resonant circuit with the first detection sensor and the second detection sensor of the differential detection sensor;
and the signal processing circuit is used for processing the resonance signal of the resonance circuit.
2. The eddy current, inductive sensor detection circuit of claim 1, further comprising:
the first isolation circuit is electrically connected between the input end of the bridge circuit and the excitation signal source.
3. The eddy current, inductive sensor detection circuit of claim 2, wherein said first isolation circuit comprises a second capacitance;
the first end of the second capacitor is electrically connected with the excitation signal source, and the second end of the second capacitor is electrically connected with the input end of the bridge circuit.
4. The eddy current, inductive sensor detection circuit of claim 3, wherein said first isolation circuit further comprises a first transformer; the first transformer comprises a first primary coil and a first secondary coil;
a first end of the first primary coil is electrically connected with a second end of the second capacitor, and a second end of the first primary coil is grounded; the first secondary coil is electrically connected to an input of the bridge circuit.
5. The eddy current, inductive sensor detection circuit of claim 4, wherein said differential detection sensor comprises at least a first detection coil and a second detection coil;
the excitation inductance of the first transformer is L TX1 The inductance value of the first detection coil and the second detection coil is L 0 ；L TX1 ＞L 0 。
6. The eddy current, inductive sensor detection circuit of claim 5, wherein L TX1 ≥ 5*L 0 。
7. The eddy current, inductive sensor detection circuit according to claim 3, wherein a resonant frequency of a resonant circuit formed by the differential detection sensor and the first capacitor is f1, a resonant frequency of a resonant circuit formed by the second capacitor and the differential detection sensor is f2, and an excitation frequency of the excitation signal source is f3;
wherein, f1 is less than or equal to f3 and less than or equal to f2, or f2 is less than or equal to f3 and less than or equal to f1.
8. The eddy current, inductive sensor detection circuit of claim 1, further comprising:
and the second isolation circuit is electrically connected between the output end of the bridge circuit and the signal processing circuit.
9. The eddy current, inductive sensor detection circuit of claim 8, wherein said second isolation circuit comprises a second transformer; the second transformer comprises a second primary coil and a second secondary coil;
The second primary coil is electrically connected to the output end of the bridge circuit; the second secondary coil is electrically connected with the signal processing circuit.
10. The eddy current, inductive sensor detection circuit of claim 9, wherein a first end of the first capacitor is electrically connected to a first end of the second primary coil and a second end of the first capacitor is electrically connected to a second end of the second primary coil;
alternatively, the first end of the first capacitor is electrically connected to the first end of the second secondary coil, and the second end of the first capacitor is electrically connected to the second end of the second secondary coil.
11. The eddy current, inductive sensor detection circuit of claim 9, wherein the differential detection sensor comprises a first detection coil and a second detection coil;
the excitation inductance of the second transformer is L TX2 The inductance value of the first detection coil and the second detection coil is L 0 The method comprises the steps of carrying out a first treatment on the surface of the Wherein L is TX2 ＞L 0 。
12. The eddy current, inductive sensor detection circuit of claim 11, wherein L TX2 ≥ 5*L 0 。
13. The eddy current, inductive sensor detection circuit of claim 1, wherein,
The first end of the first resistor and the first end of the second resistor are electrically connected to a first node; the second end of the first resistor and the first end of the first detection sensor are electrically connected to a third node; the second end of the second resistor and the first end of the second detection sensor are electrically connected to a fourth node; the second end of the first detection sensor and the second end of the second detection sensor are electrically connected to a second node;
the first node and the second node are respectively two input ends of the bridge circuit; the third node and the fourth node are two output ends of the bridge circuit.
14. The eddy current, inductive sensor detection circuit of claim 13, wherein said first detection sensor comprises a first detection coil and a third transformer; the third transformer comprises a third primary coil and a third secondary coil; the third primary coil is electrically connected between the third node and the second node; the first end and the second end of the third secondary coil are respectively and electrically connected with the first end and the second end of the first detection coil;
the second detection sensor comprises a second detection coil and a fourth transformer; the fourth transformer comprises a fourth primary coil and a fourth secondary coil; the fourth primary coil is electrically connected between the fourth node and the second node; the first end and the second end of the fourth secondary coil are respectively electrically connected with the first end and the second end of the second detection coil.
15. The eddy current, inductive sensor detection circuit of claim 1, wherein,
the first end of the first resistor and the first end of the first detection sensor are electrically connected to a first node; the second end of the first resistor and the first end of the second resistor are electrically connected to a third node; the second end of the first detection sensor and the first end of the second detection sensor are electrically connected to a fourth node; the second end of the second detection sensor and the second end of the second resistor are electrically connected to a second node;
the first node and the second node are respectively two input ends of the bridge circuit; the third node and the fourth node are two output ends of the bridge circuit.
16. The eddy current, inductive sensor detection circuit of claim 15, wherein said first detection sensor comprises a first detection coil and a third transformer; the third transformer comprises a third primary coil and a third secondary coil; the third primary coil is electrically connected between the first node and the fourth node; the first end and the second end of the third secondary coil are respectively and electrically connected with the first end and the second end of the first detection coil;
The second detection sensor comprises a second detection coil and a fourth transformer; the fourth transformer comprises a fourth primary coil and a fourth secondary coil; the fourth primary coil is electrically connected between the fourth node and the second node; the first end and the second end of the fourth secondary coil are respectively electrically connected with the first end and the second end of the second detection coil.
17. The eddy current, inductive sensor detection circuit of claim 1, wherein,
the first detection sensor comprises a first detection coil and a fifth transformer; the fifth transformer comprises a fifth primary coil, a fifth first secondary coil and a fifth second secondary coil; a first end of the five primary coils is electrically connected to a first node, and a second end of the fifth primary coil is electrically connected to a fourth node; the fifth first secondary coil, the first detection coil and the first resistor are connected in parallel; the first end of the fifth second secondary coil is electrically connected to the third node, and the second end of the fifth second secondary coil is electrically connected to the second node;
the second detection sensor comprises a second detection coil and a sixth transformer; the sixth transformer comprises a sixth primary coil, a sixth first secondary coil and a sixth second secondary coil; a first end of the sixth primary coil is electrically connected to the first node, and a second end of the sixth primary coil is electrically connected to the third node; the sixth first secondary coil, the second detection coil and the second resistor are connected in parallel; a first end of the sixth secondary coil is electrically connected to the fourth node, and a second end of the sixth secondary coil is electrically connected to the second node;
The first node and the second node are respectively two input ends of the bridge circuit; the third node and the fourth node are two output ends of the bridge circuit.
18. The eddy current, inductive sensor detection circuit of claim 1, wherein said signal processing circuit includes at least one operational amplifier in one-to-one correspondence with at least one of said bridge circuits;
the non-inverting input end and the inverting input end of the operational amplifier are respectively and electrically connected with the two output ends of the bridge circuit; the output end of the operational amplifier is used for outputting a detection signal.
19. The eddy current, inductive sensor detection circuit of claim 1, wherein at least one of said bridge circuits comprises a first bridge circuit, a second bridge circuit, and a third bridge circuit;
the output ends of the first bridge circuit, the second bridge circuit and the third bridge circuit are respectively connected in parallel with one first capacitor;
the signal processing circuit comprises a first signal processing circuit, a second signal processing circuit and a third signal processing circuit;
the first signal processing circuit is used for processing a resonance signal generated by the resonance circuit formed by the first bridge circuit and the first capacitor;
The second signal processing circuit is used for processing a resonance signal generated by the resonance circuit formed by the second bridge circuit and the first capacitor;
the third signal processing circuit is used for processing a resonance signal generated by the resonance circuit formed by the third bridge circuit and the first capacitor.
20. A position detection sensor for a magnetic levitation motor, comprising: an eddy current, inductive sensor detection circuit for use in a magnetic levitation motor as claimed in any one of claims 1-19.
21. A magnetic levitation motor integrated with the position detection sensor for a magnetic levitation motor of claim 20.
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