CN115586802B - Multimode composite double-layer ultra-precise temperature control device - Google Patents
Multimode composite double-layer ultra-precise temperature control device Download PDFInfo
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- CN115586802B CN115586802B CN202211218937.7A CN202211218937A CN115586802B CN 115586802 B CN115586802 B CN 115586802B CN 202211218937 A CN202211218937 A CN 202211218937A CN 115586802 B CN115586802 B CN 115586802B
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- 239000002131 composite material Substances 0.000 title claims abstract description 42
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 82
- 239000010959 steel Substances 0.000 claims abstract description 82
- 238000007789 sealing Methods 0.000 claims abstract description 65
- 230000005855 radiation Effects 0.000 claims abstract description 56
- 238000001914 filtration Methods 0.000 claims abstract description 25
- 238000001816 cooling Methods 0.000 claims abstract description 23
- 238000004321 preservation Methods 0.000 claims abstract description 6
- 239000002826 coolant Substances 0.000 claims description 22
- 238000007791 dehumidification Methods 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 16
- 238000009413 insulation Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 6
- 238000000746 purification Methods 0.000 claims description 6
- 230000003749 cleanliness Effects 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims 1
- 230000007613 environmental effect Effects 0.000 abstract description 7
- 239000010410 layer Substances 0.000 description 25
- 238000004519 manufacturing process Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 239000002355 dual-layer Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Drying Of Gases (AREA)
- Control Of Temperature (AREA)
Abstract
A multimode composite double-layer ultra-precise temperature control device, belonging to the technical field of precise microenvironment control; a first-stage efficient heat-insulating layer is arranged on the outer side of a first-stage steel plate sealing box with good sealing performance, and a circulating medium pipe is arranged on the inner side of the first-stage steel plate sealing box; a secondary steel plate sealing box with good sealing is arranged in the primary steel plate sealing box, a secondary efficient heat preservation layer is arranged on the outer side of the secondary steel plate sealing box, and a radiation convection dual-mode composite temperature control plate is arranged on the inner side of the secondary steel plate sealing box; the inner sides of the primary steel plate sealing box and the secondary steel plate sealing box are respectively provided with a dehumidifying device, a filtering and purifying device and a sensor, and a cooling assembly is arranged in the secondary steel plate sealing box; the sensor sends the environmental parameters monitored in real time to a master controller, and the master controller regulates and controls the temperatures inside the primary steel plate sealing box and the secondary steel plate sealing box in a radiation convection composite mode; the device solves the problem that the control accuracy and efficiency of the micro-environment temperature are difficult to consider in the prior art.
Description
Technical Field
The invention belongs to the technical field of precise microenvironment control, and particularly relates to a multimode composite double-layer ultra-precise temperature control device.
Background
With the continuous improvement of ultra-precise machining and measuring level, disturbance of environmental parameters such as temperature, humidity, pressure, cleanliness and the like becomes a key factor for restricting the improvement of precision and performance of ultra-precise machining equipment and measuring instruments. Ultra-precise manufacturing equipment such as scanning tunnel microscopes and the like, photoetching machines and the like, has extremely high technical concentration and complexity, and each key index reaches the limit of the prior art capability and represents the highest level of current measurement and processing and manufacturing. Ultra-precise environmental control becomes a key technology of ultra-precise machining equipment and measuring instruments.
In the prior art, patent document with the application number 201810171584.7 discloses a temperature control mode of normal pressure heat radiation: the coarse temperature control clamping cylinder is used for carrying out radiation coupling temperature control on the precise inner temperature control Wen Tongre, and the precise inner temperature control cylinder is used for controlling the inner temperature in a heat radiation mode. The temperature control mode designed by the method omits the heat convection effect of air under normal pressure, and the temperature control power of the coarse temperature control clamping cylinder and the precise inner temperature control cylinder is actually the result of mutual coupling of heat radiation and heat convection because no corresponding decoupling measures are adopted. Therefore, the characteristic of high heat radiation temperature control precision in the scheme is not exerted. The patent document of application number 202110647092.2 discloses a high-precision temperature control device for cross radiation convection, which adopts a temperature control mode of cross radiation convection, and liquid from a water chilling unit is sent to a water separator after passing through a first fine adjustment heating device and a second fine adjustment heating device, and the water separator uniformly sends the liquid to the cross radiation convection device. The flow of the cross radiation convection device is adjusted through the water pump frequency conversion, the heat source change on the measuring platform is automatically adapted, the heat exchange efficiency is improved, the temperature of the water collector is precisely controlled through the fine adjustment heating device, and the purpose that the temperature of the measuring platform is controllable and adjustable is achieved. However, the scheme does not give enough radiation versus temperature control details, and according to the description of the invention, the convection and radiation power of the device cannot be completely decoupled, so that the advantages of high-precision temperature control of heat radiation and rapid temperature control of heat convection cannot be exerted.
Furthermore, the conventional temperature control method only considers the dominant heat transfer method. When the temperature of the circulating water is controlled, only the effect of heat conduction is considered (Zhao Yiwen. Research on immersion liquid high-precision temperature control technology based on active disturbance rejection control. University of science and technology, 2107.); the temperature control of the gas bath is performed by considering only the thermal convection (Zhao Jiangjun. Model and algorithm for the internal gas temperature control of lithography, university of science and technology, 2107.). The single temperature control mode is more and more difficult to meet the requirements of occasions such as industrial production, and the ignored heat transfer mode becomes an important factor for limiting the temperature control precision. Therefore, the vacuum radiation temperature control scheme adopted by the molecular measuring machine developed by NIST suppresses natural convection of air, the copper shell coated by the resistance heating wire coats the measuring core, the surfaces of the shell and the measuring core are plated with matte gold to keep the radiation coupling stability (1.Kramar J,Jun J,Penzes W,et al.THE MOLECULAR MEASURING MACHINE.2008;2.USDepartment of Commerce,NIST.Nanometer Resolution Metrology with the NIST Molecular Measuring Machine.Measurement Science&Technology.). between the shell and the measuring core, the scheme can realize temperature control precision of the magnitude of +/-0.001 ℃, but the response time of the scheme is as long as days or even months, and the requirement of ultra-precision machining manufacturing on efficiency is difficult to meet.
In summary, the requirements of ultra-precise instruments and large ultra-precise manufacturing equipment on micro-environment parameter control are increasingly higher, and the traditional single temperature control mode has low precision and long adjustment time; the composite temperature control mode does not decouple each temperature control power, and cannot exert the advantages of the temperature control precision and efficiency of the composite temperature control mode. None of the above techniques meets the requirements of precision and efficiency of ultra-precision machining equipment and measuring instruments.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provide a multi-mode composite double-layer ultra-precise temperature control device in combination with the requirements of ultra-precise instruments and equipment and large-scale ultra-precise manufacturing equipment on ultra-precise environmental control equipment. The device adopts the temperature interference outside the double-layer structure attenuation device and combines the conduction radiation convection composite temperature control mode to achieve the purpose of meeting the ultra-precise temperature control requirement.
The technical scheme of the invention is as follows:
A second-level steel plate seal box is arranged in the first-level steel plate seal box, and a space is reserved between the second-level steel plate seal box and the first-level steel plate seal box; the first-stage efficient heat preservation layer is fixedly arranged on the outer surface of the side wall of the first-stage steel plate sealing box, the first-stage steel plate sealing box is integrally covered and contained, a circulating medium pipe is fixedly arranged on the inner surface of the side wall of the first-stage steel plate sealing box, the first-stage dehumidification device and the first-stage filtering and purifying device are respectively arranged on the inner side of the first-stage steel plate sealing box, the first-stage dehumidification device and the first-stage filtering and purifying device respectively communicate the inner part of the first-stage steel plate sealing box with the outer part of the box, and the first-stage sensor is arranged in the inner cavity of the first-stage steel plate sealing box; the outer surface of the side wall of the secondary steel plate sealing box is integrally covered with a contained solid-mounted secondary efficient heat-insulating layer, a radiation convection double-mode composite temperature control plate is mounted on the inner surface of the side wall of the secondary steel plate sealing box, and the radiation convection double-mode composite temperature control plate consists of a radiation plate, a convection plate and a heat-insulating layer; the radiation plate and the convection plate are arranged on a plane at intervals, a heat insulation layer is arranged between the radiation plate and the convection plate, and the convection plate is formed by assembling a convection medium inlet pipe, a convection medium outlet pipe, a convection fan and a convection heat exchanger; the secondary dehumidifying device and the secondary filtering and purifying device are respectively arranged on the inner side of the secondary steel plate sealing box, the secondary dehumidifying device and the secondary filtering and purifying device respectively communicate the inner part of the secondary steel plate sealing box with the cavity of the primary steel plate sealing box, the core heating component is positioned in the cavity of the secondary steel plate sealing box, the secondary sensor assembly and the cooling component are arranged in the cavity of the secondary steel plate sealing box, the circulating cooling medium inlet pipe and the circulating cooling medium outlet pipe in the cooling component are both connected with the core heating component, and the temperature sensor in the cooling component is arranged on the circulating cooling medium outlet pipe; the main controller respectively controls the operation of the primary dehumidification device, the secondary dehumidification device, the primary filtering and purifying device, the secondary filtering and purifying device, the primary sensor combination, the secondary sensor combination, the circulating medium pipe, the radiation convection dual-mode composite temperature control plate and the cooling component.
The multimode composite double-layer ultra-precise temperature control device provided by the invention has the following advantages:
(1) The invention adopts a temperature control method compounded by a plurality of heat transfer modes, and improves the temperature control precision and efficiency. The device is provided with a circulating medium pipe for controlling the temperature in the primary steel plate sealing box the secondary steel plate sealing box is provided with a radiation convection dual-mode composite temperature control plate for circulating cooling medium to enter the secondary steel plate sealing box for multi-mode temperature control. The cooling component of the device can rapidly cool the core heating component, control the temperature with high precision, and the radiation convection dual-mode composite temperature control plate can independently adjust the radiation and convection power, thereby realizing good temperature control effect. Solves the problem that the single temperature control mode of the existing instrument equipment is difficult to consider the precision and the efficiency of temperature control. This is one of the innovative points of the present invention that distinguish it from the prior art.
(2) The invention adopts reasonable measures for decoupling temperature control power and ensures the temperature control precision and efficiency of a composite temperature control mode. The conduction cooling power of the cooling component in the secondary steel plate sealing box of the device is controlled by the cooling component, the radiation power on the radiation convection dual-mode composite temperature control plate is controlled by the radiation plate, the convection power is controlled by the convection plate, and the temperature control of the cooling component, the radiation plate and the convection plate are mutually independent. The conduction cooling effect of the cooling component mainly depends on a circulating cooling medium, and temperature crosstalk cannot be formed between the cooling component and the dual-mode composite temperature control mechanism. The radiation plate and the convection assembly are isolated by the heat insulation layer, so that the problem of coupling of composite temperature control power can be solved, advantages of different temperature control modes are complementary, and the problems that the temperature control power of different temperature control modes is difficult to decouple and interfere with each other in the composite temperature control mode of the traditional instrument are solved, and the temperature control precision and efficiency of the composite temperature control mode are difficult to effectively exert are solved. This is the second point of innovation of the present invention to distinguish from the prior art.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a multimode composite double-layer ultra-precise temperature control device of the invention;
FIG. 2 is a schematic view of a circulating medium pipe structure of a multimode composite double-layer ultra-precise temperature control device according to the present invention;
FIG. 3 is a schematic diagram of a dual mode composite temperature control mechanism for protruding radiation convection in a dual layer ultra-precise temperature control device of the present invention;
FIG. 4 is a front view of a protruding convection assembly in a protruding radiation convection dual-mode composite temperature control mechanism in a multi-mode composite dual-layer ultra-precise temperature control device of the present invention;
FIG. 5 is a side view of a protruding convection assembly in a protruding radiation convection dual-mode composite temperature control mechanism in a multi-mode composite dual-layer ultra-precise temperature control device of the present invention;
Part number description in the drawings: the heat-insulating device comprises a 1-stage steel plate sealing box, a 2-stage steel plate sealing box, a 3-stage high-efficiency heat-insulating layer, a 4-stage high-efficiency heat-insulating layer, a 5-stage dehumidifying device, a 6-stage dehumidifying device, a 7-stage filtering and purifying device, a 8-stage filtering and purifying device, a 9-stage sensor, a 10-stage sensor, a 11-circulation medium pipe, a 11-1 circulation medium inflow pipe, a 11-2 circulation medium outflow pipe, a 12 radiation convection double-mode composite temperature control plate, a 12-1 radiation plate, a 12-2 convection plate, a 12-3 heat-insulating layer, a 12-4 convection medium inflow pipe, a 12-5 convection medium outflow pipe, a 12-6 convection fan, a 12-7 convection heat exchanger, a 13 total controller, a 14 core heating component, a 15 cooling component, a 15-1 temperature sensor, a 15-2 circulation cooling medium inflow pipe and a 15-3 circulation cooling medium outflow pipe.
Detailed Description
Specific embodiments of the present invention are given below in conjunction with fig. 1-5.
A secondary steel plate seal box 2 is arranged in the primary steel plate seal box 1, and a space is reserved between the secondary steel plate seal box 2 and the primary steel plate seal box 1; the first-stage efficient heat preservation layer 3 is fixedly arranged on the outer surface of the side wall of the first-stage steel plate seal box 1, the first-stage steel plate seal box 1 is integrally covered and contained, a circulating medium pipe 11 is fixedly arranged on the inner surface of the side wall of the first-stage steel plate seal box 1, the first-stage dehumidification device 5 and the first-stage filtering and purifying device 7 are respectively arranged on the wall plate of the first-stage steel plate seal box 1, the first-stage dehumidification device 5 and the first-stage filtering and purifying device 7 respectively communicate the inner part of the box body of the first-stage steel plate seal box 1 with the outer part of the box body, and the first-stage sensor 9 is arranged in the inner cavity of the box body of the first-stage steel plate seal box 1; the outer surface of the side wall of the secondary steel plate sealing box 2 is integrally covered with a contained fixed secondary efficient heat preservation layer 4, the inner surface of the side wall of the secondary steel plate sealing box 2 is provided with a radiation convection double-mode composite temperature control plate 12, and the radiation convection double-mode composite temperature control plate 12 consists of a radiation plate 12-1, a convection plate 12-2 and a heat insulation layer 12-3; the radiation plate 12-1 and the convection plate 12-2 are arranged on a plane at intervals, a heat insulation layer 12-3 is arranged between the radiation plate 12-1 and the convection plate 12-2, and the convection plate 12-2 is formed by assembling a convection medium inlet pipe 12-4, a convection medium outlet pipe 12-5, a convection fan 12-6 and a convection heat exchanger 12-7; the secondary dehumidifying device 6 and the secondary filtering and purifying device 8 are respectively arranged on the wall plate of the secondary steel plate sealing box 2, the secondary dehumidifying device 6 and the secondary filtering and purifying device 8 respectively communicate the inside of the box body of the secondary steel plate sealing box 2 with the cavity of the primary steel plate sealing box 1, the core heating component 14 is positioned in the cavity of the box body of the secondary steel plate sealing box 2, the secondary sensor assembly 10 and the cooling component 15 are arranged in the cavity of the box body of the secondary steel plate sealing box 2, the circulating cooling medium inlet pipe 15-2 and the circulating cooling medium outlet pipe 15-3 in the cooling component 15 are connected with the core heating component 14, and the temperature sensor 15-1 in the cooling component 15 is arranged on the circulating cooling medium outlet pipe 15-3; the main controller 13 respectively controls the operation of the primary dehumidification device 5, the secondary dehumidification device 6, the primary filtering and purifying device 7, the secondary filtering and purifying device 8, the primary sensor combination 9, the secondary sensor combination 10, the circulating medium pipe 11, the radiation convection dual-mode composite temperature control plate 12 and the cooling component 15.
The primary sensor assembly 9 and the secondary sensor assembly 10 comprise a temperature sensor, a humidity sensor, a pressure sensor and an environment cleanliness sensor.
The circulating medium pipe 11 is formed by connecting a circulating medium inflow pipe 11-1 and a circulating medium outflow pipe 11-2.
The first-stage efficient heat-insulating layer 3 and the second-stage efficient heat-insulating layer 4 adopt vacuum heat-insulating plates.
The heat insulating layer 12-3 adopts a vacuum heat insulating plate.
The core heating component 14 is an area or a component which has high requirements on environmental parameters or seriously affects the operation of instruments and equipment due to heat in ultra-precise measurement and processing and manufacturing equipment in the secondary sealed box 2, and the scheme can realize stable temperature control on the core heating component 14. In ultra-precise environmental control, temperature and humidity are mutually coupled, and fluctuation of humidity directly affects the stability of temperature.
When the device works, the primary steel plate sealing box 1 and the secondary steel plate sealing box 2 are completely sealed to form a closed environment, the primary efficient heat-insulating layer 3 can attenuate the influence of temperature fluctuation outside the device on the interior of the primary steel plate sealing box 1, and the temperature fluctuation outside the device is prevented from being coupled into microenvironments in the primary steel plate sealing box 1 and the secondary steel plate sealing box 2; the second-level efficient heat preservation layer 4 can attenuate the influence of the temperature fluctuation of the first-level steel plate seal box 1 on the inside of the second-level steel plate seal box 2, and prevents the temperature fluctuation in the first-level steel plate seal box 1 from being coupled to the microenvironment in the second-level steel plate seal box 2; the primary dehumidification device 5 and the primary filtration purification device 7 can ensure the safety and stability of the humidity and the cleanliness in the primary steel plate sealing box 1, and the secondary dehumidification device 6 and the secondary filtration purification device 8 can ensure the safety and stability of the humidity and the cleanliness of ultra-precise measurement, processing and manufacturing equipment in the secondary steel plate sealing box 2; the temperature and flow speed of the circulating cooling medium with good temperature control precision can be adjusted to control the temperature of the circulating medium pipe 11, the radiation convection dual-mode composite temperature control plate 12 and the core heating component 14 with high precision; the circulating cooling medium in the circulating medium pipe 11 enters from the circulating medium inflow pipe 11-1 and flows out through the circulating medium outflow pipe 11-2 to participate in the temperature control of the primary steel plate seal box 1; the radiation plate 12-1 of the radiation convection dual-mode composite temperature control plate 12 adopts an electric temperature control mode to control the temperature of the radiation plate, the radiation plate takes part in the control of the microenvironment in the secondary steel plate sealing box 2 in a heat radiation mode, the temperature of the convection heat exchanger 12-7 of the convection plate 12-2 adopts a circulating cooling medium temperature control mode, and the circulating cooling medium with good temperature control precision and adjustable flow rate enters the convection heat exchanger 12-7 from the convection medium inlet pipe 12-4 and flows out from the convection medium outlet pipe 12-5; after the convection fan 12-6 runs, air is subjected to temperature control at the convection heat exchanger 12-7, and the air participates in the control of the microenvironment in the secondary steel plate sealing box 2 in a convection mode, and the heat insulation layer 12-3 isolates heat crosstalk between the radiation plate 12-1 and the convection plate 12-2; the circulating cooling medium cools the core heating component 14 through the circulating cooling medium inlet pipe 15-2, flows out of the circulating cooling medium outlet pipe 15-3, and the temperature sensor 15-1 monitors the temperature of the circulating cooling medium outlet pipe 15-3; the primary sensor combination 9, the secondary sensor combination 10 and the temperature sensor 15-1 send the monitored environmental parameters and the circulated cooling temperature to the master controller 13; the operation of the circulating medium inflow pipe 11-1, the convection medium inflow pipe 12-4, the circulating medium temperature of the circulating cooling medium inflow pipe 15-2, the temperature of the radiation plate 12-1, the rotating speed of the convection fan 12-6, the primary dehumidification device 5, the primary filtration and purification device 7, the secondary dehumidification device 6 and the secondary filtration and purification device 8 are controlled by the overall controller 13.
Claims (5)
1. The utility model provides a compound double-deck ultra-precise temperature control device of multimode which characterized in that: a second-level steel plate sealing box (2) is arranged in the first-level steel plate sealing box (1), and a space is reserved between the second-level steel plate sealing box (2) and the first-level steel plate sealing box (1); the first-stage efficient heat preservation layer (3) is fixedly arranged on the outer side of the side wall of the first-stage steel plate sealing box (1), the first-stage steel plate sealing box (1) is integrally covered and contained, a circulating medium pipe (11) is fixedly arranged on the inner side of the side wall of the first-stage steel plate sealing box (1), the first-stage dehumidification device (5) and the first-stage filtration purification device (7) are respectively arranged on the inner side of the first-stage steel plate sealing box (1), the first-stage dehumidification device (5) and the first-stage filtration purification device (7) respectively communicate the inner part of the first-stage steel plate sealing box (1) with the outer part of the box, and the first-stage sensor (9) is arranged in the inner cavity of the first-stage steel plate sealing box (1); the method comprises the steps that a secondary efficient heat-insulating layer (4) is integrally covered and contained on the outer surface of the side wall of a secondary steel plate sealing box (2), a radiation convection dual-mode composite temperature control plate (12) is arranged on the inner surface of the side wall of the secondary steel plate sealing box (2), and the radiation convection dual-mode composite temperature control plate (12) is composed of a radiation plate (12-1), a convection plate (12-2) and a heat-insulating layer (12-3); the radiation plate (12-1) and the convection plate (12-2) are arranged on a plane at intervals, a heat insulation layer (12-3) is arranged between the radiation plate (12-1) and the convection plate (12-2), and the convection plate (12-2) is formed by assembling a convection medium inlet pipe (12-4), a convection medium outlet pipe (12-5), a convection fan (12-6) and a convection heat exchanger (12-7); the secondary dehumidifying device (6) and the secondary filtering and purifying device (8) are respectively arranged on the inner side of the secondary steel plate sealing box (2), the secondary dehumidifying device (6) and the secondary filtering and purifying device (8) respectively communicate the inner part of the box body of the secondary steel plate sealing box (2) with the cavity of the primary steel plate sealing box (1), the core heating component (14) is positioned in the box cavity of the secondary steel plate sealing box (2), the secondary sensor assembly (10) and the cooling component (15) are arranged in the box cavity of the secondary steel plate sealing box (2), the circulating cooling medium inlet pipe (15-2) and the circulating cooling medium outlet pipe (15-3) in the cooling component (15) are connected with the core heating component (14), and the temperature sensor (15-1) in the cooling component (15) is arranged on the circulating cooling medium outlet pipe (15-3); the main controller (13) respectively controls the operation of the primary dehumidification device (5), the secondary dehumidification device (6), the primary filtering and purifying device (7), the secondary filtering and purifying device (8), the primary sensor combination (9), the secondary sensor combination (10), the circulating medium pipe (11), the radiation convection dual-mode composite temperature control plate (12) and the cooling component (15).
2. The multi-mode composite double-layer ultra-precise temperature control device according to claim 1, wherein: the primary sensor assembly (9) and the secondary sensor assembly (10) comprise a temperature sensor, a humidity sensor, a pressure sensor and an environment cleanliness sensor.
3. The multi-mode composite double-layer ultra-precise temperature control device according to claim 1, wherein: the circulating medium pipe (11) is formed by connecting a circulating medium inflow pipe (11-1) and a circulating medium outflow pipe (11-2).
4. The multi-mode composite double-layer ultra-precise temperature control device according to claim 1, wherein: the heat insulation layer (12-3) adopts a vacuum heat insulation plate.
5. The multi-mode composite double-layer ultra-precise temperature control device according to claim 1, wherein: the first-stage high-efficiency heat-insulating layer (3) and the second-stage high-efficiency heat-insulating layer (4) adopt vacuum heat-insulating plates.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211218937.7A CN115586802B (en) | 2022-10-07 | 2022-10-07 | Multimode composite double-layer ultra-precise temperature control device |
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| CN202211218937.7A CN115586802B (en) | 2022-10-07 | 2022-10-07 | Multimode composite double-layer ultra-precise temperature control device |
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| CN104571186A (en) * | 2015-01-05 | 2015-04-29 | 中国电子科技集团公司第二十二研究所 | High-precision constant temperature control device for microwave radiometer |
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| CN111610811A (en) * | 2020-06-29 | 2020-09-01 | 中铁建设集团有限公司 | Treasure product storage and display microenvironment maintenance system and method based on temperature sensed by treasure product |
| CN113448365A (en) * | 2021-06-10 | 2021-09-28 | 湖北云沛科技有限公司 | High-precision temperature control device for cross radiation convection |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104571186A (en) * | 2015-01-05 | 2015-04-29 | 中国电子科技集团公司第二十二研究所 | High-precision constant temperature control device for microwave radiometer |
| CN110162123A (en) * | 2019-04-30 | 2019-08-23 | 福建九圃生物科技有限公司 | A kind of chamber of precise control of temperature humidity |
| CN111367330A (en) * | 2020-03-05 | 2020-07-03 | 上海交通大学 | Airborne precision measurement instrument temperature control device based on heat pipe heat dissipation |
| CN111610811A (en) * | 2020-06-29 | 2020-09-01 | 中铁建设集团有限公司 | Treasure product storage and display microenvironment maintenance system and method based on temperature sensed by treasure product |
| CN113448365A (en) * | 2021-06-10 | 2021-09-28 | 湖北云沛科技有限公司 | High-precision temperature control device for cross radiation convection |
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