CN115542682B - Double-mode composite low-pressure double-layer ultra-precise temperature control device - Google Patents
Double-mode composite low-pressure double-layer ultra-precise temperature control device Download PDFInfo
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- CN115542682B CN115542682B CN202211218941.3A CN202211218941A CN115542682B CN 115542682 B CN115542682 B CN 115542682B CN 202211218941 A CN202211218941 A CN 202211218941A CN 115542682 B CN115542682 B CN 115542682B
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- 239000002131 composite material Substances 0.000 title claims abstract description 42
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 92
- 239000010959 steel Substances 0.000 claims abstract description 92
- 238000007789 sealing Methods 0.000 claims abstract description 74
- 230000005855 radiation Effects 0.000 claims abstract description 58
- 239000010410 layer Substances 0.000 claims abstract description 29
- 238000001914 filtration Methods 0.000 claims abstract description 25
- 239000002355 dual-layer Substances 0.000 claims abstract description 12
- 238000004321 preservation Methods 0.000 claims abstract description 6
- 238000007791 dehumidification Methods 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000009413 insulation Methods 0.000 claims description 8
- 230000003749 cleanliness Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 3
- 238000000746 purification Methods 0.000 claims 2
- 230000007613 environmental effect Effects 0.000 abstract description 13
- 230000000694 effects Effects 0.000 description 6
- 239000002826 coolant Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004556 laser interferometry Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70633—Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70841—Constructional issues related to vacuum environment, e.g. load-lock chamber
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
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Abstract
A dual-mode composite low-pressure dual-layer ultra-precise temperature control device belongs to the technical field of precise micro-environment control; a first-stage efficient heat-insulating layer is arranged on the outer side of a first-stage steel plate sealing box with good sealing performance, and a circulating medium pipe is arranged on the inner side of the first-stage steel plate sealing box; a secondary steel plate sealing box with good sealing is arranged in the primary steel plate sealing box, a secondary efficient heat preservation layer is arranged on the outer side of the secondary steel plate sealing box, and a radiation convection dual-mode composite temperature control plate is arranged on the inner side of the secondary steel plate sealing box; the inner sides of the primary steel plate sealing box and the secondary steel plate sealing box are respectively provided with a dehumidifying device, a filtering and purifying device and a sensor, and a vacuumizing device is arranged outside the primary steel plate sealing box and the secondary steel plate sealing box; the sensor sends the environmental parameters monitored in real time to the master controller, and the master controller regulates and controls the temperatures inside the primary steel plate sealing box and the secondary steel plate sealing box in a radiation convection composite mode; the device solves the problem that the control accuracy and efficiency of the micro-environment temperature are difficult to consider in the prior art.
Description
Technical Field
The invention belongs to the technical field of precise microenvironment control, and particularly relates to a dual-mode composite low-pressure dual-layer ultra-precise temperature control device.
Background
The measuring precision of the micro-nano coordinate machine reaches the nanometer level, the positioning precision and the alignment precision of the step-and-scan photoetching machine reach the nanometer level, and the high positioning precision and the high movement precision come from the laser interference measuring frame inside the micro-nano coordinate machine. In the operation process of the instrument equipment, environmental parameters such as temperature, humidity, pressure, cleanliness and the like can fluctuate, and if the environmental parameters cannot be controlled, the accuracy of the laser interferometry frame can be obviously reduced, and even the measurement frame can be caused to malfunction. This presents new challenges to environmental parameter control techniques. Ultra-precise environmental control in ultra-precise machining equipment and measuring instruments has become a key technology for the core of such equipment.
In the prior art, patent document with the application number 201810171584.7 discloses a temperature control mode of normal pressure heat radiation: the coarse temperature control clamping cylinder is used for carrying out radiation coupling temperature control on the precise inner temperature control Wen Tongre, and the precise inner temperature control cylinder is used for controlling the inner temperature in a heat radiation mode. The method can realize high-precision temperature control by a thermal radiation temperature control mode, but the temperature control effect of natural convection at normal pressure is not negligible, the volume heat capacity of air is small, and the temperature is easily influenced by the surrounding environment. Therefore, the scheme is actually a compound temperature control mode of heat radiation and heat convection, and the temperature control power of the heat radiation and the heat convection is not decoupled, so that the characteristics of high precision and high speed of the compound temperature control mode are not exerted. The ultra-high vacuum radiation temperature control scheme of 10 -5 Pa adopted by the molecular measuring machine developed by NIST suppresses natural convection interference of air, adjusts the temperature of a current adjusting shell wrapped in a resistance heating wire of a copper shell, wraps a measuring core in the shell, and is plated with matte gold on the surfaces of the shell and the measuring core to maintain stability (1.Kramar J,Jun J,Penzes W,et al.THE MOLECULAR MEASURING MACHINE.2008;2.USDepartment of Commerce,NIST.Nanometer Resolution Metrology with the NIST Molecular Measuring Machine.Measurement Science&Technology.). of radiation coupling between the two.
The patent document with the application number 202110647110.7 discloses a radiation low-pressure environment simulation cabin, which adopts a temperature control mode of low-pressure radiation, uses air with good temperature control to control the temperature of a low-pressure cabin wall, and then uses the heat radiation effect of a cabin wall to control the temperature in the cabin with high precision. However, this approach ignores the effect that thermostatic air can also have on the cabin temperature when the low pressure cabin wall is temperature controlled. In practice, the heat convection effect of the constant temperature air is far greater than the temperature control effect of the heat radiation of the bulkhead, and the advantages of high-precision temperature control and rapid temperature control of the heat radiation cannot be exerted.
In summary, in the face of the increasingly high requirements of ultra-precise instruments and equipment and large ultra-precise manufacturing equipment on micro-environment parameter control, the precision achieved by the traditional normal pressure environmental control mode cannot meet the requirements; the environmental control response time of the high-precision vacuum environmental control mode limits the application scene. Furthermore, the traditional single temperature control mode has low precision and long adjustment time; the composite temperature control mode does not decouple each temperature control power, and cannot exert the advantages of the temperature control precision and efficiency of the composite temperature control mode. None of the above techniques meets the requirements of precision and efficiency of ultra-precision machining equipment and measuring instruments.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provides a dual-mode composite low-pressure dual-layer ultra-precise temperature control device in combination with the requirements of ultra-precise measuring instruments and processing equipment on ultra-precise environmental control equipment. The device adopts a double-layer structure to attenuate the temperature interference outside the device, the inside of the device is in a low-pressure state, and the purpose of meeting and realizing the ultra-precise temperature control requirement is achieved by combining a radiation convection composite temperature control mode.
The purpose of the invention is realized in the following way:
A second-level steel plate seal box is arranged in the first-level steel plate seal box, and a space is reserved between the second-level steel plate seal box and the first-level steel plate seal box; the first-stage efficient heat preservation layer is fixedly arranged on the outer surface of the side wall of the first-stage steel plate sealing box, the first-stage steel plate sealing box is integrally covered and contained, a circulating medium pipe is fixedly arranged on the inner surface of the side wall of the first-stage steel plate sealing box, the first-stage dehumidification device and the first-stage filtering and purifying device are respectively arranged on the inner side of the first-stage steel plate sealing box, the first-stage vacuumizing device is arranged outside the first-stage steel plate sealing box, the first-stage dehumidification device, the first-stage filtering and purifying device and the first-stage vacuumizing device are respectively communicated with the inner side of the first-stage steel plate sealing box and the outer side of the box, and the first-stage sensor is arranged in the inner cavity of the first-stage steel plate sealing box; the outer surface of the side wall of the secondary steel plate sealing box is integrally covered with a contained solid-mounted secondary efficient heat-insulating layer, a radiation convection double-mode composite temperature control plate is mounted on the inner surface of the side wall of the secondary steel plate sealing box, and the radiation convection double-mode composite temperature control plate consists of a radiation plate, a convection plate and a heat-insulating layer; the radiation plate and the convection plate are arranged on a plane at intervals, a heat insulation layer is arranged between the radiation plate and the convection plate, and the convection plate is formed by assembling a convection medium inlet pipe, a convection medium outlet pipe, a convection fan and a convection heat exchanger; the secondary dehumidifying device and the secondary filtering and purifying device are respectively arranged on the inner side of the secondary steel plate sealing box, the secondary vacuumizing device is arranged outside the secondary steel plate sealing box, the interior of the secondary steel plate sealing box body is respectively communicated with the primary steel plate sealing box cavity by the secondary dehumidifying device, the secondary filtering and purifying device and the secondary vacuumizing device, the core heating component is positioned in the secondary steel plate sealing box cavity, and the secondary sensor is arranged in the secondary steel plate sealing box cavity; the main controller respectively controls the operation of the primary dehumidification device, the secondary dehumidification device, the primary filtering and purifying device, the secondary filtering and purifying device, the primary sensor combination, the secondary sensor combination, the circulating medium pipe, the radiation convection dual-mode composite temperature control plate, the primary vacuumizing device and the secondary vacuumizing device.
The invention has the following advantages:
(1) The invention adopts low-pressure temperature control, and takes the control precision and efficiency of the internal micro-environment temperature into account. The primary vacuumizing device and the secondary vacuumizing device in the device can reduce the pressure in the primary steel plate sealing box and the secondary steel plate sealing box to be lower than normal pressure. The interference of natural convection in low-pressure temperature control is effectively suppressed, and compared with the normal pressure state, the temperature control precision can be obviously improved; the temperature control efficiency is still very good compared with the vacuum temperature control. The problem that the control accuracy and the efficiency of the internal micro-environment temperature are difficult to consider in the existing instrument equipment is solved. This is one of the innovative points of the present invention that distinguish it from the prior art.
(2) The invention adopts a temperature control method combining two heat transfer modes, thereby improving the temperature control precision and efficiency. The device comprises a primary steel plate sealing box, a circulating medium pipe, a radiation convection dual-mode composite temperature control plate, a secondary steel plate sealing box and a dual-mode temperature control plate. The radiation convection dual-mode composite temperature control plate can independently adjust radiation and convection power, and achieves good temperature control effect. Solves the problem that the single temperature control mode of the existing instrument equipment is difficult to consider the precision and the efficiency of temperature control. This is the second point of innovation of the present invention to distinguish from the prior art.
(3) The invention adopts reasonable measures for decoupling temperature control power and ensures the temperature control precision and efficiency of a composite temperature control mode. The radiation power on the radiation convection dual-mode composite temperature control plate in the secondary steel plate sealing box is controlled by the radiation plate, the convection power is controlled by the convection plate, the temperature control of the radiation plate and the temperature control of the convection plate are mutually independent, and the radiation plate and the convection plate are isolated by the heat insulation layer between the radiation plate and the convection plate, so that the problem of coupling of the composite temperature control power can be solved, the advantages of different temperature control modes are complemented, and the problem that the temperature control power of different temperature control modes in the composite temperature control mode of the traditional instrument equipment is difficult to decouple and interfere with each other, so that the temperature control precision and efficiency of the composite temperature control mode are difficult to be effectively exerted is solved. This is the third innovation of the present invention from the prior art.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a dual-mode composite low-pressure dual-layer ultra-precise temperature control device of the invention;
FIG. 2 is a schematic diagram of a circulating medium pipe in a dual-mode composite low-pressure dual-layer ultra-precise temperature control device according to the present invention;
FIG. 3 is a schematic diagram of a dual-mode composite temperature control plate with protruding radiation convection in a dual-mode composite low-pressure dual-layer ultra-precise temperature control device according to the present invention;
FIG. 4 is a front view of a protruding convection assembly in a protruding radiation convection dual-mode composite temperature control plate in a dual-mode composite low-pressure dual-layer ultra-precise temperature control device of the present invention;
FIG. 5 is a side view of a protruding convection assembly in a protruding radiation convection dual-mode composite temperature control plate in a dual-mode composite low-pressure dual-layer ultra-precise temperature control device of the present invention;
Part number description in the drawings: 1. the heat-insulating system comprises a first-stage steel plate sealing box, a second-stage steel plate sealing box, a first-stage efficient heat-insulating layer, a second-stage efficient heat-insulating layer, a first-stage dehumidification device, a second-stage dehumidification device, a first-stage filtering and purifying device, a second-stage filtering and purifying device, a first-stage sensor, a second-stage sensor, a first-stage sensor, a circulating medium pipe, a circulating medium inflow pipe, a circulating medium outflow pipe, a radiation convection double-mode composite temperature control plate, a radiation plate, a 12-1 convection plate, a 12-2 convection plate, a 12-3 heat-insulating layer, a 12-4 convection medium inflow pipe, a 12-5 convection medium outflow pipe, a 12-6 convection fan, a 12-7 convection heat exchanger, a total controller, a first-stage vacuumizing device, a 15-stage vacuumizing device and a core heating component.
Detailed Description
Specific embodiments of the present invention are described below with reference to the accompanying drawings.
A secondary steel plate seal box 2 is arranged in the primary steel plate seal box 1, and a space is reserved between the secondary steel plate seal box 2 and the primary steel plate seal box 1; the first-stage efficient heat preservation layer 3 is fixedly arranged on the outer surface of the side wall of the first-stage steel plate seal box 1, the first-stage steel plate seal box 1 is integrally covered and contained, a circulating medium pipe 11 is fixedly arranged on the inner surface of the side wall of the first-stage steel plate seal box 1, the first-stage dehumidification device 5 and the first-stage filtering and purifying device 7 are respectively arranged on the inner side of the first-stage steel plate seal box 1, the first-stage vacuumizing device 14 is arranged outside the first-stage steel plate seal box 1, the first-stage dehumidification device 5, the first-stage filtering and purifying device 7 and the first-stage vacuumizing device 14 respectively communicate the inner part of the box body of the first-stage steel plate seal box 1 with the outer part of the box body, and the first-stage sensor 9 is arranged in the inner cavity of the box body of the first-stage steel plate seal box 1; the outer surface of the side wall of the secondary steel plate sealing box 2 is integrally covered with a contained fixed secondary efficient heat preservation layer 4, the inner surface of the side wall of the secondary steel plate sealing box 2 is provided with a radiation convection double-mode composite temperature control plate 12, and the radiation convection double-mode composite temperature control plate 12 consists of a radiation plate 12-1, a convection plate 12-2 and a heat insulation layer 12-3; the radiation plate 12-1 and the convection plate 12-2 are arranged on a plane at intervals, a heat insulation layer 12-3 is arranged between the radiation plate 12-1 and the convection plate 12-2, and the convection plate 12-2 is formed by assembling a convection medium inlet pipe 12-4, a convection medium outlet pipe 12-5, a convection fan 12-6 and a convection heat exchanger 12-7; the secondary dehumidifying device 6 and the secondary filtering and purifying device 8 are respectively arranged at the inner side of the secondary steel plate sealing box 2, the secondary vacuumizing device 15 is arranged outside the secondary steel plate sealing box 2, the interior of the box body of the secondary steel plate sealing box 2 is respectively communicated with the cavity of the primary steel plate sealing box 1 by the secondary dehumidifying device 6, the secondary filtering and purifying device 8 and the secondary vacuumizing device 15, the core heating component 16 is positioned in the box body cavity of the secondary steel plate sealing box 2, and the secondary sensor 10 is arranged in the box body cavity of the secondary steel plate sealing box 2; the main controller 13 respectively controls the primary dehumidification device 5, the secondary dehumidification device 6, the primary filtering and purifying device 7, the secondary filtering and purifying device 8, the primary sensor combination 9, the secondary sensor combination 10, the circulating medium pipe 11, the radiation convection dual-mode composite temperature control plate 12, the primary vacuumizing device 14 and the secondary vacuumizing device 15.
The primary sensor assembly 9 and the secondary sensor assembly 10 comprise a temperature sensor, a humidity sensor, a pressure sensor and an environment cleanliness sensor.
The circulating medium pipe 11 is formed by connecting a circulating medium inflow pipe 11-1 and a circulating medium outflow pipe 11-2.
The first-stage efficient heat-insulating layer 3 and the second-stage efficient heat-insulating layer 4 adopt vacuum heat-insulating plates.
The heat insulating layer 12-3 adopts a vacuum heat insulating plate. The core heating component 16 is an area and a component which have high requirements on environmental parameters or seriously influence the operation of instruments and equipment due to heat in ultra-precise measurement and processing and manufacturing equipment in the secondary sealed box 2, and the scheme can realize stable temperature control on the core heating component 16.
In ultra-precise environmental control, the temperature, the humidity and the pressure are mutually coupled, and the fluctuation of the humidity and the pressure directly affects the stability of the temperature. Cleanliness is an important influencing factor of pressure, and the number of suspended particles in the air directly influences the pressure which can be achieved.
Under the condition of low pressure, the density of air molecules in the sealed box is reduced, the temperature control effect of heat convection is obviously weakened, and the specific gravity of the corresponding heat radiation temperature control is increased. Compared with a thermal convection mode, the thermal radiation temperature control mode can achieve higher temperature control precision. Therefore, higher temperature control accuracy can be achieved in the secondary seal box 2 in the low-pressure state.
When the device works, the primary steel plate sealing box 1 and the secondary steel plate sealing box 2 are completely sealed to form a closed environment, the primary efficient heat-insulating layer 3 can attenuate the influence of temperature fluctuation outside the device on the interior of the primary steel plate sealing box 1, and the temperature fluctuation outside the device is prevented from being coupled into microenvironments in the primary steel plate sealing box 1 and the secondary steel plate sealing box 2; the second-level efficient heat preservation layer 4 can attenuate the influence of the temperature fluctuation of the first-level steel plate seal box 1 on the inside of the second-level steel plate seal box 2, and prevents the temperature fluctuation in the first-level steel plate seal box 1 from being coupled to the microenvironment in the second-level steel plate seal box 2; the primary dehumidification device 5, the primary filtering and purifying device 7 and the primary vacuumizing device 14 can ensure the safety and stability of humidity, cleanliness and pressure in the primary steel plate sealing box 1, and the secondary dehumidification device 6, the secondary filtering and purifying device 8 and the secondary vacuumizing device 15 can ensure the safety and stability of the humidity, cleanliness and pressure of ultra-precise measurement, processing and manufacturing equipment in the secondary steel plate sealing box 2; the temperature and flow speed of the circulating cooling medium with good temperature control precision can be adjusted to control the temperature of the circulating medium pipe 11, the radiation convection dual-mode composite temperature control plate 12 and the core heating component 16 with high precision; the circulating cooling medium in the circulating medium pipe 11 enters from the circulating medium inflow pipe 11-1 and flows out through the circulating medium outflow pipe 11-2 to participate in the temperature control of the primary steel plate seal box 1; the radiation plate 12-1 of the radiation convection dual-mode composite temperature control plate 12 adopts an electric temperature control mode to control the temperature of the radiation plate, the radiation plate takes part in the control of the microenvironment in the secondary steel plate sealing box 2 in a heat radiation mode, the temperature of the convection heat exchanger 12-7 of the convection plate 12-2 adopts a circulating cooling medium temperature control mode, and the circulating cooling medium with good temperature control precision and adjustable flow rate enters the convection heat exchanger 12-7 from the convection medium inlet pipe 12-4 and flows out from the convection medium outlet pipe 12-5; after the convection fan 12-6 operates, air is subjected to temperature control at the convection heat exchanger 12-7, and the air participates in the control of microenvironment in the secondary steel plate sealing box 2 in a convection mode, and the heat insulation layer 12-3 isolates heat crosstalk between the radiation plate 12-1 and the convection plate 12-2; the primary sensor combination 9 and the secondary sensor combination 10 send the monitored environmental parameters to the overall controller 13; the operation of the circulating medium inflow pipe 11-1, the circulating medium temperature of the convection medium inflow pipe 12-4, the temperature of the radiation plate 12-1, the rotating speed of the convection fan 12-6, the primary dehumidification device 5, the primary filtering and purifying device 7, the primary vacuumizing device 14, the secondary dehumidification device 6, the secondary filtering and purifying device 8 and the secondary vacuumizing device 15 are controlled by the master controller 13.
In the initial stage of device closing, the primary vacuumizing device 14 and the secondary vacuumizing device 15 maintain the original normal pressure in the device unchanged, and the circulating medium pipe 11 and the radiation convection dual-mode composite temperature control plate 12 rapidly control the temperature in the device to be near the target temperature; the primary vacuumizing device 14 and the secondary vacuumizing device 15 start to work until the target pressure is reduced and kept unchanged, and the overall controller 13 adjusts the stability of the internal environment of the device. Before the device is started, the primary vacuumizing device 14 and the secondary vacuumizing device 15 gradually restore the air pressure in the primary steel plate sealing box 1 and the secondary steel plate sealing box 2 to normal pressure; during which the overall controller 13 adjusts the in-plant environmental parameters to be consistent with the outside of the plant.
Claims (5)
1. The utility model provides a double-deck ultra-precise temperature control device of compound low pressure of bimodulus which characterized in that: a second-level steel plate sealing box (2) is arranged in the first-level steel plate sealing box (1), and a space is reserved between the second-level steel plate sealing box (2) and the first-level steel plate sealing box (1); the first-stage efficient heat preservation layer (3) is fixedly arranged on the outer side of the side wall of the first-stage steel plate sealing box (1), the first-stage steel plate sealing box (1) is integrally covered and contained, a circulating medium pipe (11) is fixedly arranged on the inner side of the side wall of the first-stage steel plate sealing box (1), the first-stage dehumidification device (5) and the first-stage filtering purification device (7) are respectively arranged on the inner side of the first-stage steel plate sealing box (1), the first-stage vacuumizing device (14) is arranged outside the first-stage steel plate sealing box (1), the first-stage dehumidification device (5), the first-stage filtering purification device (7) and the first-stage vacuumizing device (14) are respectively used for communicating the inner part of the box body of the first-stage steel plate sealing box (1) with the outer part of the box, and the first-stage sensor (9) is arranged in the inner cavity of the box body of the first-stage steel plate sealing box (1); the method comprises the steps that a secondary efficient heat-insulating layer (4) is integrally covered and contained on the outer surface of the side wall of a secondary steel plate sealing box (2), a radiation convection dual-mode composite temperature control plate (12) is arranged on the inner surface of the side wall of the secondary steel plate sealing box (2), and the radiation convection dual-mode composite temperature control plate (12) is composed of a radiation plate (12-1), a convection plate (12-2) and a heat-insulating layer (12-3); the radiation plate (12-1) and the convection plate (12-2) are arranged on a plane at intervals, a heat insulation layer (12-3) is arranged between the radiation plate (12-1) and the convection plate (12-2), and the convection plate (12-2) is formed by assembling a convection medium inlet pipe (12-4), a convection medium outlet pipe (12-5), a convection fan (12-6) and a convection heat exchanger (12-7); the secondary dehumidifying device (6), the secondary filtering and purifying device (8) are respectively arranged on the inner side of the secondary steel plate sealing box (2), the secondary vacuumizing device (15) is arranged outside the secondary steel plate sealing box (2), the secondary dehumidifying device (6), the secondary filtering and purifying device (8) and the secondary vacuumizing device (15) respectively communicate the inner part of the box body of the secondary steel plate sealing box (2) with the cavity of the primary steel plate sealing box (1), the core heating component (16) is positioned in the box body cavity of the secondary steel plate sealing box (2), and the secondary sensor assembly (10) is arranged in the box body cavity of the secondary steel plate sealing box (2); the main controller (13) respectively controls the operation of the primary dehumidification device (5), the secondary dehumidification device (6), the primary filtering and purifying device (7), the secondary filtering and purifying device (8), the primary sensor combination (9), the secondary sensor combination (10), the circulating medium pipe (11), the radiation convection dual-mode composite temperature control plate (12), the primary vacuumizing device (14) and the secondary vacuumizing device (15).
2. The dual-mode composite low-pressure dual-layer ultra-precise temperature control device according to claim 1, wherein: the primary sensor assembly (9) and the secondary sensor assembly (10) comprise a temperature sensor, a humidity sensor, a pressure sensor and an environment cleanliness sensor.
3. The dual-mode composite low-pressure dual-layer ultra-precise temperature control device according to claim 1, wherein: the circulating medium pipe (11) is formed by connecting a circulating medium inflow pipe (11-1) and a circulating medium outflow pipe (11-2).
4. The dual-mode composite low-pressure dual-layer ultra-precise temperature control device according to claim 1, wherein: the heat insulation layer (12-3) adopts a vacuum heat insulation plate.
5. The dual-mode composite low-pressure dual-layer ultra-precise temperature control device according to claim 1, wherein: the first-stage high-efficiency heat-insulating layer (3) and the second-stage high-efficiency heat-insulating layer (4) adopt vacuum heat-insulating plates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211218941.3A CN115542682B (en) | 2022-10-07 | 2022-10-07 | Double-mode composite low-pressure double-layer ultra-precise temperature control device |
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| CN104571186A (en) * | 2015-01-05 | 2015-04-29 | 中国电子科技集团公司第二十二研究所 | High-precision constant temperature control device for microwave radiometer |
| CN207799502U (en) * | 2017-12-19 | 2018-08-31 | 中国建材检验认证集团股份有限公司 | A kind of environmental chamber control system |
| CN110162123A (en) * | 2019-04-30 | 2019-08-23 | 福建九圃生物科技有限公司 | A kind of chamber of precise control of temperature humidity |
| CN111367330A (en) * | 2020-03-05 | 2020-07-03 | 上海交通大学 | Airborne precision measurement instrument temperature control device based on heat pipe heat dissipation |
| CN212009414U (en) * | 2020-06-29 | 2020-11-24 | 中铁建设集团有限公司 | Treasure article storage and display microenvironment maintenance system |
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| CN104571186A (en) * | 2015-01-05 | 2015-04-29 | 中国电子科技集团公司第二十二研究所 | High-precision constant temperature control device for microwave radiometer |
| CN207799502U (en) * | 2017-12-19 | 2018-08-31 | 中国建材检验认证集团股份有限公司 | A kind of environmental chamber control system |
| CN110162123A (en) * | 2019-04-30 | 2019-08-23 | 福建九圃生物科技有限公司 | A kind of chamber of precise control of temperature humidity |
| CN111367330A (en) * | 2020-03-05 | 2020-07-03 | 上海交通大学 | Airborne precision measurement instrument temperature control device based on heat pipe heat dissipation |
| CN212009414U (en) * | 2020-06-29 | 2020-11-24 | 中铁建设集团有限公司 | Treasure article storage and display microenvironment maintenance system |
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