CN115561589A - EFPI optical fiber ultrasonic sensor for discharge detection and packaging method - Google Patents

EFPI optical fiber ultrasonic sensor for discharge detection and packaging method Download PDF

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Publication number
CN115561589A
CN115561589A CN202211158287.1A CN202211158287A CN115561589A CN 115561589 A CN115561589 A CN 115561589A CN 202211158287 A CN202211158287 A CN 202211158287A CN 115561589 A CN115561589 A CN 115561589A
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CN
China
Prior art keywords
optical fiber
packaging
sensitive
ultrasonic sensor
efpi
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CN202211158287.1A
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Chinese (zh)
Inventor
倪鹤立
司文荣
傅晨钊
虞益挺
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State Grid Shanghai Electric Power Co Ltd
East China Power Test and Research Institute Co Ltd
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State Grid Shanghai Electric Power Co Ltd
East China Power Test and Research Institute Co Ltd
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Application filed by State Grid Shanghai Electric Power Co Ltd, East China Power Test and Research Institute Co Ltd filed Critical State Grid Shanghai Electric Power Co Ltd
Priority to CN202211158287.1A priority Critical patent/CN115561589A/en
Publication of CN115561589A publication Critical patent/CN115561589A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • G01R31/1209—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing using acoustic measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • G01R31/1218—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing using optical methods; using charged particle, e.g. electron, beams or X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • G01R31/1227—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

The invention relates to an EFPI optical fiber ultrasonic sensor for discharge detection and a packaging method thereof, wherein the sensor is fixedly connected with an optical fiber and comprises a connecting plate, a sensitive membrane, a packaging shell and a packaging cap; the connecting plate is provided with a small hole and a large hole of a stepped hole which are coaxial, and the end face of the small hole far away from the large hole is provided with a sensitive membrane; the optical fiber is installed and fixed in the large hole; a small hole space between the optical fiber and the sensitive diaphragm forms a Fabry-Perot cavity; the packaging shell is arranged on the outer side of the optical fiber and the connecting plate, and has an inner cavity shape for gathering sound waves on the sensitive membrane; the packaging cap is arranged on the outer side of the port of the packaging shell, the packaging cap is in the shape of a sound gathering cylinder, and a through hole is formed in the packaging cap. Compared with the prior art, the invention has the advantages of improving the measurement stability, improving the signal-to-noise ratio and the sensitivity of the sensor, simplifying the construction process of the Fabry-Perot cavity, reducing the packaging volume of the probe and the like.

Description

EFPI optical fiber ultrasonic sensor for discharge detection and packaging method
Technical Field
The invention relates to a discharge detection technology, in particular to an EFPI (extended edge plasma display interface) optical fiber ultrasonic sensor for discharge detection and a packaging method
Background
The EFPI optical fiber ultrasonic sensor has excellent performances of high sensitivity, stability and positioning capability, and has potential application value in the aspect of detecting partial discharge of power equipment.
At present, a common EFPI optical fiber ultrasonic sensor probe encapsulation structure is shown in fig. 1, in the structure, the end face of an optical fiber 1 and a sensitive diaphragm 2 are fixed completely by means of a bonding process, a straight stepped port is adopted as an inner cavity shape, and a straight and unsealed encapsulation cap 3 is adopted.
The prior art has various defects such as lower rigidity of a connection point constructed by a fixing mode purely depending on a glue dripping process, and easy influence of a measured physical quantity and environment, further optical fiber vibration and signal noise generation; the optical fiber and the sensitive diaphragm are exposed, so that the optical fiber and the sensitive diaphragm are easily polluted and damaged by the environment, and cannot be stably influenced by medium viscous damping and additional mass in a medium; the inner cavity shape of the straight stepped port and the acoustic energy loss of the packaging cap are serious, the performance of the sensitive membrane cannot be utilized to the maximum, and the advantage in the aspects of signal to noise ratio and sensitivity is not achieved.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide an EFPI optical fiber ultrasonic sensor for discharge detection and a packaging method.
The purpose of the invention can be realized by the following technical scheme:
the invention provides an EFPI optical fiber ultrasonic sensor for discharge detection, which is fixedly connected with an optical fiber and comprises a connecting plate, a sensitive membrane, a packaging shell and a packaging cap; the connecting plate is provided with a small hole and a large hole of a stepped hole which are coaxial, and the end face of the small hole far away from the large hole is provided with a sensitive membrane; the optical fiber is installed and fixed in the large hole; a small hole space between the optical fiber and the sensitive diaphragm forms a Fabry-Perot cavity; the packaging shell is arranged on the outer side of the optical fiber and the connecting plate, and the packaging shell has an inner cavity shape gathering sound waves on the sensitive membrane; the packaging cap is arranged on the outer side of the port of the packaging shell, the packaging cap is in a sound gathering cylinder shape, and a through hole is formed in the packaging cap.
As a preferred technical scheme, the connecting plate and the sensitive membrane are integrally etched.
As a preferred technical scheme, the sensitive membrane is a beam support type sensitive membrane.
Preferably, the package case is made of a resin material.
Preferably, the sealing cap is made of a resin material.
As a preferred technical scheme, the packaging shell, the optical fiber and the connecting plate are fixed in a glue sealing mode through the connecting points.
As a preferred technical scheme, a waterproof dustproof sound-transmitting film is arranged between the packaging cap and the packaging shell.
As a preferred technical scheme, the waterproof dustproof sound-transmitting membrane is fixed between the packaging shell and the packaging cap in a connection point glue sealing mode.
As another aspect of the present invention, there is provided a packaging method for packaging the above EFPI optical fiber ultrasonic sensor for discharge detection, the packaging method comprising the steps of:
assembling a Fabry-Perot cavity by using the optical fiber, the connecting plate and the sensitive membrane;
the packaging shell and the packaging cap are made of resin materials;
fixing the packaging shell on the outer sides of the optical fiber and the connecting plate in a connection point glue sealing mode;
fixing the packaging cap on the outer side of the port of the packaging shell in a connection point glue sealing mode;
the waterproof dustproof sound-transmitting film is fixed between the packaging shell and the packaging cap in a connection point glue sealing mode.
As a preferred technical solution, the step of assembling the fabry perot chamber comprises:
placing one end of the optical fiber and the sensitive diaphragm on a three-axis workbench, roughly adjusting the relative position and angle of the optical fiber and the sensitive diaphragm, ensuring that incident light is vertically incident to the central position of the sensitive diaphragm, and observing the bonding degree of the sensitive diaphragm and whether the sensitive diaphragm is damaged;
according to the interference spectrum and a combined cavity length calculation formula, the relative position of the optical fiber and the sensitive diaphragm is finely adjusted through a three-axis adjusting platform until the required cavity length and the required reflection light intensity are obtained;
the angle and the position of the optical fiber and the sensitive diaphragm are properly finely adjusted to enable the end face of the optical fiber ferrule to be parallel to the end face of the sensitive diaphragm, the optical fiber is bonded by adopting a glue dripping process, and the end face of the optical fiber ferrule and the end face of the sensitive diaphragm are fixed to form a Fabry-Perot cavity with a set cavity length;
and (5) checking whether the sensitive membrane is damaged or not and whether an external signal can be detected or not.
Compared with the prior art, the invention has the following advantages:
1) The packaging shell is in a shape of an inner cavity which has stronger sound gathering and smaller dissipation and can gather sound waves like an ultrasonic transducer port structure, so that the sound pressure received by the tail end of the inner cavity is greatly improved, the maximum value of the sound pressure is at the center of the sensitive diaphragm, the central deformation of the sensitive diaphragm has the greatest influence on the cavity length of the Fabry-Perot cavity, and the sensitivity of the sensor can be obviously improved due to the change.
2) The invention adopts the packaging cap with the sound gathering tube, can gather sound energy in a certain range at the front end of the sensor probe, increases the sound energy received by the sensor and improves the sound wave detection capability of the sensor probe. Meanwhile, the hole structure can improve the high-frequency sound transmission performance, the sound pressure of the sensitive membrane in the packaging structure is obviously improved, and the EFPI ultrasonic sensor is facilitated to receive more sound energy.
3) The invention mainly strengthens the sealing property of the packaging structure by adopting the dustproof and waterproof sound-transmitting membrane with smaller acoustic impedance and better isolation effect on liquid and the mode of gluing and sealing the connecting points, avoids the contact of the liquid and the sensitive membrane and prevents the attenuation of the vibration energy of the membrane caused by the factors of the viscous resistance of a medium and the like.
4) The Fabry-Perot cavity is constructed by adopting a mode of bonding the optical fiber and the connecting plate, the process of fixing the sensitive structure by using a 3D printing support before bonding the optical fiber is abandoned, the construction process of the Fabry-Perot cavity is simplified, and the packaging volume of the probe is reduced.
Drawings
Fig. 1 is a plan view of a probe structure of a common EFPI fiber-optic ultrasonic sensor.
Fig. 2 is a view of the structural plane of the present invention.
FIG. 3 is a plan view of the structure of the connecting plate and the sensitive diaphragm of the present invention.
The reference numbers in the figures indicate:
1. the optical fiber, 2, the existing sensitive membrane, 3, the unsealed packaging cap, 4, the existing packaging shell, 5, the existing Fabry-Perot cavity, 6, the sensitive membrane, 7, the connecting plate, 71, the small hole, 72, the large hole, 8, the packaging shell, 9, the waterproof dustproof sound-transmitting membrane, 10, the packaging cap, 11 and the Fabry-Perot cavity.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, shall fall within the scope of protection of the present invention.
As shown in figure 2, the invention relates to an EFPI optical fiber ultrasonic sensor for discharge detection and a packaging method thereof, and the integral structure comprises an optical fiber 1, a connecting plate 7, a sensitive membrane 6, a packaging shell 8, a waterproof dustproof sound-transmitting membrane 9 and a packaging cap 10.
As shown in fig. 3. The connecting plate 7 is provided with coaxial stepped holes in a structure of a large hole 72 and a small hole 71,
the end face, far away from the large hole 72, in the small hole 71 is provided with the sensitive membrane 6, the connecting plate 7 and the sensitive membrane 6 are etched integrally, and the large hole 72 is used for fixing the optical fiber 1.
The optical fiber 1 and the connecting plate 7 are used for sensing the membrane 6, and a Fabry-Perot cavity 11 for discharge detection is assembled.
The assembly of the Fabry-Perot cavity 11 for discharge detection comprises coarse coaxiality adjustment, cavity length adjustment, fine parallelism adjustment and adhesion and detection 4 steps.
The step 1: and (4) coarse coaxiality adjustment. The tail end of the optical fiber 1 and the sensitive diaphragm 6 are placed on a precise three-axis workbench, the relative position and the angle of the optical fiber 1 and the sensitive diaphragm 6 are roughly adjusted, so that the optical fiber 1 and the sensitive diaphragm 6 have better coaxiality, the incident light is ensured to be vertically incident to the central position of the diaphragm, and the attachment degree and whether damage occurs or not are indirectly observed through an interference spectrum displayed on an upper computer.
The step 2: and (4) adjusting the cavity length. On the basis of the step 1, according to an interference spectrum and a combined cavity length calculation formula, the relative positions of the optical fiber 1 and the sensitive diaphragm 6 are finely adjusted through a precise three-axis adjusting platform until the required cavity length and better reflected light intensity are obtained.
The step 3: fine adjustment of parallelism and bonding. On the basis of the step 2, the angles and the positions of the optical fiber 1 and the sensitive membrane 6 are properly finely adjusted, so that the end face of the ferrule of the optical fiber 1 and the end face of the sensitive membrane 6 have higher parallelism. The optical fiber 1 is bonded by adopting a glue dripping process, and the end face of the optical fiber ferrule and the end face of the sensitive diaphragm are accurately fixed to form a Fabry-Perot cavity with a set cavity length.
And 4, the step of: and (6) detecting. On the basis of step 3, it is checked whether the sensitive membrane 6 is damaged and whether an external signal can be detected.
The packaging shell 8, the packaging cap 10 and the waterproof dustproof sound-transmitting film 9 are used for packaging a structure forming a Fabry-Perot cavity 11.
The packaging shell 8 is made of resin materials through 3D printing, is similar to the shape of an ultrasonic transducer port, and has an inner cavity shape for gathering sound waves on the sensitive membrane 6. The sound pressure received by the tail end of the inner cavity is greatly improved, the maximum value of the sound pressure is at the center of the sensitive diaphragm 6, the central deformation of the sensitive diaphragm has the greatest influence on the cavity length of the Fabry-Perot cavity, and the sensitivity of the sensor can be obviously improved
The Fabry-Perot cavity 11 for discharge detection is fixed on the packaging shell 8 in a connection point glue sealing mode, the sealing performance of the packaging structure can be strengthened mainly in the connection point glue sealing mode, liquid is prevented from contacting the sensitive membrane, and attenuation of membrane vibration energy caused by factors such as viscous resistance of media is prevented.
The packaging cap 10 is made of a resin material through 3D printing, has a sound gathering cylinder shape, and is provided with through holes at equal intervals at the top. The acoustic energy in a certain range at the front end of the sensor probe can be gathered, the acoustic energy received by the sensor is increased, and the capability of the sensor probe for detecting the acoustic wave is improved. Meanwhile, the hole structure can improve the high-frequency sound transmission performance, the sound pressure of the sensitive membrane in the packaging structure is obviously improved, and the EFPI ultrasonic sensor is facilitated to receive more sound energy.
The waterproof dustproof sound-transmitting membrane 9 is fixed on the packaging shell 8 and the packaging cap 10 in a mode of gluing and sealing through a connecting point, and the waterproof dustproof sound-transmitting membrane 9 has small acoustic impedance and has good isolation effect on liquid.
The sensitive membrane 6 is a beam support type sensitive membrane.
The packaging method abandons the process of fixing the sensitive structure by using a 3D printing support before bonding the optical fiber, simplifies the construction process of the Fabry-Perot cavity, and reduces the packaging volume of the probe
While the invention has been described with reference to specific embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. An EFPI optical fiber ultrasonic sensor for discharge detection is connected and fixed with an optical fiber (1), and is characterized by comprising a connecting plate (7), a sensitive membrane (6), a packaging shell (8) and a packaging cap (10); a small stepped hole (71) and a large hole (72) which are coaxial are formed in the connecting plate (7), and a sensitive membrane (6) is arranged on the end face, far away from the large hole (72), of the small hole (71); the optical fiber (1) is installed and fixed in the large hole (72); a Fabry-Perot cavity (11) is formed in a small hole (71) space between the optical fiber (1) and the sensitive membrane (6); the packaging shell (8) is arranged on the outer sides of the optical fiber (1) and the connecting plate (7), and the packaging shell (8) has an inner cavity shape for gathering sound waves on the sensitive membrane (6); the packaging cap (10) is installed on the outer side of the port of the packaging shell (8), the packaging cap (10) is in a sound gathering cylinder shape, and a through hole is formed in the packaging cap (10).
2. The EFPI optical fiber ultrasonic sensor for discharge detection as claimed in claim 1, wherein the connecting plate (7) and the sensitive membrane (6) are integrally etched.
3. The EFPI fiber ultrasonic sensor for discharge detection as claimed in claim 1, wherein the sensing diaphragm (6) is a beam support type sensing diaphragm.
4. The EFPI optical fiber ultrasonic sensor for discharge detection according to claim 1, wherein the package case (8) is made of a resin material.
5. The EFPI optical fiber ultrasonic sensor for discharge detection as claimed in claim 1, wherein the encapsulation cap (10) is made of a resin material.
6. The EFPI optical fiber ultrasonic sensor for discharge detection according to claim 1, wherein the packaging shell (8) is fixed with the optical fiber (1) and the connecting plate (7) by gluing and sealing connection points.
7. The EFPI optical fiber ultrasonic sensor for discharge detection as claimed in claim 1, wherein a waterproof dustproof sound-transmitting film (9) is arranged between the packaging cap (10) and the packaging shell (8).
8. The EFPI optical fiber ultrasonic sensor for discharge detection as claimed in claim 7, wherein the waterproof dustproof sound-permeable membrane (9) is fixed between the packaging shell (8) and the packaging cap (10) by gluing the connection points.
9. A packaging method for an EFPI fiber optic ultrasonic sensor for discharge detection according to any one of claims 1 to 8, comprising the steps of:
assembling a Fabry-Perot cavity (11) by using the optical fiber (1), the connecting plate (7) and the sensitive diaphragm (6);
the packaging shell (8) and the packaging cap (10) are made of resin materials;
the packaging shell (8) is fixed on the outer sides of the optical fiber (1) and the connecting plate (7) in a connection point glue sealing mode;
the packaging cap (10) is fixed on the outer side of the port of the packaging shell (8) in a connection point glue sealing mode;
the waterproof dustproof sound-transmitting film (9) is fixed between the packaging shell (8) and the packaging cap (10) in a connection point glue sealing mode.
10. The packaging method according to claim 9, characterized in that the step of assembling the fabry chamber (11) comprises:
placing one end of the optical fiber (1) and the sensitive diaphragm (6) on a three-axis workbench, roughly adjusting the relative position and angle of the optical fiber (1) and the sensitive diaphragm (6), ensuring that incident light vertically enters the central position of the sensitive diaphragm (6), and observing the attaching degree of the sensitive diaphragm (6) and whether the sensitive diaphragm (6) is damaged;
according to the interference spectrum and a combined cavity length calculation formula, the relative positions of the optical fiber (1) and the sensitive diaphragm (6) are finely adjusted through a three-axis adjusting platform until the required cavity length and the required reflected light intensity are obtained;
the angle and the position of the optical fiber (1) and the sensitive diaphragm (6) are properly adjusted in a fine mode, so that the end face of the ferrule of the optical fiber (1) is parallel to the end face of the sensitive diaphragm (6), the optical fiber (1) is bonded by adopting a glue dripping process, and the end face of the ferrule of the optical fiber (1) and the end face of the sensitive diaphragm (6) are fixed to form a Fabry-Perot cavity (11) with a set cavity length;
and (4) checking whether the sensitive membrane (6) is damaged or not and whether an external signal can be detected or not.
CN202211158287.1A 2022-09-22 2022-09-22 EFPI optical fiber ultrasonic sensor for discharge detection and packaging method Pending CN115561589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211158287.1A CN115561589A (en) 2022-09-22 2022-09-22 EFPI optical fiber ultrasonic sensor for discharge detection and packaging method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211158287.1A CN115561589A (en) 2022-09-22 2022-09-22 EFPI optical fiber ultrasonic sensor for discharge detection and packaging method

Publications (1)

Publication Number Publication Date
CN115561589A true CN115561589A (en) 2023-01-03

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202211158287.1A Pending CN115561589A (en) 2022-09-22 2022-09-22 EFPI optical fiber ultrasonic sensor for discharge detection and packaging method

Country Status (1)

Country Link
CN (1) CN115561589A (en)

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