CN109520665A - A kind of differential pressure fibre-optical probe structure and its differential pressure fibre optical sensor - Google Patents
A kind of differential pressure fibre-optical probe structure and its differential pressure fibre optical sensor Download PDFInfo
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- CN109520665A CN109520665A CN201811599062.3A CN201811599062A CN109520665A CN 109520665 A CN109520665 A CN 109520665A CN 201811599062 A CN201811599062 A CN 201811599062A CN 109520665 A CN109520665 A CN 109520665A
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- pressure
- differential pressure
- guide rod
- fibre
- sensitive diaphragm
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/14—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measurement of pressure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
- G01N9/26—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity by measuring pressure differences
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- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present invention relates to a kind of differential pressure fibre-optical probe structure and its differential pressure fibre optical sensors, including shell and it is placed in the intracorporal testing agency of shell, testing agency includes pressure-sensitive diaphragm, lens, displacement guide rod, elastic packing pipe, pressure-sensitive diaphragm, lens are hermetically connected with the shell, and housing cavity is isolated into two pressure cavities by pressure-sensitive diaphragm；Displacement guide rod is fixedly connected with pressure-sensitive diaphragm, and is displaced guide rod, pressure-sensitive diaphragm, lens coaxial arrangement；Being displaced between the end face and lens of guide rod free end has gap, and end face is equipped with reflectance coating；Elastic packing pipe is set on displacement guide rod, and its both ends is tightly connected with shell, pressure-sensitive diaphragm respectively；A pressure port is equipped at each pressure cavity.Differential pressure fibre-optical probe structure of the invention can be used in difference fibre optical sensor, the sensor can continuously measure the variation of fluid pressure, density, liquid level in the various storage tanks in inflammable and explosive environment, have the characteristics that measurement accuracy is high, at low cost, easy to use.
Description
Technical field
The invention belongs to technical field of optical fiber sensing more particularly to a kind of differential pressure fibre-optical probe structures and its differential pressure optical fiber to pass
Sensor.
Background technique
In petrochemical industry, quality, liquid level, the Density Detection of large-scale oil storage tank and gas station's fluid reservoir are adopted always
With the method for magnetostriction float-type, condenser type, pressure resistance type, ultrasonic wave, radar or manual measurement.Using made of electrical principles
Sensor is badly in need of one kind a possibility that the dangerous works environment such as inflammable and explosive, deep-etching has thunder and lightning, electrostatic introduces in the market
The novel sensor of essential safety replaces existing detection method.
The patent of invention of Publication No. CN104977119B discloses a kind of single-piston damp type optical fiber differential pressure pickup, institute
Stating sonde configuration to include includes shell, and shell is tubular construction, and sliding is provided with piston in shell, and the both ends of piston are respectively set
There is a spring, one end of two springs is both secured on piston, and the both ends of shell seal be fixed with end cap respectively, two springs
The other end be individually fixed on corresponding end cap, a perforation place is offered on the relative position on two end caps respectively
The probe insertion of end cap, sealed set has a light transmitting sheet respectively in two probe insertions, positioned at light transmitting sheet in two probe insertions
Outside is respectively arranged with the fibre-optical probe for being directed toward piston, and fibre-optical probe is perpendicular with the end face of piston, piston both ends and optical fiber
Pop one's head in and be respectively fixed with reflecting piece at opposite position, offered respectively on the side wall at shell both ends or on two end caps one with
The fluid through-hole of housing cavity connection, the exit end of reception optical fiber is connected with a light-sensitive element respectively in two fibre-optical probes,
Each light-sensitive element has been correspondingly connected with a signal processing module.
Although sonde configuration in above-mentioned patent of invention can be realized in the dangerous works environment such as inflammable and explosive, deep-etching
Middle work, but it uses two fibre-optical probes to carry out while measuring the Strength Changes for injecting the light at piston both ends, and according to two
The intensity difference of the light that a fibre-optical probe measures realizes the measurement of Fluid pressure, due in sensor probe, the activity space of piston
It is small, and light intensity variation of the incident ray in lesser displacement range is very small, even if two intracorporal pressure differences of chamber are not
Unanimously, piston has carried out micro movement, but the Strength Changes of light are but very small, causes measuring result error big；In addition when
By the effect of ambient pressure, piston needs to overcome frictional force sensor when occurring mobile in shell, can generate displacement, and
Mutually flowed between the intracorporal fluid of left and right chamber in order to prevent, thus piston needs be sealed with inner walls, therefore its with
Frictional force between inner walls is larger, causes the measurement accuracy of the sensor low, and reaction speed is slow, and timeliness is low etc..
Summary of the invention
In order to solve the above-mentioned problems in the prior art, the present invention provides a kind of differential pressure fibre-optical probe structure and its
Differential pressure fibre optical sensor.The technical problem to be solved in the present invention is achieved through the following technical solutions:
A kind of differential pressure fibre-optical probe structure, including shell and it is placed in the intracorporal testing agency of shell, the testing agency includes pressure
Diaphragm, lens, displacement guide rod, elastic packing pipe, the pressure-sensitive diaphragm, lens are hermetically connected with the shell, and pressure-sensitive diaphragm is by shell
Inner cavity is isolated into two pressure cavities；The displacement guide rod is fixedly connected with pressure-sensitive diaphragm, and be displaced guide rod, pressure-sensitive diaphragm, thoroughly
Mirror coaxial arrangement；There is gap between the end face and the lens of the displacement guide rod free end, the end face is equipped with reflection
Film；The elastic packing pipe is set on displacement guide rod, and its both ends is tightly connected with shell, pressure-sensitive diaphragm respectively；The shell
Body corresponds to the pressure port for being equipped at each pressure cavity and being connected to the pressure cavity.
Above-mentioned differential pressure fibre-optical probe structure, the pressure-sensitive diaphragm middle part are equipped with boss, and the displacement guide rod is installed in institute
It states in the middle part of boss, the elastic packing pipe and the boss are tightly connected.
Above-mentioned differential pressure fibre-optical probe structure, the shell and the testing agency are coaxially disposed, and the shell includes upper
Sealed support, middle sealed support and lower sealed support, the middle sealed support are used with upper sealed support, lower sealed support respectively
Sub-port structure connection, and carry out air-tightness welding.
Above-mentioned differential pressure fibre-optical probe structure, the lens are self-focusing lens, and the self-focusing lens passes through lens branch
Frame is equipped with optical fiber with sealed support sealed connection, the outside of the self-focusing lens is stated.
Above-mentioned differential pressure fibre-optical probe structure, further includes guide bar support, and the guide bar support is adopted with the upper sealed support
It is connected with sub-port structure, and carries out air-tightness welding；Edge is axially arranged in the middle part of the guide bar support passes through for the displacement guide rod
Through-hole, and guide bar support bottom end is connect with the elastic packing pipe end sealing.
Above-mentioned differential pressure fibre-optical probe structure, gas between the pressure-sensitive diaphragm and the lower sealed support and/or upper sealing
Close property welding；Two pressure ports are separately positioned on the upper sealed support and lower sealed support.
Above-mentioned differential pressure fibre-optical probe structure, the reflectivity of the reflection diaphragm are 80% ~ 95%.
Above-mentioned differential pressure fibre-optical probe structure, the shell are made of monel metal material.
Above-mentioned differential pressure fibre-optical probe structure, the pressure-sensitive diaphragm are made of high resiliency material.
A kind of differential pressure fibre optical sensor, including differential pressure fibre-optical probe structure described in any one of claims 1 to 9.
Compared with prior art the present invention has the following beneficial effects:
1, in differential pressure fibre-optical probe of the invention, diaphragm two sides form two independent pressure chambers, the stream in two pressure chambers
When body pressure has differences, diaphragm can generate deformation to deviate center, to drive displacement guide rod upper and lower in shell
Displacement, and the displacement causes guide rod to generate variation at a distance from the parallel optical interference chamber between lens, to keep optics dry
The phase for relating to intracavitary interference light generates variation, by detecting the wavelength change parameter of the light wave exported from sonde configuration, i.e. phase
Position running parameter, can be obtained the variable parameter of tested differential pressure；And testing agency of the invention is compared in the prior art using work
Plug cooperation spring, and the sonde configuration that the light intensity difference by detecting piston both ends is realized are compared, and have reaction speed fast, measurement
Precision is high, and timeliness is strong, the feature practical, high voltage performance is good.
2, differential pressure fibre optical sensor of the invention can be used to measure the sensor of pressure difference value between two fluids between container, lead to
It is usually used in measuring the pressure difference of a certain equipment or component rear and front end.The present invention is that one kind can be to various fluid reservoir liquid mediums
The differential pressure fibre optical sensor that pressure, density carry out real-time high-precision, continuously measure；Since differential pressure fibre-optical probe of the invention has
Measurement accuracy is high, reaction speed is fast, the high feature of high pressure resistant grade, thus allows differential pressure fibre optical sensor of the invention to easy
The variation of the fluid pressure, density, liquid level in various storage tanks in combustion explosive environments is continuously measured, and has measurement accuracy
The features such as high, at low cost, easy to use.
The present invention is described in further details below with reference to accompanying drawings and embodiments.
Detailed description of the invention
Fig. 1 is the schematic diagram of internal structure of differential pressure fibre-optical probe of the present invention.
In figure: 1- optical fiber；2- lens carrier；3- lens；4- pressure port；The upper sealed support of 5-；6- guide bar support；
7- elastic packing pipe；8- is displaced guide rod；Sealed support in 9-；10- pressure-sensitive diaphragm；Sealed support under 11-.
Specific embodiment
Reach the technical means and efficacy that predetermined purpose is taken for the present invention is further explained, below in conjunction with attached drawing and reality
Example is applied to a specific embodiment of the invention, structure feature and its effect, detailed description are as follows.
Embodiment 1:
In order to solve to have in the prior art sensor made of electrical principles to have in the dangerous works environment such as inflammable and explosive, deep-etching
There is measurement accuracy existing for a possibility that introducing thunder and lightning, electrostatic and existing fiber sensor low, and reaction speed is slow, when
The low technical problem of effect property, the present embodiment provides a kind of 1 sonde configurations of differential pressure optical fiber: including shell and being placed in the intracorporal detection of shell
Mechanism, the testing agency include pressure-sensitive diaphragm 10, lens 3, displacement guide rod 8, elastic packing pipe 7, the pressure-sensitive diaphragm 10, thoroughly
Mirror 3 is hermetically connected with the shell, and housing cavity is isolated into two pressure cavities by pressure-sensitive diaphragm 10；The displacement guide rod 8 and pressure
Diaphragm 10 is fixedly connected, and is displaced guide rod 8, pressure-sensitive diaphragm 10, lens 3 and is coaxially disposed；The end face of displacement 8 free end of guide rod
There is gap between the lens 3, the end face is equipped with reflectance coating；The elastic packing pipe 7 is set in displacement guide rod 8
On, and its both ends is tightly connected with shell, pressure-sensitive diaphragm 10 respectively；The shell, which corresponds at each pressure cavity, to be equipped with
The pressure port 4 being connected to the pressure cavity.
In the present embodiment, when two pressure ports 4 are connected to ambient air, Ji Liangge pressure chamber is in same gas
When under the conditions of pressure, pressure-sensitive diaphragm 10 is vertical with displacement guide rod 8, and elastic packing pipe 7 is in the raw, specifically, at this time
Pressure-sensitive diaphragm 10 does not generate deformation, and elastic packing pipe 7 was both uncompressed, and was also not stretched.
Boss is equipped in the middle part of the pressure-sensitive diaphragm 10 of the present embodiment, the displacement guide rod 8 is installed in the middle part of the boss, described
Elastic packing pipe 7 and the boss are tightly connected.Pressure-sensitive diaphragm equipped with boss is also hard-hearted film, the pressure provided with boss
Diaphragm is to guarantee that the linearity of the output characteristics of sensor is more preferable,；In addition, setting boss can also be convenient for and elastic packing pipe 7
It realizes sealing welding, that is, simplifies welding difficulty；It is tightly connected by boss and elastic packing pipe 7, can also increase holding for sensor
Compressive Strength.
Preferably, the shell and the testing agency are coaxially disposed, and the shell includes upper sealed support 5, middle sealing
Bracket 9 and lower sealed support 11, the middle sealed support 9 use sub-port structure with upper sealed support 5, lower sealed support 11 respectively
Connection, and air-tightness welding is carried out in junction, to increase the air-tightness of sensor.Above-mentioned upper sealed support 5, middle sealing branch
Frame 9 and lower sealed support 11 are cylindrical shell structure.And the preferably described shell is made of monel metal material.
In addition, the pressure-sensitive diaphragm 10 of the present embodiment is preferably made of high resiliency monel metal material, and preferably
The diameter of pressure-sensitive diaphragm 10 is 6 mm-18mm, with a thickness of 200 μm~600 μm.
It further include guide bar support 6, the guide bar support 6 is connect with the upper sealed support 5 using sub-port structure, and even
It meets place and carries out air-tightness welding；The 6 middle part edge of guide bar support is axially arranged with the through-hole passed through for the displacement guide rod 8, and leads
6 bottom end of bar bracket is connect with 7 end sealing of elastic packing pipe.It should be pointed out that guide bar support 6 and displacement guide rod 8 it
Between have and be slidably matched, fit clearance of the general refers to the gap within 10um.
Further, the embodiment of the present invention lens 3 are self-focusing lens, and the self-focusing lens passes through 3 bracket 2 of lens
It is tightly connected with upper sealed support 5 is stated, the outside of the self-focusing lens connects optical fiber 1.Optical fiber and self-focusing lens pass through essence
The mode that close coupling is closed is coupled on self-focusing lens；The diameter of self-focusing lens is 2~3mm；Precision coupling is optical device
Technology when connection, glued to carrying out after optical fiber and lens alignment by optical platform, general optical fiber is connect with lens to be adopted
With optics gluing knot.
It is preferred that the diameter of the self-focusing lens of the present embodiment is 2 ~ 3mm.Self-focusing lens Grin Lens is also known as gradient change
Index lens 3 refer to that its index distribution is the column optical lens 3 of radially gradual change；With focusing and imaging function.
In addition, air-tightness between the embodiment of the present invention pressure-sensitive diaphragm 10 and the lower sealed support 11 and/or upper sealing
Welding；There is a pressure port 4 on upper sealed support 5, pressure port 4, and two pressure ends also are provided on lower sealed support 11
Mouth 4 is located at 10 two sides of pressure-sensitive diaphragm.The cavity of enclosure interior is divided into two independent pressure cavities by pressure-sensitive diaphragm 10, and every
One cavity corresponds to a pressure port 4.Two independent pressures that the absolute value of diaphragm deformation is 0 when composition pressure-bearing is identical in this way
Chamber, Fluid pressure are respectively acting on the top and lower part of pressure-sensitive diaphragm 10, when there is difference in the pressure of 10 two sides of pressure-sensitive diaphragm,
The displacement guide rod 8 designed in two pressure chambers is caused to generate micro-displacement.
It is preferred that pressure-sensitive diaphragm 10 be arranged between upper sealed support 5 and lower sealed support 11, and respectively with upper sealed support
5, lower 11 sealing welding of sealed support, 10 lower part of pressure-sensitive diaphragm and lower sealed support 11 form a pressure chamber at this time, and pressure membrane
Another pressure chamber is formed between 10 top of piece and middle sealed support 9, upper sealed support 5.
In addition, in the reflectance coating of one high reflectance of guide rod top design, preferably the reflectivity of the reflectance coating be 80~
95%；The reflectance coating constitutes a parallel variable optical interference cavity with self-focusing lens, when ambient pressure acts on this two pressures
When power cavity, with the variation of ambient pressure difference corresponding change occurs for the lightwave signal of 1 sonde configuration of differential pressure optical fiber output.Pass through
The light wave running parameter for detecting the output of 1 sonde configuration of differential pressure optical fiber, can calculate the variable parameter of tested differential pressure.
Laser welding or vacuum plasma welding can be used, so that airtight in described air-tightness welding in the present embodiment
Property or bearing capacity reach 3Mpa ~ 5Mpa.
The present embodiment also discloses a kind of differential pressure fibre optical sensor, which includes the above-mentioned probe knot of differential pressure optical fiber 1
Structure is provided with input optical fibre 1 and output optical fibre 1 on the lens 3 of 1 sonde configuration of differential pressure optical fiber.
The optical fiber 1 of the present embodiment can be the universal optical fibre 1 of communication industry, preferably indifferent high temperature resistant armouring silica fibre 1.
Differential pressure fibre optical sensor of the invention is mainly made of the consistent independent pressure cavity of two compression resistances, and pressure can divide
Not Tong Guo pressure port 4 act on two pressure cavities, when difference occurs in the pressure at two ports, cause in two pressure
The micro-displacement guide rod 8 designed in cavity generates micro-displacement.In the reflectance coating of one high reflectance of guide rod top design, reflectivity exists
Between 80~95%, which constitutes a parallel F-P cavity with the self-focusing lens in sensor structure, works as ambient pressure
When acting on two pressure cavities of the sensor, the lightwave signal of sensor output occurs with the variation of ambient pressure difference
Corresponding change.The light wave running parameter exported by detection sensor, can calculate the variable parameter of tested differential pressure.
Here is a kind of concrete application of differential pressure fibre optical sensor of the invention:
Two pressure ports 4 of the differential pressure fibre optical sensor of the present embodiment are respectively arranged in taking for alternate certain distance outside storage tank
On pressure point (0~300mm), by measuring two static pressures P1, P2 of storage tank, the density of available fluid to be measuredAre as follows:
In formulaP1, P2For the intracorporal pressure of liquid,For fluid density,gFor acceleration of gravity,HFor the depth that certain is put in liquid.When
The density of liquidOne timing, by detecting the intracorporal pressure of liquid, so that it may learn pressureF。
By above-mentioned technical proposal and principle it is found that the present embodiment is using convex flexible sheet shape in shell in an independence
At two independent pressure cavities, 1 resonant cavity of variable optical fiber of interaction is formed by displacement guide rod 8 and self-focusing lens
Optical facilities, when two point pressures in tested container act on two pressure ports 4 of the sensor, the pressure membrane of sensor
Piece 10 will receive two pressure collective effects and generate deformation, cause to be displaced the generation mechanical displacement of guide rod 8, due in optical facilities
Self-focusing lens and 3 bracket 2 of lens be fixed on shell, therefore be incident on guide rod body by optical fiber 1 from self-focusing lens
Reflected light can be with guide rod through being displaced the phase energy of the reflectance coating light that is reflected into self-focusing lens end face of 8 free end of guide rod
The variation of micro-displacement between self-focusing lens and change, the phase change of this light is the pressure because acting on sensor both ends
Power difference causes the spacing of micro-displacement guide rod 8 and self-focusing lens to change and change, therefore the phase of 1 emergent light of detection fiber
Variation will continuously monitor the variation of the pressure of tested tank in-vivo medium.
Due to the present invention by measurement light phase change, the variation of reaction pressure difference, and it is this variation be continuously,
Therefore it has high measurement accuracy and multiple use.
In addition, since the pressure signal that provides of the present invention is continuous phase changing capacity, input, the output of signal be all by
Optical fiber 1 transmits, therefore sensor, not by the interference of extraneous electromagnetic signals, fibre optical sensor is a passive device, and sensor passes
Defeated signal is that there is no electricity for optical medium, therefore fibre optical sensor is for essential safe type sensor.Therefore this device can be with
Measurement applied to harmful, inflammable, explosive fluid pressure density.The present invention can establish networked data measurement by computer
Acquisition system has very big so as to implement local area networkization monitoring to large-scale oil depot, fluid chemical raw material storage base etc.
Practicability.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist
Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention
Protection scope.
Claims (10)
1. a kind of differential pressure fibre-optical probe structure, including shell and it is placed in the intracorporal testing agency of shell, which is characterized in that the detection
Mechanism includes pressure-sensitive diaphragm (10), lens (3), displacement guide rod (8), elastic packing pipe (7), the pressure-sensitive diaphragm (10), lens
(3) it is hermetically connected with the shell, housing cavity is isolated into two pressure cavities by pressure-sensitive diaphragm (10)；The displacement guide rod (8) with
Pressure-sensitive diaphragm (10) is fixedly connected, and is displaced guide rod (8), pressure-sensitive diaphragm (10), lens (3) coaxial arrangement；The displacement guide rod
(8) there is gap, the end face is equipped with reflectance coating between the end face of free end and the lens (3)；The elastic packing pipe
(7) it is set in displacement guide rod (8), and its both ends is tightly connected with shell, pressure-sensitive diaphragm (10) respectively；The shell corresponds to
The pressure port (4) being connected to the pressure cavity is equipped at each pressure cavity.
2. differential pressure fibre-optical probe structure according to claim 1, which is characterized in that be equipped in the middle part of the pressure-sensitive diaphragm (10)
Boss, the displacement guide rod (8) are installed in the middle part of the boss, and the elastic packing pipe (7) and the boss are tightly connected.
3. differential pressure optical fiber (1) sonde configuration according to claim 1 or 2, which is characterized in that the shell and the detection
Mechanism coaxial arrangement, the shell includes upper sealed support (5), middle sealed support (9) and lower sealed support (11), it is described in it is close
Envelope bracket (9) is connect with upper sealed support (5), lower sealed support (11) using sub-port structure respectively, and carries out air-tightness welding.
4. differential pressure fibre-optical probe structure according to claim 3, which is characterized in that the lens (3) are self-focusing lens,
The self-focusing lens is by lens (3) bracket (2) and states sealed support (5) sealed connection, outside the self-focusing lens
Side is equipped with optical fiber (1).
5. differential pressure optical fiber (1) sonde configuration according to claim 3, which is characterized in that further include guide bar support (6), institute
It states guide bar support (6) and is connect with the upper sealed support (5) using sub-port structure, and carry out air-tightness welding；The guide rod branch
Edge is axially arranged with the through-hole passed through for displacement guide rod (8) in the middle part of frame (6), and guide bar support (6) bottom end and the elasticity are close
The connection of tube sealing (7) end sealing.
6. differential pressure fibre-optical probe structure according to claim 3, which is characterized in that the pressure-sensitive diaphragm (10) and it is described under
Air-tightness is welded between sealed support (11) and/or upper sealing；Two pressure ports (4) are separately positioned on the upper sealing
On bracket (5) and lower sealed support (11).
7. differential pressure fibre-optical probe structure according to claim 1, which is characterized in that the reflectivity of the reflection diaphragm is
80%~95%。
8. differential pressure fibre-optical probe structure described according to claim 1 ~ any one of 7, which is characterized in that the shell is using illiteracy
Alloy material is made like this.
9. differential pressure fibre-optical probe structure described according to claim 1 ~ any one of 7, which is characterized in that the pressure-sensitive diaphragm
(10) it is made of high resiliency monel metal material.
10. a kind of differential pressure fibre optical sensor, which is characterized in that including differential pressure optical fiber (1) described in any one of claims 1 to 9
Sonde configuration.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811599062.3A CN109520665A (en) | 2018-12-26 | 2018-12-26 | A kind of differential pressure fibre-optical probe structure and its differential pressure fibre optical sensor |
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| CN201811599062.3A CN109520665A (en) | 2018-12-26 | 2018-12-26 | A kind of differential pressure fibre-optical probe structure and its differential pressure fibre optical sensor |
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| CN109520665A true CN109520665A (en) | 2019-03-26 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110220636A (en) * | 2019-07-05 | 2019-09-10 | 中国计量大学 | A kind of capillary communication tubular type differential pressure pick-up and measurement method |
| CN112903156A (en) * | 2019-12-03 | 2021-06-04 | 哈尔滨工业大学 | Large-scale high-speed rotation equipment axial stress measurement method based on non-contact propagation |
-
2018
- 2018-12-26 CN CN201811599062.3A patent/CN109520665A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110220636A (en) * | 2019-07-05 | 2019-09-10 | 中国计量大学 | A kind of capillary communication tubular type differential pressure pick-up and measurement method |
| CN112903156A (en) * | 2019-12-03 | 2021-06-04 | 哈尔滨工业大学 | Large-scale high-speed rotation equipment axial stress measurement method based on non-contact propagation |
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